Method and device for loading and unloading a CVD system

Abstract

Method for removing a coated substrate carrier (8) from a process unit (1) and loading the process unit (1) with a second substrate carrier (7) to be coated, comprising the following steps: Manual loading of the second substrate carrier (7) resting on a loading carrier (9) of a loading and unloading device (6) with substrates (8), subsequent vertical relocation of the loading and unloading device (6) upwards, Placing the first substrate carrier (10) with a gripper (5) onto an auxiliary carrier (11) of the loading and unloading device (6) arranged vertically below the loading carrier (9), subsequent vertical relocation of the loading and unloading device (6) downwards, Picking up the second substrate carrier (7) with the gripper (5) and bringing the second substrate carrier (7) to the process unit (1), subsequent vertical relocation of the loading and unloading device (6) upwards, Picking up the first substrate carrier (10) with the gripper (5) and bringing the first substrate carrier (10) out of the lifting area of ​​the loading and unloading device (6), Placing the second substrate carrier (7) with the gripper (5) onto the loading carrier (9); manual removal of the substrates (8) from the second substrate carrier (7).

Description

[0001] The invention relates to a method for removing a first substrate carrier carrying coated substrates from a process unit and loading the process unit with a second substrate carrier carrying a substrate to be coated. Method for removing a first substrate carrier carrying coated substrates from a process unit and loading the process unit with a second substrate carrier carrying a substrate to be coated.

[0002] The invention further relates to a device for carrying out the method.

[0003] US 2009 / 0194026 A1 discloses a magazine for storing a plurality of substrate carriers, comprising a plurality of carriers arranged one above the other, each for accommodating a substrate carrier. In this magazine, the magazine can be displaced vertically by means of a lifting device. The substrate carriers can be grasped with a gripper.

[0004] US 6 382 895 B1 describes a substrate handling device with a gripper that can be moved to different heights and that can bring substrates into two transfer chambers arranged one above the other.

[0005] US Pat. No. 6,747,230 B2 discloses a cassette that can accommodate a variety of substrates. The cassette is loaded using a gripper.

[0006] US 2001 / 0037856 A1 describes a substrate treatment device with a plurality of process chambers and a gripper with which substrates can be brought into the process chamber. A transfer chamber is provided, via which the substrates can be brought into a loading carrier. The loading carrier is mounted on a lifting device and can also be displaced vertically.

[0007] US 2003 / 0012624 A1 describes an arrangement with two gripper arms arranged one above the other for handling substrates.

[0008] A gripping device with four gripping arms is described in US 2005 / 0220576 A1. A height-adjustable gripper for transporting one or more substrates is shown in US 2007 / 0295274 A1.

[0009] US 2011 / 0150608 A1 describes an automatic handling machine with which semiconductor substrates can be moved vertically and horizontally.

[0010] A device for depositing layers on a substrate is described in US 5 525 160 A.

[0011] DE 10 2010 016 792 A1 describes a CVD system with a CVD reactor that can be loaded with substrate holders using a gripper. The gripper is capable of removing coated substrate holders from the process chamber of the CVD reactor and depositing the substrate holders onto a magazine plate through a transfer chamber.

[0012] WO 2011 / 074753 A1 describes a CVD system with a process unit that includes a CVD reactor in which substrates resting on a substrate carrier can be coated. Via a transfer chamber, the substrate carriers loaded with coated substrates are brought out of the process unit, or substrate carriers loaded with uncoated substrates are brought into the process chamber.

[0013] CVD systems in which the loading and unloading devices consist of only one loading carrier, onto which the gripper can place a substrate carrier loaded with coated substrates, have the disadvantage that an operator must unload and reload the substrate carrier, which is positioned in a loading and unloading position, within a narrow time window. During unloading, the coated substrates are removed one after the other from the substrate carrier, and during loading, uncoated substrates are placed onto the substrate carrier. Only then can the substrate carrier be moved back through the transfer chamber into the processing unit.

[0014] The invention is based on the object of developing a loading and unloading device in a manner that is advantageous in use.

[0015] The problem is solved by the invention specified in the claims.

[0016] The invention is based on the object of improving the loading and unloading of a CVD system and of providing a device which is advantageously further developed for this purpose.

[0017] The object is achieved by the method specified in claim 1 and the device specified in claim 2.

