Teaching device and transport system

Abstract

The present invention provides a teaching device that has a relatively simple configuration and can more efficiently indicate a specific location. [Solution] The teaching device A10 comprises a first unit 10 having a reflective surface 11 and a first optical member 12, and a second unit 20 having a light-emitting unit 212 and a light-receiving unit 222. When a virtual surface 30 with a first direction z as the normal direction is set, the first unit 10 and the second unit 20 are located on opposite sides of each other with the virtual surface 30 in between. The first unit 10 and the second unit 20 are able to move relative to each other in a direction perpendicular to the first direction z. The first optical member 12 has an optical surface 13 that includes a first region 131 in contact with the virtual surface 30 and a second region 132 away from the virtual surface 30. The light-receiving unit 222 detects a specific light L0 from the detection light L incident on the optical surface 13 in the first direction z, which is incident on the first region 131, reflected by the reflective surface 11, and then reaches the light-receiving unit 222.

Description

Technical Field

[0001] The present invention relates to a teaching device for indicating a specific position and a transport system including the teaching device.

Background Art

[0002] Patent Document 1 discloses an example of a teaching device for correcting a hand of a transport robot that transports a wafer to a specific position. The teaching device includes a target jig with markings, a wafer for position detection disposed on the hand, a camera, and a control device for teaching a specific position to the hand. The wafer for position detection is provided with two reflecting mirrors. The two reflecting mirrors project the markings. The camera images the targets projected on each of the two reflecting mirrors. The control device teaches a specific position to the hand from the captured images of the targets on each of the two reflecting mirrors obtained by the camera. Thereby, it is possible to correct the hand to a specific position.

[0003] However, in the teaching device disclosed in Patent Document 1, a wafer for position detection provided with two reflecting mirrors is required. Therefore, after correcting the position of the hand, it is necessary to remove the wafer for position detection from the hand and then place a wafer, which is a material for a substrate such as a semiconductor element, on the hand, which causes labor in the work.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] In view of the above circumstances, the object of the present invention is to provide a teaching device that has a relatively simple configuration and can more efficiently indicate a specific location. [Means for solving the problem]

[0006] A teaching device provided by a first aspect of the present invention comprises a first unit having a reflective surface normal to a first direction and a first optical member disposed on the reflective surface and having light transmission, and a second unit having a light-emitting unit that emits detection light and a light-receiving unit that detects the detection light. The first unit and the second unit are movable relative to each other in a direction perpendicular to the first direction. The first optical member is exposed to the outside air and has an optical surface into which the detection light is incident and emitted. When a virtual surface is set with the first direction normal and in contact with the optical surface, the first unit and the second unit are located on opposite sides of each other with the virtual surface in between. The optical surface includes a first region in contact with the virtual surface and a second region away from the virtual surface. The light-receiving unit detects specific light from the detection light incident on the optical surface in the first direction that is incident on the first region, reflected by the reflective surface, and then reaches the light-receiving unit.

[0007] Preferably in the implementation of the present invention, the second region is a curved surface that is convex toward the outside air.

[0008] Preferably in the embodiment of the present invention, the second region is a plane inclined with respect to the reflective surface.

[0009] Preferably in the embodiment of the present invention, the second unit further comprises a second optical member located between the virtual surface and the light-emitting unit and the light-receiving unit in the first direction. The light-emitting unit and the light-receiving unit are separated from each other in a direction perpendicular to the first direction. The second optical member has a first surface that overlaps the light-emitting unit when viewed in the first direction, and a second surface that overlaps the light-receiving unit when viewed in the first direction. The detection light emitted from the light-emitting unit is reflected by the first surface and then the second surface, respectively, before being incident on the optical surface. The specific light emitted from the optical surface passes through the second surface before reaching the light-receiving unit.

[0010] A transport system provided by a second aspect of the present invention comprises a teaching device provided by a first aspect of the present invention and a transport robot. The transport robot comprises a hand rotatable about a first direction and an arm supporting the hand. The arm is rotatable in a direction perpendicular to the first direction. The hand is provided with either the first unit or the second unit. [Effects of the Invention]

[0011] The teaching device according to the present invention has a relatively simple configuration and allows for more efficient indication of a specific location.

