COOLER

Abstract

A cooler (10) comprises: a base layer (1) to which an element is to be connected; a finned layer (2) with a fin arrangement surface (R20) in which several fins (21) are arranged, the fins being connected to the base layer (1); and an opening-shaped layer (3) connected to the finned layer (2) and having several fin inlet openings (31) and several fin outlet openings (32), the fin inlet openings allowing the flow of a coolant to the fin arrangement surface (R20). The several fin inlet openings (31) are connected via an inlet channel to an inlet opening (71) into which the coolant of the cooler (10) flows. The multiple lamellar outlet openings (32) are connected via an outlet channel to an outlet opening (72) from which the coolant of the radiator (10) exits.The multiple lamellar inlet openings (31) and the multiple lamellar outlet openings (32) are arranged alternately and parallel to each other in a direction radially away from a point in a projection area of ​​the opening shape layer (3) of the shape of the element.

Description

Area

[0001] The present invention relates to a cooler for cooling an element using a coolant circulated by a pump. background

[0002] Patent document 1 describes a conventional cooler for cooling a semiconductor power device. The cooler described in patent document 1 comprises a substrate assembly consisting of a distributor layer, a channel layer, a ceramic layer, and a metal layer, stacked sequentially and interconnected, as well as a collector housing with an inlet and an outlet. The distributor layer branches a stream of cooling water, which is the coolant, flowing from the inlet of the collector housing into inlet distributors, which are multiple channels, and directs the cooling water to the channel layer. The distributor layer also receives streams of cooling water that have passed through the channel layer through outlet distributors, which are multiple channels, and combines the streams of cooling water into the outlet of the collector housing.In the distributor layer, the inlet and outlet distributors, oriented in one direction, are arranged alternately at predetermined intervals in a second direction. The channel layer is a layer that feeds the cooling water from the distributor layer to channels oriented in the second direction and returns the cooling water flowing through the channels to the distributor layer. In the channel layer, the multiple channels extending in the second direction are arranged at predetermined intervals in the first direction on the side closer to the interface with the distributor layer. The ceramic layer is made of a material with high thermal conductivity. The metal layer is connected to a semiconductor power device to be cooled.

[0003] In the cooler described in patent document 1, the cooling water, when it enters from the inlet opening of the manifold, flows through the inlet distributors of the distributor layer and then through the channels of the channel layer, and is discharged via the outlet distributors of the distributor layer from the outlet opening of the manifold. This dissipates the heat generated by the semiconductor power device and transferred via the metal layer and the ceramic layer by means of the cooling water flowing through the channel. Cited Literature Patent Document

[0004] Patent document 1: Japanese patent JP 5,711,459 B2 Summary of the invention Problem to be solved by the invention

[0005] A heat-generating element, such as a laser element, whose temperature dependence directly affects the vibration power, should exhibit a uniform temperature distribution. The temperature distribution of such a heat-generating element can be adjusted by modifying the pattern design or the current within the element. However, creating a design that accommodates such temperature distribution adjustments is not straightforward. Furthermore, a concentric and low-temperature distribution is desirable to simplify the design. In conventional techniques, the cooling water flows through the channeled layer in contact with the ceramic layer in a single direction—namely, along the channels, which are designed to extend in a second direction.This leads to a non-concentric temperature distribution and a significant temperature change along the flow direction of the cooling water.

[0006] The present invention was made taking into consideration the foregoing, and it is an objective of the present invention to provide a cooler that is able to make the temperature distribution caused by the cooler more concentric and to reduce the temperature distribution within an element to a value that is smaller than the temperature distribution of conventional technology. Means to solve the problem

[0007] To solve the problem and achieve the objective described above, a cooler according to the present invention is a cooler that is connected to an element to cool the element, wherein the cooler comprises: a base layer to which the element is to be connected; a finned layer with a fin arrangement surface in which a plurality of fins are arranged, the fins being connected to the base layer; and an opening-shaped layer connected to the finned layer, comprising a plurality of fin inlet openings and a plurality of fin outlet openings, the fin inlet openings allowing the flow of a coolant to the fin arrangement surface. The plurality of fin inlet openings are connected via an inlet channel to an inlet opening, the inlet opening being an opening into which the coolant of the cooler flows.The multitude of finned outlet openings is connected via an outlet channel to an outlet opening, the outlet opening being an opening from which the radiator coolant flows. The multitude of finned inlet openings and the multitude of finned outlet openings are arranged alternately and parallel to each other in a radial direction from a point in a projection area of ​​the element's shape onto the opening shape layer. Effects of the invention

[0008] A cooler according to the present invention offers the advantageous effect that the temperature distribution caused by the cooler is more concentric and the temperature distribution within an element is lower than the temperature distribution in conventional technology. Brief description of the drawings Fig. Figure 1 is a cross-sectional view that schematically shows an example of the configuration of a cooler according to a first embodiment. Fig. Figure 2 is a top view showing an exploded view of the configuration of each layer of the cooler according to the first embodiment. Fig. Figure 3 is an image illustrating an example of the flow of coolant in the radiator according to the first embodiment. Fig. Figure 4 is an image illustrating an example of the flow of coolant in an opening-shaped layer of the radiator according to the first embodiment. Fig. Figure 5 is an image illustrating an example of the relationship between an element arrangement surface and the opening shape layer that forms the cooler according to the first embodiment. Fig. Figure 6 is an enlarged top view of an area of ​​the opening shape layer. Fig. Figure 7 is a top view illustrating another example of the configuration of the opening shape layer forming the cooler according to the first embodiment. Fig. Figure 8 is a top view illustrating another example of the configuration of the opening shape layer forming the cooler according to the first embodiment. Fig. Figure 9 is a top view showing another example of the configuration of the opening shape layer that forms the cooler according to the first embodiment. Fig. Figure 10 is a top view showing another example of the configuration of the opening shape layer that forms the cooler according to the first embodiment. Fig. Figure 11 is a top view showing another example of the configuration of the opening shape layer forming the cooler according to the first embodiment. Fig. Figure 12 is a top view that schematically shows a positional relationship between an opening area of ​​the opening form layer and a groove in a louver arrangement surface that is arranged in a louver form layer. Fig. Figure 13 is a partially enlarged top view showing an example of the configuration of the fin-shaped layer forming the cooler according to the first embodiment. Fig. Figure 14 is a top view showing another example of the configuration of the fin-shaped layer forming the cooler according to the first embodiment. Fig. 15 is an enlarged top view of an area of ​​the lamella arrangement surface of the lamella shape layer made of Fig. 14. Fig. Figure 16 is a top view showing an example of the configuration of the opening shape layer, which is combined with the louver shape layer. Fig. 14 is connected. Fig. Figure 17 is a cross-sectional view that schematically shows an example of the configuration of a cooler according to a second embodiment. Fig. Figure 18 is a top view showing an example of the configuration of a channel-shaped layer forming the cooler according to the second embodiment. Fig. Figure 19 is an image showing an example of the superimposed opening shape layer and the channel shape layer. Fig. Figure 20 is a cross-sectional view that schematically shows an example of the configuration of a cooler according to a third embodiment. Fig. Figure 21 is a top view showing an example of the configuration of a channel connection layer forming the cooler according to the third embodiment. Fig. Figure 22 is a top view showing an example of the configuration of a channel distribution layer forming the cooler according to the third embodiment. Fig. Figure 23 is a top view showing an example of the configuration of an inlet-outlet arrangement layer forming the cooler according to the third embodiment. Fig. Figure 24 is a top view showing an example of the configuration of the channel connection layer that forms the cooler according to the third embodiment. Description of the embodiments

[0009] A cooler according to embodiments of the present invention is described in detail below with reference to the drawings. First embodiment.

[0010] Fig. Figure 1 is a cross-sectional view schematically showing an example of a cooler configuration according to a first embodiment. An element 100, which is an object to be cooled, is connected to a cooler 10, with a heat-conducting layer 101, which provides electrical insulation, positioned between them. The element 100 is an element that generates heat during its operation, for example, a laser element. The heat-conducting layer 101 is a layer for transferring heat from the element 100 to the cooler 10 and consists of a material that is electrically insulating and thermally highly conductive, i.e., it conducts heat well. The heat-conducting layer 101 and the element 100 are connected to each other by a bonding material. Examples of materials for the heat-conducting layer 101 include ceramics such as aluminum nitride (AlN), aluminum oxide (Al₂O₃), and AlSiC, as well as diamond.The thermal conductivity layer 101 also serves to prevent potential breakage of the element 100 caused by stresses that arise when connecting it to the cooler 10 due to differing coefficients of thermal expansion between the element 100 and the cooler 10. If the thermal conductivity layer 101 does not provide electrical insulation for the element 100, the stresses that arise when connecting it to the cooler 10 due to differing coefficients of thermal expansion can be controlled by using copper-tungsten (CuW), copper-molybdenum (CuMo), or similar materials. If electrical insulation is not required and the difference in the coefficient of thermal expansion between the element 100 and the cooler 10 is not problematic depending on the application, the element 100 can also be connected directly to the cooler 10 without using the thermal conductivity layer 101, using a connecting material.It should be noted that when the element 100 is arranged on the cooler 10 with the heat-conducting layer 101 positioned between them, the electrical conductivity for the element 100 is provided by connecting a pattern of a thin film, such as a copper (Cu) layer, formed on the heat-conducting layer 101, and electrodes around the element 100 by wire bonding or the like. In one example, the heat-conducting layer 101 is connected to the cooler 10 using a bonding material between them.

