Protective element training device

Abstract

Protective element forming device (2) for forming a protective element (19) on an upper surface (1a) of a substrate (1) having protrusions and depressions on the upper surface (1a), wherein the protective element (19) is flatter than the protrusions and depressions on the upper surface (1a), by layering a liquid plastic of an ultraviolet-curing type and a cover film (17) on a plastic film (13) adhering to the upper surface (1a) of the substrate (1) to conform to the protrusions and depressions, wherein the plastic film (13) is larger than the substrate (1), wherein the protective element forming device (2) comprises: a support table (54) designed to support the substrate (1) with the plastic film (13) adhering to the upper surface (1a); a liquid plastic supply unit (56) designed to supply the liquid plastic to the plastic film (13) adhering to the substrate (1) supported on the support table (54); a pressure unit (58) with a pressure surface (68) capable of holding the cover film (17), wherein the pressure surface (68) is flat and has a light-transmitting property, wherein the pressure unit (58) is designed to distribute the liquid plastic over the plastic film (13) by pressing the liquid plastic supplied to the plastic film (13) through the pressure surface (68) over the cover film (17) held by the pressure surface (68); an ultraviolet irradiation unit (66) configured to cure the liquid plastic by irradiating the liquid plastic with ultraviolet rays through the printing surface (68) and the cover film (17) and to form the protective element (19) with the plastic film (13), the cured liquid plastic and the cover film (17); and a determining unit (76) designed to determine a state of the liquid plastic distributed by the pressure unit (58), where the unit of determination (76) comprises: a camera (72) designed to photograph the liquid plastic and the substrate (1) from above through the printing surface (68) of the printing unit (58), a determination section (74) which is designed to detect the liquid plastic and the substrate (1) from an image obtained by photographing with the camera (72) and to determine whether the liquid plastic is distributed over a predetermined area in relation to the substrate (1) and a notification section (78) designed to issue a notification regarding a determination result of the determination section (74).

Description

TECHNICAL BACKGROUND Technical field

[0001] The present invention relates to a protective element formation device which forms a protective element on the upper surface of a substrate having projections and depressions on the upper surface. Description of the related technique

[0002] Component chips used in electronic devices such as mobile phones or computers are formed by grinding and thinning a substrate with multiple components arranged side-by-side on it from one side of a bottom surface, thereby dividing the substrate into each component. The grinding of the substrate is performed by a grinding device. The grinding device holds the substrate on a clamping table in a position where the side of the bottom surface of the substrate is exposed and grinds the substrate by bringing a grinding wheel moving in an annular orbit into contact with the side of the bottom surface of the substrate.To protect the side of the substrate's upper surface at this time, a protective element, in which a base material layer and an adhesive layer are laminated, is attached to the substrate's upper surface beforehand.

[0003] The surface of the substrate is textured with components, wiring patterns, and similar features. Additionally, bumps serving as electrodes for these components may be pre-formed on this surface. These various patterns, bumps, and other features create protrusions and depressions on the substrate's surface. If these protrusions and depressions have a significant height difference, the adhesive layer of the protective element will not adequately accommodate them, resulting in an unstable bond. Furthermore, the surface on the base material side of the protective element will become uneven, preventing the cutting device from providing uniform support. Consequently, the substrate's underside will not be flat when the substrate is ground.

[0004] Furthermore, a circumferential excess area where the components are not formed on an outer circumferential section of the substrate must not exhibit any patterns or bumps and is lower than a component formation area where the components are formed. Thus, the protective element cannot be adequately bonded to the outer circumferential section of the substrate. Therefore, there is a tendency for chipping to occur on the outer perimeter of the substrate when the substrate is sanded. A protective element with a thick adhesive layer could be used to accommodate the protrusions and depressions of the substrate's upper surface. In this case, adhesive residue tends to remain on the protrusions and depressions when the protective element is removed from the substrate, potentially causing defects in the component chips.

[0005] Accordingly, a protective element has been developed which is formed by applying a liquid plastic to a cover sheet, placing the substrate on the cover sheet with the upper surface of the substrate facing downwards, pressing the substrate downwards, thus causing the liquid plastic to penetrate the protrusions and depressions of the substrate, and allowing the liquid plastic to harden (see, for example, JP 2017-50536A). When the protective element is formed on the upper surface of the substrate, a film is pre-applied to the upper surface of the substrate. At this point, the film adheres to the upper surface of the substrate in such a way that it corresponds to the protrusions and depressions of the upper surface of the substrate.However, the film need not have an adhesive layer formed in at least one area adhering to the component formation area of ​​the substrate, so that the adhesive layer is not in contact with the component formation area of ​​the substrate. Here, if a film larger than the upper surface of the substrate is used, at the point when the liquid plastic distribution extends beyond the upper surface to the outside of the substrate, the liquid plastic is held at the bottom by the film, preventing it from running onto the side of the lower surface of the substrate. The formed protective element comprises the film, the cured liquid plastic, and the release liner. One surface on the release liner side is flat.When the protective element with the film is then removed from the top surface of the substrate after the substrate has been sanded, no residue of the liquid plastic and the adhesive layer remains on the protrusions and depressions of the top surface of the substrate.

[0006] Further prior art that is helpful for understanding the present invention can be found in the following document: DE 10 2018 207 497 A1 relates to a wafer processing method for processing a wafer, including a forming step of a groove-shaped groove, a step of bringing the wafer into close contact with a protective film, a protective element fixing step, a grinding step and a peeling step. PRESENTATION OF THE INVENTION

[0007] However, if the liquid plastic, applied to the film adhering to the substrate's upper surface, is pressed and spread, it might not be sufficiently distributed over a predetermined area. If a protective element is formed by the liquid plastic hardening in a state where it is not adequately distributed, the substrate will not be sufficiently supported when it is loaded onto the grinding machine's clamping table. Consequently, a problem arises because the desired grinding result cannot be achieved.

[0008] Accordingly, an objective of the present invention is to provide a protective element formation device that can determine whether the liquid plastic is distributed over a predetermined area or not when the liquid plastic is pressed and distributed.

[0009] According to one aspect of the present invention, a protective element formation device for forming a protective element on the upper surface of a substrate having protrusions and depressions on the upper surface, wherein the protective element is flatter than the protrusions and depressions on the upper surface, is provided by layering a liquid plastic of an ultraviolet-curing type and a cover film onto a plastic film adhering to the upper surface of the substrate to correspond to the protrusions and depressions, wherein the plastic film is larger than the substrate, wherein the protective element formation device comprises: a support table configured to support the substrate with the plastic film adhering to the upper surface; a liquid plastic supply unit configured to supply the liquid plastic onto the plastic film adhering to the substrate supported on the support table;a pressure unit with a pressure surface capable of holding the cover film, wherein the pressure surface is flat and has a light-transmitting property, wherein the pressure unit is configured to distribute the liquid plastic over the plastic film by pressing the liquid plastic supplied to the plastic film through the pressure surface over the cover film held by the pressure surface; an ultraviolet irradiation unit configured to cure the liquid plastic by irradiating the liquid plastic with ultraviolet rays through the pressure surface and the cover film and to form the protective element with the plastic film, the cured liquid plastic and the cover film;and a determination unit configured to determine a state of the liquid plastic distributed by the printing unit, the determination unit comprising: a camera configured to photograph the liquid plastic and the substrate from above through the printing surface of the printing unit, a determination section configured to detect the liquid plastic and the substrate from an image obtained by photographing through the camera and to determine whether the liquid plastic is distributed over a predetermined area with respect to the substrate, and a notification section configured to output a notification regarding a determination result of the determination section.

