Magnetic sensor

Abstract

Magnetic sensor, comprehensive: a magnetic convergence plate; an electromagnetic conversion element located on one surface side of the magnetic convergence plate; at least two wires connected to the electromagnetic conversion element; and a circuit which is connected to at least two wires and receives a signal from the electromagnetic conversion element, wherein the at least two wires cross between the electromagnetic conversion element and the circuit, being separated from each other in a direction perpendicular to one surface of the magnetic convergence plate in order to form a compensation loop between a crossing of the at least two wires and the circuit, and in a top view, viewed in a direction perpendicular to one surface of the magnetic convergence plate, at least a part of an area occupied by the compensation loop is covered by the magnetic convergence plate.

Description

1. TECHNICAL AREA

[0001] The present invention relates to a magnetic sensor. 2. STATE OF THE ART

[0002] A magnetic sensor is known that is formed by combining a thin-film-like plate consisting of a ferromagnetic main part, such as a Ni-Fe alloy (referred to as a magnetic convergence plate), and a pair of Hall elements, and detects a magnetic field parallel to a substrate (referred to as a transverse magnetic field) that supports the plate and the pair of Hall elements (e.g., patent documents 1 to 3). This magnetic sensor utilizes a function for converting the transverse magnetic field into magnetic fields perpendicular to the substrate (referred to as vertical magnetic fields) by attracting the lines of magnetic force of the transverse magnetic field to the magnetic convergence plate. Because the attraction of the lines of magnetic force by the magnetic convergence plate is particularly intense near its end portions, the Hall elements are arranged near the end portions of the magnetic convergence plate.

[0003] The directions of the vertical magnetic fields resulting from the conversion of the transverse magnetic field by the magnetic convergence plate are opposite to the direction perpendicular to the substrate (referred to as the perpendicular direction) at two symmetrical points, which are one end and the other end of the magnetic convergence plate. Accordingly, the Hall elements are arranged at these two symmetrical positions.If, in addition to the transverse magnetic field, another magnetic field, such as a background magnetic field, is also applied because the directions of the vertical magnetic fields associated with the other magnetic field are the same at the two symmetrical positions, only the transverse magnetic field can be detected by calculating the difference in output voltages of the two Hall elements and thereby canceling out the output voltages due to the other magnetic field. Conversely, by calculating the sum of the output voltages of the two Hall elements and thereby canceling out one output voltage due to the transverse magnetic field, only the vertical magnetic fields of the other magnetic field can be detected.

[0004] In the prior art, such a magnetic sensor is used to detect the geomagnetic field or to detect slow changes in a magnetic field over time, such as a magnetic field caused by the rotation of a rotating body. In recent years, however, they have been used to detect magnetic fields caused by current flowing through conductors. For example, in vector control of motors, in inverters, or similar applications, overcurrent detection, the applied magnetic fields change rapidly. Therefore, fast response times from the magnetic sensors are required.

[0005] Particularly in automotive applications, if a magnetic sensor designed as a coreless sensor using a magnetic convergence plate is used instead of a magnetic sensor using a magnetic core that collects lines of magnetic force and Hall elements for vertical magnetic field detection, it becomes sensitive to the influence of an interfering magnetic field (i.e., a vertical magnetic field). If the vertical magnetic fields are not homogeneous around the magnetic convergence plate and the Hall elements, the output voltages due to the vertical magnetic fields will not be completely canceled out. Due to the difference in output voltages between the two Hall elements and their remaining components, the vertical magnetic fields may still be detected to some extent.

[0006] See also patent documents 4 and 5. Patent document 1: JP 2012 - 047 708 A Patent document 2: 2013 - 228 222 A Patent document 3: US 5,942,895 A Patent document 4: US 2014 / 0 266 183 A1 Patent document 5: JP 2015 - 132 567 A

[0007] However, because in conventional configurations Hall elements are located near the ends of a magnetic convergence plate, if wires connected to the Hall elements and receiving electromotive forces form closed loops with respect to the magnetic fields, induced electromotive forces are generated in the wires, and the response characteristics of the magnetic sensor are degraded. In automotive applications, an induced electromotive force is also generated due to an interfering magnetic field, and a degradation of the magnetic sensor's response characteristics cannot be prevented.

[0008] In this respect, it is an object of the present invention to provide a magnetic sensor that inhibits the influence of an induced electromotive force generated in wires connected with Hall elements. General Revelation (Point 1)

[0009] A magnetic sensor can contain a magnetic convergence plate.

[0010] The magnetic sensor may contain an electromechanical conversion element located on one surface side of the magnetic convergence plate.

[0011] It may contain at least two wires connected to the electromagnetic conversion element.

[0012] The magnetic sensor may contain a circuit connected to at least two wires and receiving a signal from the electromagnetic conversion element.

[0013] The at least two wires can cross between the electromagnetic conversion element and the circuit, while being separated from each other in a direction perpendicular to one surface of the magnetic convergence plate, in order to form a compensation loop between a crossing of the at least two wires and the circuit.

[0014] In a top view, viewed in a direction perpendicular to one surface of the magnetic convergence plate, at least part of an area occupied by the compensation loop may be covered by the magnetic convergence plate. (Point 2)

[0015] At least part of the area occupied by the compensation loop can be located on one surface side of a corner part of the magnetic convergence plate. (Point 3)

[0016] The compensation loop can cancel out an induced electromotive force caused by the at least two wires between the electromagnetic conversion element and the crossing of the at least two wires. (Point 4)

[0017] In a top view, viewed in the direction perpendicular to one surface of the magnetic conversion plate, at least part of the electromagnetic conversion element may be covered by the magnetic convergence plate. (Point 5)

[0018] The magnetic sensor may also contain another magnetic convergence plate, which is arranged separately from the magnetic convergence plate.

[0019] The magnetic sensor may also contain another electromagnetic conversion element located on one surface side of the other magnetic convergence plate.

[0020] The magnetic sensor may also contain at least two other wires connected to the other electromagnetic conversion element.

[0021] The circuit can still be connected to the other two wires to receive a signal from the other electromagnetic conversion element.

[0022] Between the other electromagnetic conversion element and the circuit, the two other wires can cross in a direction parallel to a surface of the other magnetic convergence plate, while being separated from each other in a direction that crosses a surface of the other magnetic convergence plate, and form another compensation loop between a crossing of the two other wires and the circuit, and The magnetic convergence plate, the electromagnetic conversion element and the compensation loop, and the other magnetic convergence unit, which includes the other electromagnetic conversion element and the other compensation loop, can be arranged symmetrically about a direction parallel to a surface of the magnetic convergence plate. (Point 6)

[0023] The circuit can calculate a difference in the respective output signals of one electromagnetic conversion element and the other electromagnetic conversion element. (Point 7)

[0024] A magnetic sensor can contain a magnetic convergence plate formed on a substrate.

[0025] The magnetic sensor may contain a contamination diffusion layer that forms on the substrate.

[0026] The magnetic sensor can contain first to fourth connections that are connected to the contamination diffusion layer.

[0027] The magnetic sensor may contain a first wire that is connected to the first terminal.

[0028] The magnetic sensor may contain a third wire connected to the third terminal, which is located opposite the first terminal.

[0029] The magnetic sensor may contain a second wire that is connected to the second terminal.

[0030] The magnetic sensor may contain a fourth wire connected to the fourth terminal, which is located opposite the second terminal.

