Optical element with a coating, semiconductor technology system and method for manufacturing an optical element

Abstract

The invention relates to an optical element (1) comprising: a substrate (2), and a coating (3) that is partially reflective or antireflective for radiation (4), preferably for radiation in the UV or VIS wavelength range, wherein the coating (3) comprises a plurality of first layers (6) and second layers (7), wherein the first layers (6) comprise a first, preferably fluoride or oxide, material, and the second layers (7) comprise a second, preferably fluoride or oxide, material whose refractive index (n2) for the radiation (4) differs from the refractive index (n1) of the first material for the radiation (4). The coating (3) comprises at least one layer group (8) for reflectivity adjustment, which includes a third layer (9) made of a third material that is not identical to the first and second materials.The invention also relates to an optical arrangement, preferably a laser or a semiconductor technology system, comprising: at least one optical element (1) designed as described above, and a method for manufacturing an optical element (1).

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