[0010] In addition, according to a further aspect of the present invention, a protective element formation device for forming a protective element on an upper surface of a substrate having protrusions and depressions on the upper surface, wherein the protective element is flatter than the protrusions and depressions on the upper surface, is provided by layering a liquid plastic of an ultraviolet-curing type and a cover film on a plastic film adhering to the upper surface of the substrate to correspond to the protrusions and depressions, wherein the plastic film is larger than the substrate, wherein the protective element formation device comprises: a support table having a support surface formed by a light-transmitting element, wherein the support table is capable of supporting the cover film by means of the support surface;a liquid plastic feeding unit configured to feed the liquid plastic to an upper surface of the cover film supported on the support table; a pressing unit configured to press the substrate, in a state where the upper surface to which the plastic film adheres is facing downwards, through a flat pressing surface from above, such that the plastic film adheres to the liquid plastic on the cover film supported on the support table; an ultraviolet irradiation unit configured to cure the liquid plastic by irradiating the liquid plastic with ultraviolet rays through the support surface of the support table and the cover film, and to form the protective element with the plastic film, the cured liquid plastic and the cover film;and a determination unit configured to determine a state of the liquid plastic distributed by the pressure unit, the determination unit comprising: a camera configured to photograph the liquid plastic and the substrate from below through the support surface of the support table, a determination section configured to detect the substrate and the liquid plastic from an image obtained by photographing through the camera and to determine whether the liquid plastic is distributed over a predetermined area with respect to the substrate, and a notification section configured to output a notification regarding a determination result of the determination section.

[0011] Preferably, the camera has a fisheye lens or a wide-angle lens arranged so that it is adjacent to the ultraviolet irradiation unit and is installed at a position corresponding to a center of the facing substrate, and the photography is carried out using the fisheye lens or the wide-angle lens.

[0012] The protective element formation device according to one aspect of the present invention feeds the liquid plastic onto the plastic film adhering to the upper surface of the substrate and distributes the liquid plastic over the plastic film by pressing it through the printing surface of the printing unit, over the cover film, and across the plastic film. At this point, the direction of the printing surface is, for example, set such that it is parallel to the lower surface of the substrate. The protective element formation device includes the detection unit with the camera, which photographs the liquid plastic and the substrate from above through the printing surface.Alternatively, according to one aspect of the present invention, the protective element formation device feeds the liquid plastic onto the cover film and distributes the liquid plastic by pressing it through the substrate, to which the plastic film adheres, over the plastic film, and over the cover film. The protective element formation device includes the detection unit with the camera, which receives the liquid plastic and the substrate from below through the support surface of the support table that carries the cover film.

[0013] When the liquid plastic and the substrate are photographed by the camera, it can be determined whether the liquid plastic is distributed over the specified area. Therefore, if the liquid plastic is not sufficiently distributed, it can be detected, and the liquid plastic can be further distributed by pressing it again before curing. Curing of the liquid plastic is carried out after confirmation that it is sufficiently distributed. The protective element can then be appropriately formed on the upper surface of the substrate.

[0014] Therefore, according to one aspect of the present invention, a protective element formation device is provided which can determine whether a liquid plastic is distributed over a predetermined area or not when the liquid plastic is pressed and distributed.

[0015] The above and further aims, features and advantages of the present invention and the way in which they are realized will become more apparent, and the invention itself will best be understood by studying the following description and the attached claims with reference to the attached drawings, which show a preferred embodiment of the invention. SHORT FIGURE DESCRIPTION Fig. Figure 1 is a perspective view that schematically represents a substrate; Fig. 2 is a top view that schematically represents a protective element formation device; Fig. 3A is a sectional view that schematically represents a plastic film adhesion unit; Fig. 3B is a sectional view that schematically depicts, on an enlarged scale, the substrate with a plastic film adhering to one of its upper surfaces; Fig. 4A is a sectional view that schematically represents the substrate held by a transmission unit; Fig. Figure 4B is a sectional view that schematically represents a state in which the suction and holding of the plastic film is solved by suction pads of the transfer unit that has transported the substrate to a support table; Fig. 5A is a sectional view that schematically represents a state in which the suction and holding of the plastic film has been solved by suction pads of the contactless type of transmission unit; Fig. 5B is a sectional view that schematically shows the substrate with liquid plastic being fed to the upper surface of the plastic film; Fig. Figure 6 is a sectional view that schematically depicts a substrate to which a plastic film adheres, a liquid plastic, a pressure unit and a determination unit; Fig. 7A is a sectional view that schematically represents a state in which the liquid plastic is being forced by the pressure unit; Fig. Figure 7B is a sectional view that schematically depicts a protective element formed on the upper surface of the substrate; Fig. 8 is a sectional view that schematically represents the printing unit; Fig. 9A is a top view schematically showing the liquid plastic being applied over the substrate; Fig. Figure 9B is a top view schematically representing the pressed liquid plastic; Fig. 9C is a top view that schematically shows the further compressed liquid plastic; Fig. Figure 10 is a sectional view that schematically represents a state in which the protective element formed on the upper surface of the substrate is cut along the outer perimeter of the substrate; and Fig. Figure 11 is a sectional view that schematically represents a unit of definition according to a modification. DETAILED DESCRIPTION OF THE PREFERRED EXECUTION FORM

[0016] One embodiment according to one aspect of the present invention will be described with reference to the accompanying drawings. A protective element forming device according to the present embodiment forms a protective element on the upper surface of a substrate such as a semiconductor wafer or the like, wherein the substrate has several components formed on its surface. The substrate with the protective element formed on its upper surface will first be described. Fig. Figure 1 is a perspective view schematically representing a substrate. Substrate 1 is, for example, a wafer made of a material such as silicon (Si), silicon carbide (SiC), gallium nitride (GaN), gallium arsenide (GaAs), or another semiconductor. Alternatively, substrate 1 is a substantially disk-shaped substrate made of a material such as sapphire, glass, or quartz. The glass could be, for example, alkali glass, non-alkali glass, soda-lime glass, lead glass, borosilicate glass, quartz glass, or the like.

[0017] Fig. Figure 1 schematically represents a perspective view of substrate 1. Fig. Figure 3A schematically represents a cross-sectional view of substrate 1. Fig. Figure 3B schematically represents an enlarged sectional view of the substrate 1. Several intersecting planned division lines 3 are defined on an upper surface 1a of the substrate 1. A component 5, such as an integrated circuit (IC) or a large-scale integration (LSI), is formed in each area separated by the planned division lines 3. Individual component chips can be formed by grinding the substrate 1 along the planned division lines 3 from one side of a lower surface 1b, thus thinning the substrate 1. Several protruding sections formed from a metal, designated as bumps 7, are provided on the upper surface 1a of the substrate 1.Each of the bumps 7 is electrically connected to the component 5 and serves as an electrode for inputting or outputting an electrical signal to the component 5 after the component chips have been formed by dividing the substrate 1. The bumps 7 are made of a metallic material such as gold, silver, copper, or aluminum. However, the bumps 7 need not necessarily be located on the upper surface 1a of the substrate 1.

[0018] A region on an outer circumferential side, surrounding a region in which the multiple components 5 are formed on the upper surface 1a of the substrate 1, is referred to as a circumferential excess region 11. The circumferential excess region 11 of the upper surface 1a of the substrate 1 does not contain any components 5 formed therein, nor does it contain any bumps 7 forming the electrodes of the components 5. The region surrounded by the circumferential excess region 11 of the upper surface 1a of the substrate 1 is referred to as a component formation region 9. The component formation region 9 of the upper surface 1a of the substrate 1 is not planar and has projections and depressions resulting from each pattern forming the components 5 and the bumps 7. On the other hand, the circumferential excess region 11 of the upper surface 1a is planar.

