ACTUATOR COIL SUBSTRATE AND ACTUATOR

Abstract

An actuator coil substrate (1) comprises: a flexible insulating substrate (11) wound around an axis (10); and a plurality of coils (21, 22, 23) printed onto the flexible insulating substrate (11), the coils (21, 22, 23) being printed side by side in an axial direction. Each of the plurality of coils (21, 22, 23) includes a conductor (30) arranged to extend in a circumferential direction around the axis (10). The flexible insulating substrate (11) is wound in a cylindrical shape in a longitudinal direction around each of the plurality of coils (21, 22, 23) or is wound such that a cross-section orthogonal to the axis (10) has a polygonal shape.

Description

Area

[0001] The present disclosure relates to an actuator coil substrate and an actuator. State of the art

[0002] Actuators that perform parallel motions are used, for example, for chip mounting in semiconductor manufacturing equipment. One of the actuators is a wave-type linear motor, which includes a wave-shaped magnet, which has a higher magnetic flux utilization rate than a flat plate-shaped magnet. Hereinafter, a wave-type linear motor including a wave-shaped magnet is referred to as a wave-type linear motor. An armature of a general wave-type linear motor includes a plurality of coils wound in a cylindrical shape. The coils are arranged at predetermined intervals using holding members or bobbins, and then the ends of the coils are connected (see, for example, Patent Literature 1). List of citationsPatent literature

[0003] Patent Literature 1: Japanese Patent Application Laid-Open No. 2007-6637 Brief description of the inventionProblem to be solved by the invention

[0004] Magnet wire is used as the winding wire for the coil disclosed in Patent Literature 1. The magnet wire is wound in a cylindrical shape to form the coil. The linear wave motor is used for a head of a chip carrier or the like. Thus, coils of the linear wave motor are often small in size and diameter. Therefore, it is difficult to accurately wind the magnet wire in a cylindrical shape. This leads to winding collapse and winding entanglement. Winding collapse and winding entanglement lead to coil size enlargement. When a plurality of coils are arranged, positional shift in an axial direction is likely to occur, and electrical phase shift occurs in the same phase. As a result, the thrust pulsation of an actuator increases.The invention according to claim 6 of Patent Literature 1 includes a winding element characterized by a bobbin, which enables the invention to prevent positional displacement in the axial direction to a certain extent. However, the above-described invention has a problem in that providing the winding element increases the number of parts, resulting in an increase in manufacturing costs and an increase in the size of an entire armature. The increase in the size of the entire armature affects the increase in the size of an entire shaft linear motor.

[0005] The present disclosure has been developed in view of the foregoing, and an object of the present disclosure is to obtain an actuator coil substrate including a coil that can be formed while preventing an increase in the size of an armature and an increase in the number of parts. Ways to solve the problem

[0006] To solve the above-described problems and achieve the object, an actuator coil substrate according to the present disclosure includes: a flexible insulating substrate wound around an axis; and a plurality of coils printed on the flexible insulating substrate, the coils being printed side by side in an axial direction. Each of the plurality of coils includes a conductor arranged to extend in a circumferential direction of the axis. The flexible insulating substrate is wound in a cylindrical shape in a longitudinal direction of each of the plurality of coils or wound such that a cross section orthogonal to the axis has a polygonal shape. Effects of the invention

[0007] The actuator coil substrate according to the present disclosure has an effect of being able to include a coil that can be formed while preventing an increase in the size of an armature and an increase in the number of parts. Short description of the drawings Fig. 1 is a perspective view of an actuator coil substrate according to a first embodiment. Fig. 2 is a schematic diagram of the actuator coil substrate according to the first embodiment in a state where a flexible insulating substrate included in the actuator coil substrate has not been wound. Fig. 3 is a schematic diagram of the actuator coil substrate according to the first embodiment in a state where the flexible insulating substrate included in the actuator coil substrate is wound. Fig. 4 is a perspective view of the actuator coil substrate according to the first embodiment. Fig. Fig. 5 is a diagram schematically illustrating a cross section of the actuator coil substrate according to the first embodiment in which the flexible insulating substrate made of Fig. 4 was cut into a cross section. Fig. 6 is a perspective view of an actuator coil substrate according to a second embodiment. Fig. 7 is a schematic diagram of the actuator coil substrate according to the second embodiment in a state where a flexible insulating substrate included in the actuator coil substrate is wound. Fig. Fig. 8 is a cross-sectional view of the actuator coil substrate according to the second embodiment, in which the flexible insulating substrate made of Fig. 6 was cut into a cross section. Fig. 9 is a perspective view of an actuator coil substrate according to a third embodiment. Fig. 10 is a schematic diagram of the actuator coil substrate according to the third embodiment in a state where a flexible insulating substrate included in the actuator coil substrate has not been wound. Fig. 11 is a schematic diagram of an actuator coil substrate according to a fourth embodiment. Fig. 12 is a schematic diagram of the actuator coil substrate according to the fourth embodiment. Fig. 13 is a diagram illustrating an exemplary coil pattern that is not a concentrated winding. Fig. 14 is a diagram illustrating the exemplary coil pattern that is not a concentrated winding. Fig. 15 is a schematic diagram of an actuator coil substrate according to a fifth embodiment. Fig. 16 is a schematic diagram of an actuator coil substrate according to a sixth embodiment. Fig. 17 is a perspective view of an actuator according to a seventh embodiment. Fig. 18 is a perspective view of the actuator according to the seventh embodiment. Fig. 19 is a cross-sectional view of the actuator according to the seventh embodiment taken along a cross section. Fig. 20 is a cross-sectional view of the actuator according to the seventh embodiment taken along another cross section. Fig. 21 is a perspective view of an actuator according to an eighth embodiment. Fig. 22 is a perspective view of the actuator according to the eighth embodiment. Fig. 23 is a cross-sectional view of the actuator according to the eighth embodiment taken along a cross section. Fig. 24 is a cross-sectional view of the actuator according to the eighth embodiment taken along another cross section. Fig. 25 is a perspective view of an actuator according to a ninth embodiment. Fig. 26 is a perspective view of the actuator according to the ninth embodiment. Fig. 27 is a cross-sectional view of the actuator according to the ninth embodiment taken along a cross section. Fig. 28 is a cross-sectional view of the actuator according to the ninth embodiment taken along another cross section. Fig. 29 is a perspective view of an actuator according to a tenth embodiment. Fig. 30 is a perspective view of the actuator according to the tenth embodiment. Fig. 31 is a cross-sectional view of the actuator according to the tenth embodiment taken along a cross section. Fig. 32 is a cross-sectional view of the actuator according to the tenth embodiment taken along another cross section. Fig. 33 is a perspective view of an actuator according to an eleventh embodiment. Fig. 34 is a perspective view of the actuator according to the eleventh embodiment. Fig. 35 is a cross-sectional view of the actuator according to the eleventh embodiment taken along a cross section. Fig. 36 is a cross-sectional view of the actuator according to the eleventh embodiment taken along another cross section. Description of embodiments

