Nuclear magnetic resonance gyroscope and method for manufacturing a nuclear magnetic resonance gyroscope

Abstract

The present invention provides a nuclear magnetic resonance gyroscope (10) comprising a pump laser (Pu) and a sample laser (Pr), a first sample laser detector (PD1), a second sample laser detector (PD2), and a third sample laser detector (PD3), a first measuring device (ME1) with a first measuring housing (MG1), a second measuring device (ME2) with a second measuring housing (MG2), and a third measuring device (ME3) with a third measuring housing (MG3), wherein each of the measuring devices (ME1) further comprises: a pump laser aperture (Pu-O) in the measuring housing for illuminating the respective measuring housing in a respective pump laser direction, and a sample laser aperture (PrO) in the measuring housing for illuminating the respective measuring housing in a respective sample laser direction, wherein the respective sample laser direction and pump laser direction are orthogonal to each other for the same measuring device.and wherein a first sample laser direction of the first measuring housing and a second sample laser direction of the second measuring housing and a third sample laser direction of the third measuring housing are each orthogonal to each other; a magnetic shield (MS) arranged in or on the measuring housing and wherein an interior of the measuring housing can be at least partially shielded from an external magnetic field; a measuring magnetic field device (MF) by means of which a predetermined measuring magnetic field can be generated; a vapor cell (DC) arranged in the interior of the measuring housing and in the measuring magnetic field and comprising a noble gas and an alkali metal gas and arranged in a predetermined orientation in the interior of the measuring housing and surrounded by the magnetic shield (MS) such that the noble gas and the alkali metal gas can be penetrated by the pump laser (Pu) and the sample laser (Pr) perpendicular to each other, wherein the sample laser (Pr) illuminates the respective measuring housing,the steam cell (DC) and the magnetic shield (MS) pass completely through in the respective sample laser direction.

Description

[0001] The present invention relates to a nuclear magnetic resonance gyroscope and a method for manufacturing a nuclear magnetic resonance gyroscope. State of the art

[0002] Nuclear magnetic resonance gyroscopes play a significant role in sensor development. The development of sensors based on quantum technology can influence a wide range of future applications. A nuclear magnetic resonance gyroscope (NMRG) can measure the rotation rate based on the atomic precession of a noble gas within a hot steam cell. Unlike other measurement devices, nuclear magnetic resonance gyroscopes have no moving mechanical parts, enabling their use in high g-force ranges or under external vibrations.

[0003] EP 2 910 900 B1 describes a nuclear magnetic resonance (NMR) gyroscope system with a vapor cell sealed to contain an alkali metal and a gyromagnetic isotope, a magnetic field source and a laser. Disclosure of the invention

[0004] The present invention provides a nuclear magnetic resonance gyroscope according to claim 1 and a method for producing a nuclear magnetic resonance gyroscope according to claim 12.

[0005] Preferred further training courses are the subject of the subclaims. Advantages of the invention

[0006] The idea underlying the present invention is to provide a nuclear magnetic resonance gyroscope and a method for manufacturing a nuclear magnetic resonance gyroscope, wherein a gyration measurement can be extended to three orthogonal spatial directions in a component.

[0007] Designing an NMR gyroscope for measuring the atomic / nuclear precession (around the direction of the pump laser beam) of a noble gas in a vapor cell may require several components: a unit for generating and influencing magnetic fields, an optical system, a heating system, control electronics, and power regulators. A compact, self-contained component, such as a three-axis NMR gyroscope, can be advantageously provided, incorporating all the components typically required for its operation.

[0008] According to the invention, the nuclear magnetic resonance gyroscope comprises a housing which includes at least three orthogonally arranged inner surfaces; a pump laser and a sample laser which are arranged on one of the inner surfaces and electrically contacted; a first sample laser detector, a second sample laser detector and a third sample laser detector, each of which are arranged on one of the inner surfaces;a first measuring device with a first measuring housing, a second measuring device with a second measuring housing, and a third measuring device with a third measuring housing, each of the measuring devices further comprising: a pump laser aperture in the measuring housing for illuminating the respective measuring housing in a respective pump laser direction, and a sample laser aperture in the measuring housing for illuminating the respective measuring housing in a respective sample laser direction, wherein the respective sample laser direction and pump laser direction for the same measuring device are orthogonal to each other, and wherein a first sample laser direction of the first measuring housing, a second sample laser direction of the second measuring housing, and a third sample laser direction of the third measuring housing are each orthogonal to each other (relative to each other, orthogonality may also be given for the pump laser directions);a magnetic shield arranged in or on the respective measuring housing, wherein an interior of the measuring housing can be at least partially shielded from an external magnetic field; a measuring magnetic field device by means of which a predetermined measuring magnetic field can be generated; a vapor cell arranged in the interior of the measuring housing and in the measuring magnetic field, comprising a noble gas and an alkali metal gas, and arranged in a predetermined orientation in the interior of the measuring housing and surrounded by the magnetic shield such that the noble gas and the alkali metal gas can be penetrated by the pump laser and the sample laser perpendicular to each other, wherein the sample laser and / or the pump laser passes through the respective measuring housing, the vapor cell and the magnetic shield in the respective sample laser direction and / or pump laser direction, for example completely;wherein a plurality of optical beam deflection elements are arranged in the housing on the respective inner sides and / or on the respective measuring housing, with which a sample laser beam can be guided from the sample laser to the respective measuring housing and its sample laser opening, and which can then be irradiated through in the respective sample laser direction, and on the respective side of the respective measuring housing facing away from the sample laser opening, the respective sample laser detector is arranged on the corresponding inner side for receiving the respective sample laser beam during the radiation exit of the respective measuring housing.