[0019] It should be noted that the substrate 1 on which the protective element is formed is not limited to this. For example, the substrate 1 on which the protective element is formed could be a packing substrate formed by sealing several components arranged on a flat surface with a sealing plastic. Individual component chips of a predetermined thickness, sealed by the sealing plastic, can be formed if the packing substrate is made thin by grinding the sealing plastic on the side of the lower surface of the packing substrate, thus dividing the packing substrate on a component-by-component basis. Bumps serving as electrodes for individual components are formed on the upper surface of the packing substrate. Thus, the upper surface of the packing substrate is also not flat and exhibits protrusions and depressions.

[0020] When substrate 1 is thinned by grinding the lower surface 1b side of a grinding device, thus splitting the substrate 1, thin component chips of a predetermined thickness are obtained. A protective element is pre-attached to the upper surface 1a side to protect it when the substrate 1 is ground from the lower surface 1b side. When substrate 1, with the protective element attached to the upper surface 1a, is fed into the grinding device, it is supported by the protective element on a support table.

[0021] The protective element formation device according to the present invention will be described below. Fig. Figure 2 is a top view schematically depicting a protective element formation device 2. The protective element formation device 2 has a base 4 that supports the components. An end section of the base 4 is provided with cassette mounting bases 6a and 6b, each equipped with cassettes 8a and 8b, which accommodate several substrates 1. For example, a substrate 1, prior to the formation of a protective element, is housed in cassette 8a located on cassette mounting base 6a and is conveyed into the protective element formation device 2. The substrate 1, with the protective element formed on its upper surface 1a in the protective element formation device 2, is then housed, for example, in cassette 8b located on cassette mounting base 6b.

[0022] A substrate transfer robot 10a is positioned next to the cassette mounting base 6a on base 4. A substrate transfer robot 10b is also positioned next to the cassette mounting base 6b. The substrate transfer robots 10a and 10b are, for example, articulated robots with multiple arm sections connected to each other so that they can be continuously rotated about common end sections. Substrate holding sections 10c and 10d, each capable of holding a substrate 1, are located at the distal ends of the arm sections at the most distal end face. The substrate holding sections 10c and 10d can be moved when the arm sections are rotated relative to each other. The substrate holding sections 10c and 10d of the substrate transfer robots 10a and 10b are inserted into the cassettes 8a and 8b placed on the cassette mounting bases 6a and 6b and convey substrates 1 into and out of the cassettes 8a and 8b.Here, the substrate transfer robots 10a and 10b have shaft sections erected at their base 4, which support the arm sections; and lifting and lowering mechanisms that raise and lower the shaft sections. The lifting and lowering mechanisms raise and lower the substrate holding sections 10c and 10d together with the shaft sections, such that the substrate holding sections 10c and 10d correspond to the height of a cassette storage area of ​​several stacked cassette storage areas present in cassettes 8a and 8b, into and out of which a substrate is to be conveyed.

[0023] The substrate transfer robot 10a has a function of transferring a substrate 1 housed in the cassette 8a attached to the cassette base 6a to a plastic film adhesion unit 12 to be described next. Fig. Figure 3A is a sectional view schematically illustrating an example of the plastic film adhesion unit 12. The plastic film adhesion unit 12 is, for example, a chamber-shaped unit with an internal space capable of accommodating the substrate 1. The plastic film adhesion unit 12 functions to adhere a plastic film 13 to the upper surface 1a of the substrate 1. Here, the plastic film 13 is, for example, a polyolefin-based film, a polyethylene-based film, or the like; it could be a single layer or laminated, and has a thickness of 20 µm or greater and 80 µm or less. The plastic film adhesion unit 12 has a hollow lower main body 12a that opens upwards and a hollow upper main body 12b that is positioned above the lower main body 12a and opens downwards.The upper main body 12b can be raised and lowered. The opening of the lower main body 12a and the opening of the upper main body 12b have the same shape. When the upper main body 12b is lowered towards the lower main body 12a so that the openings align, an externally insulated space can be formed within the upper main body 12b and the lower main body 12a. Each of the openings is larger than the substrate 1, and the substrate 1 can be accommodated within this space.

[0024] The lower main body 12a is provided with a table-shaped substrate support section 14 that supports the substrate 1. The upper surface of the substrate support section 14 is a flat support surface 14a that supports the substrate 1. The height of the substrate support section 14 is adjusted such that the upper surface 1a of the substrate 1 and the opening of the lower main body 12a are essentially at the same height when the substrate 1 is placed on the support surface 14a. Alternatively, the height of the substrate support section 14 is adjusted such that the opening of the lower main body 12a is higher than the upper surface 1a of the substrate 1. In these cases, when the plastic film 13 is placed on the lower main body 12a and adhered to the substrate 1 as will be described later, it does not adhere unnecessarily wide to the side surface of the substrate 1.An extraction unit 16 is connected to a bottom wall or a side wall of the lower main body 12a. The extraction unit 16 has an extraction passage 16a with one end connected to the lower main body 12a and another end connected to a suction source 16b. Additionally, an extraction unit 18 is connected to a ceiling or a side wall of the upper main body 12b. The extraction unit 18 has an extraction passage 18a with one end connected to the upper main body 12b and the other end connected to a suction source 18b.

[0025] At the point when the plastic film 13 adheres to the upper surface 1a of the substrate 1 using the plastic film adhesion unit 12, the substrate 1 is loaded onto the substrate support section 14, the substrate support section 14 is brought to support the substrate 1, and then the upper surface 1a of the substrate 1 is covered by the plastic film 13. A plastic film feed unit 22, in which several plastic films 13 are prepared, is provided at a position next to the plastic film adhesion unit 12 at the base 4 of the protective element forming device 2. A transfer unit 24a, to be described later, transfers a plastic film 13 from the plastic film feed unit 22 to cover the substrate 1.Plastic films 13, which are larger than the opening of the lower main body 12a, are prepared in the plastic film feed unit 22 such that a space 20a enclosed by the lower main body 12a and the plastic film 13 can be formed when the plastic film 13 is transferred to the substrate 1. Then, after the plastic film 13 has been transferred to the substrate 1, the upper main body 12b is brought into contact with the upper surface of the plastic film 13 by lowering it. A space 20b enclosed by the upper main body 12b and the plastic film 13 is then formed.

[0026] At this point, when the plastic film 13 adheres to the substrate 1, the interior of the plastic film adhesion unit 12, in the form of a chamber, is divided by the plastic film 13 into upper chamber 20b and lower chamber 20a. Then, when the intake source 16b of the extraction unit 16 and the intake source 18b of the extraction unit 18 are activated, chambers 20a and 20b are evacuated and decompressed. Afterward, only the intake source 18b decompressing chamber 20b is stopped, and chamber 20b is opened to the atmosphere. As a result, a large pressure difference temporarily arises between chamber 20a and chamber 20b with the plastic film 13 positioned between them. This pressure difference then causes the plastic film 13 to adhere to the upper surface 1a, conforming to the protrusions and depressions of the upper surface 1a of the substrate 1. Fig. Figure 3B is a sectional view that schematically depicts, on an enlarged scale, the substrate 1 with the plastic film 13 adhering to its upper surface 1a. The plastic film 13 can be adhered to the upper surface 1a of the substrate 1 when the plastic film adhesion unit 12 is used as described above. After the plastic film 13 has adhered to the substrate 1, the suction unit 16 is stopped and the upper main body 12b is raised.

