Rotation rate sensor with a substrate and a double rotor and method for operating a rotation rate sensor with a substrate and a double rotor

Abstract

A rotation rate sensor and a method for operating a rotation rate sensor with a substrate and a double rotor are proposed, wherein the substrate has a principal extension plane with an X-direction and a Y-direction perpendicular to it, wherein the double rotor has a first rotor and a second rotor, each elastically connected to the substrate via a suspension by means of one of the first spring elements and elastically connected to each other such that the two rotors can be excited to antiphase rotational oscillations, wherein the axes of rotation of the rotors each run parallel to a Z-direction perpendicular to the principal extension plane of the substrate, wherein the first rotor is elastically connected to a first seismic mass and a second seismic mass, and wherein the second rotor is elastically connected to a third seismic mass and a fourth seismic mass.wherein the first seismic mass is connected to the third seismic mass via a first rocker element by means of one of the fourth spring elements, wherein the second seismic mass is connected to the fourth seismic mass via a second rocker element by means of another of the fourth spring elements, wherein each of the first spring elements has a first spring constant in the Y-direction, and wherein each of the fourth spring elements has a fourth spring constant in the Y-direction.

Description

State of the art

[0001] The invention relates to a gyroscope with a substrate and a double rotor according to the preamble of claim 1.

[0002] Such rotation rate sensors with a substrate and a double rotor are generally known.

[0003] For example, a three-axis angular rate sensor with a substrate and a double rotor is known from the publication DE 10 2021 200 483 A1, wherein the double rotor has a first and second rotor which are elastically connected to each other via a first coupling element in such a way that the two rotors can be excited to antiphase rotational vibrations.

[0004] A disadvantage of this type of gyroscope is that the drive movement (out-of-phase rotational oscillations) of the two rotors (due to the coupling of the first and third seismic masses via the first rocker element and the second and fourth seismic masses via the second rocker element) and the detection (in-plane detection mode) of a rotation rate applied in the Z-direction, combined with the topological design of the gyroscope and possible external vibrations, rotational and linear accelerations, generate an undesirable in-plane parallel mode to the in-plane detection mode. This superposition of the in-plane parallel mode and the in-plane detection mode results from the largely independent deflection of the rocker elements and, in conventional gyroscopes of this type, ensures that the excitation frequencies of these modes lie in approximately the same region of the frequency domain or spectrum.

[0005] This further leads to increased susceptibility of the gyroscope to interference from external vibrations, rotational and linear accelerations. Manufacturing imperfections then result, particularly during rotational acceleration around the Z-axis, in a particularly high susceptibility to interference in the frequency range of the drive and detection frequencies, generating faulty (in-plane) detection signals. Disclosure of the invention

[0006] Against this background, the task is to provide a rotation rate sensor with a substrate and a double rotor which, by virtue of its design, does not have the aforementioned disadvantages and ensures a significant frequency difference between the excitation frequency of the in-plane detection mode and the excitation frequency of the in-plane parallel mode in the frequency domain or spectrum.

[0007] The gyroscope according to the invention, comprising a substrate and a double rotor, offers the advantage over the prior art of reduced susceptibility to interference from external vibrations, rotational and linear accelerations, and ensures effective and efficient operation of the gyroscope. This is advantageously achieved by generating a large frequency difference, compared to the prior art, between the excitation frequency of the in-plane detection mode and the excitation frequency of the in-plane parallel mode in the frequency domain or spectrum. Furthermore, this is advantageously achieved due to a weaker coupling ratio between the first and second rotors with the substrate compared to the coupling ratio of the respective seismic masses (coupled to the respective rotors) and the first and second rocker elements.According to the invention, the ratio of the first spring constant in the Y-direction to the fourth spring constant in the Y-direction has a value less than 125, in particular less than 100, preferably less than 50, and preferably between 10 and 15. The smaller the ratio of the coupling in the Y-direction of the first and second rotors with the substrate compared to the coupling in the Y-direction of the respective seismic masses and the first and second rocker elements (and / or in particular compared to other couplings in the Y-direction between the components within the gyroscope), the greater the frequency difference between the excitation frequencies of the in-plane detection mode and the in-plane parallel mode in the frequency domain or spectrum. Furthermore, this also reduces the dependence or influence of the in-plane detection mode and the in-plane parallel mode on each other (and accordingly also the dependence or influence of the in-plane detection mode on the in-plane parallel mode).The influence on the deflection of the first rocker element and the second rocker element relative to each other is increased. Due to the small ratio of the coupling in the Y-direction of the rotors with the substrate compared to the coupling in the Y-direction of the seismic masses with the rocker elements (and / or especially compared to the other couplings in the Y-direction between the components within the gyroscope), the rotors can execute a comparatively small (i.e., compared to other functional deflections within the gyroscope) but inventive deflection in the Y-direction within the in-plane parallel mode. Thus, a possible excitation or the excitation frequency of the in-plane parallel mode is shifted into the low-frequency range. Due to this shift of the excitation frequency of the in-plane parallel mode into the low-frequency range, a change occurs in the frequency domain.The larger frequency spacing between the excitation frequencies of the in-plane detection mode and the in-plane parallel mode is a key feature. In particular, this spacing has a width in the frequency domain or spectrum of more than 50 Hertz (state of the art). Furthermore, this results in a more pronounced deflection, especially in the deflection of the first and second rocker elements, within the in-plane detection mode and the in-plane parallel mode. This means that, on the one hand, these are excited with higher intensity, and on the other hand, as already mentioned above, a larger frequency spacing between their excitation frequencies is ensured. The frequency spacing in the excitation frequencies and the more pronounced deflection thus result in the gyroscope exhibiting greater robustness against external disturbances such as external vibrations, rotational and linear accelerations. Furthermore, the gyroscope is less susceptible to manufacturing-related, i.e.,Imperfections lying within manufacturing tolerances, which in particular break the symmetry of the topological arrangement of the gyroscope, are less susceptible to angular acceleration, especially in the Z direction.

