Liquid phase epitaxial growth apparatus (vertical type)

CN309885257SActive Publication Date: 2026-03-3148TH RES INST OF CHINA ELECTRONICS TECH GROUP CORP
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
Filing Date
2025-08-29
Publication Date
2026-03-31

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Abstract

1. The name of the design product: Liquid phase epitaxy growth equipment (vertical type). 2. The use of the design product: Liquid phase epitaxy growth equipment for focal plane assembly manufacturing. 3. The design features of the design product: In shape. 4. The picture or photo that best indicates the design features: Perspective view 1.
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