Testing device and testing procedure

Abstract

A testing device is equipped with a data acquisition unit and an evaluation unit. The data acquisition unit acquires a first image and a second image. The first image is obtained by binarizing an image of the tip of a tubular component, through which the fluid can flow, captured from a direction along the flow direction of a fluid. This is done using a first threshold that can distinguish the tip of the tubular component and a hole, which is a region formed in the tip of the tubular component through which the fluid can flow. The second image is obtained by binarizing the image using a second threshold that can distinguish the hole and a deposit adhering to the hole.The assessment section evaluates the presence or absence of blockage of the hole with the deposit based on a difference image from the first and second images obtained by the extraction section.

Description

TECHNICAL FIELD

[0001] The present description discloses the technique of a testing apparatus and a testing method. STATE OF THE ART

[0002] The detection camera according to Patent Document 1 can capture an image of the lower end surface of a suction nozzle. In the control part according to Patent Document 1, an image of the lower end surface of a normal suction nozzle is pre-registered as an initial reference image. The control part further judges suction nozzle defects (clogging of the suction nozzle) by comparing an image of the clogged suction nozzle with the normal image. The control part according to Patent Document 1 also judges suction nozzle defects (broken suction nozzle) by comparing an image of the broken suction nozzle with the normal image. PRIOR ART DOCUMENT PATENT DOCUMENT

[0003] Patent Document 1: JP H10-154899 A SUMMARY OF THE INVENTION OBJECT TO BE SOLVED BY THE INVENTION

[0004] The control part according to Patent Document 1 is designed to assess suction nozzle defects by comparing an image of the suction nozzle tip with the image of the normal suction nozzle tip. However, due to manufacturing variations, etc., of the suction nozzles, multiple normal images exist, making it difficult to select only one normal image.

[0005] Taking these circumstances into account, the present specification discloses a testing apparatus and a testing method in which the presence or absence of hole clogging at the tip of a tubular member through which a fluid can flow can be assessed. MEANS FOR SOLVING THE TASK

[0006] The present description discloses an inspection apparatus having an acquisition part and an evaluation part. The acquisition part acquires a first image and a second image. The first image is an image obtained by binarizing an image of a tip of a tubular member through which the fluid can flow, taken from a direction along the flow direction of a fluid, using a first threshold value that can distinguish, in the image, the tip of the tubular member and a hole, which is a portion formed in the tip of the tubular member and through which the fluid can flow. The second image is an image obtained by binarizing the image using a second threshold value that can distinguish, in the image, the hole and a deposit adhered to the hole.The judging part judges the presence or absence of blockage of the hole with the deposit based on a difference image between the first and second images obtained by the extraction part.

[0007] The present description further discloses an inspection method comprising an acquisition step and an assessment step. The acquisition step acquires a first image and a second image. The first image is an image obtained by binarizing an image of a tip of a tubular member through which the fluid can flow, taken from a direction along the flow direction of a fluid, using a first threshold value that can distinguish, in the image, the tip of the tubular member and a hole, which is a region formed in the tip of the tubular member and through which the fluid can flow. The second image is an image obtained by binarizing the image using a second threshold value that can distinguish, in the image, the hole and a deposit adhered to the hole.The assessment part assesses the presence or absence of blockage of the hole with the deposit based on a difference image between the first and second images obtained by the extraction step. ADVANTAGES OF THE INVENTION

[0008] According to the above-mentioned test device, the presence or absence of clogging of the hole with the deposit can be assessed based on a difference image between the first and second images. The above-mentioned aspect of the test device also applies to the test method. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view showing a construction example of a component placement machine. Fig. 2 is an oblique view showing an example of a suction nozzle. Fig. 3 is an oblique view showing an example of a nozzle cleaner. Fig. 4 is a block diagram showing an example of the function of the nozzle cleaner according to Fig. 3. Fig. 5 is a schematic view showing an example of a captured image of a tip of a tubular component. Fig. Fig. 6 is a schematic view showing an example of an image obtained by binarization processing of the image according to Fig. 5. Fig. 7 is a block diagram showing an example of a control block of a test apparatus. Fig. 8 is a flowchart showing an example of the control method by the test apparatus. Fig. 9 is a view showing an example of the frequency distribution of the brightness values ​​of the image. Fig. 10 is a schematic view showing an example of a deposit adhering to the hole. Fig. 11 is a schematic view showing an example of a first image. Fig. 12 is a schematic view showing an example of a second image. Fig. 13 is a schematic view showing a construction example of an image pickup device and light source. Fig. 14 is a schematic view showing an example of a difference image. Fig. 15 is a schematic view showing an example of a design drawing of the tip of the tubular component. Fig. 16 is a schematic view showing an example of an image of the tip of the tubular component which is broken off. Fig. 17 is a schematic view showing an example of the deposit adhering to the hole. Fig. 18 is a schematic view showing an example of the first image. Fig. 19 is a schematic view showing an example of the second image. Fig. 20 is a schematic view showing an example of the difference image. EMBODIMENT OF THE INVENTION 1. Embodiment 1-1. Construction Example of a Component Mounting Machine 10

[0009] The component placement machine 10 places a plurality of components 91 on a circuit board 90. The component placement machine 10 is provided with a circuit board conveying device 11, a component feeding device 12, a component transfer device 13, a component camera 14, a circuit board camera 15 and a control device 16, as shown in Fig. 1 shown.

