Optical module for adaptive optics applications, associated set and associated microscope setup

Abstract

Optical module (1), - which is designed for connection to a camera port (3) of a microscope (2) and - which comprises a housing (6) and a transmissive and electro-optical wavefront modulator (7) arranged within the housing (6), - preferably wherein the wavefront modulator (7) is configured to modulate aberrations of orders of at least the third degree and / or non-spherical aberrations and / or non-radially symmetric aberrations.

Description

[0001] The invention relates to an optical module which is intended and designed to be used on a microscope as an optional accessory to enable applications of adaptive optics by means of a tunable optical wavefront modulator arranged within the module.

[0002] In addition, the invention also relates to a set comprising such an optical module and at least two different wavefront modulators, which can be arranged interchangeably within a same insertion position within the module in order to enable a respective wavefront modulation suitable for a respective application.

[0003] Finally, the invention relates to a microscope assembly comprising a microscope and an optical module as mentioned above.

[0004] The field of adaptive optics (AO) enables numerous improvements in imaging, particularly with microscopes, as well as other attractive applications, particularly in the field of medical imaging of the eye. However, in practice, there are still often barriers to actually using AO techniques in microscopy.

[0005] The invention is therefore based on the task of improving the simple applicability of adaptive optics in microscopy.

[0006] To achieve this object, the invention provides an optical module with the features of claim 1. In particular, the invention proposes an optical module designed for connection to a camera port of a microscope. For this purpose, the module can, for example, have a microscope interface that allows the module to be connected to a standardized camera port (e.g., a C-mount or F-mount camera port) of a microscope.

[0007] The module comprises a housing and a transmissive and electro-optical wavefront modulator (this can be, in particular, an optofluidic wavefront modulator) arranged within the housing. "Transmissive" can be understood here in particular to mean that the wavefront modulator does not reflect an incident wavefront, but rather transmits it. "Electro-optical" can be understood in particular to mean that a wavefront modulation generated by the wavefront modulator can be electrically adjusted using control signals, i.e., the wavefront modulator can be electrically detuned to achieve a desired modulation.

[0008] To be able to control aberrations relevant for imaging, it is preferable if the wavefront modulator is configured to modulate or correct at least astigmatism and / or aberrations of orders of at least the third degree and / or non-spherical aberrations and / or non-radially symmetric aberrations (all of which, for example, a simple tunable lens cannot achieve). Third-order aberrations here can be understood as aberrations that can be modeled with Zernike polynomials p(m,n) with radial order n=3 (and azimuthal frequency m).

[0009] This module according to the invention is intended for use as a camera port attachment module, which can be connected to a camera port of a microscope (instead of the camera and image sensor that would otherwise be used at this location). It thus offers a plug-and-play solution for implementing an adaptive optics platform for microscopy. With the help of the optical module, or more precisely its optical modulator, numerous applications of adaptive wavefront correction (adaptive optics = AO) can be implemented, e.g., to improve the imaging performance of a microscope and thus the imaging. Using the module, adaptive optics (AO) can thus be seamlessly integrated into a microscope to enable precise aberration correction.

[0010] To make the module adaptable to different applications, a preferred embodiment provides for the wavefront modulator to be designed as a separate (structural) unit that is removably arranged or can be arranged in a plug-in position within the module housing. This makes it possible, in particular, to easily replace the wavefront modulator with a different second wavefront modulator (with different properties).

[0011] To simplify installation and removal and thus improve usability, the wavefront modulator can be reversibly electrically connected to the module via an electrical plug-in contact formed in the insertion position. This can preferably be done in such a way that electrical control signals can be transmitted to the wavefront modulator via the plug-in contact as soon as it is fully inserted into the insertion position.

[0012] The aforementioned plug-in contact can be implemented, for example, using a board-to-board connector. Furthermore, a separate modulator holder, preferably in the form of a drawer, can be configured to hold the wavefront modulator in position within the housing. In this way, the modulator holder, together with the wavefront modulator it holds, can be inserted as a compact structural unit into a slot in the module up to the aforementioned insertion position and can also be easily withdrawn again if necessary. The invention therefore proposes, in particular, designing the wavefront modulator so that the module can be used with different wavefront modulators.