[0011] The cooler 10 is a device connected to the element 100 to cool the element 100 using a coolant circulated by a pump (not shown). According to the first embodiment, the cooler 10 comprises approximately seven metal layers. That is, the cooler 10 comprises, in order from the layer on which the element 100 is arranged outwards, a base layer 1, a finned layer 2, an orifice layer 3, a channel layer 4, a channel layer 5, a channel connecting layer 6, and an inlet-outlet arrangement layer 7. Each of these layers is formed from a metal sheet. These layers can each be formed from a metal with good thermal conductivity, such as copper or aluminum (Al). Furthermore, in this example, the layers of the cooler 10 are rectangular.It should be noted that the cooler 10 is divided into several layers here, taking into account the functionality of each metal layer, and the cooler 10 is not necessarily formed from physically separate, interconnected metal layers. Furthermore, a single layer can be formed from several physically separate layers. The stacking direction of the metal layers is referred to below as the Z-axis direction. Additionally, two positions along the Z-axis direction are designated as "top" and "bottom".

[0012] Next, a configuration of each of the 10 layers included in each cooler will be described. Fig. Figure 2 is an exploded view showing a top-down configuration of each of the cooler layers according to the first embodiment. Note that the origin is the center point of a projection surface. The projection surface, located on the top of the opening-shaped layer 3, is a surface onto which the area containing element 100 is projected. Furthermore, the X-axis passes through the origin and extends parallel to the longer side of the rectangular opening-shaped layer 3, and the Y-axis passes through the origin and extends parallel to the shorter side of the rectangular opening-shaped layer 3. The X-axis, Y-axis, and Z-axis are perpendicular to each other. Note that this is only an example and the X-axis and Y-axis can be defined arbitrarily.

[0013] The base layer 1 is a metal layer on which the element 100 is arranged directly or with the heat-conducting layer 101 positioned between them. The base layer 1 serves as a base plate. The base layer 1 is a flat, plate-shaped metal layer. In the figure, area R100 denotes an element arrangement area in which the element 100 is arranged, and area R101 denotes a heat-conducting arrangement area in which the heat-conducting layer 101 is arranged. In this example, it is assumed that the element 100 is arranged in the element arrangement area R100 such that the center of the element 100 is positioned in the center of the XY plane of the base layer 1. The heat-conducting arrangement area R101 surrounds the element arrangement area R100 and is larger than it.

[0014] The finned layer 2 is a metal layer arranged beneath and connected to the base layer 1. The finned layer 2 comprises multiple fins 21 connected to the base layer 1 to enhance cooling performance over an area at least the size of the area onto which the element array surface R100 is projected. The area in which the fins 21 are formed is referred to here as the fin array surface R20. In the fin array surface R20, the multiple fins 21 are arranged in a periodic pattern in a two-dimensional plane. Each pair of fins 21 forms a groove 22 between them, which serves as a channel for the coolant. An example of a fin 21 is a pin-type fin extending in the Z-axis direction and connected at one end to the base layer 1.Each pair of pin lamellae forms a groove 22 between them, which is an opening formed between these pin lamellae that act as side walls. It should be noted that the groove 22 on the underside of the metal layer forming the lamella shape layer 2 serves as an opening to the lamella arrangement surface R20 in the Z-axis direction. The area of ​​the lamella shape layer 2 that does not belong to the lamella arrangement surface R20 has a plate shape.

[0015] The base layer 1 and the lamellar layer 2 can be produced using various manufacturing processes. In one example, etching a single metal layer to form the groove 22 allows the base layer 1 and the lamellar layer 2 to be formed integrally. Specifically, a mask is formed on the underside of the single metal layer, in the area outside the lamellar arrangement surface R20, and on areas for producing the pin lamellae within the lamellar arrangement surface R20. By etching the underside of the metal layer with the mask formed on it to a predetermined depth, the groove 22 is created in the areas where no mask is formed. That is, within the lamellar arrangement surface R20, the groove 22 is formed in the areas where no mask is formed, while the areas of the surface where the mask is formed remain intact.These remaining areas become the pin lamellae extending in the Z-axis direction. It should be noted that when the etching is complete, when the depth of the groove 22 has reached a predetermined value, a section with the thickness of the groove 22 becomes the lamella-form layer 2, and a section with a different thickness becomes the base layer 1. Although the base layer 1 and the lamella-form layer 2 are in the . Fig. 1 and Fig. Figure 2, for illustrative purposes, depicts the base layer 1 and the lamellar layer 2 as two separate layers. These layers are produced from a single block of metal. It should be noted that the use of an etching technique to produce the base layer 1 and the lamellar layer 2 is only one example, and other manufacturing methods can be employed. For instance, the base layer 1 and the lamellar layer 2 can be produced by metal casting or by machining from a block of metallic material. Alternatively, as described later, production by stacking metal layers is also possible.

[0016] The opening-form layer 3 is a metal layer containing opening areas that serve as lamellar inlet openings 31 and lamellar outlet openings 32, the lamellar inlet openings allowing the flow of coolant to the lamellar arrangement surface R20. The opening-form layer 3 includes the lamellar inlet openings 31 and the lamellar outlet openings 32 in an area that is at least the size of the surface onto which the element arrangement surface R100 is projected. The lamellar inlet openings 31 supply the lamellar arrangement surface R20 with the coolant. The lamellar outlet openings 32 discharge the coolant from the lamellar arrangement surface R20. The lamellar inlet openings 31 and the lamellar outlet openings 32, which are opening areas, are arranged alternately and parallel to each other in a direction radially away from a point in the surface onto which the element arrangement surface R100 is projected.In this example, such a point, which is the origin, is located in the surface onto which the element arrangement surface R100 is projected. The lamellar inlet openings 31 and the lamellar outlet openings 32 penetrate the metal layer in the Z-axis direction. In this example, the lamellar inlet openings 31 and the lamellar outlet openings 32 are each defined by several opening regions extending in different directions and having individual end regions that are connected to one another. In particular, the lamellar inlet openings 31 and the lamellar outlet openings 32 are defined by opening regions, each defined by an opening region extending in the X-axis direction and an opening region extending in the Y-axis direction, the opening regions being connected to one another at their end regions.The X-axis direction is an example of a first direction, and the Y-axis direction is an example of a second direction. A configuration of the opening areas of the opening shape layer 3 is described in detail later. The opening shape layer 3 has a top surface where it connects to the louver shape layer 2.

[0017] Channel Form Layer 4 is a metal layer containing channels that direct coolant flowing in from Channel Form Layer 5 to predetermined opening areas of Opening Form Layer 3 and direct coolant exiting from predetermined opening areas of Opening Form Layer 3 to Channel Form Layer 5. Channel Form Layer 4 includes coolant inlet channels 41, each forming a portion of a channel that directs the coolant to the finned assembly area R20, and coolant outlet channels 42, each forming a portion of a channel that discharges the coolant from the finned assembly area R20. The coolant inlet channels 41 and the coolant outlet channels 42 penetrate the metal layer in the Z-axis direction. Channel Form Layer 4 has a top surface where it connects to Opening Form Layer 3.

[0018] Channel Form Layer 5 is a metal layer containing channels that direct coolant flowing in from Channel Connection Layer 6 to the coolant inlet channels 41 of Channel Form Layer 4 and coolant exiting from the coolant outlet channels 42 of Channel Form Layer 4 to Channel Connection Layer 6. Channel Form Layer 5 includes coolant inlet channels 51, each forming a portion of the channel that directs the coolant to the finned array surface R20, and coolant outlet channels 52, each forming a portion of the channel that discharges the coolant from the finned array surface R20. The coolant inlet channels 51 and the coolant outlet channels 52 penetrate the metal layer in the Z-axis direction. The coolant inlet channels 51 and the coolant outlet channels 52 are formed by openings extending in the X-axis direction.Furthermore, the coolant inlet channels 51 and the coolant outlet channels 52 are arranged alternately in the Y-axis direction. The coolant inlet channels 51 and the coolant outlet channels 52 have the same length, but are arranged such that their end regions are located at different positions in the X-axis direction. In this example, the coolant inlet channels 51 and the coolant outlet channels 52 are arranged such that a first region, which is a region in the positive X-axis direction, projects forward of each of the coolant inlet channels 51 in the positive X-axis direction with respect to the first regions of the coolant outlet channels 52, and that a second end region, which is an end region in the negative X-axis direction, projects forward of each of the coolant outlet channels 52 in the negative X-axis direction with respect to the second end regions of the coolant inlet channels 51.An area encompassing the end regions in the positive X-axis direction, where the arrangement positions of the coolant inlet channels 51 do not overlap with the arrangement positions of the coolant outlet channels 52, is here referred to as coolant inlet area R53. An area encompassing the end regions in the negative X-axis direction, where the arrangement positions of the coolant outlet channels 52 do not overlap with the arrangement positions of the coolant inlet channels 51, is here referred to as coolant outlet area R54. The channel shape layer 5 has a top surface where it is connected to the channel shape layer 4.

