PROBES, PROBE SHEETS, TOOLS FOR PROBE SHEETS, SHEET HOLDERS AND PROBE SYSTEMS FOR THE ELECTRICAL TESTING OF A DEVICE UNDER TEST

Abstract

Probes, probe blades, probe blade tools, blade holders, and probe systems for electrically testing a device under test (DUT). In some examples, the probe blades are configured to provide an electrical Kelvin connection with the DUT. In some examples, the probe blades include an alignment structure configured to engage with a blade holder when the probe blade is received in a blade-receiving area of ​​the blade holder. The blade holders are configured to detachably and operationally attach a probe blade to a probe system. In some examples, the blade holders include the probe blade. The probe systems are configured to electrically test the DUT and include the blade holder.

Description

Related registrations

[0001] This application claims priority over US patent application number 18 / 762,393, filed on July 2, 2024, and US preliminary patent application number 63 / 526,630, filed on July 13, 2023, the full disclosures of which are hereby incorporated by reference. Territory of Revelation

[0002] The present disclosure relates generally to probes, probe blades, probe holders and probe systems for electrically testing a device under test. Background of the Revelation

[0003] As integrated circuit devices tend toward higher and higher densities, the contact areas used to provide an electrical interface between the integrated circuit devices and a probe system configured to electrically test the devices become proportionally smaller. For high-accuracy testing, it is often desirable to establish a Kelvin, or at least a quasi-Kelvin, electrical connection between the probe system and the integrated circuit device. Conventional testing approaches use separate force and measurement probes to contact a given contact area during testing, thereby enabling the electrical Kelvin connection and providing independent verification of current flow through the integrated circuit device and voltages across it.However, the reduction in contact area described above makes it difficult or even impossible to connect separate force and measurement probes with a single contact surface. Additionally, due to size limitations, conventional probes capable of forming the electrical Kelvin connection on increasingly smaller contact areas have become increasingly expensive. Therefore, there is a need for improved probes, probe blades, blade holders, and / or probe systems for the electrical testing of a device under test. Summary of Revelation

[0004] Probes, probe blades, probe blade tools, blade holders, and probe systems for the electrical testing of a device under test (DUT). The probe blades comprise a dielectric blade body defined by a dielectric blade body material. The dielectric blade body includes a blade attachment area and a probe attachment area, defining a first blade side and an opposing second blade side. The probe blades also include a probe that is operationally attached to the probe attachment area. The probe includes a probe tip configured to make electrical contact with the DUT.

[0005] In some examples, the probe blades further include an electrically conductive force trace extending along the first blade side and between the blade attachment area and the probe attachment area. This electrically conductive force trace is in electrical communication with the probe within the probe attachment area. In such examples, the probe blades also include an electrically conductive sensing trace extending along the first blade side and between the blade attachment area and the probe attachment area. In such examples, the probe blades further include an electrically conductive protective layer extending along the opposite second blade side. In such examples, the probe blades are configured to provide an electrical Kelvin connection with the DUT.

[0006] In some examples, the probe blades further include an electrically conductive track extending between the blade attachment area and the probe attachment area, which is in electrical communication with the probe within the probe attachment area. In such examples, the probe blades also include an alignment structure configured to engage with a blade holder when the probe blade is received in a blade receiving area of ​​the blade holder.In such examples, the alignment structure includes a notch extending into the probe blade and configured to accommodate an area of ​​the blade holder to facilitate consistent alignment between the probe blade and the blade holder, and / or a projection extending from an edge area of ​​the probe blade and configured to extend around an area of ​​the blade holder to facilitate consistent alignment between the probe blade and the blade holder.

[0007] The blade holders include an electrically conductive holder housing and are configured to detachably and operationally attach a probe blade to a probe system. The electrically conductive housing defines a blade receiving area configured to accommodate the blade mounting area of ​​the probe blade. The electrically conductive housing also includes an electrical connection area configured to accommodate a variety of electrical connections. Furthermore, the electrically conductive housing includes a housing mounting area configured to operationally attach the electrically conductive holder housing to the probe system. The electrically conductive housing also includes a partially enclosed housing volume extending between the blade receiving area and the electrical connection area.The blade holders also include a blade contacting structure that is positioned at least partially within the blade receiving area. The blade contacting structure includes a force blade contact configured to electrically contact the electrically conductive force track and a sensing blade contact configured to electrically contact the electrically conductive sensing track. The blade holders further include an electrical ground connection to the electrical connection area. This electrical ground connection is in electrical communication with the electrically conductive holder housing. The blade holders also include an electrical force connection within the electrical connection area. This electrical force connection is electrically isolated from the electrically conductive holder housing. The blade holders further include a force conductor that extends within the housing volume.The force conductor is electrically insulated from the electrically conductive holder housing and electrically connects the electrical force connection to the force blade contact. The blade holders also include an electrical measuring connection to the electrical connection area. This electrical measuring connection is electrically insulated from both the electrically conductive holder housing and the electrical force connection. The blade holders further include a measuring conductor that extends within the housing volume. This measuring conductor is electrically insulated from both the electrically conductive holder housing and the force conductor, and the second conductor electrically connects the electrical measuring connection to the measuring blade contact. In some examples, the blade holders also include the probe blade.

[0008] The probe systems are configured to electrically test a device under test (DUT) and include a chuck that defines a support surface configured to hold a substrate containing the DUT. The probe systems also include a probe assembly that includes the blade holder. The probe systems further include a manipulator configured to move the probe assembly relative to the support surface. The probe systems also include a signal generation and analysis assembly configured to provide a force signal to the DUT via the probe assembly and / or to receive a sensing signal from the DUT via the probe assembly. The probe systems further include an imaging device configured to acquire an optical image of at least one other component of the probe system and / or the DUT. Brief description of the drawings Fig. Figure 1 is a schematic representation of examples of a probe system according to the present disclosure. Fig. Figure 2 is a representation of examples of a probe according to the present revelation. Fig. Figure 3 is another representation of the probe from Fig. 2. Fig. Figure 4 is a schematic representation of examples of a probe sheet containing two probes, according to the present revelation. Fig. Figure 5 is another representation of the probe sheet from Fig. 4. Fig. Figure 6 is another representation of an area of ​​the probe sheet from the Fig. 4-5. Fig. Figure 7 is a representation of an example of a probe sheet incorporating two probes and configured to form a Kelvin connection with a device under test (DUT), according to the present disclosure. Fig. Figure 8 is another representation of the probe sheet from Fig. 7. Fig. Figure 9 is another representation of an area of ​​the probe sheet from the Fig. 7-8. Fig. Figure 10 is a representation of another example of a probe sheet that includes two probes and is configured to form the Kelvin connection with the DUT, according to the present disclosure. Fig. Figure 11 is another representation of the probe sheet from Fig. 10. Fig. Figure 12 is another representation of an area of ​​the probe sheet from the Fig. 10-11. Fig. Figure 13 is a representation of an example of two probes that may be included in one probe sheet, according to the present revelation. Fig. Figure 14 is a representation of an example of a probe sheet that includes a single probe and is configured to form a quasi-Kelvin connection with a DUT, according to the present disclosure. Fig. 15 is another representation of the probe sheet from Fig. 14. Fig. Figure 16 is another representation of an area of ​​the probe sheet from the Fig. 14-15. Fig. Figure 17 is a representation of an example of a leaf holder configured to hold a probe leaf, according to the present disclosure. Fig. 18 is another illustration of the leaf holder from Fig. 17. Fig. 19 is another illustration of the leaf holder from the Fig. 17-18. Fig. 20 is another illustration of the leaf holder from the Fig. 17-19. Fig. 21 is another representation of the leaf holder from the Fig. 17-20. Fig. 22 is another representation of the leaf holder from the Fig. 17-20. Fig. 23 is an example of a leaf contacting structure that may be included in a leaf holder, according to the present disclosure. Fig. 24 is another illustration of the leaf holder from the Fig. 17-23. Fig. 25 is another illustration of the leaf holder from the Fig. 17-24. Fig. Figure 26 is a schematic representation of examples of a tool configured to facilitate the insertion and / or removal of the probe sheet, according to the present disclosure. Fig. Figure 27 is a less schematic representation of an example of a tool configured to facilitate the insertion and / or removal of the probe blade, according to the present disclosure. Fig. Figure 28 is a less schematic representation of an example of a tool configured to facilitate the insertion and / or removal of the probe blade, according to the present disclosure. Fig. 29 is a representation of a section of the tool from Fig. 28. Fig. 30 is a representation of a section of the tool from Fig. 28, who grasps a probe blade. Detailed description and best way of revelation

[0009] Fig. Figures 1-30 provide examples of probe systems 10, blade holders 100, probe blades 200, probes 300, and / or tools 400 according to the present disclosure. Elements serving a similar or at least substantially similar purpose are included in each of the Fig. 1-30 are marked with the same numbers, and these elements are referred to herein by reference to each of the Fig. 1-30 may not be discussed in detail. Similarly, not all elements may be included in each of the Fig. 1-30 are designated, but reference symbols associated with them may be used herein for consistency. Elements, components and / or features referred to herein by reference to one or more of the Fig. 1-30 can be discussed in one of the Fig. 1-30 be included and / or used with them, without deviating from the scope of the present disclosure.

[0010] In general, elements that are likely to be included in a particular embodiment are illustrated in solid lines, while optional elements are illustrated in dashed lines. However, elements shown in solid lines may not be essential for all embodiments and may be omitted in some embodiments without altering the scope of the present disclosure.

[0011] Fig. Figure 1 is a schematic representation of examples of probe systems 10 according to the present disclosure. Probe systems 10 can include a variety of components that can be used together to test or electrically test a device under test (DUT) 32. Probe systems 10 include a chuck 20. The chuck 20 can include and / or define a support surface 22 that can be configured to support a substrate 30 containing the DUT 32. Examples of the chuck 20 include a vacuum chuck, a shielded chuck, an electromagnetically shielded chuck, and / or a temperature-controlled chuck.

[0012] Probe systems 10 may also include a probe assembly 90. The probe assembly 90 may, if present, include a probe, examples of which are disclosed herein with reference to probe 300. Additionally or alternatively, the probe assembly 90 may include a probe blade, examples of which are disclosed herein with reference to probe blade 200. Additionally or alternatively, the probe assembly 90 may include a blade holder 100, examples of which are disclosed herein with reference to blade holder 100.

[0013] The probe 300 can include a probe tip 350, which can be configured to make contact with the DUT 32, either by touch or electrical contact, such as via contact or electrical contact with a contact pad 34 of the DUT 32. In some examples, and as illustrated, a given probe can include a plurality of probe tips 350, which can be configured to make contact with a single contact pad 34 or to make electrical contact. In such a configuration, the probe system 10 and / or the probes 300 thereof can be configured to form a Kelvin connection with the DUT 32.

[0014] As discussed in more detail herein, the probe 300 can be operationally attached to the probe blade 200. As also discussed in more detail herein, the blade holder 100 can be configured to detachably and operationally attach the probe blade 200 to a remaining part of the probe system 10. As an example, and as described in Fig. As illustrated in Figure 1, the blade holder 100 can be operationally mounted on a manipulator 40, which can be configured to move the probe assembly 90 relative to the support surface 22. Examples of the manipulator 40 include a linear actuator, a rack and pinion assembly, a leadscrew and nut assembly, a ball screw and nut assembly, a motor, a stepper motor, a servo motor, and / or a piezoelectric positioning assembly. It is within the scope of this disclosure that the manipulator 40 can additionally or alternatively be configured to move the support surface 22 relative to the probe assembly 90 and / or to move both the support surface 22 and the probe assembly 90. This can involve movement along and / or about one, two, or three axes, which can be perpendicular and / or orthogonal to each other.

[0015] As also in Fig. As illustrated in Figure 1, the probe system 10 can include a signal generation and analysis assembly 50. The signal generation and analysis assembly 50 can be configured to provide a force signal 52 to the DUT 32, such as via the probe assembly 90 and / or the contact pad 34. Additionally or alternatively, the signal generation and analysis assembly 50 can be configured to receive a sensing signal 54 from the DUT 32, such as via the probe assembly 90 and / or the contact pad 34. Such a configuration can enable and / or facilitate four-terminal and / or Kelvin sensing of the electrical current flow through the DUT 32 and the voltage across it by the probe system 10. Examples of the signal generation and analysis assembly 50 include a voltage source, a current source, an AC source, a DC source, a function generator, a voltmeter, an ammeter, and / or an impedance analyzer.

