A vertical furnace body mounting tool and a vertical furnace system

Abstract

A vertical furnace body mounting tool and a vertical furnace system relate to the technical field of semiconductor equipment. The vertical furnace body mounting tool comprises a base, a lifting module and a tool tray. The lifting module is arranged on the base, and the tool tray is rotationally connected with the output end of the lifting module and used for supporting the inner tube of the vertical furnace body. An infrared emitter for emitting infrared rays is arranged on the tool tray. The outer tube of the vertical furnace body is provided with an infrared receiver for receiving infrared rays corresponding to the infrared emitter. The tool tray rotates in a driven horizontal plane until the infrared receiver receives the infrared rays emitted by the infrared emitter. The lifting module drives the tool tray to drive the inner tube to move linearly to approach the outer tube and be mounted in the outer tube. The vertical furnace body mounting tool can improve the alignment accuracy and assembly efficiency of the inner tube installation, and improve the assembly reliability.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and more specifically, to a vertical furnace body mounting fixture and a vertical furnace system. Background Technology

[0002] Vertical furnaces are key equipment in semiconductor manufacturing processes such as oxidation, diffusion, and chemical vapor deposition. Their reaction chambers typically consist of an outer and inner quartz tube. The inner quartz tube, serving as the direct reaction environment for the wafer, requires regular maintenance and replacement. Due to the fragility of this component and its precise installation position, its disassembly and assembly must be performed using specialized tooling.

[0003] In existing disassembly and assembly methods, the tooling needs to support the inner tube and align it with the mounting holes on the furnace body. This process relies entirely on the operator's visual judgment, manually and repeatedly adjusting the tooling angle, and requiring multiple attempts to rotate the handle to reach the designated position. This manual operation method has drawbacks such as poor alignment accuracy and cumbersome operation. It is not only inefficient, but also highly prone to scratching or contaminating the quartz inner tube during debugging, and may even cause it to break, thereby increasing production costs and the risk of equipment downtime. Utility Model Content

[0004] The purpose of this utility model is to provide a vertical furnace body installation fixture and a vertical furnace system, which can improve the alignment accuracy and assembly efficiency of the inner tube installation and improve the assembly reliability.

[0005] The embodiments of this utility model are implemented as follows: In one aspect, this utility model provides a vertical furnace body installation fixture, including a base, a lifting module, and a fixture tray. The lifting module is disposed on the base, and the fixture tray is rotatably connected to the output end of the lifting module for supporting the inner tube of the vertical furnace body. An infrared transmitter for emitting infrared rays is disposed on the fixture tray. An infrared receiver for receiving infrared rays is disposed on the outer tube of the vertical furnace body corresponding to the infrared transmitter. The fixture tray is driven to rotate in a horizontal plane until the infrared receiver receives the infrared rays emitted by the infrared transmitter. The lifting module drives the fixture tray to move the inner tube in a straight line to approach the outer tube and install it inside the outer tube.

[0006] Optionally, the vertical furnace body mounting fixture also includes a rotation adjustment mechanism, which is connected to the fixture tray drive and is used to drive the fixture tray to rotate in the horizontal plane.

[0007] Optionally, the vertical furnace body mounting fixture also includes a control unit. The signal input terminal of the control unit is communicatively connected to the infrared receiver, and the control output terminal of the control unit is electrically connected to the rotary adjustment mechanism. When the infrared receiver receives infrared rays emitted by the infrared transmitter, it can send an alignment signal to the control unit, and the control unit controls the start and stop of the rotary adjustment mechanism according to the alignment signal.

[0008] Optionally, the vertical furnace body mounting fixture also includes an infrared ranging sensor, which is set on the fixture tray and used to measure the relative distance between the fixture tray and the outer tube.

[0009] Optionally, the infrared ranging sensor is communicatively connected to the signal input terminal of the control unit, and the control output terminal of the control unit is electrically connected to the lifting module; the infrared ranging sensor measures the relative distance between the tooling tray and the outer tube and outputs an interval signal to the control unit, and the control unit drives the lifting module to start and stop according to the interval signal.

[0010] Optionally, a limiting groove is provided on the tooling tray, the limiting groove is adapted to the shape of the inner tube wall, and the inner tube is used to engage with the limiting groove.

[0011] Optionally, the vertical furnace body installation fixture also includes a rotating platform, which is rotatably connected to the output end of the lifting module; the fixture tray is fixedly installed on the rotating platform.