[0008] In the following, actuator coil substrates and actuators according to embodiments are described in more detail in this document with reference to the drawings. First embodiment.

[0009] Fig. 1 is a perspective view of an actuator coil substrate 1 according to a first embodiment. Fig. Figure 1 schematically illustrates the actuator coil substrate 1. The actuator coil substrate 1 includes a flexible insulating substrate 11 and three coils 21, 22, and 23. The flexible insulating substrate 11 is wound around an axis 10. The three coils 21, 22, and 23 are printed on the flexible insulating substrate 11. The axis 10 does not actually exist. The axis 10 is in Fig. 1 is used to describe the actuator coil substrate 1. The three coils 21, 22, and 23 are arranged side by side in an axial direction. The three coils 21, 22, and 23 represent a plurality of coils. Each of the three coils 21, 22, and 23 includes a conductor 30. Each conductor 30 is arranged such that a portion of the conductor 30 extends in a direction in which the conductor 30 is wound around the axis 10. The direction in which the conductor 30 is wound around the axis 10 is a circumferential direction of a cylinder, with the axis 10 being a central axis.

[0010] The shape of each of the three coils 21, 22, and 23 has a longitudinal direction and a lateral direction. Corresponding long sides of the conductors 30 of the three coils 21, 22, and 23 are wound around the axis 10. The conductor 30 extending in the longitudinal direction of each of the three coils 21, 22, and 23 is located in a plane perpendicular to the axis 10. The flexible insulating substrate 11 is wound in a cylindrical shape in a longitudinal direction of each of the three coils 21, 22, and 23. Alternatively, the flexible insulating substrate 11 is wound so that a cross section orthogonal to the axis 10 has a polygonal shape. That is, the flexible insulating substrate 11 is wound around the axis 10 to form a cylindrical shape. Alternatively, the cross-section of the flexible insulating substrate 11 perpendicular to the axis 10 has a substantially polygonal shape.In a cross-section of the actuator coil substrate 1 perpendicular to the axis 10, the conductor 30 of each of the three coils 21, 22 and 23 can be spirally wound.

[0011] The three coils 21, 22, and 23 are arranged such that respective short sides of the conductors 30 are arranged in the axial direction, and the respective long sides of the conductors 30 are wound around the axis 10. Each of the three coils 21, 22, and 23 can be arranged such that it is wound around the axis 10 with one or more turns. When viewed in a cross section perpendicular to the axis 10, the conductor 30 of each of the three coils 21, 22, and 23 can be penetrated multiple times by any half-line extending radially from the axis 10, or can be penetrated multiple times by half-lines extending radially from an entire circumference of the axis 10. A direction of a half-line extending from the axis 10 in a cross section perpendicular to the axis 10 is referred to as a radial direction, and a direction of guiding around the axis 10 perpendicular to the radial direction is referred to as a circumferential direction.The fact that the conductor 30 is penetrated several times by the half-line described above corresponds to the fact that the conductor 30 overlaps several times in the radial direction. The conductor 30, which is contained in each of the three coils 21, 22, and 23, is arranged such that it extends in the circumferential direction of the axis 10.

[0012] The longitudinally extending conductor 30 of each of the three coils 21, 22, and 23 may be arranged in a plane that is not perpendicular to the axis 10. In this case, when the flexible insulating substrate 11 is wound around one or more turns, an extending portion of the conductor 30 has a spiral shape. The conductor 30 may be partially bent in the longitudinal direction to form a step-like portion and elongated in the longitudinal direction. In this case, the wound conductor 30 is arranged in a plurality of planes with respect to the axis 10.

[0013] The flexible insulating substrate 11, which has a surface on which the three coils 21, 22 and 23 have been printed, is wound into a cylindrical shape to form the actuator coil substrate 1. Fig. 2 is a schematic diagram of the actuator coil substrate 1 according to the first embodiment in a state where the flexible insulating substrate 11 included in the actuator coil substrate 1 has not been wound. Fig. Figure 2 also illustrates the three coils 21, 22, and 23 printed on one surface of the flexible insulating substrate 11. The three coils 21, 22, and 23 are arranged in parallel. A straight longitudinal section of the conductor 30 of each of the three coils 21, 22, and 23 winds back at one end and is connected to another straight longitudinal section of the same coil via a reversing section.

[0014] When the conductor 30 of each of the three coils 21, 22, and 23 is traced in a single direction from one end to the other end along the longitudinal direction, a first straight portion and a second straight portion are traced in opposite directions, with the second straight portion being connected to the first straight portion via the reversing portion. When the flexible insulating substrate 11 is wound around the axis 10, a direction of movement for each of the first straight portion and the second straight portion corresponds to the circumferential direction. When current flows through the conductor 30 of each of the three coils 21, 22, and 23, the direction of movement for each of the first straight portion and the second straight portion corresponds to a direction in which the current flows.