[0013] The modulator holder and / or the wavefront modulator can have a plug or socket that matches a socket / plug inside the module's housing. This allows the modulator holder / wavefront modulator to be easily inserted into the slot to establish the aforementioned electrical contact.

[0014] The wavefront modulator can in principle be any transmissive modulator that generates a modulation in transmission suitable for wavefront correction.

[0015] The modulation generated by the wavefront modulator can, for example, be based on an electro-optical effect that causes a change in the refractive index. For example, the wavefront modulator can be designed as a liquid crystal spatial light modulator (LC-SLM).

[0016] Alternatively, the wavefront modulator can be designed as a refractive, preferably optofluidic, wavefront modulator and / or as a deformable phase plate (DPP). In this case, the modulation of the wavefront incident on the modulator is based on a varying degree of deflection of an optical interface, which leads to different light travel distances or times through the modulator and thus causes a relative phase change based on a change in the optical path length difference.

[0017] A particularly preferred embodiment provides for the wavefront modulator to be designed as an optofluidic modulator based on a membrane that can be deformed by actuators. In this case, the wavefront modulator can be designed, in particular, as described in EP 3 911 978 B1. The membrane can be actuated, for example, electrostatically and / or piezoelectrically.

[0018] In order to allow easy retrofitting of existing microscopes, one embodiment provides that the optical module has a microscope interface that allows the module to be connected to a standardized camera port, in particular a C-mount camera port, of a microscope.

[0019] To enable a desired modulation relative to a pupil plane of a microscope objective, the module can comprise two lenses or lens groups that together form a 4f system that images a first image plane (this can be the image plane in which image acquisition normally occurs using an image sensor connected to the microscope's camera port) into a Fourier plane and from there into a second image plane. In this case, the wavefront modulator is arranged in the region of the Fourier plane (i.e., just before or behind it), particularly in the Fourier plane.

[0020] The module can further comprise a tunable lens arranged on an optical axis of the wavefront modulator. This lens can be designed as an electro-optical lens so that it can be tuned using an electrical control signal. The tunable lens can thus enable a motionless z-scan of a focal plane, as will be explained in more detail below.

[0021] The tunable lens can preferably be configured as a tunable liquid lens (actuated in particular by electrowetting or, for example, electromagnetically). For fast and motionless 3D focusing, it is further advantageous if the lens is tunable over at least 5 diopters, preferably over at least 10 diopters. If the lens is a tunable optofluidic lens (e.g., a membrane lens or an electrowetting-based or electromagnetically actuated liquid lens), very fast response times of a few milliseconds can be achieved, which is advantageous for the intended application, for example, to quickly acquire z-stacks of microscope images.By specifically detuning the tunable lens, volumetric 3D imaging in particular can be carried out very quickly by refocusing the object plane using the lens, without physically moving an objective or a stage of the microscope used.

[0022] The module can further comprise an adjustable diaphragm (e.g., manually or by means of a motor), which can be used to limit a beam path leading to the wavefront modulator. For the automation of measurements, it is advantageous if the diaphragm is designed as a diaphragm that can be adjusted using an electrical control signal. The diaphragm is particularly useful for fine-tuning the positioning of the wavefront modulator within the module. Furthermore, this diaphragm / aperture can be used for several useful purposes: as mentioned (i) to support the positioning of the wavefront modulator (e.g., its xy positioning); (ii) to support a wavefront measurement with a wavefront sensor connected to the module. For this purpose, the diaphragm can, for example, simulate a point source or isolate a region of interest within the field of view.

[0023] Preferably, the aperture is placed in an intermediate image plane (in the final use of the module within a microscope setup), for example within a focal length of a first lens of a 4f system of the module, as will be illustrated by the figures.