[0019] Channel form layer 4 and channel form layer 5 correspond to a second channel form layer, which includes the coolant inlet channels 41 and 51 and the coolant outlet channels 42 and 52. Channel form layer 5 is responsible for transferring the coolant in the X-axis direction, and channel form layer 4 is responsible for transferring the coolant in both the X- and Y-axis directions. Furthermore, in channel form layer 4, the coolant inlet channels 41 are arranged such that they are connected to the lamellar inlet openings 31 of opening form layer 3, but not to the lamellar outlet openings 32; and the coolant outlet channels 42 are arranged such that they are connected to the lamellar outlet openings 32, but not to the lamellar inlet openings 31.This results in a configuration where the coolant inlet channels 41 are not located at the positions corresponding to the lamellar outlet openings 32, and the coolant outlet channels 42 are not located at the positions corresponding to the lamellar inlet openings 31. Furthermore, in channel shape layer 5, the coolant inlet channels 51 and the coolant outlet channels 52 are formed by openings extending in the X-axis direction.

[0020] The channel connection layer 6 is a metal layer containing channels that direct coolant flowing in from the inlet-outlet arrangement layer 7 to the coolant inlet channels 51 of the channel shape layer 5 and direct coolant expelled from the coolant outlet channels 52 of the channel shape layer 5 to the inlet-outlet arrangement layer 7. The channel connection layer 6 includes two opening regions that extend in the X-axis direction at both end regions in an area outside the projection area of ​​the element arrangement surface R100 in the Y-axis direction. In this example, the channel connection layer 6 includes an inlet opening 61 extending in the Y-axis direction in the region in the positive X-axis direction and an outlet opening 62 extending in the Y-axis direction in the region in the negative X-axis direction.The inlet opening 61 is located at a position corresponding to the coolant inlet area R53 of the channel shape layer 5. The outlet opening 62 is located at a position corresponding to the coolant outlet area R54 of the channel shape layer 5. The inlet opening 61 and the outlet opening 62 penetrate the metal layer in the Z-axis direction. The channel connection layer 6 has a top surface where it connects to the channel shape layer 5.

[0021] The inlet-outlet assembly layer 7 is a metal layer containing openings that direct coolant flowing in from the outside through a pipe to the inlet port 61 of the channel connection layer 6 and direct coolant exiting from the outlet port 62 of the channel connection layer 6 to an external pipe. The inlet-outlet assembly layer 7 includes an inlet port 71 and an outlet port 72, which are openings whose size is smaller than the inlet port 61 and the outlet port 62, respectively, corresponding to the area in which the inlet port 61 of the channel connection layer 6 is located and the area in which the outlet port 62 is located. The inlet port 71 and the outlet port 72 penetrate the metal layer in the Z-axis direction. The pipe for supplying the coolant is attached to the inlet port 71 by a fastening component.The coolant discharge pipe is attached to the outlet opening 72 by a fastening component. The inlet-outlet assembly layer 7 has a top surface where the inlet-outlet assembly layer 7 is connected to the channel connection layer 6.

[0022] As described above, the channel connection layer 6 is arranged between the channel shape layer 5 and the inlet-outlet arrangement layer 7. The inlet connection opening 61 connects the inlet opening 71 and the coolant inlet channels 51, and the outlet connection opening 62 connects the outlet opening 72 and the coolant outlet channels 52.

[0023] The coolant flowing in from the inlet opening 71 of the inlet-outlet arrangement layer 7 is widened in the inlet connection opening 61 of the channel connection layer 6. The coolant then flows into the coolant inlet channels 51, which are arranged in the coolant inlet surface R53 of the channel shape layer 5, to flow along the X-axis direction. The coolant flows through the channel shape layer 4, the opening shape layer 3, and the finned shape layer 2, comes into contact with the bottom surface of the base layer 1, and then flows through the finned shape layer 2, the opening shape layer 3, and the channel shape layer 4. The coolant flows along the coolant outlet channels 52 of the channel shape layer 5, which extend in the X-axis direction, and flows from the coolant outlet surface R54 into the channel connection layer 6.The coolant is collected through the outlet port 62 of the channel connection layer 6, which corresponds to the coolant outlet area R54, in an area corresponding to the position of the outlet port 72 of the inlet-outlet arrangement layer 7, and then expelled from the outlet port 72 of the inlet-outlet arrangement layer 7. Only the coolant inlet channels 51 are arranged in the channel form layer 5, and the coolant outlet channels 52 are not arranged in an area corresponding to the inlet port 61 connected to the inlet port 71. Furthermore, only the coolant outlet channels 52 are arranged in an area corresponding to the outlet port 62 connected to the outlet port 72, and the coolant inlet channels 51 are not arranged.This results in a configuration in which the coolant flowing into the cooler 10 is not directed to the coolant outlet channels 42 or 52, or conversely, the coolant flowing out of the cooler 10 is not directed out of the coolant inlet channels 41 or 51.

[0024] Fig. Figure 3 is an image illustrating an example of the flow of coolant in the radiator according to the first embodiment. Fig. Figure 3 shows a top view of the layers from the opening-shaped layer 3 to the channel-shaped layer 5. A coolant 90 flows from the areas of the coolant inlet channels 51 arranged in the coolant inlet area R53 of the channel-shaped layer 5 and distributes itself along the coolant inlet channels 51. The coolant 90 also flows into the coolant inlet channels 41 of the channel-shaped layer 4. The coolant 90 flowing through the coolant inlet channels 51 of the channel-shaped layer 5 is guided through the coolant inlet channels 41 of the channel-shaped layer 4 to the lamellar inlet openings 31 of the opening-shaped layer 3.

[0025] The drawing of the channel shape layer 4 in Fig. Figure 3 shows the projected positions 51a, which correspond to the coolant inlet channels 51 of channel shape layer 5, and the drawing of opening shape layer 3 shows the projected positions 41a, which correspond to the coolant inlet channels 41 of channel shape layer 4. Channel shape layer 4 includes covers 43 at the positions of areas of the coolant inlet channels 41 that correspond to the lamellar outlet openings 32 of opening shape layer 3. The covers 43 close the lamellar outlet openings 32 of opening shape layer 3 and prevent the coolant 90 flowing through the coolant inlet channels 41 from being directed to the lamellar outlet openings 32.This results in a configuration in which, as indicated by the projected positions 41a corresponding to the coolant inlet channels 41 in the opening shape layer 3, the coolant inlet channels 41 are connected to the lamellar inlet openings 31 of the opening shape layer 3, but are not connected to the lamellar outlet openings 32. Fig. Figure 4 is an image illustrating an example of the coolant flow in the orifice-shaped layer of the radiator according to the first embodiment. The coolant 90 from the channel-shaped layer 4 flows along the finned inlet openings 31, as shown in Fig. 4 is shown, whereby it spreads two-dimensionally in the opening shape layer 3, and then flows into the lamella shape layer 2.

[0026] A similar description applies to the outlet process of the coolant 90. In this respect, the channel-shaped layer 4 includes covers 44 at the positions of areas of the coolant outlet channels 42 that correspond to the lamellar inlet openings 31 of the opening-shaped layer 3. The covers 44 close the lamellar inlet openings 31 of the opening-shaped layer 3 and prevent the coolant 90 flowing through the coolant outlet channels 42 from being diverted from the lamellar inlet openings 31. This results in a configuration in which the coolant outlet channels 42 are connected to the lamellar outlet openings 32 of the opening-shaped layer 3, but not to the lamellar inlet openings 31.

[0027] This means that by stacking the layers from the lamellar shape layer 2 to the channel shape layer 5, the corresponding areas of the channel shape layer 4, i.e., the coolant inlet channels 41, are arranged such that the coolant inlet channels 51 of the channel shape layer 5, which are connected to the inlet opening 71, at least partially overlap the lamellar inlet openings 31 of the opening shape layer 3 to allow the coolant 90 to flow to the lamellar arrangement surface R20, but do not overlap the lamellar outlet openings 32 of the opening shape layer 3 to discharge the coolant 90 from the lamellar arrangement surface R20. By stacking the layers from the lamellar shape layer 2 to the channel shape layer 5, the corresponding opening areas of the channel shape layer 4, i.e.,the coolant outlet channels 42 are arranged such that the coolant outlet channels 52 of the channel form layer 5 connected with the outlet opening 72 at least partially overlap the lamellar outlet openings 32 of the opening form layer 3 for directing the coolant 90 out of the lamellar arrangement area R20, but do not overlap with the lamellar inlet openings 31 of the opening form layer 3 for directing the coolant 90 to the lamellar arrangement area R20.This means that the coolant inlet channels 51 and the coolant outlet channels 52 of the channel shape layer 5, the coolant inlet channels 41 and the coolant outlet channels 42 of the channel shape layer 4 and the lamellar inlet openings 31 and the lamellar outlet openings 32 of the opening shape layer 3 are arranged such that the coolant 90 flowing in from the inlet opening 71 of the inlet-outlet arrangement layer 7 cannot exit from the outlet opening 72 of the inlet-outlet arrangement layer 7 without passing the lamellar arrangement surface R20.

[0028] The cooler 10 includes an inlet opening 71 and an outlet opening 72 in the inlet-outlet arrangement layer 7, while the cooler 10 includes several finned inlet openings 31 in the opening shape layer 3, which extend two-dimensionally over the entire area onto which the finned arrangement surface R20 is projected. This configuration requires the channel shape layer 4.