[0018] In a first aspect of the invention, the loading and unloading device is assigned an auxiliary carrier onto which the substrate carrier carrying the coated substrates can be placed by the gripper. The gripper is then free and can bring the substrate carrier carrying the uncoated substrates into the transfer chamber. The loading and unloading device is thus capable of accommodating two substrate carriers simultaneously. This simplifies the substrate carrier exchange, since the manual removal of the coated substrates or the manual loading of the substrate carrier with uncoated substrates can be performed at any time between substrate carrier changes.

[0019] The auxiliary carrier can be arranged beneath the loading carrier. A lifting device is further provided for lifting the substrate carrier, which is resting in an adjusted position on the loading carrier, in such a way that the gripper can grasp it underneath and then lower the loading carrier onto the gripper. However, the loading carrier can also be placed onto the gripper using a different lifting device, namely the lifting device that can vertically displace the auxiliary carrier. In the reverse order, a substrate carrier resting on the gripper can also be placed onto the loading carrier. Therefore, a further lifting device is preferably provided for setting the substrate carrier resting on the auxiliary carrier down onto the gripper. By vertically displacing the loading carrier or the auxiliary carrier, the substrate carrier removed from the auxiliary carrier can be placed onto the loading carrier.For example, it is possible to place a substrate carrier carrying coated substrates, which has been placed on the auxiliary carrier by the gripper, onto the loading carrier after removing the substrate carrier lying on the loading carrier by means of the gripper, so that the coated substrates can be removed from the substrate carrier. This unloading step can be followed by a loading step. However, it is also possible to remove the substrate carrier from the loading and unloading device in order to clean it. Furthermore, a rotary drive is provided with which the substrate carrier, and in particular the loading carrier and the auxiliary carrier, can be rotated.

[0020] A frame which supports the base support can be arranged in an outer housing. A housing having a housing base and a housing cover can be displaced vertically relative to the base support by means of the first lifting device. Within this housing there is an inner housing which has a housing base and a housing cover. Within the inner housing there can be an auxiliary support on which a substrate carrier can be placed. The auxiliary support can be fastened to the housing base of the inner housing. The lifting support can be carried by columns which are connected to the housing cover of the inner housing. These columns can protrude through an opening in the housing cover of the housing which can be displaced vertically by the first lifting device. By means of the second lifting device the inner housing can be displaced vertically together with the lifting support. The lifting support passes through an opening in a supporting frame which supports the loading support.

[0021] The lifting support and the auxiliary support can be of identical design. Each can be a ring-shaped body supported by three columns. The substrate carrier can be placed on the ring-shaped body. The columns space the edge of the substrate carrier from the underside of the housing or from the loading support, allowing a gripper arm to reach around the column arrangement with its forks.

[0022] A second aspect of the invention relates to the removal of the substrate carrier from the loading and unloading device. The loading and unloading of the substrate carrier with substrates by an operator takes place at an ergonomically optimized working height, for example at a height of 1.2 meters. It is ergonomically unfavorable for an operator to remove substrate carriers weighing several kilograms from the loading and unloading device at this height. It is therefore provided that the removal option can take place at a lower level, for example at a height of less than one meter. For this purpose, the device has an extension frame onto which the loading carrier or the auxiliary carrier can be placed in order to move it horizontally out of the loading and unloading device. The vertical displacement of the loading carrier or the auxiliary carrier takes place using a lifting device.Support arms, onto which the loading carrier can be placed, can protrude from the pull-out frame. The loading carrier can have a support frame, wherein the support frame has a frame opening through which the lifting carrier can pass in order to lift the substrate carrier resting on the loading carrier. The support frame can be carried by the housing. For this purpose, adjustment pins protrude from the top of the housing and engage in adjustment recesses in the underside of the support frame. The end faces of the adjustment pins can form a spherical surface. The adjustment recesses can also be formed by grooves with a V-shaped groove bottom. The support frame can be placed on support arms of the pull-out frame. This is achieved by a vertical displacement of the housing carrying the support frame.

