ELECTRO-OPTICAL SYSTEM WITH MECHANICALLY DECOUPLING EMC SEAL AND LASER SYSTEM

Abstract

The invention relates to an electro-optical system (1) comprising an electrical system part (2) and an optical system part (3). These system parts (2, 3) are arranged relative to one another such that light (9) can pass from the electrical system part (2) into the optical system part (3) through a coupling region (6). The system (1) also comprises at least one shielding element (7) surrounding the coupling region (6) for electromagnetic shielding, which forms an electrically conductive connection between the two system parts (2, 3). The shielding element (7) is arranged between the two system parts (2, 3) for mechanical decoupling from one another and is designed to be flexibly deformable. The invention further relates to a laser system comprising such an electro-optical system (1).

Description

The present invention relates to an electrical and optical system with an EMC seal, and to a laser system equipped with such an electronic and optical system.Electrical systems or installations are nowadays used in a wide variety of forms and applications and can have a considerable complexity in this case. At the same time, there are requirements with regard to electromagnetic compatibility (EMC). Therefore, special measures are often necessary in order to avoid unintentional escape of electromagnetic radiation, especially in the case of systems or installations which cannot be accommodated in a practicable manner in a single housing. However, such measures may in turn cause other problems, for example as transmission paths for disturbances or mechanical forces or vibrations.As one approach, U.S. Pat. No. 10,561,046 B2 describes a seal for a connection which seals between two housing components of an electrical or electronic device in accordance with an IP protection mode and with respect to EMC. The seal has a sealing body and a metallic carrier connected thereto with a plurality of contact segments for electrically contacting boundary surfaces of the two housing components. The seal is pressed in between these boundary surfaces. Although an EMC seal can be achieved if necessary, it is possible to transmit mechanical forces between the housing components via the seal, which can lead to an undesired disturbance or influence.It is an object of the present invention to enable a safe and robust and precise operation of a multipart electrical and optical system.The object is achieved by the subject matters of the main claim and the dependent claim or the independent claims. Further possible embodiments of the invention are specified in the dependent claims, the description and the drawing. Features, advantages and possible configurations which are set forth in the context of the description for one of the subject matters of the independent claims are to be regarded at least analogously as features, advantages and possible configurations of the respective subject matter of the other independent claims and of each possible combination of the subject matters of the independent claims, optionally in conjunction with one or more of the dependent claims.The electro-optical system according to the invention has an electrical system part for generating and / or guiding non-optical electromagnetic radiation or fields and an optical system part for generating and / or guiding light. Light is to be understood here in the broader sense, i.e. it can mean in particular the visible spectral range or also the adjacent infrared and / or UV spectral ranges. Non-optical radiation or fields accordingly lie in spectral ranges outside thereof, i.e. for example in the high frequency or a radio frequency range (RF, RF). The fact that the system according to the invention is referred to here as an electro-optical system means that it has functions and parts or components that operate primarily electrically or electrically and operate primarily optically or optically. The system therefore does not necessarily have to utilize an electro-optical effect in the actual sense.In the system according to the invention, the electrical system part and the optical system part are arranged relative to one another in such a way that the light can pass through a connection or coupling region from the electrical system part into the optical system part or vice versa from the optical system part into the electrical system part. The system according to the invention further comprises at least one shielding element, i.e. an EMC sealing element, which surrounds the coupling region for electromagnetic shielding or sealing. For example, the shielding element can thus extend in the circumferential direction around a propagation or beam direction of the light which extends through the coupling region between the two system parts and in the process extend from the electrical system part in or along the propagation or beam direction as far as the optical system part. The shielding element is thus arranged here such that it forms or establishes an electrically conductive connection between the electrical system part and the optical system part in the coupling region. For this purpose, the shielding element can be fastened in an electrically conductive manner, for example, by one side to the electrical system part, i.e., for