[0031] The first wire and the third wire can cross while separated from each other in a direction perpendicular to the substrate and form a first wire loop after the crossing, and at least part of an area occupied by the first wire loop is covered by the magnetic convergence plate in a top view viewed in the direction perpendicular to the substrate. (Point 8)

[0032] The second wire and the fourth wire can cross each other while separated from each other in a direction perpendicular to the substrate and form a second wire loop after the crossing, and at least part of an area occupied by the second wire loop can be covered by the magnetic convergence plate in a top view viewed in the direction perpendicular to the substrate. (Point 9)

[0033] The areas covered by the first wire loop can overlap at least partially in the direction perpendicular to the substrate. (Point 10)

[0034] The magnetic sensor may also contain a switch connected to the first to fourth wires.

[0035] The first wire loop can be formed between a crossing of the first and third wires and the switch.

[0036] The second wire loop can be formed between a crossing of the second and fourth wires and the switch. (Point 11)

[0037] The contaminant diffusion layer can be an electromagnetic conversion element. (Point 12)

[0038] The first and second connections can be opposite each other, and the third and fourth connections can be opposite each other. (Point 13)

[0039] The first to fourth connections and the first to fourth wires can be integrated on the substrate. (Point 14)

[0040] A first state, in which the first and third connections are power supply connections and the second and fourth connections are output connections, and a second state, in which the first and third connections are output connections and the second and fourth connections are power supply connections, can be switched alternately from one to the other. BRIEF DESCRIPTION OF THE IMAGES Fig. Figure 1 shows a configuration of a cross-shaped symmetrical Hall element according to one embodiment. Fig. Figure 2A shows a positional relationship between a pair of Hall elements and a pair of convergence plates in a magnetic sensor according to one embodiment. Fig. 2B shows a cross-sectional view along a line L2-L2 in Fig. 2A is shown. Fig. Figure 3 is a block diagram showing a configuration of a signal processing system in a magnetic sensor according to one embodiment. Fig. Figure 4A shows a principle that explains how induced electromotive forces are caused by wires connected to Hall elements. Fig. 4B is a cross-sectional view drawn along a line L4-L4 in Fig. 4 is taken. Fig. Figure 5A shows an arrangement of a pair of compensation loop regions that cancel induced electromotive forces in a magnetic sensor according to one embodiment. Fig. 5B is a cross-sectional view drawn along a line L5-L5 in Fig. 5A is taken. Fig. 6 Positional relationship between a pair of Hall elements, a pair of magnetic convergence plates and a pair of compensation loop areas in a magnetic sensor according to one variant. Fig. Figure 7 shows a positional relationship between a pair of Hall elements, a pair of magnetic convergence plates and a pair of compensation loop areas in a magnetic sensor according to a second variant. Fig. Figure 8 shows a positional relationship between two pairs of Hall elements, a pair of magnetic convergence plates and two pairs of compensation loop areas in a magnetic sensor according to a third variant. Fig. Figure 9 is a block diagram showing a configuration of a signal processing system in a case where the Hall elements are caused to perform a current operation in the magnetic sensor according to the third variant. Fig. Figure 10 shows a positional relationship between two pairs of Hall elements, a pair of magnetic convergence plates and two pairs of compensation loop areas in a magnetic sensor according to a fourth variant. Fig. Figure 11 shows a positional relationship between a pair of Hall elements, a pair of magnetic convergence plates and a pair of compensation loop areas in a magnetic sensor according to a fifth variant. Fig. Figure 12 shows a positional relationship between a pair of Hall elements, a magnetic convergence plate and a pair of compensation loop areas in a magnetic sensor according to a sixth variant. Fig. 13 is a positional relationship between two pairs of Hall elements, a pair of magnetic convergence plates and two pairs of compensation loop areas in a magnetic sensor according to a seventh variant. DESCRIPTION OF EXAMPLE EXECUTION FORMS

[0041] The following describes, in embodiments of the present invention, a magnetic detection device (referred to as a magnetic sensor) according to the present invention with reference to the figures. The embodiments do not limit the invention according to the claims, and all combinations of the features described in the embodiments are not necessarily essential to the means provided by aspects of the present invention. Corresponding parts across all figures are designated by the same symbols, and their explanation is omitted where necessary.

[0042] As an electromagnetic conversion element with an electromagnetic conversion function, there is mainly a so-called symmetrical Hall element, to which a rotating current method can be applied.

[0043] Fig. Figure 1 shows a configuration of a circular symmetrical Hall element. The symmetrical Hall element 100 has a cross-shaped symmetrical sensitive part 105. Beneath four overhanging ends 101, 102, 103, and 104 of the magnetically sensitive part 105, the two overhanging ends 101 and 103, located on the top and bottom surfaces in the figure with the center point of the magnetically sensitive part 105 between them, are equipped with Hall element power supply terminals A and B, and the two overhanging ends 102 and 104, located on the left and right surfaces in the figure with the center point of the magnetically sensitive part 105 between them, are equipped with Hall electromotive voltage output terminals B and D, respectively.

[0044] The symmetrical Hall element is a Hall element whose geometric shape remains the same even if the arrangement of one pair of Hall element power supply terminals and the arrangement of one pair of electromotive voltage output terminals are swapped; in other words, it is a Hall element whose overall shape is rotationally symmetrical four times about the axis perpendicular to the paper surface passing through its center point (not shown in the figure). Accordingly, the symmetrical Hall element 100 can use the power supply terminals as output terminals and the output terminals as power supply terminals.In this context, the Hall element power supply terminals A and C are also referred to as power supply terminals or terminals A and C in the present description, and the Hall electromechanical voltage output terminals B and D are also referred to as output terminals or terminals B and D.

[0045] Fig. 2A and Fig. Figure 2B shows a positional relationship between a pair of Hall elements and a pair of magnetic convergence plates in a magnetic sensor 10 according to the present embodiment. Fig. Figure 2A shows their positional relationship in a top view and Fig. 2B shows their positional relationship in a cross-section that follows a line L2-L2 in Fig. 2A is taken. The magnetic sensor 10 contains a substrate 205, a pair of magnetic convergence plates 200 and a pair of Hall elements 201 and 202.

[0046] In this example, substrate 205 is a silicon substrate and is equipped with a wiring layer 204 and a protective film 203 on its upper surface. The wiring layer 204 is an insulating layer that is to be fitted with wiring connected to the terminals of one pair of Hall elements 201 and 202. The protective film 203 is a thin film that covers and protects the wiring layer 204.

[0047] The pair of magnetic convergence plates 200 have isosceles trapezoidal shapes and are arranged on one side and the other side on the protective layer 203 in the left / right direction in the figure, with their respective upper sides facing each other.

[0048] The pair of Hall elements 201 and 202 form a contaminant diffusion layer on the substrate 205, have surfaces exposed on the upper surface of the contaminant diffusion layer, and are formed with their surfaces covered by the wiring layer 204. The power supply connections A and C and the output connections B and D are symmetrically provided in the Hall elements 201 and 202. The pair of Hall elements 201 and 202 is arranged at one end of the pair of magnetic convergence plates 200, that is, directly below the upper sides of the isosceles trapezoids. This means that half of the Hall element 201, which contains the terminals C and D, is covered by a magnetic convergence plate 201, and half of the Hall element 202, which contains the terminals C and D, is covered by the other magnetic convergence plate 200.