[0023] Embodiments of the invention are explained below with reference to the accompanying drawings. They show: Fig. 1 schematically shows the structure of a CVD system; Fig. 2 schematically shows a vertical section through a loading and unloading device 6 of a first embodiment; Fig. 3 in the direction of arrow III in Fig. 2 a plan view of a substrate carrier 10 which rests on an auxiliary carrier 11 and is gripped by a gripper 5; Fig. 4 a representation according to Fig. 2 but in a different vertical position; Fig. 5 a representation according to Fig. 4 in a further modified vertical position; Fig. 6 a plan view according to arrow VI in Fig. 5 onto a substrate carrier 7 which rests on a loading carrier 9 and is gripped by the gripper 5; Fig. 7 a representation according to Fig. 6 but with the substrate carrier removed; Fig. 8 a perspective view of the Fig. 2 to 7; Fig. 9 shows a second embodiment of the invention in a longitudinal section; Fig. 10 a representation according to Fig. 9 but with vertically upwardly displaced housing 18 and vertically upwardly displaced inner housing 29; Fig. 11 a section along the line XI - XI in Fig. 10; Fig. 12 a section along the line XII - XII in Fig. 10 without substrate carrier; Fig. 13 a representation according to Fig. 9 but in a maximum lowered position of the housing 18, so that a support frame 17 rests on support arms 27 of a pull-out frame 21; Fig. 14 a plan view of the device approximately according to Fig. 4 in a functional position according to Fig. 13 with extended pull-out frame 21; Fig. 15 is a perspective view of a third embodiment of the invention, wherein the loading and unloading device is surrounded by an outer housing 34; Fig. 16 the loading and unloading device with the outer housing 34 removed and the substrate carrier 7 resting on a pull-out frame 21; Fig. 17 a representation approximately according to Fig. 16 with removed substrate carriers 7; Fig. 18 a perspective view of only the elements essential for explaining the invention of the Fig. 17 shown loading and unloading device in a different perspective view; Fig. 19 a rear view of the Fig. 18 in an operating position in which a support frame 17 rests on a pull-out frame 21 and an inner housing 29 and a housing 18 surrounding it assume a lowered position; Fig. 20 a representation according to Fig. 18 in a second operating position in which the housing 18 assumes a raised operating position; Fig. 21 a rear view similar to the Fig. 19 however in the Fig. 20 shown operating position; Fig. 22 a representation according to Fig. 20 but with raised inner casing 29 and Fig. 23 a representation similar to the Fig. 21 but in an operating position according to Fig. 22.

[0024] The Fig. Figure 1 shows a schematic diagram of a CVD system. Reference number 1 denotes a process unit, which may have one or more CVD reactors in which substrates, for example, silicon substrates or gallium arsenide substrates, are coated. Conductive, non-conductive, or semiconductive layers can be applied to the substrates. The individual layers or layer sequences can be deposited in an MOCVD process. The process unit 1 can be designed in various ways. It can have several units. In the simplest case, the process unit 1 has only one CVD reactor. However, it is also possible for the process unit 1 to have a plurality of process chambers or CVD reactors, which can be loaded or unloaded using additional handling systems (not shown). Fig. 1 shows a vacuum-tight gate which separates the process unit from a pre-chamber in which a gripper 3 is arranged.

[0025] In the simplest case, a process chamber of a CVD reactor of process unit 1 can be loaded using gripper 3. This gripper can access substrate carriers temporarily stored in a buffer 2, which are loaded with substrates to be coated. One substrate carrier at a time is brought through the loading gate into process unit 1 using gripper 3.

[0026] A transfer chamber 4 that can be evacuated and / or purged with an inert gas is provided, which functions as a lock chamber. Through the transfer chamber 4, at least one substrate carrier can be brought from the process unit, in which vacuum conditions can prevail, into a loading and unloading device 6 in which atmospheric pressure prevails. For this purpose, a substrate carrier 7 loaded with coated substrates 8 is brought into the transfer chamber 4 by the gripper 3. The substrate carrier 7 can be removed from the transfer chamber 4 by the gripper 5 and fed to the loading and unloading device 6. The loading and unloading device is located in a chamber purged with ultrapure gas and accessible to an operator. The operator can manually remove the coated substrates resting on the substrate carrier 7 and exchange them for uncoated substrates that are to be coated in the process unit 1.

[0027] In an embodiment not shown, a gripper 3 is provided, which can reach through a vacuum-tight door to the process unit 1. A chamber in which the gripper 3 is arranged contains a magazine 2, which can be directly loaded with a gripper 5 from the outside. This is done through a gas-tight door. The gripper and the magazine are then located in a transfer chamber 4.