[0008] Advantageous embodiments and further developments of the invention can be found in the dependent claims and the description with reference to the drawings.

[0009] According to an advantageous embodiment of the invention, it is provided that both the first seismic mass and the second seismic mass are connected to the first rotor and are arranged to be elastically deflected in the radial direction and substantially parallel to the main extension plane relative to the first rotor by means of one of the second spring elements, wherein both the third seismic mass and the fourth seismic mass are connected to the second rotor and are arranged to be elastically deflected in the radial direction and substantially parallel to the main extension plane relative to the second rotor by means of another of the second spring elements, wherein each of the second spring elements has a second spring constant in the Y-direction, wherein the ratio of the first spring constant in the Y-direction to the second spring constant in the Y-direction has a value of less than 3300, in particular less than 1500, preferably less than 500, preferably less than 200.This exhibits a characteristic that, compared to the prior art, the coupling in the Y-direction of the first and second rotors with the substrate is weaker or smaller than the coupling in the Y-direction between the rotors and the seismic masses in the radial direction. This results in a larger frequency separation of the excitation frequencies of the in-plane detection mode and the in-plane parallel mode within the frequency domain or spectrum. Within the in-plane parallel mode, this advantageously supports the small Y-direction displacement of the two rotors (compared to other functional displacements). The shift towards the lower frequency range of the excitation frequency of the in-plane parallel mode is thus advantageously supported, and the benefits of a larger frequency separation between the excitation frequencies, as well as the stronger expression of the in-plane detection mode and the in-plane parallel mode, are enhanced.Therefore, the robustness of the gyroscope is guaranteed.

[0010] According to an advantageous embodiment of the invention, it is provided that both the first seismic mass and the second seismic mass are connected to the first rotor and are arranged to be elastically deflected in a tangential direction and essentially parallel to the main extension plane by means of one of the third spring elements and one of the fifth spring elements, respectively, wherein, with respect to an axis of symmetry of the suspension of the first rotor in the Y-direction, one of the third spring elements is arranged in the negative X-direction and one of the fifth spring elements is arranged in the positive X-direction.wherein both the third seismic mass and the fourth seismic mass are connected to the second rotor and are arranged to be elastically deflected in the tangential direction and substantially parallel to the main extension plane by means of one of the third spring elements and one of the fifth spring elements respectively, wherein with respect to an axis of symmetry of the suspension of the second rotor in the Y-direction, one of the third spring elements is arranged in the positive X-direction and one of the fifth spring elements is arranged in the negative X-direction, wherein each of the third spring elements has a third spring constant in the Y-direction, and wherein each of the fifth spring elements has a fifth spring constant in the Y-direction.wherein the ratio of the first spring constant in the Y-direction to the third spring constant in the Y-direction and the ratio of the first spring constant in the Y-direction to the fifth spring constant in the Y-direction has a value less than 6600, in particular less than 3000, preferably less than 1500, preferably less than 600. Due to a weaker relationship or a smaller ratio of the coupling in the Y-direction of the first and second rotors with the substrate compared to the coupling in the Y-direction of the rotors and the respective seismic masses, the larger frequency difference of the excitation frequencies of the in-plane detection mode and the in-plane parallel mode in the frequency domain or spectrum, i.e., the shift of the excitation frequency of the in-plane parallel mode into the lower frequency range,This is advantageously facilitated. Furthermore, the small deflection of the two rotors in the Y-direction (compared to other functional deflections within the gyroscope) as well as the stronger expression of the in-plane detection mode and the in-plane parallel mode are also advantageously supported as a result.

[0011] According to an advantageous embodiment of the invention, it is provided that each of the first spring elements comprises a partial spring element and a further partial spring element, wherein with respect to the axis of symmetry of the respective suspension of the first rotor and the second rotor in the X-direction and with respect to the respective first spring element -- the corresponding partial spring element is arranged in the positive Y direction between the suspension of the respective rotor and the respective rotor and -- the corresponding additional spring element is arranged in the negative Y-direction between the suspension of the respective rotor and the respective rotor itself. The symmetrical arrangement of the spring element and the additional spring element (in the positive Y-direction between the suspension of the respective rotor and the respective rotor, and in the negative Y-direction between the suspension of the respective rotor and the respective rotor) advantageously promotes a larger frequency spacing of the excitation frequencies in the frequency domain or spectrum and a stronger expression of the in-plane detection modes and the in-plane parallel modes. Therefore, increased robustness against external disturbances, such as external vibrations, rotational and linear accelerations, can be advantageously achieved.Furthermore, due to the symmetrical arrangement of the partial spring element and the other partial spring element, the small deflection of the rotors in the Y-direction (compared to other functional deflections within the gyroscope) can be advantageously supported within the framework of the in-plane parallel mode (and the associated shift of the excitation frequency of the in-plane parallel mode into the low-frequency range).

[0012] According to an advantageous embodiment of the invention, the fourth spring elements are designed as a cross spring and / or as a meandering cross spring, wherein the cross spring and / or the meandering cross spring is designed such that they each have or consist of substantially straight beam elements, wherein the length and width of the beam elements are variably designed, wherein in particular the cross spring is designed such that it has or consists of beam elements running parallel between its connection to one of the rocker elements and its connection to one of the seismic masses, connected at their connection ends and arranged substantially crosswise with respect to one axis and another axis, wherein in particular preferably the distance between the parallel beam elements is variably designed.Due to the design of the fourth spring element as a cross spring and / or meandering cross spring, in-plane bending and gravitational movements within a drive mode of the yaw rate sensor can be advantageously supported, and compliance and transmission of a movement in the Y direction with respect to the in-plane parallel mode and in-plane detection mode can be ensured. Furthermore, this design of the fourth spring element also allows for the effective and efficient facilitation of symmetrical and antisymmetrical out-of-plane detection modes (such as those generated when a yaw rate is applied in the X or Y direction).