[0009] A gyroscope should also be positioned along one axis, encompassing a vapor cell filled with a noble gas (such as He, Ne, Kr, Xe) and an alkali metal (such as Rb, Cs, K), with the gases being heated to over 100 °C. Furthermore, a triaxial magnetic field generation device may be required to generate alternating magnetic fields through the vapor cell and along the spatial directions (measurement directions). The magnetic shield should at least partially shield external magnetic fields (at the vapor cell). A circularly polarized pump laser can be emitted through the vapor cell (in which case the rotation rate of this vapor cell can only be measured around this axis) and received by the photodetector.

[0010] A sample laser beam can pass through the vapor cell, perpendicular to the pump laser beam, and through a polarizing beam splitter, where it is received by balanced photodetectors. The pump laser can determine the axis for this vapor cell to which the NMR gyroscope is sensitive.

[0011] To realize a three-axis gyroscope, three vapor cells with corresponding laser arrangements, optical components and magnetic field components are therefore required.

[0012] The sample and pump lasers can shine into the interior of the housing and be directed and divided by appropriate deflection elements to the respective measuring housings.

[0013] According to a preferred embodiment of the nuclear magnetic resonance gyroscope, a plurality of further optical beam deflection elements are arranged in the housing on the respective inner sides and / or on the respective measuring housing, with which a pump laser beam can be guided from the pump laser to the respective measuring housing and its pump laser opening, and this can then be directed in the respective pump laser direction (into the respective measuring housing).

[0014] On the inside of the housing, each inner surface can be at least partially covered by a circuit board, which may have conductor tracks and fastening elements.

[0015] According to a preferred embodiment of the nuclear magnetic resonance gyroscope, the first sample laser direction, the second sample laser direction, and the third sample laser direction run along intended measurement directions.

[0016] According to a preferred embodiment of the nuclear magnetic resonance gyroscope, the magnetic shield comprises a plurality of shielding layers arranged concentrically around the vapor cell.

[0017] According to a preferred embodiment of the nuclear magnetic resonance gyroscope, the housing comprises a ceramic housing with six inner surfaces, on which the pump laser and sample laser as well as the optical beam deflection elements and the sample laser detectors are arranged and electrically contacted in certain areas.

[0018] The components of the three-axis gyroscope can be arranged within the housing, with the housing itself being arranged on a support or on the body for which the measurement is to be performed (roll-pitch-yaw).

[0019] According to a preferred embodiment of the nuclear magnetic resonance gyroscope, the optical beam deflection elements comprise deflection prisms and / or polarization plates and / or filters.

[0020] According to a preferred embodiment of the nuclear magnetic resonance gyroscope, the sample laser detectors each comprise two parallel balanced photodetectors and a polarizing beam splitter, with which the respective incident sample laser beam can be divided and radiated in different partial beams onto the balanced photodetectors.

[0021] Balanced detectors are a system of two photodetectors that respond to differences in optical power but not to shared noise. They can be used to collect the sample beam after the polarizing beam splitter. The beam splitter divides the sample beam into two beams with orthogonal polarization states.

[0022] According to a preferred embodiment of the nuclear magnetic resonance gyroscope, this includes a vapor cell holder for each measuring device, in which the respective vapor cell can be inserted and held within the magnetic shield at a 45° angle to the respective probe laser beam and pump laser beam.

[0023] According to a preferred embodiment of the nuclear magnetic resonance gyroscope, the measuring magnetic field device comprises a first magnet generation component with which a first magnetic field component with field lines parallel to the respective sample laser beam can be generated, and a second and third magnet generation component with which a second and third magnetic field component with field lines in a direction perpendicular to the respective sample laser beam can be generated.

[0024] According to a preferred embodiment of the nuclear magnetic resonance gyroscope, the measuring magnetic field device comprises a spiral coil as the first magnet generating component and a Helmholtz coil arrangement as the second and third magnet generating components, respectively, which are arranged on an outside of the steam cell holder.

[0025] According to a preferred embodiment of the nuclear magnetic resonance gyroscope, the vapor cell comprises a plate comprising a glass-silicone-glass stack, wherein in a central region of the silicone component a recess is formed in the silicone between two glass plates and the noble gas and the alkali metal gas are enclosed in this recess.

