Actuator-sensor device and systems based on it, uses and manufacturing processes

Abstract

The invention relates to an actuator-sensor device (1) comprising at least one upper membrane (2), wherein at least one actuator electrode with a signal input is arranged on the at least one upper membrane (2) and at least one free area in the form of a through-slit. The device comprises at least one middle membrane (3), wherein the at least one middle membrane (3) has at least one perforated recess (4). Furthermore, the device (1) comprises at least one lower membrane (5), wherein at least one actuator electrode with a signal input is arranged on the at least one lower membrane (5) and at least one free area in the form of a through-slit.Finally, the device (1) has at least one upper sensor electrode (6) with a head and a lead with signal output, wherein the head of the at least one upper sensor electrode (6) and the lead of the at least one upper sensor electrode (6) are arranged in the at least one free area in the form of a through-slit of the at least one upper membrane (2), and at least one lower sensor electrode (7) with a head and a lead with signal output, wherein the head of the at least one lower sensor electrode (7) and the lead of the at least one lower sensor electrode (7) are arranged in the at least one free area in the form of a through-slit of the at least one lower membrane (5).

Description

The invention is an active layer sensormotor system. This is intended to allow interaction between human and machine. The use of dielectric elastomers is used for the reaction of such an active layer. A function-integrating membrane is intended to capture tactile stimuli on the surface of a structure. Haptic feedback is then to be used to return a signal.Soft robotics is a sub-area of robotics that focuses increasingly on the use of compliant and soft structures. The deformability of such structures offers several advantages over conventional rigid structures. Due to their flexibility, they can adapt to their environment. This results in a greater spectrum of use, since they can be used more universally. Furthermore, this allows a safe interaction between human beings and machines. This is necessary in areas where people are working directly in the vicinity of robots. The risk of injury can thus be significantly reduced.The integration of function-bearing components into flexible structures plays a decisive role here. This allows interaction with the environment. Conventional sensors and actuators usually consist of rigid structures. By integrating these into soft structures, their profile of properties changes. For this reason, the use of flexible functional elements is advantageous in this case. Direct interactive operation of soft robots can be made possible by sensoromotor systems. Tactile stimuli on the surface of a structure are intended to be detected. Haptic feedback is then to be used to return a signal. In this way, information about specific states can be transmitted to the human. The use of dielectric elastomers is used for the implementation of an active, sensor-integrated layer.Dielectric elastomers are multifunctional, flexible and highly deformable electromechanical structures that are usually used as actuators, sensors, for generating energy or for signal processing. They are usually made of a non-conductive elastomer element and conductive, compliant electrodes, as the case may be. In the last two decades, dielectric elastomers have been used primarily as actuators for various applications and as sensors for large deformations. After the development of the dielectric elastomer switch, so-called multifunctional dielectric elastomers have been estimated for some years mainly on the basis of their broad spectrum of use, especially in robotics.WO 2019 / 182 459 A1 discloses a flexible switch comprising a deformable body and a plurality of electrodes, at least one of the electrodes being provided on the deformable body. The switch has a first state in which the electrodes are spaced apart from each other and a second state in which the electrodes are in electrical contact, and the switch is configured to allow movement between the states when a force is applied to or removed from the deformable body.DE 10 2011 102 796 A1 discloses an actuator sensor device and a method for inductively detecting a position, but accordingly requires the continuous build-up of a magnetic field and changes of the same or occurring eddy currents and therefore functions reliably only in the case of metallic objects. DE 24 39 697 A1 shows a multi-layered pushbutton, but without haptic feedback.Neu et al., Fully Polymeric Domes as High-Stroke Biasing System for Soft Dielectric Elastomer Actuators, DOI 10.3389 / frobt.2021.695918, discloses a dielectric elastomer actuator and a polymer dome as a mechanical biasing element which is placed on the actuator.A sensoromotor system which detects tactile stimuli on the surface of a structure and gives haptic feedback would therefore be implemented in the prior art in such a way that sensors and actuators made of dielectric elastomers are arranged on the surface of the structure. It is problematic here that this has to take place offset, that is to say the tactile stimuli cannot be detected where the haptic feedback is given. Furthermore, if the