Gas distribution device and semiconductor device

Abstract

The invention discloses a gas distribution device and semiconductor equipment, and the gas distribution device comprises a cover body which is provided with a gas inlet part; the spraying piece is movably arranged on the cover body, and a diffusion cavity communicated with the air inlet part is formed between the spraying piece and the cover body; the lifting isolation device comprises a partition plate part and a lifting part, the lifting part is movably arranged on the partition plate part in a sleeving mode, the top of the lifting part is attached to the cover body so that interaction force can be generated between the lifting part and the partition plate part as well as between the lifting part and the cover body, and the partition plate part is arranged on the spraying part so that the diffusion cavity can be defined into different air chambers through the partition plate part and the lifting part; the driving device is arranged at the bottom of the spraying part and extends out of the cover body, and the driving device is controlled to drive the spraying part and the partition plate part to move away from or towards the cover body, so that the top of the lifting part moves towards or away from the cover body, and the volume of the area defined by the lifting isolation device is adjusted. The semiconductor equipment comprises a gas distribution device and a base which is arranged opposite to the gas distribution device and is used for bearing a substrate. According to the invention, the airflow adjustment flexibility can be improved, and the equipment compatibility is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor devices, and particularly to a gas distribution device and a semiconductor device. Background Art

[0002] The gas distribution device in semiconductor device processing equipment is a key device, which provides a reaction source gas capable of forming a compound semiconductor to a substrate, and the reaction source gas grows on the substrate, for example, epitaxial growth to form a compound semiconductor thin film. The structure of the gas distribution device largely determines the flow and distribution state of the reaction source gas. It is necessary to be able to match the chamber pressure and gas flow rate through structural designs such as the size and arrangement of spray holes, and achieve precise gas transport and fluid dynamics design, so as to grow a thin film with good quality on the substrate.

[0003] In the prior art, for the thin film epitaxial growth of substrates with different sizes, it is necessary to adjust the gas flow through the partition coupling adjustment of the gas distribution device to improve the growth uniformity and thin film quality. However, since fixed partitions are used to achieve partition coupling in the prior art, the partitions and the corresponding spray areas are fixed, and the flexibility of gas flow adjustment is limited. The use of fixed partitions also limits the compatibility of the gas distribution device. For example, the spray surface of a 250-mm gas distribution device is correspondingly suitable for epitaxial growth on a 12-inch diameter substrate. If it is replaced with a 6-inch diameter or smaller substrate, it will cause waste of the reaction source gas and is not conducive to film uniformity. When the same gas injection device is adapted to grow substrates with different sizes, different gas distribution devices need to be replaced, and the process debugging needs to be carried out repeatedly, resulting in poor equipment compatibility and high costs.

[0004] Therefore, it is necessary to provide a new gas distribution device and semiconductor device to solve the above problems existing in the prior art. Summary of the Invention

[0005] The purpose of the present invention is to provide a gas distribution device and a semiconductor device including the gas distribution device, so as to improve the flexibility of gas flow adjustment and enhance the equipment compatibility.

[0006] To achieve the above purpose, the technical solution of the present invention is as follows: A gas distribution device includes: A cover body provided with an air inlet part; A spray member movably arranged on the cover body, and a diffusion chamber communicating with the air inlet part is formed between the spray member and the cover body; A lifting isolation device includes a partition part and a lifting part. The lifting part is movably sleeved on the partition part, and the top is attached to the cover body so that mutual acting forces are generated between the lifting part and the partition part and between the lifting part and the cover body respectively. The partition part is arranged on the spray member to enclose different gas chambers with the lifting part for the diffusion chamber; A driving device is provided at the bottom of the spraying member and extends outside the cover body. By controlling the driving device, the spraying member and the partition portion are driven to move away from or towards the cover body, so that the top of the lifting portion moves towards or away from the cover body, thereby adjusting the volume of the area surrounded by the lifting isolation device.

[0007] A semiconductor device includes the above-mentioned gas distribution device and a pedestal that is disposed opposite to the gas distribution device and is used for carrying a substrate.

[0008] By adopting the above technical solution, the lifting isolation device is disposed in the diffusion cavity formed between the spraying member and the cover body, and includes a partition portion and a lifting portion that are movably sleeved with each other. The driving device is disposed at the bottom of the spraying member and extends outside the cover body. Since the partition portion is disposed on the spraying member, the spraying member is movably disposed on the cover body, and the top of the lifting portion is in contact with the cover body, so that mutual acting forces are generated between the lifting portion and the partition portion and the cover body respectively. When the driving device is controlled to drive the spraying member and the partition portion to move away from or towards the cover body, the top of the lifting portion can correspondingly move towards or away from the cover body, thereby being able to adjust the volume of the area surrounded by the lifting isolation device. That is, when the top of the lifting portion moves towards the cover body until it is in contact with the cover body, an air chamber is formed among the lifting isolation device, the spraying member and the cover body. When the top of the lifting portion moves away from the cover body until the contact relationship with the cover body is released, the air chamber originally surrounded by the lifting isolation device can communicate with other air chambers of the diffusion cavity. Thus, epitaxial growth of substrates with different sizes can be achieved by using the same gas distribution device, and the spraying area can also be flexibly adjusted in the gas distribution device to improve the flexibility of air flow adjustment and enhance the device compatibility.

[0009] Optionally, the partition portion includes a plurality of partition members, and the partition members are sequentially detachably connected end to end to form a closed structure, and each partition member is detachably disposed on the spraying member.

[0010] Optionally, one side wall of the partition member includes a first connecting member having a convex structure, and the other side wall includes a first connecting groove. Adjacent two partition members are detachably connected by the concave-convex fit between the first connecting member and the first connecting groove; Define the first direction as the extending direction of the first connecting member towards the convex of the adjacent partition member; the size of the first connecting member in the second direction increases and then decreases along the first direction, and the second direction is perpendicular to the first direction.

[0011] Optionally, the lifting portion includes a plurality of lifting members that are detachably connected end to end in sequence, and the lifting members are respectively movably sleeved on the partition members one by one.

[0012] Optionally, the gaps between adjacent lifting members, the gaps between adjacent partition members, and the gaps between the outer sidewall of the lifting member and the inner sidewall of the corresponding partition member are all 0.01 to 0.05 millimeters.

[0013] Optionally, the lifting part includes a lifting member and an elastic member. The partition member is provided with a lifting groove at the top to accommodate the lifting member. The elastic member is arranged between the bottom surface of the lifting member and the inner bottom surface of the lifting groove. When the top of the lifting member is in contact with the cover body, the elastic member is in a compressed state.

[0014] Optionally, the elastic member includes a temperature-resistant elastic member. The composition materials of the temperature-resistant elastic member include stainless steel, graphite or aluminum nitride.