[0024] For the purpose of precise positioning of the wavefront modulator, adjustment means can be provided on the module with which the x and y positions of the wavefront modulator (each relative to its optical axis, which can be considered the z axis) can be finely adjusted. These adjustment means can preferably also be motorized so that they can be adjusted using electrical control signals. This then enables automated fine positioning of the wavefront modulator within the module.

[0025] For full integration, it is also advantageous if the module has a mains connection and internal electronics that generates an operating voltage for operating the wavefront modulator from a mains voltage provided by the mains connection.

[0026] A further possible embodiment of the module provides that the module comprises a first wavefront modulator and a second wavefront modulator, which are arranged in cascade in a common beam path. In particular, it can be provided that the two wavefront modulators are designed in a woofer / tweeter configuration, in which the first wavefront modulator corrects low-order aberrations (e.g., with radial order n ≤ 3), while the second wavefront modulator corrects higher-order aberrations (e.g., with radial order n ≥ 4), as described by way of example in EP3929648B1. The said woofer / tweeter configuration can thus be designed as described in EP3929648B1, and in addition, the method described in EP3929648B1 for controlling the two cascaded wavefront modulators can be used.

[0027] The two wavefront modulators can be combined as a compact unit that can be interchangeably arranged in the aforementioned insertion position and electrically contacted there using the aforementioned electrical plug-in contact. However, configurations are also conceivable in which only one or both of the wavefront modulators can be designed as a structural unit that can be removed from the module and reinserted as needed, for example, to enable optional operation of the module with only one of the two wavefront modulators or with both wavefront modulators.

[0028] To achieve this objective, the invention further proposes an optical module set comprising an optical module according to the invention, including a first wavefront modulator removable from the module (as previously described), and a second wavefront modulator that differs from the first wavefront modulator in at least one optical parameter. Both wavefront modulators are configured such that they can be inserted into one and the same insertion position within the housing of the optical module. Preferably, both wavefront modulators can also be contacted there by means of an electrical plug-in contact, as previously explained. Furthermore, configurations are also possible in which each of the two wavefront modulators is combined with a respective module holder to form a respective compact unit.In this way, the optical module of this set can be operated optionally with the first wavefront modulator and / or with the second wavefront modulator.

[0029] The two wavefront modulators can differ, for example, in terms of the diameter of a usable optical aperture or in terms of their modulation properties. This allows the optical module to be adapted to different applications by simply exchanging the wavefront modulator, for example, if a different lens is used on a microscope to whose camera port the module is currently docked.

[0030] To achieve the object, a microscope assembly is also proposed, comprising a microscope and an optical module according to the invention (this may comprise one or more wavefront modulators, which can be inserted into the module in an interchangeable manner, in particular). The microscope comprises (at least) one objective lens that generates an imaging beam path and a camera port to which an image sensor (more precisely, a camera comprising an image sensor) can be connected. The optical module is now connected (instead of an image sensor / camera) to the camera port of the microscope, so that the imaging beam path is guided (in particular with the aid of a lens of the module) to the wavefront modulator of the optical module. It is preferred if the wavefront modulator is arranged in a plane (within the module) ("conjugated pupil plane") that is conjugated to a pupil plane of the microscope objective lens.

[0031] In such a microscope setup, the optical module can now forward the imaging beam path (originating from the wavefront modulator) via a lens to an image sensor connected to a camera port of the module. This forwarding can also occur when the wavefront modulator is removed from the module (= bypass mode, without optical modulation).

[0032] To enable desired applications of adaptive optics, it is advantageous if the wavefront modulator is arranged in a plane within the module (this can be the aforementioned Fourier plane) that is conjugated to a pupil plane of the microscope objective. Conjugation here means that the conjugated planes are imaged into each other by lenses of the microscope setup.

[0033] Preferably, the aforementioned tunable lens, if used in the module, can also be arranged in or at least in the immediate vicinity of this conjugated pupil plane within the module.

