Integrated semiconductor vacuum unit
CN309064940SActive Publication Date: 2025-01-10SHENZHEN HENGCAI ELECTROMECHANICAL EQUIP CO LTD
View PDF 0 Cites 0 Cited by
Patent Information
- Application Number
- CN202430310884.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-24
- Publication Date
- 2025-01-10
- Estimated Expiration
- 2039-05-24
Smart Images

Figure 000001_ABST
Abstract
1. The name of the product of this design: integrated semiconductor vacuum unit. 2. Purpose of the product of this design: This design is used for adsorption and fixation in the semiconductor manufacturing process. 3. The design key point of this appearance design product lies in the shape. 4. The picture or photo that best illustrates the design points: three-dimensional picture.
Need to check novelty before this filing date? Find Prior Art