[0015] Optionally, the lifting groove communicates with the first connection groove. The opposite sidewalls of the lifting member respectively include a lifting protrusion and a lifting recess. The adjacent lifting members are detachably connected by the concave-convex fit between the lifting protrusion and the lifting recess; The lifting recess faces the first connection groove and is provided with a second connection protrusion extending towards the bottom surface of the lifting groove. The first connection groove surrounds the second connection protrusion; The lifting protrusion faces the first connecting member, and a second connecting groove is provided on the sidewall, and the second connecting groove also penetrates at least part of the sidewall of the first connecting member; Between adjacent lifting members and between adjacent partition members, the airtightness is enhanced by the concave-convex fit between the second connection protrusion and the second connection groove.

[0016] Optionally, the lifting groove includes: A middle groove and an edge groove that are opened from the top surface of the partition member and communicate with each other. The middle groove also extends along the first direction until it penetrates the first connecting member to adapt to the lifting member; The edge groove communicates with the middle groove and is movably sleeved with the second connection protrusion. The second connection protrusion extends from the sidewall of the edge groove into the first connection groove.

[0017] Optionally, the driving device includes: A lifting ring, located below the spraying member and surrounding the inner sidewall of the cover body to support the spraying member; A base, arranged on the inner wall of the cover body, enclosing an air storage cavity with the lifting ring and the cover body. The lifting ring, the base and the cover body are movably in contact with each other; An air passage, penetrating the sidewall of the cover body and communicating with the air storage cavity, enabling gas to enter the air storage cavity through the air passage and pushing the lifting ring to drive the spraying member to approach or move away from the cover body.

[0018] Optionally, the base includes: An air floating guide ring is provided on the inner wall of the cover body to form an annular groove with the lifting ring and the cover body. The annular groove is used to accommodate the lifting ring, so that the lifting ring, the air floating guide ring and the cover body are movably attached to each other; An air floating air chamber is provided at the bottom of the annular groove and communicates with the annular groove; The air duct penetrates through the side wall of the cover body and communicates with the air floating air chamber, so that gas enters the air floating air chamber after passing through the air duct, so as to push the lifting ring to move in the annular groove.

[0019] Optionally, the spraying member includes a plurality of spraying holes, and the plurality of spraying holes form a plurality of spraying rings that are sequentially surrounded from the inside to the outside on the spraying member. Each of the partition members is disposed between adjacent spraying rings.

[0020] Optionally, the spraying member includes a plurality of spraying holes, and the plurality of spraying holes form a plurality of spraying rings that are sequentially surrounded from the inside to the outside on the spraying member; a part of the partition members of the partition part are positioning plug-in members that are detachably corresponding to the spraying holes, and the other partition members are extension plug-in members that are sequentially detachably disposed between adjacent positioning plug-in members, and the extension plug-in members are located between adjacent spraying rings.

[0021] Optionally, the spraying member is further provided with a fixed isolation device, and the lifting isolation device is surrounded outside the fixed isolation device. When the top of the lifting part fits the cover body, an independent air chamber is formed between the fixed isolation device and the lifting isolation device.

[0022] Optionally, the spraying member includes a plurality of spraying holes, and the plurality of spraying holes form a plurality of spraying rings that are sequentially surrounded from the inside to the outside on the spraying member; the fixed isolation device includes a plurality of fixed isolation plates that are sequentially detachably connected end to end, and each of the fixed isolation plates is disposed between adjacent spraying rings.

[0023] Optionally, the spraying member includes a plurality of spraying holes, and the plurality of spraying holes form a plurality of spraying rings that are sequentially surrounded from the inside to the outside on the spraying member; the fixed isolation device includes a plurality of fixed isolation plates that are sequentially detachably connected end to end, a part of the fixed isolation plates are positioning plug-in members that are detachably corresponding to the spraying holes, and the other fixed isolation plates are extension plug-in members that are sequentially detachably disposed between adjacent positioning plug-in members, and the extension plug-in members are located between adjacent spraying rings. Description of the Drawings

[0024] Figure 1 It is a cross-sectional view of the internal structure of a gas distribution device according to an embodiment of the present invention; Figure 2Schematic diagram of the assembly structure of a spray member, a lifting isolation device, and a fixed isolation device according to an embodiment of the present invention; Figure 3 Schematic diagram of the assembly structure of another spray member, a lifting isolation device, and a fixed isolation device according to an embodiment of the present invention; Figure 4 Schematic diagram of the assembly structure of a partition member and a lifting member according to an embodiment of the present invention; Figure 5 Top view of the structure of a partition member according to an embodiment of the present invention; Figure 6 Schematic diagram of the assembly structure between two adjacent partition members and two adjacent lifting members according to an embodiment of the present invention; Figure 7 Cross-sectional view of the assembly structure of a lifting member and a partition member according to an embodiment of the present invention; Figure 8 Schematic diagram of the structure of a positioning plug-in member with positioning columns provided at the bottom according to an embodiment of the present invention; Figure 9 is Figure 1 Enlarged view of part A in

[0025] Reference numerals: 100, cover body; 200, spray member; 210, spray holes; 220, spray ring; 300, diffusion chamber; 310, central air chamber; 320, middle air chamber; 330, edge air chamber; 400, lifting isolation device; 410, partition part; 420, lifting part; 421, lifting member; 422, second connecting projection; 423, second connecting groove; 424, lifting projection; 425, lifting depression; 430, partition member; 431, first connecting member; 432, first connecting groove; 433, lifting groove; 434, middle groove; 435, edge groove; 436, positioning column; 437, positioning plug-in member; 438, extending plug-in member; 520, elastic member; 610, lifting ring; 620, base; 621, air-floating guide ring; 622, annular groove; 623, air-floating air chamber; 624, air duct; 700, fixed isolation device; 710, fixed isolation plate. Detailed implementation manners

[0026] To make the objectives, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Apparently, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without making creative efforts shall fall within the protection scope of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein shall have the ordinary meanings as understood by those of ordinary skill in the art to which the present invention pertains. The words such as "including" used herein mean that the elements or items appearing before this word cover the elements or items listed after this word and their equivalents, without excluding other elements or items.

[0027] The following will further elaborate on the specific implementation manners of the present invention in conjunction with the Figures 1-9 accompanying drawings.

[0028] An embodiment of the present invention provides a gas distribution device, which is used for a semiconductor device. The semiconductor device includes, but is not limited to, a chemical vapor deposition (CVD) device, and may also be a physical vapor deposition (PVD) device. The chemical vapor deposition device among them may be a plasma-enhanced chemical vapor deposition (PECVD) device, a metal-organic chemical vapor deposition (MOCVD) device, etc. This embodiment will be described by taking the MOCVD device as an example. It should be understood that this device is only exemplary, and the present invention is not limited to this type of device.