example, a housing of the electrical system part, and by the other side to the optical system part or a housing of the optical system part.For example, the two system parts can each have their own electromagnetically shielding housing. However, these can each have apertures or recesses on at least one side, in particular on sides facing one another, in order to make possible a passage of the light there. In particular on the electrical system part, however, an escape of electromagnetic radiation or fields into the environment is to be prevented there. This is achieved in the present case by the shielding element. In a laser system, the electrical system part can comprise, for example, components for an electrical or electromagnetic pumping, i.e. for amplifying the laser light, while the optical system part can comprise, for example, optical components, such as mirrors and / or lenses, for deflecting and / or shaping the laser light or laser beam.According to the invention, the shielding element for mechanically decoupling the electrical system part from the optical system part is repeated without damage and is designed to be reversibly flexible, in particular inelastic or inelastic, deformable. In other words, the shielding element can therefore be arranged and designed here to minimize transmission of mechanical forces and vibrations from the one system part to the other system part while maintaining the electromagnetic shielding or seal. Due to an at least partially at least substantially inelastic deformability of the shielding element, restoring forces that otherwise occur during a deformation of the shielding element or a mechanical influencing of one or both system parts caused thereby can be avoided or minimized. In particular, for this purpose, the shielding element can neither be tensioned or braced between the two system parts nor pressed in between or by them. For example, the shielding element can be flexibly deformable in a central region between the two system parts and at least substantially free of mechanical stresses or forces. In its end regions, in which the shielding element is in mechanical contact with the system parts, i.e. is fastened or bears against the latter, mechanical forces or stresses can possibly act in order to ensure the mechanical and electromagnetically tight or sealing contact of the shielding element with the system parts and, for example, to maintain it even when one of the two system parts moves in a deformed manner relative to the other.In the intended installation position, the shielding element thus enables a damage-free relative movement between the two system parts while maintaining the EMC shielding. The mechanical decoupling is thus achieved on the basis of the flexibility, i.e. the flexibility or flexibility or the lowest possible stiffness of the shielding element. In previous approaches to solutions, there is often the problem that in particular electrical system parts, for example for generating RF, can tend to be mechanically oscillated or vibrated or, if appropriate, can themselves be exposed to mechanical forces, which can be transmitted to an optical system part in the case of a coupling to an optical system part which transmits rigid or mechanical forces. However, optical system parts may be highly sensitive or susceptible to mechanical forces, vibrations, shocks, or the like. Thus, in the case of optically sensitive components, for example components of a laser system, even relatively low forces of less than 10 Newton can have a significant influence on an optical alignment and thus ultimately on an optical performance, efficiency or effectiveness. The optical alignment means the setting or alignment of optical component axes or of the beam path or of a beam axis of the light guided in the electro-optical system, that is to say for instance a laser beam. This problem can be solved by the present invention. This is also supported in that, with the arrangement of the shielding element between the two system parts, i.e. for example between corresponding housings, the shielding element is or can be arranged automatically at a certain distance from mechanically sensitive or vibration-sensitive optical components of the optical system part. This may make it easier to avoid a direct coupling or action path for mechanical forces between the shielding element and the corresponding optical components and yet to produce or ensure overall the electromagnetic shielding or sealing of the entire electro-optical system. This can be seen, for example, in comparison to arranging a corresponding sealing point for the electromagnetic seal or shield directly on correspondingly sensitive optical components, since it can then be at least much more difficult to implement such a seal or shield at least substantially force-free, i.e. mechanically decoupled, with respect to the optical components.The shielding element can be so flexible or so easily deformable in itself that, during movements, thermal expansions or contractions, vibrations and the like, such strong force transmissions from one system part via the shielding element to the other system part do not occur that errors occur in the optical alignment. A stable optical alignment can thus be achieved in all operating points of the electro-optical system or of