OPTICAL COMPONENT, OPTICAL ELEMENT AND MANUFACTURING METHOD FOR AN OPTICAL COMPONENT
The transmissive optical element with a diffraction grating and lenses addresses the size issue of spectroscopic devices by providing a compact optical path, ensuring accurate spatial and spectral information transmission.
Patent Information
- Authority / Receiving Office
- DE · DE
- Patent Type
- Applications
- Current Assignee / Owner
- CANON KK
- Filing Date
- 2025-11-26
- Publication Date
- 2026-05-28
AI Technical Summary
Existing spectroscopic devices are large in size due to the need for a large optical path space, which is a challenge in miniaturization.
A transmissive optical element comprising a diffraction grating with grooves on one surface and convex lenses on the opposite surface, arranged in specific directions, allowing for compact optical path design.
Enables miniaturization of spectroscopic devices by eliminating the need for repeated reflections, ensuring accurate transmission of spatial and spectral information without noise interference.
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Abstract
Description
TECHNICAL AREA
[0001] The present invention relates to an optical component or optical part, an optical element and the like, which can be used in various fields such as astronomical observation and material analysis. BACKGROUND OF THE INVENTION
[0002] Up to now, in various fields such as astronomical observation and material analysis, a spectroscopic device has been used that scatters light for each wavelength, receives the light with a detector and measures its intensity.
[0003] JP 2022-96461 A proposes a plane spectroscopic device comprising a reflection unit that splits a luminous flux incident from one surface side of an object into a plurality of luminous fluxes and reflects the luminous fluxes to different positions, an imaging mirror, a spectroscopic element such as a diffraction grating, and a detection unit such as an optical sensor.
[0004] In the plane spectroscopic apparatus described in JP 2022-96461 A, incident light is split into a multitude of light streams using the reflection unit, and each of the split light streams is scattered, allowing two-dimensional spatial information and spectral information to be observed simultaneously. After the incident light has been split into a multitude of light streams by the reflection unit, the light is repeatedly reflected through the imaging mirror and the spectroscopic element and directed to the optical sensor.
[0005] However, it is necessary to ensure a large optical path space, and there is the problem that the plane spectroscopic apparatus tends to become larger overall.
[0006] Therefore, there is a need for an optical component or optical element that is useful for miniaturizing a spectroscopic device. INVENTION SUMMARY
[0007] According to a first embodiment of the present invention, an optical component made of a solid material that transmits light of a selected wavelength comprises a diffraction grating and a plurality of lenses. The diffraction grating includes a plurality of grooves extending in a second direction and arranged on a first optical surface onto which the light of the selected wavelength is incident. The plurality of lenses is arranged in the second direction and provided on a second optical surface from which the light of the selected wavelength, incident from the first optical surface, is emitted.
[0008] According to a second embodiment of the present invention, a manufacturing process for an optical component comprises a step of producing a base material from a solid material that transmits light of a used wavelength, a step of forming a plurality of grooves, a step of forming a plurality of lenses, and a step of forming a light-scattering section. The plurality of grooves is arranged longitudinally on a first surface of the base material. The plurality of lenses is arranged longitudinally on a second surface opposite the first surface of the base material.The light scattering section extends in a transverse direction of the base material and has a surface roughness that is higher than the surface roughness of the optical surface of the multitude of lenses at a boundary section between adjacent lenses among the multitude of lenses.