[0029] Referring to Figure 1 the accompanying drawings, the gas distribution device includes: a cover body 100, which is provided with an air inlet part; a shower part 200, which is movably arranged on the cover body 100, and a diffusion cavity 300 communicating with the air inlet part is formed between the shower part 200 and the cover body 100; a lifting and isolating device 400, which includes a partition part 410 and a lifting part 420. The lifting and isolating device 400 is arranged on the shower part 200 to divide the diffusion cavity 300 into different gas chambers. The lifting part 420 is sleeved inside the partition part 410, and the top is attached to the cover body 100 so that mutual acting forces are generated between the lifting part 420 and the partition part 410 and between the lifting part 420 and the cover body 100 respectively. The partition part 410 is arranged on the shower part 200 to enclose the diffusion cavity 300 with the lifting part 420 to form different gas chambers; A driving device is provided at the bottom of the spraying member 200 and extends outside the cover body 100. By controlling the driving device, the spraying member 200 and the partition portion 410 are driven to move away from or towards the cover body 100, so that the top of the lifting portion 420 moves towards or away from the cover body 100, thereby adjusting the volume of the area surrounded by the lifting and isolating device 400.

[0030] In the embodiment of the present invention, since the partition portion 410 is provided on the spraying member 200, the spraying member 200 is movably provided on the cover body 100, and the top of the lifting portion 420 is in contact with the cover body 100, so that mutual acting forces are generated between the lifting portion 420 and the partition portion 410 and the cover body 100 respectively. When the driving device is controlled to drive the spraying member 200 and the partition portion 410 to move away from or towards the cover body 100, the top of the lifting portion 420 can correspondingly move towards or away from the cover body 100, thereby being able to adjust the volume of the area surrounded by the lifting and isolating device 400. That is, when the top of the lifting portion 420 moves towards the cover body 100 until it is in contact with the cover body 100, an air chamber is formed among the lifting and isolating device 400, the spraying member 200 and the cover body 100. When the top of the lifting portion 420 moves away from the cover body 100 until the contact relationship with the cover body 100 is released, the original air chamber surrounded by the lifting and isolating device 400 can communicate with other air chambers of the diffusion chamber 300. Thus, epitaxial growth of substrates with different sizes can be realized by using the same gas distribution device, and the spraying area can also be flexibly adjusted in the gas distribution device to improve the flexibility of air flow adjustment and enhance the equipment compatibility.

[0031] In some embodiments, a plurality of air inlet portions are provided on the cover body 100, and the air inlet portions are evenly distributed on the cover body 100. At the same time, the air inlet portions are connected to an external gas supply device, and the gas supply device provides process gas. The process gas enters the diffusion chamber 300 through different air inlet portions. In order to evenly disperse the process gas, a spraying member 200 is further provided on the cover body 100. The spraying member 200 is plate-shaped, and a plurality of spraying holes 210 are formed in the spraying member 200. The spraying holes 210 penetrate through the spraying member 200 along the thickness direction of the spraying member 200. There is a gap between the end surface of the spraying member 200 and the cover body 100, so that a diffusion chamber 300 is formed between the spraying member 200 and the cover body 100. The spraying holes 210 are communicated with the diffusion chamber 300. The process gas from the air inlet portion enters the diffusion chamber 300, and then flows through the spraying holes 210 and enters the process chamber.

[0032] The spraying member 200 is movably disposed on the cover body 100 and moves towards or away from the cover body 100 under the drive of a driving device. The cooperation mode between the two is necessary to ensure the airtightness at the mutually fitting part, and the specific implementation method is a conventional technical means in the art. Specifically, the side wall of the spraying member 200 fits against the inner wall of the side plate 120 and can move towards or away from the cover body 100 under the drive of the driving device to adjust the interval between the spraying member 200 and the cover body, so as to cause a change in the volume of the diffusion chamber 300 formed between the top wall of the spraying member 200 and the cover body 100 and ensure the airtightness at the fitting part between the side wall of the spraying member 200 and the inner wall of the side plate. The process gas enters the diffusion chamber 300 through the air inlet part, is mixed evenly in the diffusion chamber 300, and enters the process chamber through the spraying holes 210 to diffuse to the surface of the wafer.

[0033] In some embodiments, referring to Figure 1 and Figure 2 , the lifting part 420 is sleeved in the partition part 410 in a dynamic sealing manner. The lifting part 420 cooperates with the partition part 410 to divide the diffusion chamber 300 into different air chambers together.

[0034] In some embodiments, the partition part 410 is integrally provided, the lifting part 420 is integrally provided, and the lifting part 420 is sleeved in the partition part 410 in a dynamic sealing manner.

[0035] In some embodiments, the partition part 410 is integrally provided, the lifting part 420 is split-type, and the lifting part 420 is sleeved in the partition part 410 in a dynamic sealing manner. The adjacent lifting parts 420 are detachably connected and can ensure the airtightness between each other.

[0036] In some embodiments, the partition part 410 is split-type, the lifting part 420 is split-type, and each lifting part 420 is correspondingly and movably sleeved (for example, sleeved in the corresponding partition part 410 in a dynamic sealing manner).

[0037] In some specific embodiments, referring to Figure 1 and Figure 2 , the partition part 410 includes a plurality of partition members 430. The partition members 430 are sequentially detachably connected end to end to form a closed structure, and each partition member 430 is detachably disposed on the spraying member 200. The lifting part 420 includes a plurality of lifting members 421 that are sequentially detachably connected end to end. The lifting members 421 are movably sleeved in the corresponding partition members 430 in a dynamic sealing manner.

[0038] In order for the partition members 430 to be sequentially detachably connected end to end to form a closed structure, referring to Figure 4, on one side wall of the partition member 430, there is a first connecting member 431 with a convex structure, and on the other side wall, there is a first connecting groove 432. Two adjacent partition members 430 are detachably connected through the concave-convex fit between the first connecting member 431 and the first connecting groove 432; Define the first direction as the protruding extension direction of the first connecting member 431 towards the adjacent partition member 430; The size of the first connecting member 431 in the second direction increases first and then decreases along the first direction, and the second direction is perpendicular to the first direction.

[0039] In some embodiments, define the protruding extension direction of the first connecting member 431 towards the adjacent partition member 430 (that is, the direction of the side wall of one partition member 430 pointing to the direction where the first connecting member 431 is provided on the other adjacent partition member 430, more specifically, the direction in which the convex first connecting member 431 extends from the side wall of its own partition member 430 towards the adjacent detachable and adaptable partition member 430) as the first direction, and the direction perpendicular to the first direction as the second direction; the size (specifically, the cross-sectional size in the second direction) of the first connecting member 431 increases first and then decreases along the first direction. When a large flow of gas is introduced into the air chamber, the partition part 410 will generate a tensile force under the impact of the large air flow, making it easy for two adjacent partition members 430 to be pulled apart and lose the isolation function. By setting the size of the first connecting member 431 to increase first and then decrease along the first direction in the second direction, after two adjacent partition members 430 are connected, when pulling the two adjacent partition members 430 in opposite directions, it is difficult for the first connecting member 431 to easily disengage from the first connecting groove 432, so that the two adjacent partition members 430 can still maintain the assembly stability of the partition part 410 under the tensile force generated by the impact of the large air flow.