an overall installation comprising the latter. If, for example, a steel bellows were used for electromagnetic shielding instead, excessive mechanical forces could be transmitted from one system part to the other because of the rigidity even if the steel bellows were mounted on the system parts under only slight mechanical tension or prestress.In one possible embodiment of the present invention, the electrical system part is or comprises at least one part of an RF generator and / or an amplifier. The RF generator can be designed, in particular, as an RF generator for a laser system or for use in a laser system. Such generators can generate mechanical vibrations during operation, so that here the mechanical decoupling by means of the shielding element can be particularly useful. The amplifier can be configured or designed in particular for amplifying laser light. The electrical system part can therefore comprise terminals and / or electrodes, in particular at least one pair of RF electrodes or pump electrodes and / or coils and / or the like, for example. Such devices can also generate mechanical vibrations of a wide range of frequencies during operation and, for example, cause thermal expansion effects. In particular in the application of a laser system, the optical system part can also be particularly susceptible to such vibrations and / or-for example, thermally induced relative movements or position changes. At the same time, however, the use of RF energy, i.e. for example a correspondingly purely electrical or electromagnetic coupling of pump energy, can be realized particularly easily and can be controlled particularly accurately. Overall, the configuration proposed here can thus represent a particularly advantageous application of the present invention.In a further possible embodiment of the present invention, the optical system part is or comprises a beam source or a beam generator and / or an optical unit for laser light. Mechanical forces and vibrations can be particularly critical there, for example with regard to the optical alignment, the efficiency and a reliable functioning. Accordingly, the mechanically decoupling effect of the shielding element can thus be particularly useful here. The optics can have one or more optical components or components, for example for light or beam guidance and / or shaping. The optics can, for example, each comprise at least one mirror and / or a lens and / or a beam splitter and / or a phase element for imparting or displacing a phase and / or the like.In a further possible embodiment of the present invention, the shielding element is flexible, in particular inelastic, deformable at least in regions in all three spatial directions without damage. Thus, a particularly complete and effective mechanical decoupling between the electrical system part and the optical system part can be realized. Depending on the configuration or function of the system parts, a particularly robust, reliable and / or precise operation can thus be made possible. In order to enable the flexibility or deformability of the shielding element provided here, it can be correspondingly oversized, for example in a central region, that is to say between its ends or fastening points, that is to say can have additional material as minimum necessary for the connection of the two system parts, and / or be free of continuous rigid or rigid elements or structures, which are in particular connected to one another and elongate in different directions.In a further possible embodiment of the present invention, the shielding element is designed such that its extent and / or its at least regional position in all spatial directions in which it is flexibly deformable without damage can be changed by at least 5 mm in each case, starting from a neutral or middle position, while maintaining the electrically conductive connection of the two system parts to one another. The neutral or middle position can be that position or arrangement of the shielding element and the two system parts in or in which an equally large change of the shielding element or relative movement of the two system parts in both directions is possible in each dimension without destroying the shielding element or detaching it from one of the system parts. Starting from there, the shielding element can therefore be variable by at least 5 mm, for example, and can be shortened by at least 5 mm in the connection direction between the two system parts, and can allow a transverse movement of the one system part relative to the other system part in both directions in each case, i.e., in the positive and negative vertical direction, and in the positive and negative lateral direction by at least 5 mm in each case. Such a design of the shielding element can typically be implemented in a relatively simple and low-complexity manner, as well as without an excessive installation space requirement and without an excessive additional weight, and in this case offer sufficient clearance for a reliable and robust mechanical decoupling of the two system parts for many practical applications.In a further possible embodiment of the present invention, the shielding element is designed such that it enables a rotation of the two system parts relative to one another by several degrees about all three spatial axes