[0010] The board conveying device 11 is formed, for example, from a belt conveyor and conveys the board 90 in a conveying direction (X-axis direction). The board 90 is a circuit board on which electronic circuits, electrical circuits, magnetic circuits, etc. are formed. The board conveying device 11 conveys the board 90 into the component placement machine 10 and positions the board 90 at a predetermined location in the machine. After the component placement machine 10 completes the assembly treatment of the board 90 with a plurality of components 91, the board conveying device 11 conveys the board 90 out of the component placement machine 10.

[0011] The component feeder 12 feeds a plurality of components 91 to be mounted on the board 90. The component feeder 12 is provided with a plurality of feeders 12a arranged along the conveying direction of the board 90 (X-axis direction). Each of the plurality of feeders 12a is equipped with a spool. A carrier tape, in which a plurality of components 91 are accommodated, is wound on the spool. At the feeder 12a, the carrier tape undergoes a pitch feed, whereby the component 91 is fed so that it can be accepted at a feed location located on the front side of the feeder 12a. The component feeder 12 can also feed electronic components (e.g., lead components, etc.), which are relatively large compared to chip components, in a tray-arranged state.

[0012] The component transfer device 13 is provided with a head drive device 13a and a movable stage 13b. The head drive device 13a is configured such that the movable stage 13b is movable in the X-axis and Y-axis directions (directions perpendicular to the X-axis direction in the horizontal plane) by a linear motion mechanism. A mounting head 20 is provided on the movable stage 13b, which can be removed (changed) by a clamping member. The mounting head 20 receives the component 91 supplied by the component supply device 12 with the aid of at least one holding member 21, holds the component 91, and mounts the component 91 onto the board 90 positioned by the board conveying device 11. For example, a suction nozzle 70, a chuck, etc., can be used as the holding member 21.

[0013] Known image pickup devices can be used as the component camera 14 and the board camera 15. The component camera 14 is fixed to the base frame of the component placement machine 10 with its optical axis directed upward in the vertical direction (Z-axis direction, which is perpendicular to the X- and Y-axis directions). The component camera 14 can capture an image of the component 91, etc., held by the holding member 21 from below. The board camera 15 is provided on the movable frame 13b of the component transfer device 13 with its optical axis directed downward in the vertical direction (Z-axis direction). The board camera 15 can capture an image of the board 90 from above. Image pickup at the component camera 14 and the board camera 15 is performed based on the control signals sent from the control device 16.The image data of the images taken by the component camera 14 and board camera 15 are sent to the control device 16.

[0014] The control device 16 is equipped with a known computing device and memory device and forms a control circuit. Information, image data, etc., output from various sensors provided on the component placement machine 10 are input to the control device 16. The control device 16 sends control signals to the individual devices based on the control programs and predetermined placement conditions, etc.

[0015] For example, the control device 16 causes the board camera 15 to capture the image of the board 90 positioned by the board conveying device 11. The control device 16 processes the image captured by the board camera 15 and detects the positioning state of the board 90. Furthermore, the control device 16 causes the holding element 21 to accept and hold the component 91 supplied by the component feeding device 12, so that the component camera 14 captures the image of the component 91 held on the holding element 21. The control device 16 processes the image captured by the component camera 14 and detects the position of the component 91.

[0016] The control device 16 moves the holding element 21 to the upper side of a planned mounting location predetermined by the control program, etc. The control device 16 corrects the planned mounting location based on the positioning state of the board 90, the position of the component 91, etc., and determines a mounting location where the component 91 will actually be mounted. The planned mounting location and the mounting location include a rotation angle in addition to the position (X- and Y-axis coordinates).

[0017] The control device 16 corrects the target position (X- and Y-axis coordinates) and the rotation angle of the holding element 21 according to the placement location. The control device 16 lowers the holding element 21 at the corrected target position with the corrected rotation angle to mount the board 90 with the component 91. The control device 16 performs the placement treatment for mounting the board 90 with a plurality of components 91 by repeating the above-mentioned pick-and-place cycle. 1-2. Design example of a suction nozzle 70

[0018] As in Fig. As shown in Figure 2, the suction nozzle 70 is provided with a body axis 71, a flange 72, a nozzle axis 73, and an identification code 74. The body axis 71 is formed in a tubular shape. The body axis 71 functions as a main body part held by the pick-and-place head 20. The flange 72 is provided at one end (on the lower side in Fig. 2) the body axis 71 in the axial direction (corresponding to the Z-axis direction when the suction nozzle 70 is held by the pick-and-place head 20) is formed into a disc shape.

[0019] The nozzle axis 73 is formed in a tubular shape extending from the body axis 71 in the axial direction. The body axis 71 and the nozzle axis 73 form a vacuum channel at the suction nozzle 70. The nozzle axis 73 holds the component 91, which is in contact with its tip (corresponding to the tip 51 of a tubular component 50 mentioned later), with the vacuum supplied via the body axis 71.

