ADJUSTABLE SEMICONDUCTOR CONTAINER AND SEMICONDUCTOR CONTAINER ALIGNMENT SYSTEM

Abstract

The alignable semiconductor container provided by the present invention is adapted to a non-equilateral rectangular mask container and comprises a container and an alignment assembly located at the bottom of the container. The alignment assembly is configured to interact with a drive section of a loading port when the container is placed on the loading port and rotates the container from a first direction to a second direction according to a drive stroke provided by the drive section. The present invention further provides an alignment system for a semiconductor container. Through the interaction between the alignment assembly and the drive section, the alignment assembly rotates the non-equilateral rectangular mask container from a first direction to a second direction according to a drive stroke provided by the drive section.

Description

BACKGROUND OF THE INVENTION AREA OF INVENTION The present invention relates to a semiconductor container, in particular an alignable semiconductor container and a semiconductor container alignment system for receiving the semiconductor container. DESCRIPTION OF THE STATE OF THE TECHNOLOGY Since the dimensions of masks have increased from 6 inches by 6 inches to 6 inches by 12 inches, a modern large-format, non-equilateral, rectangular mask transport container has a long and a short side to accommodate these larger non-equilateral rectangular masks. As a result of the increased non-equilateral rectangular shape of the mask and the dimensions of the mask container, the transport devices and handling steps for the mask transport container must also be redesigned and adapted. For example, if a mask container is transported to a process machine (e.g., a machine) using an overhead hoist transport (OHT) system, the transport device and handling steps for the mask transport container must be redesigned and adapted.When transporting a non-equilateral rectangular mask container to an exposure unit, it is necessary to position it in a specific orientation according to existing machine limitations or process requirements in order to be inserted into the exposure unit. For example, the non-equilateral rectangular mask container is placed on a loading port before insertion into the exposure unit, with the short side of the mask container facing the exposure unit. However, a loading port on a current loading machine does not have an orientation function, so the mask container can only be inserted into the exposure unit in a specific orientation when transported to the exposure unit.Therefore, additional automated mechanisms must be incorporated within the exposure device to change the orientation of the non-equilateral rectangular mask container, thereby improving the sophistication and space utilization of the exposure device. SUMMARY OF THE INVENTION In light of the aforementioned problems, the present invention provides an alignable semiconductor container adapted to a non-equilateral rectangular mask container. An alignment assembly is arranged at the bottom of the mask container. The mask container is rotated by a drive section of the mask container's drive means to achieve an alignment function, thereby resolving the problem of alignment inconsistency between an OHT system and the long / short sides of a mask within a machine. In particular, an alignable semiconductor container according to the present invention is adapted to a non-equilateral rectangular mask container and comprises a container and an alignment assembly arranged at the bottom of the container. The alignment assembly is configured to interact with a drive section of a loading port when the container is placed on the loading port. The alignment assembly rotates the container from a first direction to a second direction according to a drive stroke provided by the drive section. Based on the above concept, the alignment assembly includes a rotary seat, and the drive section is located at or near a loading position of the loading port, so that the container comes into contact with the drive section and, together with a movement stroke of loading the container, aligns itself by rotating when the container is at the loading position. Based on the concept described above, the container comprises an outer container to hold an inner container, the inner container serving to hold a non-equilateral rectangular mask, and the outer container including a door formed with the alignment assembly. When the outer container interacts with the drive section of the loading port to rotate, the inner container housed within the outer container can rotate relative to the alignment assembly to change its direction. Based on the concept described above, the container comprises an outer container to hold an inner container, and the inner container includes a base formed with the aligning assembly. When the base interacts with the drive section of the loading port to rotate, a non-equilateral rectangular mask located within the inner container rotates relative to the