[0015] Although the three coils 21, 22 and 23 in Fig. 2, the number of coils to be printed on the flexible insulating substrate 11 can be set to any desired number. Each of the three coils 21, 22, and 23 has long side portions 20 in a direction perpendicular to a direction in which the three coils 21, 22, and 23 are arranged. That is, each of the three coils 21, 22, and 23 has the long side portions 20 in a direction corresponding to the circumferential direction. Fig. 2 illustrates the long side portions 20 extending linearly, but the long side portions 20 may be partially bent or curved.

[0016] Fig. 3 is a schematic diagram of the actuator coil substrate 1 according to the first embodiment in a state in which the flexible insulating substrate 11 included in the actuator coil substrate 1 is wound. In Fig. 3, the flexible insulating substrate 11 is wound in the longitudinal direction of each of the three coils 21, 22 and 23. In Fig. 3, the flexible insulating substrate 11 is wound so that a coil-printed surface faces outward. The coil-printed surface is a surface on which the three coils 21, 22, and 23 are printed, which is one of two surfaces of the flexible insulating substrate 11. The flexible insulating substrate 11 may be wound so that the coil-printed surface faces inward. Depending on the radius of the cylindrical shape, the flexible insulating substrate 11 partially overlaps in the radial direction. However, since the flexible insulating substrate 11 has insulating performance, there is no possibility of a short circuit occurring even if the coil-printed surface comes into contact with the other surface of the flexible insulating substrate 11 that is not the coil-printed surface.

[0017] Fig. 4 is a perspective view of the actuator coil substrate 1 according to the first embodiment. Fig. 4 illustrates schematically the Fig. 1 illustrates actuator coil substrate 1 and illustrates a cross section A, a cross section B and a cross section C for describing the actuator coil substrate 1. Fig. Fig. 5 is a diagram schematically illustrating a cross section of the actuator coil substrate 1 according to the first embodiment, in which the flexible insulating substrate 11 is made of Fig. 4 was cut into cross section A.

[0018] When the coils 21, 22, and 23 are printed on the flexible insulating substrate 11 as configured, and the flexible insulating substrate 11 is wound without creating a gap, the conductors 30 included in the three coils 21, 22, and 23 are arranged at pitches determined by a printing pattern in the axial direction of the cylindrical flexible insulating substrate 11, and arranged at a pitch corresponding to a thickness of the flexible insulating substrate 11 in the radial direction of the cylindrical flexible insulating substrate 11.The number of turns of each of the three coils 21, 22, and 23 corresponds to the total number of conductors 30 oriented in the cross-section orthogonal to the axis 10, which is the product of the number of turns of each of the three coils 21, 22, and 23 on the flexible insulating substrate 11 that has not been wound and the number of flexible insulating substrates 11 stacked in the radial direction. In . Fig. 5, the number of turns of each of the three coils 21, 22, and 23 on the flexible insulating substrate 11 that has not been wound is two, and the number of stacked flexible insulating substrates 11 is two. Therefore, the number of turns per coil is four. However, the number of turns can be set to any desired number.

[0019] Examples of possible causes of misalignment of aligned windings include etching tolerance of the printing pattern, misalignment between the stacked layers of the wound flexible insulating substrate 11, and the generation of a gap due to winding warpage. Meanwhile, the misalignment of the windings is estimated to be less than 0.1 mm in any case. The degree of misalignment of the windings does not depend on the cross-sectional dimensions of the windings. Meanwhile, the degree of misalignment due to the collapse of the winding of the coil formed by the magnet wire is estimated as an arbitrary integer multiple of one side length of the winding cross-section, that is, one side length of the winding cross-section or twice or more of the side length of the winding cross-section. In the case of a circular cross-section, the side length corresponds to one winding diameter.The finished outer diameter of a general winding is 0.1 mm or more. Therefore, the degree of winding misalignment in a coil structure of the first embodiment is smaller than the degree of misalignment to be generated in magnet wire coils of almost all winding types.

[0020] Focusing on the amount of misalignment between coils, only the etching tolerance of the print pattern contributes to the misalignment between coils in the coil structure of the first embodiment. Therefore, the amount of misalignment is estimated to be 0.01 mm or less. This is significantly smaller than the amount of misalignment expected to be caused after the magnet wire is wound to form a coil. Furthermore, in the coil structure of the first embodiment, a holding member such as a bobbin for positioning the coil is not necessary. Thus, it is possible to prevent an increase in the number of parts and a decrease in the winding space.

[0021] In the actuator coil substrate 1 according to the first embodiment, the rigidity of the flexible insulating substrate 11 does not change at any point in the circumferential direction. For example, the cross-sectional shapes differ between the cross section A and the cross section B of Fig. 4 at all, and the flexible insulating substrate 11 is provided as a single layer in the cross section C. Therefore, the rigidity at the cross section C is lower than the rigidity at each of the cross sections A and B. However, as the number of turns of the flexible insulating substrate 11 increases, the difference between the rigidity of the flexible insulating substrate 11 at the cross sections A and B and the rigidity of the flexible insulating substrate 11 at the cross section C decreases.

[0022] As the number of turns of the flexible insulating substrate 11 increases in this way, the rigidity of the flexible insulating substrate 11 approaches a uniform rigidity in the circumferential direction. Therefore, as the number of turns of the flexible insulating substrate 11 increases, the processability at the time of winding the flexible insulating substrate 11 is good, and in addition, an axial end surface is less likely to be distorted after winding. As a result, it is possible to prevent the windings from locally approaching each other in the circumferential direction. Therefore, even if a gap between the conductors 30 is narrowed in the circumferential direction, the insulation performance is maintained, and the conductor space factor of an actuator can be improved.

[0023] As described above, the actuator coil substrate 1 according to the first embodiment includes the flexible insulating substrate 11 and the three coils 21, 22, and 23. The flexible insulating substrate 11 is wound around the axis 10. The three coils 21, 22, and 23 are printed side by side in the axial direction on the flexible insulating substrate 11. Each of the three coils 21, 22, and 23 includes the conductor 30 arranged to extend in the circumferential direction of the axis 10. The flexible insulating substrate 11 is wound in a cylindrical shape in the longitudinal direction of each of the three coils 21, 22, and 23, or is wound such that the cross section orthogonal to the axis 10 has a polygonal shape.