[0026] According to the invention, the method for manufacturing a nuclear magnetic resonance gyroscope involves providing a housing comprising at least three orthogonally arranged inner surfaces; providing a pump laser and a sample laser, which are arranged on one of the inner surfaces and electrically contacted; providing a first sample laser detector, a second sample laser detector, and a third sample laser detector, each of which are arranged on one of the inner surfaces; and providing a first measuring device with a first measuring housing, a second measuring device with a second measuring housing, and a third measuring device with a third measuring housing.wherein each of the measuring devices further comprises: a pump laser aperture in the measuring housing for illuminating the respective measuring housing in a respective pump laser direction and a sample laser aperture in the measuring housing for illuminating the respective measuring housing in a respective sample laser direction, wherein the respective sample laser direction and pump laser direction for the same measuring device are orthogonal to each other, and wherein a first sample laser direction of the first measuring housing and a second sample laser direction of the second measuring housing and a third sample laser direction of the third measuring housing are each orthogonal to each other; a magnetic shield which is arranged in or on the measuring housing and wherein an interior of the measuring housing can be at least partially shielded from an external magnetic field; a measuring magnetic field device by means of which a predetermined measuring magnetic field can be generated; a steam cell,which is arranged inside the measuring housing and in the measuring magnetic field and which comprises a noble gas and an alkali metal gas and is arranged in a predetermined orientation inside the measuring housing and surrounded by the magnetic shield such that the noble gas and the alkali metal gas can be irradiated perpendicularly to each other by the pump laser and the sample laser, wherein the sample laser and / or the pump laser passes through the respective measuring housing, the vapor cell and the magnetic shield in the respective sample laser direction and / or pump laser direction, for example completely; wherein a plurality of optical beam deflection elements are arranged in the housing on the respective inner sides and / or on the respective measuring housing,with which a sample laser beam can be guided from the sample laser to the respective measuring housing and its sample laser opening, and which can then be irradiated in the respective sample laser direction, and on the respective side of the respective measuring housing facing away from the sample laser opening, the respective sample laser detector is arranged on the corresponding inner side to receive the respective sample laser beam during the course of a radiation exit of the respective measuring housing.

[0027] The method can also be characterized by the features and associated advantages already mentioned in connection with the nuclear magnetic resonance gyroscope, and vice versa.

[0028] Further features and advantages of embodiments of the invention will become apparent from the following description with reference to the accompanying drawings. Brief description of the drawings

[0029] The present invention will be explained in more detail below with reference to the exemplary embodiments shown in the schematic figures of the drawing.

[0030] They show: Fig. 1 a schematic sectional view of a nuclear magnetic resonance gyroscope according to an embodiment of the present invention; Fig. 2 a schematic sectional view of a nuclear magnetic resonance gyroscope from the Fig. 1 along a plane through two measuring housings; Fig. 3 a schematic sectional view of a nuclear magnetic resonance gyroscope from the Fig. 2 along a plane orthogonal to the cutting plane of the Fig. 2 through a measuring housing and below or above the cut measuring housing from the Fig. 2; Fig. 4 a schematic interior view of the housing with the beam paths of the two lasers according to an embodiment of the present invention; Fig. 5a a sectional view through one of the measuring housings of the Fig. 1, Fig. 2, Fig. 3 to Fig. 4 with the steam cell inside; Fig. 5b a representation of a measuring magnetic field device for a steam cell according to an embodiment of the present invention; Fig. 5c a steam cell holder for a steam cell according to an embodiment of the present invention; Fig. 6a a cross-sectional view through a steam cell showing the associated beam path of the pump laser beam and the sample laser beam; Fig. 6b a sectional view through a steam cell according to an embodiment of the present invention; and Fig. 7 a block diagram of process steps of the method for manufacturing a nuclear magnetic resonance gyroscope according to an embodiment of the present invention.

[0031] In the figures, identical reference symbols denote identical or functionally equivalent elements.

[0032] Fig. Figure 1 shows a schematic sectional view of a nuclear magnetic resonance gyroscope according to an embodiment of the present invention.

[0033] In the Fig. Figure 1 shows a side view into the interior of housing G, as if the front wall and inner surface were not visible. The measuring housings are shown without a sectional view, including their outer casing.

[0034] The nuclear magnetic resonance gyroscope 10 thus comprises a housing G, which includes six orthogonally oriented inner surfaces IS, which can be connected to each other by electrical contacts EL, for example at the transition between adjacent edges of the circuit boards on the inner surfaces IS. Furthermore, the resonance gyroscope 10 comprises a pump laser Pu and a sample laser Pr, which are arranged on one of the inner surfaces IS and electrically contacted; a first sample laser detector PD1, a second sample laser detector PD2, and a third sample laser detector PD3, each of which is arranged on one of the inner surfaces IS and is followed by a respective measuring housing MG. A first measuring device ME1 with a first measuring housing MG1, a second measuring device ME2 with a second measuring housing MG2, and a third measuring device ME3 with a third measuring housing MG3, all approximately cylindrically symmetrical, can be present.