aligning assembly to change its direction. Based on the above concept, the rotary seat is rotatably connected to the bottom of the container via a bearing. Based on the above concept, the bottom of the container is provided with at least one positioning groove that interacts with and is positioned on at least one set of positioning pins of the charging port. Based on the above concept, the angle of rotation from the first direction to the second direction is greater than or equal to 90 degrees. Based on the above concept, the alignment assembly comprises a gear disc, wherein the drive section is a rack, the gear disc and the rack mesh with each other, and the gear disc rotates the container from the first direction to the second direction according to a drive stroke provided by the rack. The present invention further provides an alignment system for a semiconductor container adapted to a non-equilateral rectangular mask container. The alignment system for a semiconductor container comprises: a loading rail configured to receive and transport the non-equilateral rectangular mask container from a loading port; an alignment assembly arranged on a bottom side of the non-equilateral rectangular mask container; and a drive section arranged on the loading port or loading rail, wherein the alignment assembly interacts with the drive section to cause the alignment assembly to rotate the non-equilateral rectangular mask container from a first direction to a second direction according to a drive stroke provided by the drive section. Based on the concept described above, a lifting base is also provided to transport the non-equilateral rectangular mask container on the loading port. Based on the above concept, the alignment assembly includes a rotary seat, and the drive section is located at a loading position of the loading port, so that the non-equilateral rectangular mask container comes into contact with the drive section and, together with a movement stroke of loading the non-equilateral rectangular mask container, aligns itself by rotation when the non-equilateral rectangular mask container is at the loading position. Based on the above concept, the alignment assembly includes a rotary seat, and the drive section is located on the loading rail leading to an exposure device, so that the non-equilateral rectangular mask container or the rotary seat comes into contact with the drive section and, together with a movement stroke of loading the non-equilateral rectangular mask container, aligns itself by rotation when the non-equilateral rectangular mask container or the rotary seat is in the loading position. Based on the above concept, a rotation angle from the first direction to the second direction is greater than or equal to 90 degrees. Based on the above concept, the alignment assembly comprises a connecting rod and a rotary disk coupled to the connecting rod, the connecting rod being connected to the bottom of the non-equilateral rectangular mask container and configured to make contact with the drive section to rotate the non-equilateral rectangular mask container. Based on the above concept, the alignment assembly is a gear disc, the drive section is a rack, the gear disc and the rack are meshed with each other, and the gear disc rotates the non-equilateral rectangular mask container according to a drive stroke of the rack from the first direction to the second direction. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view of a non-equilateral rectangular mask container of the present invention; Fig. 2 is an exploded view of a non-equilateral rectangular mask container of the present invention; Figs. 3A to 3C are perspective views of a rotation process according to one embodiment of the present invention; Fig. 4 is a cross-sectional view of a base of a non-equilateral rectangular mask container according to one embodiment of the present invention; Figs. 5A to 5C are schematic representations of a rotation process according to another embodiment of the present invention; Fig. 6 is a cross-sectional view of a base of a non-equilateral rectangular mask container according to another embodiment of the present invention; Fig.Figures 7A to 7D are schematic representations of steps for unloading an alignment system for a semiconductor container and moving it in the direction of a rail into a charging port of the present invention; and Figures 8A to 8D are schematic representations of steps for changing the alignment in a charging rail of an alignment system for a semiconductor container of the present invention. DETAILED DESCRIPTION OF THE EMBODIMENTS The term “container” as described in the present invention generally refers to a container for receiving a mask and is not limited to a single container, a double container, an outer container or an inner container. The term “loading port” in the present invention generally refers to a device that transfers containers from a first environment to a second environment of a system, for example, from an atmospheric environment to a low-pressure environment. A “loading port” may include