[0016] As also in Fig. As illustrated in Figure 1, the probe system 10 can include an imaging device 60. The imaging device 60 can be configured to acquire an image or an optical image of at least one other component of the probe system 10, such as the probe 300 and / or the probe tip 350 thereof. Additionally or alternatively, the imaging device 60 can be configured to acquire the image of the DUT 32. In a specific example, the imaging device 60 can be configured to acquire the image of the contact pads 34 of the DUT 32 and also of the probe 300 and / or the probe tip 350, for example, to enable and / or facilitate alignment between the probe tip and the contact pads. Examples of the imaging device 60 include a camera, a digital camera, a video camera, a digital video camera, a microscope, and / or a digital microscope.

[0017] In some examples and as in Fig. As illustrated in dashed lines in Figure 1, the probe system 10 can include a plurality of probe assemblies 90. In such a configuration, the probe system 10 can also include a plurality of manipulators 40, each manipulator 40 being configured to move a corresponding probe assembly 90 relative to the support surface 22, for example, to enable and / or facilitate alignment and / or contact between one or more probes 300 of each probe assembly 90 and a corresponding contact pad 34 of the DUT 32.

[0018] Fig. Figures 2-3 are representations of examples of probes 300 according to the present disclosure. The probes 300 can include any suitable structure that can be adapted, configured, designed and / or constructed to facilitate electrical testing of the DUT 32 by the probe system 10, such as by electrically contacting the DUT 32, providing the force signal to the DUT 32 and / or receiving the detection signal from the DUT 32.

[0019] The probes 300, which are in Fig. Figures 2-3 illustrate more detailed representations of the probes 300 and / or those shown in Figure 300. Fig. Figures 1, 4-22 and 24-25 illustrate this. In this sense, each of the structures, functions and / or features described herein with reference to probes 300 of the Fig. 2-3 are revealed, in the probes 300 of the Fig. 1, 4-22 and / or 24-25 may be included and / or used with them, without deviating from the scope of this disclosure. Likewise, any of the structures, functions and / or features described herein with reference to probes 300 of the Fig. 1, 4-22 and / or 24-25 are revealed in probes 300 of the Fig. 2-3 be included and / or used with it, without deviating from the scope of the present disclosure.

[0020] In the example that is in Fig. As illustrated in Figure 2-3, the probes 300 comprise a unified probe body 310, defined by an electrically conductive probe body material. The unified probe body includes a probe holder 316, a tip region 340, and a support region 370. The probe holder 316 is configured to be operationally attached to a probe blade, such as the probe blade 200, which is discussed in more detail herein. The tip region 340 comprises a probe tip 350 and is configured to electrically contact the DUT. The support region 370 extends along a support longitudinal axis 372 between the probe holder 316 and the tip region 340.

[0021] The unified probe body 310 can include, be formed from, and / or be defined by any suitable electrically conductive probe body material. In a specific example, the probe 300 and / or the unified probe body 310 therein can be formed and / or defined by a microelectromechanical systems (MEMS) machining process. In this sense, the electrically conductive probe body material can include and / or be a material suitable for the MEMS machining process. Examples of electrically conductive probe body materials include a metallic material, a semiconductor material, and / or a highly doped semiconductor material.

[0022] The uniform probe body 310 can include and / or be a planar or at least substantially planar uniform probe body. As an example, the uniform probe body 310 can define a first probe side 311, an opposing second probe side 312, and a probe thickness 314 that can be measured between the first probe side and the second probe side. The first probe side 311 can be planar or at least substantially planar. Likewise, the second probe side 312 can be planar or at least substantially planar. The first probe side can extend parallel or at least substantially parallel to the second probe side.

[0023] The probe thickness 314 can have and / or be defined as any suitable value. In general, the probe thickness 314 can be less than a maximum probe dimension 300. As an example, the ratio of the maximum probe dimension 300 to the probe thickness 314 can lie within a probe ratio threshold range, examples of which include ranges of at least 20, at least 25, at least 30, at least 35, at least 40, at least 45, at least 50, at most 200, at most 150, at most 100, at most 90, at most 80, at most 70, at most 60, at most 50 and / or at most 40.

[0024] The probe holder 316 can be configured to be operationally attached to the probe blade in any suitable manner, or to mount the probe operationally to the probe blade. For example, the probe holder 316 can be configured to be welded, soldered, and / or bonded to the probe blade, such as by using an electrically conductive adhesive.

[0025] As in Fig. As illustrated in Figures 2-3, the probe holder 316 can include a mounting tab 318. The mounting tab 318, if present, can project from and / or extend away from the longitudinal axis of the support 372, such as by projection along a tab projection axis 320 and / or by projection in a probe holder extension direction 322. The tab projection axis 320 can extend perpendicular or at least substantially perpendicular to the longitudinal axis of the support 372 and / or the probe holder extension direction 322 can extend parallel or at least substantially parallel to the tab projection axis 320.

[0026] As also in Fig. As illustrated in Figures 2-3, the probe holder 316 can include a variety of area openings 324. The area openings 324 can extend through the uniform probe body 310, such as between the first probe side 311 and the second probe side 312. This can include an extension perpendicular to the support longitudinal axis 372 and / or perpendicular to the tab projection axis 320. The area openings 324 can increase the surface area of ​​the probe 300, thereby enabling and / or facilitating improved heat dissipation from the probe 300, such as that generated by the flow of an electric current through the probe.

[0027] The tip area 340 can include any suitable structure that incorporates the probe tip 350 and / or that is adapted, configured, designed, and / or constructed to contact or electrically contact the DUT. As shown in Fig. As illustrated in Figures 2-3, the tip region 340 can include a tip projection 342 that may extend from or away from the support region 370 and / or towards the probe tip 350, such as along a tip projection axis 344 and / or in a tip region extension direction 346. The tip projection axis 344 may extend at a tip projection angle 348 relative to the support longitudinal axis 372. Examples of tip projection angles 348 include angles of at least 90 degrees, at least 100 degrees, at least 110 degrees, at least 120 degrees, at least 130 degrees, at least 140 degrees, at most 160 degrees, at most 150 degrees, at most 140 degrees, at most 130 degrees, at most 120 degrees, at most 110 degrees, and / or at most 100 degrees.Such a configuration can enable and / or facilitate the manufacture of probe assemblies 90 that include the probe 300 and provide a target and / or desired overdrive-to-scrub ratio, examples of which are disclosed herein.

[0028] The tip extension direction 346 can be at least partially opposite to the probe holder extension direction 322. In other words, both the probe holder 316 and the tip projection 342 can extend away from the support area 370 and in opposite or at least partially opposite directions.

[0029] The support area 370 can include any suitable structure extending along the support longitudinal axis 372 and / or extending between the probe holder 316 and the tip area 340. In some examples, the support area 370 can include an elastic support area 370 and / or be configured to bend, deform, and / or deflect upon contact between the probe tip 350 and the DUT. Such a configuration can enable and / or facilitate overdrive between the probe system and the DUT.

[0030] In some examples and as in Fig. As illustrated in dashed lines 2-3, the support area 370 can include at least one longitudinal opening 374. The longitudinal opening 374 can extend at least partially along and / or at least partially parallel to the longitudinal axis 372 of the support. Additionally or alternatively, the longitudinal opening 374 can extend from the first probe side 311, from the second probe side 312, and / or between the first probe side and the second probe side.

[0031] In other words, the support area 370 can include a plurality of elongated supports 376, each of which can at least partially delimit and / or surround at least one corresponding longitudinal opening 374. If the support area 370 includes the plurality of elongated supports, each elongated support 376 can extend along and / or parallel to the longitudinal axis 372 of the support and / or can extend at least partially between the probe holder 316 and the tip area 340.

[0032] The plurality of elongated beams can include any suitable number of elongated beams together with a corresponding number of longitudinal openings. Examples of the plurality of elongated beams include at least 2, at least 3, at least 4, at least 5, at most 8, at most 6, and / or at most 4 elongated beams. More specific examples of the plurality of elongated beams include 2, 3, 4, 5, or 6 elongated beams.

[0033] Each elongated beam 376 can have and / or define any suitable shape. For example, the elongated beams can define a rectangular cross-sectional shape, a cross-sectional shape that is at least substantially rectangular, a square cross-sectional shape, and / or a cross-sectional shape that is at least substantially square.

[0034] The longitudinal opening 374 can increase the flexibility of the probe 300, for example in a deflection direction that may be parallel or at least substantially parallel to the probe holder extension direction 322. Additionally or alternatively, the longitudinal opening 374 can enable and / or facilitate the fabrication of the probe 300 with a target and / or desired compliance, such as in the deflection direction, and / or enable and / or facilitate the fabrication of probe assemblies 90 that incorporate the probe 300 and provide the target and / or desired overdrive-to-scrub ratio.

[0035] As in Fig. As illustrated in dashed lines 2-3, the probe 300 can include a reference structure 380. The reference structure 380, if present, can be configured to be seen and / or visible by the imaging device 60 of the probe system 10 during the operational use of the probe system for electrical testing of the DUT, as shown in Fig. Figure 1 illustrates this. In other words, the reference structure 380 can be defined at least partially on an upper surface 304 of the probe 300. Such a configuration can enable and / or facilitate imaging and / or identification of the reference structure, thereby improving the probe system's ability to align the probe tip with the DUT.

[0036] In some examples, the reference structure may be positioned within the tip area 340 and / or may be close to the tip area 340 relative to the probe holder 316. In other words, the ratio of a reference probe tip distance between the reference structure and the probe tip to the maximum extension of the probe may be less than a threshold distance ratio. Examples of threshold distance ratios include 0.1, 0.08, 0.06, 0.04, 0.02, 0.01, 0.005, or 0.001. In some examples, during the operational use of the probe system for electrical testing of the DUT, the reference structure 380 may be vertical, at least substantially vertical, and / or directly vertical above the probe tip 350. In other words, when viewed from above via the imaging device, the probe tip may be located immediately below the reference structure.

[0037] As discussed, the probes 300 can be formed and / or defined via the MEMS processing process. In this sense, methods for fabricating and / or forming probes 300 can involve providing a MEMS substrate and using at least one MEMS or semiconductor fabrication process to form probes 300 from, at least partially from, and / or on the MEMS substrate. Examples of MEMS fabrication processes include a lithographic process, a deposition process, and / or an etching process.

[0038] Fig. Figures 4-16 are illustrations of examples of probe blades 200 according to the present disclosure. The probe blades 200 can include any suitable structure that can be adapted, configured, designed and / or constructed to facilitate electrical testing of a DUT by the probe system, such as being operationally attached to a probe 300 and / or including transmitting the force signal to the probe, receiving the detection signal from the probe, protecting the force signal and / or the detection signal and / or attaching the probe operationally to the probe system.

[0039] The probe sheets 200, which are in Fig. Figures 4-16 illustrate more detailed representations of probe sheets 200 and / or may be included. Fig. 1, 17-22, 24-25 and 30 are illustrated. In this sense, each of the structures, functions and / or features described herein with reference to probe sheets 200 of the Fig. 4-16 are revealed in probe sheets 200 of the Fig. 1, 17-22, 24-25 and / or 30 may be included and / or used without deviating from the scope of this disclosure. Likewise, any of the structures, functions and / or features described herein with reference to Probe Sheets 200 of the Fig. 1, 17-22, 24-25 and / or 30 are revealed in probe sheets 200 of the Fig. 4-16 are included and / or used without deviating from the scope of the present disclosure.

[0040] In the example of the Fig. Figure 4-16 describes the probe blade 200 as comprising a dielectric blade body 210, a probe 300, and an electrically conductive track 240. The dielectric blade body 210 is defined by a dielectric blade body material and includes a blade attachment area 220 and a probe attachment area 230. The probe 300 is operationally mounted to the probe attachment area 230 and includes a probe tip 350 configured to electrically contact the DUT. The electrically conductive track 240 extends between the blade attachment area 220 and the probe attachment area 230 and is in electrical communication with the probe 300 within the probe attachment area.

[0041] The dielectric leaf body 210 can include, be formed from, and / or be defined by any suitable dielectric leaf body material. In one specific example, the dielectric leaf body material includes and / or is a ceramic dielectric leaf body material. In another specific example, the dielectric leaf body material differs from the electrically conductive probe body material of the probe 300.