[0009] Features of the present invention will become apparent from the following description of exemplary embodiments with reference to the accompanying drawings. The following description of exemplary embodiments is for illustrative purposes only. BRIEF DESCRIPTION OF THE DRAWING Fig. Figure 1 shows a schematic view illustrating a configuration of a spectroscopic device in which an optical element is incorporated according to an exemplary embodiment. Fig. Figure 2A shows a schematic perspective view representing an optical functional section that implements an optical function in a transmissive optical element. Fig. Figure 2B shows a perspective view representing the shape of an optical component. Fig. Figure 3 shows a partially enlarged view to describe a first optical surface (incidence surface). Fig. Figure 4 shows a top view of a second optical surface (emission surface) from a direction in which a luminous flux is emitted. Fig. Figure 5 shows a schematic view illustrating an arrangement of light streams incident on a light-receiving surface of a light-receiving sensor. Fig. Figure 6A shows a schematic top view of the second optical surface (emission surface) of the optical component. Fig. Figure 6B shows a schematic view representing a trajectory of a sampling or scan when a cutting tool cuts a section between LB and LB in Fig. 6A samples or scans to produce a lens surface. Fig. Figure 6C shows a schematic view representing a trajectory of a scan when the cutting tool scans a section between LM and LM in Fig. 6A is scanned to produce a lens boundary section. Fig. Figure 7 shows a view representing an XZ cross-section of a two-dimensional lens array according to the embodiment. Fig. Figure 8A shows a perspective view that provides an example of the shape of the optical component. Fig. Figure 8B shows a perspective view, which provides another example of the shape of the optical component. Fig. Figure 9 shows an example of an optical element that includes a component for positioning and fixing a variety of optical components. Fig. Figure 10 shows another example of an optical element that includes a component for positioning and fixing the multitude of optical components. Fig. Figure 11A shows a view representing a base material according to a comparative embodiment or comparative example. Fig. Figure 11B shows a view illustrating a method for manufacturing a lens in the comparative embodiment. Fig. Figure 11C shows a view representing a lens array according to the comparative embodiment. Fig. Figure 12A shows an XZ cross-sectional view that schematically represents a path of light transmitted through an optical element according to the comparative embodiment. Fig. Figure 12B shows an XZ cross-sectional view, which schematically represents a path of the light transmitted through the optical element according to the embodiment. Fig. Figure 13A shows a YZ cross-sectional view that schematically represents a path of light transmitted through the optical element according to the comparative embodiment. Fig. Figure 13B shows a YZ cross-sectional view that schematically represents a path of light transmitted through the optical element according to the embodiment. DETAILED DESCRIPTION OF THE EXECUTION EXAMPLES
[0010] An optical component, optical element, and the like according to an embodiment of the present invention is described with reference to the drawings. The embodiments described below are examples, and detailed configurations may be advantageously modified for implementation by those skilled in the art without departing from the core of the present invention. Each of the embodiments of the present invention described below may be implemented alone or as a combination of a plurality of embodiments or features thereof, where this is necessary or where the combination of elements or features from individual embodiments in a single embodiment is advantageous.
[0011] Meanwhile, it should be noted that in the drawings referenced in the following description of exemplary embodiments, elements bearing the same reference numerals have the same functions, unless otherwise specified. If a large number of identical elements are arranged in the drawings, the reference numerals and their explanations may be omitted.
[0012] Since the drawings are schematic for easier illustration and description, the shapes, sizes, arrangements, and the like of the elements depicted in the drawings may not exactly correspond to the actual objects. Furthermore, when specifying a numerical range, "XX or more and YY or less" or "XX to YY" means a range that includes the endpoints XX (lower limit) and YY (upper limit), unless otherwise stated. When numerical ranges are described in steps, the upper and lower limits of the respective numerical ranges can be combined in any way.
[0013] In the description below, for example, a +X direction refers to a direction indicated by an X-axis arrow in the orthogonal coordinate system shown, and a -X direction refers to a direction 180 degrees opposite to the direction indicated by the X-axis arrow in the orthogonal coordinate system shown. When an X direction is simply mentioned, it refers to a direction parallel to an X-axis, regardless of whether the X direction differs from the direction indicated by the X-axis arrow shown. The same applies to directions other than the X direction. First embodiment: Overall configuration of the spectroscopic device
[0014] Fig. Figure 1 shows a schematic view representing a configuration of a spectroscopic device in which an optical component and an optical element according to an exemplary embodiment are incorporated. The spectroscopic device includes a beam splitter 1, a mirror 2, a transmissive optical element 3, a light receiving sensor 4, and an information processing device 100. An optical system comprising the beam splitter 1, the mirror 2, and the transmissive optical element 3 can also be referred to as a spectroscopic optical system.
[0015] The incident light 5 (observation light), which is to be observed, travels in a +Z direction and falls onto the beam splitter 1 in the device. A reflective surface of the beam splitter 1 is configured such that the incident light 5 is split into a plurality of luminous fluxes 5a, and these luminous fluxes 5a are reflected in different directions. The beam splitter 1 and the mirror 2 are configured such that each of the luminous fluxes 5a reflected in different directions is directed onto one of a plurality of distributed mirrors 2. The plurality of mirrors 2 is arranged along a curved surface centered on an optical axis of the incident light 5. The number of divisions, which represents the number of luminous fluxes 5a into which the incident light 5 is split by the beam splitter 1, and the number of mirrors 2 are equal.