[0029] Next, a configuration of the opening shape layer 3 is described in detail. As in Fig. As shown in Figure 2, the intersection of the X-axis and the Y-axis, i.e., the origin, is defined in a projection area onto the opening shape layer 3 of the element arrangement surface R100, in which the element 100, i.e., a heat source, is located. The origin is preferably the center point of the heat source in general. Fig. Figure 5 is an image illustrating an example of the relationship between the element arrangement surface and the opening shape layer that forms the cooler according to the first embodiment. As shown in Fig. As shown in Figure 5, there exists an area R100a, which is a projection area of ​​the element arrangement surface R100 onto the opening shape layer 3, within the area in which the louvered inlet openings 31 and the louvered outlet openings 32 of the opening shape layer 3 are arranged. Furthermore, the area in which the louvered inlet openings 31 and the louvered outlet openings 32 are arranged almost exactly coincides with the louvered arrangement surface R20. This is because if the element 100 to be cooled, which is connected to the base layer 1, does not coincide with the louvered arrangement surface R20, such a configuration would prevent sufficient cooling of the element 100.

[0030] Fig. Figure 6 is an enlarged top view of an area of ​​the aperture shape layer. This figure shows an enlarged view of the first quadrant of the Fig. 2 defined XY plane. In the first embodiment, the opening shape layer 3 includes a cross-shaped opening region 311, which is one of the lamellar inlet openings 31 extending along the X-axis and the Y-axis. That is, the cross-shaped opening region 311 has fourfold rotational symmetry about the origin and extends planarly in two dimensions. That is, the cross-shaped opening region 311 does not extend one-dimensionally, but rather has fourfold rotational symmetry about the origin on a two-dimensional plane and is thus configured by opening regions that extend in multiple directions.

[0031] In addition to the cross-shaped opening area 311, the opening shape layer 3 includes opening areas 312 and 313, which are part of the louver inlet openings 31, and opening areas 321 and 322, which are part of the louver outlet openings 32, at positions radially removed from the origin. That is, the multiple opening areas 311, 312, 313, 321, and 322 are formed in the metal layer. Similar opening areas are also formed in the second, third, and fourth quadrants. This configuration results in the opening areas in the projection area of ​​the louver arrangement surface R20 onto the opening shape layer 3 having a shape with fourfold rotational symmetry about the origin.

[0032] The opening area 321, which adjoins the cross-shaped opening area 311, is arranged at a specific distance from the cross-shaped opening area 311 in both the X and Y axis directions. That is, the opening area 321 does not extend linearly in one direction, but rather planarly in two dimensions. In this example, the opening area 321 has an L-shape with a right-angled bend at a position on a line that runs at an angle of approximately 45° to the X-axis, where an opening extending in the X-axis direction and an opening extending in the Y-axis direction are connected at this position.The opening area 312 next to the opening area 321, the opening area 322 next to the opening area 312 and the opening area 313 next to the opening area 322 also extend planarly in two directions and each have an L-shape with a right-angled bend at one point on a line that runs at an angle of about 45° to the X-axis.

[0033] The cross-shaped opening area 311 and the L-shaped opening areas 312 and 313 form the lamellar inlet openings 31 in the lamellar arrangement surface R20 and are connected to the inlet opening 71 via the opening areas, which are formed in layers from the channel shape layer 4 to the inlet-outlet arrangement layer 7.

[0034] The L-shaped opening areas 321 and 322 form the lamellar outlet openings 32 for the lamellae in the lamellar arrangement surface R20 and are connected to the outlet opening 72 via the opening areas, which are formed in layers from the channel shape layer 4 to the inlet-outlet arrangement layer 7.

[0035] As described above, in the cooler 10 according to the first embodiment, the cross-shaped opening 311 and the L-shaped openings 312 and 313, which are the area of ​​the fin inlet openings 31, and the L-shaped opening areas 321 and 322, which are part of the fin outlet openings 32, both of which serve to allow the coolant to flow into and out of the fin arrangement surface R20, are arranged alternately in a direction radially away from the origin.

[0036] Next, the coolant flow in the structure of the cooler 10 according to the first embodiment is described. It should be noted that the following description refers to the first quadrant in the XY plane with reference to Fig. 6 concentrated. The coolant flowing in from the cross-shaped opening 311 flows through the groove 22 in the finned arrangement surface R20 and flows out of the L-shaped opening 321 next to the cross-shaped opening 311 in an area. In this respect, the flow of the coolant can be simplified and divided into the following three sections. (A) A coolant flow passing through the cross-shaped opening area 311 into the groove 22 in the fin arrangement surface R20. Note that the coolant comes into contact with the base layer 1. (B) A coolant flow passing through the groove 22 in the fin arrangement surface R20. (C) A coolant flow flows from the groove 22 in the fin arrangement surface R20 into the L-shaped opening area 321.

[0037] The three sections mentioned above exhibit different heat radiation rates, i.e., different heat transfer coefficients, from one section to the next during heat transfer to the coolant from the metal layer forming the base layer 1 and the finned layer 2. Furthermore, the coolant temperature gradually increases as it flows in from the cross-shaped opening 311, through the groove 22 in the finned arrangement surface R20, and exits from the L-shaped opening 321.

[0038] Similarly, the coolant flowing in from the L-shaped opening region 312 flows through the groove 22 in the finned arrangement surface R20 and flows out of the L-shaped opening regions 321 and 322, both of which are adjacent to the L-shaped opening region 312. Furthermore, the coolant flowing in from the L-shaped opening region 313 flows through the groove 22 in the finned arrangement surface R20 and flows out of the L-shaped opening region 322, which is adjacent to the L-shaped opening region 313. In these cases, the coolant flows generally correspond to the flow mentioned above from the cross-shaped opening region 311 through the groove 22 in the finned arrangement surface R20 and out of the L-shaped opening region 321.

[0039] With respect to the flow direction of the coolant, the thermal radiation power during heat transfer from the metal layer to the coolant differs from one section of the flow to another. Furthermore, the temperature of the coolant gradually increases. This inevitably leads to a temperature distribution along the flow direction of the coolant.

[0040] In this respect, in the first embodiment, the inlet openings 31 and the outlet openings 32 of the fins in the opening-form layer 3, which allow the coolant to flow into and out of the fin arrangement surface R20, are arranged alternately in a direction from the center to the edge. By reducing the distance between the fins in the alternating arrangement, the temperature distribution can be limited to a small area.

[0041] Furthermore, the alternating arrangement of the finned inlet openings 31 and the finned outlet openings 32 means that the finned outlet openings 32 are located adjacent to the finned inlet openings 31, and similarly, the finned inlet openings 31 are located adjacent to the finned outlet openings 32. Accordingly, a coolant flow is generated from one of the finned inlet openings 31 to an adjacent finned outlet opening 32, and this coolant flows in opposite directions, thus canceling out the temperature distributions. This allows the temperature distribution to be locally balanced. In particular, the base layer 1 is formed from a highly thermally conductive metal, which further reduces the temperature distribution.

[0042] Since the inlet openings 31, which allow the coolant to flow to the fin arrangement surface R20, and the outlet openings 32 are arranged alternately in parallel in a radial direction away from the origin, it is also possible to achieve a concentric temperature distribution. Furthermore, by reducing the distance between adjacent inlet openings 31 and outlet openings 32, the flow path of the coolant flowing through the groove 22 in the fin arrangement surface R20 can be reduced. This reduces the increase in pressure drop when the coolant flows through the groove 22 of the fin shape layer 2.

[0043] Furthermore, the lamellar inlet openings 31 and the lamellar outlet openings 32, which are arranged alternately and parallel to each other in a radial direction from a predetermined point on the projection area of ​​the element arrangement surface R100 onto the opening shape layer 3, are arranged such that they exhibit fourfold rotational symmetry with respect to the predetermined point. By forming the opening areas in the opening shape layer 3 in a shape with fourfold rotational symmetry, the unevenness in the X and Y axis directions is reduced, thereby making the temperature distribution more concentric around the predetermined point. It should be noted that a case in which the opening areas are arranged to exhibit higher-order rotational symmetry will be described later.

[0044] In the first embodiment, the cross-shaped opening area 311 in the opening shape layer 3 is assigned to one of the finned inlet openings 31 and not to one of the finned outlet openings 32. A heat source generally has a higher temperature in a central area and a lower temperature in a peripheral area. In the first embodiment, the origin is defined as a point directly below the element 100, which is the heat source. This allows for a higher cooling capacity to be achieved by supplying a flow of a low-temperature fluid to the origin.

[0045] In this respect, the cross-shaped opening area 311, which is one of the lamellar inlet openings 31 directly below the element 100 that represents the heat source, is configured such that it has the opening area not only at the origin or near the origin, as in the Fig. 7 and Fig. 11 (described later), but also has a planar opening in two dimensions near the origin. This structure allows the entire element 100 to be cooled uniformly, in contrast to the structure where the opening is only provided at or near the origin, as in the Fig. 7 and Fig. Figure 11 (described later) illustrates this. This can improve cooling performance.

[0046] Additionally, the L-shaped opening areas 312 and 313, which are the lamellar inlet openings 31, and the L-shaped opening areas 321 and 322, which are the lamellar outlet openings 32, are arranged alternately and parallel to each other in a direction radially away from a predetermined point located within the projection area of ​​the element arrangement surface R100 onto the opening shape layer 3, at specific distances from the cross-shaped opening area 311. This configuration can reduce the temperature distribution. The L-shaped opening areas 312, 313, 321, and 322 are spaced apart from each other at specific distances and therefore necessarily extend planarly in two dimensions, each exhibiting a structure with a right-angled bend.