[0040] In some embodiments, refer to Figure 4 , Figure 5 and Figure 6 , the partition member 430 is plate-shaped, the first connecting groove 432 penetrates the partition member 430 along the height direction of the partition member 430, and at the same time, the side wall of the first connecting groove 432 communicates with the outside of the partition member 430. The first connecting member 431 is fixedly arranged on the other side of the partition member 430, and its fixing method can be bolt fixing or integral molding, etc., which is not limited here, as long as there is no relative movement between the first connecting member 431 and the partition member 430. The first connecting member 431 is adapted to the first connecting groove 432 in a concave-convex fit manner, so as to detachably connect two adjacent partition members 430.

[0041] In some embodiments, the cross-sectional shape of the first connecting groove 432 is the same as the cross-sectional shape of the first connecting member 431.

[0042] In some embodiments, the cross-sectional shape of the first connecting member 431 in the second direction is circular, and the convex structure is a spherical convexity.

[0043] In some specific embodiments, the cross-sectional shape is circular. More specifically, the side wall of the first connecting member 431 is arc-shaped, so that the cross-section of the first connecting member 431 forms a circular structure; the size of the circular structure in the second direction first increases and then decreases along the first direction. The length of the part of the first connecting member 431 connected to the partition member 430 is less than the diameter of the circular structure formed by the first connecting member 431, so that the size in the second direction first increases and then decreases along the first direction. So that when the adjacent two partition members 430 are subjected to tensile force under the impact of the large air flow, they will not separate, so as to increase the stability of the partition part 410.

[0044] In some embodiments, referring to Figure 5 and Figure 7 , the lifting part 420 further includes an elastic member 520. The elastic member 520 is arranged between the bottom surface of the lifting member 421 and the inner bottom surface of the lifting groove 433. In some specific embodiments, one end of the elastic member 520 is arranged at the bottom of the lifting member 421, and the other end is arranged at the bottom wall of the lifting groove 433.

[0045] In some embodiments, the partition member 430 is provided with a lifting groove 433 from the top to fit the lifting member 421. One side of the lifting groove 433 penetrates through the first connecting member 431, and the other side is communicated with the first connecting groove 432.

[0046] In some embodiments, when the top of the lifting part 420 is in contact with the cover 100, the elastic member 520 is in a compressed state, so that mutual acting forces are generated between the lifting part 420 and the partition part 410 and between the lifting part 420 and the cover 100 respectively. In this case, the area surrounded by the lifting part 420 and the partition part 410 can be used as a gas chamber through which process gas passes, and an epitaxial film is grown on a substrate of a certain size. When the driving device drives the spraying member 200 to move away from the cover 100, the elastic action of the elastic member 520 pushes the lifting part 420 to move towards the cover 100 in the lifting groove until it reaches the limit extension position that the lifting member 421 can reach when moving towards the cover 100. In this case, even if the top of the lifting part 420 still contacts the cover 100, the volume of the area surrounded by the partition part 410 and the lifting part 420 is amplified and adjusted, the diffusion condition of the process gas entering the expanded surrounded area changes, and the gas flow rate entering the process chamber is adjusted to a certain extent, realizing the function of micro-adjusting the process gas flow field according to the process requirements or the real-time growth condition of the epitaxial growth thin film. Further, after the lifting part 420 reaches the above-mentioned limit extension position, by continuously controlling the spraying member 200 to move away from the cover 100 through the driving device, the original closed gas chamber surrounded by the partition part 410 and the lifting part 420 communicates with other gas chambers in the periphery, thereby expanding the spraying area and being applicable to growing epitaxial films on substrates of larger sizes in the next batch of processes.

[0047] In some specific embodiments, the elastic member 520 is arranged at the bottom of the lifting member 421 and contacts the bottom wall of the lifting groove 433 to push the lifting member 421 away from the partition member 430.

[0048] In some specific embodiments, referring to Figure 3 and Figure 6 , a lifting member 421 is arranged on each partition member 430, and at the same time, two adjacent lifting members 421 are connected to each other to adjust the overall height of the lifting isolation device 400. More specifically, a lifting groove 433 is formed at the top of the partition member 430, one side of the lifting groove 433 penetrates through the first connecting member 431, and the other side communicates with the connecting groove, that is, the lifting groove 433 penetrates through the partition member 430 along the length direction of the partition member 430; the lifting member 421 is arranged in the lifting groove 433 and can slide vertically in the lifting groove 433 to adjust the overall height of the lifting isolation device 400. At the same time, since the lifting groove 433 penetrates through the partition member 430 along the length direction of the partition member 430, the two adjacent lifting members 421 can be connected.

[0049] In some more specific embodiments, referring to Figure 7, one end of the elastic member 520 contacts the bottom wall of the lifting member 421, and the other end contacts the bottom of the lifting groove 433. In some specific embodiments, the elastic member 520 is a spring; a connecting rod is fixedly provided at the bottom of the lifting member 421, a connecting hole is formed in the bottom wall of the lifting groove 433, one end of the elastic member 520 is sleeved on the connecting rod and fixedly provided on the side wall of the connecting rod, and the other end of the elastic member 520 passes through the connecting hole to facilitate the lifting member 421 to move in the vertical direction.

[0050] In some specific embodiments, the elastic member 520 includes a temperature-resistant elastic member, and the constituent materials of the temperature-resistant elastic member include stainless steel, or graphite, or aluminum nitride.

[0051] In some more specific embodiments, the elastic member 520 is a stainless steel spring.

[0052] In some more specific embodiments, in order to adapt to higher temperatures, such as thousands of degrees Celsius, the elastic member 520 can be an elastic soft felt made of graphite or an elastic soft felt made of aluminum nitride. Both have a porous structure inside and can elastically expand and contract. In some more specific embodiments, the elastic member 520 made of graphite or aluminum nitride is filled in the space between the bottom of the lifting member 421 and the inner bottom surface of the lifting groove 433.

[0053] Referring to Figure 4 and Figure 5 , a lifting protrusion 424 is provided on one side wall of the lifting member 421, and a lifting recess 425 is provided on the opposite side wall; the adjacent lifting members 421 are detachably connected through the concave-convex fit between the lifting protrusion 424 and the lifting recess 425.