[0049] Due to this arrangement of the one pair of Hall elements 201 and 202 relative to the one pair of magnetic convergence plates 200 and these shapes of the one pair of magnetic convergence plates 200, the magnetic fluxes of a transverse magnetic field oriented parallel to the substrate enter the one pair of magnetic convergence plates 200 from their bases, are condensed by the pointed shapes of the isosceles trapezoids to increase the magnetic flux density, and exit from the top surfaces of the magnetic convergence plates 200; thereby, the transverse magnetic field is converted into vertical magnetic fields of high intensity, which are captured by the Hall elements 201 and 202 directly below the top surfaces.

[0050] Fig. Figure 3 shows a configuration of a signal processing system in the magnetic sensor 10 according to the present embodiment. The signal processing system comprises a Hall element actuator circuit 305, a signal processing circuit 303, and an amplifier or comparator 304. The Hall element actuator circuit 305 is connected via wires to the power supply terminals A and C of the Hall elements 201 and 202 to send signals to the Hall elements, respectively. The signal processing circuit 303 is connected via wires to the output terminals B and D of the Hall elements 201 and 202 to receive Hall electromotive forces (output signals they contain) emitted by the respective elements and performs operations, such as addition or subtraction, and outputs the results.The amplifier or comparator 304 is connected to the signal processing circuit 303 and amplifies the operation results input by the signal processing circuit 303, or compares the operation results with reference to an output of the results as magnetic sensor outputs. The amplifier or comparator 304 may be equipped with a filter and provide bandwidth control.

[0051] Fig. 4A and Fig. Figure 4B shows a principle that explains how injected electromotive forces are caused by wires connected to the Hall elements 201 and 202 in a conventional configuration of a magnetic sensor. Fig. Figure 4A shows a top view of the Hall element drive circuit 305 and the signal processing circuit 303, which are located in the Fig. The signal processing system shown in Figure 3 includes, together with the pair of Hall elements 201 and 202 and the pair of magnetic convergence plates 200 in the magnetic sensor 10 according to the diagram shown in Figure 3. Fig. 2A embodiment shown. Fig. Figure 4B shows in particular an arrangement of wires in a cross-section extending along a line L4-L4 in Fig. 4A is taken. The Hall element drive circuit 305 is connected to the power supply terminals A and C of the Hall element 201 by wires N401 and N403 respectively, and to the power supply terminals A and C of the Hall element 202 by wires N405 and N407 respectively. The signal processing circuit 303 is connected to the output terminals B and D of the Hall element 201 by wires N402 and N404 respectively, and to the output terminals B and D of the Hall element 202 by wires N406 and N408 respectively.

[0052] Wires N402 and N404 form a closed loop region S401, which contains the Hall element 201 between it and the signal processing circuit 303. Wires N406 and N408 also form a closed loop region S402, which contains the Hall element 202 between it and the signal processing circuit 303. These closed loops S401 and S402, together with the Hall elements 201 and 202 respectively, are positioned near the end portions of the magnetic convergence plates 200, where magnetic flux densities are high. If a transverse transition magnetic field is applied from left to right in the figure, a magnetic field enters the Hall element 201 in the direction from the near side to the far side on the paper surface. Therefore, a counterclockwise induced electromotive force is generated in the closed loop area S401, which contains the Hall element 201, in order to act against this magnetic field.Furthermore, a magnetic field enters the Hall element 202 in the direction from the far side towards the near side on the paper surface; therefore, a clockwise induced electromotive force is generated in the closed loop area 402 containing the Hall element 202 to act against this magnetic field.

[0053] A magnetic sensor output VO is derived. If a transverse magnetic field is to be detected, the signal processing circuit 303 calculates the difference in the respective output signals V1 and V2 of one pair of Hall elements 201 and 202. In addition to an electromotive Hall force Vh1 output by Hall element 201, the output signal Vh1 contains an induced electromotive force Vind1 caused by the closed loop region S401. That is, V1 = Vh1 - Vind1. In addition to an electromotive Hall force Vh2 output by Hall element 202, the output signal V2 contains an induced electromotive force Vind2 caused by the closed loop region S402. That is, V2 = -Vh2 + Vind2.An induced electromotive force Vind is generally given by Vind = -dφ / dt = d(BS) / dt using time t, a magnetic flux density B, and the area S of a closed loop region. Accordingly, a magnetic sensor output VO is given by equation (1). VO=V1−V2=(Vh1+Vh2)−(Vind1+Vind2)

[0054] As can be seen from equation (1), due to an induced electromotive force (Vind1+Vind2) generated to counteract an electromagnetic Hall force (Vh1+Vh2) in the magnetic sensor output VO, responses from a magnetic sensor are delayed.

[0055] Furthermore, a case is considered in which vertical magnetic fields are superimposed on a transverse magnetic field. Because the electromotive Hall forces Vh1v and Vh2v act on the Hall elements 201 and 202, and the induced electromotive forces Vind1v and Vind2v act on the closed loop regions S401 and S402 due to vertical magnetic fields: Output signal V1 of the Hall element 201=(Vh1−Vind1)+(Vh1v−Vind1v) Output signal V2 of the Hall element 202=(Vh2−Vind2)+(Vh2v−Vind2v).

[0056] Accordingly, the magnetic sensor output VO is given by equation (2) VO=V1−V2=(Vh1+Vh2)−(Vind1+Vind2)+(Vh1v−Vh2v)−(Vind1v−Vind2v)

[0057] If one pair of magnetic convergence plates 200 is arranged geometrically symmetrically and one pair of Hall elements 201 and 202 and the peripheral wires are arranged symmetrically because Vh1=Vh2=Vh, Vind1=Vind2=Vind, Vh1v=Vh2v and Vind1v=Vind2v, the magnetic sensor output VO can be modified as expressed by equation (3). VO=2Vh−2Vind

[0058] It can be seen from equation (3) that only a transverse magnetic field can be detected, even if vertical magnetic fields are superimposed on the transverse magnetic field. However, if there is an offset of one pair of magnetic convergence plates 200, such that a non-uniform vertical magnetic field is applied to the Hall elements 201 and 202, to the pair of Hall elements 201 and 202 and the peripheral wires during manufacturing, components of the vertical magnetic field, expressed by the third and fourth parts on the right-hand side of equation (2), will not be zero, thus further degrading the response characteristics of a magnetic sensor.

[0059] Fig. 5A and Fig. Figure 5B shows an arrangement of a pair of compensation loop regions S501 and S502 that cancel out induced electromotive forces in the magnetic sensor 10 according to the present embodiment and shows in particular a positional relationship with the pair of Hall elements 201 and 202 and the pair of magnetic convergence plates 200. Fig. Figure 5A shows a top view of the Hall element drive circuit 305 and the signal processing circuit 303, which are located in the Fig. 3 signal processing system shown together with the pair of Hall elements 201 and 202 and the pair of magnetic convergence plates 200 in the magnetic sensor 10 according to the in Fig. 2A shown embodiment are included. Fig. Figure 5B shows in particular an arrangement of the compensation loop area S501 in a cross-section extending along a line L5-L5 in Fig. 5A is taken.

[0060] In the wiring layer 204, a compensation loop region S501 is formed, which compensates an induced electromotive force generated in the closed loop region S401 in the wires N402 and N404, which are connected to the output terminals B and D of the Hall element 201, respectively. Between the Hall element 201 and the signal processing circuit 303, the wires N402 and N404 cross once in a direction parallel to the substrate 205, being separated from each other in the depth direction of the substrate 205, and form the compensation loop region S501 between the crossing and the signal processing circuit 303, particularly near a corner part of the magnetic convergence plate 200, wherein the compensation loop region S501 contains the corner part in a top view.In a top view, wires N402 and N404 have a crossing point, and in a cross-sectional view, wires N402 and N404 are separated from each other at the crossing point in the depth direction. That is, wires N402 and N404 have an oblique positional relationship. At least part of an area occupied by the compensation loop region S501 is covered by the magnetic convergence plate 200 in a top view in the depth direction of the substrate 205.