[0042] The dielectric leaf body 210 can include and / or be a planar or at least substantially planar dielectric leaf body. As an example, the dielectric leaf body 210 can define a first leaf side 211, an opposite second leaf side 212, and a leaf thickness 214 that can be measured between the first and second leaf sides. The first leaf side 211 can be planar or at least substantially planar. Likewise, the second leaf side 212 can be planar or at least substantially planar. The first leaf side can extend parallel or at least substantially parallel to the second leaf side.

[0043] The blade thickness 214 can have and / or be defined as any suitable value. In general, the blade thickness 214 can be less than a maximum extent of the probe blade 200. As an example, the ratio of the maximum extent of the probe blade 200 to the blade thickness 214 can lie within a blade ratio threshold range, such as ranges of at least 20, at least 25, at least 30, at least 35, at least 40, at least 45, at least 50, at most 200, at most 150, at most 100, at most 90, at most 80, at most 70, at most 60, at most 50, and / or at most 40.

[0044] As illustrated, the dielectric leaf body 210 can be L-shaped or at least partially L-shaped. In other words, the leaf attachment area 220 can project from a remainder of the dielectric leaf body along a leaf attachment area axis 222, and the probe attachment area 230 can project from a remainder of the dielectric leaf body along a probe attachment area axis 232 that differs from the leaf attachment area axis.An angle of intersection 234 between the blade attachment area axis 222 and the probe attachment area axis 232 can have and / or define any suitable value, including, for example, at least 30 degrees, at least 40 degrees, at least 50 degrees, at least 60 degrees, at least 70 degrees, at least 80 degrees, at least 90 degrees, at least 100 degrees, at most 150 degrees, at most 140 degrees, at most 130 degrees, at most 120 degrees, at most 110 degrees, at most 100 degrees, at most 90 degrees, and / or at most 80 degrees. Additionally or alternatively, the blade attachment area axis 222 and / or the probe attachment area axis 232 can extend parallel to, or at least substantially parallel to, the first blade side 211 and / or the second blade side 212.

[0045] The electrically conductive track 240 can comprise any suitable structure extending between the blade attachment area 220 and the probe attachment area 230 and / or in electrical communication with the probe 300. In some examples, the electrically conductive track 240 can be defined by an electrically conductive track material. The electrically conductive track material can differ from the dielectric blade body material of the dielectric blade body 210 and / or from the electrically conductive probe body material of the unified probe body 310. An example of the electrically conductive track material includes a metallic electrically conductive track material.

[0046] The electrically conductive track 240 can be carried by the dielectric leaf body 210 and / or by the dielectric leaf body material. For example, the electrically conductive track 240 can be deposited on the dielectric leaf body material, can be bonded to the dielectric leaf body material, and / or can be functionally attached to the dielectric leaf body material.

[0047] In some examples, the electrically conductive track 240 may include and / or be an elongated electrically conductive track. In some examples, the electrically conductive track 240 may include and / or be at least partially planar electrically conductive tracks.

[0048] The probe 300 may include and / or be an electrically conductive probe. The probe 300 may be operationally attached to the probe blade 200 in any suitable manner. For example, the probe 300 may be welded, soldered, bonded, and / or glued to the probe mounting area 230 and / or to the electrically conductive track 240.

[0049] In some examples, the electrically conductive track 240 can extend at least partially or even completely onto and / or along the first leaf face 211 of the dielectric leaf body 210, as in the Fig. 4, Fig. 7, Fig. 11 and Fig. Figure 14 illustrates this. In such examples, the probe blade 200 can include an electrically conductive protective layer 250, which can extend at least partially or even completely onto and / or along the opposite second blade side 212 of the dielectric blade body 210, as shown in the Fig. 5, Fig. 8, Fig. 12 and Fig. Figure 15 illustrates this. The electrically conductive protective layer 250 can be configured to be held at a fixed or at least substantially fixed electrical potential, such as ground potential, thereby protecting, shielding, and / or shielding the electrically conductive track 240 from electrical disturbance. In some examples, the probe sheet 200 may be described herein as containing a plurality of electrically conductive tracks 240, including at least one electrically conductive track 240 extending on the first sheet side 211 and another electrically conductive track 240 extending on the second sheet side 212, such as the electrically conductive protective layer 250. In other words, the electrically conductive protective layer 250 can be an electrically conductive track 240.

[0050] The opposite second sheet side 212 can define a second side surface area, and the electrically conductive protective layer 250 can define a protective layer surface area that is a threshold surface area fraction of the second side surface area. Examples of the threshold surface area fraction include at least 50%, at least 60%, at least 70%, at least 80%, at least 90%, or at least 95%.

[0051] The electrically conductive protective layer 250 can be directly opposite the electrically conductive track 240, for example, across the thickness 214 of the probe blade 200 along at least a fraction of the sleeper track length of the electrically conductive track. Examples of the sleeper track length fraction include at least 70%, at least 75%, at least 80%, at least 85%, at least 90%, at least 95%, or at least 99%.

[0052] The electrically conductive protective layer can only extend on the opposite second leaf side 212 of the dielectric leaf body 210. In other words, the electrically conductive protective layer 250 can be electrically insulated from the electrically conductive track 240, which extends on the first leaf side 211, across the dielectric leaf body and / or can be spaced apart from the electrically conductive track across the dielectric leaf body along the entire length of the electrically conductive track.

[0053] As in Fig. As illustrated in Figures 4, 6-7, 9-10, 12, 14 and 16, the probe blades 200 can include a first electrically conductive track 241, which may also be referred to herein as an electrically conductive force track 241, and a second electrically conductive track 242, which may also be referred to herein as an electrically conductive measuring track 242. Both the first electrically conductive track 241 and the second electrically conductive track 242 can extend between the blade attachment area 220 and the probe attachment area 230 and / or can extend at least partially or even completely on the first blade side 211.

[0054] In some examples, the probe blades 200 are configured to enable and / or facilitate an electrical Kelvin connection or a true Kelvin connection between the probe system 10 and the DUT. In such a configuration, and as overall by Fig. As illustrated in Figure 4-13, the probe sheet 200 can include a first probe 301, which contains a first probe tip 351, and a second probe 302, which contains a second probe tip 352. Both the first probe 301 and the second probe 302 can be operationally mounted on the probe mounting area 230, for example, via corresponding probe holders 316 therein. In such a configuration, the first electrically conductive track 241 can be in electrical communication with the first probe 301 within the probe mounting area 230, and the second electrically conductive track 242 can be in electrical communication with the second probe 302 within the probe mounting area 230.However, the first probe 301 and the second probe 302 and / or the first electrically conductive track 241 and the second electrically conductive track 242 can be electrically isolated from each other within the probe blade 200 and / or within an entirety of the probe blade. For example, the second electrically conductive track can be spaced apart from the first electrically conductive track, such as across the dielectric blade body, along an entirety of the length of the first electrically conductive track. Alternatively, the second electrically conductive track can be electrically isolated from the first electrically conductive track across the dielectric blade body. Alternatively, the first probe can be spaced apart from the second probe. Alternatively, the first probe can be electrically isolated from the second probe, such as across the dielectric body and / or by an air gap between them.

[0055] To facilitate the formation of the Kelvin connection with the DUT, the first probe tip 351 and the second probe tip 352 can be configured, aligned, and / or positioned relative to each other to electrically contact a single contact pad of the DUT. In this sense, a distance of 260 between the first probe tip and the second probe tip, which is described in the Fig. 1, Fig. 6 and Fig. 13 illustrates that the contact pad should be smaller than or less than a threshold fraction of a corresponding width 36 of the individual contact pad, as shown in Fig. Figure 1 illustrates this. Examples of the threshold fraction include 80%, 70%, 60%, 50%, 40%, or 30%.

[0056] In general, the thickness 214 of the probe blade 200 can be greater than the corresponding width of the individual contact pad. In this sense, the probe blade 200 can be configured to allow and / or facilitate a distance 260 between the first probe tip and the second probe tip that is less than the blade thickness 214. As an example, and as shown in the Fig. 6 and Fig. As illustrated in Figure 13, the first probe 301 and / or the second probe 302 can be aligned at a probe extension angle 390 with respect to the probe blade 200 and / or with respect to the first blade side 211 and / or the second blade side 212 thereto. In other words, the first probe and the second probe can taper towards each other as they extend away from the probe blade. Examples of probe extension angles include at least 0 degrees, at least 1 degree, at least 2 degrees, at least 4 degrees, at least 6 degrees, at least 8 degrees, at least 10 degrees, at least 12 degrees, at least 14 degrees, at most 20 degrees, at most 18 degrees, at most 16 degrees, at most 14 degrees, at most 12 degrees, at most 10 degrees, at most 8 degrees, at most 6 degrees, or at most 4 degrees.

[0057] In general, it may not be feasible or at least practical to attach the first probe 301 and the second probe 302 to corresponding sides (e.g., the first sheet side 211 and the second sheet side 212, respectively) of the probe sheet 200, and also to orient the first and second probes so that they taper towards each other and / or define the probe extension angle 390 with respect to the probe sheet. In this sense, and perhaps best explained in the Fig. 6, Fig. 9 and Fig. As illustrated in Figure 12, probes 300, such as the first probe 301 and / or the second probe 302, can be operationally attached to a mounting surface 270 of the probe blade 200, which extends between the first blade side 211 and the second blade side 212. In other words, the first probe 301 and the second probe 302 can be operationally attached to the same surface of the probe blade, namely the mounting surface 270.

[0058] To facilitate such a configuration, and as illustrated, the first electrically conductive track 241 can include a first track extension area 271 that extends and / or is defined on the mounting surface 270. Likewise, the second electrically conductive track 242 can include a second track extension area that extends and / or is defined on the mounting surface 270. The first track extension area 271 and the second track extension area 272 can both extend at least partially within a region of the mounting surface 270 that is located directly between the first sheet side 211 and the second sheet side 212. The first probe 301 can be operational and / or electrically attached to the first track extension area 271 and / or can be in electrical communication with the first electrically conductive track 241 via the first track extension area.Likewise, the second probe 302 can be operational and / or electrically attached to the second track extension area 272 and / or can be in electrical communication with the second electrically conductive track 242 via the second track extension area.

[0059] The first track extension area 271 can extend from a remainder of the first electrically conductive track 241 in any suitable manner and / or be in electrical communication with it. As an example, and as shown in Fig. 6 and Fig. As illustrated in Figure 9, the first electrically conductive track 241 can extend along or only along the first sheet side 211 and can wrap around an edge of the first sheet side and onto and / or extend over the mounting surface 270 to form and / or define the first track extension area. Likewise, the second track extension area 272 can extend from a remainder of the second electrically conductive track 242 in any suitable manner and / or be in electrical communication with it. As an example, and as shown in Figure 9, the first electrically conductive track 241 can be extended along or only along the first sheet side 211 and can wrap around and / or extend over an edge of the first sheet side and onto the mounting surface 270 to form and / or define the first track extension area. Fig. 6 and Fig. As illustrated in Figure 12, the second electrically conductive track 242 can extend along or only along the first sheet side 211 and can wrap around the edge of the first sheet side and onto and / or extend over the mounting surface 270 to form and / or define the second track extension area. As another example, and as shown in Fig. 6 and Fig. As illustrated in Figure 9, the second electrically conductive track 242 can extend partially along the first sheet side 211 to a via 246, which can extend through the probe sheet 200 and / or between the first sheet side 211 and the second sheet side 212. The second electrically conductive track can then extend partially along the second sheet side 212 and can wrap around an edge of the second sheet side and onto and / or extend over the mounting surface 270 to form and / or define the second track extension area.