[0024] Since the conductors 30 are printed on the flexible insulating substrate 11, winding confusion and misalignment between coils are minimized. As a result, the actuator coil substrate 1 according to the first embodiment can prevent an increase in coil size and an increase in thrust pulsation. In addition, since the winding direction of the flexible insulating substrate 11 coincides with the longitudinal direction of each coil, the rigidity of the flexible insulating substrate 11 becomes uniform in the winding direction. As a result, the actuator coil substrate 1 can achieve an effect that allows the flexible insulating substrate 11 to be easily wound during manufacturing.

[0025] The effect to be achieved by the actuator coil substrate 1 according to the first embodiment will be described further. The flexible insulating substrate 11 is easily deformed. Thus, the flexible insulating substrate 11 can be wound together with printed coils. An insulating material of the flexible insulating substrate 11 or a separate insulating layer is provided to ensure insulation of the coils. The interval between the conductors 30 of the coils wound in this way is determined in the axial direction by the accuracy of the printing made at the time of manufacturing the substrate, and is determined in the radial direction by the thickness of the flexible insulating substrate 11 or the thickness of the insulating layer. The above-described distance between the conductors 30 in the axial direction refers to the distance between the conductors 30 in a vertical direction of the coil. Fig. 5. The above-described distance between the conductors 30 in the radial direction refers to the distance between the conductors 30 in a horizontal direction of the cross-section shown in Fig. 5. The alignment property of the conductors 30 is generally very high compared to a case where magnet wire is wound. Therefore, winding collapse and entanglement of windings are less likely to occur in the actuator coil substrate 1. Thus, the actuator coil substrate 1 can prevent an increase in the coil size. The coils printed adjacent to each other in the axial direction are not shifted beyond the thrust accuracy, so an increase in thrust pulsation can be prevented. Furthermore, the actuator coil substrate 1 can include a coil that can be formed while preventing an increase in the size of an armature and an increase in the number of parts. Second embodiment.

[0026] Fig. 6 is a perspective view of an actuator coil substrate 1A according to a second embodiment. Fig. 6 schematically illustrates the actuator coil substrate 1A. The actuator coil substrate 1A differs from the actuator coil substrate 1 according to the first embodiment in that coils are printed on both surfaces of the flexible insulating substrate 11. The coils printed on both surfaces of the flexible insulating substrate 11 are connected via vias. The number of turns in the actuator coil substrate 1A is twice the number of turns obtainable in a case where coils are printed on only one of the surfaces of the flexible insulating substrate 11.

[0027] Fig. Figure 6 illustrates the three coils 21, 22, and 23 printed on a front surface of the flexible insulating substrate 11, and the coil 21 printed on a back surface of the flexible insulating substrate 11. The front surface of the flexible insulating substrate 11 corresponds to an outer surface of the flexible insulating substrate 11, which is wound around the axis 10 to form a cylindrical shape. The back surface of the flexible insulating substrate 11 corresponds to an inner surface of the flexible insulating substrate 11, which is wound around the axis 10 to form the cylindrical shape. Fig. 6 also illustrates a cross section E for describing the actuator coil substrate 1A.

[0028] Fig. Fig. 7 is a schematic diagram of the actuator coil substrate 1A according to the second embodiment in a state where the flexible insulating substrate 11 included in the actuator coil substrate 1A is wound. In the second embodiment, coils on one surface, that is, the coils on the back surface in Fig. 7, coated with an insulating layer 28 to ensure insulation performance. For example, coating the coils with the insulating layer 28 is carried out as follows: a solder mask is applied to a surface on which the coils were printed, or an insulating sheet is attached to the surface on which the coils were printed. Due to the coating of the coils on one surface with the insulating layer 28, the coils on both surfaces are not short-circuited even when the flexible insulating substrate 11 is wound, as shown in Fig. 7, to bring the inner coils and the outer coils into contact with each other. The insulating layer 28 may be provided on both surfaces of the flexible insulating substrate 11.

[0029] Fig. Fig. 8 is a cross-sectional view of the actuator coil substrate 1A according to the second embodiment, in which the flexible insulating substrate 11 is made of Fig. 6 was cut in cross section E. Fig. Figure 8 schematically illustrates a cross section of the actuator coil substrate 1A. The number of coil turns that can be obtained when the coils are arranged on both surfaces of the flexible insulating substrate 11 is twice as high as the number of coil turns that can be obtained when the coils are arranged only on one surface of the flexible insulating substrate 11. The number of turns is eight in the actuator coil substrate 1A according to the second embodiment shown in Fig. 6. Therefore, when coils with the same number of turns are formed, the length of the flexible insulating substrate 11 in the winding direction in the actuator coil substrate 1A according to the second embodiment can be shortened to half compared to the case where coils are arranged only on one surface of the flexible insulating substrate 11. Thus, the longest dimension of the flexible insulating substrate 11 can be relaxed at the time of manufacturing the actuator coil substrate 1A. Third embodiment.

[0030] Fig. 9 is a perspective view of an actuator coil substrate 1B according to a third embodiment. Fig. 9 schematically illustrates the actuator coil substrate 1B. Fig. 10 is a schematic diagram of the actuator coil substrate 1B according to the third embodiment in a state where the flexible insulating substrate 11 included in the actuator coil substrate 1B has not been wound.

[0031] In the three coils 21, 22, and 23 included in the actuator coil substrate 1B, the long side portion 20 of each of the three coils 21, 22, and 23 generates thrust of an actuator in a moving direction. A connecting wire portion 20A located at a coil end and connecting the long side portion 20 and the long side portion 20 of the same phase in the axial direction hardly contributes to the thrust of the actuator in the moving direction. Hereinafter, the connecting wire portion 20A is referred to as the "coil end portion 20A." That is, the thrust of the actuator in the moving direction increases as the proportion of the long side portions 20 facing a magnet in the three coils 21, 22, and 23 becomes larger than the proportion of the coil end portions 20A therein.

