Lock valve

Abstract

A sluice gate valve comprising a sluice gate opening, a sluice gate cover, at least one lever arm, and at least one coupling system, wherein the sluice gate opening is surrounded by a flange with a first sealing surface, the sluice gate cover has a front face with a second sealing surface, the coupling system comprises a bolt, a centering disc, and an elastic element; wherein the bolt has a first end with a bolt head and a second end that is attached to the lever arm, the centering disc has a centering disc opening that extends through the centering disc, the centering disc being attached to the sluice gate cover and arranged between the first and second ends of the bolt such that the bolt projects through the centering disc opening, and the elastic element is arranged between the lever arm and the centering disc;wherein, in a closed state of the lock valve, the second sealing surface is in gas-tight contact with the first sealing surface and a force transmission path runs from the lever arm to the flange via the elastic element.

Description

[0001] The present invention relates to a sluice valve, in particular a flap transfer valve for preferably gas-tight sealing and complete release of an opening. Preferably, this opening can represent an interface between an at least potentially atmospheric region and an at least potentially negative pressure region. The invention relates in particular to a sluice valve that is intended to be used at the transition of a vacuum lock to a vacuum process chamber or at the transition of an atmospheric region to a vacuum lock. In other words, according to the invention, the sluice valve is intended to reliably create a gas-tight seal between a negative pressure region and a region with atmospheric pressure.

[0002] Lock valves, also known as sluice gates or flap transfer valves, are well known in the art. For example, lock valves are used in lock chambers to transfer a substrate from a low-pressure environment, such as a vacuum process chamber with a pressure of less than 0.1 mbar or 10⁻⁶ Pa, preferably less than 0.001 mbar or 0.1 Pa, to atmospheric conditions. The lock chambers are therefore designed to allow pressure variation, preferably within a pressure range of 0.1 Pa to 10⁻⁶ Pa. 5 Pa. Accordingly, opening valves, i.e., lock valves or flap transfer valves, are installed on such lock chambers, which can close a lock chamber opening so gas-tight that at a pressure difference of 10 4 Pa, preferably 10 5 Pa, further preferred 10 6 Pa prefers a leakage rate of no more than 10 -5mbar L / s is achieved, meaning that virtually no gas exchange takes place.

[0003] Various solutions for sluice gates or sluice gates exist in the prior art. For example, it is known that a valve cover rotatably mounted about a pivot axis is placed onto a valve seat or a flange surrounding a sluice gate opening by a rotary motion, and then pressed onto the valve seat in a pressing phase until a contact pressure is reached that ensures a sufficiently gas-tight closure of the sluice gate opening. Thus, during the pressing phase, the sluice gate cover moves relative to the valve seat until a closing force directed perpendicular to the sluice gate opening is achieved, ensuring a sufficiently high contact pressure of the sluice gate cover.A seal installed on the valve seat or the sluice valve cover is therefore subject to increased wear, since, on the one hand, when the sluice valve cover is placed on the valve seat, and on the other hand, during the clamping phase, shear forces typically act on the seal, which promote twisting and thus wear of the seal. When opening the sluice valve, it is generally necessary for the sluice valve cover to be swung out of the sluice valve opening far enough to clear the opening as completely as possible in order to use the sluice valve efficiently, preferably in vacuum process systems.

[0004] Patent DE 872906 discloses a flap valve with a cover for closing a flap valve opening having a sealing seat. The flap valve comprises a toggle lever mechanism with an operating lever and an inner lever. The operating lever is rotatably mounted on a first shaft which, in the closed position of the flap valve, intersects a central axis of the cover or the flap valve opening. The flap valve further has a pivot joint spaced apart from the first shaft or a closing plane of the flap valve, by means of which the cover can be rotated from an open to a closed position. The pivot joint is realized by means of a bolt slidably and rotatably arranged in an elongated hole. A spring is provided between the inner lever and the valve flap to ensure a constant contact pressure of the flap against its seat.The described system is intended to ensure that an opening to be closed by the flap can be exposed as fully as possible when the flap is open. However, in the disclosed arrangement, the cover initially describes a circular path during the closing process. Consequently, the cover first contacts the sealing surface at the point closest to the pivot joint. Only then does the cover, or rather the pivot joint, move within the elongated hole, and the cover tilts over the initial contact point until it is parallel to the sealing surface. The clamping process then begins, pressing the cover against the sealing surface. During this process, the bolt in the elongated hole moves in the opposite direction, generating sliding friction and corresponding wear within the hole, which reduces its service life. Furthermore, the seal is subjected to considerable stress during each closing operation due to the cover tilting over a single point.Furthermore, the flap valve is not suitable for arbitrary installation positions, as a horizontal installation in particular would lead to an undefined movement pattern. Finally, the described design is also not suitable for valve openings with slot-like openings.

[0005] Furthermore, a valve flap with a toggle lever is known from DE 802855. The toggle lever has a spring integrated into the linkage, so that the linkage is consequently variable in length. According to the disclosure, this is intended to allow an opening to be fully opened. However, this system also fails to reduce the wear of a seal located at the valve seat. Moreover, this valve flap is also unsuitable for use on slotted valve openings.

[0006] From DE 7305670 U, a valve flap arrangement is known in which the sealing surface and pivot axis lie in as close to the same plane as possible in order to reduce seal wear. However, even in an embodiment according to this application, twisting due to shear forces can only be somewhat minimized and not satisfactorily reduced.

[0007] EP 0554522A2 discloses a rotary valve with a valve plate on a valve bar extending approximately parallel to it. The valve plate is hinged via at least one elastically deformable intermediate member. The elastic intermediate member is implemented by means of two torsion bars that are not prestressed. The disclosed valve plate is intended to generate a uniform closing force or contact force over its entire length. When the valve cover is pressed onto the seat, this design also exhibits the problem frequently found in the prior art that, at the beginning of the pressing process, a seal located on the valve seat initially comes into contact with the side of the valve plate that is closer to a pivot point of the valve plate. The valve flap then tilts in a circular path over this contact point until the valve plate rests completely on the sealing seat.This in turn leads to a twisting of the seal at the seat, resulting in increased seal wear. The seal is further stressed by the initial deformation of the elastic rods during the compression process, which is intended to ensure a uniform contact pressure on the seal when closed.

