Hollow support rod for semiconductor devices

Abstract

1. The name of the design product: hollow support rod for semiconductor equipment. 2. The use of the design product: the product is a component of semiconductor etching equipment, installed on a compression ring, used to pass the sensor signal line (such as a temperature sensor) through the hollow support rod to monitor the process parameters in real time and ensure the stability of the production process. 3. The design points of the design product: in shape. 4. The picture or photo that best indicates the design points: perspective view.

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