[0032] In the third embodiment, the length of the longitudinal direction of the winding of each of the three coils 21, 22, and 23 formed on the flexible insulating substrate 11 is equal to or greater than the length of an inner circumference of the flexible insulating substrate 11 that has been cylindrically wound. That is, when the flexible insulating substrate 11 is wound, the long side portions 20 overlap at some portions in the radial direction. Therefore, it can be considered that the winding of a first turn and the winding of a second and subsequent turns are connected in the circumferential direction for each of the three coils 21, 22, and 23. Thus, the proportion of the long side portions 20 can be increased.

[0033] For example, assume that X denotes the coil length in the circumferential direction, and α denotes the length of the coil end portion 20A in a case where the longitudinal portion of each of the three coils 21, 22, and 23 terminates in a curve in the circumferential direction. Then, the relationship between the long side portion 20 and the coil end portion 20A of the coil is expressed by the formula (1) below. Long side section 20: Coil end section 20A=X−2α:2α

[0034] Meanwhile, when the flexible insulating substrate 11 is wound n times in the circumferential direction, the relationship between the long side portion 20 and the coil end portion 20A is expressed by the formula (2) below. Long side section 20: Coil end section 20A==nX−2α:2α=X−2α / n:2α / n

[0035] Since n>1 in the Fig. 9, the ratio between the long side portion 20 and the coil end portion 20A is expressed by formula (2). The ratio of formula (2) is larger than the ratio of formula (1). Therefore, in a coil structure of the third embodiment, the thrust of the actuator in the moving direction is larger than that to be obtained in a case where the longitudinal portion of each of the three coils 21, 22, and 23 is terminated in a curve in the circumferential direction. Moreover, as can be seen from formula (2), as the number of turns n of the flexible insulating substrate 11 increases, the proportion of the long side portions 20 increases, and thus the rate of increase of the thrust also increases.

[0036] In the actuator coil substrate 1B according to the third embodiment, the length of the long side portion 20 in each of the three coils 21, 22, and 23 in the winding direction of the flexible insulating substrate 11 is greater than the length of the inner circumference of the cylinder formed by the flexible insulating substrate 11 having been cylindrically wound. Since the long side portion 20 contributing to thrust is wound by one or more turns and the proportion of the long side portion 20 per coil length increases, the actuator coil substrate 1B contributes to increasing the thrust of the actuator including the actuator coil substrate 1B. Fourth embodiment.

[0037] The Fig. 11 and Fig. 12 are both schematic representations of an actuator coil substrate 1C according to a fourth embodiment. Fig. 11 and Fig. 12 are spiral objects coils. The Fig. 11 and Fig. 12 illustrate the actuator coil substrate 1C in a state where the flexible insulating substrate 11 has not been wound. Fig. 11 illustrates a front surface of the flexible insulating substrate 11 of the actuator coil substrate 1C. Fig. 12 illustrates a back surface of the flexible insulating substrate 11 of the actuator coil substrate 1C viewed through the front surface.

[0038] In the fourth embodiment, the flexible insulating substrate 11 is wound in the vertical direction, and coils are printed on both surfaces of the flexible insulating substrate 11. A coil pattern is formed such that respective axial center positions of windings coincide with each other. That is, the coils are so-called concentrated winding coils. Connecting portions located beyond the coil ends are formed from the Fig. 11 and Fig. 12 is omitted. Coils at the same position in the axial direction on the front and rear surfaces of the flexible insulating substrate 11 are connected such that two terminals at the same position, that is, terminals A1, B1,..., and E1, are connected via internal vias or the like. The above-described axial direction corresponds to the horizontal direction in the Fig. 11 and Fig. 12.

[0039] Coils at different positions in the axial direction are connected in series or parallel to connect coils of the same phase where the currents are in phase. For example, when two coils are connected in series by three-phase power supply, a conceivable configuration is as follows: Terminals A2, B2, and C2 serve as respective inflow sources of phase currents, terminal A3 is connected to terminal D2, terminal B3 is connected to terminal E2, terminal C3 is connected to terminal F2, and terminal D3, terminal E3, and terminal F3 are short-circuited.

[0040] Since the axial length of a wave linear motor is finite, the flexible insulating substrate 11 also has an end in the axial direction. In a case where the coils are concentrated winding coils, as in Fig. 11 and Fig. 12, it is possible to arrange the coils at both the left and right ends of both surfaces of the flexible insulating substrate 11.

[0041] The Fig. 13 and Fig. 14 are illustrations for comparison with the Fig. 11 and Fig. 12 and are diagrams illustrating an exemplary coil pattern that is not a concentrated winding. Fig. 13 and Fig. 14 are spiral objects coils. The Fig. 13 and Fig. 14 illustrate the actuator coil substrate in a state where the flexible insulating substrate 11 has not been wound. Fig. 13 illustrates the front surface of the flexible insulating substrate 11 of the actuator coil substrate. Fig. 14 illustrates the back surface of the flexible insulating substrate 11 of the actuator coil substrate, viewed through the front surface.

[0042] The Fig. 13 and Fig. 14 illustrate a state in which windings are arranged such that the windings are shifted at regular intervals in the axial direction. That is, the Fig. 13 and Fig. 14 illustrate a so-called distributed winding. In the Fig. 13 and Fig. 14, each winding turn of the coils includes a portion formed on the front surface and a portion formed on the back surface of the flexible insulating substrate 11. Two terminals at the same position on both surfaces of the flexible insulating substrate 11, that is, terminals H2, ..., terminals H6, terminals I2, ..., terminals I6, ..., terminals P2, ..., and terminals P6 are connected via internal vias or the like to form three turns per coil, while one loop of each winding is shifted in the axial direction.

[0043] The connection between the coils is established such that a long side portion on the front surface and a long side portion on the back surface of each coil are energized in the same phase and in the same direction. For example, when three coils are connected in series by three-phase power supply, a conceivable configuration is as follows: A terminal H1, a terminal I7, and a terminal J1 serve as respective inflow sources of phase currents, a terminal H7 is connected to a terminal K7, a terminal K1 is connected to a terminal N1, a terminal I1 is connected to a terminal L1, a terminal L7 is connected to a terminal O7, a terminal J7 is connected to a terminal M7, a terminal M1 is connected to a terminal P1, and a terminal N7, a terminal O1, and a terminal P7 are short-circuited.