[0060] The probes 300, including the first probe 301 and the second probe 302, can be hand-held and / or lateral. In other words, a given probe 300 can be configured to be positioned on and / or attached to a given side of the probe blades 200. As an example and with reference to Fig. 6 and Fig. 13. The first probe 301 can be manufactured and / or constructed such that the first probe tip 351 is positioned on a side of the first probe facing the second probe 302, and / or relatively close to the side of the first probe facing the second probe, compared to the side of the first probe facing away from the second probe. In other words, the first probe tip can be closer to the side of the first probe facing the second probe compared to the side of the first probe facing away from the second probe. Likewise, and as also in Fig. 6 and Fig. As illustrated in Figure 13, the second probe 302 can be manufactured and / or constructed such that the second probe tip 352 is positioned on a side of the second probe facing the first probe 301, and / or relatively close to the side of the second probe facing the first probe, compared to the side of the second probe facing away from the first probe. In other words, the second probe tip can be closer to the side of the second probe facing the first probe compared to the side of the first probe facing away from the second probe. Such a configuration can enable and / or facilitate relatively smaller and / or shorter distances 260 between the probe tips 351 and 352 than would be possible if the first and second probes were identical in construction.

[0061] Perhaps best in the Fig. As illustrated in Figures 4-5, 7-9, and 14-16, and in some examples, the probe blades 200 can include and / or define a clearance area 280. The clearance area 280 can extend away from the mounting surface 270 and / or from the probes 300 and can be shaped, dimensioned, and / or positioned to provide additional clearance and / or space for the probes 300 to interact with and / or contact the DUT's contact pad. For example, the presence of the clearance area 280 can allow the use of relatively larger and / or more rigid probe blades 200 while simultaneously reducing the potential for contact between the probe blade and the DUT when the probe tips 350 are brought into contact with the DUT.

[0062] In some examples, the probe blades 200 can be configured to enable and / or facilitate an electrical Kelvin connection or a quasi-Kelvin connection between the probe system 10 and the DUT. In such a configuration, as described in detail by Fig. 4, Fig. 14 and Fig. As illustrated in Figure 16 and as shown in Figure 244, a probe-adjacent end of the second electrically conductive track 242 can be in electrical communication with, or short-circuited to, a probe-adjacent end of the first electrically conductive track 241. In other words, the first electrically conductive track 241 and the second electrically conductive track 242 can be connected within the probe mounting area 230. However, the first electrically conductive track and the second electrically conductive track can be spaced apart and / or electrically insulated from each other along a remainder of the length of the first electrically conductive track. Such a configuration can enable and / or facilitate the formation of the quasi-Kelvin connection near, for example, within a few millimeters, a single probe tip 350, which is in electrical communication with both the first electrically conductive track and the second electrically conductive track.This can increase the accuracy of quasi-Kelvin measurements taken using the probe system 10, compared to conventional probe systems where a corresponding short circuit between corresponding conductors carrying force and measurement signals is relatively farther away from the corresponding probe tip.

[0063] As in the Fig. 4-5 in dashed lines and in the Fig. As illustrated in Figures 7-8, 10-11, and 14-15, and in some examples, the probe blades 200 can incorporate an alignment structure 290. The alignment structure 290 can be adapted, configured, dimensioned, shaped, and / or constructed to interact with and / or engage with the blade holders 100, such as to enable and / or facilitate improved, more consistent, and / or reproducible alignment between the probe blades 200 and the blade holders 100 when the probe blades are detachably and operationally attached to the blade holders. Examples of the alignment structure 290 include a notch 292 that is defined in and / or within the probe blade or an edge region 202 of the probe blade and / or extends therein. Another example of the alignment structure 290 includes a projection 294 that may protrude from and / or extend from the probe blade or the edge of the probe blade.The edge region 202 can include a portion of the probe blade extending between the first blade side 211 and the second blade side 212. The notch 292 can be shaped to accommodate a portion of the blade holder 100, and / or the projection 294 can be configured to extend around the portion of the blade holder, for example, to accurately position the probe blade relative to the blade holder and / or to define a specific and / or a single relative orientation between the probe blade and the blade holder when the probe blade is detachably and operationally attached to the blade holder. An example of this is shown in [reference]. Fig. 18 illustrated.

[0064] Fig. Figures 17-25 are illustrations of examples of blade holders 100 according to the present disclosure. The blade holders 100 can include any suitable structure that can be adapted, configured, designed and / or constructed to detachably and operationally attach the probe blades 200 to the probe system 10 and / or to form one or more electrical connections with the probe blades. As described in detail below. Fig. As illustrated in Figures 17-25, the blade holders 100 can include an electrically conductive holder housing 110, a blade contacting structure 130, an electrical ground connection 140, an electrical force connection 152, a force conductor 154, an electrical measuring connection 162 and / or a measuring conductor 164.

[0065] The leaf holders 100, examples of which are in Fig. Figures 17-25 illustrate more detailed representations of the leaf holders 100 and / or those shown in Fig. 1 are illustrated. In this sense, each of the structures, functions and / or features described herein with reference to the leaf holders 100 of the Fig. 17-25 are revealed in probe sheets 200 of the Fig. 1, 4-22, 24-25 and / or 30 may be included and / or used without deviating from the scope of this disclosure. Likewise, any of the structures, functions and / or features described herein with reference to Probe Sheets 200 of the Fig. 1, 4-22, 24-25 and / or 30 are disclosed in probe sheets 200 of the Fig. 4-16 are included and / or used without deviating from the scope of the present disclosure.

[0066] The electrically conductive holder housing 110 can be formed and / or defined from any suitable electrically conductive material and / or materials. For example, the electrically conductive holder housing 110 can include and / or be a metallic electrically conductive holder housing 110. In some examples, the electrically conductive holder housing can additionally or alternatively include and / or be a single, electrically conductive holder housing.

[0067] The electrically conductive holder housing 110 defines a blade receiving area 112 configured to receive the blade mounting area 220 of the probe blade 200. The blade receiving area 112 can be shaped and / or dimensioned to receive the blade mounting area of ​​the probe blade. As an example, a shape of the blade receiving area can correspond to a shape of the blade mounting area. In some examples, the blade receiving area can include and / or define a rectangular or at least partially rectangular cross-sectional shape. In some examples, and as discussed, the probe blades 200 can include and / or define one or more alignment structures 290, which can be adapted, configured, shaped, and / or dimensioned to engage with and / or interact with the blade holder 100 when the probe blade is positioned within the blade receiving area 112. As an example, and as discussed in Fig. As shown in Figure 18, the underside of a section of the electrically conductive holder housing 110, which defines the leaf receiving area 112, can be received within the notch 292 of the alignment structure 290. As a further example, and with continued reference to Fig. 18 The projection 294 of the alignment structure 290 can abut and / or touch an outer surface and / or edge of the section of the electrically conductive holder housing that defines the blade receiving area. Such a configuration can cause the probe blade 200 to define a predetermined, established, and / or repeatable relative orientation with respect to the blade holder, thereby reducing the variability in the orientation of the probe blade with respect to the blade holder and / or reducing the potential for movement of the probe blade with respect to the blade holder when the probes 300 are brought into contact with the DUT. Additionally or alternatively, the contact between the projection 294 and the outer surface of the section of the electrically conductive holder housing can prevent an upward movement (in the configuration described in Fig. 18 is illustrated) of the probe blade 200 in relation to the blade holder 100 when the probes 300 are brought into contact with the DUT.

[0068] The electrically conductive holder housing 110 also defines an electrical connection area 114, which is configured to accommodate a variety of electrical connections. For example, the electrical connection area 114 may include a force connection opening 116, which may be configured to accommodate the electrical force connection 152. As another example, the electrical connection area 114 may include a sensing connection opening 118, which may be configured to accommodate the electrical sensing connection 162. The force connection opening 116 and / or the sensing connection opening 118 may extend into an enclosed housing volume 122 of the electrically conductive holder housing 110, as shown in Fig. 18 illustrates, and / or can enable at least one section of the electrical power connection 152 and / or the electrical detection connection 162 to be positioned within the enclosed housing volume and / or to extend from within the enclosed housing volume to outside the electrically conductive holder housing.

[0069] The electrically conductive holder housing 110 also defines a housing mounting area 120, which is configured to mount the electrically conductive holder housing operationally to or onto a remainder of the probe system 10. An example of the housing mounting area 120 includes a housing mounting projection extending from the electrically conductive holder housing.

[0070] The electrically conductive holder housing 110 also defines an at least partially enclosed housing volume 122, which can extend between the leaf receiving area 112 and the electrical connection area 114. The enclosed housing volume 122 can be electrically protected and / or shielded by the electrically conductive holder housing, thereby protecting electrical signals transmitted within it from electrical interference. The electrically conductive holder housing 110 can at least partially or even completely enclose the housing volume 122 on at least three, at least four, at least five, or at least six sides.

[0071] The blade contacting structure 130 is positioned within the blade receiving area 112 of the electrically conductive holder housing 110 and includes a force blade contact 132 and a measuring blade contact 136, as shown in the Fig. This is illustrated in the examples shown in Figures 18 and 21-23. The force blade contact is configured to electrically contact an electrically conductive force track, such as one of the first electrically conductive track 241 and the second electrically conductive track 242 of the probe blade 200. The measuring contact is configured to electrically contact an electrically conductive measuring track, such as the other of the first electrically conductive track and the second electrically conductive track.

[0072] The blade contact structure 130 can be adapted, configured, designed, and / or constructed to retain the blade mounting area 220 of the probe blade 200 within the blade receiving area 112. For example, the blade contact structure 130 may include and / or be a pre-tensioned blade contact structure configured to apply a pre-tension force to the probe blade to retain it within the blade receiving area. In some examples, the force blade contact 132 may include an elastic force blade contact and / or be configured to deform to allow the blade mounting area of ​​the probe blade to be received within the blade receiving area.Upon deformation, the elastic force-blade contact can exert a corresponding restoring force on the probe blade 200 and / or on the blade mounting area 220 thereof to keep the blade mounting area within the blade receiving area. Additionally or alternatively, and in some examples, the measuring blade contact 136 can include an elastic measuring blade contact and / or be configured to deform to allow the blade mounting area of ​​the probe blade to be received within the blade receiving area. Upon deformation, the elastic measuring blade contact can exert a corresponding restoring force on the probe blade 200 and / or on the blade mounting area 220 thereof to keep the blade mounting area within the blade receiving area.

[0073] As overall through Fig. As illustrated in Figure 4-16, the electrically conductive force track 241 and the electrically conductive measuring track 242 can be positioned on the first blade side 211 of the probe blade 200, and the probe blade can also include an electrically conductive protective layer 250, which can be positioned on the second blade side 212 of the probe blade. In such a configuration, the blade contacting structure 130 can be configured to force the electrically conductive protective layer into contact with an inner surface of the blade receiving area 112, which is defined at least partially by the electrically conductive holder housing 110, so that the electrically conductive protective layer is in electrical communication with the electrically conductive holder housing.

[0074] As discussed, the electrical connection area 114 is configured to accommodate a variety of electrical connections. These connections include the electrical ground connection 140, which is in electrical communication with and / or grounds the electrically conductive holder housing 110. The connections also include the electrical force connection 152, which is electrically insulated from the electrically conductive holder housing, and the electrical measuring connection 162, which is electrically insulated from both the electrically conductive holder housing and the electrical force connection.

[0075] In a specific example, the electrical force connection 152 can be defined by an inner conductor of a force coaxial connector 150. In such examples, the electrical ground connection 140 can be defined, at least partially, by an outer conductor of the force coaxial connector. Likewise, the electrical measuring connection 162 can be defined by an inner conductor of a measuring coaxial connector 160. In such examples, the electrical ground connection 140 can be defined, at least partially, by an outer conductor of the measuring coaxial connector.

[0076] The power conductor 154 can extend within the enclosed housing volume 122, can be electrically insulated from the electrically conductive holder housing 110, and / or can electrically connect the electrical power connection 152 to the force blade contact 132. Similarly, the measuring conductor 164 can extend within the enclosed housing volume 122, can be electrically insulated from the electrically conductive holder housing 110, and / or can electrically connect the electrical measuring connection 162 to the measuring blade contact 136.

[0077] In some examples, the blade holder 100 can include and / or be operationally attached to the probe system 10 via a blade holder mounting plate 180, which can be operationally mounted on the housing mounting area 120 of the electrically conductive holder housing 110. This is in Fig. 17-22 and 24-25 illustrate this. In some such examples, the blade holder mounting plate 180 and the housing mounting area 120 may be wedged together to allow only a single relative orientation between them, as in total by Fig. Illustrated on pages 22 and 24-25 and indicated on pages 124 and 184 respectively.