[0016] Each of the luminous fluxes 5a reflected in different directions by the beam splitter 1 falls onto one of the plurality of mirrors 2 and is reflected by the mirror 2 as a luminous flux 5b. A reflecting surface of the mirror 2 is a concave surface, and an optical axis of each luminous flux 5b is parallel to a +Z direction. Each luminous flux 5b falls onto a first optical surface 3a (incident surface) of the optical element 3.
[0017] Although the transmissive optical element 3 is described in detail below, a plurality of diffraction gratings DF are provided on the first optical surfaces 3a (incident surfaces) and a plurality of convex lenses CL are provided on a second optical surface 3b (emission surface). The luminous flux 5b incident on each diffraction grating DF is scattered according to a wavelength and emitted by one of the convex lenses CL as a luminous flux 5c.
[0018] The luminous flux 5c emitted from the second optical surface 3b (emission surface) is focused onto a light-receiving surface of the light-receiving sensor 4. The light-receiving sensor 4 is a two-dimensional imaging device sensitive to a wavelength band of the incident light 5 and transmits a measurement result to the information processing device 100. The information processing device 100 is a computer that performs plane spectroscopy and calculates two-dimensional spatial information and spectral information relating to the incident light 5 based on the measurement result of the light-receiving sensor 4. In a case where the light-receiving sensor 4 captures a moving image, the information processing device 100 can also detect temporal changes in the two-dimensional spatial information and the spectral information. Configuration of the transmissive optical element
[0019] Fig. Figure 2A shows a schematic perspective view depicting an optical functional section that performs an optical function in the transmissive optical element 3. In addition to the optical functional section, the transmissive optical element 3 may include a support section for positioning and securing a plurality of optical components 3c, a mounting section for attaching the optical element to the spectroscopic device, and the like. In the optical functional section, the plurality of optical components 3c, which have substantially the same shape, are arranged adjacent to one another in the X-direction (first direction). Here, "substantially the same shape" refers to the fact that the shapes are identical except for manufacturing tolerances.
[0020] Fig. Figure 2B shows a perspective view representing the shape of an optical component 3c. The optical component 3c consists of a solid material that transmits light of a specific wavelength (incident light to be observed) and has a first optical surface 3a (incident surface) onto which the luminous flux 5b is incident, and a second optical surface 3b (emission surface) from which the transmitted light is emitted. In the optical component 3c, the second optical surface 3b (emission surface) can be located on the side opposite the first optical surface 3a (incident surface).
[0021] Fig. Figure 3 shows a partially magnified view to describe the first optical surface 3a (incident surface) of the optical component 3c. In a macroscopic view, the first optical surface 3a is an inclined surface where a normal of the first optical surface 3a is inclined with respect to the optical axis of the incident luminous flux 5b. Furthermore, in a microscopic view of the first optical surface 3a, a large number of grooves extending in a longitudinal direction (Y-direction) of the optical component 3c are formed on the inclined surface, as shown in Figure 3. Fig. Figure 3 illustrates this. That is, each optical component 3c includes, on the first optical surface 3a, the diffraction grating DF with the plurality of grooves (e.g., V-shaped grooves with a V-shaped cross-section) extending in the Y-direction (second direction), which intersects the X-direction (first direction). The luminous flux 5b incident on each optical component 3c is diffracted by the action of the diffraction grating DF in the X-direction according to the wavelength and propagates towards the second optical surface 3b (emission surface) in the optical component 3c.
[0022] The multitude of convex lenses CL are arranged adjacent to each other in a line along the Y direction (second direction) that intersects the X direction (first direction) on the second optical surface 3b (emission surface) of each optical component 3c. Fig. Figure 4 shows a top view of the second optical surface 3b (emission surface) of the optical element 3 as viewed from a Z-direction (a direction in which the luminous flux 5b is emitted). In this example, 16 optical components 3c are arranged adjacent to each other in the X-direction (first direction). For each optical component 3c, five convex lenses CL are arranged adjacent to each other in a line along the Y-direction (second direction). As described above, a lens array is formed on the second optical surface 3b (emission surface) of the optical element 3, in which 16×5 convex lenses CL are arranged two-dimensionally. The number of optical components 3c is not limited to 16, and the number of convex lenses CL per optical component 3c is not limited to five. The configuration of the lens array can be expedited as required by the spectroscopic device specifications.