[0034] The microscope structure can further comprise a control system which is configured to evaluate an image sensor and, based on image analysis, to control the wavefront modulator of the optical module within a feedback loop using a control signal. This control system can be partially or completely integrated into the optical module or implemented externally to the module, so that, for example, only control signals from the external control system are transmitted to the module in order to control the wavefront modulator. Alternatively or additionally, the control system can also be configured to control the wavefront modulator of the optical module (or several such wavefront modulators) within a feedback loop using a (possibly respective) control signal based on a direct wavefront measurement (which can in particular be carried out by a wavefront sensor connected to the module).

[0035] The control system can also be configured to control a tunable lens of the optical module by means of a further control signal, in particular in order to enable motion-free 3D focusing.

[0036] Furthermore, the control system can also control an electrically adjustable aperture of the module (which aperture was already described above) to set a desired aperture size. This can be particularly advantageous to enable at least partially automated fine adjustment of the wavefront modulator (within the module) with the aid of a test measurement using the aperture or to enable improved wavefront measurement with a wavefront sensor, as explained in more detail below using an example.

[0037] The invention will now be described in more detail using exemplary embodiments, but is not limited to these embodiments. Further developments of the invention can be derived from the following description of a preferred embodiment in conjunction with the general description, the claims, and the drawings.

[0038] It shows: Fig. 1 a state-of-the-art microscope, Fig. 2 a schematic view of an optical module according to the invention, Fig. 3 the optical module of the Fig. 2, after it has been attached to a camera port of a microscope and after the wavefront modulator has been inserted, Fig. 4 shows a further schematic view of an optical module according to the invention with the wavefront modulator removed, Fig. 5 a schematic view of an optical module according to the invention with an additional tunable lens, Fig. 6 a schematic representation of an optical module according to the invention with two wavefront modulators, a tunable lens, two connected image sensors and an additional wavefront sensor, Fig. 7 and Fig. 8 possible uses of modules according to the invention on a microscope, Fig. 9 a cross-sectional view through a refractive and transmissive wavefront modulator as can be used in a module according to the invention, the Fig. 10 to 12 different views of an optical module according to the invention, Fig. 13 shows a further microscope structure according to the invention using a module according to the invention, and finally the Fig. 14 shows another microscope setup according to the invention.

[0039] The Fig. 1 shows a prior art microscope 2 comprising an objective lens 4 (which can, for example, be corrected to infinity = "infinity optics") arranged on an objective nosepiece 12, with which an object 11 is observed. The objective lens 4 generates an imaging beam path 5, which is focused by means of the tube lens 13 onto an image sensor plane 35 of the camera 20, wherein the camera 20 is connected as a separate component to the camera port 3 of the microscope 2.

[0040] As the Fig. As schematically illustrated in Figure 7, the invention now proposes connecting an optical module 1 to the camera port 3 of the microscope 2 instead of the camera 20. The optical module 1 has its own camera port 14, to which the camera 20 can now be connected.

[0041] The Fig. Figure 8 also shows that a module 1 according to the invention can also be arranged in a chain configuration in series with another optical component, namely the further optical module 24 shown, in the imaging beam path 5 of a microscope assembly 47: The image beam formed by the module 1 in the intermediate image plane 35b (compare Fig. 2) is transported further by the further optics module 24 to the image sensor plane of the camera 20. In another chain configuration, the illustrated position of module 1 and the further module 24 can be exchanged, so that first the further module 24 is connected to the microscope 2, then the module 1 according to the invention is connected to the camera connection 14 of the module 24, and finally the camera 20 is connected to the camera connection 14 of the module 1. In this latter configuration, the module 24 thus delivers an intermediate image to the intermediate image plane 35a of the module 1, which forwards this intermediate image to the image sensor of the camera 20.

[0042] As the Fig. 2 in a highly schematic form, the module 1 comprises a housing 6 in which two optical lenses 26a and 26b are arranged, forming a 4f system 27. The 4f system 27 forms the first image plane 35a shown, which corresponds to the original image sensor plane 35 of the camera 20. Fig. 1, into the Fourier plane 25 shown and from there into the rear image plane 35b. If module 1 of the Fig. 2 as in the Fig. 7 is used on a microscope 2, a microscope image of the object 11 is created in the intermediate image plane 35a, which is imaged by means of the two lenses 26a and 26b into the rear image plane 35b, in which the image sensor of the camera 20 is then placed.