prestressing element proposed in the prior art is placed on, it is possible for no homogeneous surface of the structure to be produced, that is to say flat sensors are each adjacent to raised actuators.The object of the invention is therefore to propose a device and a method which provides a combination of sensor and actuator, in which a tactile stimulus is detected where the haptic feedback is given. It should also be made possible to integrate a prestressing element into this combination in a sensor-motor system and thus build up an active, sensor-integrated layer.This object is achieved according to the invention by an actuator-sensor device according to claim 1, a sensor-motor system according to claim 3, an active sensor-integrated layer according to claim 6 and the use thereof according to claim 7 and a production method according to claim 9.An actuator sensor device has at least one upper membrane, wherein at least one actuator electrode with signal input is arranged on the at least one upper membrane and the at least one upper membrane has at least one area which remains free in the form of a through gap in which no actuator electrode is arranged. The device has at least one middle membrane, wherein the at least one middle membrane has at least one hole-shaped cutout. Furthermore, the device has at least one lower membrane, wherein at least one actuator electrode with signal input is arranged on the at least one lower membrane and the at least one lower membrane has at least one region which remains free in the form of a passage gap in which no actuator electrode is arranged. Finally, the device has at least one upper sensor electrode with a head and a feed line with signal output, wherein the head of the at least one upper sensor electrode and the feed line of the at least one upper sensor electrode are arranged in the at least one area remaining free in the form of a passage gap of the at least one upper membrane, and at least one lower sensor electrode with a head and a feed line with signal output, wherein the head of the at least one lower sensor electrode and the feed line of the at least one lower sensor electrode are arranged in the at least one area remaining free in the form of a passage gap of the at least one lower membrane. In this case, the at least one middle membrane is arranged between the at least one upper membrane and the at least one lower membrane in such a way that the head of the at least one upper sensor electrode and the head of the at least one lower sensor electrode are arranged lying directly on opposite sides of the at least one hole-shaped cutout.The novel combination of sensor system and actuator system and the combination of both elements is advantageous on the actuator-sensor device. The sensor part is located in the middle of the device, whereas the actuator part is located at the edge. This makes it possible to capture tactile stimuli where the haptic feedback is also given.The actuator part of the actuator sensor device is composed of three individual layers, namely the at least one upper, middle and lower membrane. For the build-up of an electrical voltage, at least one flexible electrode (actuator electrode) with signal input is located on the at least one upper and the at least one lower membrane. The at least one middle membrane does not have actuator electrodes. It serves as a dielectric and prevents the actuator electrodes of the at least one upper and lower membrane from touching. This results in the basic construction of a plate capacitor. Upon application of an electric voltage, electrostatic attractive forces between the positively and negatively charged particles on the opposing electrodes of the at least one upper and lower membrane ensure a thickness compression of the dielectric in the middle, i.e. of the at least one middle membrane. Since the volume of the material remains approximately constant (mechanical incompressibility), the thickness compression leads to an enlargement of the at least one middle membrane in the plane. It increases in area and decreases in thickness.At the location at which a tactile stimulus is to be detected, at least one remaining area in the form of a through gap is located on the at least one upper and lower membrane, in which gap no actuator electrode is arranged. The sensor part of the actuator-sensor device is integrated into the area that remains free.The sensor part of the invention is likewise composed of three individual layers, namely the same at least one upper, middle and lower membrane, which also already form the actuator part. The at least one recess in the form of a hole, which is located on the at least one middle diaphragm, and the at least one remaining area in the form of a passage gap on the at least one upper and lower diaphragm, however, each represent a passive area from the perspective of the actuator. The sensory part is integrated into this region. Flexible electrodes (sensor electrodes) are located on the at least one upper and lower membrane for conducting the electric current.The at least one middle membrane serves as a dielectric between the sensor electrodes of the at least one upper and lower membrane and prevents them from touching without the action of an external pressure, because the hole-shaped cutout of the at least one middle membrane is significantly smaller