[0023] As with reference to Fig. As described in 1, the light fluxes 5c emitted by the respective convex lenses CL are focused onto the light receiving surface of the light receiving sensor 4. Fig. Figure 5 shows a schematic view representing an arrangement of the light fluxes 5c incident from the optical element 3 onto the light-receiving surface of the light-receiving sensor 4. The light-receiving surface of the light-receiving sensor 4 has 16×5 areas on which the light fluxes 5c are focused by 16×5 convex lenses CL. A large number of two-dimensionally arranged pixels are located in each area, and a light image emitted by the optical element 3 can be detected.
[0024] Since each luminous flux 5c is scattered in the X-direction according to its wavelength by the action of the diffraction grating DF, light rays with wavelengths λ1 to λ2, for example, are emitted at different positions in the X-direction in each of the 16×5 regions. For this reason, the two-dimensional spatial information and the spectral information of the incident light 5 ( Fig. 1), which is to be observed, is captured from the image data of the light reception sensor 4. Manufacturing process for transmissive optical elements
[0025] A manufacturing process for the transmissive optical element 3 is described. First, a method for producing the optical component 3c is described, and subsequently, a method for assembling the optical element 3 using the plurality of optical components 3c is described.
[0026] The material for optical component 3c can be selected from materials that transmit light in a wavelength band to be observed. For example, calcium fluoride can be used for visible light, and germanium or indium phosphide for infrared light. To suppress disturbances in the optical path of the transmitted light within optical component 3c, the refractive index distribution within the component should ideally be as small as possible, and optical component 3c should preferably be made from a single-crystal material.
[0027] In the case of a spectroscopic device that scatters infrared light (e.g., with a wavelength of 1 µm or more and 20 µm or less), the optical component 3c can be produced by processing such as cutting on a long plate-shaped base material or substrate cut from a single crystal material such as germanium or indium phosphide.
[0028] Fig. Figure 8A shows a perspective view that provides an example of the shape of the optical component 3c, and the optical component 3c includes the optical functional section with the first optical surface 3a (incidence surface) and the second optical surface 3b (emission surface) as well as fastening sections 3H for positioning and fastening during the assembly of the optical component 3c to the optical element 3.
[0029] First, the long, plate-shaped base material is cut to form a schematic shape of the optical component 3c. Then, precise cutting is performed to produce the diffraction grating DF of the first optical surface 3a (incident surface) and the convex lens CL of the second optical surface 3b (emission surface). Either the diffraction grating DF of the first optical surface 3a (incident surface) or the convex lens CL of the second optical surface 3b (emission surface) can be produced first.
[0030] One step to produce the convex lens CL of the second optical surface 3b (emission surface) is described below. Fig. Figure 6A shows a schematic view of the second optical surface 3b (emission surface) of the optical component 3c in a top view, and five convex lenses CL adjacent to each other in the longitudinal direction of the base material are produced by precision cutting between the mounting sections 3H arranged at both ends of the long plate-shaped base material.
[0031] In the production of the convex lens CL, a cutting tool is brought into contact with a side face of the base material to perform the cutting. The cutting process is carried out while the base material is scanned by the cutting tool in a transverse direction (X-direction). This X-direction scanning is performed while the position of the cutting tool is changed in the Z-direction according to the curvature of the convex lens CL. After completing a scan, the cutting tool is detached from the base material and moved in the Y-direction to the next scanning position. By repeatedly cutting while simultaneously scanning and changing the scanning position, five convex lenses CL are produced on the second optical surface 3b (emission surface).
[0032] Fig. Figure 6B shows a schematic view representing a trajectory of a scan in a production step of the optical surface, in which a cutting tool 10 cuts a section between LB and LB in Fig. 6A is scanned to produce a lens surface of the convex lens CL. Fig. Figure 6C shows a schematic view representing the trajectory of a scan in a production step of the boundary section or edge section, in which the cutting tool 10 cuts a section between LM and LM in Fig. 6A is scanned to produce a lens boundary section of adjacent convex lenses CL.
[0033] It is assumed that the movement speed (scanning speed) of the cutting tool 10 when producing the lens surface is VS1 [mm / s], and the movement speed (scanning speed) of the cutting tool 10 when producing the lens boundary section is VS2 [mm / s]. A configuration in which VS1 = VS2 is possible, but it is also possible for VS1 < VS2.