[0012] Other features and advantages of the present invention will become more apparent from the detailed description below, based on the accompanying drawings. [Brief explanation of the drawing]

[0013] [Figure 1] This is a plan view showing a teaching device according to the first embodiment of the present invention. [Figure 2] This is a cross-sectional view along the line II-II in Figure 1. [Figure 3] This is a cross-sectional view showing the state in which a specific light is detected in the teaching device shown in Figure 1. [Figure 4]In the teaching device shown in FIG. 1, it is a cross-sectional view showing a state where specific light is not detected. [Figure 5] It is a perspective view of a transport robot included in a transport system according to an embodiment of the present invention. [Figure 6] It is a plan view of a transport system according to an embodiment of the present invention. [Figure 7] It is a plan view showing a teaching device according to a second embodiment of the present invention. [Figure 8] It is a cross-sectional view taken along line VIII-VIII of FIG. 7. [Figure 9] It is a plan view showing a teaching device according to a third embodiment of the present invention. [Figure 10] It is a cross-sectional view taken along line X-X of FIG. 9.

Mode for Carrying Out the Invention

[0014] The mode for carrying out the present invention will be described based on the accompanying drawings.

[0015] 〔First Embodiment〕 Based on FIGS. 1 and 2, the teaching device A10 according to the first embodiment of the present invention will be described. The teaching device A10 includes a first unit 10 and a second unit 20.

[0016] The teaching device A10 forms a part of a transport system C described later. Here, for convenience of explanation, the normal direction of a reflection surface 11 described later is referred to as the "first direction z". The first direction z generally corresponds to the vertical direction. A direction orthogonal to the first direction z is referred to as the "second direction y". A direction orthogonal to each of the first direction z and the second direction y is referred to as the "third direction x".

[0017] The first unit 10 includes a reflecting surface 11 and a first optical member 12. The reflecting surface 11 reflects the detection light L. The reflecting surface 11 is, for example, a part of a mirror. The normal direction of the reflecting surface 11 is the first direction z. The first optical member 12 is disposed on the reflecting surface 11. The first optical member 12 has translucency. The first optical member 12 transmits the detection light L. The first optical member 12 is made of a material including, for example, glass. The material of the first optical member 12 is not limited as long as it has a refractive index larger than the refractive index of vacuum. In the teaching device A10, the first optical member 12 is semi-cylindrical extending in the third direction x.

[0018] The first optical member 12 has an optical surface 13 through which the detection light L enters and exits. However, the direction of the detection light L incident on the optical surface 13 is limited to the first direction z. The optical surface 13 is exposed to the outside air. In the teaching device A10, the optical surface 13 is a convex curved surface facing the outside air. The optical surface 13 is defined by a single radius of curvature. Alternatively, the optical surface 13 may be defined by a plurality of radii of curvature.

[0019] Here, a virtual surface 30 in contact with the optical surface 13 is set. The normal direction of the virtual surface 30 is the first direction z. Therefore, the normal directions of the virtual surface 30 and the reflecting surface 11 are equal to each other. In this case, the optical surface 13 includes a first region 131 and a second region 132. The first region 131 is in contact with the optical surface 13. In other words, the first region 131 is an element included in the optical surface 13. In the teaching device A10, the first region 131 is a straight line extending in the third direction x and corresponds to the vertex of the optical surface 13 in a cross section having the first direction z and the second direction y as in-plane directions. The second region 132 is away from the optical surface 13. In other words, the second region 132 is an element not included in the optical surface 13. In the teaching device A10, the second region 132 includes two regions separated from each other with the first region 131 interposed therebetween in the second direction y.

[0020] A target 111 is set on the reflective surface 11. The target 111 is a reference point for indicating a specific location. Viewed in the first direction z, the position and size of the target 111 coincide with the position and size of the first region 131 of the optical surface 13.

[0021] The second unit 20 is located on the opposite side of the first unit 10 in the first direction z, with the virtual plane 30 in between. Therefore, the first unit 10 and the second unit 20 are located on opposite sides of each other with the virtual plane 30 in between. The second unit 20 comprises a light-emitting means 21, a light-receiving means 22, and a second optical member 23.