than the head of the sensor electrodes. However, if a pressure is applied to the at least one upper sensor electrode by a tactile stimulus and the latter is pressed against the at least one middle and lower membrane, i.e. is deformed at this point, the heads of the sensor electrodes of the at least one upper and lower membrane come into contact through the hole-shaped cutout of the at least one middle membrane. The contact of the sensor electrodes leads to a sudden change in resistance and the signal output of the sensor electrodes is thus changed.Typically, the at least one upper membrane and the at least one lower membrane are embodied as an elastomer comprising polydimethylsiloxane, and / or the at least one actuator electrode and / or the at least one upper sensor electrode and / or the at least one lower sensor electrode are embodied as a matrix of an elastomer mixed with conductive particles comprising polydimethylsiloxane and carbon nanotubes.The use of these materials has the advantage that the actuator-sensor device can be made compliant as a kind of thin skin. Carbon nanotubes allow the conductivity of the matrix to be adjusted.In a typical embodiment, at least one actuator sensor device is designed as a sensor-motor system having at least one prestressing element, wherein the at least one prestressing element is configured to prestress the at least one actuator sensor device in such a way that, in the event of a change in at least one signal input of the at least one actuator electrodes of the at least one upper diaphragm and of the at least one lower diaphragm, a user can read the signal response haptically.This has the advantage that haptic feedback can be amplified in a simple mechanical manner. If a voltage is applied to the signal inputs of the at least one actuator electrodes of the at least one upper and the at least one lower membrane, electrostatic attractive forces cause a thickness compression of the at least one middle membrane and at the same time an increase in length and width of this membrane. As a result of this compression, the surface of the actuator sensor device lowers and this lowering can be perceived haptically. However, the thickness compression is of a small order of magnitude in the case of an actuator sensor device of correspondingly compact design and can therefore be perceived only with difficulty by a user. Moreover, a user could better perceive raising the surface than lowering. By using a biasing element, the actuator-sensor device is deformed such that an inclination angle is located between the sensor part and the actuator part. The surface of the actuator sensor device is therefore no longer located in one and the same reference plane, but rather is deflected out of this plane. The reference plane is an existing or virtual planar base on which the actuator sensor device rests. The sensory part lies in a spaced and parallel plane to the reference plane (sensor plane). The actuator part lies between the reference plane and the sensor plane and is inclined with respect to both. A thickness compression of the at least one middle diaphragm, i.e. the signal response to an applied voltage at the signal inputs of the at least one actuator electrodes of the at least one upper and the at least one lower diaphragm, thus brings about an increase in the length and width of the diaphragm, wherein the length direction and width direction each point out of the reference plane. In this way, the overall change in shape of the actuator part contributes to a displacement of the sensor part along an axis orthogonal to the reference plane. The signal response, the haptic feedback in the form of a displacement of the sensory part, is thus amplified.In order to enable an increased movement out of the reference plane, the actuator sensor device must thus be mechanically prestressed out of the plane. Various spring elements can be used for this purpose. It is advantageous to use a so-called nonlinear-biased spring (NBS) made of a compliant material, for example silicone, thermoplastic polyurethane, TPU, or other polymers. However, spiral springs or folding rods can also be used.Typically, the at least one prestressing element is designed as a spring element with bistable deformation behavior.It is advantageous in this respect that the profile of the resulting force on the spring element has a non-linear profile. When the spring element is compressed, the force resulting therefrom initially increases. In this range, a stable voltage state exists. Subsequently, the resulting force decreases again, since the stress state present here can be described as unstable. Thereafter, the voltage again rises due to the stabilization of the voltage state.The at least one prestressing element is preferably designed as a polymer dome, having a force introduction region, a spring action region and a stiffening region.If a polymer dome is used as spring element for the diaphragm, greater adjustment paths in cooperation with an actuator are possible in comparison with a linear spring. Furthermore, with such spring elements, it is possible to adapt them to the corresponding actuator. Thus, the polymer dome can be tuned to the at least one upper, middle and lower membrane after characterization thereof. The geometry for the spring element is characterized by three regions. The