[0043] Fig. 3 shows the use of module 1 on the microscope 2 of the Fig. 1. In the Fig. A transmissive and electro-optical wavefront modulator 7 is now inserted into the insertion position 36 illustrated in Figure 2 within the module 1, which was inserted into the insertion position 36 from the outside. An electrical plug-in contact 37 is formed inside the module 1, so that the wavefront modulator 7, as soon as it is fully inserted into the insertion position 36, is electrically contacted by means of the plug-in contact 37 (and is thus connected to a voltage source 39 of the module 1 via a voltage supply 38 - see Figure 2). Fig. 2).

[0044] The module 1 also comprises a control system 33, which reads the connected image sensor 20 and generates a control signal 44, with which the wavefront modulator 7 is controlled via the plug contact 37 (which can comprise several electrical contacts) in order to achieve a desired optical modulation and thus a desired wavefront correction. Fig. 3, that the imaging beam path 5 generated by the microscope 2 is guided through the module 1 to the camera 20. Depending on the design of the module 1 (cf. for example the example of the Fig. 10-12), the imaging beam path 5 can also be folded within the module 1. In Fig. 3 also shows that the wavefront modulator 7 has a specific, effectively usable optical aperture 46. If the objective 4 on the microscope 2 is replaced, it may be necessary to insert a second optical wavefront modulator 7, with a different free optical aperture 46, into the insertion position 36 within the module 1. For this purpose, two different wavefront modulators 7 are each designed as a separate unit, which can be arranged interchangeably in the insertion position 36 within the housing 6 of the module 1. In this way, the module 1 can be quickly adapted by simply replacing the wavefront modulator 7 that is currently in use.

[0045] Will be in the Fig. 3, the wavefront modulator 7 is pulled out of the insertion position 36 (and thereby also decoupled from the electrical plug contact 37), the Fig. 4, in which module 1, in a bypass mode, merely images the microscope image created in the first intermediate image plane 35a into the rear image plane 35b of the camera 20 without any wavefront modulation taking place. In this case, the two lenses 26a and 26b thus function merely as relay optics, and no wavefront modulation takes place.

[0046] The Fig. 5 shows a further embodiment of a module 1 according to the invention, wherein, in contrast to the embodiment according to Fig. 3, the control system 33 is arranged externally to the module 1, and the module 1, in addition to a wavefront modulator 7, also has a tunable lens 30 arranged on the same optical axis 45 as the optical wavefront modulator 7. This axis also corresponds to the optical z-axis of the 4f system 27.

[0047] Using the tunable lens 30, which can be configured in particular as a "tunable liquid lens," rapid scans of the focal plane can be performed, for example, for 3D imaging. By detuning this lens 30, the alignment of the wavefront modulator 7 within the module 1 can also be checked using an image-based routine: For this purpose, a "defocus" is applied in both directions by detuning the lens 30, and the image sensor 20 is used to observe whether the respective image point moves in the x- or y-direction (which then indicates a misalignment). During such a measurement, the aperture 19 can be almost completely closed to simulate a point source.Thus, a fine tuning of the positioning and alignment of the wavefront modulator 7 in the sub-millimeter range can be achieved, whereby typically four diopters (+ / - 2 diopters) are tuned with the lens 30, and whereby the position of the wavefront modulator 7 can be adjusted by means of corresponding adjustment means configured in the module 1 (either manually or e.g. motorized).

[0048] The Fig. 6 shows an even more complex example of a module 1 according to the invention. In contrast to the embodiment according to Fig. Although a tunable lens 30 is still arranged in the imaging beam path 5, a cascaded pair of two wavefront modulators 7a and 7b is now arranged in the insertion position 36, both of which can be controlled by the control system 33. The control system 33, which reads image data from a first image sensor 20a, enables automatic measurement of optical aberrations and their correction by appropriately controlling the two wavefront modulators 7a and 7b.