a drive device that moves a container, for example, a vertical elevator or a horizontal mobile conveyor belt. In some configurations, a drive device for a “loading port” may extend into a system, such that the portion of the “loading port” that extends into the system may be part of the “loading port”. The term "drive stroke" as described in the present invention refers to a process in which a stationary drive element comes into contact with a moving container and the drive element interacts with the container during this process (e.g., dynamically comes into contact). The drive element is in a stationary state relative to the moving container, but this does not necessarily mean that the drive element is completely stationary. The term "loading position" as described in the present invention refers to an initial position of a container that is about to enter a "loading track" and can be a position in a loading port, a position in a system cavity connected to the loading port, or a position between the loading port and the system cavity. The term "loading track" in the present invention generally refers to a guideway for transporting a container in a system cavity, for example, a horizontal conveyor belt or a vertical lift leading to an exposure cavity. The term ‘blocking zone’ described in the present invention refers to an area at the bottom of a container, wherein this area does not interfere with the operation of other mechanisms (e.g., a dynamic coupling slot or a dynamic coupling pin) at the bottom of the container. The terms “rotary seat” and “rotary disc” as described in the present invention refer to two different embodiments of an aligning assembly, as shown in Figs. 4 and 6. More precisely, the “rotary seat” and the “rotary disc” are each individually rotatably connected to the base of a container. An alignable semiconductor container of the present invention comprises a container and an alignment assembly 132 (which is described in detail below) arranged at the bottom of the container. The alignment assembly 132 is configured to interact with a drive section 5 when the container is placed on the loading port. The alignment assembly 132 rotates the container from a first direction to a second direction according to a drive stroke provided by the drive section 5. Figures 1 and 2 show a perspective view and an exploded view, respectively, of a non-equilateral rectangular mask container according to the present invention. The present invention provides an alignable semiconductor container adapted to a non-equilateral rectangular mask container 100. The non-equilateral rectangular mask container 100 comprises an outer container 10 and an inner container 20, which is housed within the outer container 10. The outer container 10 includes a door 13 and an outer lid 11, which can be engaged to form a receiving space for the inner container 20. The outer lid 11 has a handle 113 to facilitate holding or moving. The inner container 20 comprises a base 23 and a top lid 21, which can be joined to form a receiving space for a mask R. The non-equilateral rectangular mask container 100 has a long side and a short side. In the present invention, the alignment assembly 132 can, for example, be arranged on the underside of the outer container 10 and / or the inner container 20, for example on the door 13 and / or the base 23. In the following drawings, the alignment assembly 132 is shown by way of example in the door 13; however, the alignment assembly 132 is not limited to being arranged only in the door 13. Figures 3A to 3C show schematic representations of a rotation process of an alignable semiconductor container according to an embodiment of the present invention. Together with a movement stroke for loading the semiconductor container, the drive section 5, located at or near a loading position of a loading port 7, supplies the semiconductor container with a drive stroke to rotate it. In this embodiment, the drive section 5 comes into contact with the semiconductor container during a process in which the alignable semiconductor container moves from the loading port 7 to a cavity 9 and rotates the semiconductor container accordingly from a first direction to a second direction. In this embodiment, the loading port 7 is configured to support the semiconductor container, with the semiconductor container oriented with its longitudinal side towards the loading port 7 and the opening of the cavity 9.In other embodiments, the charging port 7 can also be configured such that the semiconductor container is aligned with its short side towards the charging port 7 and the opening of the cavity 9. Fig. 4 shows a cross-sectional view of the door 13 according to an embodiment of the present invention. The alignment assembly 132 is arranged at the bottom of the door 13. More precisely, the door 13 comprises a seat 131 and the alignment assembly 132, wherein the bottom of the seat 131 is provided with a receiving chamber 1311 and the alignment assembly 132 is arranged in the receiving chamber 1311 to prevent interference with the machine components. The