Sensor and measuring method for converting chemical and / or biochemical information of at least one analyte

Abstract

Sensor (1) for converting chemical and / or biochemical information of at least one analyte (90, 90') in a sample (9) into a measurement signal, comprising at least three cantilevers (2, 3), each of the cantilevers (2, 3) having a base and a deformable part, and a first and a second transducer (200, 220, 300, 320) being arranged on each of the cantilevers (2, 3), wherein at least two of the at least three cantilevers (2, 3) form a measuring tuple with the associated transducers (200, 220, 300, 320) and wherein the sensor (1) has at least two measuring tuples, a multiplexer (10) configured to receive a control signal from a control signal generator (8) in order to contact the transducers (200, 220, 300, 320) of the cantilevers (2, 3) of the measuring tuple corresponding to the control signal, an evaluation unit (12) which, on the basis of the detected electrical signals of the contacted measuring tuple, converts and outputs the chemical and / or biochemical information of one of the at least one analyte (90, 90') into a measurement signal, and a control signal generator (8) which has a database with the measurement tuples and is configured to send a control signal to the multiplexer (10).

Description

Technical FieldThe present invention relates to a sensor and a method for converting chemical and / or biochemical information of at least one analyte in a sample into a measurement signal, and to a method for producing a sensor.Prior ArtThe use of spring elements or cantilevers for the detection of analytes in samples is known. Here, the interaction of cantilevers with a sample liquid and the binding of the analyte in the sample to a coating of the cantilever is utilized in order to cause a deformation of the cantilever. From the deformation, it is then possible to infer the presence of the analyte via a strain gauge.The deformation of cantilevers by different surface tensions is described, for example, in Rasmussen, P. A., Hansen, O., & Boisen, A. (2005). Cantilever surface stress sensors with single-crystalline silicon piezoresistors. Applied Physics Letters, 86(20), 203502. https: / / doi.org / 10.1063 / 1.1900299.WO 2007 / 088 018 A1 furthermore proposes spring elements for use in biosensors such as DNA analysis, for example.DE 10 2021 107 255 A1 discloses a sensor for converting chemical and / or biochemical information of an analyte in a sample into an electrical signal, in order in this way to derive a qualitative and / or quantitative statement about the presence of the analyte in the sample on the basis of the electrical signal generated.However, if a sample is to be examined for a plurality of different analytes, a number of different sensors are necessary according to the prior art, all of which must be successively brought into contact with the sample. However, this prior art procedure is time consuming, sample intensive and cost intensive, since each sample can only be tested for one analyte.SUMMARY OF THE INVENTIONProceeding from the known prior art, it is therefore an object of the present invention to provide an improved sensor, its production, and a corresponding measurement method.The object is achieved by a sensor having the features of claim 1. Advantageous refinements emerge from the dependent claims, the description and the figures.Accordingly, a sensor for converting chemical and / or biochemical information of at least one analyte in a sample into a measurement signal is proposed, comprising at least three cantilevers, wherein each of the cantilevers has a base and a deformable part and wherein a first and a second transducer are arranged on each of the cantilevers, wherein at least two of the at least three cantilevers form a measurement tuple with the associated transducers, a multiplexer which is configured to receive a control signal of a control signal generator in order to contact the transducers of the cantilevers of the measurement tuple corresponding to the control signal, and an evaluation unit which converts and outputs the chemical and / or biochemical information of the analyte into a measurement signal on the basis of the detected electrical signals of the contacted measurement tuple.A sample refers here to a limited amount of a substance that has been taken from a larger amount of the substance, for example from a reservoir, wherein the composition of the sample is representative of the composition of the substance in the reservoir and can accordingly be deduced from the presence and composition of the substance of the sample for the corresponding occurrence in the reservoir.For example, a sample can be a saliva sample, or a blood sample, or can be a swab, in particular a throat swab or a nasal swab or an sinus swab, or can be harvested tissue. A sample comprises in particular any type of biological sample, as well as in particular samples from animals. A sample may also be a nonbiological sample, for example a sample of a chemical substance.In particular, a sample form can be converted into a further sample form, so that the analyte or its occurrence can be detected in a simple and reliable manner. For example, a smear can be dissolved in a liquid, so that the smear dissolved in the liquid is then the actual sample. For example, the sample can be or contain a lymph fluid or lymph.The sample then contains the chemical information and / or biochemical information about the analyte. An analyte is here the substance whose presence in the sample is to be detected qualitatively and / or quantitatively or is to be detected with the sensor. The analyte can be present in particular directly in the sample, or dissolved in the sample, or adhering to the sample or a part of the sample, in particular a sample particle. The analyte can also enter into a chemical, biological and / or physical interaction with the sample, so that the analyte can be detected only indirectly via a corresponding interaction.The chemical information may include, for example, the type of analyte, the concentration of the analyte, the presence of the analyte, the weight of the analyte, the reactivity of the analyte, the density of the analyte, etc. The biochemical information includes the same properties as the chemical information, but these substances may be formed by biological processes, for example. Biochemical information is mentioned in particular when the analyte has a particular influence on the biological circulation, for example the metabolism or on the immune systemFor converting the chemical and / or biochemical information of the analyte into an electrical signal, the sensor comprises a cantilever. A cantilever is a spring element which has a base and a deformable part.The base is an immovable part of the cantilever which is connected in particular in a fixed manner to a substrate and / or is supported and / or is worked out of the substrate. The base of the cantilevers is designed as a rigid base, so that only the deformable part of the cantilever is designed to be deformable.The deformable portion of the cantilever extends longitudinally beyond the substrate on which the base is disposed. In other words, the deformable part of the cantilever is suspended on one side from the base and is not supported by the substrate. By the deformable part protruding beyond the substrate, the deformable part of the cantilever can be bent, deflected and extended. The spatial boundary from which the cantilever is bendable, or the cantilever merges from the base into the deformable part, is called bending edge. The bending edge is usually an edge of the substrate when the cantilever protrudes beyond the substrate.If the cantilever is deformed, material stresses and forces are produced in or on the material of the cantilever, which can be measured. If such a material stress and / or force can be measured, a deformation of the cantilever can be deduced by this. A deformation may be a raising or lowering deformation. However, the cantilever can also deform itself, for example bulge, wave or distort.The transducers have the purpose of determining or measuring the deformation of the cantilevers. The transducers may be disposed on the base and the deformable portions of the cantilevers or disposed only on the deformable portions of the cantilevers. For example, deformation of the cantilever may result in the resistance of a transducer increasing or decreasing, while no deformation of the cantilever also causes no change in the resistance of the transducer. This can be effected, for example, by configuring the transducers on the principle of a strain gauge, whereby a deformation of the respective cantilever is manifested in a length change of the strain gauge of the transducer applied thereon and