[0054] A second connecting protrusion 422 is provided in the lifting recess 425, and a second connecting groove 423 is formed on the lifting protrusion 424; the adjacent lifting members 421 are detachably connected and airtight through the concave-convex fit between the second connecting protrusion 422 and the second connecting groove 423. Specifically, in some embodiments, the lifting recess 425 is opposite to the first connecting groove 432, and a second connecting protrusion 422 extending toward the bottom surface of the lifting groove 433 is provided therein, and the first connecting groove 432 surrounds the second connecting protrusion 422; the lifting protrusion 424 is opposite to the first connecting member 431, and a second connecting groove 423 is formed on the side wall, and the second connecting groove 423 also penetrates at least part of the side wall of the first connecting member 431; between adjacent lifting members 421 and between adjacent partition members 430, the airtightness is enhanced through the concave-convex fit between the second connecting protrusion 422 and the second connecting groove 423.

[0055] In some specific embodiments, both the lifting protrusion 424 and the lifting recess 425 are adapted to the shape of the lifting groove 433. After the lifting member 421 is inserted into the lifting groove 433, the side walls of the lifting protrusion 424 and the lifting recess 425 are both attached to the inner wall of the lifting groove 433.

[0056] In some more specific embodiments, the second connecting protrusion member 422 is inserted into the second connecting groove 423, so that the second connecting protrusion member 422 and the second connecting groove 423 are connected in a concave-convex matching manner, realizing the detachable connection between adjacent lifting members 421. In addition, the structure formed by the lifting member 421, the lifting protrusion 424, the lifting recess 425, the second connecting protrusion member 422 and the second connecting groove 423 is adapted to the lifting groove 433 in a dynamic sealing manner.

[0057] Since the second connecting protrusion member 422 is inserted into the second connecting groove 423 and the two are in concave-convex matching, the lifting groove 433 is provided to include: A middle groove 434 extending from the top surface to the bottom surface of the partition member 430, and the middle groove 434 also extends in the first direction until it penetrates the first connecting member 431 to adapt to the structure formed by the lifting recess 425 and the lifting protrusion 424; An edge groove 435 extending from the top surface to the bottom surface of the partition member 430 and communicating with the middle groove 434. The edge groove 435 communicates with the middle groove 434 to adapt to the structure formed by the lifting recess 425 and the second connecting protrusion member 422.

[0058] The lifting groove 433 includes a middle groove 434 extending from the top surface to the bottom surface of the partition member 430, and the middle groove 434 also extends in the first direction until it penetrates the first connecting member 431 to adapt to the structure formed by the second connecting protrusion member 422 and the second connecting groove 423; An edge groove 435 extending from the top surface to the bottom surface of the partition member 430 and communicating with the middle groove 434. The edge groove 435 communicates with the middle groove 434 to adapt to the structure formed by the second connecting protrusion member 422 and the second connecting groove 423.

[0059] In some embodiments, the structure formed by the second connecting protrusion member 422 and the second connecting groove 423 is adapted to enable adjacent lifting members 421 to be connected and move synchronously in the lifting groove 433 mainly.

[0060] Specifically, in order to prevent the lifting member 421 from shifting along the length direction of the partition member 430 in the lifting groove 433 after being inserted into the lifting groove 433, the width of the edge groove 435 is set to be smaller than the width of the middle groove 434. At the same time, one side of the edge groove 435 communicates with the first connection groove 432, and the other side communicates with the middle groove 434, so that the middle groove 434 communicates with the first connection groove 432 through the edge groove 435. At the same time, the width of the part of the middle groove 434 placed on the first connecting member 431 is smaller than the width of the part of the middle groove 434 placed on the partition member 430, so that the position of the lifting member 421 will not shift after being inserted into the lifting groove 433.

[0061] In some embodiments, after the lifting member 421 is inserted into the lifting groove 433, the side walls of the lifting protrusions and the lifting depressions are both attached to the inner wall of the lifting groove 433, and the second connecting protrusion member 422 penetrates through the edge groove 435 and is inserted into the second connecting groove 423 of the adjacent lifting member 421. That is, when the lifting member 421 is inserted into the lifting groove 433, the second connecting protrusion member 422 penetrates into the edge groove 435 and extends from the edge groove 435 into the first connecting groove 432. In the lifting groove 433, the second connecting protrusion member 422 of one of the lifting members 421 sequentially passes through the edge groove 435 and the first connecting groove 432, and then is inserted into the second connecting groove 423 of the adjacent lifting member 421 to connect the adjacent two lifting members 421.

[0062] In some embodiments, a boss is formed on the top of the lifting member 421 along the side wall of the lifting member 421. When the lifting member 421 is inserted into the lifting groove 433, the bottom of the boss abuts against the top of the partition member 430, which can limit the lifting member 421.

[0063] Referring to Figure 2 and Figure 3 , the spraying member 200 includes a plurality of spraying holes 210. A plurality of spraying holes 210 form a plurality of spraying rings 220 that are sequentially surrounded from the inside to the outside on the spraying member 200, and each partition member 430 is arranged between adjacent spraying rings 220.

[0064] In some specific embodiments, the spraying member 200 is further provided with a fixed isolation device 700. The lifting isolation device 400 and the fixed isolation device 700 are sleeved with each other. When the top of the lifting part 420 abuts against the cover body 100, an independent air chamber is formed between the fixed isolation device 700 and the lifting isolation device 400.

[0065] In some embodiments, the lifting isolation device 400 is sleeved outside the fixed isolation device 700.

[0066] The fixed isolation device 700 includes a plurality of fixed isolation plates 710, and each fixed isolation plate 710 is arranged between adjacent spraying rings 220.

[0067] In some embodiments, when the top of the lifting part 420 fits against the cover body 100, the total height of the partition member 430 and the lifting member 421 is the same as the height of the fixed partition plate 710. Specifically, during the process of the driving device driving the spraying member 200 away from the cover body 100, taking the example that the lifting isolation device 400 is sleeved outside the fixed isolation device 700, in the initial state, both the fixed isolation device 700 and the lifting isolation device 400 are in contact with the cover body 100, so that the diffusion chamber 300 is divided into three gas chambers, namely the central gas chamber 310, the middle gas chamber 320, and the edge gas chamber 330, and the three gas chambers are not connected to each other. The process gas can be introduced into the central gas chamber 310 for thin film epitaxial growth on the surface of a 4-inch substrate. During the movement, the spraying member 200 descends, the fixed isolation device 700 descends accordingly, and the lifting isolation device 400 also descends accordingly. At this time, the elastic member 520 changes from the compressed state to the stretched state and pushes the lifting member 421 to move until the top of the lifting member 421 is in a fitting relationship with the cover body 100, but the elastic member 520 has moved to the stretched limit position. At this time, the central gas chamber 310 and the middle gas chamber 320 are connected to form a gas chamber, thus forming an inner and an outer ring of gas chambers. The process gas can be introduced into the formed inner ring of gas chambers for thin film epitaxial growth on the surface of a larger-sized substrate, such as an 8-inch substrate. The spraying member 200 continues to descend, so that the fitting relationship between the lifting member 421 and the cover body 100 is released, and there is a gap between the top surface of the lifting member 421 and the cover body 100. At this time, the central gas chamber 310, the middle gas chamber 320, and the edge gas chamber 330 are all connected to form a gas chamber, and the introduction of the process gas is applicable to a larger-sized substrate, such as thin film epitaxial growth on the surface of a 12-inch substrate). In this way, the spraying area can be flexibly adjusted, improving the compatibility of the equipment.