[0028] A device of the type described above is further developed according to the invention in that the loading and unloading device 6 has not only a loading carrier 9, but also an auxiliary carrier 11. The Fig. Figures 2 to 8 schematically show the structure of such a loading and unloading device 6. A vertical wall 19, together with a support frame 17 and a housing base 20, forms a housing 18. The housing base 20 and the support frame 17 extend vertically spaced from one another in a horizontal plane. The support frame 17 supports a loading carrier 9, which is formed by a centering ring. The support frame 17 can be firmly connected to the loading carrier 9. The centering ring is capable of receiving a circular substrate carrier 7 and holding it in a defined position.

[0029] A first, stationary lifting device 12 is capable of displacing the entire housing 18 in the vertical direction. In the exemplary embodiment, the lifting device 12 carries a rotary drive 14, with which the housing 18 can be brought into defined angular positions. The housing base 20 carries an auxiliary support 11, which is formed by an open-edged ring support. A gripper 5 can move through an opening in the auxiliary support 11 under a substrate carrier 10 resting on the auxiliary support 11 in order to lift it. For this purpose, the housing 18 or the auxiliary support 11 is Fig. 2 shown position.

[0030] Located on the vertical wall 19 is a second lifting device 13, which forms an arm 16 having a lifting beam 15 at its end. The lifting beam 15 can lift a substrate carrier 7 resting on the loading beam 9 by gripping underneath the substrate carrier 7 in the center of the substrate carrier. The lifting beam 15 has a diameter that is slightly smaller than the width of the opening between two fork tines 5' of the gripper 5, so that the substrate carrier 7 can be gripped underneath by the gripper 5. By means of the lifting device 13, the substrate carrier 7 can be lifted upwards from the loading beam 9.

[0031] In the exemplary embodiment, the loading carrier 9 and the auxiliary carrier 11 lie coaxially one above the other. The auxiliary carrier 11 and the loading carrier 9 are angularly adjusted by the same rotary drive 14 in order to place the substrate carrier 7 in a defined angular position on the gripper 5. Furthermore, the auxiliary carrier 11 and the loading carrier 9 are displaced vertically by a common first lifting device 12. The substrate carrier 7 can be lifted from the loading carrier 9 by means of the second lifting device 13. The loading carrier 9, like the auxiliary carrier 11, is formed by an open-gap centering ring. When a substrate carrier 7 is placed on the centering ring, the substrate carrier automatically centers itself in a coaxial position with respect to the centering ring.

[0032] With the loading and unloading device 6 shown in the embodiment, a substrate carrier change is possible with the following process steps.

[0033] First, a substrate carrier 10 carrying coated substrates is brought from the process unit 1 or the intermediate storage 2 into the transfer chamber 4 by means of the gripper 3. In a variant of the invention (not shown), the gripper 3 brings the substrate carrier 10 carrying coated substrates from the process unit 1 directly into the transfer chamber 4, in which, for example, an intermediate storage 2 can be located. After closing the gate of the transfer chamber 4 facing the process unit 1, the transfer chamber 4 is purged with inert gas until atmospheric pressure is reached. Subsequently, the gate of the transfer chamber 4 facing the outside environment or the loading and unloading device 6 is opened. The substrate carrier 10 lying in the transfer chamber 4 is removed by means of the gripper 5 and placed on the auxiliary carrier 11. For this purpose, the loading and unloading device 6 is moved into the Fig. 2. The gripper 5 then moves the substrate carrier 10 into the Fig. 3 shown position directly above the auxiliary carrier 11. Subsequently, the auxiliary carrier 11 is lifted by means of the lifting device 12 in such a way that the edge of the substrate carrier 10 is supported by the auxiliary carrier 11. The gripper 5 is then moved approximately to the position shown in Fig. 2. The lifting device 12 lowers the loading and unloading device 6 to approximately the position shown in Fig. 4. This lowering can also be carried out by means of the second lifting device 13. With the second lifting device 13 or also the lifting device 12, the substrate carrier 7 is lifted from the loading carrier 9 until approximately the Fig. 5 is reached. The gripper 5 then moves under the substrate carrier 7 and thereby reaches the position shown in Fig. 6 shown underhand grip position.

[0034] By means of a particularly optical sensor unit (not shown), the rotational angle position of the substrate carrier 7 relative to the gripper 5 can be determined. By means of the rotary drive 14, the substrate carrier 7 can be positioned either lying on the loading carrier 9 or already in the Fig. 5 shown lifted position into an angularly aligned position to the gripper 5. The substrate carrier 7 lifted and angularly aligned by the second lifting device 13 is then placed on the gripper 5, which for this purpose Fig. 6 shown under the substrate carrier 7.