without damage. In other words, one of the two system parts can then be rotated, for example, about one or more arbitrary spatial axes relative to the other system part by, for example, at least or up to 5° or by at least or up to 10°, without damaging the shielding element and without interrupting the electromagnetic shielding. This can enable a particularly effective mechanical decoupling of the two system parts and thus ultimately also benefit a particularly robust, reliable and precise operation of the corresponding system.In a further possible embodiment of the present invention, the shielding element is formed at least partially, in particular only partially, from a metallic material or material. This can enable particularly effective electromagnetic shielding with particularly low material outlay. In order to achieve the flexibility or deformability of the shielding element, the metallic material can be configured, for example, as a film or as a coating of a flexible or deformable carrier material or can be embedded in a flexible or deformable matrix of a carrier material.In a further possible embodiment of the present invention, the shielding element is configured at least or only partially or at least or only in regions as a textile and / or as a mat and / or as a network or network structure. As a result, the flexibility and deformability described elsewhere can be realized with at the same time particularly effective mechanical decoupling. Here, for example, a so-called EMC textile can be used as textile, which can contain, for example, metallic threads or wires woven in. A mat can be formed, for example, at least partially from an electrically conductive elastomer or an elastomer or rubber material with an electrically conductive, in particular metallic, material or material embedded therein or applied thereto as a coating. A configuration as a network can be realized, for example, in the form of a network or grid structure or a braid of electrically conductive wires, that is to say, for example, as a copper network or copper wire braid. Correspondingly thin wires, for example, card-wire or fine-wire wires, can be used in order to achieve the described flexible deformability. In the embodiment proposed here, the shielding element can be particularly simple and effectively simultaneously electromagnetically shielding and flexurally slack or resilient, that is to say not independently without support, shape-retaining and therefore correspondingly flexible, in particular inelastic, deformable or configured.In a possible development of the present invention, a fixed hollow structure is located or extends in the coupling region between the electrical system part and the optical system part. The shielding element is then placed at least in regions on the outside of this fixed hollow structure. For example, the shielding element can be drawn onto the hollow structure from one side in the direction of or parallel to the central axis of the hollow structure before the installation of the hollow structure. The solid hollow structure can be, in particular, a hollow cylinder or a ring. This fixed hollow structure always ensures reliable transmission possibility for the light through the coupling region despite the flexibility and deformability of the shielding element. In order to avoid transmission of mechanical forces or vibrations between the system parts via the fixed hollow structure, the latter can be guided, for example, through respective openings in the system parts or their housings and can be movably mounted therein in each case. Likewise, the fixed hollow structure cannot extend, for example, at its ends entirely as far as the optical system part or its housing, so that a gap or distance can be provided there. The fixed hollow structure can then be supported or held by the shielding element, for example, and / or in turn support the shielding element, i.e., can serve for shaping to a certain extent. The shielding element can in turn be fastened to or in one or both of the system parts or their housings. In this case, the shielding element can then optionally surround or bridge the gaps or distances between the hollow structure and the system parts or housings and electromagnetically shield or seal them. For example, in a laser system, the hollow structure can be a closed hollow cylinder, for example made of quartz glass or the like. Therein, an, in particular gaseous, laser medium or laser amplification medium can be contained. Energy can be coupled into this, for example, in the electrical system part, for example by means of electrodes arranged next to it, which energy can then be transmitted to laser light passing through. Such a hollow structure can extend, for example, from the electrical system part into the coupling region or as far as into the adjoining optical system part. Likewise, such a hollow structure can extend, for example, through the electrical system part and protrude on mutually opposite sides from the latter or its housing, for example into a coupling region or optical system part arranged there in each case.In a further possible embodiment of the present invention, it is provided that the shielding element is or is frictionally fastened at least in regions to the electrical system part and / or to the optical system