[0013] According to an advantageous embodiment of the invention, the first rotor and the second rotor are elastically connected to each other by means of a sixth spring element, wherein the sixth spring element is in particular designed as a phi spring or double phi spring. This advantageously ensures effective and efficient operation of the gyroscope.

[0014] According to an advantageous embodiment of the invention, the first rocker element and / or the second rocker element are elastically connected to the substrate by means of seventh spring elements, wherein the seventh spring elements are in particular designed as torsion springs. This advantageously ensures effective and efficient operation of the gyroscope.

[0015] According to an advantageous embodiment of the invention, the first spring elements are designed as simple T-relief elements and / or as double-sided T-relief elements. This advantageously ensures effective and efficient operation of the gyroscope.

[0016] According to an advantageous embodiment of the invention, the third and / or fifth spring elements are designed as simple beam springs and / or U-springs and / or meandering U-springs. This advantageously ensures effective and efficient operation of the gyroscope.

[0017] According to an advantageous embodiment of the invention, the first and second rocker elements each have first detection electrodes, in particular in-plane detection electrodes, the seismic masses each have second detection electrodes, in particular in-plane and out-of-plane detection electrodes, and the first and second rotors each have third detection electrodes. This advantageously ensures effective and efficient operation of the gyroscope.

[0018] A further object of the invention is a method for operating the rotation rate sensor according to the invention, wherein the antiphase rotational oscillation is controlled via at least one ASIC, wherein at least one voltage required for this purpose is provided, wherein at least one applied rotation rate is detected by reading the detection electrodes, wherein a rotation rate signal for an applied rotation rate about the Z-direction is calculated from the difference of a sum signal of the in-plane detection electrodes to the first and second seismic masses and a sum signal of the in-plane detection electrodes to the third and fourth seismic masses, wherein a rotation rate signal for an applied rotation rate about the Y-direction is calculated from the difference of a sum signal of the out-of-plane detection electrodes to the first and second seismic masses and a sum signal of the out-of-plane detection electrodes to the third and fourth seismic masses.wherein a rotation rate signal for an applied rotation rate around the X-direction is calculated from a difference signal of the third detection electrodes to the first and second rotors.

[0019] According to an advantageous embodiment of the invention, it is provided that the detection electrodes are read out capacitively and / or piezo-resistively and / or piezo-electrically and / or magnetically and / or optically.

[0020] The advantages and features described in connection with the embodiments of the inventive gyroscope with a substrate and a double rotor can be applied to the method for operating the gyroscope with a substrate and a double rotor.

[0021] Exemplary embodiments of the present invention are shown in the drawings and explained in more detail in the following description. Brief description of the drawings: Fig. Figure 1 shows a schematic representation of a rotation rate sensor with a substrate and a double rotor according to the state of the art. Fig. Figure 2 shows a schematic representation of a drive movement or drive mode of the gyroscope according to the state of the art. Fig. Figure 3 shows a schematic representation of an in-plane detection mode of the gyroscope according to the state of the art. Fig. Figure 4 shows a schematic representation of an in-plane parallel mode of the gyroscope according to the state of the art. Fig. Figure 5 shows a schematic representation of a gyroscope with a substrate and a double rotor according to an exemplary embodiment of the present invention. Fig. Figure 6 shows a schematic representation of an in-plane parallel mode of the gyroscope according to the exemplary embodiment of the present invention.

[0022] In Fig. Figure 7 shows various embodiments of spring elements according to the invention.

[0023] In Fig. Figures 8a to d show a cross spring according to an exemplary embodiment as part of the present invention in various load forms. Embodiments of the invention:

[0024] In the Fig. Figures 1 to 4 schematically illustrate a gyroscope with a substrate and a double rotor according to the prior art, for the purpose of explaining a sensor arrangement according to the invention. The substrate (not shown) has a principal plane of extension with an X-direction and a Y-direction perpendicular to it. The following describes how individual components of the gyroscope according to the prior art are connected to one another by means of various spring elements or coupling structures.In detail, a distinction is made between first spring elements, each with a first spring constant k1; second spring elements, each with a second spring constant k2; third spring elements, each with a third spring constant k3; fourth spring elements, each with a fourth spring constant k4; fifth spring elements, each with a fifth spring constant k5; a sixth spring element with a spring constant k6; and seventh spring elements, each with a seventh spring constant k7. The respective spring constants in the Y-direction are particularly important here. For clarity (and due to the symmetrical topological arrangement of the angular rate sensor), the reference symbols for the spring constants are only given for the right-hand side.

[0025] In the prior art, a ratio of the first spring constant k1 in the Y-direction to the fourth spring constant k4 in the Y-direction of 125 or greater is used. Furthermore, a ratio of the first spring constant k1 in the Y-direction to the second spring constant k2 in the Y-direction of 3300 or greater is proposed in the prior art. Additionally, ratios of the first spring constant k1 in the Y-direction to the third spring constant k3 in the Y-direction and to the fifth spring constant k5 in the Y-direction of 6600 or greater are specified. The basic element of the gyroscope according to the prior art is formed by the counter-phase oscillating double rotor.The two rotors m1, m1' are each elastically connected to the substrate (not shown) via a suspension a1 by means of one of the first spring elements and are elastically connected to each other by means of the sixth spring element in such a way that the two rotors m1, m1' can be excited to antiphase rotational oscillations. The axes of rotation of the rotors m1, m1' each run parallel to a Z-direction perpendicular to the main extension plane of the substrate.