[0012] Optionally, the rotation adjustment mechanism is a servo motor.

[0013] Another aspect of this utility model provides a vertical furnace system, including a vertical furnace body and a vertical furnace body mounting fixture; the vertical furnace body includes an outer tube and an inner tube, and the inner tube is assembled inside the outer tube by the vertical furnace body mounting fixture.

[0014] Optionally, the vertical furnace system also includes a frame, which includes a first support plate and a second support plate spaced apart in the vertical direction. The first support plate is used to support the outer tube, and the mounting hole of the outer tube faces the second support plate. The second support plate is used to install the vertical furnace body mounting fixture. The inner tube is assembled into the mounting hole of the outer tube through the vertical furnace body mounting fixture.

[0015] The beneficial effects of this utility model include: This application provides a vertical furnace body installation fixture, including a base, a lifting module, and a fixture tray. The lifting module is mounted on the base to ensure that the fixture will not shift or shake during installation, thus guaranteeing the stability and safety of the installation operation. The fixture tray is rotatably connected to the output end of the lifting module and is used to support the inner tube of the vertical furnace body. By controlling the lifting module, the fixture tray supporting the inner tube can be precisely adjusted to a height position that matches the mounting hole of the outer tube of the vertical furnace body. Compared to traditional methods that rely entirely on manual height adjustment, the lifting module significantly improves the accuracy and efficiency of height adjustment. When the inner tube needs to be aligned with the outer tube, the angle of the inner tube can be easily adjusted by rotating the tooling tray, making it easier to align with the mounting hole of the outer tube. The tooling tray is equipped with an infrared transmitter for emitting infrared light; the outer tube is equipped with an infrared receiver for receiving infrared light corresponding to the infrared transmitter. The tooling tray is driven to rotate in the horizontal plane until the infrared receiver receives the infrared light emitted by the infrared transmitter, indicating that the inner tube on the tooling tray is aligned with the outer tube in the horizontal direction. This avoids the tedious process of repeatedly trying to determine alignment in existing technologies, greatly improving installation efficiency. At this point, the lifting module drives the tooling tray to move the inner tube in a straight line to approach and install it inside the outer tube. This process, coordinated by the lifting module, precise control, and rotation of the tooling tray, ensures the smoothness and accuracy of the inner tube's movement during installation, preventing damage to the quartz inner and outer tubes caused by shaking or misalignment during installation. This improves installation quality and efficiency, and reduces equipment downtime and maintenance costs. The aforementioned vertical furnace body installation fixture can improve the alignment accuracy and assembly efficiency of the inner tube installation, and enhance assembly reliability. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 One of the structural schematic diagrams of the vertical furnace body installation fixture provided in the embodiments of this utility model; Figure 2 A second schematic diagram of the structure of the vertical furnace body installation fixture provided in this embodiment of the utility model; Figure 3 The third schematic diagram of the vertical furnace body installation fixture provided in this embodiment of the utility model; Figure 4 Fourth schematic diagram of the structure of the vertical furnace body installation fixture provided in this embodiment of the utility model; Figure 5This is a schematic diagram showing the alignment of the inner tube and the outer tube in an embodiment of the present invention.

[0018] Icons: 100-Vertical furnace body installation fixture; 110-Base; 120-Lifting module; 130-Tooling tray; 140-Infrared transmitter; 150-Infrared receiver; 160-Rotation adjustment mechanism; 170-Infrared ranging sensor; 180-Rotation gimbal; 200-Inner tube; 300-Outer tube. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0020] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0021] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0022] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the utility model product is in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0023] Furthermore, terms such as "horizontal" and "vertical" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0024] Please refer to Figure 1This embodiment provides a vertical furnace body installation fixture 100, including a base 110, a lifting module 120, and a fixture tray 130. The lifting module 120 is disposed on the base 110, and the fixture tray 130 is rotatably connected to the output end of the lifting module 120 for supporting the inner tube 200 of the vertical furnace body. An infrared transmitter 140 for emitting infrared rays is disposed on the fixture tray 130. An infrared receiver 150 for receiving infrared rays is disposed on the outer tube 300 of the vertical furnace body corresponding to the infrared transmitter 140. When the inner tube 200 and the outer tube 300 have a preset interval, the fixture tray 130 is driven to rotate in the horizontal plane until the infrared receiver 150 receives the infrared rays emitted by the infrared transmitter 140. At this time, the lifting module 120 drives the fixture tray 130 to move the inner tube 200 in a straight line to approach the outer tube 300 and install it inside the outer tube 300.