part. For example, the shielding element can be fastened to the system parts by means of a respective clamping or by means of a respective clamping ring. If the shielding element is fastened, for example, to a respective housing of the system parts, these housings can have an opening or recess through which the light can pass or be transmitted. The shielding element can then be fastened around this opening or recess. A frictional fastening or connection can thereby enable a particularly good or tight contact between the shielding element and the respective system part or housing and thus a particularly good electromagnetic shielding or seal. In addition, a frictional connection can avoid damage to the shielding element and thus enable a particularly flexible and maintenance-friendly construction of the electro-optical system. By means of the frictional connection or coupling, a relative movement between the shielding element and the respective system part can be made possible without loss of the electromagnetic tightness, for example in the radial direction, i.e. perpendicular to the light or beam propagation direction in the coupling region. For this purpose, the shielding element can have, for example, a perforated disk, the inner diameter of which is large enough to allow a relative movement in the radial direction, for example relative to the hollow structure mentioned elsewhere, which can be passed through the perforated disk here. The perforated disks can bear frictionally with their side facing the respective system part against this or a corresponding counter piece which can be fastened in particular fixed relative to the respective system part to this or can be part of the respective system part or of its housing.In a further possible embodiment of the present invention, the shielding element has at least one fold and / or corrugation, i.e. one or more bends or wavy distortions or bulges or bulges, at least in the intended installation position or during or immediately after initial assembly of the system. This runs or run transversely to a connecting direction or connecting line running in the coupling region from the electrical system part to the optical system part. The shielding element can therefore be shaped like a bellows, for example, or-for example in the embodiment described elsewhere as a textile or mat or net-be compressed in the connecting direction in order to effect or produce a fold. The at least one fold or shaft can be at least partially flattened when the two system parts are moved away from one another in or along the connection direction. In this case, the length of the shielding element in or along the connecting direction can therefore then increase, substantially without transmitting corresponding tensile forces from the one system part to the other system part. Likewise, when the shielding element is shortened or compressed in or along the connecting direction, one or more folds or corrugations can arise and / or one or more predefined folds or folds or fold or fold lines can function as predefined points or projections for warping or warping or warping or warping of the shielding element. In this way, a transmission of corresponding compressive forces between the system parts can be avoided or at least reduced or kept particularly low. The design of the shielding element proposed here can thus enable a particularly low-resistance shortening or upsetting and lengthening or stretching of the shielding element and thus a particularly effective mechanical decoupling of the two system parts from one another.In a further possible embodiment of the present invention, the electro-optical system also has at least one second optical system part. Accordingly, the optical system part mentioned elsewhere can also be referred to as the first optical system part. The second optical system part is connected to the electrical system part via a corresponding second coupling region, wherein this second coupling region is electromagnetically shielded by means of its own or second shielding element. The two optical system parts can be arranged, for example, on different, in particular opposite, sides of the electrical system part or can be coupled or connected to the latter. The second shielding element can be constructed or configured like the shielding element mentioned elsewhere, wherein the latter can also be referred to as the first shielding element. In the embodiment proposed here, the system according to the invention has more than two system parts, which can make a respective mechanical decoupling of the system parts from one another even more important and more useful.The present invention also relates to a laser system comprising the electro-optical system according to the invention. In this case, this electro-optical system-and thus also the laser system according to the invention-is configured for generating and / or amplifying laser light or laser radiation. The electrical system part can be configured in particular for providing electrical or electromagnetic energy. The laser system according to the invention can in particular be the laser system mentioned in connection with the electro-optical system according to the invention or correspond to this.Further features of the invention can be derived from the following