first region is located on the upper side and serves as a force introduction region for the sensory part of the actuator-sensor device. The second region contains the actual polymer dome, which is responsible for the springing. This region is characterized by the wall thickness t of the dome geometry and its radius r. The third region of the polymer dome is located on the underside and serves as a stiffening frame for the structure.The peculiarity of such a geometry of the polymer dome is its bistable deformation behavior, which can be adapted to the properties of the at least one upper, middle and lower membrane. The course of the resulting force on the spring element is non-linear and can be influenced by varying the parameters of the polymer dome. In this way, the force profile of the spring element can be adapted to the force profile of the at least one upper, middle and lower membrane.This is a particularly favorable adaptation of the polymer dome to the actuator-sensor device if the sensor part precisely covers the force introduction region. Depending on the size and rigidity of the at least one upper, middle and lower membrane, the spring effect can also be adapted via the wall thickness t and the radius r of the polymer dome. Likewise, the desired deflection of the at least one upper, middle and lower membrane, in particular depending on its stiffness, can be adjusted by the height h of the polymer dome.In another embodiment, an active, sensor-integrated layer is built up, which has at least one sensor-motor system and at least one control unit, wherein the at least one control unit is connected to the signal inputs of the at least one actuator electrodes of the at least one upper membrane and the at least one lower membrane and to the signal outputs of the at least one upper sensor electrode and the at least one lower sensor electrode of the at least one sensor-motor system, wherein the at least one sensor-motor system is assembled in modular fashion such that the signal inputs of the at least one actuator electrodes of the at least one upper membrane and the at least one lower membrane are configured to be actuated jointly and / or the signal outputs of the at least one upper sensor electrode and the at least one lower sensor electrode are configured to be evaluated jointly.By such modular joining of a plurality of sensor-motor systems, an active, sensor-integrated layer covering the surface can be realized. A type of interactive skin arises in which a plurality of sensoromotor systems are combined to form arrays. It can simultaneously serve as an input and communication interface and acknowledge inputs via an active feedback.Typically, the active, sensor-integrated layer is used for human-machine interaction (MMI), wherein at least one signal output of the at least one upper sensor electrode and the at least one lower sensor electrode is changed by a mechanical pressure applied by a user such that the head of the at least one upper sensor electrode and the head of the at least one lower sensor electrode electrically contact each other. As a result, at least one signal input of the at least one actuator electrodes of the at least one upper membrane and of the at least one lower membrane is modified in such a way that the user perceives the signal response haptically.The core idea is thus the use of the active, sensor-integrated layer for MMI applications. The sensors detect a contact from the outside, the measured signals are evaluated by measurement technology and a reaction is derived therefrom. This reaction is then sent as a high-voltage signal to the actuators, which give the user haptic feedback by movement. The preferred direction of movement is out of the plane of the skin.In this way, the working environment can be made more secure for the person in interaction with machines. Furthermore, an intuitive interaction is made possible, in which the detection of specific contact points leads to a reaction of the machine. The embodiment is an interactive skin for human-machine interaction, for example for control, communication and cooperation with machines. It can be used as a cover of technical systems. Preferably, the active, sensor-integrated layer is used for controlling at least one robot arm by at least one user, i.e. the human-machine interaction consists in the control of this robot arm by the user.To produce the actuator sensor device having the above-described properties, at least one upper membrane, at least one middle membrane and at least one lower membrane, each comprising a dielectric elastomer, are perforated, punched or cut in some other way in such a way that at least one cutout in the form of a hole is formed on the at least one middle membrane. Subsequently, at least one actuator electrode is applied to the at least one upper membrane and the at least one lower membrane, at least one upper sensor electrode is applied to the at least one upper membrane, and at least one lower sensor electrode is applied to the at least one lower membrane with the aid of electrically conductive ink by automatic squeegeeing. Finally, the at least one upper membrane, the at least one middle membrane and the at least one lower membrane are joined together by means of adhesive bonding in such a way that the head of the at least one upper sensor electrode and the head