[0008] EP 2355132B1 discloses a flap transfer valve for transferring semiconductor elements or substrates into a gas-tight insulated semiconductor or substrate processing chamber. The flap transfer valve has an elongated, in particular slot-like, first opening, an elongated valve closure bar, at least one support, and a pivot bearing. The first opening extends along a first longitudinal axis and is enclosed in a frame-like manner by a first sealing surface of the first opening, which lies in a geometric first sealing plane. The elongated valve closure bar extends along a second longitudinal axis parallel to the first longitudinal axis, has a closing surface on one front side for closing the first opening, and has a second sealing surface.The second sealing surface corresponds to the first sealing surface, can be brought into gas-tight contact with the first sealing surface, lies in the edge region of the closure surface, and is located in a geometric second sealing plane. The at least one support is arranged on a rear side of the valve closure bar opposite the front side, with the valve closure bar being pivotably mounted on the support via a pivotable connection about a geometric tilting axis parallel to the second longitudinal axis through a limited pivoting angle. The pivot bearing, the first opening, and the closure bar are designed such that the support, together with the valve closure bar, can be pivoted between a closed and an open position about a geometric pivoting axis parallel to the second longitudinal axis by means of the pivot bearing.In the closed position, the valve closure bar covers and seals the first opening with its sealing surface; the first sealing surface of the first opening and the second sealing surface of the valve closure bar are in gas-tight contact, are parallel, and lie in a common plane; and the first sealing plane of the first sealing surface of the first opening and the second sealing plane of the second sealing surface of the valve closure bar lie on top of each other. In the open position, the valve closure bar is pivoted away from the first opening and at least partially exposes the first opening.

[0009] The pivot axis lies essentially in the first sealing plane of the first sealing surface of the first opening. The tilting axis lies essentially in the second sealing plane of the second sealing surface of the valve closure bar. The second sealing surface, located in the edge region of the closure surface, is recessed towards the rear such that the closure surface—at least in a central region of the valve closure bar—projects beyond the second sealing plane towards the front of the valve closure bar. On the rear of the closure bar—at least in the central region of the valve closure bar—at least one recess is formed, extending at least into the second sealing plane towards the front. The tilting axis extends within the region of the recess, and the pivotable connection is located within the recess.

[0010] The specific design and arrangement of the individual components of the flap transfer valve disclosed in EP 2 355 132 B1 is intended to help avoid or at least reduce stress on a seal located in the second sealing plane. It is known that arranging the axis of rotation in the first and / or second sealing plane can help minimize seal wear, as twisting of a seal located in the second sealing plane is reduced by allowing the second sealing surface to be positioned as parallel as possible to the first sealing surface. However, during the clamping process, the valve closure bar, and thus the second sealing plane, still describes a circular path around the pivot axis, meaning that the seal continues to be subjected to shear forces during the clamping phase, leading to significant wear.While this may be minimized by the tilting axis, a lateral force, for example, a force perpendicular to the opening direction, is also applied to the seal via the tilting axis, which is fixed to the valve closure bar relative to the pivot axis. This force stresses the seal and leads to premature seal wear. Furthermore, in practice, it will not be possible, at least due to manufacturing tolerances and functionally relevant play between the individual components, to adjust the valve closure bar so precisely that the first and second sealing surfaces are exactly parallel to each other upon initial contact during the closing process. This results in further stress on the seal when the valve closure bar tilts over one side of the opening, which also leads to seal wear.

[0011] Known sluice gate valves exhibit weaknesses and disadvantages, particularly regarding seal wear, required installation space, component wear, costs, and ease of maintenance. A common drawback of all known systems is that a seal located on a sealing surface is subjected to shear forces during initial contact and / or while the valve cover is being pressed onto the valve opening. This causes the seal to twist and is therefore subject to increased wear. This shortens the service life of the sluice gate valves and / or reduces the required maintenance intervals. The operating and follow-up costs of a system equipped with such sluice gate valves increase. Therefore, there is a need for a sluice gate valve with reduced seal wear.

[0012] It is an object of the present invention to provide a valve cover which at least partially compensates for one or more of the disadvantages described above and / or can at least partially satisfy the identified need.

[0013] This problem is solved by a sluice valve comprising a sluice valve opening, a sluice valve cover, at least one lever arm, and at least one coupling system. The sluice valve has a length along a longitudinal axis and a width along a transverse axis oriented perpendicular to the longitudinal axis. The sluice valve opening is formed along an opening axis oriented perpendicular to both the transverse and longitudinal axes and is surrounded by a flange with a first sealing surface. The sluice valve cover has a front face with a second sealing surface. The lever arm is attached to a shaft, the shaft having an axis of rotation parallel to the longitudinal axis. The coupling system comprises a bolt, a centering disc, and an elastic element. The bolt has a first end with a bolt head and a second end that is attached to the lever arm along a longitudinal axis.The centering disc has a first and a second side, and a centering disc opening extends from the first side to the second side through the centering disc. The centering disc is attached to the sluice valve cover and positioned between the first and second ends of the bolt such that the bolt projects through the centering disc opening. The elastic element is located between the lever arm and the centering disc. In a closed state of the sluice valve, the second sealing surface is in gas-tight contact with the first sealing surface, and a force transmission path from the lever arm to the flange runs through the elastic element.

[0014] In the context of the present invention, a gas-tight contact can be understood as a contact that ensures that even at a pressure difference of 10 4 Pa, preferably 10 5 Pa and further preferred 10 6Preferably, no gas exchange takes place via the airlock opening. The feature "no gas exchange" can preferably be fulfilled if the leakage rate is a maximum of 10 -5 mbar L / s, where L is the volume of the sealed space in liters, and s is the time in seconds. In other words, an opening of a container that has only this one opening can be closed by means of a lid in gas-tight contact with the container, i.e., be in a closed state, if the leakage rate is a maximum of 10 -5 The value is mbar L / s.

[0015] The first or second sealing surface and / or the flange or the lock valve cover may preferably have a sealing element, more preferably a gasket. The sealing element is preferably elastic. The gasket may preferably be a static gasket, particularly preferably an O-ring or a quad-ring gasket.

[0016] By means of the described arrangement, it can preferably be achieved that the lock valve cover is decoupled from the lever arm via the elastic element, preferably directly upon initial contact with the first sealing surface, and especially during the pressing process, thereby preferably reducing shear forces on a seal preferably arranged in the first or second sealing surface. Thus, seal wear can preferably be reduced. Additionally, it can preferably be achieved that, by means of a suitable preload of the elastic element, the lock valve cover remains in a defined position relative to the lever arm when it is lifted from the lock valve opening, i.e., it is locked in place. This position is preferably defined such that the second sealing surface – at the moment the contact between the first and the second sealing surfaces is broken – is parallel to the first sealing surface of the lock valve opening, or vice versa.preferably oriented parallel to a contact line with the first sealing surface of the sluice valve opening. This allows seal wear to be further minimized when the sluice valve cover is pressed back onto the first sealing surface.

[0017] Preferably, the lock valve cover can be coupled to the at least one lever arm via the at least one coupling system. The first side of the centering disc can preferably lie in a first plane, and the second side of the centering disc can preferably lie in a second plane, wherein, in a closed state of the lock valve, the axis of rotation is preferably located in a region between the first and the second plane. Such an arrangement preferably ensures that, during the clamping process, a seal surrounding the lock valve opening or the lock valve cover, i.e., a seal forming the first or second sealing surface, is subjected to as little stress as possible. Preferably, the first side of the centering disc can face the lock valve opening in the closed state and / or project into the lock valve opening.