[0022] The light-emitting means 21 is an element that emits detection light L. The light-emitting means 21 has a first light guide 211 and a light-receiving unit 222. The first light guide 211 is, for example, an optical fiber. The light-emitting unit 212 is provided at one end of the first light guide 211. In the light-emitting means 21, when detection light L emitted from a light-emitting element (not shown) such as an LED is incident on the other end of the first light guide 211, the detection light L is reflected repeatedly by the first light guide 211, and then the detection light L is emitted from the light-emitting unit 212 in a first direction z. The detection light L is visible light including infrared light.

[0023] The light-receiving means 22 detects the detected light L. The light-receiving means 22 includes a second light guide 221 and a light-receiving unit 222. The second light guide 221 is, for example, an optical fiber. The light-receiving unit 222 is provided at one end of the second light guide 221. In the light-receiving means 22, when the specific light L0 shown in Figure 2 (details will be described later) reaches the light-receiving unit 222, the specific light L0 is reflected repeatedly by the second light guide 221, and then the specific light L0 is emitted from the other end of the second light guide 221. The light emitted from the other end of the second light guide 221 is detected by a light-receiving element (not shown), such as a phototransistor.

[0024] The light-emitting unit 212 and the light-receiving unit 222 are separated from each other in the second direction y. Alternatively, the light-emitting unit 212 and the light-receiving unit 222 may be integrated into a single unit. In the integrated configuration, detection light L is emitted from a specific point, and a specific light L0, as shown in Figure 2, is incident from the same point. Furthermore, in this configuration, the second optical member 23, which will be described in detail below, becomes unnecessary.

[0025] The second optical member 23 is located in the first direction z between the virtual plane 30 and the light-emitting section 212 and the light-receiving section 222. The second optical member 23 extends in the second direction y. The second optical member 23 is, for example, a beam spreader. The second optical member 23 has a first surface 231 and a second surface 232 that are separated from each other in the second direction y. Viewed in the first direction z, the light-emitting section 212 overlaps with the first surface 231. Also, viewed in the first direction z, the light-receiving section 222 overlaps with the second surface 232. Each of the first surface 231 and the second surface 232 is inclined with respect to the virtual plane 30.

[0026] In the second unit 20, the detection light L emitted from the light-emitting unit 212 in the first direction z is reflected by the first surface 231 and then further reflected by the second surface 232. The light reflected by the second surface 232 is incident on the optical surface 13 of the first optical member 12 in the first direction z. Furthermore, in the second unit 20, the specific light L0 shown in Figure 2 passes through the second surface 232 and then reaches the light-receiving unit 222.

[0027] The first unit 10 and the second unit 20 are capable of relative movement to each other in a direction orthogonal to the first direction z. In the teaching device A10, the first unit 10 is stationary, and the second unit 20 moves relative to the first unit 10. Alternatively, the second unit 20 may be stationary, and the first unit 10 may move relative to the second unit 20.

[0028] Next, the operation of the teaching device A10 will be explained based on Figures 3 and 4. The cross-sectional positions in Figures 3 and 4 are the same as the cross-sectional positions in Figure 2.

[0029] Figure 3 shows the state in which the light receiving unit 222 detects the specific light L0 shown in Figure 2. In this state, the detection light L emitted from the light emitting unit 212 in the first direction z is incident in the first direction z on the first region 131 of the optical surface 13 of the first optical member 12 via the second optical member 23. The detection light L incident on the first region 131 passes through the first optical member 12 and is reflected by the target 111 on the reflective surface 11. The detection light L reflected by the target 111 passes through the first optical member 12 and is emitted from the first region 131. The specific light L0 is the component of the detection light L emitted from the first region 131. The specific light L0 reaches the light receiving unit 222 via the second optical member 23. In other words, between the first region 131 and the second optical member 23, the path of the specific light L0 emitted from the first region 131 coincides with the path of the detection light L incident on the first region 131. As a result, the light receiving unit 222 detects the specific light L0. When the light receiving unit 222 detects the specific light L0, the position of the object is identified as the position of the target 111.