of the at least one lower sensor electrode are arranged lying directly on opposite sides of the at least one hole-shaped cutout.An advantage of this production method is that it can be carried out in a largely automated manner and, in particular, automatic doctor bladeing, so-called doctor blading, is a particularly efficient and precise method for applying a plurality of electrodes to a membrane made of a dielectric elastomer.Exemplary embodiments are illustrated in the drawings and are explained below with reference to the figures. Recurring features are provided with identical reference numerals.The following are shown: FIGS. 1A to 1C show an actuator-sensor device having an upper, middle and lower membrane, the three membrane lying one above the other being shown individually; FIG. 2 shows an actuator sensor device in plan view with an upper, middle and lower membrane; FIG. 3 shows a force-resistance characteristic curve for the sensor circuit; FIGS. 4A and 4B show a sensor-motor system with a biasing element in a sectional side view; FIG. 5 shows a sensor-motor system with a prestressing element in a sectioned, isometric view; FIG. 6A shows a polymer dome in a sectional side view; FIG. 6B is a displacement-force diagram for a sensor-motor system; and FIG. 7 shows an active, sensor-integrated layer for the human-machine interaction with a robot.FIGS. 1A to 1C show a typical exemplary embodiment of an actuator sensor device 1. in this example, the device 1 has exactly one upper 2, exactly one middle 3 and exactly one lower membrane 5. Each of these membranes 2, 3, 5 is circular and consists of an elastomer. FIG. 1A shows the bottom view of the upper diaphragm 2; a plurality of actuator electrodes with signal input are arranged on the upper diaphragm 2. However, no actuator electrodes are arranged in a region which remains free in the form of a passage gap from the center point to the periphery. The upper diaphragm 2 thus forms the active region of the actuator in the region of applied actuator electrodes. The area remaining free in the form of a through gap, on the other hand, is the passive area of the actuator. The sensory part is arranged in this region. At the center of the upper diaphragm 2, the head of an upper sensor electrode 6 is disposed. It is also circular. Starting from the head, the feed line of the upper sensor electrode 6 is arranged in the area left free in the form of a through gap. The upper sensor electrode 6 is thus guided outwards through the active region of the actuator. FIG. 1B shows the top view of the middle membrane 3, which has a recess in the form of a hole 4 at the center. This recess is smaller than the head of the upper sensor electrode 6. the middle membrane 3 does not have actuator electrodes. Rather, it serves as a dielectric between the upper membrane 2 and the lower membrane 5. FIG. 1C is a plan view of the lower diaphragm 5 having the same structure as the upper diaphragm 2, and thus the upper sensor electrode 6 and the lower sensor electrode 7 are not in electrical contact. They are spaced apart from one another by the middle membrane 3. However, since the membranes 2, 3, 5 are resilient, this distance can in principle be overcome by applying a force F perpendicular to the membrane plane. Electrical contact is then possible due to the recess in the form of a hole 4 on the central membrane 3. The head of the upper 6 and the lower sensor electrode 7 thus lies directly on opposite sides of the recess in the form of a hole 4, i.e. is in direct contact with the hole 4.FIG. 2 shows the top view of the actuator sensor device 1 in the assembled state, in which the membranes 2, 3, 5 rest on one another. The position of the head and the lead of the upper sensor electrode 6 and the position of the lead of the lower sensor electrode 7 are indicated by broken lines. It can be seen that the head of the upper 6 and the lower 7 sensor electrodes are thus arranged exactly one above the other in plan view, so that the head of the upper 6 sensor electrode covers the cutout in the form of a hole 4 of the middle membrane 3 and the head of the lower 7 sensor electrode. In a small detail of the heads of the sensor electrodes 6, 7, there is thus no dielectric in the interspace in plan view. By applying a force in the direction of the plan view, a direct electrical contact can thus be produced.FIG. 3 shows a force-resistance diagram of the sensor circuit. States are considered here for contact evaluation. If no force or only a slight force is applied to the actuator-sensor device 1 in the direction perpendicular to the plane of the membranes 2, 3, 5, there is no electrical contact between the sensor electrodes 6, 7. In the non-deformed state, the two electrodes are thus separated from one another, as a result of which no electric current flows. If the force is increased significantly, for example because a user intentionally actuates the sensory part by finger pressure, the sensor electrodes 6, 7 come into direct electrical contact. As a result, the resistance rapidly decreases and a measurement current flows between the signal outputs, which can be evaluated. By contacting both electrodes in the deformed state, the circuit is thus closed, whereby a sudden change of the electrical resistance takes place. The electric resistance in the deformed state depends on