[0035] The sample laser Pr can be split into several partial beams Pr-S by beam splitters and deflection elements SUE and guided in orthogonal directions to the respective measuring housings MG1 to MG3, shining into or through them until reaching the respective sample laser detectors. The pump laser Pu can be split into several partial beams Pu-S by beam splitters and deflection elements SUE-2 and guided in orthogonal directions to the respective measuring housings MG1 to MG3, shining into or through them until reaching the respective (or one) pump laser detector. The number of deflection elements SUE and SUE-2 can be selected as necessary to achieve a correspondingly orthogonal distribution of the beam segments relative to each other and to the respective measuring housings and their openings.

[0036] Two of the inner surfaces IS can be used for an arrangement of photodetectors (PDs) with their associated electronics; two other inner surfaces IS can be used to mount the necessary power electronics for magnetic field generation and for a heating system for the steam cells; another inner surface IS can be used to mount one or both laser diodes (probe and pump lasers) with their operating electronics; and one remaining inner surface IS can serve as the main electronics substrate, for example, with control circuits for the entire gyroscope and sensor arrangement (evaluation and control electronics, and other components) mounted on it. Electrical power and signals can be transferred via the electronic contacts EL.

[0037] The laser diodes, photodetectors, and other components can be arranged and contacted on the circuit boards (or electronic substrates instead), thus eliminating the need for connecting wires, for example. These circuit boards or electronic substrates can be made of non-magnetic materials (such as ceramic, stainless steel, or other substrate materials).

[0038] Fig. Figure 2 shows a schematic sectional view of a nuclear magnetic resonance gyroscope from the Fig. 1 along a plane through two measuring housings.

[0039] The view of Fig. Figure 2 corresponds to approximately 1 / 3 of the housing depth as seen from a front side. This shows a cross-section through the second and third measuring housings MG2 and MG3, revealing a shell arrangement of the shielding layers ASL of the magnetic shield MS inside each measuring housing. The respective vapor cell DZ is located inside / at the center of the measuring housing, rotated 45° relative to the associated pump laser beam and sample laser beam, which illuminate or even pass through the respective measuring housing orthogonally to each other.

[0040] The sample laser Pr and the pump laser Pu can be arranged on the same inner surface IS and primarily project in the same direction. They can then be deflected as needed using appropriately selected deflection elements SUE and SUE-2. After deflection (or directly), the sample laser beam Pr-S can project onto a sample laser aperture Pr-O, and the pump laser beam Pu-S onto a pump laser aperture Pu-O. After exiting the respective measuring housing, the pump laser beam can, for example, strike a pump laser detector PuD after the third measuring housing MG3. An exit of the pump laser is not strictly necessary in the other measuring housings. However, for the sample laser, an exit and an impact on a corresponding sample laser detector PD1-PD3 are required in each measuring housing.

[0041] The two laser diodes Pr and Pu can be used independently for the entire gyroscope 10. This reduces the required electrical power and eliminates the need for any stabilization components for the laser radiation. Orthogonal deflection of the laser beams can positively influence the signal-to-noise ratio and improve the gyroscope's performance. The laser beams can be split and deflected before passing through the measuring housings, ensuring that each measuring device receives a pure laser beam unaffected by the measurement medium.

[0042] The laser diodes can be, for example, a so-called Distributed Feedback Laser (DFB), Distributed Bragg Reflector Laser (DBR), or Vertical-Cavity Surface-Emitting Laser (VCSEL). The laser beams can be linearly polarized.

[0043] The laser diodes can generate a wavelength suitable for reacting with alkali metals. For example, for rubidium RB, the laser diodes should have a wavelength of 795 nm or 780 nm.

[0044] The laser beams can first be collimated with lenses, and the beam cross-section can be adjusted to optimally illuminate the vapor cell. To stabilize the laser diode's emission, a heater and temperature sensor can be placed near each laser to maintain a constant temperature, for example, using a closed-loop control system.

[0045] Each sample laser beam can pass through a polarizing beam splitter (cube) after passing through the vapor cell. This splits the sample beam into two polarization components: a vertically polarized (S-polarized) and a parallel polarized (P-polarized) component. The first component passing through the beam splitter can be directed to the photodetector. The other component can be deflected to a second photodetector using a 90° prism. Two balanced photodetectors can be mounted side-by-side on an electronic substrate (printed circuit board). The output signals from these photodetectors can then be transferred to an evaluation unit, for example, on the main circuit board and via electrical contacts (EL).

[0046] Furthermore, one or more half-wave plates (lambda / 2) can be used along the path of the probe laser to influence its polarization, for example, so that equal laser intensities reach the balanced photodetectors. The semiconductor plate can be positioned at any possible location in the beam path, such as between the laser diode and the polarizing beam splitter, or, for example, directly outside the probe laser diode Pr.