[0035] The gripper 5 then brings the substrate carrier 7, carrying the substrates 8 to be coated, into the transfer chamber 4. After the loading gate is closed, the transfer chamber 4 is evacuated. The gate of the transfer chamber 4 facing the process unit 1 can then be opened. The substrate carrier located in the transfer chamber 4 can be removed using the gripper 3.

[0036] The substrate carrier 10 resting on the auxiliary carrier 11 and carrying the coated substrates is brought into a position by a corresponding vertical displacement of the auxiliary carrier 11 by means of the lifting device 12, so that the gripper 5 can move under the substrate carrier 10. This corresponds approximately to the Fig. 2. If the gripper 5 has moved under the substrate carrier 10, as is the case, for example, Fig. 3, the auxiliary carrier 11 can be lowered by means of the lifting device 12, so that the substrate carrier 10 is carried by the gripper 5. The substrate carrier 10 is moved out of the lifting area of ​​the housing 18. The housing 18 is moved approximately into the Fig. 4. In this position, the substrate carrier 10 is moved by means of the gripper 5 into a position above the lifting carrier 15. The latter is lifted by means of the second lifting device 13 or also by the first lifting device 12 and lifts the substrate carrier 10 from the gripper 5 so that the gripper 5 can be retracted. By lowering the lifting carrier 15 by means of the second lifting device 13, the substrate carrier 10 is lowered onto the loading carrier 9. In the process, the substrate carrier 10 is centered on the loading carrier 9.

[0037] The substrate carrier 10, which is now in the upper position, can be manually unloaded by an operator and then loaded in order to be brought into the process unit 1 at a later time in the manner described.

[0038] In the Fig. 9 to 14 show a second exemplary embodiment. A base support 25, which is part of a stationary frame 28, supports several columns 23 belonging to a lifting platform 30. The columns 23 are connected to one another both above and below the base support 25 by means of an end plate. A threaded spindle 22 extends between these two end plates and, in the exemplary embodiment, is connected to the end plates in a rotationally fixed and axially fixed manner. The threaded spindle 12 can, however, also be attached to the base support 25 in an axially fixed manner and engage in internal threads of the end plates. The base support 25 carries a spindle nut, which forms a first lifting device 12. If the spindle nut is rotated, for example, by a stepper motor (not shown) or the like, the lifting platform 30 is displaced in the vertical direction.

[0039] The lower end plate of the lifting platform 30 supports another lifting device 13. This lifting device 13 interacts with an inner housing 29 via a tappet 46. Below the inner housing 29 is a spherical bearing into which the tappet rod 46 engages.

[0040] On the upper end plate of the lifting platform 30 is a bearing 47 that pivotally supports a bearing shaft that carries a housing 18 in which the inner housing 29 is arranged. The bearing shaft is hollow. The push rod 46 extends through the hollow. The bearing shaft, which is firmly connected to the housing 18, can be rotated by means of a rotary drive 14. The rotary drive 14 is a stepper drive with which the rotational position of the housing 18 can be precisely adjusted. A rotary angle sensor 24 is also located on the shaft to determine the respective rotational position.

[0041] The housing 18 has a base 20 arranged below the inner housing 29. The housing 18 has a housing cover 36 arranged above the inner housing 29. The distance between the housing base 20 and the housing cover 36 is greater than the vertical extent of the inner housing 29, so that the inner housing 29 can be displaced vertically within the housing 18. The inner housing 29 has a rectangular housing in view. The auxiliary carrier 11 is located in the center of the bottom 37 of the inner housing 29. It consists of an annular body supported by pillars. A substrate carrier 10 can be placed on the annular body such that the edges of the substrate carrier 10 are vertically spaced from the bottom 37. Vertically above the housing bottom side 37 of the inner housing there is a housing top side 26 of the inner housing, from which columns 40 protrude, which carry an annular body which forms the lifting support 15.The columns 40 or the lifting support 15 extend through an opening 38 of a housing cover 36 of the housing 18 and an opening 39 of the support frame 17.

[0042] A total of four adjustment pins 31 with rounded ends protrude from the top of the housing cover 36 of the housing 18. The adjustment pins 31 engage in adjustment recesses 32 located on the underside of the support frame 17. These adjustment recesses 32 can be grooves with a V-shaped groove bottom. However, they can also be annular openings.