[0026] Within the first rotor m1, a first seismic mass m2 and a second seismic mass m2' are separated and each elastically connected to the first rotor m1. Specifically, both the first seismic mass m2 and the second seismic mass m2' are attached to the first rotor m1 and arranged to be elastically deflected in a radial direction and essentially parallel to the main plane of extension relative to the first rotor m1 by means of one of the second spring elements. Furthermore, both the first seismic mass m2 and the second seismic mass m2' are arranged to be elastically deflected in a tangential direction (and also essentially parallel to the main plane of extension) relative to the first rotor m1 by means of one of the third spring elements and one of the fifth spring elements, respectively.With respect to a symmetry axis of the suspension a1 of the first rotor m1 in the Y-direction, one of the third spring elements is arranged in the negative X-direction and one of the fifth spring elements is arranged in the positive X-direction. Furthermore, a third seismic mass m2'' and a fourth seismic mass m2 are located in the second rotor m1'. 5The third seismic mass m2'' and the fourth seismic mass m2''' are each elastically connected to the second rotor m1'. In detail, both the third seismic mass m2''' and the fourth seismic mass m2''' are connected to the second rotor m1' and are arranged to be elastically deflected in the radial direction and essentially parallel to the main plane of extension relative to the second rotor m1' by means of a different second spring element. Furthermore, both the third seismic mass m2''' and the fourth seismic mass m2''' are arranged to be elastically deflected in the tangential direction (and also essentially parallel to the main plane of extension) on the second rotor m1' by means of a different third spring element and a different fifth spring element, respectively.With respect to a symmetry axis of the suspension a1 of the second rotor m1' in the Y direction, one of the third spring elements is arranged in the positive X direction and one of the fifth spring elements is arranged in the negative X direction.

[0027] The first seismic mass m2 is connected to the third seismic mass m2'' via a first rocker element m3, each by means of one of the fourth spring elements, such that when the first seismic mass m2 is radially displaced, the third seismic mass m2'' is deflected in a direction opposite to the radial displacement of the first mass m2. Furthermore, the second seismic mass m2' is connected to the fourth seismic mass m2''' via a second rocker element m3', each by means of another of the fourth spring elements, such that when the second seismic mass m2' is radially displaced, the fourth seismic mass m2''' is deflected in a direction opposite to the radial displacement of the second seismic mass m2'. Finally, the first rocker element m3 and the second rocker element m3' are each elastically connected to the (not shown) substrate via a suspension a2 by means of one of the seventh spring elements.Due to this arrangement, the first and second rocker elements m3, m3' can be deflected and excited largely independently of each other. This results in excitation frequencies of an in-plane detection mode and an (undesired) in-plane parallel mode being located in approximately the same region of the frequency domain or spectrum (also due to the topological structure of the gyroscope). Furthermore, this leads to increased susceptibility of the gyroscope to disturbances caused by external vibrations, rotational and linear accelerations, especially rotational acceleration around the Z-axis. In particular, manufacturing-related imperfections, i.e., those within manufacturing tolerances, which especially break the symmetry of the topological arrangement with regard to manufacturing-related edge loss gradients, lead to a comparatively high susceptibility to errors in in-plane detection.within in-plane detection signals. The state-of-the-art gyroscope can therefore be affected by manufacturing-related imperfections, such as a manufacturing-related edge loss gradient(s), during rotational accelerations, particularly around the Z-axis, in the frequency range of the drive and detection frequencies. Furthermore, the first and second rocker elements m3, m3' each have first detection electrodes e1, in particular in-plane detection electrodes. The seismic masses m2, m2', m2'', m2''' each have second detection electrodes, in particular in-plane and out-of-plane detection electrodes e2, and the first and second rotors m1, m1' each have third detection electrodes e3. For clarity, these detection electrodes are shown here only for the left side of the double rotor.

[0028] In Fig. Figure 2 shows the drive movement of the rotors m1, m1' of the double rotor. As indicated by the arrows, the rotors are set into out-of-phase rotational oscillations by a drive (not shown) during operation of the gyroscope. The first rotor m1 (shown on the left) rotates clockwise, and the second rotor m1' (shown on the right) rotates counterclockwise. Furthermore, it is shown that the first and second rocker elements m3, m3' essentially do not undergo any (detection) deflection due to the drive movement.

[0029] Fig. Figure 3 shows an in-plane detection motion or in-plane detection mode with an applied rotation rate in the Z-direction. As indicated by the arrows, the seismic masses m2, m2', m2'', m2''' are deflected due to the effect of the Coriolis force (with an applied rotation rate in the Z-direction). In detail, the first seismic mass m2 and the second seismic mass m2' are displaced radially relative to the first rotor m1 towards its center (i.e., essentially moved along the Y-direction towards the center of the first rotor m1) due to the resulting Coriolis force. The third seismic mass m2'' and the fourth seismic mass m2''' are (due to the resulting Coriolis force) displaced or deflected in a radial direction relative to the second rotor m1' away from the center of the second rotor m1' (i.e., essentially moved away along the Y-direction from the center of the second rotor m1').The first and second rocker elements m3, m3' also experience a deflection as a result, supporting or promoting the opposing deflections of the seismic masses m2, m2', m2'', m2'''. Specifically, the first rocker element m3 experiences a deflection or rotation about an axis of symmetry of its suspension a2 in the Z-direction, and the second rocker element m3' experiences an opposing deflection or rotation about an axis of symmetry of its suspension a2 in the Z-direction.