[0078] In some examples, the blade holder 100 can also incorporate the probe system 10 via a probe arm 190 and / or be operationally attached to it, as on the manipulator 40 thereof. In some such examples, the blade holder mounting plate 180 and the probe arm 190 can be wedged together to allow only a single relative orientation between them, as in the case of the following: Fig. 20, Fig. 22 and Fig. Figure 24 illustrates this and is specified at Figures 186 and 196, respectively. Such a configuration can reduce the potential for rotation of the blade holder 100 during operational use of the blade holder for testing the DUT and / or can reduce the time required to align the blade holder. Additionally or alternatively, such a configuration can facilitate improved alignment of both the first and second probes with the contact pad of the DUT in examples of probe blades 200 that include two probes 300 configured to contact a single contact pad of the DUT.

[0079] Probe assemblies 90 according to the present disclosure can provide significant advantages over conventional probe assemblies. As an example, the overdrive-to-scrub ratio (i.e., the magnitude of overdrive motion to scrub motion of the probe tip on the contact pad) obtainable by the probe assemblies 90 can be greater than a corresponding overdrive-to-scrub ratio obtainable by conventional probe assemblies. In other words, for a given measure of motion of the probe assemblies 90 toward the DUT, after contact between the probe tip and the DUT and in a direction parallel to a surface normal of the DUT, the motion of the probe tips 350 on the contact pad of the DUT is less than the corresponding motion exhibited by conventional probe assemblies.Examples of overdrive-to-scrub ratios for probe assemblies 90 include at least 6:1, at least 8:1, at least 10:1, at least 12:1, or at least 14:1. This increase in the overdrive-to-scrub ratio can allow probe assemblies 90 to exhibit greater contact forces with the DUT while maintaining electrical contact with small contact pads, and can be a result of a variety of different probe assembly 90 structures and / or combinations of these structures.

[0080] As one example, the orientation of the probe tips 350 relative to the support area 370 of the probes 300, as defined by the tip projection angle 348, can increase the overdrive-to-scrub ratio compared to conventional probe assemblies. As another example, the orientation of the probe holder 316 relative to the support area 370, which is generally perpendicular, can also increase the overdrive-to-scrub ratio compared to conventional probe assemblies. As yet another example, the vertical compliance provided by the support area 370 can increase the overdrive-to-scrub ratio compared to conventional probe assemblies. As yet another example, the support area 370 is generally oriented parallel or at least substantially parallel to the surface of the DUT when the probe contacts the DUT, which can also increase the overdrive-to-scrub ratio compared to conventional probe assemblies.

[0081] As another example, and since the probe blade 200 is a composite structure within which the probes 300 are manufactured separately and then attached to the rest of the probe blade, the material properties of the probes and the dielectric blade body 210 can be selected and / or tailored separately to provide one or more desired properties. For example, the dielectric blade body 210 can be rigid or at least substantially rigid and / or can be formed from a rigid or at least substantially rigid blade body material, examples of which are disclosed herein. In other words, the dielectric blade body 210 and / or the blade body material can be more rigid compared to the probes 300.This can enable most, almost all, or at least substantially all of the bending and / or movement within the probe assemblies 90, when the probe assemblies are in contact with the DUT, to be confined to the probes 300. As another example, the overall shape of the probe blades 200 can resist their bending and / or movement. As yet another example, the materials of the individual components of the probe assemblies 90 can be selected to provide a high degree of thermal stability.

[0082] Fig. Figures 26-30 illustrate examples of tools 400 configured to facilitate the insertion of probe blades 200 into blade holders 100 and / or the removal of the probe blades from the blade holders, according to the present disclosure. As a whole, by Fig. As illustrated in Figures 26-30, the tools 400 include a gripping area 410, a blade receptacle 420, bearing surfaces 430, and a blade gripping structure 440. The gripping area 410 is adapted, configured, dimensioned, and / or shaped to be gripped by a user of the tool, such as during the insertion and / or removal of the probe blades 200. The blade receptacle 420 is adapted, configured, dimensioned, and / or shaped to receive at least a portion of the probe blades 200. The bearing surfaces 430 define at least part of the blade receptacle 420 and are adapted, configured, dimensioned, and / or shaped to press against the edge region 202 of the probe blades 200, as perhaps best illustrated in Figure 26-30. Fig. Figure 30 illustrates the insertion and / or removal of the probe blades from the blade holder using the tool. The blade gripping structure 440 is configured to be selectively actuated by the user to grip the probe blades 200, such as by applying a pressure gripping force between the first blade side 211 and the second blade side 212, during the insertion and / or removal of the probe blades from the blade holder using the tool. In the example shown in Fig. As illustrated in Figures 27-30, the blade gripping structure 440 includes an elastic structure which is gripped and / or compressed by the user of the tool to cause the blade gripping structure to grip the probe blade; however, other configurations of the blade gripping structure 440, including clamps, cams and / or mechanical actuators, are also within the scope of this disclosure.

[0083] Fig. Figures 27-28 illustrate that the tools 400 can be manually operated, i.e., configured to be grasped or gripped, from a specific side. This can enable and / or facilitate the insertion and / or removal of probe sheets 200, which are more easily accessible from the left side (e.g., using tool 400, which is located in Fig. 27 is illustrated and may be described herein as a left-handed tool) or from the right side (e.g. using tool 400, which is illustrated in Fig. 28 is illustrated and can be described here as a right-handed tool) can be accessed.

[0084] During the operational use of the tools 400 for inserting and / or removing the probe blades 200 from the blade holders 100 and with reference to Fig.30 The probe blade 200 can be positioned within the blade receptacle 420 and gripped by the blade gripping structure 440. The probe blade 200 can then be inserted into the blade receptacle area 112 of the blade holder 100, for example by moving a corresponding blade mounting area of ​​the blade into the blade receptacle. During such insertion, the bearing surface 430, which is located relatively close to the grip area 410 (also referred to here as a bearing surface 430 near the grip), can press against and / or bear against the edge area 202 of the blade, thereby providing a driving force for inserting the blade into the blade holder. Additionally or alternatively, the probe blade 200 can be removed from the blade receptacle, for example by moving the blade or the corresponding blade mounting area away from and / or out of the blade receptacle.During such removal, the bearing surface 430, which is located relatively far from the handle area 410, which may also be referred to herein as a bearing surface 430 away from the handle, can press against and / or bear against the edge area 202 of the blade, thereby providing a driving force to remove the blade from the blade holder.

[0085] As used herein, the term "and / or" placed between a first entity and a second entity means one of (1) the first entity, (2) the second entity, and (3) both the first entity and the second entity. Multiple entities listed with "and / or" should be interpreted in the same way, i.e., "one or more" of the entities so connected. Other entities may optionally be present, other than those specifically identified by the "and / or" clause, regardless of whether they are related to those specifically identified entities.Thus, as a non-restrictive example, a reference to "A and / or B," when used in conjunction with open language such as "comprehensive," can refer in one embodiment only to A (optionally including entities other than B); in another embodiment only to B (optionally including entities other than A); and in yet another embodiment to both A and B (optionally including entities other than A). These entities can refer to elements, actions, structures, steps, operations, values, and the like.

[0086] As used herein, the phrase “at least one” in relation to a list of one or more entities should be understood to mean at least one entity selected from one or more of the entities in the list of entities, but does not necessarily include at least one of each and every entity specifically listed within the list of entities, and does not exclude any combination of entities in the list of entities. This definition also allows for the optional presence of entities other than those specifically identified within the list of entities to which the phrase “at least one” refers, regardless of whether they are related to those specifically identified entities.Thus, as a non-restrictive example, “at least one of A and B” (or equivalently “at least one of A or B” or equivalently “at least one of A and / or B”) can, in one embodiment, refer to at least one, optionally including more than one, A, without an existing B (and optionally including entities other than B); in another embodiment, to at least one, optionally including more than one, B, without an existing A (and optionally including entities other than A); in yet another embodiment, to at least one, optionally including more than one, A, and at least one, optionally including more than one, B (and optionally including other entities). In other words, the expressions “at least one”, “one or more”, and “and / or” are open expressions that function both conjunctive and disjunctive in operation.For example, each of the expressions "at least one of A, B and C", "at least one of A, B or C", "one or more of A, B and C", "one or more of A, B or C" and "A, B and / or C" can mean A alone, B alone, C alone, A and B together, A and C together, B and C together, A, B and C together and optionally any of the above in combination with at least one other entity.

[0087] In the event that any patents, patent applications or other references are incorporated herein by reference and (1) define a term in a manner that is inconsistent with the unincorporated part of the present disclosure or any of the other incorporated references and / or (2) is otherwise inconsistent, the unincorporated part of the present disclosure shall govern, and the term or incorporated disclosure shall govern only with respect to the reference in which the term is defined and / or the incorporated disclosure was originally present.

[0088] As used herein, the terms "adapted" and "configured" mean that the element, component, or other item is designed and / or intended to perform a particular function. Thus, the use of the terms "adapted" and "configured" should not be interpreted as meaning that a particular element, component, or other item is simply "capable" of performing a particular function, but rather that the element, component, and / or other item has been specifically selected, created, implemented, used, programmed, and / or designed for the purpose of performing the function.It is also within the scope of the present disclosure that elements, components and / or any other item mentioned as being adapted to perform a particular function may additionally or alternatively be described as being configured to perform that function, and vice versa.

[0089] As used herein, the expression “for example”, the expression “as an example” and / or simply the term “example”, when used in reference to one or more components, features, details, structures, embodiments and / or methods according to the present disclosure, are intended to convey that the described component, feature, detail, structure, embodiment and / or method is an illustrative, non-exclusive example of components, features, details, structures, embodiments and / or methods according to the present disclosure.Thus, the described component, feature, detail, structure, embodiment and / or method are not intended to be limiting, necessary, or exclusive / exhaustive; and other components, features, details, structures, embodiments and / or methods, including structurally and / or functionally similar and / or equivalent components, features, details, structures, embodiments and / or methods, are also within the scope of this disclosure.

[0090] As used herein, "at least substantially" when modifying a degree or relationship can include not only the cited "essential" degree or relationship, but also the entire extent of the cited degree or relationship. An essential amount of a cited degree or relationship can include at least 75% of the cited degree or relationship. For example, an object that is at least substantially composed of a material includes objects for which at least 75% of the objects are composed of the material, and also includes objects composed entirely of the material. As another example, a first length that is at least substantially as long as a second length includes first lengths that are within 75% of the second length, and also includes first lengths that are as long as the second length.