[0061] Similarly, in the wiring layer 204, the compensation loop region S502, which compensates an induced electromotive force caused by the closed loop region S402, is formed in the wires N406 and N408, which are connected to the output terminals B and D of the Hall element 202, respectively. Between the Hall element 202 and the signal processing circuit 303, the wires N406 and N408 cross once in a direction parallel to the substrate 205, being separated from each other in the depth direction of the substrate 205, and form the compensation loop region S502 between the crossing and the signal processing circuit 303, particularly near a corner part of the magnetic convergence plate 200, wherein the compensation loop region S502 contains the corner part in a top view.At least part of an area occupied by the compensation loop area S502 is covered by the magnetic convergence plate 200 in a top view in the depth direction of the substrate 205.

[0062] A principle is explained that describes how an induced electromotive force, which is caused in the closed loop area S401, is compensated by the compensation loop areas S501.

[0063] It is assumed that, as in Fig. Figure 5A shows a temporary transverse magnetic field applied from left to right in the figure. The transverse magnetic field is converted into a vertical magnetic field by the magnetic convergence plate 200 on the left side of the figure and enters the Hall element 201, i.e., the closed loop region S401 from the near side towards the far side on the paper surface, and also enters the compensation loop region S501. This generates counterclockwise induced electromotive forces for both the closed loop region S401 and the compensation loop region S501 to counteract the magnetic field. The wires N402 and N404, which form the closed loop region S401 and the compensation loop region S501, intersect once between the closed loop region S401 and the compensation loop region S501.The induced electromotive force generated in the compensation loop region S501 differs in one direction from that of the induced electromotive force generated in the closed loop region S401 and cancels it out.

[0064] The transverse magnetic field is also converted into a vertical magnetic field by the magnetic convergence plate 200 on the right side of the figure, enters the Hall element 202, i.e., the closed loop region S402 from the far side towards the near side in the paper surface, and also enters the compensation loop region S502. This generates counterclockwise induced electromotive forces for both the closed loop region S402 and the compensation loop region S502 to counteract the magnetic field. The wires N406 and N408, which form the closed loop region S402 and the compensation loop region S502, intersect once between the closed loop region S402 and the compensation loop region S502.The induced electromotive force generated in the compensation loop region S502 is accordingly in a direction different from that of the induced electromotive force generated in the compensation loop region S502, and cancels it out.

[0065] The compensation loop regions S501 and S502 are preferably arranged in the same directions as those of the closed loop regions S401 and S402, for which the compensation-target-induced electromotive forces are generated. The compensation loop regions S501 and S502 are preferably arranged near corner portions of the magnetic convergence plates 200. Magnetic fields with higher intensities than those entering the closed loop regions S401 and S402 thus enter the compensation loop regions S501 and S502, and induced electromotive forces generated in the loop regions S401 and S402 cancel each other out with small loops.If magnetic fields entering the compensation loop areas S501 and S502 in directions different from those entering loop areas S401 and S402, the frequency of wire crossings can be set to zero or two.

[0066] The magnetic sensor output VO is derived in a case where induced electromotive forces generated in the closed loop regions S401 and S402 are compensated by the compensation loop regions S501 and S502. Assuming that the induced electromotive forces generated in the compensation loop regions S501 and S502 are Vind1c and Vind2c: Output signal V1 of the Hall element 201=Vh1−Vind1+Vind1c Output signal V2 of the Hall element 202=−Vh2+Vind2−Vind2c3

[0067] If a transverse magnetic field is to be detected, the signal processing circuit 303 accordingly calculates the difference in the respective output signals V1 and V2 of one pair of Hall elements 201 and 202; the magnetic sensor output VO is thus given by equation (4). VO=V1−V2=(Vh1+Vh2)−(Vind1−Vind1c)−(Vind2−Vind2c)

[0068] As can be shown in equation (4), induced electromotive forces caused in the closed loop region S401 and S402 are canceled out in the magnetic sensor output VO by induced electromotive forces caused in the compensation loop regions S501 and S502, and the response characteristics of the magnetic sensor 10 can be compensated.

[0069] Furthermore, a case is considered in which vertical magnetic fields are superimposed on a transverse magnetic field. Assuming that the induced electromotive forces caused in the compensation loop regions S501 and S502 due to vertical magnetic fields are Vind1vc and Vind2vc: Output signal V1 of the Hall element 201=(Vh1−Vind1+Vind1c)+(Vh1v−Vind1v+Vind1vc) Output signal V2 of the Hall element 202=(−Vh2−Vind2+Vind2c)+(Vh2v−Vind2v+Vind2vc)

[0070] Accordingly, a magnetic sensor output VO is given by equation (5). VO=(Vh1+Vh2)−(Vind1−Vind1c)−(Vind2−Vind2c)+(Vh1v−Vh2v)−(Vind1v−Vind1vc)−(Vind2v−Vind2vc)

[0071] If the one pair of magnetic convergence plates 200 is arranged geometrically symmetrically, then the one pair of Hall elements 201 and 202 and the peripheral wires are also arranged symmetrically, and induced electromotive forces that are caused in the closed loop regions S401 and S402 are completely canceled out by the compensation loop regions S501 and S502, because Vind1=Vind1c, Vind2=Vind2c, Vind1v=Vind1vc and Vind2v=Vind2vc, the magnetic sensor output VO is modified as expressed by equation (6). VO=2Vh

[0072] It can be seen from equation (6) that only a transverse magnetic field can be detected and the response characteristics of the magnetic field sensor 10 can be compensated, even if vertical magnetic fields are superimposed on the transverse magnetic field. It can also be seen that, even if a non-uniform vertical magnetic field is applied to the Hall elements 201 and 202 due to an alignment error of one pair of magnetic convergence plates 200, one pair of Hall elements 201 and 202, and the peripheral wires during manufacturing, a deterioration of the response characteristics of the magnetic sensor 10 can be inhibited.

[0073] Instead of the crossing wires N402 and N404, which pass each other above or below, or in addition to this feature, for example at least one of the wires N402 and N401 can be equipped with a compensation wiring section, such as a winding, to generate an induced electromotive force in the opposite direction to an electromotive force caused in the closed loop area S402 due to a magnetic field applied to it.

[0074] Fig. Figure 6 shows a positional relationship between the pair of Hall elements 201 and 202, the pair of magnetic convergence plates 200 and the pair of compensation loop areas S501 and S502 in a magnetic sensor 11 according to one variant. Fig. Figure 6 shows a top view of the Hall element drive circuit 305 and the signal processing circuit 303, which is described in Fig. 3 signal processing system shown together with the pair of Hall elements 201 and 202 and the pair of convergence plates 200 in the magnetic sensor according to the in Fig. The embodiment shown in Figure 2A is included. In the magnetic sensor 11 according to this variant, the Hall elements 201 and 202 are arranged directly beneath the magnetic convergence plates 200. Otherwise, it is similar to the magnetic sensor 10 mentioned above. The compensation loop regions S501 and S502 are preferably arranged such that the directions of magnetic fields entering them are the same as the directions of magnetic fields entering the closed loop regions S401 and S402, for generating the electromotive forces induced to achieve the compensation goal.