[0030] Fig. Figure 4 shows an in-plane parallel mode, particularly due to an acting rotational or linear acceleration and / or external vibrations. In contrast to the deflections in Fig. 3. Here, the seismic masses m2, m2', m2'', m2''' are deflected, as indicated by the arrows, primarily due to the effects of rotational and linear acceleration and / or external vibrations. Specifically, the first seismic mass m2 and the second seismic mass m2' are deflected primarily along the Y-direction in a negative direction, while the third seismic mass m2'' and the fourth seismic mass m2''' are deflected primarily along the Y-direction in a positive direction. This deflection of the seismic masses m2, m2', m2'', m2''' results in a deflection or rotation of the first and second rocker elements m3 and m3' about their respective axes of symmetry in the Z-direction of the suspension a2. This contrasts with the deflections or rotations of the rocker elements m3 and m3' in... Fig. 3. These deflect or rotate in the same direction. This results in erroneous in-plane detection signals being generated, particularly in the case of manufacturing imperfections.

[0031] Fig. Figure 5 shows a gyroscope with a double rotor and a substrate according to an embodiment of the present invention. The first, second, and fourth spring elements are schematically represented according to their different spring constants k1, k2, and k4, respectively, and coupling strengths, with respect to the prior art ( Fig. 1 to 4) in width in the X-direction. Due to a weaker relationship or a smaller ratio of the coupling or coupling strength of the first and second rotors m1, m1' with the substrate compared to the coupling or coupling strength of the respective (coupled to the respective rotor) seismic masses m2, m2', m2'', m2''' and the first and second rocker element m3, m3' and / or especially compared to other couplings or coupling strengths between the components within the gyroscope, it is advantageously possible to generate a significantly larger frequency difference between the excitation frequencies of the in-plane detection mode and the in-plane parallel mode in the frequency domain or spectrum.Furthermore, the deflection is more pronounced, particularly with respect to the first and second rocker elements m3 and m3', within the in-plane detection mode and the in-plane parallel mode. This results in both a more intense excitation of the in-plane detection mode and the in-plane parallel mode, and a significantly larger frequency separation between the excitation frequencies of the in-plane detection mode and the in-plane parallel mode (i.e., these modes essentially do not overlap). As a further advantage over the prior art, this leads to increased robustness against external disturbances such as external vibrations, rotational accelerations, and linear accelerations.Furthermore, imperfections such as those occurring within the scope of manufacturing tolerances, particularly those that break the symmetry of the topological arrangement of the angular rate sensor, such as manufacturing-related edge loss gradients, have a less pronounced effect on the detection of rotational accelerations, especially rotational accelerations about the Z-axis. The mode shapes (in-plane detection mode and in-plane parallel mode) and frequencies (excitation frequencies of the respective in-plane mode) thus change less significantly for the same edge loss gradient. The ratio according to the invention between the first spring constant k1 in the Y-direction and the fourth spring constant k4 in the Y-direction has a value less than 125, particularly less than 100, preferably less than 50, and preferably between 10 and 15. The smaller or weaker the ratio or the relationship of the coupling, the less pronounced the effect.The more precisely the coupling strength in the Y-direction of the first and second rotors m1, m1' with the substrate is designed, compared to the coupling or coupling strength in the Y-direction of the respective seismic masses m2, m2', m2'', m2''' and the first and second rocker elements m3, m3', and / or especially compared to other couplings or coupling strengths in the Y-direction between the components within the gyroscope, the greater the frequency difference between the excitation frequencies of the in-plane detection mode and the in-plane parallel mode in the frequency domain or spectrum. This is particularly evident from a relatively (i.e.,In comparison to the other couplings in the Y-direction between the individual components within the gyroscope, a weak coupling of the rotors m1, m1' with the substrate is realized via the respective suspension a1 in the Y-direction. This results in the rotors m1, m1' being able to perform a small or infinitesimal, but inventive, deflection in the Y-direction within the in-plane parallel mode, compared to other functional deflections within the arrangement of the gyroscope. This shifts the excitation frequency of the in-plane parallel mode into the low-frequency range. This is particularly preferably achieved by means of a coupling that is also weaker than in the prior art. Fig. 1 to 4) weak coupling in the Y-direction of the rotors m1, m1' with the substrate via the respective suspension a1 in the Y-direction and / or a compared to the prior art ( Fig. 1 to 4) strong coupling in the Y direction of the respective seismic masses m2, m2', m2'', m2''' and the first and second rocker elements m3, m3' is possible.

[0032] Preferably, the ratio of the first spring constant k1 in the Y-direction to the second spring constant k2 in the Y-direction has a value less than 3300, in particular less than 1500, more preferably less than 500, and more preferably less than 200. Furthermore, the ratio of the first spring constant k1 in the Y-direction to the third spring constant k3 in the Y-direction and the ratio of the first spring constant k1 in the Y-direction to the fifth spring constant k5 in the Y-direction preferably have a value less than 6600, in particular less than 3000, more preferably less than 1500, and more preferably less than 600. These values, which are smaller compared to the prior art, are therefore more advantageous.The weaker coupling in the Y-direction of the first and second rotors m1, m1' with the substrate, compared to the couplings in the Y-direction between the rotors m1, m1' and the seismic masses m2, m2', m2'', m2''' in the radial and tangential directions, advantageously support the small or infinitesimal displacements of the rotors m1, m1' in the Y-direction compared to the other functional displacements, and thus the shift of the excitation frequency of the in-plane parallel mode into the low-frequency range. Therefore, a significantly larger frequency difference between the excitation frequency of the in-plane detection mode and the excitation frequency of the in-plane parallel mode in the frequency domain or spectrum is also favored. Furthermore, the stronger displacements, especially of the first and second rocker elements m3, m3', within the framework of the in-plane detection mode and the in-plane parallel mode are also supported.Furthermore, in this embodiment, each of the first spring elements comprises a partial spring element and another partial spring element, wherein with respect to an axis of symmetry of the respective suspension a1 of the first rotor m1 and of the second rotor m1' in the X-direction and with respect to the respective first spring element. -- the corresponding partial spring element is arranged in the positive Y direction between the suspension a1 of the respective rotor m1, m1' and the respective rotor m1, m1' and -- the corresponding additional partial spring element is arranged in the negative Y-direction between the suspension a1 of the respective rotor m1, m1' and the respective rotor m1, m1'. This also promotes a particularly weak coupling of the rotors m1, m1' with the (not shown) substrate, especially compared to the prior art. Due to the symmetrical arrangement of the partial spring elements and the additional partial spring elements (in the positive Y-direction between the suspension a1 of the respective rotor m1, m1' and the respective rotor m1, m1' and in the negative direction between the suspension a1 of the respective rotor m1, m1' and the respective rotor m1, m1'), the deflections within the gyroscope are small compared to other functional deflections.Infinitesimal deflection of the rotors m1, m1' in the Y direction within the framework of the in-plane parallel mode (and the associated shift of the excitation frequency of the in-plane parallel mode into the low-frequency range) is advantageously supported.

