Dry plasma desmearing machine

CN310046208SActive Publication Date: 2026-06-23WUXI XIAODI ELECTRONIC TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
WUXI XIAODI ELECTRONIC TECH CO LTD
Filing Date
2025-11-21
Publication Date
2026-06-23

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Abstract

1. Name of the product in this design: Dry plasma degumming machine. 2. Application of this design: Used in photoresist stripping, resist removal, and ashing processes in the manufacturing of silicon-based, silicon carbide, gallium nitride, gallium arsenide, indium phosphide, and lithium niobate chips. 3. The key design feature of this product is its shape. 4. The image or photograph that best illustrates the design's key points: a 3D model.
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