[0018] Preferably, the lock valve cover can have a rear side facing away from the second sealing surface, wherein the rear side can have a first recess, and wherein the bolt head can preferably be arranged in the first recess. Additionally or alternatively, the first recess can also be realized by a free space formed by additional elements on the rear side of the lock valve cover, e.g., using a stud or spacer bolt.

[0019] Preferably, in the closed state, the first recess can be arranged centrally with respect to the width of the sluice valve opening. Preferably, the first recess can be rotationally symmetrical; more preferably, the first recess can be a blind hole. Particularly preferably, the center point of the first recess, in the closed state, can lie in a median plane of the sluice valve opening defined by the longitudinal axis and the opening axis.

[0020] Furthermore, the rear side of the sluice valve cover can preferably have a second recess superimposed on the first recess, wherein the second recess has a larger cross-sectional area and a preferably shallower depth than the first recess, and wherein the centering disc is arranged in the second recess. Preferably, the bolt head can be arranged between the base of the first recess, which is designed as a blind hole, and the centering disc. By means of such a geometry, it can preferably be achieved that the coupling system can be arranged within the sluice valve cover, and that decoupling of the sluice valve cover and the lever arm can preferably take place in a plane that corresponds to the first and / or the second sealing plane and / or a plane through the axis of rotation parallel to the first and / or second sealing plane. Thus, seal wear can preferably be reduced.

[0021] Preferably, the sluice valve can have at least two, preferably at least four, coupling systems and / or at least two, preferably at least four, bolts, centering discs, and / or first recesses along its longitudinal axis. More preferably, the bolts, centering discs, and / or recesses can be provided in equal numbers. Providing several coupling systems can be particularly advantageous for using the sluice valve cover with slot-like openings, preferably to ensure a uniform contact pressure and / or to preferably reduce deformation or deflection of the lever arm and / or the shaft.

[0022] The front face of the lock valve cover can preferably, in the closed state, penetrate a fifth plane defined by the second sealing surface and extend at least partially into the lock valve opening. This allows not only the centering of the lock valve cover on the lock valve opening, but also, preferably, the coupling system to be arranged within the installation space of the lock valve cover, which can have an advantageous effect on the opening area of ​​the lock valve cover.

[0023] Preferably, the centering disc opening can be located transversely centrally within the lock valve opening when closed. This preferably allows for a central coupling to the lever arm, which is particularly advantageous for uniform contact pressure. Preferably, the centering disc opening can be rotationally symmetrical, and further preferably, the centering disc opening is a through-hole and / or the centering disc is axially displaceable along the longitudinal axis of the bolt. This design can offer particular manufacturing advantages and thus preferably cost benefits.

[0024] Preferably, the first side of the centering disc can face the lock valve opening in the closed state and / or project into the lock valve opening, and the centering disc opening can taper from a first, larger opening diameter on the first side to a second, smaller opening diameter. More preferably, the second opening diameter can lie in a third plane arranged between the first and second planes, with the axis of rotation located in a region between the first and third planes. This preferably ensures that a contact point between the lock valve cover and the lever occurs in a region located between or within the first and second sealing surfaces, preferably between or within a fourth plane defined by the first sealing surface and the fifth plane. The opening diameter transition can preferably be...The tapered section is designed as a conical socket and is further preferably suitable for receiving a ball, a spherical segment, or a spherical disc. It is advantageously achieved that, upon release of the valve cover from the sluice gate opening, the sluice gate valve cover establishes a frictional connection between the bolt or bolt head and the centering disc. Thus, the orientation of the sluice gate valve cover with respect to the lever arm can preferably be maintained, i.e., "frozen," so that even in the open state, the orientation preferably corresponds to the orientation in which the sluice gate valve cover releases or has released from the second sealing surface.

[0025] The bolt preferably has a shank with a nominal bolt diameter, the shank projecting through the centering disc opening, and the bolt head having a diameter larger than the nominal bolt diameter and more preferably larger than the second opening diameter of the centering disc. The bolt preferably has a spherical shape, a spherical segment shape, or a spherical disc shape, preferably at the bolt head or at the transition from the shank to the bolt head. The bolt preferably has a convex transition from the shank to the bolt head. The bolt head preferably forms an integral part of the bolt or, alternatively, preferably comprises an element connected to the bolt by thread or by a material bond, more preferably a nut with a spherical disc. The bolt head preferably has its position on the first side of the centering disc.Preferably, the bolt can be attached to the lever arm in such a way that the bolt's central axis is oriented orthogonally to the axis of rotation and / or orthogonally to a longitudinal axis of the lever arm.

[0026] The elastic element can preferably be pre-tensioned, more preferably such that a restoring force of the elastic element acts on the lever arm and, more preferably via the centering disc, on the bolt head in the open state. This preferably ensures that the lever arm and the lock valve cover move only minimally, preferably not at all, relative to each other in the open state. Preferably, in an open state of the lock valve, the elastic element can force the bolt head into a force-fit and / or positive engagement with the centering disc, which restricts one, more preferably all, of the rotational degrees of freedom of the centering disc. It is also preferably possible to maintain the orientation of the lock valve cover, preferably parallel to the valve seat, when the lock valve cover is lifted.This allows the sluice valve cover to be pressed back onto the valve seat in this preferred orientation. Preferably, this, along with the preload and / or the initial force, further minimizes seal wear on the valve seat.

[0027] The restoring force is preferably designed such that, during a valve closing operation, upon contact of the first sealing surface with the second sealing surface, preferably at the beginning of deformation of the sealing element, the bolt head lifts off, i.e., the force-fit and / or positive locking of the bolt head with the centering disc is released. In other words, from this moment on, the sluice valve cover is held floating between the first sealing surface, preferably a sealing element of the first sealing surface, and the elastic element. The restoring force preferably fulfills one or more of the following conditions, more preferably at the time of the beginning of deformation of the sealing element: a) Resistance force of sealing element ≤ restoring force, preferably resistance force of sealing element < restoring force b) Restoring force << Closing force c) Restoring force > m Schleusenventildeckel × a × S.