[0020] The nozzle axis 73 is configured to be expandable / contractible in the axial direction relative to the body axis 71. Specifically, the nozzle axis 73 is biased by an elastic member in a direction extending from the body axis 71. At the expansion / contraction part of the suction nozzle 70 formed by the body axis 71 and the nozzle axis 73, when a load is applied to the tip of the nozzle axis 73 on the body axis 71 side, the nozzle axis 73 slides relative to the body axis 71 and contracts against the elastic force of the elastic member. The upper surface of the flange 72 is provided with the identification code 74. The identification code 74 includes identification information for identifying the suction nozzle 70, information about the suction nozzle 70, such as type, etc. 1-3. Design example of a nozzle cleaner 30

[0021] The nozzle cleaner 30 is an external device provided outside the component placement machine 10. A nozzle station holding a plurality of suction nozzles 70 is conveyed into the nozzle cleaner 30 according to the embodiment to perform cleaning, inspection, and storage for the suction nozzles 70.

[0022] The nozzle cleaner 30 has the function of transferring the stored suction nozzle 70 to the nozzle station as needed, thus supporting the changeover on the component placement machine 10. The nozzle cleaner 30 is provided with a cleaning unit 31, a testing unit 32, a nozzle storage chamber 33, a nozzle movement device 34, a control device 35, and an ejection box 36, as shown in Fig. 3 and Fig. 4 shown.

[0023] The cleaning unit 31 cleans the vacuum channel and the expansion / contraction part of the suction nozzle 70. Specifically, the cleaning unit 31 cleans and dries the suction nozzle 70 in a cleaning chamber. The cleaning unit 31 cleans the suction nozzle 70, for example, by flowing a high-pressure fluid (air, cleaning liquid, etc.) through the interior of the suction nozzle 70 during the cleaning treatment. The cleaning unit 31 can also clean the suction nozzle 70 by spraying a high-pressure fluid (air, cleaning liquid, etc.) onto the outer surface of the suction nozzle 70. The cleaning unit 31 performs the drying treatment to dry (blow off the fluid) the cleaning-treated suction nozzle 70 using a blower.

[0024] The inspection unit 32 performs various inspections for the suction nozzle 70 on the nozzle cleaner 30. The items to be inspected by the inspection unit 32 include the external shape of the suction nozzle 70, the flow rate of the vacuum passage, and the sliding resistance of the expansion / contraction part, etc. Specifically, the inspection unit 32 captures, for example, an image of the suction nozzle 70 held by the nozzle moving device 34 with an image pickup device (corresponding to the image pickup device 43 mentioned later), and inspects the external shape of the suction nozzle 70 based on the captured image. This determines the presence or absence of deposits, breakage of the suction nozzle 70, etc.

[0025] The inspection unit 32 can, for example, use a load cell, etc., to determine the load on the nozzle axis 73 of the suction nozzle 70 sliding toward the inside of the body axis 71. For the suction nozzle 70 where the value measured by the load cell is greater than the target value, it is assumed that contamination of the sliding part, etc., is causing the large sliding resistance. The inspection unit 32 can evaluate the quality of each of various tests and record the test value. The inspection unit 32 can also appropriately inspect the suction nozzle 70 cleaned by the cleaning unit 31 and evaluate the quality again.

[0026] The nozzle storage chamber 33 can accommodate a plurality of suction nozzles 70. The nozzle storage chamber 33 can transfer the suction nozzle 70 to a storage pallet and accommodate the storage pallet in a storage position that is different for each plurality of storage pallets.

[0027] The nozzle moving device 34 moves the suction nozzle 70 between the cleaning unit 31, the inspection unit 32, the nozzle storage room 33, the installed location of the nozzle station, and the ejection box 36. The nozzle moving device 34 can, for example, grip the suction nozzle 70 with a holding chuck. This allows the suction nozzle 70 to be moved appropriately depending on cleaning, inspection, and storage. The nozzle moving device 34 can also move the storage pallet into the nozzle storage room 33, etc. A code reader is provided on the nozzle moving device 34, which can read the identification code 74 of the suction nozzle 70, the identification code assigned to the nozzle station, etc.

[0028] The control device 35 is provided with a known computing device and storage device and forms a control circuit. The control device 35 is communicatively connected to a monitoring device, which is an external device, and is configured such that various information can be exchanged. The control device 35 controls various cleaning treatments, inspection treatments, and storage treatments, including the transfer of the suction nozzles 70. The suction nozzles 70, which were judged to be defective, for example, based on the test results by the inspection unit 32, are collected in the ejection box 36. The ejection box 36 is divided into several compartments, which are used, for example, for sorting according to the cause of the defect. 1-4. Design example of a test fixture 40

[0029] The inspection device 40 inspects the condition of the tip 51 of the tubular component 50 through which a fluid can flow. The tubular component 50 can be formed in various shapes, as long as it is a component formed in the shape of a tube through which a fluid can flow. The fluid flowing through the tubular component 50 is not limited. The tubular component 50 according to the embodiment is the suction nozzle 70 for sucking the component 91 to be mounted on the board 90. In this case, the fluid flowing through the tubular component 50 is air, etc.