thus a deformation of the cantilever can be detected directly by a change in the resistance of the strain gauge.Thus, the chemical and / or biochemical information of the analyte becomes detectable via a deformation of the cantilever, a subsequent registration via a transducer, and finally via a change of an electrical property of the transducer.The transducers of the cantilevers of the measurement tuple can be designed and configured to output an electrical signal corresponding to the presence and / or the concentration and / or the quantity of the analyte in the sample.At least on the deformable part of at least one of the cantilevers, a receptor layer for selective absorption of the analyte can be applied, as a result of which a test cantilever is formed, and / or at least on the deformable part of at least one of the cantilevers, a reference layer for selective non-absorption of the analyte can be applied, as a result of which a reference cantilever is formed.A test cantilever may have a coating in this case, so that the test cantilever reliably deflects in the event of an interaction with a specific analyte or its surface tension changes. A reference cantilever may have a further coating, so that the reference cantilever deflects upon interaction with a further analyte or its surface tension changes. In this case, the test cantilever can also serve as a reference for the bending of the reference cantilever. In other words, both the reference cantilever and the test cantilever for different analytes may function as test cantilevers, respectively.However, it may also be that the reference cantilever has a coating which does not indicate any interaction with an analyte, so that the bending of the reference cantilever is only due to the physical environmental conditions,For example, the first transducer of the reference cantilever may cause a first electrical reference state by influence of the environmental conditions and interaction with the sample, while the interaction of the test cantilever with the environmental conditions of the sample causes a first electrical test state of the first transducer of the test cantilever.For example, the reference cantilever may be bent by a first amount due to the influence of the environmental conditions, such that the deflection causes a first reference state in the first transducer and a second electrical reference state in the second transducer.In turn, the test cantilever may be flexed by a second amount by the influence of environmental conditions and flexed by a third amount by the additional interaction with the analyte in the sample, which causes a first electrical test state in the first transducer and a second electrical test state in the second transducer.The comparison of the electrical states of the first and second transducers indicate a measure of the deformation of the cantilevers. At the same time, a comparison of the respective first transducers and / or the respective second transducers yields a measure of the difference in deformation of the cantilevers. This makes it possible to infer a specific influence of an analyte on the test cantilever.The construction with four transducers has the advantage that such a local calibration of the sensor is possible at the site of the influence of the sample and the analyte.A measurement tuple is a set of cantilevers with associated transducers. A measurement tuple can comprise, for example, two cantilevers with the associated transducers. However, a measurement tuple can also comprise adjacent cantilevers with the associated transducers. A measurement tuple can also comprise any desired number of cantilevers with the associated transducers. In particular, cantilevers with the associated transducers can belong to different measurement tuplees. In particular, the transducers of the cantilevers of a measurement tuple can communicate with one another via an electrical connection.In a measurement tuple, for example, all those cantilevers together with transducers are combined which are sensitive to a specific analyte or can serve as reference cantilevers for this analyte. The measurement tuple can then be used to detect accordingly whether the corresponding analyte is present in the sample.A measurement tuple is preferably composed of such cantilevers which have essentially the same resistance of their transducers and / or other characteristic physical or chemical features. In other words, the cantilevers and transducers in a measurement tuple have similar physical and chemical properties or different but previously known properties, such as homogeneity and coverage density of functional coatings. A measuring tuple is accordingly not restricted to a geometric arrangement of the cantilevers on the sensor chip. Rather, a logical assignment between different cantilevers of the sensor to one another can be achieved which is independent of the geometry and the local arrangement of the cantilevers.For example, 100 cantilevers can be divided into 5 by 20 measurement tuple, or into 2 by 50 measurement tuple, or into 50 by 2 measurement tuple, or 100 by 1 measurement tuple. The cantilevers can be distributed arbitrarily over the sensor. Statistical evaluations can be made from the different signals of the measurement tuple for an analyte. In particular, statistical evaluations can also be made from the combination of different signals of the measurement tuple for an analyte.By using measurement tuplees, it is possible, for example, to compensate for inhomogeneities in the substrate which would have an interference effect in the measurement if only cantilevers adjacent on a wafer substrate were test and reference cantilevers. The quality of the cantilevers and transducers then only corresponds with a certain statistical probability to the required quality criteria. In the case of a multiplicity of cantilevers and transducers, the probability thus increases that adjacent cantilevers have a different quality. However, the proposed use of measurement tuplees makes it possible, for example, to find the respectively ideal reference cantilever for a test cantilever independently of location. In other words, the respective reference cantilevers and test cantilevers can be assembled into measurement tuplees independently of their original production.A multiplexer of the sensor is configured to receive a control signal of a control signal transmitter and to contact the measurement tuple corresponding to the control signal.A multiplexer is therefore a device that can establish an electrical connection to a plurality of transducers in response to an electrical signal and can bring the plurality of transducers into an electrical connection with one another. Accordingly, a multiplexer enables alternating contacting of different transducers on the sensor. This makes it possible to contact a plurality of measurement tuple in succession or simultaneously with the multiplexer.For example, a first measurement tuple can examine a first analyte and output the electrical signal. For example, a second measurement tuple can examine a second analyte and output the electrical signal. It is also possible that there are a plurality of measurement tuple for a particular analyte.For example, a first measurement tuple can be sensitive to a first analyte and a second measurement tuple can be sensitive to a second analyte different from the first analyte, wherein preferably a plurality of measurement tuple is provided, wherein in each case at least one measurement tuple is sensitive to a specific analyte. Accordingly, different analytes can be measured with the sensor, a plurality of analytes being particularly preferred.The cantilevers of different measurement tuple can have different geometries and / or different materials. For example, a first measurement tuple can have a first cantilever geometry and a second measurement tuple can have a second cantilever geometry, wherein the first and second measurement tuple are sensitive to the same analyte, however. Both cantilever geometries can have specific advantages for the detection, so that weighting and processing of the electrical signals leads to a higher significance of the measurement signals.The sensor has an evaluation unit which, on the basis of the electrical signals of the contacted measurement tuple, converts the chemical and / or biochemical information of the at least one analyte into a measurement signal and outputs it.The transducers in the measurement tuple can, for example, send electrical signals to the evaluation unit. The evaluation unit can bundle, process and / or enrich the signals and output a corresponding measurement signal. For example, the evaluation unit can combine the electrical signals or take into account the shape and shape and the geometry of the cantilevers when