alignment assembly 132 is rotatably connected to the seat 131. The alignment assembly 132 comprises a rotary seat 1321 and a connecting rod 1323. The connecting rod 1323 is formed on the rotary seat 1321 and rigidly connected to it. The alignment assembly 132 further comprises a bearing 1325, and the rotary seat 1321 is rotatably connected to the seat 131 via the bearing 1325. More precisely, the bearing 1325 surrounds the connecting rod 1323 and is arranged between the connecting rod 1323 and the seat 131, allowing the rotary seat 1321 to rotate relative to the seat 131. The connecting rod 1323 and the rotary seat 1321 can be formed in one piece or by a rigid connection of several components. In another embodiment, the alignment assembly 132 can include a damping assembly to prevent over-rotation between the seat 131 and the rotary seat 1321.In other embodiments, the bearing 1325 can be configured to provide a rotation angle in a minimum unit, for example 5 degrees or 15 degrees, to control the resolution of the rotation. The base of the non-equilateral rectangular mask container 100 comprises at least one set of positioning grooves 1327, which interact with and are positioned on at least one set of positioning pins of the loading port. In this embodiment, the positioning grooves 1327 are arranged on the base of the rotary seat 1321 to better interact with the positioning pins and to increase the stability of the non-equilateral rectangular mask container 100 during transport or loading. Referring again to Figures 3A to 3C, the non-equilateral rectangular mask container 100 is rotated from the first direction to the second direction during transport by the interaction of the drive section 5 and the aligning assembly 132. See Figure 3A, which shows a schematic representation of the non-equilateral rectangular mask container 100 located on the loading port 7. The non-equilateral rectangular mask container 100 can be placed on a support base (not shown), and the positioning groove 1327 is positioned on the loading port 7 by the positioning pin (not shown) to ensure that the non-equilateral rectangular mask container 100 is securely placed or transported. At this point, the non-equilateral rectangular mask container 100 is in a first orientation in which its long side faces the opening of the loading port 7. Referring to Fig. 3B, the drive section 5, which at this time is located at or near the loading port 7, provides a drive stroke during the movement of the non-equilateral rectangular mask container 100 from the loading port 7 to the cavity 9, in order to rotate the non-equilateral rectangular mask container 100 together with a loading stroke. More precisely, during the movement of the non-equilateral rectangular mask container 100 from the loading port 7 to the cavity 9, the rotary seat 1321 is set into rotation relative to the seat 131 by the drive section 5, since the positioning groove 1327 on the rotary seat 1321 is fixed to the positioning pin on the loading port 7, with the rotary seat 1321 coming into contact with the non-equilateral rectangular mask container 100. The angle of rotation is greater than or equal to 90 degrees.In this embodiment, the drive section 5 is configured to come into contact with the non-equilateral rectangular mask container 100 and exerts a horizontal force when the non-equilateral rectangular mask container 100 moves along a horizontal line, the horizontal force and a rotation axis providing a torque to drive the non-equilateral rectangular mask container 100 to rotate. The drive section 5 can come into contact with any part of the non-equilateral rectangular mask container 100, for example, but not limited to, the outer container 10 or the inner container 20. Finally, with reference to Fig. 3C, the non-equilateral rectangular mask container 100 moves further towards the cavity 9, and together with the stroke of loading the non-equilateral rectangular mask container 100, the drive section 5 comes into contact with the non-equilateral rectangular mask container 100 until the non-equilateral rectangular mask container 100 is positioned in a second direction, with its short side facing the opening of the loading port 7; that is, an alignment process in which the non-equilateral rectangular mask container 100 is rotated from the first direction to the second direction is completed. In this way, the non-equilateral rectangular mask container 100 can subsequently be more easily inserted into other machines to avoid undesirable effects on process efficiency.Preferably, the drive section 5 is designed to limit the rotational amplitude of the non-equilateral rectangular mask container 100 during the process of contact with and pressing against the non-equilateral rectangular mask container 100, in order to prevent over-rotation of the non-equilateral rectangular mask container 100. For example, the drive section 5 may have a guide surface. In other embodiments, at least one drive section 5 may be provided; for example, a first drive section is responsible for rotating the non-equilateral