Upper surface portion of wafer holding chuck cover and purge hole

Abstract

1. Name of the designed product: upper surface portion of a cover for wafer holding chuck and purge hole 2. Use of the designed product: the product as a whole is used for installation in the center of the upper surface of a wafer holding chuck. The claimed part is the upper surface portion of a cover for wafer holding chuck and the portion of the purge hole provided at the outer edge thereof. 3. Design points of the designed product: the shape of the portion shown in solid line. 4. Picture or photograph best indicating the design points: perspective view. 5. The rear view is the same as the front view, and the left view is the same as the right view, so the rear view and the left view are omitted. 6. Other circumstances needing explanation Other explanations: the portion shown in solid line in the view is the claimed part.

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