[0027] Meanwhile, a heating unit (not shown) capable of supplying a heated gas could be connected to the ceiling or side wall of the upper main body 12b. The heating unit serves to supply the heated gas to the space 20b of the upper main body 12b. The gas could be, for example, air, nitrogen gas, or the like. In a case where, for example, a material whose flexibility is enhanced by heating is used, such as the plastic film 13, the gas, when supplied to space 20b, increases the temperature of the plastic film 13 and thus softens it. When the plastic film 13 softens, it readily deforms to conform to the shape of the upper surface 1a of the substrate 1 and adheres to the upper surface 1a of the substrate 1.For example, before chambers 20a and 20b are decompressed, the heating unit could supply the heated gas to chamber 20b to pre-heat and soften the plastic film 13. Alternatively, the heating unit could be activated to heat the plastic film 13 and assist in its deformation after chambers 20a and 20b are decompressed and chamber 20b is opened to the atmosphere.

[0028] The protective element formation device 2 has a support table 54 at a position next to the plastic film adhesion unit 12 at the base 4. The transfer unit 24a transfers the substrate 1, to which the plastic film 13 adheres, from the plastic film adhesion unit 12 to the support table 54. In a Fig. In the device configuration shown in Figure 2, the plastic film feed unit 22, the plastic film adhesion unit 12, and the support table 54 are arranged linearly side by side. The transfer unit 24 has the function of transferring the plastic film 13 from the plastic film feed unit 22 to the plastic film adhesion unit 12. The transfer unit 24a has a further function of transferring the substrate 1, to which the plastic film 13 adheres, from the substrate support section 14 to the support table 54, while the plastic film 13 remains in a distributed state on the outside of the substrate 1.

[0029] Fig. Figure 2 schematically depicts a top view of the transmission unit 24a. Additionally, Fig. 4A, Fig. 4B and Fig. Figure 5A schematically shows side views of the transmission unit 24a. The transmission unit 24a has a guide rail 26a along the direction in which the plastic film adhesion unit 12 and the support table 54 are arranged, and an arm section 28a slidably fitted to the guide rail 26a. The transmission unit 24a has a motion mechanism (not shown) that moves the arm section 28a along the guide rail 26a. The motion mechanism includes, for example, a ball screw (not shown) along the guide rail 26a and a pulse motor (not shown) that rotates the ball screw. A proximal end face of the arm section 28a is provided with a nut section (not shown) screwed onto the ball screw. When the ball screw is rotated by the pulse motor, the arm section 28a moves along the guide rail 26a.A base section 30a is attached to a distal end of the arm section 28a. The movement mechanism moves the base section 30a together with the arm section 28a.

[0030] A plate-shaped, non-contact type suction pad support section 40a is attached to the central lower surface of the base section 30a via several column-like support sections 46a. Sectional views of the non-contact type suction pad support section 40a are shown in Fig. 4A and the like are shown. A through-hole 44a is formed in the suction pad support section 40a of the non-contact type.

[0031] Several non-contact suction pads 42a are provided on the lower surface of the non-contact suction pad support section 40a. The multiple non-contact suction pads 42a are attached to the base section 30a via the non-contact suction pad support section 40a and the support sections 46a. Each of the multiple non-contact suction pads 42a is positioned on the lower surface of the non-contact suction pad support section 40a such that it is able to face the plastic film 13 adhering to the upper surface 1a of the substrate 1 in an area superimposed on the substrate 1. Additionally, several suction pads 32a are attached to the lower surface of an outer circumferential section of the base section 30a. The multiple suction pads 32a are arranged on the lower surface of the base section 30a in order to be able to be directed towards the plastic film 13 outside the substrate 1.

[0032] Here, the lower surfaces of the multiple suction pads 32a and the lower surfaces of the multiple non-contact suction pads 42a have a uniform height. The height of the lower surfaces of the suction pads 32a is located at a position that is slightly lower than the height of the lower surfaces of the multiple non-contact suction pads 42a. The lower surfaces of the suction pads 32a and the non-contact suction pads 42a serve as suction surfaces that can attract and hold the plastic film 13 adhering to the substrate 1.

[0033] The transmission unit 24a has an intake passage 38a with one end reaching the lower surface of each of the intake pads 32a and the other end connected to an intake source 34a. The intake passage 38a is equipped with a switching unit 36a. The switching unit 36a has the function of switching between a blocked state and a vented state in the intake passage 38a. When the switching unit 36a is in the vented state, the intake source 34a acts to generate a negative pressure in the lower surfaces of the intake pads 32a. Additionally, the transmission unit 24a has an air supply passage 52a with one end reaching the lower surface of each of the non-contact type intake pads 42a and the other end connected to an air supply source 48a. The air supply passage 52a is equipped with a switching unit 50a.The switching unit 50a has a switching function between a blocked state and a vented state in the air supply passage 52a. When the switching unit 50a is in the vented state, the air supply source 48a acts to expel gas from the lower surfaces of the non-contact type intake pads 42a.

[0034] Here, the lower surfaces of the non-contact type intake pads 42a are provided with several ejection openings (not shown). The gas supplied to the non-contact type intake pads 42a through the air supply passage 52a is expelled from the ejection openings. The ejection openings are not oriented in a completely downward direction, but are inclined outwards from the respective non-contact type intake pads 42a in directions that deviate from a completely downward direction. The gas is expelled in these directions from the ejection openings. If an intake target object is positioned below the non-contact type intake pads 42a with a small gap formed between them, and the gas is expelled from each of the ejection openings by moving the switching unit 50a into the ventilation state, the expelled gas moves outwards from the non-contact type intake pads 42a.Then, a portion of the gas escapes upwards through the through-hole 44a of the non-contact type intake pad support section 40a. The gas expelled from the exhaust openings of the non-contact type intake pads 42a moves along, entraining surrounding air. This creates a negative pressure at the central lower sections of the non-contact type intake pads 42a. Due to this negative pressure, the intake target is drawn in and held by the non-contact type intake pads 42a. However, the non-contact type intake pads 42a are not in contact with the intake target at this point.

[0035] In the case where, for example, a contact-type suction pad is used instead of the non-contact-type suction pads 42a, the suction pad and the plastic film 13 come into contact with each other. In this case, there is a risk that a contact mark of the suction pad will form on the upper surface of the plastic film 13, or that particles or the like adhering to the lower surface of the suction pad will be transferred to the plastic film 13 as a source of contamination, thus preventing the proper formation of the protective element. Additionally, the upper surface of the plastic film 13 adhering to the upper surface 1a of the substrate 1 has an uneven shape. Therefore, even if the contact-type suction pad is brought into contact with the plastic film 13, gaps resulting from the uneven shape occur between the suction pad and the plastic film 13, and the vacuum leaks.The contact-type suction pad is therefore unable to adequately suction and hold the plastic film 13. In contrast, such problems do not occur when the non-contact-type suction pads 42a suction and hold the plastic film 13 adhering to the substrate 1. On the other hand, the protective element on the outside of the substrate 1 does not need to be formed with high precision. The suction pads 32a that suction and hold the outer circumferential section of the plastic film 13 could therefore be of either non-contact or contact type.

[0036] When the transfer unit 24a transfers the substrate 1, to which the plastic film 13 adheres, from the substrate support section 14 to the support table 54, the upper main body 12b of the plastic film adhesion unit 12 is raised and the base section 30a is moved to a position above the substrate support section 14. Here, the transfer unit 24a has a lifting and lowering mechanism (not shown) that raises and lowers the base section 30a. Next, the lifting and lowering mechanism is actuated to lower the base section 30a towards the substrate 1 supported by the substrate support section 14. The base section 30a is then positioned at such a height that the lower surfaces of the suction pads 32a are in contact with the plastic film 13, and that the non-contact suction pads 42a can draw in the plastic film 13.The switching units 36a and 50a are then actuated to draw the outer circumferential section of the plastic film 13 through the suction pads 32a and to draw the substrate 1 over the plastic film 13 through the non-contact suction pads 42a. The lifting and lowering mechanism is then actuated to lift the substrate 1 through the transmission unit 24a.