[0043] The support frame 17 supports a loading carrier 9, which is a ring-shaped, curved body that can accommodate a circular disk-shaped substrate carrier 7. The loading carrier 9 can also be formed from ring segments. The loading carrier 9 is designed such that the substrate carrier 7, when placed on the loading carrier 9 from above, is brought into a coaxial centering position with respect to the loading carrier 9. The adjustment takes place automatically. The substrate carrier 7 has an adjustment mark 33, which can be detected by an optical sensor (not shown), in order to bring the substrate carrier 7 into a defined rotational position with the aid of the rotary drive 14 and the rotary angle sensor 24.

[0044] The lifting support 15, which is firmly connected to a housing cover 26 of the inner housing 29, can pass through the openings 38, 39 in the ceiling of the housing 18 and the support frame 17. By vertically displacing the inner housing 29 with the aid of the lifting device 13, the lifting support 15 can be brought into a supporting position for the substrate carrier 7, so that it lifts the substrate carrier 7 from its storage position onto the loading carrier 9 when raised, or deposits the substrate carrier 7 onto the loading carrier 9 when lowered.

[0045] Within the inner housing 29, which is open at least on one side of the housing, there is the auxiliary carrier 11, which is firmly connected to the bottom of the inner housing 29.

[0046] The Fig. Figure 9 shows the housing 18 in a lowered position, in which the support frame 17 rests on support arms 27. The support arms 27 protrude from a pull-out frame 21. If the housing 18 is further lowered by means of the lifting device 12, the adjusting pins 31 are released from the adjusting recesses 32.

[0047] The lifting beam 15 moves downwards through the opening of the support frame 17 approximately into the Fig. 13, in which the support frame 17 is completely detached from the housing 18. In this position, as in the Fig. 14 - the pull-out frame 21 can be displaced horizontally relative to the frame 28. This is done at a height at which an operator can comfortably lift the substrate carrier 7 lying on the loading carrier 9.

[0048] Based on the Fig. 9, the housing 18 is moved upwards with the aid of the lifting device 12, the support frame 17 is released upwards from the support arms 27 and brought into a position in which an operator can load the substrate carrier 7 with substrates 8 in a comfortable working position.

[0049] If the inner housing 29 is moved upwards, the Fig. 10, in which the lifting carrier 15 has lifted the substrate carrier 8 from the loading carrier 9. In this position, the substrate carrier 7 can be gripped from underneath by a fork gripper. By subsequently moving it downwards either by means of the lifting device 12 or the lifting device 13, the substrate carrier 7 can be placed on the fork gripper. The fork gripper can then move the substrate carrier 7 into a transfer chamber in the manner described above.

[0050] A substrate carrier 10 located in the transfer chamber, carrying coated substrates, was previously removed from the transfer chamber with the aid of the gripper and placed on the auxiliary carrier 11, which in this embodiment is formed by a central base that can be gripped by the forks of the gripper. The vertical movement required for placing it on the auxiliary carrier 11 can be performed with one of the two lifting devices 11 or 12.

[0051] The housing 18 can be surrounded by a casing, which constitutes a housing wall and essentially serves a safety function. This casing is intended to prevent a person from reaching into moving parts of the device.

[0052] The two lifting devices 12 and 13 shown in the drawings can be operated independently of each other. Alternatively, two individual lifting devices can also be implemented using control technology.

[0053] The Fig. 15 to 23 show a third embodiment of the invention. Fig. Figure 15 shows an outer housing 34, which has a cuboid shape and contains the loading and unloading device. The housing 34 is part of a larger system complex, such as that shown in the Fig. 1 is shown schematically. On the rear side of the outer housing 34 is the interface to a transfer chamber. The outer housing 34 has a chamber that can be closed by means of a gate 35. The chamber can be purged with ultrapure gas. A pull-out frame 21 in the form of a drawer is provided. The pull-out frame 21 can be moved vertically. In the Fig. 15 and Fig. In the operating position of the third embodiment shown in Fig. 16, a support frame 17, which has a loading carrier 9, lies on the pull-out frame 21, so that it can be moved out of the outer housing 34 in the vertical direction while resting on the pull-out frame 21 (see Fig. 16).

[0054] Located in the rear part of the housing is a gripper 5, which can be used to grip a substrate carrier 7 resting on the loading carrier 9. The support frame 17 has a circular outline and supports the loading carrier 9, which is formed by circular segments arranged in a circle. The circular segments of the loading carrier 9 are spaced apart from each other in the circumferential direction, so that the gripper 5 can move through the space between the ring segments.

