Equipment and procedures for carrying out process steps with and / or on objects

Abstract

The invention relates to a system (1) and a method for carrying out process steps with and / or on objects at least partially under cleanroom conditions, wherein the system (1) comprises a cleanroom structure (10), the cleanroom structure (10) comprising a housing (20), an insertion device and an ejection device, wherein a main chamber (201) of the housing (20) is separated from an environment and the cleanroom condition can be fulfilled in the main chamber (201) of the housing (20) of the cleanroom structure, wherein the system (1) comprises several process chambers (14, 15, 16, 17), the process chambers (14, 15, 16, 17) each comprising an interior chamber (140, 150, 160, 170) and a device arranged in the interior chamber (140, 150, 160, 170) for carrying out a process step, wherein at least one interface (152, 162) is provided for the main room (201), with the chamber interior (140, 150, 160) being connected in a connected state.170) the respective chamber interior (140, 150, 160, 170) is connected to the main room (201) via at least one interface (152, 162) for the, in particular, direct, transfer of objects between the chamber interior (140, 150, 160, 170) and the main room (201), and wherein, at least in the connected state, the cleanroom condition of the main room (201) can be met in the respective chamber interior (140, 150, 160, 170).

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