description of the figures and from the drawing. The features and combinations of features mentioned above in the description and the features and combinations of features shown below in the description of the figures and / or in the figures alone can be used not only in the respectively specified combination but also in other combinations or alone without departing from the scope of the invention.The drawing shows in FIG. 1 shows a schematic illustration, in sections, of an electro-optical system with connected but mechanically decoupled system parts; FIG. 2 is a schematic illustration of a detail of an electromagnetic sealing region between the system parts; FIG. 3 shows a schematic exploded view, in section, of components from the sealing region; and FIG. 4 shows a schematic sectional illustration of the components from the sealing region in sections.FIG. 1 shows a schematic illustration of a portion of a system 1. the system 1 here comprises an electrical system part 2 and an optical system part 3, so that it can also be referred to as an electro-optical system 1. The electrical system part 2 serves for generating or providing electromagnetic high or radio frequency fields, for example for amplifying laser light. The optical system part 3 serves for generating and / or guiding laser light. Corresponding laser light can then be output, for example, via an output 4 indicated schematically here.By way of example, the system 1, for instance on both sides of the electrical system part 2, can have a plurality of such optical system parts 3 or the optical system part 3 can be configured in multiple parts.In order to make it possible for the laser light to pass through the system parts 2, 3, these are arranged relative to one another in a specific manner. However, in order to prevent electromagnetic fields, i.e. for instance the RF radiation, from emerging from the electrical system part 3, the two system parts 2, 3 are connected to one another. In particular, however, the electrical system part 2 is not always free from oscillations or also, for example, thermally induced movements or changes in size. A transmission of such disturbances to the optical system part 3 or optically active components optionally present therein could, like external force effects, generally have a negative effect, for example on a beam guidance, a beam quality and / or the like of the laser light, for example due to a displacement and / or deformation of components of the optical system part 3. At the same time, however, in the sense of electromagnetic compatibility, uncontrolled spreading of electromagnetic radiation out of the electrical system part 2 or the system 1 as a whole into the environment should also be avoided.For this purpose, the optical system parts 3 are in the present case connected to side walls 5 of the electrical system part 2 in each case via a coupling region 6 lying therebetween. A respective shielding element 7 is located in the coupling regions 6, and the shielding elements 7 serve for electromagnetic shielding or sealing and are designed for the greatest possible mechanical decoupling of the optical system parts 3 from the electrical system part 2. For this purpose, the shielding elements 7 are at least partially formed from an electrically conductive material, whereby an electrically conductive contact is established between the respective optical system part 3 and the electrical system part 2. At the same time, the shielding elements 7 are flexible or flexibly deformable. For example, the shielding elements 7 can be formed from an electromagnetically shielding textile or a corresponding mat or net structure and have such a low rigidity that they are movable in all six translatory and rotatory degrees of freedom without transmitting significant mechanical forces between the system parts 2, 3 respectively coupled to one another. This mechanically decoupling configuration or effect of the shielding elements 7 can therefore prevent or reduce external mechanical influences on the respective optical system part 3, such that a corresponding negative influence, for example of an alignment of optical components of the respective optical system part 3, can be avoided.In order to achieve the corresponding flexibility or deformability of the shielding elements 7, these can be formed not only from a correspondingly flexible material, but also each have one or more folds 8. For example, the housings of the electrical system part 2 and of the optical system part 3 can have openings or passages or apertures on their mutually facing sides, in particular round openings, one end of the respective shielding element 7 being fastened in each case therearound. The shielding elements 7 can be folded or corrugated and mounted under at most low mechanical tension. Mechanical forces of at most 10 N or at most 5 N or at most 1 N can be applied, for example, at the fastening or contact points of the shielding elements 7 with the respective system part 2, 3 when the system 1 is designed as intended. Thus, the shielding elements 7 enable an at least almost mechanically decoupled RF seal on optically sensitive components, in this case therefore on the optical system parts 3, and also an at least substantially force-free relative movement of the system parts 2, 3 with respect to one