generating the measurement signal. For example, the evaluation unit can also take into account the physical and / or chemical properties.An advantage of the invention is that different analytes can be analyzed using different measurement tuple. By contacting the individual measurement tuple, in the sense that the transducers of the cantilevers of the measurement tuple are contacted, a significantly faster and automated and more reliable or more stable and / or more reliable detection of the analytes in the sample can be carried out.At least on the deformable part of the test cantilever, a receptor layer for selective absorption of the analyte can be applied, and at least on the deformable part of the reference cantilever, a reference layer for selective non-absorption of the analyte can be applied,A receptor layer is a substance which can interact with the analyte. This in turn means that the receptor layer is chosen specifically for each analyte. Analogously, a reference layer is a substance which cannot interact with the analyte. The reference layer is therefore also selected specifically for the analyte.In this case, interaction means that the analyte is in chemical and / or biochemical and / or physical interaction with the receptor layer. In particular, the interaction can consist in a binding of the analyte to the receptor layer. Interaction may also consist in absorption or adsorption or chemisorption of the analyte to the receptor layer.The receptor and reference layers are preferably chemically identical with respect to possible interference influences and preferably differ only by the interaction with the analyte. A substance which is not the analyte accordingly interacts as strongly or as weakly with the receptor layer as with the reference layer.Selective uptake of the analyte at the test cantilever causes a force through the analyte to act on the test cantilever so that the test cantilever responds sensitively to the analyte. Accordingly, the other substances of the sample that are not the analyte contribute only to a noise floor in the form of a noise floor on the test cantilever. The force on the test cantilever increases, for example, the faster the greater the concentration of the analyte in the sample or the faster the surface of the cantilever is coated with the analyte. A maximum force possible for the respective design is achieved when the cantilever is completely covered.The selective non-uptake of the analyte at the reference cantilever, on the other hand, causes no force to act on the reference cantilever by the analyte, so that only the substances that are not the analyte contribute to a background noise in the form of a basic bending of the reference cantilever.This acting force may cause deformation of the deformable portion of the test cantilever while the deformable portion of the reference cantilever is not flexed. The basis for the deflection of the cantilever is the change in the surface tension by the interaction with the analyte. The change in surface tension results in an extension or contraction of the upper (or lower) surface of the cantilever. The differential expansion or contraction at the top and bottom causes an internal force or stress in the material, which leads to deformation.Reference cantilevers according to the prior art have only no receptor layer that reacts sensitively to the analyte. Although effects such as turbulence in the sample and the thermal drift of the sensor system can thereby be determined. However, in such a reference cantilever, the analyte may bind to the reference layer of the reference cantilever, for example, by non-specific binding. However, the analyte itself thereby contributes to the background noise. Therefore, in a sensor according to the prior art, reference measurements are necessary in a reference sample, i.e. a sample without analytes. Only in this way can the effect of non-specific binding of the substances which are not the analyte be determined.In the sensor according to the invention, the measurement method is drastically simplified by the selective non-uptake of the analyte by the reference cantilever, since the reference cantilever is not sensitive to the analyte and therefore the analyte also does not contribute to the background noise. Only the substances which are not the analyte contribute here to the background noise of the reference cantilever. To a certain extent, the selective non-uptake of the analyte at the reference cantilever can cause the reference cantilever to be exposed to the same turbulences, the same thermal drift and the same influence of all substances that are not the analyte, as in a reference liquid. However, with the difference that the reference signal is determined directly in the sample liquid.In particular, a reference cantilever with reference layer and a test cantilever with receptor layer bring about a significantly more specific analysis of the analyte than merely a reference cantilever without receptor layer, since both the reference layer and the receptor layer have a specific interaction or non-interaction with the analyte.The construction of the sensor with a measurement tuple which has a reference cantilever and a test cantilever has the advantage that two measurements can be carried out simultaneously in the sample, wherein the measurement of the reference cantilever can calibrate the measurement of the test cantilever. This allows environmental influences, such as chemical, thermal, mechanical, electrical, fluidic and gas flow disturbing influences, to be reduced to the respective measurement, so that an occurrence of the analyte can be concluded from the comparison of the measurement at the test cantilever and at the reference cantilever.These forces or material stresses, for example expansions or contractions, which can act on the cantilevers are finally detected by the transducers, wherein stresses of different strengths are detected by the transducers by means of expansions or contractions of different strengths.At least one measurement tuple can comprise at least one test cantilever and at least two reference cantilevers.This means that for example for a single test cantilever there are two reference cantilevers. By such multiple referencing, the specificity of the sensor can be increased.At least one measurement tuple can comprise at least two test cantilevers and at least one reference cantilever.This means that, for example, two test cantilevers are referenced by a single reference cantilever. Accordingly, a plurality of test cantilevers may be referenced with a single reference cantilever, whereby a plurality of test sensors may be placed on the sensor.At least one measurement tuple can comprise at least two test cantilevers and at least two reference cantilevers.For example, the sensor may include first and second test cantilevers that are chemically and physically very similar, and first and second reference cantilevers that are also chemically and physically very similar. For example, the first test cantilever could be referenced to the first or second reference cantilever. However, it is also possible for both test cantilevers to be referenced with both reference cantilevers.By using combined test and / or reference cantilevers, a particularly meaningful measurement signal can be generated.On the basis of a first measurement tuple, an analyte-specific measurement signal can be output and on the basis of a second measurement tuple, a disturbance-analyte-specific measurement signal can be output.A interfering analyte can interact, for example, with the analyte bound to the test layer, but not with the test layer or the analyte itself.However, it can also be that the interfering analyte binds to the receptor layer and thus a false positive test result is to be feared. However, it can also be that the interfering analyte binds to the analyte, so that it no longer binds to the receptor layer, so that a false negative test result is to be feared. However, it can also be that the interfering analyte binds to the receptor layer and thereby prevents binding of the analyte to the receptor layer.A second measurement tuple, which is sensitive to the interfering analyte, can uncover such a so-called cross reaction.At least two measurement tuple of the sensor can be sensitive to two different analytes.For example, a first measurement tuple can be used to detect a first analyte, while a second measurement tuple can be used to detect a second analyte.In particular, the detection can be the time-resolved measurement of the bending state of the cantilever in order to obtain information about the reaction kinematics of the analyte in the sample.As a result, different analytes can be detected with a single sensor, whereby the economic efficiency of such a sensor increases. In particular, by