[0030] Figure 4 shows a state in which the light receiving unit 222 does not detect the specific light L0 shown in Figure 2. In this state, the detection light L emitted from the light emitting unit 212 in the first direction z is incident in the second region 132 of the optical surface 13 of the first optical member 12 in the first direction z via the second optical member 23. The detection light L incident in the second region 132 passes through the first optical member 12 and is reflected in a region of the reflective surface 11 that is far from the target 111. The detection light L reflected in that region passes through the first optical member 12 and is emitted from the second region 132. The detection light L emitted from the second region 132 does not reach the light receiving unit 222. As a result, the light receiving unit 222 does not detect the specific light L0. When the light receiving unit 222 does not detect the specific light L0, the position of the object is not identified as being at the target 111.

[0031] Next, a transport system C according to one embodiment of the present invention will be described based on Figures 5 and 6. The transport system C comprises a teaching device A10, a transport robot B, and a storage space 50. The transport robot B transports the workpiece 80 stored in the storage space 50 to a predetermined workspace (such as a clean room). The workpiece 80 is, for example, a semiconductor wafer.

[0032] As shown in Figure 5, the transport robot B comprises a base 41, arms 42, and two hands 43. The base 41 is fixed to the floor of the workshop. The arms 42 are rotatably supported relative to the base 41. The arms 42 have a first arm 421, a second arm 422, and a third arm 423. One end of the first arm 421 is supported on the base 41 so as to be rotatable around a third direction x. One end of the second arm 422 is supported on the other end of the first arm 421 so as to be rotatable around a third direction x. The third arm 423 is located opposite to the first arm 421 with respect to the second arm 422 in a first direction z. The third arm 423 is supported on the other end of the second arm 422 so as to be rotatable around a first direction z. Therefore, the first arm 421 and the second arm 422 move along a plane whose first direction z and second direction y are in-plane directions. The third arm 423 rotates around the first direction z relative to the first arm 421 and the second arm 422.

[0033] As shown in Figure 5, each of the two hands 43 is supported by a third arm 423 of arm 42 so as to be rotatable about a first direction z. Each of the two hands 43 has a support surface 431. The support surface 431 faces the same side as the reflective surface 11 of the teaching device A10 in the first direction z. Therefore, the normal directions of the support surface 431 and the reflective surface 11 are equal to each other. In the transport robot B, the workpiece 80 is supported on the support surface 431. The two hands 43 are stacked in the first direction z.

[0034] As shown in Figure 6, in the transport system C, the first unit 10 of the teaching device A10 is provided in the mounting space 50. The workpiece 80 is supported in the mounting space 50. In the transport system C, the second unit 20 of the teaching device A20 is provided on each of the two hands 43 of the transport robot B, on the side opposite to the side facing the support surface 431 in the first direction z. In the transport system C, each of the two hands 43 moves relative to the first unit 10 in conjunction with the second unit 20 (relative movement along the second direction y in this embodiment). This makes it possible to identify the position of each of the two hands 43 to the position of the target 111 of the first unit 10. Alternatively, the first unit 10 may be provided on each of the two hands 43, and the second unit 20 may be provided in the mounting space 50.

[0035] Next, we will explain the operation and effects of the teaching device A10.

[0036] The teaching device A10 comprises a first unit 10 having a reflective surface 11 and a first optical member 12, and a second unit 20 having a light-emitting unit 212 and a light-receiving unit 222. When a virtual surface 30 with a first direction z as the normal direction is set, the first unit 10 and the second unit 20 are located on opposite sides of each other with the virtual surface 30 in between. The first unit 10 and the second unit 20 are able to move relative to each other in a direction perpendicular to the first direction z. The first optical member 12 has an optical surface 13 that includes a first region 131 in contact with the virtual surface 30 and a second region 132 away from the virtual surface 30. The light-receiving unit 222 detects a specific light L0 from the detection light L incident on the optical surface 13 in the first direction z, which is incident on the first region 131, reflected by the reflective surface 11, and then reaches the light-receiving unit 222. By adopting this configuration, the specific light L0 is limited to the component of the detection light L that enters and exits from the first region 131. As a result, by providing a target 111 on the reflective surface 11 whose position and size in the first direction z coincide with the first region 131, the position of the object can be identified by the target 111. For example, in the transport system C, after identifying the position of the hand 43 of the transport robot B to the position of the target 111, the workpiece 80 can be immediately supported by the hand 43. Therefore, the configuration of the teaching device A10 is relatively simple and allows for more efficient indication of a specific position.