[0091] Illustrative, non-exclusive examples of probes, probe blades, blade holders, probe systems, and methods according to the present disclosure are presented in the following paragraphs. It is within the scope of the present disclosure that a single step of a method described herein, including those described in the following paragraphs, may additionally or alternatively be described as a "step toward" performing the described action. A1. Probe for a probe system configured to electrically test a device under test (DUT), wherein the probe comprises: a uniform probe body defined by an electrically conductive probe body material, wherein the uniform probe body includes the following: (i) a probe holder configured to be operationally attached to a probe blade; (ii) a tip area that includes a probe tip configured to electrically contact the DUT; and (iii) a support area extending along a support longitudinal axis between the probe holder and the tip area. A2. Probe according to paragraph A1, wherein the electrically conductive probe body material comprises at least one of a metallic material, a semiconductor material and a highly doped semiconductor material. A3. Probe according to any of paragraphs A1-A2, wherein the unified probe body comprises or is a planar or at least substantially planar unified probe body. A4. Probe according to any of paragraphs A1-A3, wherein the uniform probe body defines a first probe side, an opposing second probe side and a probe thickness or an average probe thickness measured between the first probe side and the second probe side. A5. Probe according to paragraph A4, wherein at least one of: (i) the first probe face is a planar or at least substantially planar first probe face; and (ii) the second probe face is a planar or at least substantially planar second probe face. A6. Probe according to one of paragraphs A4-A5, wherein a ratio of a maximum probe extent to probe thickness or average probe thickness is within a probe ratio threshold range of at least one of the following: (i) at least 20, at least 25, at least 30, at least 35, at least 40, at least 45 or at least 50; and (ii) at most 200, at most 150, at most 100, at most 90, at most 80, at most 70, at most 60, at most 50 or at most 40. A7. Probe according to one of paragraphs A1-A6, wherein the probe holder is configured for at least one of the following: (i) to be welded to the probe blade; (ii) to be soldered to the probe blade; (iii) to be soldered to the probe sheet; and (iv) to be glued to the probe sheet, optionally using an electrically conductive adhesive material. A8. Probe according to one of paragraphs A1-A7, wherein the probe holder includes a mounting tab projecting away from the longitudinal axis of the support along a tab projection axis. A9. Probe according to paragraph A8, wherein the tab projection axis is perpendicular or at least substantially perpendicular to the longitudinal axis of the beam. A10. Probe according to any of paragraphs A1-A9, wherein the probe holder includes a plurality of area openings extending through the uniform probe body and further extending perpendicular or at least substantially perpendicular to at least one of the support longitudinal axis and the tab projection axis. A11. Probe according to one of paragraphs A1-A10, wherein the tip area includes a tip projection extending from the support area to the probe tip along a tip projection axis. A12. Probe according to paragraph A11, wherein the tip projection axis extends at a tip projection angle relative to the longitudinal axis of the support, optionally wherein the tip projection angle is at least one of the following: (i) at least 90 degrees, at least 100 degrees, at least 110 degrees, at least 120 degrees, at least 130 degrees or at least 140 degrees; and (ii) not more than 160 degrees, not more than 150 degrees, not more than 140 degrees, not more than 130 degrees, not more than 120 degrees, not more than 110 degrees or not more than 100 degrees. A13. Probe according to one of paragraphs A1-A12, wherein the probe holder extends from the support area in a probe holder extension direction and wherein the tip area further extends from the support area in a tip area extension direction which is at least partially opposite to the probe holder extension direction. A14. Probe according to paragraph A13, wherein both the tip area extension and the probe holder extend away from the support area in opposite or at least partially opposite directions. A15. Probe according to one of paragraphs A1-A14, wherein the support area includes a plurality of elongated supports. A16. Probe according to paragraph A15, wherein each elongated support of the plurality of elongated supports extends along the longitudinal axis of the support and between the probe holder and the tip area. A17. Probe according to one of paragraphs A15-A16, wherein the plurality of elongated supports includes at least one of the following: (i) at least 2, at least 3, at least 4 or at least 5 elongated beams, (ii) at most 8, at most 6 or at most 4 elongated beams; and (iii) 2, 3, 4, 5 or 6 elongated beams. A18. Probe according to one of paragraphs A15-A17, wherein each elongated beam of the plurality of elongated beams defines at least one of the following: (i) a rectangular cross-sectional shape; (ii) a cross-sectional shape that is at least substantially rectangular; (iii) a square cross-sectional shape; and (iv) a cross-sectional shape that is at least substantially square. A19. Probe according to one of paragraphs A1-A18, wherein the probe further includes a reference structure. A20. Probe according to paragraph A19, wherein the reference structure is defined at least partially on an upper surface of the probe. A21. Probe according to one of paragraphs A19-A20, wherein the reference structure is configured to be visible to an imaging device of the probe system during the operational use of the probe system for electrical testing of the DUT. A22. Probe according to paragraph A21, wherein the reference structure during the operational use of the probe system for electrical testing of the DUT is vertical, at least substantially vertical or directly vertical above the probe tip. A23. Probe according to one of paragraphs A19-A22, wherein the reference structure is at least one of the following: (i) positioned in the top range; and (ii) near the tip area relative to the probe holder. A24. Probe according to one of paragraphs A19-A23, wherein a ratio of a reference probe tip distance between the reference structure and the probe tip to a / the maximum extent of the probe is less than a threshold distance ratio, wherein the threshold distance ratio is 0.1, 0.08, 0.06, 0.04, 0.02, 0.01, 0.005 or 0.001. A25. Probe according to one of paragraphs A1-A24, wherein the probe is formed via a machining process for microelectromechanical systems (MEMS). A26. Method for forming the probe according to any of paragraphs A1-A25, wherein the method comprises: Providing a MEMS substrate; and