[0049] At the same time, the control system 33 can tune the lens 30 via the control signal 44b shown and, in addition, with the aid of the further control signal 44c, control the electrically variable aperture 19, which, as in all previous embodiments, is located in the first intermediate image plane 35a.

[0050] Module 1 of the Fig. 6 further includes a wavelength-selective beam splitter 41, which splits the incoming imaging beam path 5 into two camera ports 14a and 14b of module 1, each of which is connected to a camera 20a / 20b. In this way, simultaneous imaging in different wavelength ranges can be achieved with the module 1 shown according to the invention.

[0051] In addition, Module 1 of the Fig. 6 also provides a connection option for a wavefront sensor 21, with a further beam splitter 40 directing the imaging beam path 5 to the connected wavefront sensor 21. Instead of the beam splitter 40, a tilting mirror could also be arranged in module 1, which, in the raised tilted position, directs the imaging beam path 5 to the wavefront sensor 21 and, in the folded state, allows the imaging beam path 5 to pass unhindered (further to the lens 26b). Depending on the design, it can be provided that the control system 33 also evaluates signals from the wavefront sensor 21 in order to generate corresponding control signals 44a for one or more wavefront modulators 7.

[0052] It is understood that further combinations of features are possible depending on the application. For example, in the Fig. 6, only a single wavefront modulator 7 can be used. This is particularly possible if both wavefront modulators 7a and 7b are each designed as a separate structural unit, which can be arranged interchangeably in a respective insertion position 36 within the module 1 and can be electrically contacted there by means of corresponding plug contacts 37. The Fig. 13 shows a further example of a microscope assembly 47 according to the invention, wherein the microscope 2 (not shown) is arranged, for example, as in Fig. 1. In this example, a camera 20 is connected to a first camera port 14a of module 1, and a wavefront sensor 21, mediated via a tube lens 26c, is connected to a further port 14b of module 1. The imaging beam path 5 coming from the microscope 2 is split into the two shown beam paths 5a and 5b via a beam splitter 40 inside the module 1, which lead to the camera 20 and the wavefront sensor 21, respectively. This beam splitter 40 can, in particular, be designed to be foldable, so that the beam splitting can be optionally produced or can be omitted. Alternatively, a tilting mirror as previously explained could be used in place of the beam splitter 40, wherein the tilting mirror then either deflects the beam path 5 completely onto the wavefront sensor 21 or (in a folded tilted position) allows the beam path 5 to pass unhindered to the camera 20.

[0053] As in the previous examples, the camera 20 can be used to record microscope images of an object 11. The images are optically corrected using the cascaded pair 43 of the two wavefront modulators 7a and 7b, designed in a woofer-tweeter configuration. These wavefront modulators, as before, are arranged in the conjugated pupil plane 29a, which is conjugated to the pupil plane 10 of the objective 4 of the microscope 2.

[0054] However, the wavefront sensor 21 is also arranged in such a conjugated pupil plane 29b. The wavefront sensor 21 has two functions: Firstly, it enables calibration of the wavefront modulators 7a and 7b, in particular for creating their common control matrix. Furthermore, the wavefront sensor 21 can be used to directly measure optical aberrations, either instead of or in addition to an indirect determination of image errors based on a sensorless, image-based method, i.e., using the signal from the image sensor 20. Accordingly, the control system 33 can also optionally process an output signal from the wavefront sensor 21 (transmitted via the signal line 31b) and / or an output signal from the image sensor 20 (transmitted via the signal line 31a) in order to generate the control signals 43a and 43b and / or the control signal 44c.In this way, even two feedback loops 32a and 32b can be implemented to control the two wavefront modulators 7a, 7b (or even just a single wavefront modulator 7, depending on the design of module 1).