[0037] In teaching device A10, the second region 132 is a curved surface that is convex toward the outside air. By adopting this configuration, the position of the object can be identified in coordinates located on a straight line extending in a direction perpendicular to the first direction z (the third direction x in teaching device A10).

[0038] The second unit 20 further comprises a second optical member 23. The second optical member 23 has a first surface 231 that overlaps with the first light guide 211 when viewed in the first direction z, and a second surface 232 that overlaps with the light receiving unit 222 when viewed in the first direction z. The detection light L emitted from the light emitting unit 212 is reflected by the first surface 231 and the second surface 232 in that order, and then incident on the optical surface 13. The specific light L0 emitted from the optical surface 13 passes through the second surface 232 and then reaches the light receiving unit 222. By adopting this configuration, the teaching device A10 can separate the light emitting unit 212 and the light receiving unit 222 in a direction perpendicular to the first direction z. This makes the configuration of each of the light emitting unit 212 and the light receiving unit 222 simpler.

[0039] [Second Embodiment] A teaching device A20 according to a second embodiment of the present invention will be described based on Figures 7 and 8. In these figures, elements that are the same as or similar to those in the previously described teaching device A10 are denoted by the same reference numerals, and redundant explanations are omitted.

[0040] In teaching device A20, the configuration of the first optical element 12 differs from that of teaching device A10.

[0041] As shown in Figures 7 and 8, the first optical member 12 is hemispherical. The first region 131 of the optical surface 13 is defined as a point. Viewed in the first direction z, the first region 131 is surrounded by the second region 132 of the optical surface 13. The second region 132 is convex toward the outside air and is a uniform curved surface about the first direction z.

[0042] Next, we will explain the operation and effects of the teaching device A20.

[0043] The teaching device A20 comprises a first unit 10 having a reflective surface 11 and a first optical member 12, and a second unit 20 having a light-emitting unit 212 and a light-receiving unit 222. When a virtual surface 30 with a first direction z as the normal direction is set, the first unit 10 and the second unit 20 are located on opposite sides of each other with the virtual surface 30 in between. The first unit 10 and the second unit 20 are able to move relative to each other in a direction perpendicular to the first direction z. The first optical member 12 has an optical surface 13 that includes a first region 131 in contact with the virtual surface 30 and a second region 132 away from the virtual surface 30. The light-receiving unit 222 detects a specific light L0 from the detection light L incident on the optical surface 13 in the first direction z, which is incident on the first region 131, reflected by the reflective surface 11, and then reaches the light-receiving unit 222. Therefore, the teaching device A20 has a relatively simple configuration and can more efficiently indicate a specific location.

[0044] In teaching device A20, the second region 132 is a curved surface that is convex toward the outside air. Viewed in the first direction z, the first region 131 is surrounded by the second region 132. By adopting this configuration, the position of the object can be identified to a single coordinate in the coordinate system relating to the second direction y and the third direction x.

[0045] [Third Embodiment] A teaching device A30 according to the third embodiment of the present invention will be described based on Figures 9 and 10. In these figures, elements that are the same as or similar to those in the previously described teaching device A10 are denoted by the same reference numerals, and redundant explanations are omitted.

[0046] In teaching device A30, the configuration of the first optical element 12 differs from that of teaching device A10.

[0047] As shown in Figures 9 and 10, the first optical member 12 is frustum-shaped. The first region 131 of the optical surface 13 is defined as a plane with the second direction y and the third direction x as in-plane directions. Viewed in the first direction z, the first region 131 is surrounded by the second region 132 of the optical surface 13. The second region 132 contains four regions. Each of these four regions is a plane inclined with respect to the reflective surface 11.