[0068] In some embodiments, both the fixed isolation device 700 and the lifting isolation device 400 are annular.

[0069] In some embodiments, both the fixed isolation device 700 and the lifting isolation device 400 are circular rings.

[0070] In some embodiments, both the fixed isolation device 700 and the lifting isolation device 400 are polygonal rings.

[0071] In some embodiments, both the fixed isolation device 700 and the lifting isolation device 400 are irregular rings.

[0072] In some embodiments, the fixed isolation device 700 is one of a circular ring, a polygonal ring, or an irregular ring, and the lifting isolation device 400 is one of a circular ring, a polygonal ring, or an irregular ring.

[0073] In some embodiments, a clamping groove may also be provided on the spraying member 200.

[0074] In some specific embodiments, the clamping groove corresponds to the lifting isolation device 400 and their shapes are adapted. The lifting isolation device 400 is disposed in the clamping groove so that the lifting isolation device 400 is detachably connected to the spraying member 200.

[0075] In some specific embodiments, the clamping groove corresponds to the fixed isolation device 700 and their shapes are adapted. The fixed isolation device 700 is disposed in the clamping groove so that the fixed isolation device 700 is detachably connected to the spraying member 200.

[0076] In some specific embodiments, the clamping groove is a semi-through groove, that is, the clamping groove does not penetrate through the spraying member 200.

[0077] Referring to Figure 3 , part of the partition members 430 of the partition portion 410 are positioning plug-in members 437 detachably corresponding to the spraying holes 210, and the other partition members 430 are extension plug-in members 438 detachably disposed in sequence between adjacent positioning plug-in members 437. The extension plug-in members 438 are located between adjacent spraying rings 220.

[0078] In some embodiments, referring to Figure 3 and Figure 8 , in order to facilitate the fixation of the positioning plug-in member 437, a positioning post 436 is provided at the bottom of the positioning plug-in member 437. The positioning post 436 is used to be detachably disposed in the spraying hole 210 to detachably dispose the positioning plug-in member 437 on the spraying member 200.

[0079] In some embodiments, the positioning post 436 is disposed at the bottom of the positioning plug-in member 437. After the positioning post 436 is detachably disposed in the spraying hole 210, the exposed surface of the positioning plug-in member 437 facing the spraying member 200 except the positioning post 436 fits with the area between the adjacent spraying rings 220 of the spraying member 200 to ensure airtightness. The detachable setting manner between the positioning post 436 and the spraying hole 210 needs to ensure the airtightness between the positioning post 436 and the spraying hole 210. For example, the outer diameter of the positioning post 436 is adapted to the aperture of the spraying hole 210.

[0080] In some specific embodiments, the positioning post 436 is detachably disposed in the corresponding spraying hole 210 and the bottom is received in the spraying hole 210, that is, the positioning post 436 does not extend into the process chamber to reduce the interference with the airflow passing through the spraying hole 210.

[0081] In some embodiments, a part of the fixed isolation plates 710 in the fixed isolation device 700 are detachable positioning plug connectors 437 correspondingly arranged at the spray holes 210, and the other fixed isolation plates 710 are extension plug connectors 438 detachably arranged in sequence between adjacent positioning plug connectors 437. The extension plug connectors 438 are located between adjacent spray rings 220. In some more specific embodiments, the fixing of the fixed isolation device 700 is achieved through the positioning posts 436 provided on the positioning plug connectors 437, and its specific setting method is the same as that of the positioning posts 436 on the positioning plug connectors 437 corresponding to the partition member 430, which will not be elaborated here.

[0082] In some specific embodiments, the extension plug connectors 438 are in fit with the spray member 200. That is, the positioning plug connectors 437 are detachably arranged on the spray member 200, and the extension plug connectors 438 are detachably arranged on the positioning plug connectors 437 or adjacent extension plug connectors 438, so that the extension plug connectors 438 are detachably arranged on the spray member 200, making the best use of the original structure of the spray member 200 and avoiding grooving or other secondary processing on the spray member 200. At the same time, the connection points between the partition part 410 and the spray member 200 are reduced, thereby reducing the stress generated by thermal expansion between the two.

[0083] In some embodiments, the positioning plug connector 437 includes two adjacent corner parts with an angle therebetween. One or more extension plug connectors 438 are arranged between adjacent positioning plug connectors 437 to form a polygonal ring for the partition part 410.

[0084] In some embodiments, there is an angle between the two corner parts. For example, when the fixed isolation device 700 or the lifting isolation device 400 forms a regular hexagon, the included angle between the two corner parts is 120°. In actual use, the angle between the two corner parts can be set according to requirements, and at the same time, the number of extension plug connectors 438 between adjacent positioning plug connectors 437 can be adjusted to adapt to regular polygons of different shapes.

[0085] In some embodiments, both of the two corner parts are straight plate-shaped, and the two corner parts have the same shape and have a first side wall and a second side wall. The first side walls of the two corner parts are connected to each other and have a certain angle.

[0086] In some specific embodiments, the number of extension plug connectors 438 between adjacent positioning plug connectors 437 is the same, so that the fixed isolation device 700 or the lifting isolation device 400 forms a circular ring or a regular polygonal ring.

[0087] In some specific embodiments, when the positioning insertion member 437 and the extension insertion member 438 form a polygonal ring, the number of extension insertion members 438 between two adjacent positioning insertion members 437 is different, so as to form an irregular polygonal ring.

[0088] In some embodiments, the positioning insertion member 437 is a folded structure, and the folded structure includes at least one of a U-shaped structure, a V-shaped structure, a waveform structure, or an arc-shaped structure.

[0089] In some specific embodiments, the positioning insertion member 437 can also be of other shapes, which are not limited herein, as long as positioning connection can be achieved. The shape of the extension insertion member 438 is not limited, as long as it can separate the two air chambers, that is, the shape of the air chamber can be irregular. Such a setting can play a role in further finely adjusting the air flow in the air chamber according to process requirements. During use, the shape of the partition portion 410 can be adjusted according to process requirements. It should be noted that as long as each fixed partition plate 710 is arranged between adjacent spray rings 220; each partition member 430 is arranged between adjacent spray rings 220. More specifically, the extension insertion member 438 is located between adjacent spray rings 220.