[0047] Next, variants of the cooler 10 according to the first embodiment are described. Fig. Figure 7 is a top view showing another example of the configuration of the opening shape layer that forms the cooler according to the first embodiment. Fig. Figure 7 also shows the origin as the center point of the projection area of ​​the element arrangement area R100 onto the opening shape layer 3. In the example of Fig. 7 is an opening region 311a with a point-like shape, which serves as one of the louvered inlet openings 31, located at the origin. Additionally, linear opening regions 312a and 313a, serving as louvered inlet openings 31, and linear opening regions 321a and 322a, serving as louvered outlet openings 32, are arranged alternately and parallel to each other in a radial direction away from the origin. In this example, the linear opening regions 312a, 313a, 321a, and 322a extend in a direction perpendicular to a line passing through the origin and at an angle of 45° or -45° to the X-axis. The opening regions in the opening shape layer 3 are arranged such that they exhibit fourfold rotational symmetry about the origin. This configuration enables a more uniform and concentric temperature distribution.

[0048] In the example of Fig. The base layer 1, the lamellar layer 2, and the open-form layer 3 are connected to each other. The open-form layer 3 has open areas formed by processing such as etching and / or cutting from a single metal layer, as described above. As such, the open-form layer 3 includes retention areas 33 for maintaining the structure of a metal layer. In the example of Fig. Figure 7 shows that the square opening areas are parallel to each other with their centers at the origin and arranged radially away from the origin. Additionally, the corner points of the square opening areas are positioned on the X and Y axes, where no opening areas are formed, but rather holding areas 33 are provided, which are the remaining areas of the metal layer. These holding areas 33 hold the areas of the metal layer in positions between the opening areas, thus maintaining the structure of a metal layer.

[0049] An optimal arrangement with regard to the positions and number of holding areas 33 depends on factors such as the shape of the lamellae 21 and the thickness, i.e., the strength, of the opening-form layer 3. Fig. Figures 8 to 10 are each a top view showing another example of the configuration of the opening shape layer that forms the cooler according to the first embodiment. Fig. Figure 8 shows a case in which the holding areas 33 are formed on lines passing through the origin and inclined at an angle of 45° and -45° to the X-axis. Fig. 9 shows a configuration which is in Fig. 7 and Fig. The configurations shown in Figure 8 are combined, i.e., a case in which the holding areas 33 are located on the X and Y axes and on lines passing through the origin and inclined at angles of 45° and -45° to the X axis. It should be noted that if the holding areas 33 have a small width, they do not have a significant influence on the temperature distribution, even if they are not positioned to have fourfold rotational symmetry about the origin. That is, forming the holding areas 33 in a narrow shape allows them to be placed at arbitrary positions. However, it should be noted that ideally, it is preferable for the holding areas 33 to be positioned as shown in Figure 8. Fig. Figure 10 is not shown. In this case, the metal layer forming the opening shape layer 3 is bonded to the structure containing the base layer 1 and the lamellar shape layer 2, after which only this metal layer is processed. This complicates the manufacturing process.

[0050] As described above, a heat source generally has a higher temperature in its middle region and a lower temperature at its edges, since no heat is generated at the edges of the heat source. Fig. Figures 7 to 10 therefore each show a configuration in which the spacing, i.e., the distance between adjacent opening regions in a direction radially away from the origin, is greater at a radially outer position than at a radially inner position. That is, the spacing between adjacent louvered inlet openings 31 and louvered outlet openings 32 is greater at a position farther from a point on the surface onto which the element arrangement surface R100 is projected than at a position closer to that point on the surface. In an example, the spacing between adjacent opening regions can be increased at a position farther from a predetermined point.

[0051] By configuring the spacing between adjacent opening regions to be greater in a radially outer region than in a radially inner region, the length of the channel through which the coolant flows is increased in a radially outer region of the fin arrangement area R20, corresponding to a circumferential region of the heat source. This results in a greater pressure drop in a radially outer region and, consequently, a lower flow rate, as well as a greater length from one of the fin inlet openings 31 to one of the fin outlet openings 32. This increases the overall heat generation in a region containing channels through which the coolant flows in a radially outer region. This leads to a greater temperature rise in the fluid in a radially outer region than in the fluid in a radially inner region, thus increasing the temperature in a circumferential region of the heat source.This can reduce the temperature distribution of the heat source. However, it should be noted that a temperature increase in a peripheral area of ​​the heat source will also cause a temperature increase in the central area. This necessitates a careful design of the spacing between the openings, taking into account heat generation, required temperature specifications, and the desired temperature distribution.

[0052] Fig. Figure 11 is a top view showing another example of the configuration of the opening shape layer forming the cooler according to the first embodiment. Fig. Figure 11 also shows the origin as the center point of the projection area of ​​the element arrangement surface R100. In the example of Fig. Figure 11 comprises arc-shaped opening areas 311b, 312b, and 313b, which serve as lamellar inlet openings 31, and arc-shaped opening areas 321b and 322b, which serve as lamellar outlet openings 32, arranged alternately and parallel to each other in one direction radially away from the origin. Also in the example of Fig. 11. The opening areas in the projection area of ​​the element arrangement surface R100 are arranged such that they exhibit fourfold rotational symmetry about the origin. Furthermore, the distance between adjacent opening areas is greater on a radially outer side than on the radially inner side.

[0053] In the case of Fig. The louvered inlet openings 31 and the louvered outlet openings 32 have a circular shape, as the areas of the respective arc-shaped opening regions 311b, 312b, 313b, 321b, and 322b are connected to each other by the retaining regions 33. Thus, the louvered inlet openings 31 and the louvered outlet openings 32 have a circularly symmetrical shape and therefore a higher-order rotational symmetry, which enables a more uniform temperature distribution. However, it should be noted that the groove 22 in the louvered arrangement surface R20 is generally often formed by a combination of linear regions. Accordingly, as described above, for reasons of reducing the pressure loss increase, it is advantageous that the opening areas 311b, 312b, 313b, 321b and 322b in the opening shape layer 3 extend in alignment with the direction of the opening areas in the lamella arrangement surface R20.This means that the lamellae 21 in the lamella arrangement surface R20 of the lamella form layer 2 are preferably also arranged such that corresponding areas of the groove 22 have an arc shape, i.e., circular symmetry, in order to align with the opening areas of the opening form layer 3. However, such a configuration complicates the manufacturing process of the lamellae 21 and the opening areas with circular symmetry compared to a linear shape.

[0054] It should be noted that if the opening shape layer 3 has a shape like the one in the Fig. The channels of channel shape layer 4 and channel shape layer 5 can have shapes that differ from the shapes shown in 7 to 11. Fig. 2. In this case, the channels of channel form layer 4 and channel form layer 5 are arranged such that the coolant flowing in from the inlet opening 71 of the inlet-outlet arrangement layer 7 cannot exit the outlet opening 72 of the inlet-outlet arrangement layer 7 without flowing through the fins 21. That is, the corresponding opening areas of channel form layer 4, i.e., the coolant inlet channels 41, are arranged such that the coolant inlet channels 51 of channel form layer 5, which are connected to the inlet opening 71, at least partially overlap the fin inlet openings 31 of opening form layer 3 for the coolant to flow into the fin arrangement surface R20, but do not overlap the fin outlet openings 32 of opening form layer 3 for the coolant to flow out of the fin arrangement surface R20. Furthermore, the corresponding opening areas of the channel shape layer 4, i.e.the coolant outlet channels 42 are arranged such that the coolant outlet channels 52 of the channel form layer 5 connected with the outlet opening 72 at least partially overlap the lamellar outlet openings 32 of the opening form layer 3 for directing the coolant out of the lamellar arrangement surface R20, but do not overlap the lamellar inlet openings 31 of the opening form layer 3 for directing the coolant to the lamellar arrangement surface R20.This means that the coolant inlet channels 51 and the coolant outlet channels 52 of the channel shape layer 5, the coolant inlet channels 41 and the coolant outlet channels 42 of the channel shape layer 4 and the lamellar inlet openings 31 and the lamellar outlet openings 32 of the opening shape layer 3 are arranged such that the coolant flowing in from the inlet opening 71 of the inlet-outlet arrangement layer 7 does not exit from the outlet opening 72 of the inlet-outlet arrangement layer 7 without flowing through the lamellar arrangement surface R20.

[0055] Furthermore, in the example above, due to the presence of an inlet port 71 and an outlet port 72 in the cooler 10, the coolant from the inlet port 71 is distributed in the channel connection layer 6 to be directed to the coolant inlet area R53 of the channel shape layer 5, and the coolant from the coolant outlet area R54 of the channel shape layer 5 is collected in the channel connection layer 6 to be directed to the outlet port 72 of the inlet-outlet arrangement layer 7. If the cooler 10 includes multiple inlet ports 71 and multiple outlet ports 72, the channel shape layers 4 and 5 can have different shapes to connect the multiple inlet ports 71 to the coolant inlet area R53 of the channel shape layer 5 and the multiple outlet ports 72 to the coolant outlet area R54 of the channel shape layer 5.