[0047] Any linearly polarized pump laser beam can be converted into circularly polarized light, for example by means of a lambda / 4 plate, which can be positioned at any point between the pump laser Pu and the vapor cell DZ. After the Fig. 2. Three such quarter plates can be used, with each of these plates being positioned at the bottom of the magnetic shield MS and the pump laser opening Pu-O.

[0048] The half-wave plate L / 2, the polarizing beam splitter, reflection prisms RP and beam splitter can be enclosed by one or more ceramic holders, which can be arranged on the inner sides IS.

[0049] In the Fig. Figure 2 also shows in particular how the pump beam PuS can be guided via reflection prisms RP (as deflection elements SUE). A circular polarizer ZP can be arranged on the measuring housing MG in front of the pump laser aperture Pu-O. The sample laser Pr and the pump laser Pu can each also have a temperature stabilization device (not explicitly shown).

[0050] A lambda / half plate L / 2 (half wavelength delay plate) can follow the probe laser Pr.

[0051] Fig. Figure 3 shows a schematic cross-sectional view of a nuclear magnetic resonance gyroscope from the Fig. 2 along a plane orthogonal to the cutting plane of the Fig. 2 through a measuring housing and below (or above) the cut measuring housing from the Fig. 2.

[0052] The view of Fig. Dimension 3 corresponds to approximately 1 / 3 of the housing depth when viewed from the top or bottom. At this height, only a measuring housing MG1 is shown in cross-section. The concentric shielding layers ASL of the magnetic shield MS are also visible, through which the probe beam Pr-S can pass laterally. Inside the magnetic shield MS, the steam cell holder DZH, possibly cylindrical, can be arranged with the steam cell DZ inside it and can be illuminated laterally by the probe laser and from below by the pump laser. Coils of the magnetic field generation unit MF can be arranged on the outside of the steam cell holder DZH.After passing through the vapor cell DZ and the measuring housing MG1, the sample laser beam Pr-S can strike the (first) sample laser detector PD1 and be split there by a beam splitter and polarizer (e.g., as a polarizing beam splitter PST) and directed along different paths and with different polarizations to two adjacent balanced detectors (photodetectors) PD1. The deflected partial beam can travel via a reflection prism RP to the second photodetector.

[0053] Fig. Figure 4 shows a schematic interior view of the housing with the beam paths of the two lasers according to an embodiment of the present invention.

[0054] The Fig. Figure 4 shows the beam paths with the corresponding and exemplary deflections of the pump laser beam Pu-S and the sample laser beam Pr-S by corresponding deflection elements SUE and SUE-2. It can be seen that, depending on the requirements, some of the deflection elements can also partially transmit the associated laser beam in the incident direction to create two paths.

[0055] Fig. 5a shows a cross-sectional view through one of the measuring housings of the Fig. 1, Fig. 2, Fig. 3 to Fig. 4 with the steam cell inside.

[0056] The measuring housing, for example the first measuring housing MG1, can comprise an outer shell and several concentric inner shells as shielding layers ASL, for example in cylindrical symmetry. Fig. Figure 5a shows a lateral section, approximately through the center of the measuring housing MG1. The steam cell holder DZH with the steam cell DZ inside can be fitted into the inner shielding layer ASL, with the magnetic field coils of the magnetic field generation device MF still running along the outer edge of the steam cell holder DZH. Through the measuring housing MG1, and thus also through the shielding layers, which can be spaced at a defined distance from each other, transmission channels or openings for the sample laser beam and the pump laser beam PuS can extend through the associated pump laser openings Pu-O and sample laser openings Pr-O, advantageously to the steam cell (holder) and back away from it to the exit point.

[0057] The MS magnetic shield can reduce or prevent the influence of an external magnetic field on the evaluation signal (sensor signal) of the associated measuring device.

[0058] The cylindrical symmetry of the magnetic shield allows for optimal integration of the measuring magnetic field device. The magnetic shield MS can be made of a metal (for example, mu-metal), which can exhibit high magnetic susceptibility to the magnetic field (such as the Earth's magnetic field).

[0059] The shielding layers ASL, their thickness, and their spacing can be adapted to the expected magnetic fields and environmental conditions (for example, if a magnetic field source is located next to the sensor (e.g., actuator, motor, etc.), stronger shielding may be required). Four or more shielding layers ASL can be present and held in position and distance by means of plastic spacers (not shown). Channels (perforations) can be incorporated into the magnetic shield to allow the two lasers to penetrate it. In one of the measuring devices, the pump beam can extend through the housing and the shielding layers and be captured and detected by a stabilization detector. The measuring housings can generally be mounted on the inner walls.

[0060] Fig. Figure 5b shows a representation of a measuring magnetic field device for a steam cell according to an embodiment of the present invention.