[0025] Specifically, the base 110, serving as the bearing foundation of the tooling, provides stable support for the quartz inner tube 200, avoiding the risk of collision of the inner tube 200 due to tooling displacement during installation, and providing a stable physical prerequisite for subsequent precise operation. The lifting module 120 can be a component such as a drive cylinder that can drive the inner tube 200 to make linear reciprocating motion, thereby adjusting the relative distance between the inner tube 200 and the outer tube 300. Of course, in addition to the drive cylinder, other components, such as electric push rods, can also be used. This application does not impose any restrictions on the specific type of the lifting module 120. The lifting module 120 replaces the traditional method of relying on manual lifting or simple mechanical height adjustment, and can achieve precise vertical displacement control through mechanical transmission, quickly adjusting the inner tube 200 to a height that matches the installation notch of the outer tube 300, greatly improving the efficiency and accuracy of height positioning.

[0026] The rotatable connection between the tooling tray 130 and the output end of the lifting module 120 allows the tooling tray 130 to rotate flexibly in the plane around the central axis of the output end, reducing the difficulty of operation. During rotation, the angle of the infrared transmitter 140 relative to the infrared receiver 150 can be adjusted to ensure precise alignment of the inner tube 200 and the outer tube 300 during assembly.

[0027] In the specific operation process, the tooling tray 130 can be rotated manually, electrically, or pneumatically to adjust the angle between the infrared transmitter 140 and the infrared receiver 150, so that the infrared receiver 150 receives the infrared rays emitted by the infrared transmitter 140, achieving a rough alignment of the installation angles of the inner tube 200 and the outer tube 300. Figure 5As shown; after alignment, the lifting module 120 drives the tooling tray 130 to move the inner tube 200 in a linear motion to approach the outer tube 300. When the lifting module 120 moves the inner tube 200 to a preset distance from the outer tube 300, it drives the tooling tray 130 to rotate again, so that the infrared receiver 150 receives the infrared rays emitted by the infrared transmitter 140, achieving precise alignment of the installation angles of the inner tube 200 and the outer tube 300. At this time, the lifting module 120 continues to drive the tooling tray 130 to move the inner tube 200 in a linear motion until it is installed inside the outer tube 300. The structure of the inner tube 200 and the structure inside the outer tube 300 are perfectly matched at this angle position, achieving a stable connection. This setting can further improve the assembly accuracy and reliability of the inner tube 200 and the outer tube 300. The infrared transmitter 140 can be set on the side wall of the tooling tray 130 to avoid structural interference with the inner tube 200.

[0028] The aforementioned vertical furnace body installation fixture 100 includes a base 110, a lifting module 120, and a fixture tray 130. The lifting module 120 is mounted on the base 110 to ensure that the fixture will not shift or shake during installation, thus guaranteeing the stability and safety of the installation operation. The fixture tray 130 is rotatably connected to the output end of the lifting module 120 and is used to support the inner tube 200 of the vertical furnace body. By controlling the lifting module 120, the fixture tray 130 supporting the inner tube 200 can be precisely adjusted to a height position that matches the mounting hole of the outer tube 300 of the vertical furnace body. Compared to traditional methods that rely entirely on manual height adjustment, the lifting module 120 significantly improves the accuracy and efficiency of height adjustment. When the inner tube 200 needs to be docked with the outer tube 300, the angle of the inner tube 200 can be easily adjusted by rotating the tooling tray 130, making it easier to align with the mounting holes of the outer tube 300. The tooling tray 130 is equipped with an infrared transmitter 140 for emitting infrared rays. The outer tube 300 is equipped with an infrared receiver 150 for receiving infrared rays corresponding to the infrared transmitter 140. The inner tube 200 and the outer tube 300... When there is a preset interval, the tooling tray 130 is driven to rotate in the horizontal plane until the infrared receiver 150 receives the infrared light emitted by the infrared transmitter 140, indicating that the inner tube 200 on the tooling tray 130 is aligned with the outer tube 300 in the horizontal direction. This avoids the tedious process of repeatedly trying to judge whether the alignment is correct in the prior art, and greatly improves the installation efficiency. At this time, the lifting module 120 drives the tooling tray 130 to move the inner tube 200 in a straight line to approach the outer tube 300 and install it inside the outer tube 300. This process, coordinated by the lifting module 120 and the precise control and rotation of the tooling tray 130, ensures the smoothness and accuracy of the movement of the inner tube 200 during the installation process, avoids damage to the quartz inner tube 200 and outer tube 300 caused by shaking or offset during the installation process, improves the installation quality and efficiency, and reduces equipment downtime and maintenance costs. The above-mentioned vertical furnace body installation tooling 100 can improve the alignment accuracy and assembly efficiency of the inner tube 200 installation, and improve the assembly reliability.