[0028] The resistance force of the sealing element denotes the force required to deform the sealing element. S is a safety factor. The safety factor can preferably be at least 1.0, more preferably at least 1.05, more preferably at least 1.1, more preferably at least 1.2, and most preferably at least 1.3. Schleusenventildeckeldenotes the mass of the lock valve cover. 'a' denotes the acceleration and can – depending on the installation position – correspond to or be dependent on, for example, the acceleration due to gravity g. The closing force denotes a force that is applied to the lock valve cover perpendicular to the sealing surface, preferably by means of a motor and corresponding force transmission structures such as a lever arm, preferably to bring the lock valve cover into gas-tight contact with the lock valve opening, whereby the gas-tight contact must preferably also be ensured when there is a pressure of less than 0.1 mbar, preferably less than 0.01 mbar, more preferably less than 0.001 mbar or 0.1 Pa on one side of the seal and a pressure of 10 Pa preferably prevails on the other side. 5Pa or 1 bar prevails. x denotes a multiplication. Preferably, during the establishment of the gas-tight contact, in particular during the deformation or compression of the sealing element, a force equilibrium can be reached between the resistance force of the sealing element and the restoring force.

[0029] Preferably, contact between the centering disc and the bolt head can only occur during a movement phase and / or when the sluice gate cover is in an open position. During the transition from the closed to the open state, initial contact between the centering disc and the bolt head can preferably occur at the beginning of the movement phase in a sixth plane, with the axis of rotation preferably located in the sixth plane. Such an arrangement can further minimize wear of the sealing element.

[0030] Preferably, in the closed state, the restoring force of the elastic element cannot act on the bolt head, and / or the coupling between the sluice valve cover and the lever arm can have at least one axial degree of freedom along the longitudinal axis of the bolt in the closed state. This preferably ensures that the sluice valve cover is decoupled from the lever arm in the closed state, preferably during the clamping process and particularly preferably immediately after initial contact with the first sealing surface. In other words, a rigid connection—that is, a connection that restricts all degrees of freedom of the sluice valve cover relative to the lever arm—between the sluice valve cover and the lever arm can preferably be eliminated. This preferably further reduces sealing element wear, maximizes maintenance intervals, and / or further reduces operating and maintenance costs.

[0031] The sluice gate cover can, in the closed state and / or in a state where contact pressure is applied, rest floatingly on the flange, with the second sealing surface held in place by the forces acting on the elastic element on the first sealing surface. In other words, the sluice gate cover can, in the closed state and / or in a state where contact pressure is applied, rest on the flange and have at least one degree of freedom, preferably at least two degrees of freedom, relative to the lever arm in a plane parallel to the first and / or second sealing surface, and preferably one degree of freedom in the direction of the opening axis. This ensures that the sluice gate cover rests on the first sealing surface or the flange in a manner decoupled from the lever arm.This results in a sealing element being subjected to minimal, preferably no, shear forces during a pressing and sealing process, thus increasing the durability of the sealing element or minimizing sealing element wear.

[0032] Preferably, the elastic element can be a compression spring and / or comprise at least one of the following: a disc spring, a leaf spring, a coil spring, or an elastomer. Preferably, the elastic element can have a flat spring characteristic curve at least in a first partial range of its travel. Preferably, the elastic element can have a steeper spring characteristic curve at least in a second partial range of its travel that differs from the first partial range. Preferably, the slope of the spring characteristic curve in the second partial range can be at least twice, more preferably at least five times, and particularly preferably at least ten times the slope of the spring characteristic curve in the first partial range. In other words, the ratio of spring force F to spring displacement s can be preferably at least 1 kN / mm, more preferably at least 3 kN / mm, more preferably at least 5 kN / mm, and more preferably at least 7 kN / mm, at least in the second partial range.

[0033] Preferably, the transfer valve opening has a length-to-width ratio of at least 1:1, more preferably at least 5:1, and particularly preferably at least 9:1. Preferably, depending on the installation position, the width can also be referred to as the height. Transfer valve openings with a length-to-width ratio of at least 5:1, preferably at least 9:1, can also be referred to as large openings or slot-like openings within the scope of the present invention. Preferably, the flange has a flange surface, and the flange surface and / or the first sealing surface can preferably be arranged orthogonally to the opening axis.

[0034] The first sealing surface and the axis of rotation can, particularly at an operating point of initial contact between the first and second sealing surfaces, preferably lie in the same plane. In other words, the fourth and sixth planes can, at an operating point of initial contact between the first and second sealing surfaces, preferably be congruent and can further preferably lie between the first and second planes. Such an arrangement of the axis of rotation and the sealing surface is particularly known for sluice gate covers that are coupled to the lever arm in a tilting but not axially displaceable manner.While the arrangement in such systems serves to minimize the shear forces introduced into the seal during the opening and closing of the lock valve cover, thereby reducing seal wear, this effect is already achieved in the present invention by the coupling system, and the additional effect of a corresponding arrangement of the axis of rotation and the sealing surface relative to each other is relatively small. Providing the sealing surface and axis of rotation in the same plane can preferably offer further advantages with regard to installation space and / or improved or reduced stress on the shaft and the lever arm.

[0035] Preferably, the shaft can be a drive shaft and / or a rotation of the shaft can preferably move the lock valve from an open state to a closed state. The drive shaft can be driven from both sides, but preferably only on one side of the lock valve, which preferably simplifies accessibility and thus increases the ease of maintenance of the lock valve.

[0036] The axis of rotation of the sluice valve, preferably of the lever arm, can preferably be uniquely defined with respect to the first sealing surface, further preferably wherein the axis of rotation is fixed in position with respect to the first sealing surface.

[0037] The lock valve cover can be coupled to only one shaft, preferably a stationary one, preferably to the shaft rotatable about the axis of rotation, and more preferably via the at least one lever arm. More preferably, the lock valve does not have a toggle lever mechanism between the shaft and the lock valve cover. The design according to the invention can preferably be implemented by means of the coupling mechanism such that a uniform contact pressure of the lock valve cover on the lock valve opening can be achieved even without a toggle lever mechanism. In particular, the restoring force or preload of the elastic element can be adjusted to the torsion of the shaft. It should be taken into account that the torsion, in turn, depends on the cross-section of the shaft. It is thus possible to significantly reduce the number of parts on the lock valve cover, in particular the number of moving parts required in the toggle lever mechanism of known lock valve covers.This is particularly advantageous when using the lock valve cover in a vacuum process plant or a lock chamber for a vacuum chamber, especially a vacuum process chamber, since lubrication of articulated parts in a vacuum is difficult to achieve, and the components in a process chamber may be exposed to reactive gases, which reduces the service life of components and especially joints.

[0038] The lock valve is preferably suitable for use in a vacuum or at the vacuum-to-atmosphere interface, preferably in a pressure range of 0.1 Pa to 1.3 × 10 5 Pa, preferably in a pressure range of 0.1 Pa to 10 5Pa. The present invention is particularly advantageous for lock valve openings with large widths or clearance heights. The decoupling of the lock valve cover and the lever arm during the contact phase ensures that a sealing element provided for sealing between the lock valve cover and the lock valve opening is subjected to minimal shear forces and thus experiences minimal stress. This can advantageously increase the service life of the seals and / or extend the maintenance intervals of the lock valve.By means of the present invention, preferably via the at least one lever arm in conjunction with the at least one coupling system, such high contact pressures can already be achieved that a toggle lever mechanism can be dispensed with, in particular since by means of the present invention a uniform distribution of the contact pressure along the entire sluice valve opening can be achieved - which can be particularly relevant in the case of large or slot-like valve openings.

