Wafer holding portion and base portion of wafer holding unit

Abstract

1. Name of the product in this design: Wafer holding part and base part of wafer holding unit. 2. Purpose of this design: This product is used as a wafer holding part when it is installed on a wafer transport device. The solid lines represent the wafer holding section and the base section. 3. The key design features of this product are the shape of the portion shown by the solid line. 4. The image or photograph that best illustrates the key design points: Design 1 3D view. 5. The rear view of Design 1 is the same as the front view of Design 1, so the rear view of Design 1 is omitted; the left view of Design 1 is the same as the right view of Design 1, so the left view of Design 1 is omitted; the bottom view of Design 1 is the same as the top view of Design 1, so the bottom view of Design 1 is omitted; the rear view of Design 2 is the same as the front view of Design 2, so the rear view of Design 2 is omitted; the left view of Design 2 is the same as the right view of Design 2, so the left view of Design 2 is omitted; the bottom view of Design 2 is the same as the top view of Design 2, so the bottom view of Design 2 is omitted. 6. Design 1 is designated as the basic design. 7. Other situations requiring explanation: The parts shown by solid lines in the view are the parts that require protection.

Images