[0075] When each component is heated by heat entering from the outside of the magnetic sensor 11, a large thermal load is generated, particularly in close proximity to an end part of the magnetic convergence plates 200, due to the difference in the coefficients of thermal expansion between the magnetic convergence plates 200 and the substrate 205. With this in mind, the Hall elements 201 and 202 in the magnetic sensor 11 are arranged in this variant near the end parts of the magnetic convergence plates 200, but separated from the area where a large thermal load is generated. However, magnetic fields can enter and be converted into high-intensity vertical magnetic fields.

[0076] Fig. Figure 7 shows a positional relationship between the one pair of Hall elements 201 and 202, the one pair of magnetic convergence plates 200 and the one pair of compensation loop areas S501 and S502 in a magnetic sensor 12 according to a second variant. Fig. Figure 7 shows a top view of the Hall element drive circuit 305 and the signal processing circuit 303, which are located in the Fig. 3 signal processing system shown together with the pair of Hall elements 201 and 202 and the pair of magnetic convergence plates 200 in the magnetic sensor 10 according to the in Fig. The embodiment shown in Figure 2A is included. In the magnetic sensor 12 according to the second variant, the Hall elements 201 and 202 are completely positioned away from directly below the magnetic convergence plates 200 and between the pair of magnetic convergence plates 200 in a top view. Otherwise, it is similar to the magnetic sensor 11 according to the first variant. The compensation loop regions S501 and S502 are desirablely arranged such that the directions of a magnetic field entering them are the same directions of magnetic fields entering the closed loop regions S401 and S402 for generating the compensation target-induced electromotive forces.

[0077] Fig. Figure 8 shows a positional relationship between two pairs of Hall elements 801, 802, 803 and 804, one pair of magnetic convergence plates 200 and two pairs of compensation loop regions S811, S812, S813 and S814 in a magnetic sensor 13 according to a third variant. The magnetic sensor 13 includes a substrate (not shown) containing one pair of magnetic convergence plates 200, the two pairs of Hall elements 801, 802, 803 and 804, and two pairs of signal processing circuits and Hall element drive circuits 805 and 806.

[0078] The substrate (not shown) is, for example, a silicon substrate and is set up similarly to the aforementioned substrate 205.

[0079] One pair of magnetic convergence plates 200 has isosceles shapes and is arranged on one side and the other side of the substrate (a protective layer contained therein) in the left / right direction in the figure, with their respective upper sides facing each other.

[0080] The two pairs of Hall elements 801, 802, 803, and 804 are formed on the substrate, but their surfaces are covered by a wiring layer. In Hall elements 801 and 803 and Hall elements 802 and 804, the power supply terminals A and C and the output terminals B and D are symmetrically arranged. Hall elements 801 and 802 are located on the top and bottom surfaces, respectively, at one end of the magnetic convergence plate 200 on the left side of the figure, i.e., near an upper side of the isosceles trapezoid. Hall elements 802 and 804 are located on the top and bottom surfaces, respectively, at one end of the magnetic convergence plate 200 on the right side of the figure, i.e., near the upper side of the isosceles trapezoid.Half of the Hall elements 801 and 803, which contain the terminals C and D, are covered by the magnetic convergence plate 200 on the left side of the figure, and half of the Hall elements 802 and 804, which contain the terminals C and D, are covered by the magnetic convergence plate 200 on the right side of the figure.

[0081] Due to this arrangement of the two pairs of Hall elements 801, 802, 803 and 804 relative to the one pair of magnetic convergence plates 200 and this shape of the one pair of magnetic convergence plates 200, the magnetic fluxes of a transverse magnetic field oriented parallel to the substrate enter the one pair of magnetic convergence plates 200 from their bases, are condensed by the tapered shapes of the isosceles trapezoids to increase their magnetic flux density, and exit from the upper sides of the magnetic convergence plates 200; thereby, the transverse magnetic field is converted into highly intense vertical magnetic fields, which are captured by the Hall elements 801, 802, 803 and 804 respectively directly below the upper sides.

[0082] The two pairs of signal processing circuits and Hall element drive circuits 805 and 806: are connected by wires to the power supply terminals A and C of the Hall elements 801, 802, 803 and 804 to send signals to drive the Hall elements to the respective; and are connected by wires to the output terminals B and D of the Hall elements 801, 802, 803 and 804 to receive electromotive Hall forces (output signals contained therein) output by the respective and perform operations such as addition or subtraction to output the results.

[0083] The signal processing circuit and the Hall element drive circuit 805 are each connected: to the power supply terminals A and C of the Hall element 801 by wires N801 and N803, respectively; to the output terminals B and D of the Hall element 801 by wires N802 and N804, respectively; to the power supply terminals A and C of the Hall element 802 by wires N805 and N807, respectively; and to the output terminals B and D of the Hall element 802 by wires N806 and N808, respectively. The signal processing circuit and the Hall element drive circuit 806 are each connected: to the power supply terminals A and C of the Hall element 803 by wires N809 and N811, respectively; to the output terminals B and D of the Hall element 803 by wires N810 and N812, respectively. with power supply terminals A and C of the Hall element 804 via wires N813 and N814 respectively; and with output terminals B and D of the Hall element 804 via wires N815 and N816 respectively.

[0084] The wires N802 and N804 (N806 and N808) form a closed loop region S801 (802) which contains the Hall element 801 (802) between it and the signal processing circuit and Hall element drive circuit 805. Additionally, they intersect once in a direction parallel to the substrate between the Hall element 801 (802) and the signal processing circuit and Hall element drive circuit 805, being separate from each other in the depth direction of the substrate, and form the compensation loop region S811 (S812) between the intersection and the signal processing circuit and Hall element drive circuit 805, particularly near a corner part of the magnetic convergence plate 200, wherein the compensation loop region S811 (S812) contains a corner part in a top view.At least one area occupied by the compensation loop region S811 (S812) is covered by the magnetic convergence plate 200 in a top view along the depth direction of the substrate. Similarly, the wires N810 and N812 (N814 and N816) form a closed loop region S803 (S804) which contains the Hall element 803 (804) between it and the signal processing circuit and Hall element drive circuit 806.Additionally, they intersect once in a direction parallel to the substrate between the Hall element 803 (804) and the signal processing circuit and Hall element drive circuit 806, being separated from each other in the depth direction of the substrate, and form the compensation loop region S813 (S814) between the intersection and the signal processing circuit and Hall element drive circuit 806, particularly near a corner portion of the magnetic convergence plate 200, wherein the compensation loop region S813 (S814) contains the corner portion in a top view. At least a portion of the area occupied by the compensation loop region S813 (S814) is covered by the magnetic convergence plate 200 in a top view in the depth direction of the substrate.

[0085] Fig. Figure 9 shows a configuration of a signal processing system in a case where the Hall elements are caused to perform a rotating current operation in the magnetic sensor 13 according to the third variant. The signal processing system includes a group of Hall elements 901, a switching circuit 902, a chopper clock generation circuit 904, the Hall element drive circuit 905, the signal processing circuit 303, and the amplifier or comparator 304. The Hall element drive circuit 305, the signal processing circuit 303, and the amplifier or comparator 304 are set up and operate similarly to the above.

[0086] The group of Hall elements 901 contains the Hall elements 801, 802, 803 and 804. The Hall elements 801, 802, 803 and 804 are connected to the switching circuit 902 by respective wires N801 to N804, N805 to N808, N809 to N812 and N813 to N816.

[0087] The chopper clock generation circuit 904 generates a chopper clock to be input into the switching circuit 902, the Hall element drive circuit 305 and the signal processing circuit 303.