[0037] The movement mechanism of the transmission unit 24a is then activated to move the base section 30a to a position above the support table 54. Fig. Figure 4A is a sectional view schematically depicting a state in which the substrate 1 is transferred from the transfer unit 24a. After the base section 30a has moved to the position above the support table 54, the lifting and lowering mechanism is actuated to place the substrate 1 on the support table 54. Subsequently, only the switching unit 36a is actuated and moved into the locking position, thus releasing the suction of the plastic film 13 by the suction pads 32a.

[0038] Fig. Figure 4B is a sectional view schematically depicting the transmission unit 24a and the substrate 1 in a state where the suction of the plastic film 13 by the suction pads 32a is released. When the suction of the plastic film 13 by the suction pads 32a is released, the plastic film 13 falls to the upper surface of the support table 54. At this point, the gas continues to be expelled by the non-contact suction pads 42a and moves across the upper surface of the plastic film 13 out of the support table 54. Therefore, when the suction of the plastic film 13 by the suction pads 32a is released, an outward force is applied to the plastic film 13 due to the gas flow. For example, if the plastic film 13 is bent or folded in a part that is not adhering to the substrate 1, the flow of gas straightens the plastic film 13 and removes the bend or fold.When the suction of the plastic film 13 by the non-contact suction pads 42a is subsequently released, the substrate 1 is placed on the support table 54 in a state in which the plastic film 13 is distributed.

[0039] The suction through all pads can be released simultaneously, for example, to quickly complete the transfer of the plastic film 13. However, even if the plastic film 13 is bent or folded at the time the suction is released, the gas flow is stopped, and therefore the bend or similar distortion is not removed. If the substrate 1 is placed on the support table 54 in a state where the plastic film 13 is bent or folded, there is a risk that it will not be possible to carry out the steps sequentially and that it will not be possible to properly form the protective element on the upper surface 1a of the substrate 1. On the other hand, the transmission unit 24a of the protective element forming device 2, according to the present embodiment, allows each of the suction pads 32a and the non-contact suction pads 42a to be actuated independently.The suction of the plastic film 13 by each pad can therefore be released sequentially with a predetermined time offset. This makes it possible to suppress the formation of a bend or a fold in the plastic film 13 when the substrate 1 is transferred to the support table 54, and to prevent defective formation of the protective element due to the bend or fold in the plastic film 13.

[0040] Fig. Figure 5A is a sectional view schematically depicting a state in which the suction and holding of the substrate 1 by the transmission unit 24a is released and the base section 30a is lifted by the lifting and lowering mechanism. A liquid plastic is fed to the side of the upper surface 1a of the substrate 1 on the support table 54 with the plastic film 13 arranged between the liquid plastic and the side of the upper surface 1a of the substrate 1. The liquid plastic is distributed over the plastic film 13 by being pressed from above and is then hardened.

[0041] A liquid plastic feed unit 56 is positioned next to the support table 54 at the base 4 of the protective element forming device 2. The liquid plastic feed unit 56 is a tubular unit with a shaft section 56a extending vertically, an arm section 56b extending horizontally from an upper end of the shaft section 56a, and a nozzle 56c pointing downwards from a distal end of the arm section 56b. The shaft section 56a is rotatable in the vertical direction. When the shaft section 56a is rotated, the nozzle 56c moves in a curved orbit with the arm section 56b as one radius. The length of the arm section 56b is set such that the nozzle 56c can be positioned above the center of the support table 54 by rotating the shaft section 56a.The liquid plastic feeding unit 56 has the function of feeding a liquid plastic of an ultraviolet-curing type onto the substrate 1 placed on the support table 54 through the shaft section 56a, the arm section 56b and the nozzle 56c. The liquid plastic of the ultraviolet-curing type is a liquid plastic that is cured by being irradiated with ultraviolet rays. Fig. Figure 5B schematically shows a cross-sectional view of the liquid plastic supplied to the plastic film 13 adhering to the substrate 1.

[0042] When a liquid plastic 15 is fed to the upper surface of the plastic film 13, the nozzle 56c is positioned above the center of the support table 54 by rotating the shaft section 56a. Then, after the liquid plastic 15 has been fed to the upper surface 1a of the substrate 1, the nozzle 56c is positioned at a position that does not overlap the support table 54 by rotating the shaft section 56a again.

[0043] A pressure unit 58 is arranged above the support table 54. Fig. Figure 2 schematically shows a top view of the pressure unit 58. Fig. 6 and Fig. Figure 7A schematically depicts side views of the pressing unit 58. The pressing unit 58 comprises: a pair of support columns 60 along the vertical direction; connecting sections 62a slidably arranged on the respective support columns 60; a pair of support sections 62b extending horizontally from the respective connecting sections 62a; and a pressing section 64 supported by the pair of support sections 62b. The connecting sections 62a can be raised and lowered along the support columns 60 by a lifting and lowering mechanism (not shown). The pressing section 64 can be raised and lowered using the lifting and lowering mechanism. The pressing section 64 has a flat pressing surface 68 as its lower surface. The direction of the pressing surface 68 is precisely defined such that the pressing surface 68 is parallel to the upper surface of the support table 54.The printing section 64 internally comprises an ultraviolet irradiation unit 66 located near the printing surface 68. The ultraviolet irradiation unit 66 includes, for example, several ultraviolet light-emitting diodes (LEDs) arranged concentrically in a ring. A flat, plate-shaped light-emitting element 70, which emits ultraviolet rays and visible light, is used at a lower end of the printing section 64, with the lower end forming the printing surface 68.

[0044] The pressure section 64 can hold a cover film 17 through the pressure surface 68. The pressure unit 58 lowers the pressure section 64 in a position where the cover film 17 is held through the pressure surface 68 and forces the liquid plastic 15 through the pressure surface 68 and over the cover film 17 from above. When the liquid plastic 15 is subsequently cured by the ultraviolet irradiation unit 66, the plastic film 13, the cured liquid plastic 15, and the cover film 17 are integrated together to form a protective element. That is, the cover film 17 is an element forming the protective element.

[0045] As in Fig. As shown in Figure 2, a cover film feed unit 80, which feeds the cover film 17 to be held by the pressing surface 68 of the pressing section 64, is arranged at a position next to the support table 54. For example, several cover films 17 are wound in a roll form and prepared in the cover film feed unit 80 and are pulled out individually onto the support table 54 as required. Then, the pressing surface 68 is brought into contact with the upper surface of a cover film 17 by lowering the pressing section 64, and the cover film 17 is held by the pressing surface 68.

[0046] Here, the pressing section 64 has a holding mechanism (not shown) for retaining the cover film 17 by the pressing surface 68. For example, the pressing surface 68 is provided with several suction holes connected to a suction source, and the cover film 17 is held by suction through the suction holes to the pressing surface 68. Alternatively, the pressing section 64 could have an electrostatic clamping mechanism near the pressing surface 68, and this electrostatic clamping mechanism could be actuated to hold the cover film 17 by the pressing surface 68 by an electrostatic force. Alternatively, the pressing section 64 could not have a holding mechanism. In this case, for example, an adhesive layer could be provided on the upper surface of the cover film 17, and the cover film 17 could be bonded to the pressing surface 68 by the adhesive layer.Alternatively, the upper surface of the cover film 17 or the printing surface 68 could be coated with an adhesive agent and the cover film 17 could be held by the adhesive agent from the printing surface 68.

[0047] Above the support table 54, after the liquid plastic supply unit 56 supplies the liquid plastic 15 onto the plastic film 13, the pressure unit 58 holding the cover film 17 is lowered and the pressure surface 68 presses the liquid plastic 15 over the cover film 17. Fig. Figure 7A schematically shows a sectional view of the substrate 1, the plastic film 13, the liquid plastic 15, and the cover film 17 when the liquid plastic 15 is pressed from the pressure surface 68. When the liquid plastic 15 is pressed from the pressure surface 68, it is distributed towards the outer circumference of the substrate 1. In other words, the pressure unit 58 has the function of distributing the liquid plastic 15 over the plastic film 13 by pressing the liquid plastic 15 through the pressure surface 68 over the cover film 17 while covering an upper part of the liquid plastic 15 supplied by the liquid plastic feed unit 56 with the cover film 17.