[0044] In the case of the Fig. 13 and Fig. 14, it is not possible to print long side sections on the right side of the front surface and the left side of the rear surface with respect to the axial direction with respect to the coil ends, or it is necessary to change the length of a long side section or a coil end section before printing. Both of these result in a decrease in the thrust of an actuator. However, it can be said that the Fig. 11 and Fig. 12 of the fourth embodiment contributes to improving the thrust of the actuator because the coils can be arranged up to the axial ends of both surfaces of the flexible insulating substrate 11.

[0045] In the actuator coil substrate 1C according to the fourth embodiment, each of the three coils 21, 22, and 23 is printed as a concentrated winding in which the respective winding turns positions in a single coil coincide with each other in the axial direction. Therefore, the coils 21, 22, and 23 can be arranged on both surfaces of the flexible insulating substrate 11 up to the axial ends. Thus, the number of turns of each of the three coils 21, 22, and 23 increases, and the thrust of the actuator incorporating the actuator coil substrate 1C increases. Fifth embodiment.

[0046] Fig. 15 is a schematic diagram of an actuator coil substrate 1D according to a fifth embodiment. In Fig. 15 are spiral objects coils. Fig. 15 illustrates a state in which windings at coil end portions of the coils printed as concentrated windings are bent by 90 degrees. That is, in each of a plurality of coils, one end of a long side portion in the flexible insulating substrate 11 is bent by 90 degrees. As a result, it is possible to maximize the length of the long side portion that generates thrust per the same coil length. As a result, the thrust of an actuator including the actuator coil substrate 1D increases. In addition, according to the actuator coil substrate 1D, the length of the coil end portion in the winding direction is minimized. Therefore, it is also possible to obtain an advantage in that a range where the rigidity changes at the time of winding can be minimized.Furthermore, since windings which are conductors are densely distributed to the ends of the flexible insulating substrate 11, it is also possible to obtain an effect of simply winding the actuator coil substrate 1D. Sixth embodiment.

[0047] Fig. 16 is a schematic diagram of an actuator coil substrate 1E according to a sixth embodiment. Fig. Fig. 16 illustrates the actuator coil substrate 1E in a state where no substrate has been wound, and illustrates front surfaces of different substrates 11A and 11B on the left side and the right side, respectively. Fig. 16 are spiral objects (coils). Substrates 11A and 11B are flexible insulating substrates. Fig. 16, a direction in which the substrates 11A and 11B are wound corresponds to the horizontal direction. The coils printed on the substrates 11A and 11B are not formed within the left and right substrates 11A and 11B. Each coil is printed such that each coil is formed when the left and right substrates 11A and 11B are connected in the winding direction. A terminal 29 is provided at one end of a coil to be connected on one of the substrates 11A and 11B, and is connected by a wire or the like to a terminal 29 at the same position in the axial direction on the other substrate. The axial direction corresponds to the vertical direction.

[0048] As described above, the flexible insulating substrate in the sixth embodiment is divided in the winding direction. Coils printed on divided substrates are electrically connected to each other to establish electrical connection between the divided substrates. Therefore, the actuator coil substrate 1E according to the sixth embodiment can eliminate the manufacturing limitation on the substrate length in the winding direction and can be used in a case where the number of turns of the flexible insulating substrate is very large or in a case where the winding diameter is very large.

[0049] It should be noted that although the two left and right substrates 11A and 11B in Fig. 16, three or more substrates may be connected. In such a case, a coil end portion is included in a substrate at the left end and a substrate at the right end. With this substrate configuration, there is no manufacturing restriction on the substrate length in the winding direction of the substrate. Thus, this configuration can be applied in a case where the number of turns of the substrate is very large or in a case where the winding diameter is very large. Seventh embodiment.

[0050] The Fig. 17 and Fig. 18 are perspective views of an actuator 51 according to a seventh embodiment. Fig. 17 and Fig. 18 illustrate the actuator 51 schematically. Fig. 18 illustrates a cross section F and a cross section G for describing the actuator 51. Fig. 19 is a cross-sectional view of the actuator 51 according to the seventh embodiment taken along the cross section F. Fig. 20 is a cross-sectional view of the actuator 51 according to the seventh embodiment along the cross section G. The Fig. 19 and Fig. 20 schematically illustrate the cross sections of the actuator 51.

[0051] The actuator 51 includes a housing 52 and a shaft 53. The housing 52 has a rectangular parallelepiped outer shape. The shaft 53 has a cylindrical shape and protrudes from the housing 52. The outer surface of the housing 52 is covered with brackets 54A and 54B and a frame 55. The inner surface of the frame 55 has a cylindrical shape. A core 56 made of a soft magnetic material is inserted into the frame 55 along the inner peripheral surface of the frame 55. An actuator coil substrate including the flexible insulating substrate 11 wound in a cylindrical shape is inserted into the core 56.

[0052] Bearings 57 that reduce axial sliding resistance are installed at radially central portions of the brackets 54A and 54B, so that the shaft 53 is supported by the bearings 57 of the brackets 54A and 54B on both sides. A magnet 58 is attached to a surface of a part of the shaft 53, which part is located inside the housing 52. The magnet 58 is located at a certain distance from the flexible insulating substrate 11 in such a way as to face the flexible insulating substrate 11. The magnet 58 is magnetized in the radial direction, and the magnetization orientation is switched at regular intervals in the axial direction. Fig. 20 illustrates the magnet 58, which is a four-pole magnet, and twelve flexible insulating substrates 11. Meanwhile, the number of poles of the magnet 58, the number of flexible insulating substrates 11, and the arrangement of the magnet 58 and the flexible insulating substrates 11 are not limited to those shown in Fig. 20 are illustrated.

