Integrated semiconductor vacuum unit

CN309064940SActive Publication Date: 2025-01-10SHENZHEN HENGCAI ELECTROMECHANICAL EQUIP CO LTD
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Patent Information

Application Number
CN202430310884.5
Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
Filing Date
2024-05-24
Publication Date
2025-01-10
Estimated Expiration
2039-05-24

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Abstract

1. The name of the product of this design: integrated semiconductor vacuum unit. 2. Purpose of the product of this design: This design is used for adsorption and fixation in the semiconductor manufacturing process. 3. The design key point of this appearance design product lies in the shape. 4. The picture or photo that best illustrates the design points: three-dimensional picture.
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