[0030] Fig. Fig. 5 shows an example of an image 60 obtained by imaging the tip 51 of the tubular component 50. This figure schematically shows the image 60 obtained by imaging the tip 51 of the tubular component 50 from a direction along the flow direction of the fluid (in the direction of arrow AR1 according to Fig. 2). In image 60, the tip 51 of the tubular component 50, the hole 52, which is an area formed within the tip 51 of the tubular component 50 and through which the fluid can flow, a deposit 53 adhering to the hole 52, and the background are recorded, as in Fig. 5. The deposit 53 is hatched for easy understanding of the drawing. This indicates that the features of the image 60, such as brightness, at the deposit 53 differ from those at the tip 51 and the hole 52 of the tubular component 50. The above-mentioned matter also applies to the hatching of the images mentioned later.

[0031] It is assumed that the presence or absence of blockage of the hole 52 is judged by comparing the image 60 of the tip 51 of the tubular component 50 with an image of the tip 51 of a normal tubular component 50 whose hole 52 is unblocked (free of the deposit 53). However, due to manufacturing variability, etc., of the tubular components 50, multiple normal images exist, making it difficult to select a normal image from these images. For example, it is assumed that the presence or absence of blockage of the hole 52 is judged by comparing an area of ​​a region identified as the deposit 53 in the image 60 with a reference area of ​​the hole 52 in the case where the hole 52 is not blocked. However, it is difficult to select only one reference area because multiple normal images exist. Therefore, comparing these areas is difficult.

[0032] Fig. Fig. 6 shows an example of an image 60a obtained by binarization processing of the image 60 according to Fig. 5. The image 60a has been subjected to binarization processing (e.g., binarization processing according to the Otsu method, etc.), in which the outer edge 51f (outer wall surface 51b) of the tip 51 of the tubular component 50 in the image 60 according to Fig. 5 and a threshold value is automatically determined. In the case of automatic determination of the threshold value, there is a possibility that the hole 52 cannot be distinguished from the deposit 53, as mentioned later. Therefore, there is a possibility that the deposit 53 is incorrectly recognized as the hole 52, and it is difficult to recognize the deposit 53 due to the image 60a, as in Fig. 6. Therefore, the testing device 40 is provided with an extraction part 41 and an evaluation part 42.

[0033] The acquisition part 41 and the assessment part 42 can be provided on various control devices, monitoring devices, computing devices, image processing devices, etc. For example, at least one of the acquisition part 41 and the assessment part 42 can be provided on the control device 35 of the nozzle cleaner 30. At least one of the acquisition part 41 and the assessment part 42 can be provided on a control device communicatively connected to the control device 35. At least one of the acquisition part 41 and the assessment part 42 can be formed on the cloud. The acquisition part 41 and the assessment part 42 according to the embodiment are provided on the control device 35 of the nozzle cleaner 30, as shown in Fig. 7. That is, the inspection device 40 is formed on the nozzle cleaner 30. The inspection unit 32 represents a configuration to which the inspection device 40 is applied.

[0034] The test device 40 carries out the control according to the flow chart according to Fig. 8. The extraction part 41 performs the treatment according to step S13.

[0035] The judging part 42 performs the processing and judgments according to steps S14 to S20. The control device 35 of the nozzle cleaner 30 performs the processing according to steps S11 and S12.

[0036] Specifically, the control device 35 executes the drive control of the nozzle moving device 34 and causes the image pickup device (corresponding to the later-mentioned image pickup device 43) to capture an image of the suction nozzle 70 held by the nozzle moving device 34 (step S11). As a result, the image 60 is generated according to Fig. 5. The control device 35 detects the outer edge 51f (outer wall surface 51b) of the tip 51 of the tubular component 50 in the image 60 according to Fig. 5 (step S12). 1-4-1. Extraction Part 41

[0037] Fig. 9 shows an example of the frequency distribution of the brightness values ​​of the image 60. The abscissa of this figure shows the brightness value, and the ordinate shows the frequency. Curve L11 shows a distribution example of the pixel brightness values ​​of the tip 51 of the tubular component 50. Curve L12 shows a distribution example of the pixel brightness values ​​of the hole 52. Curve L13 shows a distribution example of the pixel brightness values ​​of the deposit 53. For example, there is a possibility that a threshold value bordering on the brightness value shown by line L14 is determined when the image 60 is subjected to binarization processing (e.g., binarization processing according to the Otsu method, etc.) in which the threshold value is automatically determined.

[0038] Line L14 shows the brightness value, which is greater than the brightness value at the peak of curve L12 (at the highest frequency of the brightness value of the hole 52) and the brightness value at the peak of curve L13 (at the highest frequency of the brightness value of the deposit 53), and smaller than the brightness value at the peak of curve L11 (at the highest frequency of the brightness value of the tip 51 of the tubular component 50). In this case, the area of ​​the tip 51 of the tubular component 50 is represented with white (e.g., brightness value of 255 when a pixel is represented with 8 bits (the same applies below)), as shown in Fig. 6. The area of ​​hole 52 and deposit 53 is shown in black (brightness of 0). Therefore, it is difficult to recognize deposit 53 from image 60a, as already mentioned.