[0055] The device consists of a tubular frame with a cross member to which a screw plate forming the base support 25 is attached. Fig. 19 and Fig. 20 shows that the stationary base support 25 forms a sliding guide in which two columns 23 are guided. The columns 23 extend vertically. Furthermore, a drive for a first lifting device 12 is arranged on the base support 25. This is a spindle drive driven by an electric motor. The spindle drive has a spindle nut driven by a toothed belt. A screw spindle 22 passes through the spindle nut, which can be displaced vertically by turning the spindle nut. The screw spindle 22 is attached to the underside of a housing 18.

[0056] If the spindle 22 is rotated, the guide support of the housing 29, designated by reference numeral 45, can be moved upward. The guide support 45 carries two spaced-apart guides 44 that connect the guide support 45 to a housing cover 36. The guides 44 are designed as guide rods. Together with the housing cover 36, the guide support 45 thus forms a vertically displaceable housing. The housing cover 36 carries adjustment pins 31 that have a dome-shaped upper surface.

[0057] In the Fig. 18 and Fig. In the operating position shown in Figure 19, the support frame 17 resting on support arms (not shown) of the pull-out frame 21 is located above the housing cover 36.

[0058] The pull-out frame 21 is movable along a rail guide 43.

[0059] Within the housing 18 there is an inner housing 29 which has a bottom 37 and a top 26. The top 26 of the inner housing 29 carries a lifting support 15 on columns 40. The lifting support 15 passes through an opening 38 in the housing cover 36. In the Fig. 18 and Fig. In the operating position shown in Figure 19, the lifting beam 15, which is supported by three columns 40 and forms a circular ring-shaped body, lies below the support frame 17, which forms an opening 39 there.

[0060] In the Fig. In the embodiment shown in Figures 18 to 23, the guide support 45 is associated with a housing base 20. However, the guide support 45 can be rotated relative to the housing 18, so that the housing cover 36 rotates with it. A cover 42 having a circular recess is connected to the housing base 20. A cylindrical skirt 41 is also connected to the housing base 20.

[0061] If the guide carrier 45 is moved upwards by means of the first lifting device 12, the Fig. 19, the support frame 17 resting on the pull-out frame 21 is raised until it reaches, for example, the position shown in the Fig. 20 and Fig. 21 has reached the operating position shown.

[0062] In the illustrations, the guide support 45 is firmly connected to the base 20, so that the base 20 and the cover 42 connected thereto, as well as the apron 41, also move upwards. However, it can also be provided that the base 20 carrying the cover 42 does not move upwards together with the guide support 45, so that the cover 42 maintains a fixed position. In this case, only the apron 41 moves into the raised position, which is Fig. 20 and Fig. 21 is shown.

[0063] A second lifting device 13 is attached to the housing 18 and moves with the vertical displacement of the housing 18. The second lifting device 13 interacts with the inner housing 29 via a tappet 46. In the exemplary embodiment, the drive motor of the second lifting device 13 is located on the opposite side of the base support 25 to the first lifting device 12. The second lifting device 13 can also have a spindle drive that interacts with a rotationally driven spindle nut. If the second lifting device 13 is actuated, the inner housing 18 is moved by the Fig. 20 and Fig. 21 shown operating position into the position shown in the Fig. 22 to 23. The lifting beam 15 reaches through the opening 39 of the support frame 17 in order to lift a load-bearing beam 9 which can only be moved in the Fig.15 such that it can be gripped underneath by the gripper 5. When displacing the inner housing 18, the inner housing 18 is guided along the guides 44. The underside 37 or the top side 26 of the inner housing 18 can have corresponding guide openings through which the guides formed by rods extend. The push rod 46, which is displaced linearly by the second lifting device 13, engages the underside 37.

[0064] The underside 37 of the inner housing 18 carries an auxiliary support 11, which is also an annular body.

[0065] With regard to the functioning of the device, reference is made to the previously discussed embodiments.