such a configuration, the sensor can be used for different analytes, so that a rapid analysis of the different analytes can take place.The cantilevers of different measurement tuple can have different geometries.For example, a first measuring tuple can have rectangular cantilevers, while a second measuring tuple has triangular cantilevers.Triangular and rectangular cantilevers have, for example, different natural frequencies. Due to the different natural frequencies, it is possible, for example, to filter out mechanical disturbances better, for example, the filtering out of airborne sound or of sound in the sample liquid.For example, a first measurement tuple can have a first rectangular shape and a second measurement tuple can have a second rectangular shape.Cantilevers of different sizes have a different bending behavior instead of identical cantilevers. In addition, the temporal response of the cantilevers to an analyte strongly depends on the size of the interaction surface.Accordingly, further parasitic effects can also be identified.However, it is also possible that cantilevers of different thicknesses can be used for the same analyte. In this way, in particular a very large dynamic range can be covered, in which the sensor delivers reliable signals of the analyte. For example, thick cantilevers can be used for the detection of a large amount of analyte, while thin cantilevers are used for the detection of small amounts of analyte.According to the invention, the sensor has a control signal transmitter which has a database with the measurement tuple and is configured to transmit a control signal to the multiplexer.The database can store, for example, the shape and shape of the cantilevers. The resistances of the individual transducers can likewise be deposited and / or the location of the cantilevers on the sensor and / or the analyte type or the analyte which can be measured with a respective cantilever. In addition, a list of compatible cantilevers can be stored for each cantilever. In this sense, the cantilever can be assigned to a measurement tuple. In particular, an individual cantilever and its transducers can also be assigned to different measurement tuplees.The control signal generator can send a control signal to the multiplexer, so that at least one measurement tuple is contacted. The control signal thus ultimately determines with which measurement tuple is to be measured, whereby it is in turn determined which analyte is to be determined.A flexible setting of the sensor can be achieved by the control signal generator. For example, different analytes may be measured in a sequence of measurements.For example, the measurement signals of the different analytes can also be sampled differently. For example, a first analyte can interact rapidly with the first receptor layer, while a second analyte interacts slowly with the second receptor layer.In the former case, for determining the reaction kinematics, for example, more measurement points can be recorded per minute or second or millisecond.The object set out above is furthermore achieved by a method for converting chemical and / or biochemical information of at least one analyte in a sample into a measurement signal with a sensor according to the invention having the features of claim 9. Advantageous refinements of the method are evident from the dependent claims and from the present description and the figures.Accordingly, a method for converting chemical and / or biochemical information of an analyte in a sample into a measurement signal with one of the sensors described above, comprising the following steps of selecting at least one measurement tuple specific for the analyte with the signal transmitter, contacting the cantilevers of the measurement tuple with the multiplexer, detecting the electrical signals of the transducers of the contacted measurement tuple with the evaluation unit, converting the chemical and / or biochemical information of the analyte with the measurement tuple specific for the respective analyte into a measurement signal with the evaluation unit, and outputting a measurement signal with the evaluation unit.In other words, the sensor can measure a plurality of analytes, wherein, for example, one or more measurement tuple can be available for each analyte.In a first step, a measurement tuple suitable for the desired analyte is therefore selected. The step of selecting can relate to the control signal transmitter, or the localization of a desired analyte in the corresponding database.In a further step, the desired measurement tuple or tuple is or are contacted by the multiplexer by a control signal. Accordingly, the individual transducers of the cantilevers can be contacted, but can also be interconnected with one another. It is thus possible, for example, to measure the resistance values of the individual transducers directly or to measure them with a compensating circuit, wherein this circuit comprises the typical characteristics of the transducers, such as the temperature-dependent resistance. However, it is also possible for the transducers to be connected in a bridge circuit by the multiplexer, so that only relative changes in the resistance values are output.In a third step, the detected electrical signals of the measurement tuple can be received with the evaluation unit. The evaluation unit accordingly receives, for example, the individual resistance values or the resistance changes in the measurement tuple.In a fourth step, a measurement signal can be output with the evaluation unit.This has the advantage that the data processing already takes place in the evaluation unit, so that a signal connection between the evaluation unit and, for example, an external computer is not loaded.The method can be carried out for all measurement tuple or can be carried out only for specific measurement tuple.For example, the sensor can have a first plurality of measurement tuple with which a first analyte can be measured and a second plurality of measurement tuple with which a second analyte can be measured. For example, only the measurement tuple for the first analyte can be selected for measurement, so that a faster measurement takes place. However, it can also be that all the measurement tuple of the first plurality of measurement tuple and subsequently the second plurality of measurement tuple are selected for measurement.The method can preferably be carried out sequentially, wherein the measurement tuple is successively selected and measured. Furthermore, this sequence also allows first the measurement tuple of the first plurality and then the measurement tuple of the second plurality of measurement tuple to be measured.In particular, a measurement tuple can comprise only a single cantilever with the associated transducers. In this sense, measured values for each individual cantilever can be recorded by a sequential measurement of the measurement tuple.For example, routine measurement of each such measurement tuple can be acquired and the measurement values can subsequently be processed. For example, any desired combination of measurement tuple can thereby be synthesized. However, it is also possible that by such a measurement of all cantilevers a first selection for a specific measurement tuple can be obtained, for example in the case that an unknown substance is to be examined with the sensor. For example, in the context of DNA sequencing, it is possible to infer the presence of a specific nucleotide sequence.The measurement signals can be output integrally for an analyte on the basis of a plurality of measurement tuplees, or the individual measurement signals of the individual measurement tuple can be output.Since different measurement tuple can be used for a single analyte, the electrical signals of the transducers associated with the measurement tuple can be calculated with one another in order to obtain better statistical significance and better accuracy.For example, a first measurement tuple can supply a first measurement signal and a second measurement tuple can supply a second measurement signal. However, it is also possible for the evaluation unit to first receive the electrical signals of the first measurement tuple and then to receive the electrical signals of the second measurement tuple and to weight the electrical signals and calculate them with one another.The output of the measurement signal may comprise a statistical analysis.As a result, the measurement signal can have a higher statistical relevance. For example, a plurality of test cantilevers can be offset with a plurality of reference cantilevers of a measurement tuple, so that a separate measurement signal can be output for each test cantilever. However, it is also possible for only a single measurement signal to be output for each measurement