[0092] Use at least one of a lithographic process, a deposition process and an etching process to define the probe at least partially on the MEMs substrate and / or to define the probe at least partially from the MEMs substrate. B1. Probe sheet for a probe system configured to electrically test a device under test (DUT), wherein the probe sheet includes the following: a dielectric leaf body defined by a dielectric leaf body material, wherein the dielectric leaf body includes a leaf attachment area and a probe attachment area; a probe that is operationally attached to the probe mounting area, wherein the probe includes a probe tip configured to electrically contact the DUT, and wherein the probe optionally includes any suitable structure, function and / or feature of any of the probes according to any of paragraphs A1-A25; and an electrically conductive track extending between the blade attachment area and the probe attachment area, and in electrical communication with the probe within the probe attachment area. B2. Probe sheet according to paragraph B1, wherein the dielectric sheet body material includes or is a ceramic dielectric sheet body material. B3. Probe blade according to one of paragraphs B1-B2, wherein the dielectric blade body material differs from the electrically conductive probe body material of the probe. B4. Probe blade according to any of paragraphs B1-B3, wherein the dielectric blade body includes or is a planar or at least substantially planar dielectric blade body. B5. Probe sheet according to any of paragraphs B1-B4, wherein the dielectric sheet body defines a first sheet side, an opposite second sheet side and a sheet thickness or average sheet thickness measured between the first sheet side and the second sheet side. B6. Probe sheet according to paragraph B5, wherein at least one of: (i) the first leaf face is a planar or at least substantially planar first leaf face; and (ii) the second leaf surface is a planar or at least substantially planar second leaf surface. B7. Probe blade according to one of paragraphs B5-B6, wherein a ratio of a maximum probe extent to the blade thickness or the average blade thickness is within a blade ratio threshold range of at least one of the following: (i) at least 20, at least 25, at least 30, at least 35, at least 40, at least 45 or at least 50; and (ii) at most 200, at most 150, at most 100, at most 90, at most 80, at most 70, at most 60, at most 50 or at most 40. B8. Probe blade according to one of paragraphs B1-B7, wherein the dielectric blade body is at least one of: (i) an L-shaped dielectric leaf body; and (ii) a dielectric leaf body that is at least partially L-shaped. B9. Probe blade according to any of paragraphs B1-B8, wherein the blade attachment area projects from a remainder of the dielectric blade body along a blade attachment area axis and further wherein the probe attachment area projects from a remainder of the dielectric blade body along a probe attachment area axis which differs from the blade attachment area axis. B10. Probe blade according to paragraph B9, wherein an angle of intersection between the blade attachment area axis and the probe attachment area axis is at least one of the following: (i) at least 30 degrees, at least 40 degrees, at least 50 degrees, at least 60 degrees, at least 70 degrees, at least 80 degrees, at least 90 degrees or at least 100 degrees; and (ii) not more than 150 degrees, not more than 140 degrees, not more than 130 degrees, not more than 120 degrees, not more than 110 degrees, not more than 100 degrees, not more than 90 degrees or not more than 80 degrees. B11. Probe blade according to one of paragraphs B9-B10, wherein the blade attachment area axis and the probe attachment area axis extend parallel to at least one of the first blade side of the dielectric blade body and the opposite second blade side of the dielectric blade body. B12. Probe sheet according to one of paragraphs B1-B11, wherein the electrically conductive track is defined by an electrically conductive track material. B13. Probe blade according to paragraph B12, wherein the electrically conductive trace material differs from the dielectric blade body material. B14. Probe sheet according to one of paragraphs B12-B13, wherein the electrically conductive trace material is a metallic electrically conductive trace material. B15. Probe sheet according to one of paragraphs B1-B14, wherein the electrically conductive track is at least one of the following: (i) deposited on the dielectric leaf body material; (ii) adhered to the dielectric leaf body material; and (iii) attached to the dielectric leaf body material in an operational manner. B16. Probe sheet according to one of paragraphs B1-B15, wherein the electrically conductive track is an elongated electrically conductive track. B17. Probe sheet according to one of paragraphs B1-B16, wherein the electrically conductive track is an at least partially planar electrically conductive track. B18. Probe sheet according to one of paragraphs B1-B17, wherein the probe is an electrically conductive probe. B19. Probe sheet according to one of paragraphs B1-B18, wherein the probe holder of the probe is at least one of the following: (i) welded to at least one of the probe mounting area and the electrically conductive track; (ii) soldered to at least one of the probe mounting area and the electrically conductive track; (iii) soldered to at least one of the probe mounting area and the electrically conductive track; and (iv) adhered to at least one of the probe attachment area and the electrically conductive track, optionally using an electrically conductive adhesive material. B20. Probe sheet according to one of paragraphs B1-B19, wherein the electrically conductive track extends at least partially or even completely along one / the first sheet side of the dielectric sheet body and wherein the probe sheet further comprises an electrically conductive protective layer extending on one / the opposite second sheet side of the dielectric sheet body. B21. Probe blade according to paragraph B20, wherein the opposite second side of the dielectric blade body defines a second side surface area and wherein the electrically conductive protective layer further defines a protective layer surface area which is a threshold surface area fraction of the second side surface area, wherein the threshold surface area fraction is at least 50%, at least 60%, at least 70%, at least 80%, at least 90% or at least 95%. B22. Probe sheet according to one of paragraphs B20-B21, wherein the electrically conductive protective layer of the electrically conductive track is directly opposite a fraction of the length of the electrically conductive track along a fraction of the sleeper track length, wherein the fraction of the sleeper track length is at least 70%, at least 75%, at least 80%, at least 85%, at least 90%, at least 95% or at least 99%. B23. Probe sheet according to one of paragraphs B20-B22, wherein the electrically conductive protective layer extends only on the opposite second sheet side of the dielectric sheet body. B24. Probe sheet according to one of paragraphs B20-B23, wherein the electrically conductive protective layer is at least one of the following: (i) electrically insulated from the electrically conductive track via the dielectric leaf body; and (ii) spaced apart from the electrically conductive track across the dielectric sheet body along an entirety of the length of the electrically conductive track. B25. Probe blade according to any of paragraphs B1-B24, wherein the electrically conductive track is a first electrically conductive track or an electrically conductive force track and wherein the probe blade further comprises a second electrically conductive track or an electrically conductive measuring track extending between the blade attachment area and the probe attachment area. B26. Probe blade according to paragraph B25, wherein the first electrically conductive track and the second electrically conductive track extend between the blade attachment area and the probe attachment area on the first side of the dielectric blade body. B27. Probe sheet according to one of paragraphs B25-B26, wherein the probe sheet is configured to provide an electrical Kelvin connection or a quasi-Kelvin connection with the DUT. B28. Probe blade according to one of paragraphs B25-B27, wherein a probe-adjacent end of the second electrically conductive track is short-circuited with a probe-adjacent end of the first electrically conductive track within the probe mounting area. B29. Probe sheet according to paragraph B28, wherein the second electrically conductive track is spaced apart from the first electrically conductive track along a remainder of a length of the first electrically conductive track. B30. Probe sheet according to one of paragraphs B25-B29, wherein the probe sheet is configured to provide an electrical Kelvin connection or a true Kelvin connection with the DUT. B31. Probe sheet according to any of paragraphs B25-B30, wherein the probe is a first probe comprising a first probe tip, wherein the probe sheet comprises a second probe which is operationally mounted on the probe attachment area and comprises a second probe tip configured to electrically contact the DUT, wherein the second electrically conductive track within the probe attachment area is in electrical communication with the second probe, and wherein the second probe optionally comprises any suitable structure, function and / or feature of any of the probes according to any of paragraphs A1-A25. B32. Probe sheet according to paragraph B31, wherein the first probe tip and the second probe tip are configured to electrically contact a single contact pad of the DUT. B33. Probe sheet according to paragraph B32, wherein the distance between the first probe tip and the second probe tip is less than or less than a threshold fraction of a corresponding width of the individual contact pad of the DUT, wherein the threshold fraction is optionally 80%, 70%, 60%, 50%, 40% or 30%. B34. Probe blade according to one of paragraphs B31-B33, wherein the distance between the first probe tip and the second probe tip is less than the thickness of the probe blade. B35. Probe blade according to one of paragraphs B31-B34, wherein the first probe and the second probe taper towards each other as they extend away from the probe blade to facilitate electrical contact of both the first probe tip and the second probe tip with one / the single contact pad of the DUT. B36. Probe blade according to one of paragraphs B31-B35, wherein at least one of the first probe and the second probe is aligned in a probe extension angle relative to a corresponding first blade side and second blade side, optionally wherein the probe extension angle is at least one of the following: (i) at least 0 degrees, at least 1 degree, at least 2 degrees, at least 4 degrees, at least 6 degrees, at least 8 degrees, at least 10 degrees, at least 12 degrees or at least 14 degrees; and (ii) at most 20 degrees, at most 18 degrees, at most 16 degrees, at most 14 degrees, at most 12 degrees, at most 10 degrees, at most 8 degrees, at most 6 degrees or at most 4 degrees. B37. Probe blade according to one of paragraphs B31-B36, wherein the first electrically conductive track includes a first track extension area defined on a mounting surface of the probe blade, wherein the second electrically conductive track includes a second track extension area defined on the mounting surface, wherein the first probe is operationally attached to the first track extension area, and wherein furthermore the second probe is operationally attached to the second track extension area, the mounting surface optionally extending between a / the first sheet side and a / the second sheet side of the probe blade. B38. Probe sheet according to one of paragraphs B31-B37, wherein: (i) the first probe tip of the first probe is relatively close to a side of the first probe facing away from the second probe; and (ii) the second probe tip of the second probe is relatively close to a side of the second probe that is facing the first probe, compared to a side of the second probe that is away from the first probe. B39. Probe sheet according to one of paragraphs B31-B38, wherein the second electrically conductive track is at least one of the following: (i) spaced apart from the first electrically conductive track across the dielectric sheet body along an entirety of the length of the first electrically conductive track; and (ii) electrically insulated from the first electrically conductive track across the dielectric leaf body. B40. Probe blade according to any of paragraphs B1-B39, wherein the probe blade further includes a spacer area extending away from the probe and shaped to provide additional clearance for the probe to contact the DUT. B41. Probe blade according to any of paragraphs B1-B40, wherein the probe blade includes an alignment structure configured to engage with a blade holder when the probe blade is received in a blade receiving area of ​​the blade holder. B42. Probe blade according to paragraph B41, wherein the alignment structure includes a notch extending into the probe blade and configured to accommodate an area of ​​the blade holder to facilitate consistent alignment between the probe blade and the blade holder. B43. Probe blade according to one of paragraphs B41-B42, wherein the alignment structure includes a projection extending from an edge region of the probe blade and configured to extend around a region of the blade holder to facilitate consistent alignment between the probe blade and the blade holder. C1. Blade holder configured to detachably and operationally attach a probe blade to a probe system, the blade holder comprising the following: an electrically conductive holder housing that defines the following: (i) a blade receiving area configured to receive a blade mounting area of ​​the probe blade; (ii) an electrical connection area configured to accommodate a variety of electrical connections; (iii) a housing mounting area configured to mount the electrically conductive holder housing operationally to the probe system; and (iv) a housing volume that is at least partially enclosed and extends between the leaf receiving area and the electrical connection area; a blade contacting structure that is positioned at least partially within the blade receiving area, wherein the blade contacting structure includes a force blade contact configured to electrically contact an electrically conductive force track of the probe blade and a measurement blade contact configured to electrically contact an electrically conductive measurement track of the probe blade; an electrical ground connection to the electrical connection area, wherein the electrical ground connection is in electrical communication with the electrically conductive holder housing; an electrical force connection within the electrical connection area, wherein the electrical force connection is electrically insulated from the electrically conductive holder housing; a power conductor extending within the housing volume, electrically insulated from the electrically conductive holder housing, and electrically connecting the electrical power connection to the power blade contact; an electrical measuring connection to the electrical connection area, wherein the electrical measuring connection is electrically insulated from both the electrically conductive holder housing and the electrical force connection; and a measuring conductor that extends within the housing volume, is electrically insulated from both the electrically conductive holder housing and the power conductor, and electrically connects the electrical measuring connection to the measuring sheet contact. C2. Leaf holder according to paragraph C1, wherein the electrically conductive holder housing is a metallic electrically conductive holder housing. C3. Leaf holder according to any of paragraphs C1-C2, wherein the electrically conductive holder housing is a single electrically conductive holder housing. C4. Leaf holder according to one of paragraphs C1-C3, wherein the leaf receiving area defines a rectangular or at least partially rectangular cross-section. C5. Blade holder according to any of paragraphs C1-C4, wherein the blade receiving area is shaped and dimensioned to accommodate the blade mounting area of ​​the probe blade. C6. Leaf holder according to any of paragraphs C1-C5, wherein the electrical connection area includes a force connection opening configured to receive the electrical force connection and a sensing connection opening configured to receive the electrical sensing connection, the force connection opening and the sensing connection opening extending into the enclosed housing volume. C7. Leaf holder according to any of paragraphs C1-C6, wherein the housing mounting area includes a housing mounting projection extending from a remainder of the electrically conductive holder housing. C8. Leaf holder according to one of paragraphs C1-C7, wherein the housing volume is enclosed at least partially on at least three, at least four or at least five sides. C9. Blade holder according to any of paragraphs C1-C8, wherein the blade contacting structure is a pre-stressed blade contacting structure configured to keep the probe blade operational within the blade receiving area. C10. Leaf holder according to one of paragraphs C1-C9, wherein at least one of: (i) the force blade contact includes an elastic force blade contact configured to deform in order to allow the blade mounting area of ​​the probe blade to be received within the blade receiving area; and (ii) the measuring sheet contact includes an elastic measuring sheet contact configured to be deformed to allow the sheet mounting area of ​​the probe sheet to be received within the sheet receiving area. C11. Blade holder according to any of paragraphs C1-C10, wherein the electrically conductive force track and the electrically conductive measuring track are positioned on a first blade side of the probe blade, wherein the probe blade further includes an electrically conductive protective layer positioned on a second blade side of the probe blade, and wherein the blade contacting structure is further configured to force the electrically conductive protective layer into electrical contact with an inner surface of the blade receiving area defined at least partially by the electrically conductive holder housing, such that the electrically conductive protective layer is in electrical communication with the electrically conductive holder housing. C12. Leaf holder according to one of paragraphs C1-C11, wherein the electrical power connection is defined by an inner conductor of a power coaxial connector and wherein the electrical ground connection is further defined at least partially by an outer conductor of the power coaxial connector. C13. Leaf holder according to one of paragraphs C1-C12, wherein the electrical measuring connection is defined by an inner conductor of a measuring coaxial connector and wherein the electrical ground connection is further defined at least partially by an outer conductor of the measuring coaxial connector. C14. Blade holder according to any of paragraphs C1-C13, wherein the blade holder includes the probe blade, the probe blade optionally including any suitable structure, function and / or feature of any of the probe blades according to any of paragraphs B1-B43. C15. Blade holder according to any of paragraphs C1-C14, wherein the blade holder further comprises a blade holder mounting plate which is operationally attached to the housing mounting area of ​​the electrically conductive holder housing. C16. Blade holder according to paragraph C15, wherein the blade holder mounting plate and the housing mounting area are wedged together to allow only a single relative alignment between them. C17. Blade holder according to any of paragraphs C15-C16, wherein the blade holder further includes a probe arm configured to mount the blade holder mounting plate operationally to a remainder of the probe system. C18. Blade holder according to paragraph C17, wherein the probe arm and the blade holder mounting plate are wedged together to allow only a single relative alignment between them. D1. Probe system configured to electrically test a device under test (DUT), wherein the probe system comprises at least one of the following: a chuck that defines a support surface configured to support a substrate containing the DUT; a probe assembly that includes at least one of the following: (i) the probe according to any of paragraphs A1-A25; (ii) the probe sheet according to one of paragraphs B1-B43; and (iii) the leaf holder according to one of paragraphs C1-C17; a manipulator configured to move the probe assembly relative to the support surface; a signal generation and analysis assembly configured to: (i) to provide a force signal to the DUT via the probe assembly; and (ii) to receive a detection signal from the DUT via the probe assembly; and an imaging device configured to acquire an optical image of at least one of the following: (i) at least one other component of the probe system; and (ii) the DUT. E1. Tool configured to facilitate the insertion of a probe blade into a blade holder and the removal of the probe blade from the blade holder, the tool comprising the following: a grip area configured to be gripped by a user of the tool; a sheet sample shaped to capture at least one area of ​​the probe sheet; a bearing surface that at least partially defines and shapes the sheet receptacle to press against an edge region of the sheet; and a leaf gripping structure that is configured to be selectively actuated by the user to grip the probe leaf. E2. Tool according to paragraph E1, wherein the tool includes a plurality of bearing surfaces, including: (i) a bearing surface near the handle, which is located relatively close to the grip area and is configured to press against the edge area when the tool is used to insert the probe blade into the blade holder; and (ii) a bearing surface located away from the handle, which is relatively far from the handle area and is configured to press against the edge area when the tool is used to remove the probe blade from the blade holder. E3. Tool according to any of paragraphs E1-E2, wherein the blade gripping structure includes an elastic structure configured to be selectively compressed by the user to cause the blade gripping structure to selectively grip the probe blade. E4. Tool according to any of paragraphs E1-E3, wherein the blade gripping structure is configured to selectively grip the probe blade by selectively applying a pressure gripping force between a first blade side of the blade and a second blade side of the blade, wherein the edge region of the blade optionally extends between the first blade side and the second blade side. F1. Kit of components configured to be used with a probe array of a probe system, wherein the kit includes at least one and optionally both of the following: at least one probe blade, wherein the at least one probe blade optionally includes any suitable structure, function and / or feature of one of the probe blades according to any of paragraphs B1-B43; and at least one tool configured to facilitate the insertion of the at least one probe blade into a blade holder of the probe assembly and the removal of the at least one probe blade from the blade holder, wherein the at least one tool optionally includes any suitable structure, function and / or feature of one of the tools according to any of paragraphs E1-E4. F2. Kit according to paragraph F1, wherein the kit includes a variety of tools, including a left-handed tool configured to facilitate the insertion and removal of the at least one probe blade from a left side of the at least one probe blade, and a right-handed tool configured to facilitate the insertion and removal of the at least one probe blade from a right side of the at least one probe blade. F3. Kit according to any of paragraphs F1-F2, wherein the kit further includes a blade holder, the blade holder optionally comprising any suitable structure, function and / or feature of any of the blade holders according to any of paragraphs C1-C18. Commercial applicability

[0093] The probes, probe blades, blade holders, probe systems and methods disclosed herein are applicable to the semiconductor manufacturing and testing industry.

[0094] It is assumed that the disclosure set forth above comprises several different inventions with independent uses. Although each of these inventions has been disclosed in its preferred form, the specific embodiments thereof, as disclosed and illustrated herein, are not to be considered in a limiting sense, since numerous variations are possible. The subject matter of the inventions includes all novel and non-obvious combinations and subcombinations of the various elements, features, functions, and / or properties disclosed herein. Likewise, where such claims refer to "a" or "a first" element, or the equivalent thereof, they should be understood to include one or more such elements and neither require nor exclude two or more such elements.