[0048] The ultraviolet irradiation unit 66 cures the liquid plastic 15 after the liquid plastic 15 has been distributed towards an outer circumference 1c of the substrate 1 and a predetermined area of ​​the upper surface 1a of the substrate 1 is covered by the plastic film 13, the liquid plastic 15, and the cover film 17. At this point, the ultraviolet irradiation unit 66 irradiates the liquid plastic 15 with ultraviolet rays through the printing surface 68 and the cover film 17. Afterwards, when the ultraviolet irradiation unit 66 is stopped and the printing section 64 is lifted, the cover film 17 remains attached to the cured liquid plastic 15. This means that a protective element 19, in which the plastic film 13, the cured liquid plastic 15, and the cover film 17 are integrated, is formed on the upper surface 1a of the substrate 1.Here, the side 1b of the lower surface 1b of the substrate 1 and the upper surface 1 of the protective element 19 are flat against each other, since the upper surface of the support table 54 and the pressure surface 68 are flat against each other. Fig. Figure 7B is a sectional view that schematically shows, on an enlarged scale, the protective element 19 formed on the substrate 1 with protrusions and depressions due to the bumps 7 on the upper surface 1a.

[0049] Normally, when the liquid plastic 15 is distributed by pressing, it might not be sufficiently distributed over a predetermined area, so that the liquid plastic 15 might not reach an outer edge in the predetermined area, or a non-uniformity in the liquid plastic 15 might occur. In this case, if the side of the lower surface 1b of the substrate 1 is ground after the protective element 19 is formed by hardening the liquid plastic 15, and the substrate 1 on which the protective element 19 is formed is then transferred to the grinding device, the substrate 1 is not adequately supported by the protective element 19. Consequently, a grinding non-uniformity might occur on the side of the lower surface 1b of the substrate 1, or the lower surface 1b might not be flat.Accordingly, the protective element formation device 2, according to the present embodiment, has a detection unit 76 that determines the state of the liquid plastic 15 distributed by the pressure unit 58. The detection unit 76 detects the liquid plastic 15 and determines whether the liquid plastic 15 is suitably distributed over the predetermined area when the liquid plastic 15 is distributed by pressure. The detection unit 76 is, for example, incorporated into the pressure unit 58. The detection unit 76 will be described next.

[0050] As in Fig. 6 and Fig. As shown in Figure 7A, the determination unit 76 has a camera 72 arranged in the center of the ultraviolet irradiation unit 66 of the printing section 64. The camera 72 photographs the liquid plastic 15 and the substrate 1 from above through the printing surface 68 of the printing unit 58. In particular, the camera 72 photographs the substrate 1 and the liquid plastic 15 through the light-transmitting element 70, which forms the printing surface 68, and the cover film 17 held by the printing surface 68. It is desirable that the camera 72 be able to photograph an area extending to the outer circumference 1c of the substrate in order to determine whether the liquid plastic 15 is sufficiently distributed over the substrate 1 or not. If, for example, the light-transmitting element 70 has a certain thickness, the camera 72 can capture a wide area.On the other hand, it is desirable that the light-transmitting element 70 be sufficiently thin so as not to impede the efficiency of irradiating the liquid plastic 15 with ultraviolet rays. Accordingly, a fisheye lens or a wide-angle lens can be used as the camera 72, the fisheye lens or the wide-angle lens being arranged so that it is adjacent to the ultraviolet irradiation unit 66 and installed at a position corresponding to the center of the substrate facing it.

[0051] One function desired to be performed by the camera 72 is to obtain an image that allows for the determination of the presence or absence of the liquid plastic 15 across the entire area of ​​the upper surface 1a of the substrate 1, rather than simply obtaining an image without distortion. Using a lens capable of photographing a wide area, such as a fisheye lens or a wide-angle lens, makes it possible to photograph the entire area of ​​the upper surface 1a of the substrate 1 with the camera 72, even if the light-transmitting element 70 is sufficiently thin. In other words, if a fisheye lens or the like is used as the camera 72, the light-transmitting element 70 can be made thin, thus improving the efficiency of irradiating the liquid plastic 15 with ultraviolet rays.

[0052] Here it presents Fig. Figure 8 schematically shows a cross-sectional view that can be observed when the pressing section 64 of the pressing unit 58 is divided by a horizontal plane containing the ultraviolet irradiation unit 66 and the camera 72. Several cameras 72 could be provided within the pressing unit 58 to photograph the entire area of ​​the upper surface 1a of the substrate 1. In this case, however, the area occupied by the ultraviolet irradiation unit 66 must be reduced by an amount corresponding to the areas in which the cameras 72 are installed. Then the ultraviolet LEDs might not be able to be arranged sufficiently, and the irradiation of the liquid plastic 15 with ultraviolet rays might not be possible without inconsistency.As such, the use of a fisheye lens or the like can ensure a sufficient area to be occupied by the ultraviolet irradiation unit 66 and does not cause such a problem. However, in the protective element formation device 2 according to the present embodiment, the detection unit 76 could have several cameras 72 in a case where the ultraviolet irradiation unit 66 has a sufficiently high power, and a lens other than the fisheye lens or the like could be used as the cameras 72.

[0053] The detection unit 76 further comprises a detection section 74 connected to the camera 72. The detection section 74 detects the liquid plastic 15 and the substrate 1 from an image obtained by photography with the camera 72 and determines whether the liquid plastic 15 has been distributed over a predetermined area relative to the substrate. Functions of the detection section 74 are implemented, for example, as software on a device control computer that controls each component of the protective element formation device 2. Here, the device control computer is configured as a computer with a processing device such as a central processing unit (CPU) and a storage device such as flash memory.Then, when the processing device is operated according to software, such as a program stored in the storage device, the software and the processing device (hardware resources) serve as cooperating concrete means.

[0054] A determination performed by the determination unit 74 will be described next. The determination unit 74 performs a determination based on an image obtained by photography with the camera 72. For example, the camera 72 photographs the substrate 1 and the liquid plastic 15 and periodically obtains an image while the pressure unit 58 presses the liquid plastic 15. Fig. 9A and Fig. Figures 9C each represent an example of an image obtained by photographing with camera 72. However, the plastic film 13 is omitted in each figure. The substrate 1 and the liquid plastic 15 appear in the images obtained by photographing with camera 72. Fig. For the purpose of simple description, components 5 and the like formed on the upper surface 1a of the substrate 1 in Figures 9A to 9C are represented by dashed lines, the components 5 and the like appearing in the figures through the liquid plastic 15. Fig. Figure 9A is a diagram that schematically represents a figure obtained when the liquid plastic 15 is applied over the substrate 1.

[0055] When the liquid plastic 15 is forced away from the pressure surface 68 by lowering the pressure section 64, the liquid plastic 15 is distributed towards the outer circumference 1c of the substrate 1. Fig. Figure 9B is a diagram that schematically represents a diagram obtained in the state where the liquid plastic 15 is squeezed and distributed over a certain area. When the squeeze section 64 is lowered further, the liquid plastic 15 is distributed beyond the outer circumference 1c of the substrate 1. Fig. Figure 9C is a diagram that schematically represents an image obtained in a state in which the liquid plastic 15 is sufficiently distributed.