the cross section of the electrodes and the specific resistance of the electrically conductive ink used in the production process. In particular, the spacing, predefined by the thickness of the middle membrane 3, thus also implements a switching threshold for the pressure or force exertion and thus represents a measure for the sensitivity of the sensor, which can be adapted accordingly.FIGS. 4A and 4B show a sectional side view of a sensor-motor system, which has an actuator-sensor device 1 and a preload element 8 designed as a polymer dome. The actuator-sensor device 1 is prestressed by the polymer dome in such a way that, in the event of a change in the signal inputs of the actuator electrodes of the upper 2 and lower membrane 5, a user haptically perceives the signal response. The force introduction region of the polymer dome, i.e. the radius of the region on the upper side, covers the sensory part of the upper 2 and the lower membrane 5. The actuator part in the form of the active region of the upper 2 and lower membrane 5 is located in planes inclined with respect to the reference plane. This results in the surface geometry of a hollow cone section for the actuator region. When a voltage is applied to the actuator electrodes, i.e. a change in the signal input, and thus an initiated thickness compression of the middle membrane 3, the surface of the middle membrane 3 subsequently increases. By being fixed to the base and by the shape of the actuator sensor device 1 closed in the circumferential direction, the middle membrane 3 can actually only increase its surface by increasing its width in the direction of the imaginary hollow cone tip. Thus, the total magnification is in a direction orthogonal to the reference plane, i.e., in the height direction. Because two actuator-type partial regions are situated opposite each other in cross section at the cutout in the form of a hole 4 of the middle membrane 3, the enlargement of the surface of the middle membrane 3 is also twice in the mentioned height direction. These effects represent the amplification of the signal response, namely the displacement of the sensory part in the height direction.FIG. 4A shows a sectional side view in the basic state, i.e. without a voltage having been applied to the actuator electrodes and without a force or a pressure being exerted on the sensor electrodes 6, 7. The spring action region of the polymer dome simultaneously supports the active region of the actuator part of the actuator sensor device 1. FIG. 4B shows the mode of operation when applying a force or a pressure using the example of a finger pressure. The sensor electrodes 6, 7 are contacted directly with one another and a change in the signal outputs of the sensor electrodes 6, 7 of the actuator-sensor device 1 occurs, i.e. a flow of a measurement current. This input is answered with feedback in the form of the change in the signal inputs of the actuator electrodes of the actuator sensor device 1, that is to say the application of a voltage to the actuator part. The thickness compression of the middle membrane 3 thus initiated leads to an increase in its surface area, which leads to a displacement of the sensory part in the height direction, i.e. orthogonally to the reference plane. The user thus haptically perceives a counterpressure of the sensory part as feedback on his finger pressure. The displacement paths are indicated in FIG. 4B by a double arrow in the height direction. The feedback thus takes place exactly at the location at which the input of the user has also taken place.FIG. 5 is a cross-sectional isometric view of a sensormotor system. It can be seen clearly that the outer part of the actuator sensor device 1, i.e. the outer edge of the membranes 2, 3, 5, is fastened to the base. The sensorial part, on the other hand, lies exactly on the force introduction region of the polymer dome 8. Thus, for the remaining active region of the actuator part, the surface shape of a cone section results.FIGS. 6A and 6B show a cross section of the polymer dome 8 and a displacement-force diagram of the sensormotor system and the polymer dome 8, As FIG. 6A shows, the polymer dome 8 is adapted to the actuator sensor device 1. The radius of the force introduction region covers the sensory part of the upper 2 and lower membrane 5. The height h is matched to the desired displacement path.FIG. 6B shows the bistable deformation behavior of the prestressing element 8, i.e. the nonlinear-biased spring (NBS) embodied as a polymer dome 8, once without an applied voltage (characteristic curve K 1) and once with an applied voltage (characteristic curve K 2). The two stable deformation states result for the polymer dome 8 in the haptics of a button with a perceptible switching threshold when a force is introduced by a finger pressure.FIG. 7 shows an active, sensor-integrated layer with an array of many sensor-motor systems, each consisting of an actuator-sensor device 1 and a preload element 8. This is a typical example of the use of the active, sensor-integrated layer for human-machine interaction. The signal inputs and signal outputs of the sensor-motor systems are evaluated or controlled jointly by a control unit 9.Features of the various embodiments disclosed only in the exemplary embodiments can be combined with one another and individually claimed.