[0056] Furthermore, the Fig. 5 and Fig. 6. While there is a case in which adjacent L-shaped opening regions 312, 313, 321, and 322 have a constant distance from each other, adjacent L-shaped opening regions 312, 313, 321, and 322 can have a distance that is greater at a radially outer position than at a radially inner position, similar to the cases described in the Fig. Numbers 7 to 11 are shown.

[0057] Fig. Figure 12 is a top view that schematically illustrates the positional relationship between each of the opening areas of the opening shape layer and the groove in the louver arrangement surface. Fig. Figure 12 is an enlarged view of part of an area R34 from Fig. 7. The lamellar inlet openings 31 and the lamellar outlet openings 32, which are opening areas of the opening form layer 3, are arranged in directions aligned with the directions of the opening areas that form the groove 22, which is formed between the lamellae 21 arranged in the lamellar form layer 2. That is, the lamellar inlet openings 31 and the lamellar outlet openings 32 are arranged such that they are aligned with the directions in which the areas defined by the lamellae 21 on a surface in contact with the opening form layer 3 extend in the XY plane.This leads to a reduction in flow obstructions and can therefore reduce the increase in pressure loss when the coolant flows from the lamellar inlet openings 31 formed in the opening form layer 3 into the groove 22 of the lamellar form layer 2, and conversely, when the coolant flows from the groove 22 of the lamellar form layer 2 into the lamellar outlet openings 32 formed in the opening form layer 3.

[0058] Adjacent inlet openings 31 and outlet openings 32 of the opening-shape layer 3 are arranged radially away from the origin in one direction and therefore have different areas. That is, an opening area has a smaller area at a position further away from the origin. Accordingly, a groove 22 of the louvered layer 2 extending in a one-dimensional direction would cause a flow retardation, leading to an increase in the temperature distribution and a deterioration in cooling performance. Therefore, the groove 22 of the louvered layer 2 is preferably configured to extend locally in two dimensions between the inlet openings 31 and the outlet openings 32.This configuration can reduce or prevent the occurrence of uneven flow between the fin inlet openings 31 and the fin outlet openings 32, eliminate flow delay and improve cooling performance.

[0059] Fig. Figure 13 is a partially enlarged top view showing an example of the configuration of the fin-shaped layer forming the cooler according to the first embodiment. Fig. Figure 13 is an enlarged view of an area of ​​the lamella arrangement surface R20 in the lamella shape layer 2. Fig. Figure 13 shows with an arrow the flow of coolant in the groove 22 of the fin arrangement surface R20 of the in Fig. 2. Lamellar shape layer 2. As shown in Fig. As shown in Figure 13, the groove 22 in the finned assembly area R20 exhibits a local periodicity of repetition of confluences and branches in a narrow region. Furthermore, the groove 22 is formed with this periodicity across the entire finned assembly area R20. In one example, the coolant flows through the groove 22, which forms the channel in the finned assembly area R20, converges, and then branches at a position 23, as shown in Figure 13. Fig. Figure 13 illustrates this. Alternatively, the opening areas forming the fins 21 are preferably configured such that the coolant can repeatedly merge and branch between the adjacent fin inlet openings 31 and the fin outlet openings 32. Such configurations can ensure a uniform flow in two dimensions, i.e., in all directions on the plane defined by the X and Y axes, even if the fin inlet openings 31 and the fin outlet openings 32 have different surface areas. This can reduce the temperature distribution and improve cooling performance.

[0060] Fig. Figure 14 is a top view showing another example of the configuration of the fin-shaped layer forming the cooler according to the first embodiment. Fig. 15 is an enlarged top view of an area of ​​the lamella arrangement surface of the lamella shape layer made of Fig. 14. Fig. Figure 15 is an enlarged representation of area R210 from Fig. 14. Fig. 14 and Fig. Figure 15 shows an example of the lamella shape layer 2, which includes lamellae 21 that have a different shape than those in Fig. 13 and exhibit local confluences and branching. In the example from Fig. 14 and Fig. Figure 15 comprises a lamellar layer 2a, a thin plate 210 on which opening regions 211 extending in the first direction are formed in the lamellar arrangement surface R20, encompassing the projection area of ​​the element arrangement surface R100, and a thin plate 220 on which opening regions 221 extending in the second direction are formed in the lamellar arrangement surface R20, intersecting the first direction. The lamellar layer 2a has a structure in which several of the thin plates 210 and several of the thin plates 220 are stacked alternately on top of each other. In the lamellar arrangement surface R20 of the lamellar layer 2a, the opening regions 211 extending in the first direction and the opening regions 221 extending in the second direction overlap to form lamellae 21a. In the example of the Fig. 14 and Fig. In 15, the opening areas 211 and the opening areas 221 are stacked on top of each other to form a groove 22a. The groove 22a has a three-dimensional, net-like structure.

[0061] Fig. Figure 16 is a top view showing an example of the configuration of the opening shape layer in conjunction with the louver shape layer. Fig. 14 shows. In which in Fig. The example shown in 16 is a cross-shaped opening area 311c that passes through the origin, along the directions of the groove 22a in the lamella arrangement surface R20. Fig. 14 and Fig. 15, i.e., along the directions aligned with the first direction and the second direction. In this case as well, L-shaped opening regions 312c, 313c, 321c, and 322c are arranged parallel to each other in a direction radially away from the origin, each spaced apart from the cross-shaped opening region 311c by certain distances.

[0062] The coolant flows from the lamellar inlet openings 31 of the opening-form layer 3 into the lamellar arrangement surface R20 of the lamellar form layer 2. Specifically, the coolant flows in from the opening regions formed in areas of the lamellar arrangement surface R20 that overlap the lamellar inlet openings 31. The opening regions formed in the lamellar arrangement surface R20 correspond to the positions of the groove 22a, as seen from the underside of the lamellar form layer 2a. The coolant then flows through the gaps formed along the opening regions 211 and 221 in the stacked thin plates 210 and 220, repeating the convergence and branching process, after which the coolant exits from the opening regions that overlap the lamellar outlet openings 32 and from the lamellar outlet openings 32 of the opening-form layer 3.By using the thin plates 210 and 220 with low thickness to form the fins 21a, narrow channels can be produced, thus providing a cooler with high cooling capacity.

[0063] The coolant repeats the process of merging and branching within a local area, even in the case of the... Fig. 14 lamellae 21a shown. That is, the ones in Fig. The lamellae 21a shown in Figure 14 have channels that allow the flow to spread uniformly in two dimensions, i.e., in all directions on the plane formed by the X and Y axes. It should be noted that there are no particular restrictions regarding the manufacturing process or shape of the lamellae 21a.

[0064] As described above, the cooler 10 according to the first embodiment comprises the following: the base layer 1, to which the element 100 is to be connected; the finned layer 2 with a fin arrangement surface R20, in which the multiple fins 21, 21a are arranged, the multiple fins being connected to the base layer 1; and the opening layer 3, which is connected to the finned layer 2 and which includes multiple fin inlet openings 31 and multiple fin outlet openings 32, the fin inlet openings allowing the coolant to flow to the fin arrangement surface R20. The multiple fin inlet openings 31 are connected via inlet channels to the inlet opening 71, into which the coolant of the cooler 10 flows. The lamellar outlet openings 32 are connected via outlet channels to the outlet opening 72, from which the coolant of the radiator 10 flows.Additionally, the multiple lamellar inlet openings 31 and the multiple lamellar outlet openings 32 are arranged alternately and parallel to each other in a direction radially away from a point located in a projection area of ​​the element 100's shape onto the opening-shape layer 3. This configuration makes it possible to create a more concentric temperature distribution caused by the heat generated by the element 100 and to reduce the temperature distribution. This configuration also reduces the coolant pressure drop in the lamellar-shape layer 2 between the lamellar inlet openings 31 and the lamellar outlet openings 32. Second embodiment.

[0065] Fig. Figure 17 is a cross-sectional view schematically showing an example of the configuration of a cooler according to a second embodiment. It should be noted that components identical to the corresponding components of the first embodiment are designated with the same reference numerals and their descriptions are omitted. A cooler 10a of the second embodiment further includes a channel-shaped layer 8 between the opening-shaped layer 3 and the channel-shaped layer 4.

[0066] Fig. Figure 18 is a top view showing an example of the configuration of the aforementioned channel-shaped layer forming the cooler according to the second embodiment. The channel-shaped layer 8 is a metal layer containing channels 81 and 82, which are opening regions, in a surface that includes the projection area of ​​the element arrangement surface R100. The surface in which the channels 81 and 82 of the channel-shaped layer 8 are arranged is here referred to as the channel arrangement surface R80. The channel-shaped layer 8 corresponds to a first channel-shaped layer.