tuple. It is likewise possible for only a single measurement signal to be output for each analyte, even if this is determined by a plurality of measurement stages.The evaluation unit can output the measurement signals, for example, via an interface, for example, a wireless interface or via a cable. Via such an interface, for example, a computer or a smartphone or another mobile device can come into connection with the sensor.The object set out above is furthermore achieved by a method for producing a sensor having the features of claim 13. Advantageous refinements of the method are evident from the dependent claims and from the present description and the figures.Accordingly, a method for producing a sensor is proposed, which comprises the following steps: production of the cantilevers, production of the transducers on the cantilevers, characterization of the cantilevers and the associated transducers, assignment of the cantilevers to a measurement tuple on the basis of the characterization, lining the cantilevers of a measurement tuple with reference or test layers for a specific analyte.The method is based on the idea that, due to production-related fluctuations during the production of the cantilevers, it is expedient to detect an analyte only with such cantilevers that interact similarly with an analyte.Accordingly, a plurality of cantilevers are first produced.The cantilevers of the sensor can be manufactured in one piece from a substrate for this purpose. This has the advantage that the production step of the production only has to be carried out once, so that a time-efficient production method is ensured.The sensor can be composed of cantilevers of the same substrates. For example, all cantilevers can be produced from a silicon substrate of different wafers. The individual cantilevers can be separated from the various wafers in a subsequent "pick & place" process and assembled to form a sensor.For example, some processes can also run on the wafer scale, for example wet chemical processes. For example, if multiple analytes are to be detected, then the cantilevers may originate from different wafers.This has the advantage that only cantilevers of predetermined quality can be used for the sensor. In addition, the individualized coated cantilevers from a wafer can be installed in various test systems.The sensor can be composed of cantilevers of different substrates. This has the advantage that the cantilever can be selected in an analyte-specific manner. For example, an analyte can interact strongly with a first substrate, which could, however, distort the measurement signal. Accordingly, a chemically inert substrate may be selected for this particular analyte.In particular, the cantilevers of a measurement tuple can be arranged, for example, next to one another or can be arranged in a manner nested with the cantilevers of a further measurement tuple. For example, the installation space can be optimized by such an arrangement.The characterization of the cantilevers and the associated transducers may comprise quality parameters and / or performance parameters of the cantilevers and / or the associated transducers.A performance parameter may comprise a sensitivity and / or a specificity and / or a yield of a cantilever and / or transducer. It is of great importance for the user of a sensor that the respective analysis results are consistent and reliable or that the user receives an indication as to the probability or the certainty with which the respective analysis results are encumbered.A quality parameter can be, for example, the natural frequency of the cantilever, wherein the natural frequency provides information about the mechanical integrity. Such a parameter can, however, also be the actual surface after the production process or the stiffness. For example, different cantilevers may have the same stiffness when different substrates and surface geometries are used. The quality parameter may be a self-similarity of the transducer's electrical resistances. If the transducers have equal resistance, they are self-similar.It has been found that the self-similarity of the resistances of the resistor bridge is a good indicator of the quality of the transducers and can therefore also be used as at least one of the quality parameters which can be used for selecting the respective transducer.On the basis of the measured parameters, each cantilever together with the transducers can already be assigned to a measurement tuple. In the measurement tuple, for example, all cantilevers are then located which have similar physical properties and / or similar chemical properties.However, an artificial intelligence can also perform an assignment to specific measurement tuple from the quality parameters and / or performance parameters of the cantilevers and / or of the associated transducers. For this purpose, a threshold value can be determined, for example, for quality parameters and / or performance parameters, wherein the threshold value corresponds to a probability, on the basis of which the correctness of the measurement result is determined by a measurement using the cantilever and / or transducer. On the basis of the measured quality parameters, a correspondingly trained artificial intelligence can assign the cantilevers and / or transducers to a specific performance class, which for example have similar performance parameters. Finally, cantilevers and / or transducers with similar performance parameters can be assigned to the same measurement tuple and thus, for example, a specific specificity of the measurements can be ensured.If a list of quality parameters and / or performance parameters is thus present, a selection of cantilevers and / or transducers for a measurement tuple can be made, wherein the selection takes place taking into account the application scenario.The cantilevers in such a measurement tuple can then be coated with a test layer or a reference layer. In this case, for example, a first part of the cantilevers of the measurement tuple can be occupied by a first test layer, a second part of the cantilevers of the measurement tuple can be occupied by a second test layer, a third part of the cantilevers of the measurement tuple can be occupied by a first reference layer and a fourth part of the cantilevers of the measurement tuple can be occupied by a second reference layer. This can achieve, for example, the result that there are as many cantilevers with a reference coating in the measurement tuple as cantilevers with test coating.The position parameters of the cantilevers, i.e. the position of the cantilevers on the sensor, and the type of applied layer, and the performance parameters determined in the characterization can be stored in a database, so that a selection of corresponding measurement devices for a specific analyte is possible.The storage of the measurement tuple and the associated analyte can take place in a database on a control signal generator. As a result, the control signal generator can select corresponding measurement tuple for the detection of a specific analyte in a particularly simple manner and without user intervention.However, it is also possible for the database to be stored in the cloud as long as the control signal generator has access to it. For example, the database can also be stored in the EEPROM, in the cryptochip on the biosensor, and in control software stored on a terminal.The storage can preferably take place in encrypted form.Encryption is particularly important for data integrity. Since the output measurement signal contains, for example, health-relevant data, encryption of the data is important. Encryption prevents, for example, a sensor from supplying false-negative results to a computer.Brief Description of the FiguresPreferred further embodiments of the invention are explained in more detail by the following description of the figures. The following are shown: FIG. 1 shows a schematic structure of a sensor according to the prior art; FIG. 2 shows a schematic structure of the sensor according to the invention; FIG. 3 shows a schematic structure of an embodiment of the sensor according to the invention; FIG. 4 shows a schematic flow diagram of the measuring method; FIG. 5 is a schematic apparatus and method for measuring blood sedimentation; and FIG. 6 shows a schematic flow diagram of the production method.DETAILED DESCRIPTION OF PREFERRED EMBODIMENTSPreferred exemplary embodiments are described below with reference to the figures. Identical, similar or identically acting elements are provided with identical reference symbols in the different figures, and a repeated description of these elements is partly omitted in order to avoid redundancies.In FIG. 1 an embodiment of a sensor 1 for converting chemical and / or biochemical information according to the