[0029] Optionally, a limiting groove (not shown in the figure) is provided on the tooling tray 130. The limiting groove is adapted to the shape of the inner tube 200 wall, and the inner tube 200 is used to engage with the limiting groove. It should be noted that this application does not impose any restrictions on the specific shape of the limiting groove. Preferably, the limiting groove has a rectangular structure. Correspondingly, the inner tube 200 wall is provided with a lug. The structure of the lug is adapted to the structure of the limiting groove. The lug can be engaged in the limiting groove, so that the inner tube 200 is stably connected to the tooling tray 130 through the limiting groove, reducing the risk of component loosening or falling off, and further improving the connection stability. At the same time, it also avoids the possibility of reduced installation accuracy due to displacement of the inner tube 200 during assembly, improving assembly efficiency and reliability.

[0030] In one possible implementation of this application, such as Figure 3 As shown, the vertical furnace body mounting fixture 100 also includes a rotating platform 180, which is rotatably connected to the output end of the lifting module 120; the fixture tray 130 is fixedly mounted on the rotating platform 180. The rotating platform 180 further enhances the support for the inner tube 200, and the connection between the inner tube 200 and the rotating platform 180 via the fixture tray 130 further improves the stability of its assembly and rotation process, reducing the risk of shaking and displacement.

[0031] In one possible implementation of this application, such as Figure 4 As shown, the vertical furnace body mounting fixture 100 also includes a rotation adjustment mechanism 160, which is driven by the fixture tray 130 to rotate in the horizontal plane. The rotation adjustment mechanism 160 improves assembly flexibility, enabling automatic rotational alignment of the inner tube 200 and outer tube 300, meeting the automation requirements of semiconductor production lines demanding mass production and high precision. Furthermore, compared to manually driving the fixture tray 130, the rotation adjustment mechanism 160 integrates a power source, a reduction mechanism, and a control module, achieving stable and controllable rotational movement while improving rotational accuracy, further enhancing the precision of the installation positions of the inner tube 200 and outer tube 300.

[0032] Optionally, the rotary adjustment mechanism 160 is a servo motor. Of course, besides a servo motor, the rotary drive mechanism can also be a stepper motor, etc., to achieve high-precision rotation angle control. It should be noted that this application does not impose any restrictions on the specific type of the rotary adjustment mechanism 160; in the actual assembly process, the rotary adjustment mechanism 160 can be adjusted accordingly based on actual needs.

[0033] In one embodiment of this application, the vertical furnace body mounting fixture 100 further includes a control unit. The signal input terminal of the control unit is communicatively connected to the infrared receiver 150, and the control output terminal of the control unit is electrically connected to the rotary adjustment mechanism 160. When the infrared receiver 150 receives infrared rays emitted by the infrared transmitter 140, it can send an alignment signal to the control unit. The control unit controls the start and stop of the rotary adjustment mechanism 160 according to the alignment signal.

[0034] Specifically, the control unit can achieve fully automatic closed-loop control of alignment and rotation, improving installation flexibility and eliminating the need for operators to visually observe the hole alignment or manually start and stop the rotating parts, thus greatly improving installation efficiency.

[0035] When the infrared receiver 150 receives infrared light emitted by the infrared transmitter 140, indicating that the inner tube 200 and outer tube 300 are accurately positioned, the infrared receiver 150 sends an alignment signal to the control unit. The control unit then stops the rotation adjustment mechanism 160 based on this signal, causing the inner tube 200 to stop rotating. If the infrared receiver 150 does not receive infrared light emitted by the infrared transmitter 140, the control unit continues to control the rotation adjustment mechanism 160 to drive the inner tube 200 to rotate until the infrared receiver 150 receives infrared light emitted by the infrared transmitter 140, and the inner tube 200 and outer tube 300 are accurately aligned.