another without loss of the RF tightness, in other words of the EMC shielding. This is the case because the folds 8 can offer or enable sufficient compensating movements or compensating changes in shape of the shielding elements 7, so that for example relative movements of the system parts 2, 3 coupled to one another therewith can be possible in all three spatial directions of at least 5 mm and rotations about all three spatial axes relative to one another of for example up to 10° or more.The system 1 is designed here for a laser system or as part of a laser system. For the sake of clarity, a laser steel 9 is indicated, which passes through the system 1. The laser beam 9 can be deflected in the one optical system part 3 at a mirror 10 arranged there in the direction of the electrical system part 3; this mirror 10 can therefore be one of the aforementioned optical components or one of the aforementioned optically sensitive components. In the electrical system part 2, a gas tube 11, for example made of quartz glass or the like, is arranged here. By way of example, this gas pipe 11 extends here from the one optical system part 3, through the electrical system part 2 to the other optical system part 3 and through the coupling regions 6 lying therebetween. The gas pipe 11 is arranged such that the laser beam 9 can pass through the gas pipe 11 in the axial direction. The gas pipe 11 may contain a gas by which the laser beam 9 passing therethrough may be amplified. For this purpose, the electrical system part 2 also comprises electrodes 12 for generating the RF fields. These electrodes can thus be supplied with RF power and, due to their arrangement around the gas tube 11, couple energy into the gas contained therein.To illustrate the electromagnetically tight connection of the shielding elements 7 to the system parts 2, 3, FIG. 2 shows a schematic cross-sectional illustration in sections. Here, an end-side part of a shielding element 7 annularly surrounding the gas pipe 11 is shown. This has a depression 13 or groove extending in the radial direction and a spring element 14 arranged therein or thereon. The depression 13 is here merely purely schematic and is, for example, rectangular in shape and can likewise have, for example, a rounded bottom and / or obliquely protruding flanks or side walls. The spring element 14 can be fastened, for example, to its inner edge facing the gas pipe 11, while its outer edge can be free or loose.Furthermore, a perforated disk 15 annularly surrounding the gas pipe 11 and the shielding element 7 or its part illustrated here is also illustrated. This perforated disk 15 can be fixed, for example, on the respective system part 2, 3 or can be part of its housing. The perforated disk 15 has an annular region or collar which projects inwardly, that is to say in the direction of the gas tube 11, and which is referred to here as spring contact element 16. This projects here partially into the depression 13. In particular, the spring contact element 16 does not reach the bottom of the depression 13. A compensation region 17 thus remains between the spring contact element 16 and the bottom of the depression 13, which compensation region allows a movement of the shielding element 7 relative to the perforated disk 15-and thus also relative to the respective system part 2, 3-in the radial direction.The spring element 14 can be mechanically prestressed, so that it applies a force in the direction of the opposite inner wall of the depression 13 at its free end, that is to say its outer edge. For this purpose, the spring element 14 can be manufactured from spring steel, for example. The spring element 14 thus presses against the spring contact element 16 and the latter against the opposite inner wall of the depression 13, which produces there an electromagnetically more tight frictional contact between the shielding element 7 and the respective system part 2, 3, which permits a relative movement and can therefore damp a transmission of force.For further illustration, FIG. 3 shows an exploded view, cut in sections, of components as can be used in the region of one of the coupling regions 6, in order to realize there the electromagnetically tight connection of the shielding element 7 to the respective system part 2, 3. Here, too, the perforated disk 15 is shown by way of example, which can be fixed to the respective system part 2, 3. In the variant shown here, for example as parts of the shielding element 7, an axial compression spring disk 18 and a radial decoupling spring disk 19 are shown. These can be manufactured from spring steel, for example. The axial compression spring disk 18 can functionally correspond to the spring element 14 from FIG. 2, i.e. bring about a pressing force in the axial direction in order to ensure that the shielding element 7 bears against the perforated disk 15 and thus against the respective system part 2, 3. The radial decoupling spring disk 19 can abut on the axial compression spring disk 18, but have a smaller diameter than the latter and thus enable compensating movements of the shielding element 7 relative to the perforated disk 15 or the respective system part 2, 3 in the radial direction-i.e. perpendicular to the beam direction of the laser beam 9. In the axial direction, the components mentioned can be held