prior art is schematically shown. The sensor 1 comprises a test cantilever 2 having a base and a deformable portion. A first transducer 200 and a second transducer 220 are arranged on the test cantilever 2. Analogously, the sensor 1 also has a reference cantilever 3 which in turn has a base and a deformable part. A first transducer 300 and a second transducer 320 are arranged on the reference cantilever 3.The transducers 200, 220, 300, 320 are each connected via electrodes 40 to an electronics unit 4 which is capable of recording or transmitting the measurement signals of the transducers 200, 220, 300, 320, while the electronics unit 4 is also capable of supplying the transducers 200, 220, 300, 320 with current and / or voltage.The sensor 1 has the task of indicating the presence and preferably the amount of the presence of an analyte 90 in a sample 9. In Fig. 1, the sample 9 is a liquid, for example lymph or a diluted lymph. However, it can also be that the sample 9 is saliva or blood or another body fluid. It can also be that the sample 9 is derived from a tissue removal or was obtained and / or synthesized from another removed substance. The analyte 90 can be dissolved in the sample or can be present in an undissolved manner as a suspension or dispersion or emulsion.In any case, the sensor 1 is intended to examine the sample 9 with regard to the presence and / or a concentration and / or an amount of the analyte 90. For this purpose, a receptor layer with which an analyte 90 can interact or a receptor layer which can adsorb or absorb the analyte 90 is applied to the test cantilever 2.The interaction changes the surface tension of the portion of the deformable part of the test cantilever 2 coated with the receptor layer, which leads to a deformation of the deformable part of the test cantilever 2. The transducers 200, 220 therefore register a deformation of the deformable part of the test cantilever 2, which is in turn interpreted as a measurement signal in the electronics 4.However, a deformation can already occur due to the interaction with the sample liquid 9 itself by the transducers 200, 220, for example, by only the surface tension of the liquid acting on the deformable part 22 of the test cantilever 2 and deforming the latter. Accordingly, the presence of an analyte 90 is not responsible for such a deformation, but rather only the sample liquid 9.In order to establish or compensate or compensate for the magnitude of this basic effect of the sample 9 on the test cantilever 2, the reference cantilever 3 is simultaneously brought into contact with the sample 9 with the test cantilever 2. For this purpose, the reference cantilever 3 has a reference layer with which the analyte 90, which explicitly interacts with the receptor layer of the test cantilever 2, cannot interact at the moment. This selective non-uptake of the analyte 90 in the reference layer allows differentiation to the measurement signal of the test cantilever 2. Accordingly, the measurement signals of the transducers 200, 220, 300, 320 differ if an analyte 90 occurs in the sample 9. The measurement signals between the test cantilever 2 and the reference cantilever 3 thus differ exactly by the effect caused by the analyte 90.However, the test cantilever 2 and the reference cantilever 3 are located at different positions in the sample 9, so that different ambient conditions, such as temperature fluctuations or concentration gradients, etc., influence the measurement accuracy. However, these different environmental conditions can be corrected by comparing the measured values of the transducers 200, 220, 300, 320. Accordingly, the presence of an analyte 90 in a sample 9 can be analyzed in an isolated manner via the sensor 1 by reducing and isolating the influence of interactions which are not to be associated with the analyte 90 by a plurality of measurement points on the reference and test cantilevers 3, 2. This enables a high measurement accuracy of the presence of the analyte 90 in the sample 9.The transducers 200, 220, 300, 320 are contacted via electrodes 401, 402, 403, 404. Specifically, the second transducer 220 is connected to the second transducer 320 via the electrode 401. Further, the first transducer 200 is connected to the first transducer 300 via the electrode 403. The second transducer 220 is also connected to the first transducer 200 via the electrode 402, whereas the second transducer 320 is connected to the first transducer 300 via the electrode 404. This results in a total of four electrodes via which the transducers 200, 220, 300, 320 are electrically contacted with one another. The transducers 200, 220, 300, 320 are electrically connected in particular in a so-called full bridge.The sensor 1 proposed here is now schematically illustrated in FIG. 2. The sensor 1 here has, for example, at least one test cantilever 2 and one reference cantilever 3, the transducers of which can each be contacted with a multiplexer 10.In FIG. 2, the sensor has three test cantilevers 2, 2' which are sensitive to different analytes 90 and 90', respectively. In addition, the sensor 1 has two reference cantilevers 3, 3', which, for example, each allow selective non-uptake of the analytes 90 or 90'.The multiplexer 10 makes it possible to contact different cantilevers 2, 2', 3, 3' quasi simultaneously or briefly one after the other.In this way, the mutually associated cantilevers of a measurement tuple can be contacted in a targeted manner.A measurement tuple is a predetermined set of cantilevers with associated transducers. In the case outlined above, a first measurement tuple for measuring a first analyte 90 comprises at least one test cantilever 2 and at least one reference cantilever 3 and a second measurement tuple for measuring a second analyte 90' likewise comprises at least one test cantilever 2' and at least one reference cantilever 3'. A measuring tuple can also have at least two test cantilevers 2 and exactly one reference cantilever 3 or exactly one test cantilever 2 and at least two reference cantilevers 3.For example, multiplexer 10 may contact test cantilever 2 and reference cantilever 3. The test cantilever 2 and the reference cantilever 3 then form a first measurement tuple.For example, the multiplexer can contact the two test cantilevers 2' and the reference cantilever 3' simultaneously, so that both test cantilevers are referenced with the same reference cantilever 3'. The two test cantilevers 2' and the reference cantilever 3' then form a second measurement tuple.For example, however, the test cantilever 2 and the test cantilever 2' can also be interconnected with one another, so that the test cantilevers 2' can serve as a reference for the measured values of the test cantilever 2. The test cantilevers 2' and the test cantilever 2 then form a third measurement tuple.The electrical signals of the transducers of the different measurement tuple can be received with the evaluation unit 12 and evaluated to form a measurement signal.The different measurement tuple can be selected by a signal generator 8 of the multiplexer 10. The signal transmitter 8 can access, for example, a database in which the various measurement tuple is stored. The different measurement tuple is suitable here, for example, for the detection of a specific analyte 90.The individual cantilevers and / or the measurement tuple can be contacted successively, for example, in a rapid sequence using the multiplexer 10, so that the evaluation unit 12 can detect the electrical signals of the measurement tuple. The electrical signals can then be processed in the evaluation unit. For example, the evaluation unit 12 can synthesize a full bridge signal from the individual resistors of the transducers. However, it is also possible for the signals of different test cantilevers 2' to be first averaged and then be calculated using the reference cantilever 3'.FIG. 3 shows a further embodiment of the sensor 1. Although the test cantilevers can be sensitive to the same analyte 90, the test cantilevers 2 and 2' differ in their geometry or another performance and / or quality parameter.The cantilevers 2' and 3' can accordingly be associated with a first measurement tuple. In addition, the cantilevers 2 and 3 can be assigned to a second measurement tuple.The electrical signals of the measurement tuple can be read out, for example, one after the other by the evaluation unit 12. The evaluation unit 12 can then output the measurement signals of the individual measurement tuple, for example, or output an individual integral value. The integral value may include, for example, further data processing by taking into account the various geometries and / or the various performance and / or quality parameters.For example, in another embodiment 20 individual test cantilevers 2 and 20 individual