[0036] In one possible implementation of this application, such as Figure 2 As shown, the vertical furnace body mounting fixture 100 also includes an infrared ranging sensor 170, which is mounted on the fixture tray 130 and used to measure the relative distance between the fixture tray 130 and the outer tube 300.

[0037] Specifically, the infrared ranging sensor 170 uses the optical measurement principle, which can acquire distance data without physical contact with the outer tube 300, thus avoiding the scratches and dust pollution problems caused by physical contact between the inner tube 200 and the outer tube 300.

[0038] When the lifting module 120 raises or lowers the tooling tray 130, the infrared ranging sensor 170 can measure the relative distance between the tooling tray 130 and the outer tube 300 in real time, thus obtaining the relative distance between the inner tube 200 and the outer tube 300 in real time. Operators can use the relative distance between the inner tube 200 and the outer tube 300, in conjunction with the rotation of the tooling tray 130, to perform coarse and fine alignment of the installation positions of the inner tube 200 and the outer tube 300 at appropriate locations, making the alignment process more flexible.

[0039] Optionally, the infrared ranging sensor 170 is communicatively connected to the signal input terminal of the control unit, and the control output terminal of the control unit is electrically connected to the lifting module 120; the infrared ranging sensor 170 measures the relative distance between the tooling tray 130 and the outer tube 300 and outputs an interval signal to the control unit, and the control unit drives the lifting module 120 to start and stop according to the interval signal.

[0040] This collaborative logic enables fully automatic control of the lifting module 120's start and stop, eliminating the need for manual operation via buttons or handles. Traditional manual operation requires repeated observation of the distance between the inner tube 200 and the outer tube 300 and frequent adjustments to the lifting switch, which is not only time-consuming and labor-intensive but also prone to collisions due to misjudgment. The automated closed-loop system, however, can precisely control start and stop via preset distance thresholds, reducing manual intervention for each lifting operation to zero and significantly improving installation efficiency.

[0041] When the infrared ranging sensor 170 measures the relative distance between the tooling tray 130 and the outer tube 300 and outputs an interval signal to the control unit, the control unit receives the interval signal and compares the real-time interval with the preset interval. If the real-time interval is greater than the preset interval, the lifting module 120 is driven to continue to reduce the relative distance between the tooling tray 130 and the outer tube 300; if the real-time interval is less than or equal to the preset interval, the lifting module 120 is stopped. At this time, the relative distance between the outer tube 300 and the inner tube 200 is fixed, and the inner tube 200 and the outer tube 300 can be coarsely or finely aligned by driving the tooling tray 130 to rotate.

[0042] In another aspect, this utility model provides a vertical furnace system, including a vertical furnace body and a vertical furnace body mounting fixture 100; the vertical furnace body includes an outer tube 300 and an inner tube 200, the inner tube 200 being assembled inside the outer tube 300 by the vertical furnace body mounting fixture 100. The specific structure and beneficial effects of the vertical furnace body mounting fixture 100 have been described in detail above and will not be repeated here.

[0043] The vertical furnace system eliminates the tedious manual process of repeatedly checking alignment required in existing technologies, significantly improving installation efficiency. Furthermore, it reduces the likelihood of damage to the quartz inner tube 200 and outer tube 300 due to shaking or misalignment during installation, enhancing installation quality and efficiency while minimizing downtime and maintenance costs. The vertical furnace system exhibits high alignment accuracy, high assembly efficiency, and excellent assembly reliability for its inner tube 200 and outer tube 300.

[0044] Optionally, the vertical furnace system also includes a frame (not shown in the figure), which includes a first support plate and a second support plate spaced apart in the vertical direction. The first support plate is used to support the outer tube 300, and the mounting hole of the outer tube 300 is set towards the second support plate. The second support plate is used to set the vertical furnace body mounting fixture 100. The inner tube 200 is assembled into the mounting hole of the outer tube 300 through the vertical furnace body mounting fixture 100.