[0033] Fig. Figure 6 shows a schematic representation of an in-plane parallel mode of the gyroscope according to an exemplary embodiment of the present invention. Such an in-plane parallel mode is generated in particular by the action of a rotational or linear acceleration and / or external vibrations. The difference from the prior art ( Fig. 4) consists in the fact that the first rotor m1 and the second rotor m1' are also deflected in the direction of deflection of the seismic masses m2, m2', m2'', m2''' (indicated by the comparatively small arrows) in particular due to the relatively weak coupling in the Y-direction with the substrate (i.e. compared to the other couplings between the individual components within the gyroscope) and / or a coupling that is less than the prior art ( Fig. 1 to 4) weak coupling in the Y direction with the substrate and / or a coupling that is superior to the state of the art ( Fig. 1 to 4) strong coupling in the Y-direction of the respective seismic masses m2, m2', m2'', m2''' and the first and second rocker elements m3, m3'. This displacement is small or infinitesimal compared to other functional displacements, but it allows the in-plane parallel mode to be shifted into the low-frequency range. This results in a significant or larger frequency difference between the excitation frequency of the in-plane parallel mode and the excitation frequency of the in-plane detection mode. Therefore, false signals during rotational accelerations, especially around the Z-axis, can be reduced by 15% to 50% in the drive frequency range and by 50% (i.e., by a factor of 2) in the detection frequency range.

[0034] In Fig. Figure 7 shows various embodiments of the respective spring elements according to the invention. These embodiments serve as guidelines and are not exhaustively shown or listed. Top left in Fig. Figure 7 shows a Phi spring 100. This consists of beam elements arranged in an O-shape (here, the O-shape is formed and shown by means of two relatively long and two relatively short beam elements). Below this, a double Phi spring 110 is shown. This is designed in the same way as the Phi spring 100 in certain sections, but the two individual O-shaped components are connected to each other centrally at one of the relatively long beam elements. Preferably, the sixth spring element is designed as a Phi spring 100 or a double Phi spring 110. (The last sentence appears to be incomplete and possibly refers to a different spring element.) Fig. Figure 7 shows a simple beam or torsion spring 120. This consists of a comparatively long beam element and is preferably used for the design of the third and / or fifth spring elements and / or seventh spring elements. Bottom left in Fig. Figure 7 shows a U-spring 130 and a meandering U-spring 140. The U-spring 130 consists of two relatively long beam elements, which are connected only at one end by a relatively short beam element. In this embodiment, the meandering U-spring 160 consists of three relatively long beam elements, with two of these beam elements also connected at one end. Preferably, the third and / or fifth spring elements can also be configured as U-springs 130 and / or meandering U-springs 140. (See figure above right.) Fig. Figure 7 shows a cross spring 150. This also consists of relatively long beam elements, which are connected to each other in a cross shape, i.e., at 90° angles or, using relatively small beam elements, at 360° angles. Bottom right in Fig. Figure 7 shows a meandering cross spring 160. It also consists of relatively long beam elements connected to each other at 90° angles or, using relatively small beam elements, at 180° or 360° angles. The beam elements are arranged in a meandering pattern, particularly along a vertical axis of symmetry of the meandering cross spring 160. Preferably, a cross spring 150 and / or a meandering cross spring 160 is used for the configuration of the fourth spring elements. The relatively long beam elements can, in turn, consist of partial beam elements. Furthermore, the first spring elements are configured as simple T-relief elements and / or as double-sided T-relief elements.

[0035] In Fig. Figures 8a to d show one of the fourth spring elements configured as a cross spring 150 in various load modes according to the present invention. Arrows indicate the different load modes, triggered by the different (load) modes that can occur in the gyroscope. The cross spring 150 is configured such that it has or consists of essentially straight beam elements.The length and width of the beam elements are variably configurable. The cross-spring 150 shown here is designed such that it has, or consists of, comparatively long beam elements running parallel between its connection 151 to one of the rocker elements m3, m3' and its connection 152 to one of the seismic masses m2, m2', m2'', m2'''. These beam elements are connected at their connection ends and are arranged in a substantially cross-like manner with respect to an axis 153 and another axis 154. These comparatively long beam elements are connected by comparatively short beam elements. In particular, the spacing of the parallel beam elements can be variably configured by means of the comparatively short beam elements. Fig. Figure 8a shows the load on the fourth spring element, or cross spring 150, during the symmetrical out-of-plane detection movement or mode. This involves a torsion about axis 153 (i.e., the Y-axis), indicated by the arrow. This torsion is adjustable and controllable via the leg spacing, as well as the width and length of the beam elements. Fig. Figure 8b illustrates the load during the antisymmetric out-of-plane detection movement or mode. In this mode, bending occurs around the further axis 154 (i.e., the X-axis). This bending can also be adjusted or controlled by means of the spacing, width, and length of the beam elements. Fig. Figure 8c shows a load within the framework of the in-plane detection mode and the in-plane parallel mode. The arrows indicate compliance and transmission of movement in the Y-direction. This compliance and transmission can be adjusted or controlled, in particular, by means of the width and length of the beam elements arranged horizontally or along the further axis 154 (i.e., in the X-direction). Fig.Figure 8d shows in-plane bending and shearing forces as they arise for the drive movement or drive mode of the gyroscope. The arrows also indicate the load on the cross spring 150 as a result of the drive movement. This allows for the adjustment and control of the effect of the drive movement or drive mode by means of the width and length of the beam elements arranged along axis 153 and the further axis 154 (i.e., in the Y and X directions). This design, particularly of the fourth spring element, advantageously supports both in-plane bending and shearing movements within the drive movement or drive mode of the gyroscope, as well as compliance and transmission of movements in the Y direction with respect to the in-plane detection mode and in-plane parallel mode.