[0039] The present invention further comprises the following aspects: 1. Lock valve comprising a lock valve opening, a lock valve cover, at least one lever arm and at least one coupling system, wherein the lock valve has a length along a longitudinal axis and a width along a transverse axis oriented perpendicular to the longitudinal axis, wherein: the lock valve opening is formed along an opening axis oriented perpendicular to the transverse and longitudinal axes and is surrounded by a flange with a first sealing surface, the lock valve cover has a front side with a second sealing surface, the lever arm is attached to a shaft, the shaft having an axis of rotation parallel to the longitudinal axis, the coupling system comprises a bolt, a centering disc and an elastic element; wherein the bolt has a first end with a bolt head and a second end that is attached to the lever arm along a longitudinal bolt axis, the centering disc has a first and a second side and a centering disc opening extends from the first side to the second side through the centering disc, the centering disc being attached to the sluice valve cover and arranged between the first and second ends of the bolt such that the bolt protrudes through the centering disc opening, the elastic element is arranged between the lever arm and the centering disc; wherein, in a closed state of the sluice valve, the second sealing surface is in gas-tight contact with the first sealing surface and a force transmission path runs from the lever arm to the flange via the elastic element. 2. Lock valve according to aspect 1, wherein the lock valve cover is coupled to the at least one lever arm via the at least one coupling system. 3. Lock valve according to aspect 1 or 2, wherein the first side of the centering disc lies in a first plane and the second side of the centering disc lies in a second plane, and wherein, in a closed state of the lock valve, the axis of rotation lies in a region between the first and the second plane. 4. Lock valve according to one of the foregoing aspects, wherein the lock valve cover has a rear side facing away from the second sealing surface, wherein the rear side has a first recess, and wherein preferably the bolt head is arranged in the first recess. 5. Lock valve according to aspect 4, wherein in a closed state the first recess is arranged centrally with respect to the width of the lock valve opening, wherein preferably the first recess is rotationally symmetric, wherein further preferably the first recess is a blind hole, and wherein a center point of the first recess, in the closed state, is located in a median plane of the lock valve opening defined along the longitudinal axis and the opening axis. 6. Lock valve according to one of aspects 4 or 5, wherein the rear side of the lock valve cover further comprises a second recess superimposed on the first recess, wherein the second recess has a larger cross-sectional area and preferably a lesser depth than the first recess, and wherein the centering disc is arranged in the second recess. 7. Lock valve according to one of the above aspects, wherein the lock valve has at least two, preferably at least four coupling systems and / or at least two, preferably at least four bolts, centering discs and / or first recesses along the longitudinal axis, wherein preferably the bolts, centering discs and / or recesses are provided in equal numbers. 8. Lock valve according to one of aspects 4 to 7, wherein the front of the lock valve cover, when closed, penetrates a fifth plane defined by the second sealing surface and extends, at least partially, into the lock valve opening. 9. Lock valve according to one of the above aspects, wherein the centering disc opening is located in the transverse direction in the middle of the lock valve opening when closed. 10. Lock valve according to one of the foregoing aspects, wherein the centering disc opening is rotationally symmetrical, wherein the centering disc opening is preferably a through bore and / or wherein the centering disc is preferably axially displaceable along the longitudinal axis of the bolt. 11. Lock valve according to one of the foregoing aspects, wherein the first side of the centering disc faces the lock valve opening in the closed state and wherein the centering disc opening tapers from a first larger opening diameter on the first side to a second smaller opening diameter. 12. Lock valve according to aspect 11, wherein the second opening diameter lies in a third plane arranged between the first and second planes and wherein the axis of rotation lies in a region between the first and third planes. 13. Lock valve according to one of aspects 11 or 12, wherein the reduction is designed as a conical socket and is preferably suitable for receiving a ball, a spherical segment or a spherical disk. 14. Sluice valve according to one of the foregoing aspects, wherein the bolt has a shaft with a nominal bolt diameter, wherein the shaft projects through the centering disc opening and wherein the bolt head has a bolt head diameter that is larger than the nominal bolt diameter, preferably larger than the second opening diameter. 15. Lock valve according to any of the foregoing aspects, wherein the bolt has a spherical shape, spherical segment shape or spherical disc shape, preferably at the bolt head or at the transition from shaft to bolt head and / or wherein the bolt has a convex transition from shaft to bolt head. 16. Lock valve according to one of the above aspects, wherein the bolt head is integrally formed with the bolt or has an element connected to the bolt by means of a thread or by a material bond, preferably a nut with a spherical disc. 17. Lock valve according to one of the above aspects, wherein the bolt is attached to the lever arm in such a way that the bolt center axis is oriented orthogonally to the axis of rotation and / or orthogonally to a longitudinal axis of the lever arm. 18. Lock valve according to one of the above aspects, wherein the elastic element is pre-tensioned, preferably such that a restoring force of the elastic element acts on the lever arm and, preferably via the centering disc, on the bolt head in the open state. 19. Lock valve according to one of the above aspects, wherein, in an open state of the lock valve, the elastic element forces the bolt head into a force-fit with the centering disc, which restricts one of, more preferably all, rotational degrees of freedom of the centering disc. 20. Lock valve according to one of the above aspects, wherein the restoring force preferably satisfies one or more of the following conditions: a. Resistance force of sealing element < Restoring force b. Restoring force << Closing force c. Restoring force > m Schleusenventildeckel × a × safety factor; wherein the safety factor is preferably at least 1.0, more preferably at least 1.05, more preferably at least 1.1, more preferably at least 1.2 and particularly preferably at least 1.3. 21. Lock valve according to one of the above aspects, wherein contact between centering disc and bolt head only takes place in a movement phase and / or an open lock valve cover position. 22. Lock valve according to one of the above aspects, wherein, in the transition from the closed state to an open state, an initial contact between the centering disc and the bolt head takes place at the beginning of the movement phase in a sixth plane and wherein the axis of rotation lies in the sixth plane. 23. Sluice gate valve according to one of the above aspects, wherein in the closed state the restoring force of the elastic element does not act on the bolt head and / or the coupling of sluice gate cover and lever arm in the closed state has at least one axial degree of freedom along the longitudinal axis of the bolt. 24. Lock valve according to one of the above aspects, wherein the lock valve cover rests floating on the flange in the closed state and the second sealing surface is held by the forces acting on the elastic element on the first sealing surface. 25. Lock valve according to one of the above aspects, wherein the elastic element is a compression spring and / or comprises at least one of the following elements: a disc spring, a leaf spring, a coil spring, an elastomer. 26. Lock valve according to one of the above aspects, wherein the transfer valve opening has a length-to-width ratio of at least 1:1, preferably at least 5:1, particularly preferably at least 9:1. 27. Lock valve according to one of the foregoing aspects, wherein the flange has a flange surface and wherein the flange surface and / or the first sealing surface are arranged orthogonally to the opening axis. 28. Lock valve according to one of the foregoing aspects, wherein the first or the second sealing surface has a seal, preferably a static seal, more preferably an O-ring or a quad-ring ® -Seal. 29. Lock valve according to one of the foregoing aspects, wherein the first sealing surface defines a fourth plane and wherein the first sealing surface and the axis of rotation preferably lie in a plane, wherein the fourth plane preferably lies between the first and the second plane, wherein the fourth plane particularly preferably corresponds to the sixth plane. 30. Lock valve according to one of the foregoing aspects, wherein the shaft is a drive shaft and / or wherein a rotation of the shaft can bring the lock valve from an open state to the closed state. 31. Lock valve according to aspect 29, wherein a drive of the drive shaft is provided only on one side of the lock valve. 32. Lock valve according to one of the above aspects, wherein the lock valve cover is coupled to only one stationary shaft, preferably to the shaft rotatable about the axis of rotation, more preferably via the at least one lever arm and / or wherein no toggle lever mechanism is provided between the shaft and the lock valve cover. 33. Lock valve according to one of the above aspects, wherein the axis of rotation of the lock valve, preferably of the lever arm, is uniquely defined with respect to the first sealing surface, preferably wherein the axis of rotation is fixed in position with respect to the first sealing surface. 34. Lock valve according to one of the above aspects, wherein the lock valve is suitable for use in a vacuum or at the vacuum / atmosphere interface, preferably in a pressure range of 0.1 Pa to 10 5 Pa.