[0053] When a current with constant periodicity is applied to the flexible insulating substrate 11, the flexible insulating substrate 11 serves as an armature and causes the housing 52 or the shaft 53 to translate in the axial direction. Therefore, it is possible to move only one of the housing 52 and the shaft 53 by fixing the other to remain stationary. Compared with the conventional shaft linear motor, the structure of the actuator 51 according to the seventh embodiment shown in FIG. Fig. 17, a simplified configuration is provided, with a small number of retaining elements around the armature. Thus, the space occupied by the armature in the housing 52 increases, so that the thrust of the actuator 51 increases. Eighth embodiment.

[0054] The Fig. 21 and Fig. 22 are perspective views of an actuator 51A according to an eighth embodiment. Fig. 21 and Fig. 22 illustrate the actuator 51A schematically. Fig. 22 illustrates a cross section H and a cross section I for describing the actuator 51A. Fig. 23 is a cross-sectional view of the actuator 51A according to the eighth embodiment taken along the cross section H. Fig. 24 is a cross-sectional view of the actuator 51A according to the eighth embodiment taken along the cross section I. Fig. 23 and Fig. 24 schematically illustrate the cross sections of the actuator 51A.

[0055] Compared to the actuator 51 according to the seventh embodiment shown in Fig. 17, the magnet 58 is not fixed to the surface of the shaft 53, but is located inside the shaft 53 in the actuator 51A according to the eighth embodiment shown in Fig. 21. A method of inserting the magnet 58 in a cylindrical shape into the shaft 53 in a cylindrical shape or molding the shaft 53 so that the shaft 53 includes the magnet 58 is a conceivable method for manufacturing the shaft 53. In the actuator 51A, the diameter of the shaft 53 is constant throughout the shaft 53. Thus, the movable range of the shaft 53 in the axial direction can be expanded. Since it is not necessary to ensure a space for avoiding contact with the magnet 58 in the housing 52, the actuator 51A allows the housing 52 to be shortened in the axial direction. Ninth embodiment.

[0056] The Fig. 25 and Fig. 26 are perspective views of an actuator 51B according to a ninth embodiment. Fig. 25 and Fig. 26 schematically illustrate the actuator 51B. Fig. 26 illustrates a cross section J and a cross section K for describing the actuator 51B. Fig. 27 is a cross-sectional view of the actuator 51B according to the ninth embodiment taken along the cross section J. Fig. Fig. 28 is a cross-sectional view of the actuator 51B according to the ninth embodiment along the cross section K. The Fig. 27 and Fig. 28 schematically illustrate the cross sections of the actuator 51B.

[0057] Compared to the actuator 51 according to the seventh embodiment shown in Fig. 17, cross sections of the housing 52 and the shaft 53 are rectangular with long sides facing the magnet 58 in the actuator 51B according to the ninth embodiment shown in Fig. 25. Axial cross sections of the core 56 and the flexible insulating substrate 11 located in the housing 52 are rectangular according to the shape of the housing 52. The magnets 58, which are plate-shaped or block-shaped magnets, are attached to upper and lower surfaces of the shaft 53 so as to face the flexible insulating substrate 11 with a large area. The magnetization orientations of the magnets 58 are opposite to each other in the radial direction on the upper and lower surfaces of the shaft 53, and the upper and lower directions of the magnetization orientations are switched at regular intervals in the axial direction.

[0058] In Fig. 25, no magnet is attached to side surfaces of the shaft 53, but a structure in which an additional magnet is attached to one side surface or both side surfaces of the shaft 53 to enlarge the areas of magnets facing the coil is also a conceivable structure.

[0059] In the structure of the ninth embodiment, the actuator 51B has a rectangular cross-section, so the actuator 51B can be installed in a narrow space. Since the magnet 58 is used in a rectangular shape, the magnet 58 is easily processed, and the manufacturing cost of the actuator 51B is reduced. Tenth embodiment.

[0060] The Fig. 29 and Fig. 30 are perspective views of an actuator 51C according to a tenth embodiment. Fig. 29 and Fig. 30 schematically illustrate the actuator 51C. Fig. 30 illustrates a cross section L and a cross section M for describing the actuator 51C. Fig. 31 is a cross-sectional view of the actuator 51C according to the tenth embodiment taken along the cross section L. Fig. 32 is a cross-sectional view of the actuator 51C according to the tenth embodiment along the cross section M. The Fig. 31 and Fig. 32 schematically illustrate the cross sections of the actuator 51C.

[0061] Compared to the actuator 51 according to the seventh embodiment shown in Fig. 17, the mounting positions of the flexible insulating substrate 11 and the magnet 58 in the actuator 51C according to the tenth embodiment shown in Fig. 29, the reverse is true. The magnet 58 is mounted within the core 56 of the housing 52, and the flexible insulating substrate 11 is wrapped around the surface of the shaft 53.

[0062] When manufacturing the housing 52 for the actuator 51 according to the seventh embodiment, in which the flexible insulating substrate 11 is installed on the housing 52, a conceivable manufacturing process is as follows: the flexible insulating substrate 11 is wound around a jig serving as a cylindrical mandrel, the jig is removed after bonding, and the flexible insulating substrate 11 is fixed to the core 56. In the structure of the actuator 51C according to the tenth embodiment, the flexible insulating substrate 11 can be directly wound around the shaft 53 using the shaft 53 as a mandrel. Thus, the manufacturing process is simplified. In the structure of the actuator 51C, it is not necessary to remove the jig. Therefore, there is no risk of the inner peripheral surface of the flexible insulating substrate 11 being damaged by the jig sliding. Eleventh embodiment.

[0063] The Fig. 33 and Fig. 34 are perspective views of an actuator 51D according to an eleventh embodiment. Fig. 33 and Fig. 34 schematically illustrate the actuator 51D. Fig. 34 illustrates a cross section N and a cross section P for describing the actuator 51D. Fig. 35 is a cross-sectional view of the actuator 51D according to the eleventh embodiment taken along the cross section N. Fig. 36 is a cross-sectional view of the actuator 51D according to the eleventh embodiment along the cross section P. The Fig. 35 and Fig. 36 schematically illustrate the cross sections of the actuator 51D.