[0045] Specifically, the frame structure allows the outer tube 300, inner tube 200, and vertical furnace body mounting fixture 100 to be placed relatively stably. A through hole is provided vertically on the first support plate, allowing the outer tube 300 to be placed on the first support plate so that its mounting hole and the through hole are coaxial and interconnected. The inner tube 200 passes through the through hole and the mounting hole sequentially via the vertical furnace body mounting fixture 100 and is finally assembled into the mounting hole. Alternatively, in addition to the above arrangement, the outer tube 300 can also be secured within the through hole to provide lateral restraint. The inner tube 200 passes through the mounting hole via the vertical furnace body mounting fixture 100 and is finally assembled into the mounting hole.

[0046] The above description is merely an optional embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

[0047] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable way without contradiction. In order to avoid unnecessary repetition, this utility model will not describe the various possible combinations separately.

Claims

1. A vertical furnace body installation fixture, characterized in that, The system includes a base (110), a lifting module (120), and a tooling tray (130). The lifting module (120) is mounted on the base (110), and the tooling tray (130) is rotatably connected to the output end of the lifting module (120) to support the inner tube (200) of the vertical furnace body. An infrared transmitter (140) for emitting infrared rays is mounted on the tooling tray (130). An infrared receiver (150) for receiving infrared rays is mounted on the outer tube (300) of the vertical furnace body corresponding to the infrared transmitter (140). The tooling tray (130) is driven to rotate in the horizontal plane until the infrared receiver (150) receives the infrared rays emitted by the infrared transmitter (140). The lifting module (120) drives the tooling tray (130) to move the inner tube (200) in a straight line to approach the outer tube (300) and install it inside the outer tube (300).

2. The vertical furnace body installation fixture according to claim 1, characterized in that, The vertical furnace body installation fixture (100) also includes a rotation adjustment mechanism (160), which is drivenly connected to the fixture tray (130) and is used to drive the fixture tray (130) to rotate in the horizontal plane.

3. The vertical furnace body installation fixture according to claim 2, characterized in that, The vertical furnace body installation fixture (100) also includes a control unit. The signal input terminal of the control unit is communicatively connected to the infrared receiver (150), and the control output terminal of the control unit is electrically connected to the rotary adjustment mechanism (160). When the infrared receiver (150) receives infrared rays emitted by the infrared transmitter (140), it can send an alignment signal to the control unit. The control unit controls the start and stop of the rotary adjustment mechanism (160) according to the alignment signal.

4. The vertical furnace body installation fixture according to claim 3, characterized in that, The vertical furnace body installation fixture (100) also includes an infrared ranging sensor (170), which is set on the fixture tray (130) and is used to measure the relative distance between the fixture tray (130) and the outer tube (300).

5. The vertical furnace body installation fixture according to claim 4, characterized in that, The infrared ranging sensor (170) is communicatively connected to the signal input terminal of the control unit, and the control output terminal of the control unit is electrically connected to the lifting module (120). The infrared ranging sensor (170) measures the relative distance between the tooling tray (130) and the outer tube (300) and outputs an interval signal to the control unit. The control unit drives the lifting module (120) to start and stop according to the interval signal.

6. The vertical furnace body installation fixture according to claim 1, characterized in that, The tooling tray (130) has a limiting groove, which is adapted to the shape of the inner tube (200) wall, and the inner tube (200) is used to engage with the limiting groove.

7. The vertical furnace body installation fixture according to claim 2, characterized in that, The vertical furnace body installation fixture (100) also includes a rotating platform (180), which is rotatably connected to the output end of the lifting module (120); the fixture tray (130) is fixedly installed on the rotating platform (180).

8. The vertical furnace body installation fixture according to claim 2, characterized in that, The rotary adjustment mechanism (160) is a servo motor.

9. A vertical furnace system, characterized in that, It includes a vertical furnace body and a vertical furnace body installation fixture (100) as described in any one of claims 1-8; the vertical furnace body includes an outer tube (300) and an inner tube (200), and the inner tube (200) is assembled inside the outer tube (300) by the vertical furnace body installation fixture (100).

10. The vertical furnace system according to claim 9, characterized in that, The vertical furnace system also includes a frame, which includes a first support plate and a second support plate spaced apart in the vertical direction. The first support plate is used to support the outer tube (300), and the mounting hole of the outer tube (300) is set towards the second support plate. The second support plate is used to set the vertical furnace body mounting fixture (100). The inner tube (200) is assembled into the mounting hole of the outer tube (300) through the vertical furnace body mounting fixture (100).

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