[0034] If the movement speed (scanning speed) of the cutting tool 10 is increased, the surface roughness of the base material being cut increases. Therefore, in a case where VS1 < VS2, the surface roughness of the boundary section can be higher than the surface roughness of the lens surface. An optical effect of this is described below. Furthermore, in a case where VS1 < VS2, the production time for the optical component 3c can be reduced compared to a case where the entire first optical surface 3a (incidence surface) is produced at a speed of VS1.
[0035] The multitude of optical components 3c produced in this way are arranged adjacent to each other in the X-direction (first direction), as shown in Fig. Figure 7 is shown schematically. Since, as described above, the scanning of the section between LB and LB is carried out at low speed with the cutting tool 10, the convex lens CL exhibits extremely high form accuracy when considering an XZ cross-section in the two-dimensional lens array, even at the boundary section between the lenses.
[0036] Here, an outstanding aspect of the present embodiment is described with reference to a comparative embodiment or example. In the present embodiment, the plurality of optical components 3c are arranged such that the optical element 3 is formed, whereas in the comparative embodiment, an optical element 3X is produced by cutting a single base material. Fig. Figures 11A to 11C show schematic views representing a production step of a lens array in which convex lenses are arranged two-dimensionally on an incidence surface of the optical element 3X according to the comparative embodiment.
[0037] In the comparative embodiment, first, as in Fig. As shown in Figure 11A, a base material (e.g., a single-crystal base material) is prepared with a size sufficient for the production of the entire optical element 3X.
[0038] Next, as in Fig. As shown in Figure 11B, a cutting tool 10 is brought into contact with the base material to perform a cut in a -Z direction, and the cut is performed while the base material is scanned in the X direction by the cutting tool 10 to produce a lens surface of a convex lens CL. A boundary section between the convex lenses, which are adjacent to each other in the Y direction, is also produced by scanning with the cutting tool at the same scanning speed as for the lens surface.
[0039] By repeating such a process, as in Fig. As shown in Figure 11C, the lens array, in which the convex lenses CL are arranged two-dimensionally, is produced on an emission surface side of the optical element 3X. Particularly when a single-crystal base material is used, chipping and cracking are likely to occur during cutting. In the comparative embodiment, a base material with a size corresponding to the entire optical element 3X is wasted if chipping and cracking occur even locally, which adversely affects the material consumption rate and yield. In the embodiment, however, even if chipping or cracking occurs during cutting, only the optical component needs to be discarded, which is advantageous in terms of material consumption rate and yield.
[0040] In the comparative embodiment, a concave section CV, which reflects a tip shape of the cutting tool 10, is formed near the boundary section between the convex lenses CL, which are adjacent to each other in the X direction, resulting in an edge section of the convex lens CL deviating from an original lens surface shape.
[0041] Fig. Figure 12A shows an XZ cross-sectional view, which schematically represents a path of light transmitted through the optical element 3X according to the comparative embodiment, and the concave section CV, which deviates from the original lens surface shape, is formed at the edge section of each of the convex lenses CL that are adjacent to each other in the X direction. Since the luminous flux 5c emitted from the concave section CV travels along an optical path that differs from the original optical path, as shown in Fig. As shown in 12A, noise light can be generated which combines the two-dimensional spatial information and the spectral information of the incident light to be observed 5 ( Fig. 1) does not display correctly.
[0042] Fig. Figure 12B shows an XZ cross-sectional view schematically representing a path of light transmitted through the optical element 3 according to the embodiment. As with reference to Fig. As described in Figure 6B, in the present embodiment, when producing the convex lens CL, the cutting tool is brought into contact with the side surface of the base material to perform the cutting, and the cutting is carried out while the base material is scanned by the cutting tool in the transverse direction (X-direction) of the base material. Therefore, in each of the convex lenses CL, which are adjacent to each other in the X-direction, the original lens surface shape is formed with high accuracy, even in the edge section of the lens. Therefore, the emitted luminous flux 5c, as described in Figure 6B, can be produced with high accuracy. Fig. As shown in 12B, move along the original optical path. According to the present embodiment, light carrying the two-dimensional spatial information and the spectral information of the incident light 5 ( Fig. 1) is reflected and directed to the light receiving surface of the light receiving sensor 4.