[0095] It is assumed that the following claims specifically highlight certain combinations and subcombinations directed to one of the disclosed inventions and which are novel and not obvious. Inventions carried out in other combinations and subcombinations of features, functions, elements, and / or properties may be claimed by amending the present claims or by filing new claims in this or a related application. Such amended or new claims, whether directed to a different invention or to the same invention, and whether they have a different, broader, narrower, or the same scope as the original claims, are also considered to be included in the subject matter of the inventions disclosed in the present application. QUOTES INCLUDED IN THE DESCRIPTION

[0000] This list of documents cited by the applicant was automatically generated and is included solely for the reader's convenience. The list is not part of the German patent or utility model application. The DPMA accepts no liability for any errors or omissions. Cited patent literature

[0000] US 18 / 762,393

[0001] US 63 / 526,630

[0001]

Claims

[1] Probe sheet for a probe system configured to electrically test a device under test (DUT), the probe sheet comprising: a dielectric leaf body defined by a dielectric leaf body material, wherein the dielectric leaf body includes a leaf attachment area and a probe attachment area and defines a first leaf side and an opposite second leaf side; a probe that is operationally attached to the probe mounting area, wherein the probe includes a probe tip configured to electrically contact the DUT; an electrically conductive force trace extending on the first leaf side between the leaf attachment area and the probe attachment area, wherein the electrically conductive force trace is in electrical communication with the probe within the probe attachment area; an electrically conductive measuring track extending along the first side of the leaf between the leaf attachment area and the probe attachment area; and an electrically conductive protective layer that extends across the opposite second side of the sheet; the probe blade is configured to provide an electrical Kelvin connection with the DUT. [2] Probe blade according to claim 1, wherein a probe-adjacent end of the electrically conductive measuring track is short-circuited with a probe-adjacent end of the electrically conductive force track within the probe mounting area, wherein the electrically conductive measuring track is spaced apart from the electrically conductive force track along a remainder of a length of the electrically conductive force track, and wherein furthermore the electrical Kelvin connection is an electrical quasi-Kelvin connection. [3] Probe blade according to claim 1, wherein the probe is a first probe comprising a first probe tip, wherein the probe blade comprises a second probe which is operationally attached to the probe attachment area and comprises a second probe tip configured to electrically contact the DUT, wherein the electrically conductive measuring track is in electrical communication with the second probe within the probe attachment area, and wherein the electrical Kelvin connection is a true electrical Kelvin connection. [4] Probe blade according to claim 3, wherein the first probe tip and the second probe tip are configured to electrically contact a single contact pad of the DUT, and wherein furthermore a distance between the first probe tip and the second probe tip is less than a corresponding width of the single contact pad of the DUT. [5] Probe blade according to claim 3, wherein the distance between the first probe tip and the second probe tip is less than the thickness of the probe blade. [6] Probe blade according to claim 3, wherein the first probe and the second probe taper towards each other as they extend away from the probe blade to facilitate electrical contact of both the first probe tip and the second probe tip with a single contact pad of the DUT. [7] Probe blade according to claim 3, wherein at least one of the first probe and the second probe is aligned in a probe extension angle relative to a corresponding one of the first blade side and the second blade side, wherein the probe extension angle is at least 0 degrees and at most 20 degrees. [8] Probe blade according to claim 3, wherein the electrically conductive force trace includes a first trace extension area defined on a mounting surface of the probe blade, wherein the electrically conductive measuring trace includes a second trace extension area defined on the mounting surface, wherein the first probe is operationally attached to the first trace extension area, and wherein the second probe is operationally attached to the second trace extension area. [9] Probe blade according to claim 8, wherein the attachment surface extends between the first side of the blade and the second side of the probe blade. [10] Probe sheet according to claim 3, wherein: (i) the first probe tip of the first probe is relatively close to a side of the first probe facing away from the second probe; and (ii) the second probe tip of the second probe is relatively close to a side of the second probe that is facing the first probe, compared to a side of the second probe that is away from the first probe. [11] Probe blade according to claim 1, wherein the probe blade includes an alignment structure configured to engage in a blade holder when the probe blade is received in a blade receiving area of ​​the blade holder. [12] Probe blade according to claim 11, wherein the alignment structure includes a notch extending into the probe blade and configured to accommodate an area of ​​the blade holder to facilitate consistent alignment between the probe blade and the blade holder. [13] Probe blade according to claim 11, wherein the alignment structure includes a projection extending from an edge region of the probe blade and configured to extend around a region of the blade holder to facilitate consistent alignment between the probe blade and the blade holder. [14] Probe blade according to claim 1, wherein the probe blade further includes a spacer area extending away from the probe and shaped to provide additional space for the probe to contact the DUT. [15] Probe blade according to claim 1, wherein the opposite second side of the blade defines a second side surface area and wherein the electrically conductive protective layer further defines a protective layer surface area which is at least 50% of the second side surface area. [16] Probe blade according to claim 1, wherein the dielectric blade body material differs from an electrically conductive probe body material of the probe. [17] Probe blade according to claim 1, wherein the dielectric blade body is an at least partially L-shaped dielectric blade body. [18] Leaf holder comprising the following: the probe blade according to claim 1, wherein the blade holder is configured to attach the probe blade separably and operationally to a probe system; an electrically conductive holder housing that defines the following: (i) a blade receiving area configured to receive the blade mounting area of ​​the probe blade; (ii) an electrical connection area configured to accommodate a variety of electrical connections; (iii) a housing mounting area configured to mount the electrically conductive holder housing operationally to the probe system; and (iv) a housing volume that is at least partially enclosed and extends between the leaf receiving area and the electrical connection area; a blade contacting structure that is positioned at least partially within the blade receiving area, wherein the blade contacting structure includes a force blade contact configured to electrically contact the electrically conductive force track and a sensing blade contact configured to electrically contact the electrically conductive sensing track; an electrical ground connection to the electrical connection area, wherein the electrical ground connection is in electrical communication with the electrically conductive holder housing; an electrical force connection within the electrical connection area, wherein the electrical force connection is electrically insulated from the electrically conductive holder housing; a power conductor extending within the housing volume, electrically insulated from the electrically conductive holder housing, and electrically connecting the electrical power connection to the power blade contact; an electrical measuring connection to the electrical connection area, wherein the electrical measuring connection is electrically insulated from both the electrically conductive holder housing and the electrical force connection; and a measuring conductor that extends within the housing volume, is electrically insulated from both the electrically conductive holder housing and the power conductor, and electrically connects the electrical measuring connection to the measuring sheet contact. [19] Blade holder according to claim 18, wherein the blade contacting structure is a pre-stressed blade contacting structure configured to hold the probe blade operational within the blade receiving area. [20] Leaf holder according to claim 18, wherein the leaf contacting structure is configured to force the electrically conductive protective layer into electrical contact with an inner surface of the leaf receiving area, which is defined at least partially by the electrically conductive holder housing, such that the electrically conductive protective layer is in electrical communication with the electrically conductive holder housing. [21] Probe system configured to electrically test a device under test (DUT), the probe system comprising: a chuck that defines a support surface configured to support a substrate containing the DUT; a probe assembly comprising the blade holder according to claim 18; a manipulator configured to move the probe assembly relative to the support surface; a signal generation and analysis assembly configured to: (i) to provide a force signal to the DUT via the probe assembly; and (ii) to receive a detection signal from the DUT via the probe assembly; and an imaging device configured to acquire an optical image of at least one of the following: (i) at least one other component of the probe system; and (ii) the DUT. [22] Kit of components configured to be used with a probe assembly of a probe system, the kit comprising: the probe blade according to claim 1; and A tool configured to facilitate the insertion of the probe blade into a blade holder and the removal of the probe blade from the blade holder, wherein the tool includes the following: (i) a grip area configured to be gripped by a user of the tool; (ii) a sheet recording shaped to receive at least one area of ​​the probe sheet; (iii) a bearing surface that at least partially defines the sheet receptacle and is shaped to press against an edge region of the sheet; and (iv) a leaf gripping structure configured to be selectively actuated by the user to grip the probe leaf. [23] Probe sheet for a probe system configured to electrically test a device under test (DUT), the probe sheet comprising the following: a dielectric leaf body defined by a dielectric leaf body material, wherein the dielectric leaf body includes a leaf attachment area and a probe attachment area; a probe that is operationally attached to the probe mounting area, wherein the probe includes a probe tip configured to electrically contact the DUT; an electrically conductive track extending between the blade attachment area and the probe attachment area, and in electrical communication with the probe within the probe attachment area; and an alignment structure configured to engage with a leaf holder when the probe leaf is picked up in a leaf pickup area of ​​the leaf holder, wherein the alignment structure includes at least one of the following: (i) a notch extending into the probe blade and configured to accommodate a portion of the blade holder to facilitate consistent alignment between the probe blade and the blade holder; and (ii) a projection extending from an edge region of the probe blade and configured to extend around a region of the blade holder to facilitate consistent alignment between the probe blade and the blade holder. [24] Leaf holder comprising the following: the probe blade according to claim 23, wherein the blade holder is configured to attach the probe blade detachably and operationally to a probe system; an electrically conductive holder housing that defines the following: (i) a blade receiving area configured to receive the blade mounting area of ​​the probe blade; (ii) an electrical connection area configured to accommodate a variety of electrical connections; (iii) a housing mounting area configured to mount the electrically conductive holder housing operationally to the probe system; and (iv) a housing volume that is at least partially enclosed and extends between the leaf receiving area and the electrical connection area; a blade contacting structure that is positioned at least partially within the blade receiving area, wherein the blade contacting structure includes a force blade contact configured to electrically contact an electrically conductive force track and a sensing blade contact configured to electrically contact an electrically conductive sensing track; an electrical ground connection to the electrical connection area, wherein the electrical ground connection is in electrical communication with the electrically conductive holder housing; an electrical force connection within the electrical connection area, wherein the electrical force connection is electrically insulated from the electrically conductive holder housing; a power conductor extending within the housing volume, electrically insulated from the electrically conductive holder housing, and electrically connecting the electrical power connection to the power blade contact; an electrical measuring connection to the electrical connection area, wherein the electrical measuring connection is electrically insulated from both the electrically conductive holder housing and the electrical force connection; and a measuring conductor that extends within the housing volume, is electrically insulated from both the electrically conductive holder housing and the power conductor, and electrically connects the electrical measuring connection to the measuring sheet contact. [25] Probe system configured to electrically test a device under test (DUT), the probe system comprising: a chuck that defines a support surface configured to support a substrate containing the DUT; a probe assembly comprising the blade holder according to claim 24; a manipulator configured to move the probe assembly relative to the support surface; a signal generation and analysis assembly configured to: (i) to provide a force signal to the DUT via the probe assembly; and (ii) to receive a detection signal from the DUT via the probe assembly; and an imaging device configured to acquire an optical image of at least one of the following: (i) at least one other component of the probe system; and (ii) the DUT. [26] Kit of components configured to be used with a probe assembly of a probe system, the kit comprising: the probe blade according to claim 23; and A tool configured to facilitate the insertion of the probe blade into a blade holder and the removal of the probe blade from the blade holder, wherein the tool includes the following: (i) a grip area configured to be gripped by a user of the tool; (ii) a sheet recording shaped to receive at least one area of ​​the probe sheet; (iii) a bearing surface that at least partially defines the sheet receptacle and is shaped to press against an edge region of the sheet; and (iv) a leaf gripping structure configured to be selectively actuated by the user to grip the probe leaf. [27] A blade holder configured to detachably and operationally attach a probe blade to a probe system, the blade holder comprising: an electrically conductive holder housing that defines the following: (i) a blade receiving area configured to receive a blade mounting area of ​​the probe blade; (ii) an electrical connection area configured to accommodate a variety of electrical connections; (iii) a housing mounting area configured to mount the electrically conductive holder housing operationally to the probe system; and (iv) a housing volume that is at least partially enclosed and extends between the leaf receiving area and the electrical connection area; a blade contacting structure that is positioned at least partially within the blade receiving area, wherein the blade contacting structure includes a force blade contact configured to electrically contact an electrically conductive force track of the probe blade and a measurement blade contact configured to electrically contact an electrically conductive measurement track of the probe blade; an electrical ground connection to the electrical connection area, wherein the electrical ground connection is in electrical communication with the electrically conductive holder housing; an electrical force connection within the electrical connection area, wherein the electrical force connection is electrically insulated from the electrically conductive holder housing; a power conductor extending within the housing volume, electrically insulated from the electrically conductive holder housing, and electrically connecting the electrical power connection to the power blade contact; an electrical measuring connection to the electrical connection area, wherein the electrical measuring connection is electrically insulated from both the electrically conductive holder housing and the electrical force connection; and a measuring conductor that extends within the housing volume, is electrically insulated from both the electrically conductive holder housing and the power conductor, and electrically connects the electrical measuring connection to the measuring sheet contact. [28] Blade holder according to claim 27, wherein the electrically conductive force track and the electrically conductive measuring track are positioned on a first blade side of the probe blade, wherein the probe blade further includes an electrically conductive protective layer positioned on a second blade side of the probe blade, and wherein the blade contacting structure is further configured to force the electrically conductive protective layer into electrical contact with an inner surface of the blade receiving area defined at least partially by the electrically conductive holder housing, such that the electrically conductive protective layer is in electrical communication with the electrically conductive holder housing. [29] Probe system configured to electrically test a device under test (DUT), the probe system comprising: a chuck that defines a support surface configured to support a substrate containing the DUT; a probe assembly comprising the blade holder according to claim 27; a manipulator configured to move the probe assembly relative to the support surface; a signal generation and analysis assembly configured to: (i) to provide a force signal to the DUT via the probe assembly; and (ii) to receive a detection signal from the DUT via the probe assembly; and an imaging device configured to acquire an optical image of at least one of the following: (i) at least one other component of the probe system; and (ii) the DUT.

Images