[0061] The Fig. Figure 5b shows a measuring magnetic field device with a first magnet generating component KE1, with which a first magnetic field component with field lines parallel to the respective sample laser beam can be generated, and a second and third magnet generating component KE2 and KE3, with which a second and third magnetic field component, respectively, with field lines in a direction perpendicular to the respective sample laser beam can be generated. A spiral coil can be used as the first magnet generating component KE1, and Helmholtz coil arrangements can be used as the second and third magnet generating components KE2 and KE3, respectively, which can be arranged on the outside of the steam cell holder. The magnetic field components can be positioned at a predetermined distance from each other and enclose a cylindrical shape.

[0062] Each of the steam cells can have its own such measuring magnetic field device.

[0063] One magnetic field component can run parallel to the pump laser beam, and two further components can run perpendicular to it. At least one of the Helmholtz coil arrangements can be mounted or formed on a substrate, such as polyimide, and wound around the vapor cell holder. The coils can be positioned in such a way that they do not extend into the laser beams.

[0064] Fig. Figure 5c shows a steam cell holder for a steam cell according to an embodiment of the present invention.

[0065] For each measuring device, the steam cell holder DZH can, for example, be cylindrical (and made of ceramic, as a thermal insulator to insulate the steam cell from heat) and comprise two halves. In the center, a recess DZH-O3 for the steam cell DZ can be inserted at a 45° angle onto a first single-beam channel DZH-O1 and a second single-beam channel DZH-O2, and can be enclosed and held by joining the two halves. The recess DZH-O3 for the steam cell, as well as the first single-beam channel DZH-O1 and the second single-beam channel DZH-O2, can each be formed halfway in the first and second halves of the steam cell holder (body), and when the two halves of the steam cell holder (body) are joined, they form a respective laser channel or the steam cell recess.

[0066] After Fig. Figure 5c also shows the steam cell DZ itself, which, as a plate, can have a circular, cylindrical, or cubic recess A in its center for radiation transmission, and around this recess a round heating element HZ, for example as one or more rings, and a temperature sensor TS, also for example as a ring around the recess A. The plate can be rectangular, for example square. The noble gas and the alkali metal gas can be located in the recess A, advantageously covered from above and below by glass.

[0067] All three steam cells (for example, from the Fig. 2) can be constructed identically. Recess A can be filled with a noble gas (e.g., Xe, Ne, He, Kr, N₂...) and simultaneously with an alkali metal (e.g., Rb, Cs). Each of the steam cells must be heated to at least 100 °C to keep the alkali metal in a gaseous state. To achieve this, the heating element HZ and the temperature sensor TS can be embedded in or mounted on the upper or lower glass plate of steam cell DZ to monitor the temperature of the gases in recess A. The heating element HZ can be made of metal (e.g., copper, gold, platinum,...) and mounted on the glass. Due to the thermal insulation effect of the steam cell holder DZH, heat flow to the other components of the measuring housing can be reduced, thus lowering the heating power required for the steam cell. The steam cell holder DZH can be characterized by the fact that it does not disturb, or only minimally disturbs, the measuring magnetic field and static charges.

[0068] Fig. Figure 6a shows a cross-sectional view through a steam cell with the associated beam path of the pump laser beam and the sample laser beam.

[0069] The plate of the steam cell DZ is shown at an inclination of 45° to the pump laser beam Pu-S and the sample laser beam Pr-S, whereby both beams can pass through it orthogonally to each other.

[0070] Fig. Figure 6b shows a sectional view through a steam cell according to an embodiment of the present invention.

[0071] The vapor cell DZ can comprise a plate (such as a MEMS cell) comprising a glass-silicone-glass stack, advantageously with a silicone layer DZ-S (or a middle area made of silicone) and a glass layer or glass plate DZ-G on its top and bottom.

[0072] A central recess in the silicone DZ-S (not shown) allows the two laser beams Pu-S and Pr-S to pass through the vapor cell DZ. This central recess, which may be etched into the silicone, can contain an alkali metal (RB, Cs, K, or others), a noble gas (Xe, Ne, He, Kr), and a buffer gas, such as Ar or nitrogen.

[0073] Fig. Figure 7 shows a block diagram of process steps of the method for manufacturing a nuclear magnetic resonance gyroscope according to an embodiment of the present invention.