[0048] Next, we will explain the operation and effects of the teaching device A30.

[0049] The teaching device A30 comprises a first unit 10 having a reflective surface 11 and a first optical member 12, and a second unit 20 having a light-emitting unit 212 and a light-receiving unit 222. When a virtual surface 30 with a first direction z as the normal direction is set, the first unit 10 and the second unit 20 are located on opposite sides of each other with the virtual surface 30 in between. The first unit 10 and the second unit 20 are able to move relative to each other in a direction perpendicular to the first direction z. The first optical member 12 has an optical surface 13 that includes a first region 131 in contact with the virtual surface 30 and a second region 132 away from the virtual surface 30. The light-receiving unit 222 detects a specific light L0 from the detection light L incident on the optical surface 13 in the first direction z, which is incident on the first region 131, reflected by the reflective surface 11, and then reaches the light-receiving unit 222. Therefore, the teaching device A30 has a relatively simple configuration and can more efficiently indicate a specific location.

[0050] In the teaching device A30, the second region 132 is a plane inclined with respect to the reflective surface 11. By adopting this configuration, the position of the object can be identified within a planar region where the second direction y and the third direction x are in-plane directions.

[0051] The present invention is not limited to the embodiments described above. The specific configuration of each part of the present invention can be modified in various ways. Each of the teaching devices A20 and A30 can also be applied to the transport system C in place of teaching device A10. Furthermore, each of the teaching devices A10, A20, and A30 can be applied not only to the transport system C but also to various devices that require pointing to a specific location. [Explanation of Symbols]

[0052] A10, A20, A30: Teaching device, B: Transport robot, C: Transport system, 10: First unit, 11: Reflecting surface, 111: Target, 12: First optical component, 13: Optical surface, 131: First region, 132: Second region, 20: Second unit, 21: Light projection means, 211: First light guide, 212: Light projection unit, 22: Light receiving means, 221: Second light guide ,222: light receiving unit, 23: second optical element, 231: first surface, 232: second surface, 30: virtual surface, 41: base, 42: arm, 421: first arm, 422: second arm, 423: third arm, 43: hand, 431: support surface, 50: mounting space, 80: workpiece, L: detection light, L0: specific light, z: first direction, y: second direction, x: third direction

Claims

1. A first unit comprising a reflective surface whose normal direction is a first direction, and a first optical member disposed on the reflective surface and having light-transmitting properties, The device comprises a second unit which includes a light-emitting unit that emits detection light and a light-receiving unit that detects the detection light, The first unit and the second unit are able to move relative to each other in a direction perpendicular to the first direction, The first optical member is exposed to the outside air and has an optical surface into which the detection light is incident and emitted. When the first direction is defined as the normal direction and a virtual surface is set that is tangent to the optical surface, the first unit and the second unit are located on opposite sides of each other with the virtual surface in between. The optical surface includes a first region in contact with the virtual surface and a second region away from the virtual surface. The light-receiving unit is a teaching device that detects specific light from the detection light incident on the optical surface in a first direction, which is incident on the first region, reflected by the reflective surface, and then reaches the light-receiving unit.

2. The teaching device according to claim 1, wherein the second region is a curved surface that is convex toward the outside air.

3. The teaching device according to claim 1, wherein the second region is a plane inclined with respect to the reflective surface.

4. The second unit further comprises a second optical member located between the virtual surface and the light-emitting and light-receiving sections in the first direction. The light-emitting unit and the light-receiving unit are separated from each other in a direction perpendicular to the first direction, The second optical member has a first surface that overlaps the light-emitting portion when viewed in the first direction, and a second surface that overlaps the light-receiving portion when viewed in the first direction. The detection light emitted from the light-emitting unit is reflected by the first surface and then the second surface, respectively, before being incident on the optical surface. The teaching device according to any one of claims 1 to 3, wherein the specific light emitted from the optical surface passes through the second surface before reaching the light receiving unit.

5. A teaching device according to claim 1, The transport robot comprises a hand rotatable around the first direction and an arm supporting the hand, The arm is rotatable in a direction perpendicular to the first direction, A transport system in which either the first unit or the second unit is provided in the hand.

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