reference cantilevers 3 may detect a single analyte 90. In a first variant, the electrical signals of the test cantilevers 2 can be averaged and the electrical signals of the reference cantilevers 3 can be averaged, wherein the measurement signal is the difference between the averaged signals. In a second variant, each of the test cantilevers 2 can be synthesized with each reference cantilever 3 into a full bridge, wherein the measurement signal is the mean value of the full bridge measurement values.By means of a further statistical analysis, it is possible, for example, to ignore outliers in the output of the measured values, or to detect an erroneous calculation or erroneous measured values. As a result, the significance of the measured values increases.In Fig. 4 there is schematically shown a method of the invention for converting chemical and / or biochemical information.In a first step U 1, at least one measurement tuple is selected with the signal transmitter 8. In a second step U 2, the measurement tuple is contacted with the multiplexer 10. The cantilevers of the measurement tuple or the measurement tuple can be contacted simultaneously or sequentially. The electrical signals of the contacted measurement tuple are detected with the evaluation unit in a step U 3 and converted into a measurement signal by the evaluation unit in a fourth step U 4. In a fifth step U 5, a measurement signal is output with the evaluation unit 12.For example, a sequential measurement may be performed for a plurality of selected measurement tuple (shown by the dashed line in FIG. 4 ). After each detection of the electrical signal of the contacted measurement tuple, a new measurement tuple can be contacted. The measured values are temporarily stored in the evaluation unit after each detection process, for example, and then converted into a measurement signal, for example.However, it is also possible for different analytes to be measured simultaneously. For example, the sample liquid reaches all cantilevers approximately at the same time, as a result of which the interaction of the analytes with the test layers or reference layers also begins at the same time. It is therefore particularly advantageous to measure all cantilevers or their transducers simultaneously.By measurement technology, this simultaneous measurement can be realized in that the multiplexer cyclically switches through the individual transducers of the cantilevers-preferably the cantilevers forming a measurement tuple directly one after the other. In this sense, for example, a sequential measurement is carried out even though all cantilevers within the period length of the measurement cycle are measured simultaneously.FIG. 5 shows a possible embodiment of the method. For example, the blood lowering is to be determined with the aid of the sensor 1. Blood sedimentation (blood cell sedimentation rate) indicates how fast the red blood cells sink in an unreasonably rendered blood sample. It is influenced by the number, shape and deformability of the red blood cells.For this purpose, a treated blood sample 9 is introduced into a tube, in which a sensor 1 according to the invention is also arranged. However, it can also be that the blood sample 9 is untreated, wherein the disturbing parameters are isolated by measurement using further measurement tuple. For example, every second of the cantilevers 2 shown can be used for the detection of the red blood cells; accordingly, for example, these two cantilevers 2 each form a measurement tuple.In a first scenario, the determined measurement tuple suitable for the detection of blood cells can be contacted successively. In particular, such measurement tuple can be meant that only have a cantilever with associated transducers. From the measurement of the chemical and / or biological information, it is possible to read as a function of the cantilever location how the presence of blood cells at the location of the respective cantilevers is.However, it is also possible for adjacent cantilevers to be put together in a measurement tuple and for these cantilevers to be contacted simultaneously. For example, the local gradient of the blood cell concentration can then be measured as a measurement value, for example as a resistance difference of the transducers, which is indicated by a bridge circuit.The measurement of the blood reduction can also be represented dynamically and in a time-resolved manner in this way.In particular, it is possible to repeat the measurements after a certain time. This makes it possible to link the time development of the gradient or the occurrence of the blood cells to the location of the cantilevers. This results directly in the determination of the rate of lowering of the blood cells.For example, in further measurement tuplees, a marker for a specific disease can be measured, so that, for example, the rate of depression can be linked to a specific protein or inflammation pathogen.FIG. 6 schematically shows a production method of a sensor 1 according to the invention. In a first step S 1, a plurality of cantilevers can first be produced. The cantilevers can be produced, for example, from a single substrate. However, it is also possible for the cantilevers to be produced from different substrates and / or in different geometries.In a second step S 2, the transducers can be arranged on the cantilevers.In a third step S 3, the cantilevers and the transducers can be characterized. For example, the natural frequencies of the cantilevers can be determined, wherein the natural frequencies then serve for characterization. Alternatively or additionally, the resistance values of the individual transducers can be determined, so that the resistance values can be used for characterizing the cantilevers. In addition, information can be incorporated into the evaluation by means of optical images which characterize cantilevers, for example, with regard to purity or prebending. For example, wafer properties measured by microindentation methods can also be incorporated into the characterization. In principle, all properties, measurement data obtained during production, and all combinations thereof and the findings obtained overall can likewise be included in the characterization.In a step S 4, the cantilevers together with the associated transducer can then be assigned to a measurement tuple. For example, those cantilevers can be assigned to a measurement tuple that have similar geometries and / or similar natural frequencies and / or whose transducers have resistance values that are as similar as possible.By assigning the individual cantilevers to a measurement tuple, the properties of the measurement tuple for the planned measurement of the respective analyte can advantageously be predetermined. For example, the electrical properties of a measurement tuple consisting of a test cantilever and a reference cantilever can be particularly advantageous if the determined resistances of all transducers are very similar. In other words, the measurement accuracy, for example a sensitivity and / or a specificity for a specific analyte of a measurement tuple, can be particularly high if the resistance values of the transducers are very similar and / or if other properties of the cantilevers are explicitly adapted to the respective analysis project.By the assignment of the individual cantilevers to a measurement tuple, particularly advantageous measurement properties can be achieved accordingly for the respective analyte to be measured.The assignment of the cantilevers making up the measurement tuple to one another does not need to be predefined here by the spatial arrangement of the cantilevers, but rather the cantilevers can be connected to measurement tuple by means of the multiplexer independently of their spatial arrangement. In other words, cantilevers which are not adjacent to one another or are arranged at a distance from one another can also be connected to form a measurement tuple.In a step S 5, the cantilevers assigned to a measurement tuple can be occupied by reference layers and test layers.In a further step or during the respective preceding steps, the measured values of the characterization and the occupancy of the cantilevers and of the measurement tuple can be stored in a database of the control signal transmitter.In particular, after the cantilevers have been covered with the respective test layers or reference layers, a recharacterization can be carried out within the scope of a quality control, the results of which are taken into account in the decision making for the formation of the measurement tuple.In a corresponding measuring method with the sensor according to the invention, for example as shown in FIG. 2, the sensor 1 shown can be connected to a computer via an interface 40, for example a cable 42 (not