[0056] The detection section 74 detects the substrate 1 and the liquid plastic 15 from the image obtained by photographing it with the camera 72. The detection section 74 then determines whether the liquid plastic 15 has been distributed over a predetermined area relative to the substrate 1. The predetermined area is an area over which it can be determined that the liquid plastic 15 has been distributed to such an extent that the formed protective element 19 can adequately protect the upper surface 1a of the substrate 1 and that desired grinding can be carried out on the lower surface 1b of the substrate 1. An outer edge of the predetermined area is determined relative to the substrate 1 and is, for example, defined such that it coincides with the outer circumference 1c of the substrate 1. The detection section 74 then determines whether the liquid plastic 15 has been distributed over the predetermined area.When the camera 72 photographs the substrate 1 and the liquid plastic 15 and produces an image as in . Fig. As shown in Figure 9B, determination section 74 determines that the liquid plastic 15 is not distributed over the specified area. Additionally, determination section 74 determines that if the liquid plastic 15 is further distributed and the camera 72 photographs the substrate 1 and the liquid plastic 15 and produces an image as shown in Figure 9B, the following applies: Fig. Figure 9C shows that the liquid plastic 15 is distributed over the specified area.

[0057] The determination unit 76 has a notification section 78 that issues a notification regarding a determination result of determination section 74 to a user, manager, or the like of the protective element training device 2. For example, if determination section 74 determines that the liquid plastic 15 is not distributed over the specified area, notification section 78 issues a notification regarding the determination result to the user, manager, or the like of the protective element training device 2. Notification section 78 is, for example, an indicator unit, an alarm light, or the like, provided on the exterior of the protective element training device 2.Notification section 78 issues a notification signal regarding the determination result by displaying a warning screen on the display unit or by illuminating a red light of the alarm lamp.

[0058] The user, manager, or the like, notified of the determination result of determination section 74 by notification section 78, causes the pressure unit 58 to further distribute the liquid plastic 15 by continuing to press the liquid plastic 15. Additionally, the quantity of liquid plastic supplied by the liquid plastic supply unit 56 is increased so that the liquid plastic 15 is distributed over a larger area by the next and subsequent substrates 1 on which the protective element 19 is to be formed. Furthermore, if determination section 74 determines that the liquid plastic 15 is distributed over the specified area, the display unit, which serves as notification section 78, continues to display an image indicating that the protective element formation device 2 is functioning normally.Alternatively, the green light of the alarm indicator, which serves as notification section 78, remains illuminated. This means that notification section 78 does not notify the determination of an abnormality, even if it does not provide notification of the determination result from determination section 74.

[0059] As described above, the determining unit 76 in the protective element forming device 2, according to the present embodiment, determines whether the liquid plastic 14 is sufficiently distributed over the predetermined area with respect to the substrate 1. Therefore, if the liquid plastic 15 is not distributed over the predetermined area, it can be further distributed by pushing it further through the pressure unit 58 before the ultraviolet irradiation unit 66 is actuated. Consequently, the protective element 19 can be suitably formed on the substrate 1, and thus the lower surface 1b of the substrate 1 can be suitably ground by the grinding device. Meanwhile, the determining unit 76 could obtain information regarding the state of the liquid plastic 15 from the image obtained by photographing it with the camera 72 and determine whether or not a non-uniformity occurs in the liquid plastic 15.If it is determined that a non-uniformity occurs in the liquid plastic 15, the pressure unit 58 could similarly continue to press the liquid plastic 15 and a measurement of an increase in the quantity of liquid plastic 15 supplied or the like could be carried out.

[0060] The protective element training device 2 has a cutting unit 84 (see Fig. 10) which cuts off an unnecessary part of the protective element 19 formed on the upper surface 1a of the substrate 1. The cutting of the protective element 19 by the cutting unit 84 is carried out on a table 82 provided at a position next to the support table 54 at the base 4. The protective element forming device 2 has a transfer unit 24b that can transfer the substrate 1, on which the protective element 19 is formed, from the support table 54 to the table 82. However, the transfer unit 24b is designed in a similar way to the transfer unit 24a, and therefore a description of it will be partially omitted.

[0061] Fig. Figure 2 schematically shows a top view of the transmission unit 24b. The transmission unit 24b has a guide rail 26b along the direction in which the support table 54 and the table 82 are arranged, and an arm section 28b slidably fitted to the guide rail 26b. The transmission unit 24b has a movement mechanism (not shown) that moves the arm section 28b and a base section 30b along the guide rails 26b. The base section 30b is attached to a distal end of the arm section 28b. A plate-shaped support section 40b for non-contact suction pads is attached to the central lower surface of the base section 30b by several column-like support sections. A through-hole 44b is formed in the support section 40b for non-contact suction pads.Several non-contact suction pads 42b are provided on the lower surface of the support section 40b for non-contact suction pads. Additionally, several suction pads are attached to the lower surface of the outer circumferential section of the base section 30b.

[0062] When the transfer unit 24b transfers the substrate 1, which is provided with the protective element 19, the base section 30b is moved to a position above the support table 54. The base section 30b is then lowered to draw in and hold the plastic film 13 by the suction pads and to draw in and hold the protective element 19 by the non-contact suction pads. The base section 30b is then raised, moved to a position above the table 82, and lowered to place the substrate 1, on which the protective element 19 is formed, onto the table 82. The suction holding of the plastic film 13 is then released. Next, the suction holding of the protective element 19 is released. In this case, the substrate 1 is placed on the table 82 in a state in which the plastic film 13 is distributed over the table 82 due to a flow of gas ejected from the non-contact type suction pads.While the non-contact suction pads draw in the plastic film 13, the gas flow from the non-contact suction pads cools the protective element 19 and increases its hardness. It is therefore easy to cut off the unnecessary part of the protective element 19.

[0063] Meanwhile, the table 82 could have a holding mechanism that can suction and hold the substrate 1. In this case, the upper surface of the table 82 is a holding surface 82a. The table 82 is, for example, a clamping table that has a porous element exposed on the holding surface 82a and a suction source connected to the porous element, and that suctions and holds the substrate 1 placed on the holding surface 82a by actuating the suction source.

[0064] The cutting unit 84 will be described next. The cutting unit 84 has a table 82 which supports the substrate 1 with the protective element 19 formed on its upper surface 1a. The cutting unit 84 further has: a rotating shaft 88 extending in a direction perpendicular to the holding surface 82a of the table 82; a disc-shaped cutting section support section 86 attached to a lower end of the rotating shaft 88; and a cutting section 90 attached to an outer circumferential side of the lower surface of the cutting section support section 86. The cutting section 90 is, for example, a cutting device with a sharp lower edge. A rotary drive source (not shown) is connected to an upper end of the rotating shaft 88.When the rotary drive source is actuated to rotate the rotary shaft 88, the cutting section 90, attached to the lower surface of the cutting section support section 86, moves in an annular orbit along the outer circumference 1c of the substrate 1. That is, the rotary drive source, the rotary shaft 88 and the cutting section support section 86 act as a cutting section motion unit 92 that moves the cutting section 90.

[0065] When the cutting unit 84 cuts the protective element 19, it lowers the rotating shaft 88 during the rotation and movement of the cutting section 90 by actuating the cutting section movement unit 92, causing the cutting section 90 to cut along the protective element 19. This means that the cutting unit 84 can cut the protective element 19 along the outer circumference 1c of the substrate 1 by moving the cutting section 90 along the outer circumference 1c of the substrate 1 by means of the cutting section movement unit 92. After the cutting unit 84 has cut off the unnecessary part of the protective element 19, grinding of the substrate 1 is possible. A collection unit 94 for the unwanted part, which gathers the cut-off unwanted part of the protective element 19, is provided at a position next to the table 82 at the base 4.For example, the unnecessary part of the protective element 19 is transferred from the transfer unit 24b to the collection unit 94. The unnecessary part is dropped onto the collection unit by releasing the suction mechanism and is then sucked up and collected. After the cutting unit 84 has cut off the unnecessary part of the protective element 19, the substrate transfer robot 10b transports the substrate 1, with the protective element 19 formed on its upper surface 1a, from the table 82 and places it in the cassette 8b attached to the cassette mounting base 6b. The cassette 8b is then transferred to the grinding device, which grinds the substrate 1 from the side of its lower surface 1b.