[0036] The invention is not limited to the embodiments described above, but can instead be used for a wide variety of applications in inertial sensor-based navigation, orientation, and stabilization of objects. A processing unit within the sensor can control the operation of the inertial sensor (e.g., power-saving mode, measuring ranges), validate sensor signals and check them for tolerances (e.g., for internal sensor monitoring), process signals (e.g., calculate position or orientation, filter data), and select communication protocols. Various algorithms, including self-learning AI-based ones, can be used in the processing unit for evaluating and processing the data from the inertial sensors, temperature sensors, and external data (e.g., GPS data, odometer data). Exemplary application areas can be found in: -- Automotive applications (e.g. ESP, Roll Over Sensing, Airbag, Road Noise Suppression, Anti-Theft Alarm System, Parking Bump Detection, Road Condition Monitoring). -- in two-wheeled applications such as motorcycles, bicycles, scooters (e.g. in ESP / AirBag, tilt detection, balancing) -- in the case of three-wheeled vehicles such as tuk-tuks -- in the avionics field (e.g. in flight stabilization and flight control) -- in industrial robot applications (e.g. in position control of excavator buckets, drilling, image stabilization, flight control, alignment of satellite antennas, fine motor skills when gripping robots) -- in applications for home and garden (e.g. in navigation of lawnmowers, position monitoring of doors) -- in medical applications (e.g. fall detection, movement and posture tracking) -- in sports and leisure applications (e.g. motion detection, posture detection (in golf clubs, tennis rackets or skis) -- in numerous consumer applications, e.g., in smartphones, tablets, wearables, hearables, drones, gaming toys, AR or VR

[0037] Furthermore, numerous designs, changes, modifications, deviations, variations and embodiments are possible, all of which fall within the scope of the invention. QUOTES INCLUDED IN THE DESCRIPTION

[0000] This list of documents cited by the applicant was automatically generated and is included solely for the reader's convenience. The list is not part of the German patent or utility model application. The DPMA accepts no liability for any errors or omissions. Cited patent literature

[0000] DE 10 2021 200 483 A1

[0003]