rectangular mask container 100, and a second drive section is responsible for preventing over-rotation of the non-equilateral rectangular mask container 100. Figures 5A to 5C show schematic representations of a rotation process of an orientable semiconductor container according to a further embodiment of the present invention. This embodiment corresponds to the preceding embodiment, wherein, in addition to the stroke of movement during insertion of the semiconductor container, the drive section 5, which is located at or near an insertion position of the loading port 7, imparts a drive stroke to the semiconductor container to change its orientation. The difference is that, in this embodiment, during the process in which the orientable semiconductor container moves from the loading port 7 to the cavity 9, the drive section 5 comes into contact with the alignment assembly of the semiconductor container and rotates the semiconductor container accordingly from the first direction to the second direction. Fig. 6 shows a cross-sectional view of the door 13 according to an embodiment of the present invention. The alignment assembly 132 is arranged on a bottom side of the door 13. More precisely, the door 13 comprises a seat 131 and an alignment assembly 132, wherein a base of the seat 131 is provided with a receiving chamber 1311 and the alignment assembly 132 is arranged in the receiving chamber 1311 in order to rotatably connect the alignment assembly 132 to the seat 131. The base of the non-equilateral rectangular mask container 100 comprises at least one set of positioning grooves 1327, which interact with and are positioned on at least one set of positioning pins of the loading port 7, and the gear disk 13231 is arranged in a locking zone of the positioning groove 1327 to prevent interference with other structures. In this embodiment, the positioning grooves 1327 are arranged on the base of the rotary disk 1321 to better interact with the positioning pins and to increase the stability of the non-equilateral rectangular mask container 100 during transport or loading. Referring again to Figures 5A to 5C, the non-equilateral rectangular mask container 100 is rotated from the first direction to the second direction during the transport process by the interaction of the drive section 5 and the alignment assembly 132. First, with reference to Figure 5A, a schematic representation of the non-equilateral rectangular mask container 100 located on the loading port 7 is shown. The non-equilateral rectangular mask container 100 is placed on a support base (not shown), and the positioning groove 1327 is positioned on the support base by the positioning pin (not shown) to ensure that the non-equilateral rectangular mask container 100 is securely positioned or transported. At this point, the non-equilateral rectangular mask container 100 is in a first orientation in which its long side faces the opening of the loading port 7. Referring to Fig. 5B, the drive section 5, which at this time is located at or near the loading port 7, provides a drive stroke during the movement of the non-equilateral rectangular mask container 100 from the loading port 7 to the cavity 9, in order to rotate the non-equilateral rectangular mask container 100 together with a movement stroke of the loading process. More precisely, during the process in which the non-equilateral rectangular mask container 100 moves from the loading port 7 to the cavity 9, since the positioning groove 1327 on the rotary disk 1321 is fixed to the loading port 7 by the positioning pin, the seat 131 is set into rotation relative to the rotary disk 1321 by the drive section 5, which comes into contact with the non-equilateral rectangular mask container 100.In this embodiment, the drive section 5 is a rack, the gear disc 13231 and the rack are meshed with each other, and the gear disc 13231 rotates the non-equilateral rectangular mask container 100 from the first direction to the second direction according to a drive stroke provided by the rack. The angle of rotation is greater than or equal to 90 degrees. Finally, referring to Fig. 5C, the non-equilateral rectangular mask container 100 moves further towards the cavity 9, and the drive section 5 is not in contact with the non-equilateral rectangular mask container 100 at this point. With the insertion stroke of the non-equilateral rectangular mask container 100, the non-equilateral rectangular mask container 100 is finally positioned in the second direction, with its short side facing the opening of the loading port 7, thus completing the change in orientation of the non-equilateral rectangular mask container 100. In this way, the non-equilateral rectangular mask container 100 can subsequently be more easily inserted into other machines to avoid undesirable effects on process efficiency. The present invention further provides an alignment system for a semiconductor container adapted to a non-equilateral rectangular mask container 100. The alignment system for a semiconductor container comprises: a loading rail configured to receive and transport