[0074] In the method for manufacturing a nuclear magnetic resonance gyroscope, a housing S1 is provided, which comprises at least three orthogonally arranged inner surfaces, and a pump laser and a sample laser are provided, which are arranged on one of the inner surfaces and electrically contacted; a first sample laser detector, a second sample laser detector and a third sample laser detector are provided S2, which are each arranged on one of the inner surfaces, and a first measuring device with a first measuring housing, a second measuring device with a second measuring housing and a third measuring device with a third measuring housing are provided.wherein each of the measuring devices further comprises: a pump laser aperture in the measuring housing for illuminating the respective measuring housing in a respective pump laser direction and a sample laser aperture in the measuring housing for illuminating the respective measuring housing in a respective sample laser direction, wherein the respective sample laser direction and pump laser direction for the same measuring device are orthogonal to each other, and wherein a first sample laser direction of the first measuring housing and a second sample laser direction of the second measuring housing and a third sample laser direction of the third measuring housing are each orthogonal to each other; a magnetic shield which is arranged in or on the measuring housing and wherein an interior of the measuring housing can be at least partially shielded from an external magnetic field; a measuring magnetic field device by means of which a predetermined measuring magnetic field can be generated; a steam cell,which is arranged in the interior of the measuring housing and in the measuring magnetic field and which comprises a noble gas and an alkali metal gas and is arranged in a predetermined orientation in the interior of the measuring housing and surrounded by the magnetic shield such that the noble gas and the alkali metal gas can be irradiated perpendicularly to each other by the pump laser and the sample laser, wherein the sample laser completely passes through the respective measuring housing, the vapor cell and the magnetic shield in the respective sample laser direction; wherein a plurality of optical beam deflection elements are arranged in the housing on the respective inner sides and / or on the respective measuring housing,with which a sample laser beam can be guided from the sample laser to the respective measuring housing and its sample laser opening, and which can then be irradiated in the respective sample laser direction, and on the respective side of the respective measuring housing facing away from the sample laser opening, the respective sample laser detector is arranged on the corresponding inner side to receive the respective sample laser beam during the course of a radiation exit of the respective measuring housing.

[0075] Although the present invention has been fully described above with reference to preferred embodiments, it is not limited thereto, but can be modified in many ways. QUOTES INCLUDED IN THE DESCRIPTION

[0000] This list of documents cited by the applicant was automatically generated and is included solely for the reader's convenience. The list is not part of the German patent or utility model application. The DPMA accepts no liability for any errors or omissions. Cited patent literature

[0000] EP 2 910 900 B1

[0003]