[0039] Therefore, the acquisition part 41 acquires a first image 61 and a second image 62 (step S13 according to Fig. 8). The first image 61 means an image obtained by binarization processing of the image 60 using a first threshold value. The first threshold value means a threshold value which is set in the range from a direction along the flow direction of the fluid (arrow direction AR1 in Fig. 2) captured image 60 of the tip 51 of the tubular member 50, can distinguish the tip 51 of the tubular member 50 and the hole 52, which is a region formed in the tip 51 of the tubular member 50 and through which the fluid can flow. The second image 62 represents an image obtained by binarizing the image 60 using a second threshold value, which can distinguish the hole 52 and the deposit 53 adhering to the hole 52 in the image 60.

[0040] By binarizing the image 60 using the first threshold, the tip 51 of the tubular component 50 and the hole 52 become distinguishable, and by binarizing the image 60 using the second threshold, the hole 52 and the deposit 53 become distinguishable. In the example according to Fig. 9, the first threshold value is determined, which has a limit at the brightness value along line L14. Furthermore, the second threshold value is determined, which has a limit at the brightness value along line L15. Line L15 shows the brightness value, which is greater than the brightness value at the peak of curve L12 (at the highest frequency of the brightness value of hole 52) and less than the brightness value at the peak of curve L13 (at the highest frequency of the brightness value of deposit 53). The second threshold value is determined to be smaller than the first threshold value. Furthermore, the first and second threshold values ​​can be obtained in advance through simulation, verification using practical machines, etc.

[0041] Fig. Fig. 10 shows an example of the deposit 53 adhering to the hole 52. This figure shows a state in which the outer edge 51f (outer wall surface 51b) of the tip 51 of the tubular component 50 in the image 60 according to Fig. 5 is recognized. Fig. 11 shows an example of the first image 61. This figure shows the first image 61 obtained by binarization processing of the image 60 according to Fig. 10 using the first threshold value. In the first image 61, the area of ​​the tip 51 of the tubular component 50 is shown in white (brightness value of 255). The area of ​​the hole 52 and the deposit 53 is shown in black (brightness value of 0).

[0042] Fig. 12 shows an example of the second image 62. This figure shows the second image 62 obtained by binarization processing of the image 60 according to Fig. 10 using the second threshold value. In the second image 62, the area of ​​the tip 51 of the tubular component 50 and the area of ​​the deposit 53 are shown in white (brightness value of 255). The area of ​​the hole 52 is shown in black (brightness value of 0).

[0043] The extraction part 41 can extract the first image 61 and the second image 62 using an image 60. In the above examples, the extraction part 41 extracts the first image 61 and the second image 62 using an image 60 according to Fig. 10. In this case, the inspection apparatus 40 can reduce the image acquisition frequency and the time required for image processing compared with the case of using two images 60, 60.

[0044] In addition, the deposit 53 adhering to the hole 52 can be easily detected by changing the image acquisition conditions. The acquisition part 41 can acquire the first image 61 using one image 60 from two images 60, 60 acquired under different image acquisition conditions, and the second image 62 using the other image 60. The image acquisition conditions include, for example, at least one selected from a radiation direction of a light source 44 for illuminating the tip 51 of the tubular component 50, a shutter speed, and an aperture of an image acquisition device 43 for capturing the tip 51 of the tubular component 50.

[0045] As the image pickup device 43, any of known various image pickup devices can be used as long as it can take an image of the tip 51 of the tubular member 50 from a direction along the flow direction of the fluid (arrow direction AR1 in Fig. 2). Any of various known light sources can be used as the light source 44, as long as it can illuminate the tip 51 of the tubular component 50. The image pickup device 43 is provided with an image sensor 43a and a lens 43b, as shown in Fig. 13. The light source 44 is provided with a sidelight illumination light source 44a.

[0046] The sidelight illumination light source 44a emits sidelight from a direction oblique to the perpendicular direction (Z-axis direction) (arrow L21). The sidelight reaching the tip 51 of the tubular component 50 is reflected by the tip 51 of the tubular component 50 and travels toward the lens 43b of the image pickup device 43 (arrow L22). The reflected light reaching the lens 43b is transmitted through the lens 43b and travels toward the image sensor 43a. This allows the image pickup device 43 to capture an image of the tip 51 of the tubular component 50.

[0047] The image pickup device 43 can change at least one of the above-mentioned image pickup conditions and thus acquire two images 60, 60 so that the deposit 53 adhering to the hole 52 can be easily detected. For example, when capturing an image 60 for use as the second image 62, the image pickup device 43 can make the irradiation angle of the light source 44 larger to the vertical direction (Z-axis direction) than when capturing an image 60 for use as the first image 61. This allows the deposit 53 adhering to the inner wall surface 51a of the tip 51 of the tubular component 50 to be easily detected.