the non-equilateral rectangular mask container 100 from a loading port 7; an alignment assembly 132 arranged on a bottom side of the non-equilateral rectangular mask container 100; and a drive element 5 arranged on the loading port 7 or the loading rail. By the interaction of the alignment assembly 132 and the drive element 5, the alignment assembly 132 rotates the non-equilateral rectangular mask container 100 from a first direction to a second direction according to a drive stroke provided by the drive element 5. Specifically, Figures 7A to 7D show schematic representations of the steps for unloading and moving the non-equilateral rectangular mask container 100 along a rail into a loading port of the present invention. First, with reference to Figure 7A, it is shown that when the non-equilateral rectangular mask container 100 is transported on the loading port 7, it is supported by a loading port base 71. The outer cover 11 is in a securely held position at this point. Referring to Fig. 7B and Fig. 7C, the loading port base 71 lowers, so that the outer cover 11 of the mask container is removed, the inner container 20 and the door 13 together with the loading port base 71 lower and enter an elevator module, the door 13 is pushed against a lifting base 73 and then the loading port base 71 is removed downwards to transport the door 13 on the lifting base 73. Referring to Fig. 7D, the lifting base 73 transports the inner container 20 and the door 13, and at this point the non-equilateral rectangular mask container 100 is in the first direction, with its long side facing the loading port 7. Next, the non-equilateral rectangular mask container 100 passes the rail and enters a machine cavity 8. Figures 8A to 8D show schematic representations of the steps for changing the orientation of an alignment system for a semiconductor container in a loading rail of the present invention. Reference is first made to Figure 8A, which shows a top view of Figure 7D. When the lifting base 73 carries the inner container 20 and the door 13 to move along the +Y direction within the loading port 7 and reaches the machine cavity 8, it continues to move along the +X direction. Referring to Figs. 8B and 8C, the drive section 5, located on the loading rail, works in conjunction with the alignment assembly 132 to change the orientation during a process in which the non-equilateral rectangular mask container 100 moves along the +X direction. The alignment assembly 132 is located at the bottom of the door 13. The seat 131 is driven to rotate relative to the turntable 1321 by the drive section 5 engaging with the alignment assembly 132. In this embodiment, the embodiment shown in Fig. 6 is taken as an example; that is, the drive section 5 is a rack, the alignment assembly 132 comprises the gear disc 13231, and the gear disc 13231 rotates the non-equilateral rectangular mask container 100 from the first direction to the second direction according to a drive stroke provided by the rack. In this embodiment, the drive section 5 is, for example, arranged on the loading rail; however, the present invention is not limited to this example. The drive section 5 can be located at or near a loading position of the loading port 7 in order to change the orientation during the process in which the non-equilateral rectangular mask container 100 moves along the +Y direction. With reference to Fig. 8D, once the alignment assembly 132 is separated from the drive section 5, the non-equilateral rectangular mask container 100 is finally moved together with the loading stroke in the second direction, in which its short side faces an opening of an exposure device (not shown) into which it is to be inserted, and the change of alignment is completed. It should be noted that while the drawings of the alignment system for a semiconductor container of this embodiment show the embodiment in Fig. 6 as an example, this does not necessarily mean that the alignment system is adapted only to the embodiment in Fig. 6, but can also be adapted in a similar way to the embodiment in Fig. 4. Although the alignment assembly 132 of this embodiment is, for example, arranged on the door 13, the alignment assembly 132 is not limited to being arranged only on the door 13, but can also be arranged on the base 23 of the inner container 20. For example, in the alignment system for a semiconductor container of this embodiment, the alignment assembly 132 can be arranged on the base 23 of the inner container 20, and the drive section 5 comes into contact with the inner container 20, as shown in Figs. 3A to 3C, to change the orientation of the inner container 20. With the alignable semiconductor container and the alignment system for a semiconductor container according to the embodiments of the present invention, a container can align itself rotationally in conjunction with a loading stroke, without the need to transport the container to a specific orientation machine. Thus, the problem of transportability issues when moving between different machines can be solved without unduly disrupting process efficiency.

