Wafer inspection equipment

CN309091634SActive Publication Date: 2025-01-28NANJING OPTICS ROBOT TECH CO LTD
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
CN202430394281.8
Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
Filing Date
2024-06-26
Publication Date
2025-01-28
Estimated Expiration
2039-06-26

Smart Images

  • Figure 000001_ABST
    Figure 000001_ABST
Patent Text Reader

Abstract

1. The name of the product of this design: wafer inspection equipment. 2. Purpose of this design product: used to detect wafer appearance defects. 3. The design key point of this appearance design product lies in the shape. 4. The picture or photo that best illustrates the design points: three-dimensional picture.
Need to check novelty before this filing date? Find Prior Art