[0064] The actuator 51D according to the eleventh embodiment shown in Fig. 33 does not include the shaft 53 included in the actuators 51, 51A, 51B, and 51C. The actuator 51D includes a support iron core 61 disposed in the center of the housing 52 instead of the shaft 53. The support iron core 61 is connected to the brackets 54A and 54B. The cross-sectional shape of the support iron core 61 is rectangular. A sliding part 62 is attached to each surface of the support iron core 61, and the flexible insulating substrate 11 is wound around the outside of the sliding part 62. As a result, the flexible insulating substrate 11 can move in parallel around the support iron core 61. Support rods 63 extend from portions of the sliding part 62 around which the flexible insulating substrate 11 is not wound. The support rods 63 support a table 64 located outside the housing 52. Thus, the parallel movement of the flexible insulating substrate 11 is transmitted to the table 64 via the sliding part 62.

[0065] The cores 56 are arranged within the frame 55 of the housing 52. The magnets 58 are attached to the inner sides of the cores 56 and face the front and rear surfaces of the flexible insulating substrate 11. Fig. 33, the table 64 is attached to the support rods 63 extending from one side surface of the housing 52. Meanwhile, it is also conceivable that areas of the magnets 58 facing the coil are increased, for example, by the following structure: the support rods 63 extend from both sides of the housing 52, or the magnet 58 is also attached to a side surface facing one side surface of the housing 52. When an armature serves as a driver in the actuator 51D according to the eleventh embodiment, the weight of the driver can be reduced as much as possible without the table 64. As a result, a high thrust density can be obtained.

[0066] Each of the actuators 51, 51A, 51B, 51C, and 51D according to the seventh to eleventh embodiments includes an actuator coil substrate and the magnet 58 arranged to face the actuator coil substrate. The actuator coil substrate is the actuator coil substrate according to any one of the first to sixth embodiments. The structure of each of the actuators 51, 51A, 51B, 51C, and 51D according to the seventh to eleventh embodiments is simplified, with a small number of support members provided around coils. Thus, the space occupied by the armature in the housing 52 increases. As a result, the thrust of the actuators 51, 51A, 51B, 51C, and 51D increases.

[0067] In the actuators 51, 51A, and 51B according to the seventh to ninth embodiments, a driver or stator including the magnet 58 is disposed in each of a plurality of coils. Compared with a configuration in which a magnet is disposed outside a coil, the outer diameter or outer volume of the magnet in the actuators 51, 51A, and 51B can be reduced. Thus, it is possible to reduce the amount of rare earth elements to be used and the manufacturing cost.

[0068] In the actuators 51C and 51D of the tenth and eleventh embodiments, a driver or a stator including a magnet is disposed outside each of a plurality of coils. In the actuators 51C and 51D, the flexible insulating substrate 11 can be directly wound using the shaft 53 or the sliding part 62 as a mandrel. As a result, the manufacturing process is simplified. In addition, since it is not necessary to remove the jig, there is no risk of the inner peripheral surface of the flexible insulating substrate 11 being damaged by the sliding of the jig, and a clearance for removing the jig is not necessary. Therefore, it is possible to wind the flexible insulating substrate 11 at a higher density, so that the actuators 51C and 51D contribute to improving the thrust of the motor.

[0069] The configurations set forth in the above embodiments show examples, and it is possible to combine the configurations with another known technique or to combine the embodiments with each other, and it is also possible to partially omit or change the configurations without departing from the gist of the present disclosure. List of reference symbols

[0070] 1, 1A, 1B, 1C, 1D, 1E Actuator coil substrate; 10 Axis; 11 Flexible insulating substrate; 11A, 11B Substrate; 20 Long side portion; 20A Coil end portion; 21, 22, 23 Coil; 28 Insulating layer; 29 Terminal; 30 Conductor; 51, 51A, 51B, 51C, 51D Actuator; 52 Housing; 53 Shaft; 54A, 54B Bracket; 55 Frame; 56 Core; 57 Bearing; 58 Magnet; 61 Support iron core; 62 Slider; 63 Support rod; 64 Table. QUOTES CONTAINED IN THE DESCRIPTION

[0000] This list of documents submitted by the applicant was generated automatically and is included solely for the convenience of the reader. This list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions. Cited patent literature

[0000] JP 2007-6637

[0003]

Claims

[1] Actuator coil substrate, comprising: a flexible insulating substrate wound around an axis; and a plurality of coils printed on the flexible insulating substrate, the coils being printed side by side in an axial direction, wherein each of the plurality of coils includes a conductor arranged to extend in a circumferential direction of the axis, and the flexible insulating substrate is wound in a cylindrical shape in a longitudinal direction of each of the plurality of coils or is wound such that a cross section orthogonal to the axis has a polygonal shape. [2] The actuator coil substrate according to claim 1, wherein a length of a long side portion of each of the plurality of coils in a winding direction of the flexible insulating substrate is longer than a length of an inner circumference of a cylinder formed by the flexible insulating substrate that has been cylindrically wound. [3] The actuator coil substrate according to claim 1 or 2, wherein each of the plurality of coils is printed as a concentrated winding in which respective positions of winding turns in a single coil coincide with each other in the axial direction. [4] The actuator coil substrate according to claim 3, wherein one end of a long side portion of each of the plurality of coils is bent at an angle of 90 degrees within the flexible insulating substrate. [5] Actuator coil substrate according to one of claims 1 to 4, wherein the flexible insulating substrate is divided in a winding direction and Coils printed on split substrates are electrically connected to each other to establish an electrical connection between the split substrates. [6] Actuator, comprising: the actuator coil substrate according to one of claims 1 to 5; and a magnet arranged to face the actuator coil substrate. [7] The actuator of claim 6, wherein a driver or a stator is disposed within each of the plurality of coils, the driver or the stator including the magnet. [8] The actuator of claim 6, wherein a driver or a stator is disposed outside each of the plurality of coils, the driver or the stator including the magnet.

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