[0048] The light source 44 may further be provided with a top illumination light source for illuminating the tip 51 of the tubular component 50 from a direction along the vertical direction (Z-axis direction). In this case, the image pickup device 43 may capture one image 60 of two images 60, 60 with the top illumination light source and the other image 60 with the side illumination light source 44a. The image pickup device 43 and the light source 44 may also be used in a form in which the acquisition part 41 acquires the first image 61 and the second image 62 using one image 60. 1-4-2. Assessment Part 42

[0049] The judging part 42 judges the presence or absence of the clogging of the hole 52 with the deposit 53 based on a difference image 63 between the first image 61 and the second image 62 obtained by the obtaining part 41 (step S14 to step S17 according to Fig. 8)

[0050] For example, the judging part 42 obtains the difference image 63 for a pixel at the same position of the first image 61 and the second image 62 by subtracting the brightness value of the first image 61 or the second image 62 from the brightness value of the other image (step S14). Fig. 14 shows an example of the difference image 63. The difference image 63 according to this figure corresponds to the difference image from the first image 61 according to Fig. 11 and the second picture 62 according to Fig. 12.

[0051] Specifically, the area of ​​the tip 51 of the tubular component 50 in the first image 61 is according to Fig. 11 with white (brightness value of 255). The area of ​​the tip 51 of the tubular component 50 in the second image 62 according to Fig. 12 is shown in white (brightness value of 255). Therefore, the area of ​​the tip 51 of the tubular component 50 in the difference image 63 is shown in Fig. 14 is displayed with black (brightness value of 0 (= 255 - 255)).

[0052] The area of ​​the hole 52 in the first image 61 according to Fig. 11 is shown in black (brightness value of 0). The area of ​​the hole 52 in the second image 62 according to Fig. 12 is shown in black (brightness value of 0). Therefore, the area of ​​the hole 52 in the difference image 63 is Fig. 14 is represented with black (brightness value of 0 (= 0 - 0)).

[0053] The area of ​​deposit 53 in the first image 61 according to Fig. 11 is shown in black (brightness value of 0). The area of ​​the deposit 53 in the second image 62 according to Fig. 12 is shown in white (brightness value of 255). Therefore, the area of ​​deposit 53 in the difference image 63 is Fig. 14 is displayed with white (brightness value of 255 (= 255 - 0)).

[0054] In this way, only the area of ​​the deposit 53 is displayed in white (brightness value of 255) in the difference image 63. The other areas (the area of ​​the tip 51 of the tubular component 50 and the area of ​​the hole 52) are displayed in black (brightness value of 0). Therefore, the judging part 42 can judge the presence or absence of the hole 52 being blocked by the deposit 53 based on the difference image 63 from the first image 61 and the second image 62. That is, the judging part 42 can judge that the hole 52 is blocked by the deposit 53 if a white area (brightness value of 255) is present in the difference image 63. On the contrary, the judging part 42 can judge that the hole 52 is not clogged with the deposit 53 when there is no white area (brightness value of 255) in the difference image 63.

[0055] In addition, the judging part 42 can provide information about the presence or absence of blockage of the hole 52 based on a deposit detection area SA1, which is an area of ​​an area detected as the deposit 53 in the difference image 63, and a hole reference area SA0, which is a reference area of ​​the hole 52 in the case of no blockage of the hole 52. Specifically, the deposit detection area SA1 corresponds to the area of ​​the deposit 53 (white area) in the difference image 63 according to Fig. 14. The hole reference area SA0 can be a design value according to Fig. 15 can be used.

[0056] The judging part 42 can, in the case that the ratio of the deposit detection area SA1 to the hole reference area SA0 exceeds a predetermined value, give information that the hole 52 is clogged (step S15 to step S17 according to Fig. 8). Specifically, the judging part 42 judges whether the hole 52 is clogged based on the difference image 63 (step S15). If the hole 52 is clogged (Yes in step S15), the judging part 42 judges whether the ratio of the deposit detection area SA1 to the hole reference area SA0 exceeds a predetermined value (step S16).

[0057] The predetermined value is an allowable value (the upper limit) at which the use of the tubular member 50 can be continued, and can be arbitrarily determined. The predetermined value can also be determined per type of the tubular member 50. If the ratio of the deposit detection area SA1 to the hole reference area SA0 exceeds the predetermined value (Yes in step S16), the judging part 42 provides information that the hole 52 is clogged (step S17). For example, the judging part 42 may display information that the hole 52 is clogged on the display device of the nozzle cleaner 30.

[0058] If the hole 52 is not clogged (No in step S15), the control by the inspection device 40 does not perform the assessment and treatment in steps S16 and S17, but performs the assessment in step S18. If the ratio of the deposit detection area SA1 to the hole reference area SA0 is equal to or less than the predetermined value (No in step S16), the control by the inspection device 40 does not perform the treatment in step S17, but performs the assessment in step S18.

[0059] For example, in the case where the tubular component 50 is the suction nozzle 70, the deposit 53 contains flux, detached electrodes of the components 91, debris on the circuit board 90, dust, etc. Thus, there is a possibility that the favorable second threshold value varies depending on the type of deposit 53. Therefore, it is desirable to prepare several second threshold values ​​corresponding to deposits 53 of different types.

[0060] In this case, the acquisition part 41 may acquire a plurality of second images 62 by sequentially using a plurality of second threshold values ​​corresponding to deposits 53 of different types. Then, if the judgment part 42 judges that the hole 52 is clogged based on the difference image 63 between the first image 61 and one of the plurality of second images 62, it may provide information about the type of deposit 53 corresponding to the second threshold value used for the second image 62 used in said judgment.