[0043] Fig. Figure 13A shows a YZ cross-sectional view schematically representing a path of light transmitted through the optical element 3X according to the comparative embodiment. The concave section CV, which differs from the original lens surface shape, is formed at the edge of each of the convex lenses CL that are adjacent to each other in the Y direction. The concave section CV is formed by moving the cutting tool at the same scanning speed as for the lens surface and has a low surface roughness, resulting in high light transmittance. Since the luminous flux 5c emitted from the concave section CV travels along an optical path that differs from the original lens surface shape, as shown in Fig. As shown in 13A, noise light can be generated, which contains the two-dimensional spatial information of the incident light to be observed 5 ( Fig. 1) does not reflect.
[0044] Fig. Figure 13B shows an XZ cross-sectional view schematically representing a path of light transmitted through the optical element 3 according to the embodiment. As with reference to Fig. As described in Figure 6C, in a desirable embodiment, the movement speed (sampling speed) of the cutting tool 10 is adjusted during the production of the lens boundary section such that VS1 < VS2, and the surface roughness of the boundary section is made higher than the surface roughness of the lens surface, thereby forming a light scattering zone at the boundary section. Since the emitted light is scattered at a wide angle in the lens boundary section (light scattering zone) with a high surface roughness, noise light of high intensity does not fall locally on a specific position (pixel) on the light-receiving surface of the light-receiving sensor 4. In this way, the generation of noise light, which would impair the two-dimensional spatial information of the incident light 5 to be observed, is suppressed. Fig. 1) does not reflect.
[0045] Returning to the description of the manufacturing process for the transmissive optical element, a production step of the optical element 3 using the multiple optical components 3c is described here. For example, an adhesive is applied to each side surface of the in Fig. The optical component 3c shown in Figure 2B is applied, the optical components 3c are arranged in the X-direction using a positioning device (not shown), and the adhesive is cured, thereby positioning the optical components 3c as shown in Figure 2B. Fig. 2A is shown integrated to produce the optical element.
[0046] Furthermore, the optical element can include a component for positioning and fixing the multiple optical components. For example, as in Fig. 9 is shown, which is in Fig. Figure 8A shows that the optical component 3c can be positioned and fixed using a frame body 6 (support element) provided with an opening section and an L-shaped component 7 (positioning reference) attached to the frame body 6. The fastening sections 3H of the optical components 3c can be arranged such that they contact the L-shaped component 7 serving as the positioning reference, and the optical components 3c can be attached to the frame body 6 using the adhesive.
[0047] The optical component 3c does not necessarily have to be fixed with the adhesive, but can also be positioned and fixed with a flexible element, such as an elastic element. As shown in Fig. As shown in 10, the following can be seen in Fig. The optical component 3c shown in Figure 8B can be positioned and fixed, for example, using a holder 8 which is provided with an opening section, a frame-shaped cover 8A, and an elastic rubber element 9. The optical component 3c is held in the holder 8 while being pressed in the -X direction by the leaf-shaped rubber element 9. The frame-shaped cover 8A can have a notched section 3j ( Fig. 8B) Press the optical component 3c in the +Z direction to position and fix the optical component 3c in the holder 8.
[0048] According to the exemplary embodiment, due to the use of the optical element 3, which includes the plurality of optical components 3c, it is not necessary to repeat a reflection using an imaging mirror and a spectroscopic element, as is usual in the prior art, so that an optical path space becomes compact, as in Fig. 1 is shown, and the plane spectroscopic device can be reduced in size. Modified example
[0049] The present invention is not limited to the embodiments described above, and many modifications can be made in the technical sense of the present invention. For example, all or some of the optical components described above, which have different shapes, can be combined for implementation.
[0050] Although the diffraction grating DF, which is formed on the inclined surface, in Fig. As shown in Figure 3, the diffraction grating DF can also be formed by providing a V-shaped groove on a surface orthogonal to the optical axis of the incident luminous flux 5b. The vertex angle and the number of V-shaped grooves included in the diffraction grating DF can be adjusted according to the wavelength band of the light to be observed.