[0090] In some embodiments, the distance between the gaps between two adjacent partition members 430 is 0.01 - 0.05 mm. Considering the thermal expansion of the partition members 430 at high temperatures, this distance is controlled to ensure the airtightness between adjacent partition members 430 after thermal expansion. If the gap is too large, such airtightness cannot be ensured. If the gap is too small, plastic deformation is likely to occur between adjacent partition members 430 after thermal expansion. Similarly, the gap between two adjacent lifting members 421, and the gap between the outer sidewall of the lifting member 421 and the inner sidewall of the corresponding partition member 430 are both 0.01 - 0.05 mm.

[0091] In some embodiments, the driving device can be a cylinder or other device capable of driving the spray member 200 to move.

[0092] In some embodiments, referring to Figure 1 and Figure 9 , in order for the driving device to drive the spray member 200 to move, the driving device includes: A lifting ring 610, located below the spray member 200, and disposed around the inner sidewall of the cover 100 to support the spray member 200; A base 620, disposed on the inner wall of the cover 100, enclosing an air storage cavity with the lifting ring 610 and the cover 100, and the lifting ring 610, the base 620, and the cover 100 are adapted with dynamic seals; The air duct 624 penetrates through the side wall of the cover body 100 and is communicated with the air storage cavity, so that gas enters the air storage cavity through the air duct 624, and the lifting ring 610 is pushed to drive the spraying member 200 to approach or move away from the cover body 100.

[0093] Wherein, the outer wall of the lifting ring 610 can be in contact with the side wall of the cover body 100, or there can be a gap between the outer wall of the lifting ring 610 and the side wall of the cover body 100, which is not limited herein, as long as the lifting ring 610 can drive the spraying member 200 to move. In addition, the lifting ring 610 also supports the spraying member 200.

[0094] More specifically, the base 620 can support the lifting ring 610 and drive the lifting ring 610 to move at the same time. An air storage cavity is formed around between the base 620, the lifting ring 610 and the cover body 100. The air storage cavity can accommodate gas, and the lifting ring 610, the base 620 and the cover body 100 are adapted with dynamic seals; to prevent the gas in the air storage cavity from leaking and affecting the processing process. The dynamic sealing method is a prior art and will not be elaborated herein.

[0095] During the process of controlling the movement of the lifting ring 610, first, gas is introduced into the air duct 624 through an external air supply device. Since the air duct 624 penetrates through the side wall of the cover body 100 and is communicated with the air storage cavity, the gas can enter the air storage cavity through the air duct 624. At the same time, since the lifting ring 610, the base 620 and the cover body 100 are adapted with dynamic seals, when the volume of the gas in the air storage cavity increases, the lifting ring 610 will be pushed to move, thereby driving the spraying member 200 to move.

[0096] In some embodiments, the base 620 includes: An air floating guide ring 621 is arranged on the inner wall of the cover body 100 to form an annular groove 622 with the lifting ring 610 and the cover body 100. The annular groove 622 is used to accommodate the lifting ring 610, so that the lifting ring 610, the air floating guide ring 621 and the cover body 100 are adapted with dynamic seals; An air floating air chamber 623 is arranged at the bottom of the annular groove 622; The air duct 624 penetrates through the side wall of the cover body 100 and is communicated with the air floating air chamber 623, so that the gas enters the air floating air chamber 623 after passing through the air duct 624, to push the lifting ring 610 to move in the annular groove 622.

[0097] In some specific embodiments, the annular groove 622 may be formed on the upper end surface of the air-floating guide ring 621, or may be formed by surrounding the lifting ring 610 and the side wall of the cover body 100; the lifting ring 610 is inserted into the annular groove 622 and can move vertically in the annular groove 622 to drive the spraying member 200 to move. An air-floating air chamber 623 is further provided at the bottom of the annular groove 622, and gas is used to be introduced into the air-floating air chamber 623. After the gas enters the base 620, it is pressurized in the air-floating air chamber 623 first, and then the lifting ring 610 is pushed up and down to drive the spraying member 200 to move.

[0098] In some more specific embodiments, an air passage 624 is formed through the side wall of the cover body 100, and at the same time, the air passage 624 is communicated with the air-floating air chamber 623, so that external gas can enter the air-floating air chamber 623 through the air passage 624, and the lifting ring 610 is driven to move by the gas, so as to drive the spraying member 200 to approach or move away from the cover body 100.

[0099] In some embodiments, a pipeline is provided in the air passage 624, and the pipeline is communicatively arranged in the air-floating air chamber 623, so that external gas can enter the air-floating air chamber 623.

[0100] In some embodiments, a plurality of through holes are evenly formed at the top of the air-floating air chamber 623, so that the inside of the air-floating air chamber 623 is communicated with the inside of the annular groove 622. After gas is introduced into the air-floating air chamber 623, the gas enters the annular groove 622 through the through holes and forms an air cushion at the bottom of the lifting ring 610, so as to drive the lifting ring 610 to approach or move away from the spraying member 200 in the vertical direction.

[0101] The embodiment of the present application also discloses a semiconductor device, which includes the above-mentioned gas distribution device and a base opposite to the gas distribution device and used for carrying a substrate. In some embodiments, the cover body 100 is connected to the process chamber of the semiconductor device, the base is arranged in the process chamber, and after the cover body 100 is connected to the process chamber, the gas distribution device is arranged opposite to the base to facilitate the processing of the wafer.

[0102] Although the embodiments of the present invention have been described in detail above, it is obvious to those skilled in the art that various modifications and changes can be made to these embodiments. However, it should be understood that such modifications and changes are all within the scope and spirit of the present invention in the claims. Moreover, the present invention described herein may have other embodiments and can be implemented or realized in various ways.

Claims

1. A gas distribution device, characterized in that, Comprising: A cover body (100) provided with an air inlet part; A spraying member (200) movably arranged on the cover body (100), and a diffusion chamber (300) communicating with the air inlet part is formed between the spraying member (200) and the cover body (100); A lifting isolation device (400), including a partition part (410) and a lifting part (420), the lifting part (420) is movably sleeved on the partition part (410), and the top is attached to the cover body (100) so that mutual acting forces are generated between the lifting part (420) and the partition part (410) and between the lifting part (420) and the cover body (100) respectively. The partition part (410) is arranged on the spraying member (200), and the diffusion chamber (300) is surrounded by the partition part (410) and the lifting part (420) to form different air chambers; A driving device is arranged at the bottom of the spraying member (200) and extends outside the cover body (100). By controlling the driving device, the spraying member (200) and the partition part (410) are driven to move away from or towards the cover body (100), so that the top of the lifting part (420) moves towards or away from the cover body (100), thereby adjusting the volume of the area surrounded by the lifting isolation device (400).

2. The gas distribution device according to claim 1, wherein The partition part (410) includes a plurality of partition members (430), and the partition members (430) are sequentially detachably connected end to end to form a closed structure, and each partition member (430) is detachably arranged on the spraying member (200).