[0066] It should be noted that the present invention is not limited to the description of the preceding embodiment and can be modified and implemented in different ways. For example, while the preceding embodiment described a case in which the liquid plastic 15 is supplied to the upper surface 1a of the substrate 1 from above and the liquid plastic 15 is pressed from above over the cover film 17, the protective element forming device 2 according to one aspect of the present invention might not be limited to this. In particular, the protective element forming device 2 could distribute the liquid plastic 15 onto the cover film 17 and distribute the liquid plastic 15 by pressing the liquid plastic 15 from above through the substrate to which the plastic film 13 adheres. A modification of the protective element forming device 2 will be described next with reference to Fig.11. In the modification, the support surface of a support table 54a is formed by a light-transmitting element 70a, and the support table 54a is able to support the cover film 17 via the support surface. Then, the liquid plastic supply unit 56 delivers the liquid plastic 15 to the upper surface of the cover film 17 supported on the support table 54a.

[0067] The pressing unit 58, arranged above the support table 54a, can hold the substrate 1 by means of the pressing surface 68 in a state in which the upper surface 1a of the substrate 1, to which the plastic film 13 adheres, is facing downwards. In this downward-facing state, the substrate 1 is pressed from above through the flat pressing surface 68, so that the plastic film 13 adheres to the liquid plastic 15 on the cover film 17 supported by the support table 54a. The liquid plastic 15 is then pressed and distributed over the plastic film 13. An ultraviolet irradiation unit 66a, which cures the liquid plastic 15 by irradiating it with ultraviolet rays through the support surface of the support table 54a and the cover film 17, is housed in an upper section of the support table 54a.When the ultraviolet irradiation unit 66a is activated and the liquid plastic 15 is cured, the protective element 19 is formed on the upper surface 1a of the substrate 1 with the plastic film 13, the cured liquid plastic 15 and the cover film 17.

[0068] Even in the present modification, the protective element 19 cannot be adequately designed if the liquid plastic 15 is not sufficiently distributed over the specified area. Accordingly, a determination unit 76a is used. The determination unit 76a has the function of determining the state of the liquid plastic 15 distributed by the pressure unit 58. The determination unit 76a is designed in a similar manner to the determination unit 76 in the preceding embodiment. The determination unit 76a comprises: a camera 72a that photographs the liquid plastic 15 and the substrate 1 from below through the support surface of the support table 54a; and a determination section 74a that determines, based on an image taken by the camera 72a, whether the liquid plastic 15 is distributed over the specified area or not.The determination unit 76a further includes a notification section 78a, which issues a notification regarding a result of the determination by the determination section 74a.

[0069] In the present modification, the determination unit 76a can also determine whether the liquid plastic 15 is distributed over the specified area relative to the substrate 1 before the ultraviolet irradiation unit 66a cures the liquid plastic 15. The liquid plastic 15 is therefore cured after it has been confirmed that it is distributed over the specified area. Thus, the protective element 19 is appropriately distributed on the upper surface 1a of the substrate 1.

Claims

[1] Protective element forming device (2) for forming a protective element (19) on an upper surface (1a) of a substrate (1) having protrusions and depressions on the upper surface (1a), wherein the protective element (19) is flatter than the protrusions and depressions on the upper surface (1a), by layering a liquid plastic of an ultraviolet-curing type and a cover film (17) onto a plastic film (13) adhering to the upper surface (1a) of the substrate (1) to conform to the protrusions and depressions, wherein the plastic film (13) is larger than the substrate (1), wherein the protective element forming device (2) comprises: a support table (54) designed to support the substrate (1) with the plastic film (13) adhering to the upper surface (1a); a liquid plastic supply unit (56) designed to supply the liquid plastic to the plastic film (13) adhering to the substrate (1) supported on the support table (54); a pressure unit (58) with a pressure surface (68) capable of holding the cover film (17), wherein the pressure surface (68) is flat and has a light-transmitting property, wherein the pressure unit (58) is designed to distribute the liquid plastic over the plastic film (13) by pressing the liquid plastic supplied to the plastic film (13) through the pressure surface (68) over the cover film (17) held by the pressure surface (68); an ultraviolet irradiation unit (66) configured to cure the liquid plastic by irradiating the liquid plastic with ultraviolet rays through the printing surface (68) and the cover film (17) and to form the protective element (19) with the plastic film (13), the cured liquid plastic and the cover film (17); and a determining unit (76) designed to determine a state of the liquid plastic distributed by the pressure unit (58), where the unit of determination (76) comprises: a camera (72) designed to photograph the liquid plastic and the substrate (1) from above through the printing surface (68) of the printing unit (58), a determination section (74) which is designed to detect the liquid plastic and the substrate (1) from an image obtained by photographing with the camera (72) and to determine whether the liquid plastic is distributed over a predetermined area in relation to the substrate (1) and a notification section (78) designed to issue a notification regarding a determination result of the determination section (74). [2] Protective element training device (2) according to claim 1, wherein the camera (72) has a fisheye lens or a wide-angle lens arranged such that it is adjacent to the ultraviolet irradiation unit (66) and is installed at a position corresponding to a center of the facing substrate (1), and wherein the photography is carried out using the fisheye lens or the wide-angle lens. [3] Protective element forming device (2) for forming a protective element (19) on an upper surface (1a) of a substrate (1) having protrusions and depressions on the upper surface (1a), wherein the protective element (19) is flatter than the protrusions and depressions on the upper surface (1a), by layering a liquid plastic of an ultraviolet-curing type and a cover film (17) onto a plastic film (13) adhering to the upper surface (1a) of the substrate (1) to conform to the protrusions and depressions, wherein the plastic film (13) is larger than the substrate (1), wherein the protective element forming device (2) comprises: a support table (54a) having a support surface formed by a light-transmitting element, wherein the support table (54a) is able to support the cover film (17) through the support surface; a liquid plastic supply unit (56) configured to supply the liquid plastic to an upper surface of the cover film (17) supported on the support table (54a); a pressing unit (58) designed to press the substrate (1) from above through a flat pressing surface (68) in a state in which the upper surface to which the plastic film (13) adheres is facing downwards, so that the plastic film (13) adheres to the liquid plastic on the cover film (17) carried on the support table (54a); an ultraviolet irradiation unit (66a) configured to harden the liquid plastic by irradiating the liquid plastic with ultraviolet rays through the support surface of the support table (54a) and the cover film (17) and to form the protective element (19) with the plastic film (13), the hardened liquid plastic and the cover film (17); and a determining unit (76a) designed to determine a state of the liquid plastic distributed by the pressure unit (58), the unit of determination (76a) has: a camera (72a) designed to photograph the liquid plastic and the substrate (1) from below through the support surface of the support table (54a), a determination section (74a) which is designed to detect the substrate (1) and the liquid plastic from an image obtained by photographing with the camera (72a) and to determine whether the liquid plastic is distributed over a predetermined area in relation to the substrate (1) and a notification section (78a) designed to issue a notification regarding a determination result of the determination section (74). [4] Protective element training device (2) according to claim 3, wherein the camera (72a) has a fisheye lens or a wide-angle lens arranged such that it is adjacent to the ultraviolet irradiation unit (66a) and is installed at a position corresponding to a center of the facing substrate (1), and wherein the photography is carried out using the fisheye lens or the wide-angle lens.

Images