[0067] Fig. Image 19 shows an example of the opening shape layer and the protruding channel shape layer stacked on top of each other. The hatched areas in Fig. Figure 19 shows areas of channels 81 and 82 of channel shape layer 8 that overlap surfaces other than the opening shape layers of opening shape layer 3. In the Fig. In the example shown in Figure 19, the channel arrangement area R80 encompasses the element arrangement area R100 and is larger in area than the element arrangement area R100. In this example, the channel arrangement area R80 is similar in size to the element arrangement area R100 in the Y-axis direction, but larger than the element arrangement area R100 in the X-axis direction. Furthermore, as shown in the Fig. 18 and Fig. As shown in Figure 19, the channels 81 and 82 of the channel arrangement surface R80 are arranged according to the opening areas of the opening shape layer 3. The channel shape layer 8 is arranged such that the center of width of each of the channels 81 and 82 of the channel shape layer 8 coincides in its position with the center of width of a corresponding opening area of ​​the opening shape layer 3. In this way, a cross-shaped opening area 81a, passing through the origin, and L-shaped opening areas 81b and 82b are arranged in the channel arrangement surface R80. The L-shaped opening areas 81b and 82b are arranged parallel to each other in a direction radially away from the origin.This means that the channel shape layer 8 includes the channel arrangement surface R80, which contains the opening areas 81a and 81b, onto which the lamellar inlet openings 31 are projected, and the opening areas 82b, onto which the lamellar outlet openings 32 are projected, wherein the lamellar inlet openings 31 and the lamellar outlet openings 32 are arranged alternately and parallel to each other in a direction radially away from the origin of the opening shape layer 3. Accordingly, the channels 81 and 82 of the channel shape layer 8 have widths and lengths that are equal to or greater than the widths and lengths of the opening areas of the opening shape layer 3.

[0068] To ensure a large area for coolant flow in the fin arrangement area R20 of fin shape layer 2, the opening areas of opening shape layer 3 often have a small area. Furthermore, in Fig. 2 of the first embodiment, the coolant inlet channels 41 and the coolant outlet channels 42, which are the opening areas of the channel shape layer 4, essentially opening areas that comprise the area of ​​the projection area onto the channel shape layer 4, the lamellar inlet openings 31 and the lamellar outlet openings 32, which are the opening areas of the opening shape layer 3, and the coolant inlet channels 51 and the coolant outlet channels 52, which are the opening areas of the channel shape layer 5. However, it should be noted that, in order to prevent the coolant flowing in from the inlet opening 71 from exiting the outlet opening 72 without passing the lamellars 21, areas without opening areas of the channel shape layer 4 are present directly above the opening areas of the opening shape layer 3. The coolant does not readily flow to the lamellars 21 in these areas.There is also a reverse situation where there are areas without openings of opening shape layer 3 at positions corresponding to the openings of channel shape layer 4. This can lead to uneven flow, which increases the temperature distribution and causes a deterioration in cooling performance.

[0069] The cooler of the second embodiment is configured such that the channel-shaped layer 8 is connected to the opening-shaped layer 3, wherein, as shown in Fig. Figure 18 shows that the channel shape layer 8 includes the channel arrangement surface R80 with the channels 81 and 82 formed therein. The alternately and parallel lamellar inlet openings 31 and 32 outlet openings are projected onto these channels, pointing radially away from the origin of the opening shape layer 3. This creates wide channels above the areas without openings in the channel shape layer 4, allowing the coolant to flow evenly in these areas and thus more uniformly between the lamellae 21. This can reduce the temperature distribution and improve cooling performance. Furthermore, this configuration also creates wide channels below the areas without openings in the opening shape layer 3 at positions corresponding to the openings in the channel shape layer 4, allowing the coolant to flow evenly in these areas as well, resulting in more uniform coolant flow between the lamellae 21.

[0070] Furthermore, the channels 81 and 82 arranged in channel-shaped layer 8 reduce the flow inconsistency that occurs in the opening areas of channel-shaped layer 4. Thus, by using a reduced-thickness opening-shaped layer 3 and a thicker channel-shaped layer 8, particularly by using a greater thickness than opening-shaped layer 3, the coolant flow inconsistency can be more effectively eliminated. This further reduces the temperature distribution and improves cooling performance.

[0071] The cooler 10a according to the second embodiment further includes the channel-shaped layer 8 connected to the opening-shaped layer 3. The channel-shaped layer 8 includes a projection surface, which is an area onto which the multiple finned inlet openings 31 and the multiple finned outlet openings 32 of the opening-shaped layer 3 are projected. The channel-shaped layer 8 includes the channels 81 and 82 in an area that is larger than the projection surface. Channels 81 and 82 are opening areas that are larger in at least one of their dimensions, namely length or width, than the multiple lamellar inlet openings 31 and the multiple lamellar outlet openings 32 of the opening shape layer 3. This configuration creates the wide channels 81 and 82 above the areas without opening areas of the channel shape layer 4, thus enabling the coolant to flow even in such areas, thereby allowing the coolant to flow more evenly between the lamellae 21.This can reduce temperature distribution and improve cooling performance. Third embodiment.

[0072] Fig. Figure 20 is a cross-sectional view that schematically shows an example of a cooler configuration according to a third embodiment. It should be noted that components identical to the corresponding components of the first embodiment are designated with the same reference numerals and their descriptions are omitted. Fig. Figure 20 shows a case in which three elements 100, arranged in the same direction, for example in the X-axis direction, are joined to form a single cooler 10b. In this case, too, the layers from the base layer 1 to the channel-shaped layer 5 are structured essentially similarly to those in Figure 20. Fig. 2, if one focuses on a surface A of the cooler 10b in which one of the elements 100 is connected. This also applies to the elements 100 that are connected at other positions. That is, the cooler 10b is configured such that three of the in Fig. The two depicted metal layer structures are arranged parallel to each other.

[0073] The cooler 10b according to the third embodiment differs in the configuration of a channel connection layer 6b and an inlet-outlet arrangement layer 7b from the corresponding layers of the cooler 10 of the first embodiment and further includes a channel distribution layer 9 between the channel connection layer 6b and the inlet-outlet arrangement layer 7b. That is, the channel connection layer 6b, the channel distribution layer 9 and the inlet-outlet arrangement layer 7b are successively connected to one another under the channel shape layer 5.

[0074] Fig. Figure 21 is a top view showing an example of the configuration of the channel connection layer that forms the cooler according to the third embodiment. As in Fig. As shown in Figure 21, the channel connection layer 6b includes an inlet port 61b and an outlet port 62b in each pair of positions corresponding to each of the three elements 100. However, it should be noted that, unlike the first embodiment, in which the inlet port 61 and the outlet port 62 are oriented in the Y-axis direction, as shown in Figure 21, the channel connection layer 6b includes an inlet port 61b and an outlet port 62b in each pair of positions corresponding to each of the three elements 100. Fig. 2 shown, the inlet connection openings 61b and the outlet connection openings 62b are aligned with each other, and in the third embodiment, they are arranged offset from each other in the Y-axis direction. In the example of Fig. 21 the inlet connection openings 61b are arranged at positions that are offset by a predetermined distance Δy in the positive Y-axis direction from the outlet connection openings 62b.

[0075] The channel distribution layer 9 is a metal layer that provides a channel for distributing the coolant flowing from an inlet opening 71b of the inlet-outlet arrangement layer 7b to the inlet connection openings 61b of the channel connection layer 6b and a channel for merging the coolant from the outlet connection opening 62b of the channel connection layer 6b into an outlet opening 72b of the inlet-outlet arrangement layer 7b. Fig. Figure 22 is a top view showing an example of the configuration of the channel distribution layer that forms the cooler according to the third embodiment. As in Fig. As shown in Figure 22, the channel distribution layer 9 includes a distribution channel 91 for distributing the coolant from the inlet opening 71b to the inlet connection openings 61b of the channel connection layer 6b, and a merging channel 92 for merging the coolant from the outlet connection openings 62b of the channel connection layer 6b into the outlet opening 72b. The distribution channel 91 is arranged such that it crosses the inlet connection openings 61b of the channel connection layer 6b, but not the outlet connection openings 62b. The merging channel 92 is arranged such that it crosses the outlet connection openings 62b of the channel connection layer 6b, but not the inlet connection openings 61b. In this example, the distribution channel 91 is located at a position that is more positive in the Y-axis direction than the merging channel 92.

[0076] Fig. Figure 23 is a top view showing an example of the configuration of the inlet-outlet arrangement layer that forms the cooler according to the third embodiment. As shown in Fig. As shown in Figure 23, the inlet-outlet arrangement layer 7b includes the single inlet opening 71b and the single outlet opening 72b. The inlet opening 71b is located at a position where it intersects the distribution channel 91 of the channel distribution layer 9. The outlet opening 72b is located at a position where it intersects the merging channel 92 of the channel distribution layer 9. The example in Fig. Figure 23 shows a case in which the inlet opening 71b and the outlet opening 72b are provided at positions corresponding to the leftmost element 100. Fig. 20 correspond and are spaced apart from each other in the Y-axis direction. However, the inlet opening 71b and the outlet opening 72b can be provided at any position that allows the inlet opening 71b to cross the distribution channel 91 of the channel distribution layer 9 and the outlet opening 72b to cross the merging channel 92 of the channel distribution layer 9. Furthermore, the third embodiment assumes that the cooler 10b includes the single inlet opening 71b and the single outlet opening 72b, although three elements 100 are arranged on the cooler 10b.

[0077] As described above, the channel distribution layer 9 is inserted between the channel connection layer 6b and the inlet-outlet arrangement layer 7b. The channel distribution layer 9 includes the distribution channel 91, which connects the single inlet opening 71b to the inlet connection openings 61b of the channel connection layer 6b, which are provided corresponding to the three elements 100, and the merging channel 92, which connects the single outlet opening 72b to the outlet connection openings 62b of the channel connection layer 6b, which are provided corresponding to the three elements 100. This configuration causes the coolant flowing from the inlet opening 71b of the inlet-outlet arrangement layer 7b to flow through the distribution channel 91 and to the inlet connection openings 61b, which are connected to the fins 21 for cooling the elements 100.The coolant then reaches the fins 21 at the positions of the respective elements 100 and returns to the outlet openings 62b. The coolant exiting the outlet openings 62b flows through the merging channel 92 and is discharged from the outlet opening 72b of the inlet-outlet arrangement layer 7b. In this example, the X-axis direction corresponds to a third direction and the Y-axis direction to a fourth direction.