Claims

[1] Method for removing a first substrate carrier (10) carrying coated substrates (8) from a process unit (1) and loading the process unit (1) with a second substrate carrier (7) carrying substrates (8) to be coated, comprising the following steps: Manually loading the second substrate carrier (7) resting on a loading carrier (9) of a loading and unloading device (6) with substrates (8), subsequent vertical displacement of the loading and unloading device (6) upwards, Placing the first substrate carrier (10) with a gripper (5) on an auxiliary carrier (11) of the loading and unloading device (6) arranged vertically below the loading carrier (9), subsequent vertical displacement of the loading and unloading device (6) downwards, Picking up the second substrate carrier (7) with the gripper (5) and bringing the second substrate carrier (7) to the process unit (1), subsequent vertical displacement of the loading and unloading device (6) upwards, Picking up the first substrate carrier (10) with the gripper (5) and bringing the first substrate carrier (10) out of the lifting area of ​​the loading and unloading device (6), Placing the second substrate carrier (7) with the gripper (5) on the loading carrier (9); manual removal of the substrates (8) from the second substrate carrier (7). [2] Device for carrying out the method according to claim 1, with a loading and unloading device (6) which can be vertically displaced by a first lifting device (12), comprising a loading carrier (9) and an auxiliary carrier (11) arranged vertically thereunder, wherein a first substrate carrier (10) carrying coated substrates (8) can be placed on the loading carrier (9) in such a way that the coated substrates (8) can be manually removed from the first substrate carrier (10) and manually exchanged for substrates (8) to be coated, with a gripper (5) which is set up to bring a first substrate carrier (10), which carries substrates (8) coated in a process unit (1), from a transfer chamber (4) to the loading and unloading device (6) and to place it on the auxiliary carrier (11) displaced vertically upwards, to bring a second substrate carrier (7) equipped with substrates (8) to be treated in the process unit (1) from the vertically downwardly displaced loading carrier (9) to the transfer chamber (4), and to take the first substrate carrier (10) from the upwardly displaced auxiliary carrier (11) and to place it on the vertically downwardly displaced loading carrier (9). [3] Device according to claim 2, characterized byin that the first lifting device (12) is designed to displace the loading carrier (9) or the auxiliary carrier (11) vertically in order to deposit the first substrate carrier (10) resting on the auxiliary carrier (11) onto the gripper (5) in order to deposit the loading carrier (9) onto a pull-out frame (21). [4] Device according to one of the preceding claims, characterized by a second lifting device (13) for lifting the second substrate carrier (7) resting on the loading carrier (9) in an adjusted position in such a way that it can be gripped from underneath by a gripper (5), and / or for setting the second substrate carrier (7) down on the gripper (5). [5] Device according to one of the preceding claims, characterized by a rotary drive (14) with which at least the loading carrier (9) can be brought into an angularly aligned position. [6] Device according to one of the preceding claims, characterized bythat the loading carrier (9) has a centering ring, which is also divided, on which the second substrate carrier (7) rests in an adjusted position. [7] Device according to one of claims 4 to 6, characterized by that the second lifting device (13) lifts a first lifting carrier (15) which engages under the second substrate carrier (7) carried by the loading carrier (9) approximately in the middle of the substrate carrier and which can be grasped by the arms of the gripper (5). [8] Device according to one of claims 4 to 7, characterized by that the second lifting device (13) lifts the auxiliary carrier (11), which engages under the first substrate carrier (10) approximately in the middle of the substrate carrier in such a way that it can be grasped by the arms of the gripper (5). [9] Device according to one of claims 6 to 8, characterized bythat the loading carrier (9), which is designed in particular as a divided centering ring, rests on a support frame (17) which is associated with a housing (18) which can be displaced vertically by the first lifting device (12). [10] Device according to claim 9, characterized by that an inner housing (29) is arranged within the housing (18), which can be displaced vertically within the housing (18) by the second lifting device (13). [11] Device according to claim 10, characterized by that the housing (18) and / or the inner housing (29) is angularly adjustable by the rotary drive (14). [12] Device according to one of claims 5 to 11, characterized by a lifting platform (30) which is rotationally fixedly assigned to a stationary base support (25), which can be displaced vertically, for example by means of a spindle drive (22), and which carries the rotary drive (14) and a drive for the second lifting device (13). [13] Device according to one of claims 3 to 12, characterized by the pull-out frame (21) onto which the loading carrier (9) can be placed in order to bring the loading carrier (9) out of the loading and unloading device (6) in the horizontal direction. [14] Device according to one of claims 9 to 13, characterized by that the loading carrier (9) rests on the support frame (17), wherein the support frame (17) can be carried by the horizontally displaceable pull-out frame (21) by means of support arms (27).

Images