[0040] A preferred embodiment of the invention is described below by way of example with reference to the following figures. The figures show: Fig. 1: schematically a sectional view of a lock valve in an exemplary embodiment of the present invention in the open state; Fig. 2: a schematic representation of the lock valve opening made of Fig. 1 in a view in the direction of travel, here: top view; Fig. 3: the lock valve in sectional view from Fig. 1 in a closing process, whereby an initial contact takes place between the first and the second sealing surface; Fig. 4: detail X from Fig. 3; Fig. 5: the lock valve in cross-sectional view Fig. 1 in a closed state; and Fig. 6: A schematic sectional view of an exemplary design of a centering disc.

[0041] In Fig. Figure 1 shows an exemplary embodiment of a lock valve according to the present invention. Preferably, the lock valve is arranged in a region where a transition between an atmospheric pressure region and a vacuum region is provided. In the present example, the lock valve is arranged on a vacuum lock, preferably a vacuum lock of a continuous flow system.

[0042] The sluice valve according to the present example has a sluice valve opening that is bounded, i.e., surrounded, by a flange 1. The sluice valve opening has a width along a transverse axis 15 and defines an opening direction along an opening axis 17. A longitudinal axis 14 is defined perpendicular to the opening axis 17 and the transverse axis 15. Preferably, the sluice valve can be installed in any mounting position and orientation. Fig. 1. The lock valve is oriented such that the force of gravity g acts parallel to the transverse axis 15. The width of the lock valve opening is therefore preferably also referred to as the height. As can be seen, the invention is not limited to the one described in Fig. The installation position shown in Figure 1 is limited. The lock valve can also be installed with the transverse axis 15 at an angle α of, for example, 0° < α < 180° to the direction of the force of gravity g; in particular, the angle α can be between 3° and 15°, preferably 7°, and more preferably between 80° and 100°, preferably 90°.

[0043] The flange 1 has a front flange surface or end face, which is preferably orthogonal to the opening axis 17 and on which the first sealing surface 3 is formed. Preferably, the first sealing surface 3 is formed by a seal 31, which is preferably provided in a groove in the front end face. In the present embodiment, the seal 31 is implemented by means of an O-ring. Alternatively, for example, a quad-ring seal can also be used. The first sealing surface 3 preferably refers to the portion of the outer surface of the seal 31 that projects from the groove, more preferably to the line of the seal 31 that projects furthest from the end face and preferably runs parallel to the groove. A plane through this line can preferably be referred to as the fourth plane or as the plane defined by the first sealing surface. The end face, preferably together with the flange and / or the seal 31, is formed by the first sealing surface.the first sealing surface, can preferably also be referred to as the valve seat.

[0044] Adjacent to the sluice valve opening or to the flange 1, preferably next to or above the flange 1, a shaft 2 is provided to which a sluice valve cover 4 is attached via a coupling system 13 and a lever arm 5. The shaft 2 is rotatably mounted about a pivot axis 16. Preferably, the lever arm 5 is rotationally fixed to the shaft 2, preferably by a positive or material fit, for example via a shaft-hub connection known from the prior art. The sluice valve cover 4, also referred to as a sluice valve flap or closure bar, is attached to the lever arm 5 via a coupling system 13. In the present example, the coupling system comprises a bolt 6, a centering disc 7, and an elastic element, which in the illustrated embodiment is designed as a spring assembly 8. The bolt 6 holds the sluice valve cover 4 – in the open state shown – on the one hand and is attached to the lever arm 5 by means of a nut 9 on the other.

[0045] Preferably, the flange 1 can form part of a lock chamber, i.e., part of a region in which the internal pressure can be adjusted between atmospheric pressure and a vacuum, preferably less than 0.1 mbar or 10⁻⁶ Pa. The lock valve cover 4 can therefore be operated either in an atmospheric pressure range (pressure approximately 1 bar or 10⁻⁶ Pa) or 5 Pa) or in a low-pressure area, also referred to as a vacuum, with a pressure preferably less than 0.1 mbar or 10 Pa. In other words, the left area of Fig. 5, to the left of the lock valve, is an atmospheric area and in the right area of ​​the illustration, i.e. to the right of the lock valve, is a low-pressure area or vice versa.

[0046] According to the preferred embodiment, the lock valve cover 4 has a front surface 43 and a rear surface 44. A second sealing surface 12 is arranged on the front surface 43. Preferably, the second sealing surface 12 is recessed on the front surface 43 towards the rear surface 44. In the present embodiment, the second sealing surface 12 is a flat surface suitable for making gas-tight contact with the first sealing surface, here the seal 31. The first sealing surface can preferably be formed integrally with the lock valve cover 4. The lock valve cover 4 can preferably be made of stainless steel. Alternatively, the second sealing surface can be realized by means of an additional component made of the same or a different material, preferably stainless steel.As can be seen by those skilled in the art, in the present embodiment the first sealing surface 3 is formed by a seal 31 and the second sealing surface 12 by a flat counter surface. However, in alternative embodiments, the seal 31 can of course also be provided on the lock valve deck 4, so that the second sealing surface 12 is formed by the seal 31. The first sealing surface 3 can then preferably be designed as a flat counter surface.