Claims

Actuator sensor device (1) comprising at least one upper membrane (2), wherein at least one actuator electrode with signal input is arranged on the at least one upper membrane (2), wherein the at least one upper membrane (2) comprises at least one area remaining free in the form of a passage gap in which no actuator electrode is arranged; at least one middle membrane (3), wherein the at least one middle membrane (3) comprises at least one recess in the form of a hole (4); at least one lower membrane (5), wherein at least one actuator electrode with signal input is arranged on the at least one lower membrane (5), wherein the at least one lower membrane (5) comprises at least one area remaining free in the form of a passage gap in which no actuator electrode is arranged; at least one upper sensor electrode (6) with a head and a lead with a signal output, wherein the head of the at least one upper sensor electrode (6) and the lead of the at least one upper sensor electrode (6) are arranged in the at least one remaining area in the form of a passage gap of the at least one upper membrane (2); and at least one lower sensor electrode (7) having a head and a feed line with a signal output, wherein the head of the at least one lower sensor electrode (7) and the feed line of the at least one lower sensor electrode (7) are arranged in the at least one area which remains free in the form of a passage gap of the at least one lower membrane (5), wherein the at least one middle membrane (3) is arranged between the at least one upper membrane (2) and the at least one lower membrane (5) in such a way that the head of the at least one upper sensor electrode (6) and the head of the at least one lower sensor electrode (7) are arranged so as to be directly supported on opposite sides of the at least one hole-shaped cutout (4).Actuator sensor device (1) according to claim 1, wherein the at least one upper membrane (2) and the at least one lower membrane (5) are embodied as an elastomer comprising polydimethylsiloxane, and / or the at least one actuator electrode and / or the at least one upper sensor electrode (6) and / or the at least one lower sensor electrode (7) are embodied as a matrix of an elastomer mixed with conductive particles comprising polydimethylsiloxane and carbon nanotubes.Sensor-motor system, comprising at least one actuator-sensor device (1) according to one of Claims 1 or 2 and at least one prestressing element (8), wherein the at least one prestressing element (8) is configured to prestress the at least one actuator-sensor device (1) in such a way that, in the event of a change in at least one signal input of the at least one actuator electrode of the at least one upper membrane (2) and of the at least one lower membrane (5), a user perceives the signal response haptically.The sensor-motor system according to claim 3, wherein the at least one biasing element (8) is configured as a spring element with bistable deformation behavior.The sensor-motor system according to claim 3, wherein the at least one prestressing element (8) is designed as a polymer dome, having a force introduction region, a spring action region and a stiffening region.Active, sensor-integrated layer, having at least one sensor-motor system according to one of Claims 3 to 5; at least one control unit (9), wherein the at least one control unit (9) is connected to the signal inputs of the at least one actuator electrode of the at least one upper membrane (2) and the at least one lower membrane (5) and to the signal outputs of the at least one upper sensor electrode (6) and the at least one lower sensor electrode (7) of the at least one sensor-motor system, wherein the at least one sensor-motor system is assembled in modular fashion such that the signal inputs of the at least one actuator electrode of the at least one upper membrane (2) and the at least one lower membrane (5) are configured to be actuated jointly and / or the signal outputs of the at least one upper sensor electrode (6) and the at least one lower sensor electrode (7) are configured to be evaluated jointly.Use of an active, sensor-integrated layer according to claim 6 for man-machine interaction, wherein at least one signal output of the at least one upper sensor electrode (6) and the at least one lower sensor electrode (7) is changed by a mechanical pressure introduced by a user in such a way that the head of the at least one upper sensor electrode (6) and the head of the at least one lower sensor electrode (7) electrically contact one another, wherein as a result at least one signal input of the at least one actuator electrode of the at least one upper membrane (2) and of the at least one lower membrane (5) is changed in such a way that the user haptically perceives the signal response.The use of claim 7, wherein the human-machine interaction is control of at least one robotic arm by at least one user.Method for producing an actuator sensor device (1) according to one of Claims 1 or 2, wherein at least one upper membrane (2), at least one middle membrane (3) and at least one lower membrane (5), each comprising a dielectric elastomer, are perforated, punched or cut in another way in such a way that at least one cutout in the form of a hole (4) is formed on the at least one middle membrane (3), wherein at least one actuator electrode is applied to the at least one upper membrane (2) and the at least one lower membrane (5), at least one upper sensor electrode (6) is applied to the at least one upper membrane (2) and at least one lower sensor electrode (7) is applied to the at least one lower membrane (5) by means of electrically conductive ink by automatic doctoring, wherein the at least one upper membrane (2), the at least one middle membrane (3) and the at least one lower membrane (5) are joined together by means of adhesive bonding in such a way, the head of the at least one upper sensor electrode (6) and the head of the at least one lower sensor electrode (7) are arranged so as to be directly supported on opposite sides of the at least one hole-shaped cutout (4).

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