Claims

[1] Nuclear magnetic resonance gyroscope (10) comprising, - a housing (G) comprising at least three orthogonal inner surfaces (IS); - a pump laser (Pu) and a probe laser (Pr), which are arranged on one of the inner surfaces (IS) and electrically contacted; - a first sample laser detector (PD1), a second sample laser detector (PD2) and a third sample laser detector (PD3), each of which is arranged on one of the inner sides (IS); - a first measuring device (ME1) with a first measuring housing (MG1) and a second measuring device (ME2) with a second measuring housing (MG2) and a third measuring device (ME3) with a third measuring housing (MG3), each of the measuring devices (ME1) further comprising: - a pump laser opening (Pu-O) in the measuring housing for irradiating the respective measuring housing in a respective pump laser direction and a sample laser opening (Pr-O) in the measuring housing for irradiating the respective measuring housing in a respective sample laser direction, wherein the respective sample laser direction and pump laser direction for the same measuring device are orthogonal to each other, and wherein a first sample laser direction of the first measuring housing and a second sample laser direction of the second measuring housing and a third sample laser direction of the third measuring housing are each orthogonal to each other; - a magnetic shield (MS) which is arranged in or on the measuring housing and wherein an interior of the measuring housing can be at least partially shielded from an external magnetic field; - a measuring magnetic field device (MF) by means of which a predetermined measuring magnetic field can be generated; - a vapor cell (DC) which is arranged in the interior of the measuring housing and in the measuring magnetic field and which comprises a noble gas and an alkali metal gas and is arranged in a predetermined orientation in the interior of the measuring housing and surrounded by the magnetic shield (MS) such that the noble gas and the alkali metal gas can be penetrated by the pump laser (Pu) and the sample laser (Pr) perpendicular to each other, wherein the sample laser (Pr) and / or the pump laser (Pu) passes through the respective measuring housing, the vapor cell (DC) and the magnetic shield (MS) in the respective sample laser direction and / or pump laser direction;wherein a plurality of optical beam deflection elements (SUE) are arranged in the housing (G) on the respective inner sides (IS) and / or on the respective measuring housing, with which a sample laser beam can be guided from the sample laser to the respective measuring housing and its sample laser opening (Pr-O) and this can then be irradiated in the respective sample laser direction and on the respective side of the respective measuring housing facing away from the sample laser opening (Pr-O) in the course of a radiation exit of the sample laser beam from the respective measuring housing the respective sample laser detector is arranged on the associated inner side (IS) for receiving the respective sample laser beam. [2] Nuclear magnetic resonance gyroscope (10) according to claim 1, in which a plurality of further optical beam deflection elements (SUE-2) are arranged in the housing (G) on the respective inner sides (IS) and / or on the respective measuring housing, with which a pump laser beam can be guided from the pump laser to the respective measuring housing and its pump laser opening (Pu-O) and this can then be irradiated in the respective pump laser direction. [3] Nuclear magnetic resonance gyroscope (10) according to claim 1 or 2, wherein the first sample laser direction and the second sample laser direction and the third sample laser direction run along provided measuring directions. [4] Nuclear magnetic resonance gyroscope (10) according to one of claims 1 to 3, wherein the magnetic shield (MS) comprises a plurality of shielding layers (ASL) arranged concentrically around the vapor cell (DZ). [5] Nuclear magnetic resonance gyroscope (10) according to one of claims 1 to 4, wherein the housing (G) comprises a ceramic housing with six inner surfaces (IS) on which the pump laser (Pu) and sample laser (Pr) as well as the optical beam deflection elements (SUE, SUE-2) and the sample laser detectors are arranged and electrically contacted in certain areas. [6] Nuclear magnetic resonance gyroscope (10) according to any one of claims 1 to 5, wherein the optical beam deflection elements (SUE, SUE-2) comprise deflection prisms, polarization plates and / or filters. [7] Nuclear magnetic resonance gyroscope (10) according to one of claims 1 to 6, in which the sample laser detectors each comprise two parallel balanced photodetectors and a polarizing beam splitter, with which the respective incident sample laser beam can be divided and radiated in different partial beams onto the balanced photodetectors. [8] Nuclear magnetic resonance gyroscope (10) according to one of claims 1 to 7, which comprises a vapor cell holder (DZH) for each measuring device, in which the respective vapor cell (DZ) can be inserted and held at a 45° angle to the respective probe laser beam and pump laser beam within the magnetic shield (MS). [9] Nuclear magnetic resonance gyroscope (10) according to one of claims 1 to 8, wherein the measuring magnetic field device (MF) comprises a first magnet generating component (KE1) with which a first magnetic field component with field lines parallel to the respective sample laser beam can be generated, and a second and third magnet generating component (KE2, KE3) with which a second and third magnetic field component with field lines in a direction perpendicular to the respective sample laser beam can be generated. [10] Nuclear magnetic resonance gyroscope (10) according to claim 9, insofar as it relates back to claim 8, wherein the measuring magnetic field device (MF) comprises a spiral coil as the first magnet generating component (KE1) and a Helmholtz coil arrangement as the second and third magnet generating component (KE2, KE3) respectively, which are arranged on an outer side of the steam cell holder (DZH). [11] Nuclear magnetic resonance gyroscope (10) according to one of claims 1 to 10, wherein the vapor cell (DC) comprises a plate comprising a glass-silicone-glass stack, wherein in a central region of the silicone component a recess is formed in the silicone between two glass plates and the noble gas and the alkali metal gas are enclosed in this recess. [12] Method for manufacturing a nuclear magnetic resonance gyroscope (10) comprising the steps: - Providing (S1) a housing (G) comprising at least three orthogonally arranged inner surfaces (IS) and providing a pump laser (Pu) and a probe laser (Pr) which are arranged on one of the inner surfaces (IS) and electrically contacted; - Providing (S2) a first sample laser detector (PD1), a second sample laser detector (PD2) and a third sample laser detector (PD3), each of which is arranged on one of the inner surfaces (IS), and providing a first measuring device (ME1) with a first measuring housing (MG1) and a second measuring device (ME2) with a second measuring housing (MG2) and a third measuring device (ME3) with a third measuring housing (MG3), each of the measuring devices (ME1) further comprising: - a pump laser opening (Pu-O) in the measuring housing for irradiating the respective measuring housing in a respective pump laser direction and a sample laser opening (Pr-O) in the measuring housing for irradiating the respective measuring housing in a respective sample laser direction, wherein the respective sample laser direction and pump laser direction for the same measuring device are orthogonal to each other, and wherein a first sample laser direction of the first measuring housing and a second sample laser direction of the second measuring housing and a third sample laser direction of the third measuring housing are each orthogonal to each other; - a magnetic shield (MS) which is arranged in or on the measuring housing and wherein an interior of the measuring housing can be at least partially shielded from an external magnetic field; - a measuring magnetic field device (MF) by means of which a predetermined measuring magnetic field can be generated; - a vapor cell (DC) which is arranged in the interior of the measuring housing and in the measuring magnetic field and which comprises a noble gas and an alkali metal gas and is arranged in a predetermined orientation in the interior of the measuring housing and surrounded by the magnetic shield (MS) such that the noble gas and the alkali metal gas can be penetrated by the pump laser (Pu) and the sample laser (Pr) perpendicular to each other, wherein the sample laser (Pr) and / or the pump laser (Pu) passes through the respective measuring housing, the vapor cell (DC) and the magnetic shield (MS) in the respective sample laser direction and / or pump laser direction;wherein a plurality of optical beam deflection elements (SUE) are arranged in the housing (G) on the respective inner sides (IS) and / or on the respective measuring housing, with which a sample laser beam can be guided from the sample laser to the respective measuring housing and its sample laser opening (Pr-O) and this can then be irradiated in the respective sample laser direction and on the respective side of the respective measuring housing facing away from the sample laser opening (Pr-O) in the course of a radiation exit of the sample laser beam from the respective measuring housing the respective sample laser detector is arranged on the associated inner side (IS) for receiving the respective sample laser beam.

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