[0047] The rear surface 44 of the lock valve cover 4 has a first recess 41 and a second recess 42. The first recess 41 and the second recess 42 are superimposed, in this embodiment coaxially. The second recess 42 has a larger diameter than the first recess 41. However, the second recess 42 has a shallower depth than the first recess 41. Both recesses are blind holes. This creates a bearing surface 45 between the first and second recesses. In other words, the unperforated base of the second recess 42 defines the bearing surface 45. The centering disc 7 is arranged on the bearing surface 45. The centering disc 7 has a centering disc opening 71 through which the bolt 6 projects. The bolt 6 has a longitudinal axis 61, a bolt head 62, and a shank 63.The bolt head 62 is arranged in a region of the first recess 41. In other words, viewed from the centering disc 7, the bolt head 62 is arranged in the direction of the front face 43 or the bottom of the blind hole or groove of the first recess 41, with the shaft 63 projecting through the centering disc opening 71 in the direction of the rear face 44. The bolt 6 is movably arranged in the centering disc opening 71; in particular, the bolt 6 can be tilted in the centering disc opening 71, preferably by at least 2° and / or by a maximum of 7° with respect to a centering disc opening center axis defined by the centering disc opening 71. The spring assembly 8 is arranged along at least a portion of the shaft 63, between the rear face 44 and the lever arm 5. The spring assembly 8 is pre-tensioned and is limited by a lever-side pressure washer 11 and a cover-side pressure washer 10 in relation to the centering disc 7 and the lever arm 5.In the present embodiment, the spring assembly 8 is formed by stacked disc springs, which preferably allows for a flat spring characteristic of the spring assembly 8, at least in a portion of its travel. The dimensions and preload of the spring assembly 8 are preferably set such that, upon closing of the sluice gate cover 4, initial contact occurs between the first sealing surface 3 and the second sealing surface 12 (see figure). Fig. 3 and Fig. 4) occurs when the spring assembly 8 has a flat spring characteristic region and that during the pressing action, i.e., the build-up of the closing force, the spring assembly 8 is compressed to such an extent that at least part of the pressing action takes place in a steeper spring characteristic region of the spring assembly 8. Alternatively and / or preferably, the dimensions and preload of the spring assembly 8 can be set such that an adjustment travel of the spring assembly 8 of at least 1 mm, more preferably at least 2 mm, takes place in a flat spring characteristic region, and / or that an adjustment travel of the spring assembly 8 of at least 1 mm, more preferably at least 2 mm, more preferably at least 5 mm, takes place in a steeper spring characteristic region.

[0048] The described design ensures that, in the open state shown, the spring assembly 8 exerts a force on both the lever arm 5 and the centering disc 7, and thus on the lock valve cover 4, thereby holding the lock valve cover 4 in a defined position relative to the lever arm 5, for example, via a combination of force and positive locking (e.g., positive locking between the centering disc 7 and the bolt head 62, as well as the frictional forces acting at this point). Wobbling of the lock valve cover 4 is preferably suppressed by the spring assembly 8 and the shape of the bolt 6 or bolt head 62 and the centering disc 7, preferably by forming a frictional contact between the bolt 6 and the centering disc 7. Preferably, the opening of the centering disc 7 has a diameter transition such that a first opening diameter, facing the bolt head 62, is larger than a second opening diameter, facing the spring assembly 8.Additionally, the transition from bolt head 62 to shaft 63 is preferably convex. This ensures that friction at at least one contact point, preferably along a contact line with multiple contact points, between centering disc 7 and bolt 6 guarantees that the alignment of centering disc 7 and bolt 6 relative to each other can be locked at the moment when the spring assembly 8 presses the centering disc 7 onto the bolt head 62. With such a design, it can be achieved, on the one hand, that the sluice valve cover 4 does not wobble when the shaft 2 rotates (i.e., when the lever arm 5 moves). Furthermore, such a design ensures that the alignment of the sluice valve cover 4, and thus of the second sealing surface 12, relative to the first sealing surface 3 remains identical in the open state to the alignment that the sluice valve cover 4, or rather the second sealing surface 12, has when the shaft 2 is turned.the second sealing surface 12 was in the position at the moment the lock valve cover 4 was released from the first sealing surface 3 or the seal 31. In other words, the alignment of the second sealing surface 12 to the first sealing surface 3 can be fixed, or "frozen," at the moment of release by means of the frictional contact (also referred to as force transmission) between the centering disc 7 and the bolt 6. The process of placing and pressing the lock valve cover 4 onto the lock valve opening or from the first sealing surface 3 is described below with reference to the... Fig. 3 to 5 explained in more detail.

[0049] Fig. Figure 2 shows a schematic representation of the lock valve opening in a view in the direction of passage. The individual transverse and longitudinal directions can be determined with reference to Fig. 2. The illustration is purely schematic, so the flange 1 has neither a seal 31 nor a corresponding groove, but is represented solely by an inner wall 110 and an outer wall 120. A width or height B can be defined in the direction of the transverse axis 15. Furthermore, a length L can be defined along the longitudinal axis 14. The longitudinal axis 14 is oriented parallel to the axis of rotation 16. All axes 14, 16, and 15 are aligned perpendicular to the opening axis 17. A sluice gate cover of the present invention can be used particularly advantageously for sluice gate openings with large lengths. Preferably, the width-to-length ratio or the height-to-length ratio can be at least 1:1, more preferably at least 5:1, and most preferably at least 9:1.Such sluice gate openings are used particularly in continuous flow systems where processing operations are carried out on large-area substrates or carriers with substrates, or more generally on substrates such as solar panels or silicon wafers. In such systems, the seals are particularly prone to maintenance issues and, in known designs, are also difficult to access. Furthermore, with sluice gate openings with preferred width-to-length ratios, ensuring a uniform contact pressure on the valve seat is challenging. Especially with very large heights or widths of the sluice gate opening, the large distance between shaft 2 or axis of rotation 16 and the longitudinal axis 14 can lead to significant deformations, particularly significant torsion, of the power transmission structures used.This can not only negatively affect the assurance of the necessary contact pressure, but also increase seal wear.

