Interface unit for wafer cleaning apparatus
CN309632348SActive Publication Date: 2025-11-25SCREEN HOLDINGS CO LTD
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Patent Information
- Application Number
- CN202430155475.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Priority Date
- 2024-02-15
- Filing Date
- 2024-03-25
- Publication Date
- 2025-11-25
- Estimated Expiration
- 2039-03-25
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Figure 000009_ABST
Abstract
1. The name of the design product: interface unit of wafer cleaning device. 2. The use of the design product: the product as a whole is used as a wafer cleaning device, and the part to be protected is the interface unit of the wafer cleaning device for connecting two devices. 3. The design points of the design product: the shape of the part shown by solid lines. 4. The picture or photo that best shows the design points: the enlarged view of part D. 5. Other circumstances that need to be explained: the part shown by solid lines is the part to be protected.
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