[0061] If the judgment part 42 judges that the hole 52 is clogged, then, for example, it is assumed that the second threshold value used for the second image 62 used in said judgment is one suitable for distinguishing between the flux and the hole 52. In this case, the judgment part 42 can provide information that the deposit 53 adhering to the hole 52 may be a flux. For example, the judgment part 42 can display the type of deposit 53 (flux in this case) on the display device of the nozzle cleaner 30.

[0062] The judging part 42 can judge the presence or absence of clogging of the hole 52 even if the tip 51 of the tubular member 50 is broken off. Fig. 16 shows an example of the image 60 in the case where the tip 51 of the tubular component 50 is broken. This figure shows a state in which the outer edge 51f (outer wall surface 51b) of the tip 51 of the tubular component 50 is detected. In this figure, a part of the inner wall surface 51a of the tip 51 of the tubular component 50 is missing. As a result, the area of ​​the hole 52 is increased compared with the case of the unbroken tip 51 of the tubular component 50.

[0063] The area of ​​the hole 52 cannot form the closed area if the fracture of the tip 51 of the tubular component 50 reaches the outer wall surface 51b. In this case, the control device 35 can cut the outer edge 51f (outer wall surface 51b) of the tip 51 of the tubular component 50 in the image 60 according to Fig. 16 (step S12 according to Fig. 8). This allows the judging part 42 to detect the fracture of the tip 51 of the tubular member 50 reaching the outer wall surface 51b. The following explains the case where the fracture of the tip 51 of the tubular member 50 is due to the lack of the inner wall surface 51a.

[0064] Fig. 17 shows an example of the deposit 53 adhering to the hole 52. This figure shows the location of the deposit 53 adhering to the hole 52 in the image 60 according to Fig. 16. Fig. 18 shows an example of the first image 61 and Fig. 19 shows an example of the second image 62. In both the first image 61 and the second image 62, the area of ​​the tip 51 of the tubular component 50 is reduced and the area of ​​the hole 52 is increased, corresponding to the fracture of the tip 51 of the tubular component 50. Therefore, the deposit 53 can be recognized in the difference image 63, as shown in Fig. 20 shown.

[0065] The judging part 42 can judge the presence or absence of the breakage of the tip 51 of the tubular component 50 based on the first image 61 obtained by the obtaining part 41. In addition, the judging part 42 can provide information about the presence or absence of the breakage of the tip 51 of the tubular component 50 based on a tip detection area SB1 and a tip reference area SB0 (step S18 to step S20 according to Fig. 8). The tip detection area SB1 is an area of ​​an area detected in the first image 61 as the tip 51 of the tubular component 50. The tip reference area SB0 is a reference area of ​​the tip 51 of the tubular component 50 in the case where the tip 51 is not broken. Specifically, the tip detection area SB1 corresponds to the area of ​​the tip 51 of the tubular component 50 (the white area) in the first image 61 according to Fig. 11 and Fig. 18. The design value according to Fig. 15 can be used.

[0066] For example, if the ratio of the tip detection area SB1 to the tip reference area SB0 is not within a target range, the judging part 42 can judge that the tip 51 of the tubular component 50 is broken. If the ratio of the tip detection area SB1 to the tip reference area SB0 is not within a predetermined range, the judging part 42 can provide information that the tip 51 of the tubular component 50 is broken. The target range and the predetermined range may be the same or different. The target range and the predetermined range can be arbitrarily determined, taking into account the range of manufacturing variation of the tubular component 50, the permissible range within which the use of the tubular component 50 can be continued, etc.For example, the target range can be determined based on the range of manufacturing variation of the tubular component 50, and the specified range can be determined based on the allowable range that is wider than the range of manufacturing variation of the tubular component 50 and within which the use of the tubular component 50 can be continued. The above-mentioned target range and specified range can be determined for each type of tubular component 50.

[0067] Specifically, the judging part 42 judges the presence or absence of the fracture of the tip 51 of the tubular component 50 based on the first image 61 (step S18). For example, it is assumed that the ratio of the tip detection area SB1 to the tip reference area SB0 in the first image 61 is Fig. 11 is within the range of the manufacturing variation of the tubular component 50. In this case, the assessment part 42 judges that the tip 51 of the tubular component 50 is not broken. It is assumed that the ratio of the tip detection area SB1 to the tip reference area SB0 in the first image 61 according to Fig. 18 exceeds the range of manufacturing variation of the tubular component 50. In this case, the assessment part 42 judges that the tip 51 of the tubular component 50 is broken off.

[0068] If the tip 51 of the tubular component 50 is broken off (Yes in step S18), the judging part 42 judges whether the ratio of the tip detection area SB1 to the tip reference area SB0 is within the predetermined range or not (step S19). For example, it is assumed that the ratio of the tip detection area SB1 to the tip reference area SB0 in the first image 61 is Fig. 18 exceeds the permissible range within which the use of the tubular component 50 can be continued. In this case, the ratio of the tip detection area SB1 to the tip reference area SB0 is not within the specified range (No in step S19), and the judging part 42 provides information that the tip 51 of the tubular component 50 is broken (step S20). For example, the judging part 42 may display information on the display device of the nozzle cleaner 30 that the tip 51 of the tubular component 50 is broken.