shown). The computer can be used, for example, to preset the analysis of a specific analyte 90. Via a data communication connection, the desired analyte can be sought and selected in the database of the signal transmitter 10.At least one measurement tuple can be assigned to the corresponding analyte in the database of the signal transmitter 10. Accordingly, the geometric localization of the cantilevers is also possible via the measurement tuple, and a corresponding electrical contacting of the associated transducers.The multiplexer contacts the measurement tuple and accordingly establishes an electrical connection to the transducers of the cantilevers.The transducers of the measurement tuple generate electrical signals which are finally received by the evaluation unit 12 and wherein the chemical and / or biochemical information of the analyte is converted into a measurement signal with the evaluation unit.The measurement signal is then output back to the computer.The communication with the computer may be encrypted. Likewise, the database and the communication on the sensor can be encrypted. Such encryption can be accomplished, for example, by a control device for encryption. Such encryption serves two purposes. On the one hand, the precise localization of the cantilevers of a measurement tuple should be encrypted in order to prevent a targeted manipulation of the cantilevers. On the other hand, an encryption should also be present at the interface 40, so that no manipulated false positive or false negative measurement signals can be output to the computer.Where applicable, all individual features illustrated in the exemplary embodiments can be combined with one another and / or interchanged without departing from the scope of the invention.List of reference characters1 Sensor 2 Test cantilever 200 Transducer 220 Transducer 3 Reference cantilever 300 Transducer 320 Transducer 4 Electronics 401, 402, 403, 404 Electrodes 8 Signal transmitter 9 Sample 90 Analyte 10 Multiplexer 12 Evaluation unit 14 Signal encryption unit 40 Interface 42 Cable

Claims

Sensor (1) for converting chemical and / or biochemical information of at least one analyte (90, 90') in a sample (9) into a measurement signal, comprising at least three cantilevers (2, 3), wherein each of the cantilevers (2, 3) has a base and a deformable part and wherein a first and a second transducer (200, 220, 300, 320) are arranged on each of the cantilevers (2, 3), wherein at least two of the at least three cantilevers (2, 3) form a measurement tuple with the associated transducers (200, 220, 300, 320) and wherein the sensor (1) has at least two measurement tuple, a multiplexer (10) which is configured to receive a control signal of a control signal transmitter (8) in order to contact the transducers (200, 220, 300, 320) of the cantilevers (2, 3) of the measurement tuple corresponding to the control signal, an evaluation unit (12), which converts and outputs the chemical and / or biochemical information of one of the at least one analytes (90, 90') into a measurement signal on the basis of the detected electrical signals of the contacted measurement tuple, and a control signal generator (8) which has a database with the measurement tuple and is configured to transmit a control signal to the multiplexer (10).Sensor (1) according to claim 1, characterised in that the transducers (200, 220, 300, 320) of the cantilevers (2, 3) of a measurement tuple are designed and configured to output an electrical signal corresponding to the presence and / or the concentration and / or the quantity of one of the at least one analyte (90, 90') in the sample (9).Sensor (1) according to Claim 1 or 2, characterized in that a receptor layer for selectively absorbing one of the at least one analyte (90, 90') is applied at least on the deformable part of at least one of the cantilevers (2), as a result of which a test cantilever (2) is formed, and / or a reference layer for selectively not absorbing the analyte (90, 90') is applied at least on the deformable part of at least one of the cantilevers (3), as a result of which a reference cantilever (3) is formed.Sensor (1) according to claim 3, characterised in that at least one test cantilever (2) and at least one reference cantilever (3) with the associated transducers (200, 220, 300, 320) form a measurement tuple specific for one of the at least one analyte (90, 90').Sensor (1) according to Claim 4, characterized in that - a measurement tuple comprises at least one test cantilever (2) and at least two reference cantilevers (3) with the associated transducers (200, 220, 300, 320) in each case, and / or - a measurement tuple comprises at least two test cantilevers (2) and at least one reference cantilever (3) with the associated transducers (200, 220, 300, 320) in each case, and / or - a measurement tuple comprises at least two test cantilevers (2) and at least two reference cantilevers (3) with the associated transducers (200, 220, 300, 320) in each case.Sensor (1) according to one of the preceding claims, characterized in that a first measurement tuple is sensitive to a first analyte (90) and a second measurement tuple is sensitive to a second analyte (90') different from the first analyte (90), wherein preferably a plurality of measurement tuple is provided, wherein in each case at least one measurement tuple is sensitive to a specific analyte (90, 90').Sensor (1) according to one of the preceding claims, characterized in that the cantilevers (2, 3) of different measurement tuple have different geometries and / or different materials.Sensor (1) according to one of the preceding claims, characterized in that the database and / or the control signal is encrypted.Method for converting chemical and / or biochemical information of an analyte (90, 90') in a sample (9) into a measurement signal with a sensor (1) according to one of the preceding claims, comprising the following steps: - selecting at least one measurement tuple specific for the analyte (90, 90') with the control signal generator (8), - contacting the cantilevers (2, 3) of the at least one selected measurement tuple with the multiplexer (10), - detecting the electrical signals of the transducers (200, 220, 300, 320) of the contacted measurement tuple with the evaluation unit (12), - converting the chemical and / or biochemical information of the analyte (90, 90') with the contacted measurement tuple into a measurement signal with the evaluation unit (12), and - outputting the measurement signal with the evaluation unit (12).Method according to claim 9, characterised in that the method is carried out for at least two different analytes (90, 90') with at least two measurement tuple specific for the different analytes (90, 90'), wherein the contacting of the different measurement tuple is preferably carried out sequentially or simultaneously.Method according to claim 9 or 10, characterised in that the measurement signals for an analyte (90, 90') are output integrally on the basis of a plurality of measurement tuple, or in that the individual measurement signals of the individual measurement tuple are output.Method according to one of claims 9 to 11, wherein the output of the measurement signal comprises a statistical analysis.Method for producing a sensor (1) according to one of Claims 1 to 8, comprising the following steps - production of the cantilevers (2, 3), - production of the transducers (200, 220, 300, 320) on the cantilevers (2, 3), - characterization of the cantilevers (2, 3) and of the associated transducers (200, 220, 300, 320), - assignment of the cantilevers (2, 3) with the transducers (200, 220, 300, 320) to a measurement tuple on the basis of the characterization, - covering the cantilevers (2, 3) of a measurement tuple with reference or test layers for a specific analyte (90, 90').Method according to claim 13, characterised in that - the cantilevers (2, 3) of the sensor (1) are produced in one piece from a substrate, or - the sensor (1) is composed of cantilevers (2, 3) from identical substrates, or - the sensor (1) is composed of cantilevers (2, 3) from different substrates.Method according to claim 13 or 14, characterised in that the characterization comprises the determination of the natural frequencies of the cantilevers (2, 3) and / or the determination of the resistances of the transducers (200, 220, 300, 320) and / or the determination of the geometry of the cantilevers (2, 3).Method according to one of claims 13 to 15, comprising the step of: - storing the measurement tuple and the associated analytes (90, 90') in a database to which the control signal transmitter (8) has access, preferably on the control signal transmitter (8), wherein the storing is preferably effected in encrypted form.

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