[0051] Although there is a possibility that unwanted or stray light may incident on the optical element 3 from a direction inclined with respect to the +Z direction, a light-blocking structure can be provided at the interface between the optical components 3c to prevent such unwanted or stray light from reaching the light receiving sensor 4. For example, a fine uneven shape can be created by grinding or laser processing on a side surface (a surface connecting the first optical surface and the second optical surface) that serves as the interface to an adjacent optical component 3c, in order to prevent the transmission of obliquely incident unwanted or stray light.Furthermore, an element with a light-blocking property or a film-like coating layer can be provided on the side surface (the surface connecting the first and second optical surfaces) that serves as the boundary to an adjacent optical component 3c. Alternatively, adjacent optical components 3c can be joined together by applying an adhesive containing a material that absorbs unnecessary light to the side surface (the surface connecting the first and second optical surfaces) that serves as the boundary to an adjacent optical component 3c. Other examples of implementation
[0052] Various embodiments are described in detail above, but it is understood that the present invention is not limited to these embodiments and includes all modifications, variants, alternatives and equivalents that fall within the scope of the attached claims. QUOTES INCLUDED IN THE DESCRIPTION
[0000] This list of documents cited by the applicant was automatically generated and is included solely for the reader's convenience. The list is not part of the German patent or utility model application. The DPMA accepts no liability for any errors or omissions. Cited patent literature
[0000] JP 2022-96461 A [0003, 0004]
Claims
[1] Optical component made of a solid material that transmits light of a used wavelength, wherein the optical component comprises: a diffraction grating containing a plurality of grooves extending in a second direction, arranged on a first optical surface of the optical component onto which the light of the wavelength used is incident; and a plurality of lenses arranged in the second direction and provided on a second optical surface of the optical component, from which the light of the wavelength used, incident from the first optical surface, is emitted. [2] Optical component according to claim 1, further comprising a light scattering section extending in a first direction intersecting the second direction, having a surface roughness higher than the surface roughness of an optical surface of the lenses, and being provided at a boundary section between adjacent lenses from the plurality of lenses arranged in the second direction. [3] Optical component according to claim 1 or 2, wherein the first optical surface is an inclined surface arranged such that a normal from the first optical surface is inclined with respect to an optical axis of the incident light of the wavelength used, and the diffraction grating is formed on the inclined surface. [4] Optical component according to any one of claims 1 to 3, wherein the solid material is a single crystal material. [5] Optical component according to any one of claims 1 to 4, wherein the solid material is a material containing indium phosphide or germanium. [6] Optical component according to any one of claims 1 to 5, wherein the wavelength used is 1 µm or more and 20 µm or less. [7] Optical component according to any one of claims 1 to 6, further comprising a light-blocking structure provided on a surface connecting the first optical surface and the second optical surface. [8] Optical element comprising: a plurality of optical components, each according to one of claims 1 to 7, wherein the multitude of optical components are arranged adjacent to each other in a first direction that intersects the second direction. [9] Optical element according to claim 8, further comprising a light-blocking structure arranged from the plurality of optical components at a boundary section between optical components that are adjacent to each other in the first direction. [10] Manufacturing process for an optical component, the manufacturing process comprising: a step in preparing a base material consisting of a solid material that allows light of a used wavelength to pass through; a step of forming a plurality of grooves, wherein the plurality of grooves is arranged in a longitudinal direction of the base material on a first surface of the base material; a step of forming a plurality of lenses, wherein the plurality of lenses is arranged in the longitudinal direction of the base material on a second surface opposite the first surface; and a step of forming a light scattering section, wherein the light scattering section extends in a transverse direction of the base material and has a surface roughness that is higher than a surface roughness of the optical surface of the plurality of lenses at a boundary section between adjacent lenses from the plurality of lenses. [11] Manufacturing method according to claim 10, wherein in the step of forming a plurality of grooves a diffraction grating is formed on the first surface which is inclined with respect to the second surface. [12] Manufacturing method according to claim 10 or 11, wherein the step includes forming a plurality of lenses: a production step of the optical surface in which cutting is carried out to form the optical surface of the multitude of lenses, while a cutting tool is moved in a transverse direction of the second surface, wherein the step of forming a light scattering section includes a production step of the boundary section in which a cutting is carried out to form the boundary section between the adjacent lenses while the cutting tool is moved in the transverse direction of the second surface, and where the speed at which the cutting tool is moved during the production step of the optical surface is lower than the speed at which the cutting tool is moved during the production step of the boundary section. [13] Manufacturing process according to any one of claims 10 to 12, wherein the solid material is a single crystal material. [14] Manufacturing process according to any one of claims 10 to 13, wherein the solid material contains indium phosphide or germanium. [15] Manufacturing method according to any one of claims 10 to 14, wherein the wavelength used is 1 µm or more and 20 µm or less. [16] Manufacturing method according to any one of claims 10 to 15, further comprising a step of forming a light-blocking structure on a surface connecting the first surface and the second surface.
Citation Information
Patent Citations
Optical system and surface spectroscopic apparatus
JP2022096461A