[0088] The switching circuit 902 operates according to the chopper clock input from the chopper clock generation circuit 904 in order to switch a connection of the power supply terminals A and C in the Hall elements 801, 802, 803 and 804 to the Hall element drive circuit 805 and additionally to switch a connection of the output terminals B and D to the signal processing circuit 303; thereby it performs a so-called rotating current operation.

[0089] A rotating current operation is a suitable method for extracting only signals of electromotive Hall forces by removing element-specific offset components contained in the output signals of Hall elements. In a rotating current operation, the switching circuit 902 reverses the direction of currents supplied to the Hall elements 801, 802, 803, and 804, respectively, in order to detect output signals. The polarity of an electromotive Hall force signal relative to an offset component is thereby reversed in one output signal. By calculating the difference between the respective output signals before and after reversing the current directions, only one electromotive Hall force signal can be extracted.

[0090] Fig. Figure 10 shows a positional relationship between the two pairs of Hall elements 801, 802, 803, and 804, the pair of magnetic convergence plates 200, and the two pairs of compensation loop regions S1011, S1012, S1013, and S1014 in your magnetic sensor 14 according to a fourth variant. The magnetic sensor 14 contains a substrate (not shown) that includes a pair of magnetic convergence plates 200, the two pairs of Hall elements 801, 802, 803, and 804, and the signal processing system in Fig. 9; thus it is equipped to be able to carry out a rotating current operation. Note that in Fig. 10 only the switching circuit 902, which is in the signal processing system in Fig. Figure 9 is included, as shown. Because in a rotating current operation the power supply terminals A and C of each Hall element also function as output terminals, not only must induced electromotive forces caused in a closed loop region formed by wires connected to terminals B and D be compensated, but also induced electromotive forces caused in a closed loop region caused by wires connected to terminals A and C. In the magnetic sensor 14 according to the present variant, compensation loop areas S1011, S1012, S1013 and S1014 are further formed in wires S801, S803, S805, N807, N809, N811, N813 and N815 respectively, which are connected to the power supply terminals A and C of the Hall elements 801, 802, 803 and 804 in the magnetic sensor 13 according to the third variant.

[0091] The signal processing circuit 303 is connected via the switching circuit 902 as follows: to the power supply terminals A and C of the Hall element 801 by wires N801 and N803 respectively (to the power supply terminals B and D of the Hall element 801 by wires N802 and N804 respectively); and to the power supply terminals A and C of the Hall element 802 by wires N805 and N807 respectively (to the power supply terminals B and D of the Hall element 802 by wires N806 and N808 respectively). The signal processing circuit 303 is also connected via the switching circuit 902 as follows: to the power supply terminals A and C of the Hall element 803 by wires N809 and N811 respectively (to the power supply terminals B and D of the Hall element 803 by wires N810 and N812 respectively). and with the power supply terminals A and C of the Hall element 804 via the wires N813 and N815 respectively) and with the power supply terminals B and D of the Hall element 804 via the wires N814 and N816 respectively).

[0092] The wires N801 and N803 (or N805 and N806) form a closed loop region S1001 (S1002) containing the Hall element 801 (802) between it and the switching circuit (902) (i.e., the signal processing circuit 303). Additionally, they intersect once in a direction parallel to the substrate between the Hall element 801 (802) and the switching circuit 902, while being separated from each other in the depth direction of the substrate, forming the compensation loop region S1011 (S1012) between the intersection and the switching circuit 902, particularly near a corner portion of the magnetic convergence plate 200, wherein the compensation loop region S1011 (S1012) contains the corner portion in a top view. At least part of an area occupied by the compensation loop area S1011 (S1012) is covered by the magnetic convergence plate 200 in a top view as seen in the depth direction of the substrate.The compensation loop area S1011 (S1012) also overlaps with the compensation loop area S811 (S812) in a top view in the depth direction of the substrate. Similarly, the wires N809 and N811 (N813 and N815) form a closed loop area S1003 (S1004), which contains the Hall element 803 (804) between them and the switching circuit 902 (i.e., the signal processing circuit 303). Additionally, they intersect once in a direction parallel to the substrate between the Hall element 803 (804) and the switching circuit 902, while being separated from each other in the depth direction of the substrate, and form the compensation loop area S1013 (S1014) between the intersection and the switching circuit 902, particularly in the vicinity of a corner part of the magnetic convergence plate 200, wherein the compensation loop area S1013 (S1014) contains the corner part in a top view.At least part of the area occupied by the compensation loop section S1013 (S1014) is covered by the magnetic convergence plate 200 in a top view, as seen in the depth direction of the substrate. The compensation loop section S1013 (S1014) overlaps the compensation loop section S813 (S814) in a top view in the depth direction of the substrate.

[0093] If output signals from Hall elements are received from terminals A and C after switching between the power supply terminals A and C and the output terminals B and D of the Hall elements 801, 802, 803 and 804 due to a rotating current operation, the response characteristics of the magnetic sensor 14 can always be compensated by canceling out induced electromotive forces caused in closed compensation loop areas S1001, S1002, S1003 and 1004 by induced electromotive forces caused in the compensation loop areas S1011, S1012, S1013 and S1014.

[0094] Although compensation loop sections for rotary current operation are shown as an example in the magnetic sensor 14 according to the present variant, this can be similarly applied to other embodiments and variants. Because the present variant allows for the cancellation of inductance components, a power supply voltage can be rapidly stabilized during switching between supply terminals A and C and output terminals B and D, resulting in rapid stabilization of the output voltage. Furthermore, the present variant allows for the cancellation of inductance components formed by wires of the power supply terminals A and C, and enables a reduction of common-mode noise in sensor outputs.

[0095] Fig. Figure 11 shows a positional relationship between one pair of Hall elements 201 and 202, one pair of magnetic convergence plates 1100, and one pair of compensation loop regions S501 and S502 in a magnetic sensor 15 according to a fifth variant. The magnetic sensor 15 is obtained by changing the shapes of one pair of magnetic convergence plates 1100 into a square in the magnetic sensor 10 according to the Fig. 5A shown embodiment. The compensation loop regions S501 and S502 are desirablely arranged such that the directions of magnetic fields entering them are the same as the directions of magnetic fields entering the closed loop regions S401 and S402, for which electromotive forces are generated as compensation targets. Although in the present embodiment the shape of the magnetic convergence plate 200 is a square, it can also be, for example, any shape such as a rectangle, octagon, circle, or the like.

[0096] Fig. Figure 12 shows a positional relationship between one pair of Hall elements 201 and 202, a magnetic convergence plate 1200, and one pair of compensation loop regions S501 and S502 in a magnetic sensor 16 according to a sixth variant. The magnetic sensor 16 is obtained using the magnetic sensor 15 according to the one shown in Fig. Figure 11 shows a fifth variant, which uses a magnetic convergence plate 1200 instead of the pair of magnetic convergence plates 200 and other elements: the Hall elements 201 and 202 near one end part of the magnetic convergence plate 1200 (one end part on the left in the figure) and near the other end part of the magnetic convergence plate 1200 (one end part on the right in the figure), respectively; and the compensation loop areas S501 and S502 near one end part of the magnetic convergence plate 1200 (one upper left corner part in the figure) and near the other corner part of the magnetic convergence plate 1200 (one upper right corner part in the figure), respectively. This magnetic sensor 16 allows the detection of a ...-shaped magnetic field or an oval magnetic field.