[0078] As described above, the elements 100 can also be cooled when several elements 100, each serving as a heat source, are present on the cooler 10b, which serves as a heat sink, using a configuration similar to the configuration where a single element 100 is present on the cooler 10b.

[0079] It should be noted that in Fig. 21 areas R20b are represented by dashed lines, each of which represents a projection area on the channel connection layer 6b of the lamella arrangement surface R20 of the lamella shape layer 2. The projected areas R20b of the lamella arrangement surface R20 are hereinafter referred to as lamella projection surface R20b. As in Fig. As shown in Figure 21, the three lamella projection surfaces R20b are arranged parallel to each other along the X-axis direction. In this context, the lamella inlet openings 31 and the lamella outlet openings 32 are defined on the opening shape layer 3. These opening areas lead to the lamella arrangement surface R20, which contains the lamellae 21 that form the groove 22, which locally merges and branches repeatedly. Fig. Figure 24 is a top view showing an example of the configuration of the channel connection layer forming the cooler according to the third embodiment. As in Fig. As shown in Figure 24, the lamella arrangement surfaces R20 provided for each of the three elements 100 are combined into a single lamella arrangement surface. The projection area of ​​this lamella arrangement surface onto the channel connection layer 6b is a lamella projection surface R20c, indicated by the dashed line. The lamellae 21 can thus be provided over the entire surface of the lamella shape layer 2.

[0080] It should be noted that although the above example was described for the case where three of the elements 100 are arranged on the single cooler 10b, the cooler 10b of the third embodiment is also applicable to cases where the number of elements 100 is two, four or more.

[0081] The cooler 10b according to the third embodiment is configured such that the layers from the base layer 1 to the channel-shaped layer 5 are structured similarly for each of the multiple elements 100 arranged in one direction as described in the first embodiment. The cooler 10b includes the channel connection layer 6b, the channel distribution layer 9, and the inlet-outlet arrangement layer 7b below the channel-shaped layer 5. In the channel connection layer 6b, the inlet connection openings 61b are arranged at positions that are offset in the extension direction relative to the positions of the outlet connection openings 62b. The channel distribution layer 9 includes the distribution channel 91 for connecting the multiple inlet connection openings 61b of the channel connection layer 6b to one another and the merging channel 92 for connecting the multiple outlet connection openings 62b to one another.The inlet-outlet arrangement layer 7b includes the inlet opening 71b, which is located at a position corresponding to a region of the distribution channel 91, and the outlet opening 72b, which is located at a position corresponding to a region of the merging channel 92. This configuration makes it possible to create a more concentric temperature distribution caused by the heat generated by the elements 100 and to reduce the temperature distribution even when several elements 100 are connected to the cooler 10b. This configuration also makes it possible to reduce the coolant pressure drop in the finned layer 2 between the finned inlet openings 31 and the finned outlet openings 32.

[0082] The configurations described in the preceding embodiments are merely examples. These configurations can be combined with other known technologies, and configurations of different embodiments can be combined with one another. Furthermore, such configurations can be omitted and / or modified in one area without deviating from the essential features. List of reference symbols

[0083] 1 Base layer; 2, 2a Fin-shaped layer; 3 Opening-shaped layer; 4, 5, 8 Channel-shaped layer; 6, 6b Channel connection layer; 7, 7b Inlet-outlet arrangement layer; 9 Channel distribution layer; 10, 10a, 10b Radiator; 21, 21a Fin; 22, 22a Groove; 31 Fin inlet opening; 32 Fin outlet opening; 33 Retaining area; 41, 51 Coolant inlet channel; 42, 52 Coolant outlet channel; 43, 44 Cover; 61, 61b Inlet connection opening; 62, 62b Outlet connection opening; 71, 71b Inlet opening; 72, 72b Outlet opening; 81, 82 Channel; 81a, 81b, 82b, 211, 221, 311, 311a, 311b, 311c, 312, 312a, 312b, 312c, 313, 313a, 313b, 313c, 321, 321a, 321b, 321c, 322, 322a, 322b, 322c Opening area; 90 Coolant; 91 Distribution channel; 92 Merging channel; 100 Element; 101 Heat conduction layer; 210, 220 Thin plate; A, R34, R100a, R210 Area; R20 Fin arrangement area; R20b, R20c Fin projection area; R53 Coolant inlet area; R54 Coolant outlet area; R80 Channel arrangement area;R100 Element arrangement area; R101 Heat conduction arrangement area.; QUOTES INCLUDED IN THE DESCRIPTION

[0000] This list of documents cited by the applicant was automatically generated and is included solely for the reader's convenience. The list is not part of the German patent or utility model application. The DPMA accepts no liability for any errors or omissions. Cited patent literature

[0000] JP 5.711.459 B2

[0004]

Claims

[1] Cooler which is connected to an element to cool the element, wherein the cooler has the following features: a base layer to which the element is bonded; a lamellar layer with a lamellar arrangement surface in which a plurality of lamellae are arranged, the lamellae being connected to the base layer; and an opening-shaped layer connected to the finned-shaped layer and having a plurality of finned inlet openings and a plurality of finned outlet openings, wherein the finned inlet openings allow the flow of a coolant to the finned arrangement surface, wherein the plurality of finned inlet openings are connected via an inlet channel to an inlet opening, wherein the inlet opening is an opening into which the coolant of the radiator flows, the multitude of finned outlet openings are connected via an outlet channel to an outlet opening, the outlet opening being an opening from which the coolant of the radiator flows, and The multitude of lamellar inlet openings and the multitude of lamellar outlet openings are arranged alternately and parallel to each other in a direction radially away from a point in a projection area of ​​the element's shape onto the opening shape layer. [2] Cooler according to claim 1, wherein the distance between adjacent fin inlet openings and fin outlet openings is greater at a position that is further away from the point in the surface than at a position that is closer to the point. [3] Cooler according to claim 1 or 2, wherein the plurality of fin inlet openings and the plurality of fin outlet openings are arranged such that they have fourfold rotational symmetry with respect to the point. [4] Cooler according to one of claims 1 to 3, wherein the fins are arranged such that the coolant can repeatedly flow together and branch out again between the adjacent fin inlet openings and the fin outlet openings. [5] Cooler according to one of claims 1 to 4, wherein the plurality of fin inlet openings and the plurality of fin outlet openings are arranged such that they are aligned with a direction of opening areas defined by the fins on a surface that is in contact with the opening shape layer. [6] Cooler according to any one of claims 1 to 5, wherein the plurality of fin inlet openings and the plurality of fin outlet openings are each defined by a plurality of openings extending in different directions and having individual end regions that are connected to each other. [7] Cooler according to claim 6, wherein the plurality of fin inlet openings and the plurality of fin outlet openings each have a shape defined by a linear region extending in a first direction and a linear region extending in a second direction and connected to the linear region extending in the first direction, the second direction being perpendicular to the first direction. [8] Cooler according to any one of claims 1 to 7, further comprising: a first channel-shaped layer connected to the opening-shaped layer, wherein the first channel-shaped layer has a projection area which is a surface onto which the plurality of fin inlet openings and the plurality of fin outlet openings of the opening-shaped layer are projected, wherein the first channel-shaped layer has opening areas in an area larger than the projection area which are larger in at least one of their dimensions, length or width, than the plurality of fin inlet openings and the plurality of fin outlet openings of the opening-shaped layer. [9] Cooler according to claim 8, wherein the first channel shape layer has a thickness greater than the thickness of the opening shape layer. [10] Cooler according to any one of claims 1 to 7, further comprising: a second channel shape layer connected to the opening shape layer, comprising the inlet channel and the outlet channel; an inlet-outlet arrangement layer comprising the inlet opening and the outlet opening; and a channel connection layer arranged between the second channel shape layer and the inlet-outlet arrangement layer, comprising an inlet connection opening and an outlet connection opening, wherein the inlet connection opening connects the inlet opening and the inlet channel, and the outlet connection opening connects the outlet opening and the outlet channel, wherein the element has a multitude of elements arranged in a third direction on the base layer, and the multitude of lamellar inlet openings, the multitude of lamellar outlet openings, the inlet channel and the outlet channel are provided for each of the multitude of elements. [11] Cooler according to claim 10, further comprising: A channel distribution layer between the inlet-outlet arrangement layer and the channel connection layer, wherein the channel distribution layer has a distribution channel for distributing the coolant flowing from the inlet opening to the inlet connection opening and a merging channel for merging the coolant from the outlet connection opening into the outlet opening, wherein the inlet opening and the outlet opening of the channel connection layer are offset in a fourth direction perpendicular to the third direction, the distribution channel is an opening that extends in the third direction and is arranged so that it connects to the inlet opening at a position that does not overlap with the outlet opening in the fourth direction, and the merging channel is an opening that extends in the third direction and is arranged so that it connects to the outflow port opening at a point that does not overlap with the inflow port opening in the fourth direction.

Images