Microwave matching unit
CN309559528SActive Publication Date: 2025-10-24TIANJIN JIZHAOYUAN TECH CO LTD
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Patent Information
- Application Number
- CN202430809321.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-19
- Publication Date
- 2025-10-24
- Estimated Expiration
- 2039-12-19
Smart Images
Figure 000003_ABST
Abstract
1. The name of the design product: microwave matching device. 2. The use of the design product: for loading power for generating plasma to a plurality of coils installed in a chamber. 3. The design points of the design product: in shape. 4. The picture or photo that best indicates the design points: perspective view.
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