Outer periphery of the cover ring

Abstract

1. The name of this design product: outer periphery of cover ring. 2. Purpose of this design product: The product as a whole is a cover ring covering the outer ring in semiconductor manufacturing equipment, which is used to prevent foreign matter from entering the base through the gap between the cover ring and the outer ring. The part to be protected is the outer periphery of the cover ring. 3. The key design feature of this product is its shape. 4. The image or photograph that best illustrates the design's key points: a 3D model. 5. Other matters requiring explanation Other explanations: The portion indicated by the solid line in each view is the portion requiring protection, while the portion indicated by the dotted line is the portion not requiring protection.

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