Claims

[1] A gyroscope comprising a substrate and a double rotor, wherein the substrate has a principal extension plane with an X-direction and a Y-direction perpendicular to it, wherein the double rotor comprises a first rotor (m1) and a second rotor (m1'), each of which is elastically connected to the substrate via a suspension (a1) by means of one of the first spring elements and which is elastically connected to each other in such a way that the two rotors (m1, m1') can be excited to antiphase rotational oscillations, wherein the axes of rotation of the rotors (m1, m1') each extend parallel to a Z-direction perpendicular to the principal extension plane of the substrate, wherein the first rotor (m1) is elastically connected to a first seismic mass (m2) and a second seismic mass (m2') in such a way that these are each mounted to be deflectable in a radial direction relative to the first rotor (m1) and substantially parallel to the principal extension plane,wherein the second rotor (m1') is elastically connected to a third seismic mass (m2'') and a fourth seismic mass (m2''') such that these are each mounted to be deflected radially relative to the second rotor (m1') and substantially parallel to the main extension plane, wherein the first seismic mass (m2) is connected to the third seismic mass (m2'') via a first rocker element (m3) by means of one of the fourth spring elements such that the third seismic mass (m2'') is deflected in a direction opposite to the radial deflection of the first mass (m2) when the first seismic mass (m2) is deflected radially, wherein the second seismic mass (m2') is connected to the fourth seismic mass (m2''') via a second rocker element (m3') by means of another of the fourth spring elements such thatthat the fourth seismic mass (m2''') is deflected in a direction opposite to the radial deflection of the second seismic mass (m2') when the second seismic mass (m2') is deflected radially, wherein each of the first spring elements has a first spring constant (k1) in the Y-direction, and wherein each of the fourth spring elements has a fourth spring constant (k4) in the Y-direction, , characterized by , that the ratio of the first spring constant (k1) in the Y direction to the fourth spring constant (k4) in the Y direction has a value less than 125. [2] Rotation rate sensor according to claim 1, characterized by , that the ratio of the first spring constant (k1) in the Y direction to the fourth spring constant (k4) in the Y direction has a value less than 100, in particular less than 50. [3] Rotation rate sensor according to any one of the preceding claims, characterized by, that the ratio of the first spring constant (k1) in the Y direction to the fourth spring constant (k4) in the Y direction has a value between 10 and 15. [4] Rotation rate sensor according to any one of the preceding claims, characterized by , that both the first seismic mass (m2) and the second seismic mass (m2') are connected to the first rotor (m1) and are arranged to be elastically deflected in the radial direction and substantially parallel to the main extension plane relative to the first rotor (m1) by means of one of the second spring elements, wherein both the third seismic mass (m2'') and the fourth seismic mass (m2''') are connected to the second rotor (m1') and are arranged to be elastically deflected in the radial direction and substantially parallel to the main extension plane relative to the second rotor (m1') by means of another of the second spring elements, wherein each of the second spring elements has a second spring constant (k2) in the Y-direction, wherein the ratio of the first spring constant (k1) in the Y direction to the second spring constant (k2) in the Y direction has a value less than 3300, in particular less than 1500, preferably in particular less than 500, preferably in particular less than 200. [5] Rotation rate sensor according to any one of the preceding claims, characterized by , that both the first seismic mass (m2) and the second seismic mass (m2') are connected to the first rotor (m1) and are arranged to be elastically deflected in a tangential direction and essentially parallel to the main extension plane by means of one of third spring elements and one of fifth spring elements respectively, wherein with respect to an axis of symmetry of the suspension (a1) of the first rotor (m1) in the Y-direction, each of the third spring elements is arranged in the negative X-direction and each of the fifth spring elements is arranged in the positive X-direction, wherein both the third seismic mass (m2'') and the fourth seismic mass (m2''') are connected to the second rotor (m1') and are arranged to be elastically deflected in a tangential direction and essentially parallel to the main extension plane by means of a different third spring element and a different fifth spring element, wherein with respect to an axis of symmetry of the suspension (a1) of the second rotor (m1') in the Y-direction, one of the third spring elements is arranged in the positive X-direction and one of the fifth spring elements is arranged in the negative X-direction, each of the third spring elements having a third spring constant (k3) in the Y-direction, wherein each of the fifth spring elements has a fifth spring constant (k5) in the Y-direction, wherein the ratio of the first spring constant (k1) in the Y direction to the third spring constant (k3) in the Y direction and the ratio of the first spring constant (k1) in the Y direction to the fifth spring constant (k5) in the Y direction has a value less than 6600, in particular less than 3000, preferably in particular less than 1500, preferably in particular less than 600. [6] Rotation rate sensor according to any one of the preceding claims, characterized by, that each of the first spring elements comprises a partial spring element and a further partial spring element, wherein with respect to an axis of symmetry of the respective suspension (a1) of the first rotor (m1) and the second rotor (m1') in the X-direction and with respect to the respective first spring element -- the corresponding partial spring element is arranged in the positive Y direction between the suspension (a1) of the respective rotor (m1, m1') and the respective rotor (m1, m1') and -- the corresponding further partial spring element is arranged in the negative Y direction between the suspension (a1) of the respective rotor (m1, m1') and the respective rotor (m1, m1'). [7] Rotation rate sensor according to any one of the preceding claims, characterized by , that the fourth spring elements are designed as a cross spring (150) and / or as a meandering cross spring (160), wherein the cross-feather (150) and / or the meandering cross-feather (160) is designed such that these each have or consist of essentially straight beam elements, where the length and width of the beam elements can be varied, wherein in particular the cross spring (150) is designed such that it has or consists of beam elements running parallel between its connection (151) to one of the rocker elements (m3, m3') and its connection (152) to one of the seismic masses (m2, m2', m2'', m2''') at their connection ends and arranged in a substantially cross-like manner with respect to an axis (153) and a further axis (154), in particular, the spacing of the parallel beam elements can preferably be designed to be variable. [8] Rotation rate sensor according to any one of the preceding claims, characterized by, that the first rotor (m1) and the second rotor (m1') are elastically connected to each other by means of a sixth spring element, wherein the sixth spring element is in particular designed as a Phi spring (100) or double Phi spring (110). [9] Rotation rate sensor according to any one of the preceding claims, characterized by , that the first rocker element (m3) and / or the second rocker element (m3') are elastically connected to the substrate by means of seventh spring elements, wherein the seventh spring elements are in particular designed as torsion springs (120). [10] Rotation rate sensor according to any one of the preceding claims, characterized by that the first spring elements are designed as simple T-relief elements and / or as double-sided T-relief elements. [11] Rotation rate sensor according to any one of the preceding claims, characterized by , that the second spring elements are designed as a Phi spring (100) and / or double Phi spring (110). [12] Rotation rate sensor according to any one of the preceding claims, characterized by , that the third and / or fifth spring elements are designed as simple beam springs (120) and / or U-springs (130) and / or meandering U-springs (140). [13] Rotation rate sensor according to any one of the preceding claims, characterized by , that the first and second rocker element (m3. m3') each have first detection electrodes (e1), in particular in-plane detection electrodes, wherein the seismic masses (m2, m2', m2'', m2'''') each have second detection electrodes, in particular in-plane and out-of-plane detection electrodes (e2), wherein the first and second rotors (m1, m1') each have third detection electrodes (e3). [14] Method for operating a gyroscope according to any of the preceding claims, characterized by, that the antiphase rotational oscillation is controlled via at least one ASIC, wherein at least one required voltage is provided, wherein at least one applied rotation rate is detected by reading the detection electrodes, wherein a rotation rate signal for an applied rotation rate about the Z-direction is calculated from the difference of a sum signal of the in-plane detection electrodes to the first and second seismic masses (m2, m2') and a sum signal of the in-plane detection electrodes to the third and fourth seismic masses (m2'', m2'''), wherein a rotation rate signal for an applied rotation rate about the Y-direction is calculated from the difference of a sum signal of the out-of-plane detection electrodes (e2) to the first and second seismic masses (m2, m2') and a sum signal of the out-of-plane detection electrodes (e2) to the third and fourth seismic masses (m2'', m2''').wherein a rotation rate signal for an applied rotation rate around the X-direction is calculated from a difference signal of the third detection electrode (e3) to the first and second rotors (m1, m1'). [15] Method for operating a gyroscope according to claim 14, characterized by that the detection electrodes are read out capacitively and / or piezo-resistively and / or piezo-electrically and / or magnetically and / or optically.

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