3. The gas distribution device according to claim 2, wherein One side wall of the partition member (430) includes a first connecting member (431) in a convex structure, and the other side wall includes a first connecting groove (432). Adjacent partition members (430) are detachably connected through the concave-convex fit between the first connecting member (431) and the first connecting groove (432); Define the first direction as the extending direction of the first connecting member (431) towards the convex part of the adjacent partition member (430); the size of the first connecting member (431) in the second direction increases and then decreases along the first direction, and the second direction is perpendicular to the first direction.

4. The gas distribution device according to claim 2, wherein, The lifting part (420) includes a plurality of lifting members (421) detachably connected end to end in sequence, and the lifting members (421) are movably sleeved on the partition members (430) one by one.

5. The gas distribution device according to claim 4, characterized in that, The gap between adjacent lifting members (421), the gap between adjacent partition members (430), and the gap between the outer side wall of the lifting member (421) and the inner side wall of the corresponding partition member (430) are all 0.01 - 0.05 mm.

6. The gas distribution device according to claim 3, characterized in that, The lifting part (420) includes a lifting member (421) and an elastic member (520). The partition member (430) is provided with a lifting groove (433) from the top to accommodate the lifting member (421). The elastic member (520) is arranged between the bottom surface of the lifting member (421) and the inner bottom surface of the lifting groove (433). When the top of the lifting member (421) is attached to the cover body (100), the elastic member (520) is in a compressed state.

7. The gas distribution device according to claim 6, characterized in that, The elastic member (520) includes a temperature-resistant elastic member, and the constituent materials of the temperature-resistant elastic member include stainless steel, graphite, or aluminum nitride.

8. The gas distribution device according to claim 6, characterized in that, The lifting groove (433) communicates with the first connecting groove (432). Opposite side walls of the lifting member (421) respectively include a lifting protrusion (424) and a lifting recess (425). Adjacent lifting members (421) are detachably connected through the concave-convex fit between the lifting protrusion (424) and the lifting recess (425); The lifting recess (425) faces the first connecting groove (432), and a second connecting protrusion member (422) extending towards the bottom surface of the lifting groove (433) is provided therein. The first connecting groove (432) surrounds the second connecting protrusion member (422); The lifting protrusion (424) faces the first connecting member (431), and a second connecting groove (423) is formed in the side wall thereof. The second connecting groove (423) also penetrates at least part of the side wall of the first connecting member (431); Between adjacent lifting members (421) and between adjacent partition members (430), the airtightness is enhanced through the concave-convex fit between the second connecting protrusion member (422) and the second connecting groove (423).

9. The gas distribution device according to claim 8, wherein, The lifting groove (433) includes: A middle groove (434) and an edge groove (435) that are opened on the top surface of the partition member (430) and communicate with each other. The middle groove (434) also extends along a first direction until it penetrates the first connecting member (431) to adapt to the lifting member (421); The edge groove (435) communicates with the middle groove (434) and is movably sleeved with the second connecting protrusion member (422). The second connecting protrusion member (422) extends from the side wall of the edge groove (435) into the first connecting groove (432).

10. The gas distribution device according to claim 1, characterized in that, The driving device includes: A lifting ring (610), located below the spraying member (200), and is disposed around the inner side wall of the cover body (100) to support the spraying member (200); A base (620), disposed on the inner wall of the cover body (100), and a gas storage cavity is formed between the lifting ring (610), the base (620), and the cover body (100). The lifting ring (610), the base (620), and the cover body (100) are movably attached to each other; An air passage (624) penetrates the side wall of the cover body (100) and communicates with the gas storage cavity, so that gas enters the gas storage cavity through the air passage (624) and pushes the lifting ring (610) to drive the spraying member (200) to approach or move away from the cover body (100).

11. The gas distribution device according to claim 10, characterized in that, The base (620) includes: An air-floating guide ring (621), disposed on the inner wall of the cover body (100) to form an annular groove (622) with the lifting ring (610) and the cover body (100). The annular groove (622) is used to accommodate the lifting ring (610), so that the lifting ring (610), the air-floating guide ring (621), and the cover body (100) are movably attached to each other; The air flotation air chamber (623) is arranged at the bottom of the annular groove (622) and is communicated with the annular groove (622); The air duct (624) penetrates through the side wall of the cover body (100) and is communicated with the air flotation air chamber (623), so that gas enters the air flotation air chamber (623) after passing through the air duct (624) to push the lifting ring (610) to move in the annular groove (622).

12. The gas distribution device according to claim 2, wherein, The spraying member (200) includes a plurality of spraying holes (210), and a plurality of the spraying holes (210) form a plurality of spraying rings (220) that are sequentially surrounded from inside to outside on the spraying member (200), and each partition member (430) is arranged between adjacent spraying rings (220).

13. The gas distribution device according to claim 2, wherein The spraying member (200) includes a plurality of spraying holes (210), and a plurality of the spraying holes (210) form a plurality of spraying rings (220) that are sequentially surrounded from inside to outside on the spraying member (200); part of the partition members (430) of the partition portion (410) are positioning plug-in members (437) that are detachably corresponding to the spraying holes (210), and the other partition members (430) are extending plug-in members (438) that are sequentially detachably arranged between adjacent positioning plug-in members (437), and the extending plug-in members (438) are located between adjacent spraying rings (220).

14. The gas distribution device according to claim 1, characterized in that, The spraying member (200) is further provided with a fixed isolation device (700), and the lifting isolation device (400) surrounds the fixed isolation device (700). When the top of the lifting portion (420) fits the cover body (100), an independent air chamber is formed between the fixed isolation device (700) and the lifting isolation device (400).

15. The gas distribution device according to claim 14, characterized in that, The spraying member (200) includes a plurality of spraying holes (210), and a plurality of the spraying holes (210) form a plurality of spraying rings (220) that are sequentially surrounded from inside to outside on the spraying member (200); the fixed isolation device (700) includes a plurality of fixed isolation plates (710) that are sequentially detachably connected end to end, and each fixed isolation plate (710) is arranged between adjacent spraying rings (220).

16. The gas distribution device according to claim 14, characterized in that, The spraying member (200) includes a plurality of spraying holes (210), and a plurality of the spraying holes (210) form a plurality of spraying rings (220) that are sequentially surrounded from inside to outside on the spraying member (200); the fixed isolation device (700) includes a plurality of fixed isolation plates (710) that are sequentially detachably connected end to end, part of the fixed isolation plates (710) are positioning plug-in members (437) that are detachably corresponding to the spraying holes (210), and the other fixed isolation plates (710) are extending plug-in members (438) that are sequentially detachably arranged between adjacent positioning plug-in members (437), and the extending plug-in members (438) are located between adjacent spraying rings (220).

17. A semiconductor device, characterized in that, It includes the gas distribution device according to any one of claims 1-16, and a base that is oppositely arranged with the gas distribution device and is used for carrying a substrate.

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