[0050] Referring to the Fig. 3 and Fig. 4 The closing and pressing of the lock valve cover 4 onto the lock valve opening or onto the first sealing surface 3 is explained in more detail. Fig. Figure 3 shows the lock valve cover 4 in the state in which initial contact between the lock valve cover 4 and the seal 31 takes place, i.e., in this state the first sealing surface 3 at least partially overlaps the second sealing surface 12. In other words, and with corresponding geometric planes in the detailed view of Fig. As shown in Figure 4, a fifth plane 105, which passes through the second sealing surface 12, is congruent with the fourth plane 104, which passes through the first sealing surface 3. Preferably, the axis of rotation 16 lies in a sixth plane 106, which in this operating state (initial contact of the sluice valve cover 4 and the seal 31) is congruent with the fourth and fifth planes 104 and 105, respectively. In other words, in this operating state, the axis of rotation 16 preferably passes through the fourth and fifth planes 104 and 105, respectively. Particularly preferably, the contact point or contact line of bolt 6 and centering disc 7 is also located in this fourth plane 104 (or fifth plane 105). Furthermore, in this operating state (initial contact of the sluice valve cover 4 and the seal 31), the contact point or contact line of bolt 6 and centering disc 7 is preferably also located in the sixth plane 106.This can preferably be achieved by making the centering disc opening in a first plane 101, which faces the front face 43 of the lock valve cover 4, larger than in a second plane 102, which is defined on the side of the centering disc facing the lever arm 5. In other words, the centering disc opening 71 preferably tapers from the front face 43 of the lock valve cover towards the rear face 44 of the lock valve cover 4. Particularly preferably, the centering disc opening 71 does not taper over the entire thickness of the centering disc 7, but only from the first plane 101 to a third plane 103, which is arranged between the first plane 101 and the second plane 102. Fig. Figure 6 shows a schematic sectional view of such a preferred centering disk 7. The contact point or contact line of bolt 6, in particular the convex transition of bolt head 62 to shaft 63, and centering disk 7 is then preferably located between the first plane 101 and the third plane 103. The fourth plane 104 and the fifth plane 105 are preferably arranged parallel to the first plane 101, to the second plane 102 and to the third plane 103 at the operating point shown, and further preferably between the first plane 101 and the third plane 103.

[0051] In the Fig. 3 and Fig. At the operating point of initial contact between the second sealing surface 12 and the first sealing surface 3, as shown in Figure 4, the sluice valve cover 4 is oriented relative to the sluice valve opening or the flange 1 such that initial contact preferably occurs simultaneously along the entire length of the sluice valve opening. This prevents the cover from tilting over a portion of the seal 31. Furthermore, the sluice valve cover 4 should be pressed further onto the sluice valve opening or the flange 1 without unnecessarily stressing the seal 31, or rather, the seal 31 should be protected as much as possible until a desired contact pressure, preferably by means of a specified closing force, is reached. Therefore, the sluice valve cover 4 should be pressed onto the flange 1 as axially as possible, i.e., in the direction of the opening axis 17.This is not possible by means of a coupling of the sluice valve cover 4 to the lever arm 5 that is articulated around an axis fixed with respect to the lever arm 5. Although, as explained in the introduction, geometries and tilting mechanisms are known that are intended to minimize seal wear, only solutions are known in which the sluice valve cover is rigidly or articulated with respect to an axis coupled to the lever arm 5. These known geometries have in common that the sluice valve cover is pressed on in a circular path even during the pressing process. Thus, although seal wear can possibly be minimized by an optimized geometric arrangement of the axes and planes relative to each other, it is not possible to achieve the sluice valve cover being pressed onto the flange 1 in the axial direction, which is inherently the gentlest on the seal 31.

[0052] In the present embodiment, however, during the pressing of the sluice valve cover 4 onto the flange 1, decoupling of the sluice valve cover 4 from the lever arm 5 can occur. This decoupling can be achieved primarily by means of the coupling system 13. The coupling system 13 ensures that the sluice valve cover 4 is pressed onto the flange 1 in a circular path around the axis of rotation 16 only until a closing force, which is transmitted to the sluice valve cover 4 via the shaft 2 by means of a torque, e.g., from a motor, overcomes a restoring force of the spring assembly 8. As soon as the restoring force of the spring assembly 8 is overcome, the contact between the bolt 6 and the centering disc 7 is released. In other words, the bolt 6 moves relative to the centering disc 7.The lever arm 5 of the sluice valve cover 4 moves in one direction into the sluice valve opening, i.e., in the direction of the opening axis 17, which is preferably oriented parallel to the longitudinal axis of the bolt 61. A circular movement of the lever arm 5, which is rigidly connected to the shaft 2, is now transmitted exclusively to the centering disc 7 via the spring assembly 8. The spring assembly 8 can translate the circular movement of the lever arm 5 into an axial movement of the sluice valve cover 4. In other words, the spring assembly 8 ensures that a uniform contact pressure can be achieved on the seal 31 along the flange, and thus the sluice valve cover 4 is pressed evenly and axially onto the flange 1. This minimizes, and preferably prevents, shear forces on the seal 31. Twisting of the seal 31 can thus preferably be prevented.This effectively minimizes seal wear, preferentially extends the service life and necessary maintenance intervals of the valve, and ultimately reduces follow-up costs for the lock valve, especially maintenance and spare parts costs.

[0053] Fig. Figure 5 now shows the sluice valve in a fully closed position. The seal 31 is deformed, and the (dynamic) first sealing surface 3 and the second sealing surface 12 are congruent. Thus, a gas-tight contact is established between the sluice valve cover 4 and the flange 1. As can be seen, no force is transmitted via the bolt 6. A contact force transmitted from the shaft 2 and the lever arm 5 to the flange 1 is transmitted solely via the spring assembly 8, the centering disc 7, and the sluice valve cover 4, with the spring assembly 8 ensuring an evenly distributed contact force.

[0054] If the lock valve is to be opened again, the contact pressure is reduced until the lock valve cover 4 is once again in the position it was in. Fig. 3 and Fig.The state shown in Figure 4 is as follows. In this state, the first sealing surface 3 is just in contact with the second sealing surface 12, and the bolt 6 initially comes back into contact with the centering disc 7. Preferably, the transition from bolt head 62 to shaft 63 is convexly shaped, more preferably in the form of a spherical segment or a spherical disc. The tapered centering disc opening 71 is preferably designed as a conical socket. When the sluice valve cover 4 is detached from the flange 1 or the seal 31, frictional contact occurs between the centering disc 7 and the bolt 6, which ensures that the sluice valve cover 4 is held or "frozen" in the orientation relative to the lever arm 5 in the position in which it detached from the flange 1 or the valve seat. When the sluice valve cover 4 is closed again, this results in the sluice valve cover 4 being placed onto the seal 31 simultaneously along the entire flange 1.This allows seal wear to be further reduced, as shear forces on the seal can be successfully reduced or even completely avoided. QUOTES INCLUDED IN THE DESCRIPTION

[0000] This list of documents cited by the applicant was automatically generated and is included solely for the reader's convenience. The list is not part of the German patent or utility model application. The DPMA accepts no liability for any errors or omissions. Cited patent literature

[0000] DE 872906

[0004] DE 802855

[0005] DE 7305670 U

[0006] EP 0554522A2

[0007] EP 2355132B1 [0008, 0010]

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