[0097] With this arrangement of the Hall elements 201 and 202 relative to the magnetic convergence plate 1200, a magnetic field enters the Hall element 201 from the far side towards the near side on the paper surface, and a magnetic field enters the Hall element 201 from the near side towards the far side on the paper surface. Because, while an induced electromotive force is generated clockwise in the closed loop region S401 formed by the wires N402 and N404 containing the Hall element 201, an induced electromotive force is also generated clockwise in the compensation loop region S501, the induced electromotive force generated in the closed loop region S401 can be compensated by the compensation loop region S501.Because, while an induced electromotive force is generated counterclockwise in the closed loop region S402 formed by the wires N406 and N408, which contains the Hall element 202, an induced electromotive force is also generated counterclockwise in the compensation loop region S502, the induced electromotive force generated in the closed loop region S402 can be compensated by the compensation loop region S502.

[0098] Fig. Figure 13 shows a positional relationship between two pairs of Hall elements 1301, 1302, 1303, and 1034, a pair of magnetic convergence plates 1300, and two pairs of compensation loop regions S1311, S1312, S1313, and S1314 in a magnetic sensor 17 according to a seventh variant. The magnetic sensor 17 includes a substrate (not shown), a pair of magnetic convergence plates 1300, the two pairs of Hall elements 1301, 1302, 1303, and 1304, the Hall element drive circuit 305, and the signal processing circuit 303. The magnetic sensor 17 is obtained using the magnetic sensor 13 according to the one shown in Figure 13. Fig. 8 shown third variant, of one pair of rectangular magnetic convergence plates 1300 instead of one pair of magnetic convergence plates 200, and similar to the magnetic sensor 16 according to the in Fig. In the sixth variant shown in Figure 12, the Hall elements 1301, 1302, 1303 and 1304 are arranged near one end part of each under one pair of magnetic convergence plates 1300 (end parts on the left side of the figure) and near the other end part of each under one pair of magnetic convergence plates 1300 (end parts on the right side of the figure); and compensation loop regions S1311, S1312, S1313 and S1314 are arranged near one end part of each under one pair of magnetic convergence plates 1300 (upper left corner part of the figure) and near another corner part of each under one pair of magnetic convergence plates 1300 (upper right corner parts of the figure).In other words, the magnetic sensor 17 is equivalent to the one obtained by providing two sets of one pair of Hall elements, one magnetic convergence plate and one part of compensation loop areas in the magnetic sensor 17 according to the seventh variant described in . Fig. Figure 12 shows that this magnetic sensor 17 allows the detection of a circular or oval magnetic field.

[0099] The pair of magnetic convergence plates 1300 is square and arranged on one side and the other side on the substrate (a protective layer contained therein) in the left / right direction in the figure, with one side of each facing the other side of the other.

[0100] The two pairs of Hall elements 1301, 1302, 1303, and 1304 are formed on the substrate, but their surfaces are covered by a wiring layer. Power supply connections A and C and output connections B and D are provided symmetrically between Hall elements 1301 and 1304 and between Hall elements 1302 and 1303. Hall elements 1301 and 1303 are arranged in a left end section and a right end section, respectively, of the magnetic convergence plate 1300 on the left side of the figure. Hall elements 1303 and 1304 are arranged in a left end section and a right end section, respectively, of the magnetic convergence plate 1300 on the right side of the figure.Half of the Hall elements 1301 and 1303, which contain the terminals A and B, are covered by the magnetic convergence plate 1300 on the left side of the figure, and half of the Hall elements 1303 and 1304, which contain the terminals A and B, are covered by the magnetic convergence plate 1300 on the right side of the figure.

[0101] The Hall element drive circuit 305 connects the power supply terminals A and C of the Hall elements 1301, 1302, 1303, and 1304 via wires to send signals to drive the respective Hall elements. The Hall element drive circuit 305 is connected as follows: to the power supply terminals A and C of Hall element 1301 by wires N1301 and N1303, respectively; to the power supply terminals A and C of Hall element 1302 by wires N1305 and N1307, respectively; to the power supply terminals A and C of Hall element 1303 by wires N1309 and N1311, respectively; and to the power supply terminals A and C of Hall element 1304 by wires N1313 and N1315, respectively.

[0102] The signal processing circuit 303 connects the output terminals B and D of the Hall elements 1301, 1302, 1303, and 1304 via wires to the respective electromotive Hall forces (output signals they contain) emitted by the respective elements. It then performs operations, such as addition or subtraction, and outputs the results. The signal processing circuit 303 is connected as follows: to the output terminals B and D of Hall element 1301 by wires N1302 and N1304, respectively; to the output terminals B and D of Hall element 1302 by wires N1306 and N1308, respectively; to the output terminals B and D of Hall element 1303 by wires N1310 and N1312, respectively; and to the output terminals B and D of Hall element 1304 by wires N1314 and N1316, respectively.

[0103] The wires 1302 and N1304 (N1306 and N1308) form a closed loop region S1301 (S1302) containing the Hall element 1301 (1302) between it and the signal processing circuit 303. Additionally, they cross once in a direction parallel to the substrate between the Hall element 1301 (1302) and the signal processing circuit 303, being separated from each other in the depth direction of the substrate, and form the compensation loop region S1311 (1312) between the crossing and the signal processing circuit 303, particularly near a left corner part (right corner part) of the magnetic convergence plate 1300 on the left side of the figure, wherein the compensation loop region S1311 (S1312) contains the corner part in a top view.At least part of the area occupied by the compensation loop region S1311 (1312) is covered by the magnetic convergence plate 1300 in both a top view and a view along the depth of the substrate. The wires N1310 and N1312 (N1314 and N1316) form a closed loop region S1303 (S1304) which contains the Hall element 1303 (1304) between it and the signal processing circuit 303.Additionally, they intersect once in a direction parallel to the substrate between the Hall element 1303 (1304) and the signal processing circuit 303, being separated from each other in the depth direction of the substrate, and form the compensation loop region S1313 (S1314) between the intersection and the signal processing circuit 303, particularly near a left corner part (right corner part) of the magnetic convergence plate 1300 on the right side of the figure, wherein the compensation loop region S1313 (S1314) contains the corner part in a top view. At least a portion of the area occupied by the compensation loop region S1313 (S1314) is covered by the magnetic convergence plate 1300 in a top view as well as seen in the depth direction of the substrate.

[0104] With this arrangement of the two pairs of Hall elements 1301, 1302, 1303 and 1304 relative to the one pair of magnetic convergence plates, for example: near a left end part of the magnetic convergence plate 1300 on the left side of the figure, a magnetic field enters the Hall element 1301 from a far side towards the near side on the paper surface; near a right end part of the magnetic convergence plate 1300 on the left side of the figure, a magnetic field enters the Hall element 1302 from the near side towards the far side on the paper surface; near a left end part of the magnetic convergence plate 1300 on the right side of the figure, a magnetic field enters the Hall element 1303 from the far side towards the near side on the paper surface;and near a right end part of the magnetic convergence plate 1300 on the right side of the figure, a magnetic field enters the Hall element 1304 from the near side towards the far side on the paper surface.