[0069] If the tip 51 of the tubular component 50 is not broken (No in step S18), the control by the inspection device 40 is terminated once without performing the assessment and treatment according to steps S19 and S20. For example, it is further assumed that the ratio of the tip detection area SB1 to the tip reference area SB0 in the first image 61 is Fig. 18 is within the permissible range in which the use of the tubular component 50 can be continued. In this case, the ratio of the peak detection area SB1 to the peak reference area SB0 is within the predetermined range (Yes in step S19), and the control by the test device 40 is terminated once without performing the treatment according to step S20. 2. Test procedure

[0070] The aspects already mentioned for the test device 40 also apply to the test method. Specifically, the test method includes an acquisition step and an assessment step. The control performed by the acquisition part 41 corresponds to the acquisition step. The control performed by the assessment part 42 corresponds to the assessment step. 3. An example of the advantage of the embodiment

[0071] The test device 40 can assess the presence or absence of blockage of the hole 52 with the deposit 53 based on the difference image 63 from the first image 61 and the second image 62. The advantage mentioned above for the test device 40 also applies to the test method. LIST OF REFERENCE SYMBOLS 40 Test device 41 Extraction part 42 Assessment part 43 Image recording device 44 Light source 50 tubular component 51 lace 52 holes 53 Deposit 60 images 61 first picture 62 second picture 63 Difference image 70 suction nozzle 90 board 91 component SA0 Hole reference area SA1 Deposit detection area SB0 Peak reference area SB1 peak detection area

Claims

[1] An inspection apparatus comprising an acquisition part for acquiring a first image obtained by binarizing an image of a tip of a tubular member through which the fluid can flow, taken from a direction along the flow direction of a fluid, using a first threshold value that can distinguish, in the image, the tip of the tubular member and a hole, which is a portion formed in the tip of the tubular member and through which the fluid can flow, and a second image obtained by binarizing the image using a second threshold value that can distinguish, in the image, the hole and a deposit adhering to the hole, and a judging part for judging the presence or absence of clogging of the hole with the deposit based on a difference image between the first and second images acquired by the acquisition part. [2] The inspection apparatus according to claim 1, wherein the judging part obtains the difference image for a pixel at the same position of the first and second images by subtracting the brightness value of the first or second image from the brightness value of the other image. [3] The inspection apparatus according to claim 1 or 2, wherein the judging part gives information about the presence or absence of the clogging of the hole based on a deposit detection area which is an area of ​​a portion detected as the deposit in the difference image and a hole reference area which is a reference area of ​​the hole in the case of no clogging of the hole. [4] The inspection apparatus according to claim 3, wherein the judging part gives an indication that the hole is clogged in the event that the ratio of the deposit detection area to the hole reference area exceeds a predetermined value. [5] The inspection apparatus according to any one of claims 1 to 4, wherein the obtaining part obtains the first and second images using one image. [6] The inspection apparatus according to any one of claims 1 to 4, wherein the obtaining part obtains the first image using one of two images taken under different image taking conditions and obtains the second image using the other image. [7] The inspection apparatus according to claim 6, wherein the image pickup conditions include at least one selected from a radiation direction of a light source for illuminating the tip of the tubular component, a shutter speed, and an aperture of an image pickup device for image pickup of the tip of the tubular component. [8] An inspection apparatus according to any one of claims 1 to 7, wherein the acquisition part acquires a plurality of second images by sequentially using a plurality of second threshold values ​​corresponding to deposits of different types, and the judgment part, in the case of judging that the hole is clogged based on the difference image between the first image and one of the plurality of second images, provides information on the type of deposit corresponding to the second threshold value used for the second image used in said judgment. [9] The inspection apparatus according to any one of claims 1 to 8, wherein the judging part judges the presence or absence of the breakage of the tip of the tubular member based on the first image obtained by the obtaining part. [10] The inspection apparatus according to claim 9, wherein the judging part gives information about the presence or absence of the breakage of the tip of the tubular component based on a tip detection area which is an area of ​​a region detected as the tip of the tubular component in the first image and a tip reference area which is a reference area of ​​the tip of the tubular component in the case of no tip breakage. [11] The inspection apparatus according to claim 10, wherein the judging part, in the case where the ratio of the tip detection area to the tip reference area is not within a predetermined range, gives information that the tip of the tubular component is broken off. [12] Testing device according to one of claims 1 to 11, wherein the tubular component is a suction nozzle for sucking a component which is mounted on a circuit board. [13] An inspection method comprising an obtaining step of obtaining a first image obtained by binarising an image of a tip of a tubular member through which the fluid can flow, taken from a direction along the flow direction of a fluid, using a first threshold value capable of distinguishing, in the image, the tip of the tubular member and a hole, which is a portion formed in the tip of the tubular member and through which the fluid can flow, and a second image obtained by binarising the image using a second threshold value capable of distinguishing, in the image, the hole and a deposit adhering to the hole, and a judging step of judging the presence or absence of clogging of the hole with the deposit based on a difference image between the first and second images obtained by the obtaining step.

Images