Claims

Alignable semiconductor container adapted to a non-equilateral rectangular mask container, the alignable semiconductor container comprising: a container; and an alignment assembly arranged at a bottom of the container; wherein the alignment assembly is configured to interact with a drive section when the container is placed on a loading port, and the alignment assembly rotates the container from a first direction to a second direction in accordance with a drive stroke provided by the drive section. Alignable semiconductor container according to claim 1, wherein the alignment assembly comprises a rotary seat and the drive section is arranged at or near a loading position of the charging port, such that the container comes into contact with the drive section and aligns itself by rotation together with a movement stroke of loading the container when the container is at the loading position. Alignable semiconductor container according to claim 1, wherein the container comprises an outer container for receiving an inner container, wherein the inner container serves to receive a non-equilateral rectangular mask container, the outer container comprises a door formed with the aligning assembly, and when the outer container interacts with the drive section of the loading port to rotate, the inner container housed in the outer container can rotate relative to the aligning assembly to change direction. Alignable semiconductor container according to claim 1, wherein the container comprises an outer container for receiving an inner container, the inner container comprising a base formed with the aligning assembly, and when the base interacts with the drive section of the loading port to rotate, a non-equilateral rectangular mask container placed in the inner container rotates relative to the aligning assembly to change direction. Alignable semiconductor container according to claim 2, wherein the rotary seat is rotatably connected to the bottom of the container via a bearing. Alignable semiconductor container according to claim 1, wherein the bottom of the container is provided with at least one positioning groove which interacts with and can be positioned on at least one set of positioning pins of the charging port. Alignable semiconductor container according to claim 1, wherein a rotation angle from the first direction to the second direction is greater than or equal to 90 degrees. Alignable semiconductor container according to claim 1, wherein the alignment assembly comprises a gear disc, the drive section is a rack, the gear disc and the rack are in engagement with each other, and the gear disc rotates the container from the first direction to the second direction according to a drive stroke provided by the rack. An alignment system for a semiconductor container adapted to a non-equilateral rectangular mask container, the alignment system for a semiconductor container comprising: a loading rail configured to receive and transport the non-equilateral rectangular mask container from a loading port; an alignment assembly arranged on the underside of the non-equilateral rectangular mask container; and a drive section arranged on the loading port or loading rail; wherein the alignment assembly interacts with the drive section such that the alignment assembly rotates the non-equilateral rectangular mask container from a first direction to a second direction after a drive stroke provided by the drive section. Alignment system for a semiconductor container according to claim 9, further comprising a lifting base configured to transport the non-equilateral rectangular mask container on the loading port. Alignment system for a semiconductor container according to claim 9, wherein the alignment assembly comprises a rotary seat, and the drive section is located at a loading position of the loading port, such that the non-equilateral rectangular mask container comes into contact with the drive section and aligns itself rotationally together with a movement stroke of loading the non-equilateral rectangular mask container when the non-equilateral rectangular mask container is at the loading position. Alignment system for a semiconductor container according to claim 9, wherein the alignment assembly comprises a rotary seat, and the drive section is located on the loading rail leading to an exposure device, such that the non-equilateral rectangular mask container or the rotary seat, together with a movement stroke of loading the non-equilateral rectangular mask container, rotates and aligns when the non-equilateral rectangular mask container or the rotary seat comes into contact with the drive section. Alignment system for a semiconductor container according to claim 9, wherein a rotation angle from the first direction to the second direction is greater than or equal to 90 degrees. Alignment system for a semiconductor container according to claim 9, wherein the alignment assembly comprises a connecting rod and a rotary disk coupled to the connecting rod, and the connecting rod is connected to the bottom of the non-equilateral rectangular mask container and is configured to come into contact with the drive section to rotate the non-equilateral rectangular mask container. Alignment system for a semiconductor container according to claim 9, wherein the alignment assembly is a toothed disk, the drive section is a rack, the toothed disk and the rack are in engagement with each other, and the toothed disk rotates the non-equilateral rectangular mask container from the first direction to the second direction according to a drive stroke of the rack.

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