[0105] Because, while an induced electromotive force is generated clockwise in the closed loop region S1301 formed by the wires N1302 and N1304 containing the Hall element 1301, an induced electromotive force is also generated clockwise in the compensation loop region S1311, the induced electromotive force generated in the closed loop region S1301 can be compensated by the compensation loop region S1311.Because, while an induced electromotive force in a counterclockwise direction is generated in the closed loop area S1302, formed by the wires N1306 and N1308, which the Hall element 1311 ? , an induced electromotive force in a counterclockwise direction is also generated in the compensation loop area S1312, the induced electromotive force generated in the closed loop area 1302 can be compensated by the compensation loop area S1312.Because, while an induced electromotive force is generated clockwise in the closed loop area S1303 formed by the wires N1310 and N1312 containing the Hall element 1303, an induced electromotive force is also generated clockwise in the compensation loop area S1313, the induced electromotive force generated in the closed loop area S1303 can be compensated by the compensation loop area S1313.Because, while an induced electromotive force is generated counterclockwise in the closed loop area S1304, which is generated by the wires N1314 and N1316 containing the Hall element 1304, an induced electromotive force is also generated counterclockwise in the compensation loop area S1314, the induced electromotive force generated in the closed loop area S1304 can be compensated by the compensation loop area S1314.

[0106] In contrast to the present variant, an arrangement example comprising a pair of magnetic convergence plates and two pairs of Hall elements, rotating current operation, as applied in the magnetic sensor 14 according to the fourth variant, can also be used. The shapes of the magnetic convergence plates, the arrangement of the Hall elements and compensation loop areas, etc., which are described in the aforementioned embodiments and variants, can be combined in any way.

[0107] Although the embodiments of the invention have been described, the technical scope of protection of the invention is not limited to the described embodiments. The person skilled in the art understands that various modifications and improvements can be added to the embodiments mentioned above. It is also obvious from the scope of protection of the claims that the embodiments to which such modifications or improvements have been added are included within the technical scope of protection of the invention.

[0108] The operations, procedures, steps, and stages of each process performed by a device, system, program, and method shown in the claims, embodiments, or figures may be performed in any order, as long as the order is not indicated by "preceding," "before," or the like, and as long as the output of the preceding process is not used in a subsequent process. Even if the process flow is described using such words as "first" or "next" in the claims, embodiments, or figures, this does not necessarily mean that the process must be performed in that order. [Explanation of reference symbols]

[0109] 10, 11, 12, 13, 14, 15, 16, 17: Magnetic sensor; 100, 201, 202, 801, 802, 803, 804, 1301, 1302, 1303, 1304: Symmetric Hall element; 101, 102, 103, 104: Hall element connector; 105: Magnetically sensitive part; 200, 1100, 1200, 1300: Magnetic convergence plate; 203: Protective film; 204: Wiring layer; 205: Substrate; 303: Signal processing circuit; 304: Operational amplifier; 305: Hall element drive circuit; N401, N402, N403, N404, N405, N405, N407, N408, N801, N802, N803, N804, N805, N806, N807, N808, N809, N810, N811, N812, N813, N814, N815, N816, N1301, N1302, N1303, N1304, N1305, N1306, N1307, N1308, N1309, N1310, N1311, N1312, N1313, N1314, N1315, N1316: Wire; 805, 806: Signal processing circuit and Hall element drive circuit; 901: Group of Hall elements; 902: Switching circuit; 904: Chopper clock generation circuit; S401, S402, S801, S802, S803, S804, S1001, S1002, S1003, S1004, S1301, S1302, S1303, S1304: Closed loop section;S501, S502, S811, S812, S813, S814, S1011, S1012, S1013, S1014, S1311, S1312, S1313, S1314: Compensation loop area.;

Claims

[1] Magnetic sensor, comprising: a magnetic convergence plate; an electromagnetic conversion element located on one surface side of the magnetic convergence plate; at least two wires connected to the electromagnetic conversion element; and a circuit which is connected to at least two wires and receives a signal from the electromagnetic conversion element, wherein the at least two wires cross between the electromagnetic conversion element and the circuit, being separated from each other in a direction perpendicular to one surface of the magnetic convergence plate in order to form a compensation loop between a crossing of the at least two wires and the circuit, and in a top view, viewed in a direction perpendicular to one surface of the magnetic convergence plate, at least a part of an area occupied by the compensation loop is covered by the magnetic convergence plate. [2] Magnetic sensor according to claim 1, wherein at least a part of the area occupied by the compensation loop is arranged on one surface side of a corner part of the magnetic convergence plate. [3] Magnetic sensor according to claim 1 or 2, wherein the compensation loop cancels out an induced electromotive force which is caused in the at least two wires between the electromagnetic conversion element and the crossing of the at least two wires. [4] Magnetic sensor according to one of claims 1 to 3, wherein, in the top view, viewed in the direction perpendicular to one surface of the magnetic convergence plate, at least a part of the electromagnetic conversion element is covered by the magnetic convergence plate. [5] Magnetic sensor according to any one of claims 1 to 4, further comprising: another magnetic convergence plate, arranged separately from the magnetic convergence plate; another electromechanical conversion element arranged on one surface side of the other magnetic convergence plate; and at least two other wires connected to the other electromagnetic conversion element, wherein the circuit remains connected to the other two wires to receive a signal from the other electromagnetic conversion element, the two other wires cross between the other electromagnetic conversion element and the circuit in a direction parallel to a surface of the other magnetic convergence plate, being separated from each other in a direction crossing a surface of the other magnetic convergence plate, and form another compensation loop between a crossing of the two other wires and the circuit, and the magnetic convergence plate, the electromagnetic conversion element and the compensation loop, and the other magnetic conversion unit, the other electromagnetic conversion element and the other compensation loop are arranged symmetrically about one direction parallel with a surface of the magnetic convergence plate. [6] Magnetic sensor according to claim 5, wherein the circuit calculates a difference between the respective output signals of the electromagnetic conversion element and the other electromagnetic conversion element. [7] Magnetic sensor, comprising: a magnetic convergence plate formed on a substrate; a contamination diffusion layer that forms on the substrate; first to fourth connections that are connected to the contamination diffusion layer; a first wire connected to the first terminal; a third wire connected to the third terminal, which is located opposite the first terminal; a second wire connected to the second terminal; and a fourth wire connected to the fourth terminal, which is arranged opposite the second terminal, wherein the first wire and the third wire cross each other, being separated from each other in a direction perpendicular to the substrate, and forming a first wire loop after the crossing, and at least part of an area occupied by the first wire loop is covered by the magnetic convergence plate in a top view in the direction perpendicular to the substrate. [8] Magnetic sensor according to claim 7, wherein the second wire and the fourth wire cross each other, being separated from each other in the direction perpendicular to the substrate, and form a second wire loop after the crossing, and at least a part of an area assumed by the second wire loop is covered by the magnetic convergence plate in a top view in the direction perpendicular to the substrate. [9] Magnetic sensor according to claim 8, wherein the areas occupied by the first wire loop and the second wire loop overlap at least partially in a direction perpendicular to the substrate. [10] Magnetic sensor according to claim 8 or 9, further comprising a switch connected to the first to fourth wires, wherein the first wire loop is formed between a crossing of the first wire and the third wire and the switch, and the second wire loop is formed between a crossing of the second and fourth wires and the switch. [11] Magnetic sensor according to one of claims 8 to 10, wherein the contaminant diffusion layer is an electromagnetic conversion element. [12] Magnetic sensor according to one of claims 7 to 11, wherein the first terminal and the second terminal are opposite each other and the third terminal and the fourth terminal are opposite each other. [13] Magnetic sensor according to one of claims 7 to 12, wherein the first to fourth terminals and the first to fourth wires are integrated on the substrate. [14] Magnetic sensor according to one of claims 7 to 13, wherein a first state in which the first and third terminals are power supply terminals and the second and fourth terminals are output terminals, and a second state in which the first and third terminals are output terminals and the second and fourth terminals are power supply terminals, are alternately switched from one to the other.

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