together by clamping rings 20.For further illustration, FIG. 4 shows a detail schematic detail view of a detail of the components from FIG. 3 in the intended installation position. It can be seen here that the inclined or bent axial compression spring disk 18 can bear both on the radial decoupling spring disk 19 and on the perforated disk 15 and / or the clamping rings 20. The radial decoupling spring disk 19 of smaller diameter can perform or enable compensating movements into the compensating region 17 in the radial direction while maintaining contact with the axial compression spring disk 18.Overall, the examples described show how a mechanically decoupled RF seal can be realized and applied.LIST OF REFERENCE CHARACTERS1 System 2 Electrical system part 3 Optical system part 4 Output 5 Side wall 6 Coupling region 7 Shielding element 8 Fold 9 Laser beam 10 Mirror 11 Gas tube 12 Electrodes 13 Depression 14 Spring element 15 Perforated disk 16 Spring contact element 17 Compensation region 18 Axial compression spring disk 19 Radial decoupling spring disk 20 Clamping ringsReferences included in the specificationThis list of documents cited by the applicant has been produced in an automated manner and is only included for the better information of the reader. The list is not part of the German patent application or utility model application. The DPMA does not take any adhesion for any faults or omissions.Patent Literature citedU.S. Pat. No. 10,561,046 B2

[0003]

Claims

Electro-optical system (1) comprising an electrical system part (2) for generating and / or guiding non-optical electromagnetic fields and an optical system part (3) for generating and / or guiding light (9), which are arranged relative to one another such that the light (9) from the electrical system part (2) can pass over into the optical system part (3), and a shielding element (7) surrounding the coupling region (6) for electromagnetic shielding, which shielding element forms an electrically conductive connection of the electrical system part (2) to the optical system part (3), wherein the shielding element (7) is configured to be flexibly deformable for mechanically decoupling the electrical system part (2) from the optical system part (3).Electro-optical system (1) according to claim 1, characterised in that the electrical system part (2) comprises at least one part (12) of a high-frequency generator, in particular for a laser system, and / or of an amplifier, in particular for amplifying laser light.Electro-optical system (1) according to one of the preceding claims, characterized in that the optical system part (3) comprises a beam generator and / or an optical unit (10) for laser light (9).Electro-optical system (1) according to one of the preceding claims, characterized in that the shielding element (7) is flexible, in particular inelastic, deformable in all three spatial directions.Electro-optical system (1) according to one of the preceding claims, characterized in that the shielding element (7) is designed such that its extent and / or position in all spatial directions in which it is flexibly deformable can be changed by at least 5 mm in each case, starting from a central position, while maintaining the electrically conductive connection of the two system parts (2, 3) to one another.Electro-optical system (1) according to one of the preceding claims, characterized in that the shielding element (7) is designed such that it enables a rotation of the two system parts (2, 3) relative to one another by several degrees in each case about all three spatial axes without damage.Electro-optical system (1) according to one of the preceding claims, characterized in that the shielding element (7) is formed at least partially from a metallic material.Electro-optical system (1) according to one of the preceding claims, characterized in that the shielding element (7) is designed as a textile or mat or mesh.Electro-optical system (1) according to claim 8, characterised in that in the coupling region (6) a fixed hollow structure (11), in particular a hollow cylinder or ring, extends between the electrical system part (2) and the optical system part (3) and the shielding element (7) is placed on the outside on this fixed hollow structure (11).Electro-optical system (1) according to one of the preceding claims, characterized in that the shielding element (7) bears frictionally against the electrical system part (2) and / or against the optical system part (3).Electro-optical system (1) according to one of the preceding claims, characterized in that the shielding element (7) has at least one fold (8) and / or shaft (8) extending transversely with respect to a connection direction running in the coupling region (6) from the electrical system part (2) to the optical system part (3).Electro-optical system (1) according to one of the preceding claims, characterized in that the system (1) also comprises a second optical system part (3) and the coupling region (6) of which to the electrical system part (2) is shielded electromagnetically by means of its own shielding element (7).Laser system, comprising an electro-optical system (1) according to one of the preceding claims, which is configured for generating and / or amplifying laser light (9).

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