[0055] As already shown in the example of Fig. 6, the wavefront sensor 21 can be used for various purposes, particularly in combination with the electrically tunable aperture 19 in the intermediate image plane 35a by the control system 33: The aperture 19 is particularly useful when the imaged sample does not have an isolated point-like structure. In this case, for the purpose of calibrating the wavefront modulator 7 or the wavefront modulators 7a, 7b, the aperture 19 can be almost completely closed in order to emulate a point source. For the purpose of aberration measurement, however, the aperture 19 can be adjusted by the control system 33 such that an area of interest (e.g., around a single fluorescent object of interest) within the field of view observed with the objective 4 can be measured in isolation with the image sensor 20 and / or with the wavefront sensor 21.

[0056] The Fig. 14 shows another example of a microscope assembly 47 according to the invention similar to that of Fig. 6, where the wavefront sensor 21 is now missing, but the control system 33 can process signals from both cameras 20a and 20b, which are connected to the respective camera ports 14a and 14b of module 1. The beam splitter 41 used is a wavelength-selective beam splitter (e.g., a dichroic mirror), so that the cameras 20a and 20b can each separately detect different wavelengths.

[0057] As the Fig. As illustrated in Figure 9, the repeatedly mentioned wavefront modulator 7 can be configured, in particular, by means of an electrically actuatable membrane 22 that is in contact with an optical fluid 23. Depending on the deflection of this membrane 22, as shown in details a), b), and c), phase delays of varying magnitudes can be induced in a spatially resolved manner in order to achieve a desired wavefront modulation. Such a wavefront modulator 7 can be understood as a refractive component because light is refracted at the optical interface of the membrane 22. Such a component can also be considered a deformable phase plate 42.

[0058] The Fig. 10 to 12 show a possible embodiment of an optical module 1 according to the invention, which offers an insertion position 36 (or a receiving space 36) into which removable wavefront modulators 7, each held by its own modulator holder 18, can be inserted, wherein the insertion direction in the plan view of the Fig. 10 is highlighted with a black block arrow. The white block arrow in Fig. 10, on the other hand, indicates the direction in which an imaging beam path 5 coming from a microscope 2 can enter the module 1 through the manually adjustable aperture 19 shown.

[0059] In the example of Fig. 10 to 12, the imaging beam path 5 is folded within the housing 6 by means of adjustable mirrors so that it finally exits upwards from the camera port 14 shown, to which a camera can be connected. The side view of the Fig. Figure 11 shows two manual control elements 15, with which an xy position of the inserted wavefront modulator 7 in the beam path 5 can be finely adjusted. In addition, there are two further manual control elements 15 (see Fig. 10 and Fig. 11) with which the adjustable mirrors can be adjusted in order to set an xy position of the imaging beam path 5 on the image sensor of a camera connected to the camera port 14 (= xy correction of the image position). The front view of the Fig. 12 shows a view of the aperture 19 through which the imaging rays can enter the module 1.

[0060] A significant advantage of the present invention is that, by exchanging the respective wavefront modulator 7, the module 1 can be adapted to different objectives 4 of the microscope 2. Furthermore, the module 1 can be easily retrofitted to existing microscopes 2 by attaching it, instead of an existing camera 20, to a standardized camera port 3 (e.g., C-mount or F-mount) of the microscope 2 using a microscope interface 8 provided for this purpose on the module 1. This microscope interface 8 can also be interchangeable to enable the use of the module 1 with different camera ports 3.

[0061] In summary, an innovative optical module 1 is proposed that provides adaptive optics using an electrically controllable wavefront modulator 7 for improved imaging with an associated microscope 2. Due to the proposed interchangeability of the wavefront modulator 7, different pupil diameters from 5 to 22 mm, for example, can be easily realized, so that the module 1 can be used with different lenses 4 of a microscope 2 if the module 1 is already connected to a camera port 3 of the microscope 2. Thus, the optical module 1 enables an easily adaptable optical platform for adaptive optics applications in microscopy.In addition to aberration correction, the module 1 can also enable rapid remote focusing, preferably by means of a tunable lens 30, and thus also enable very rapid fine adjustment of the wavefront modulator 7 after insertion into the module 1. List of reference symbols 1 optical module (camera port attachment) 2 microscope 3 camera ports (of 2; 1 can be connected there) 4 lens (out of 2) 5 imaging beam path (produced by 4) 6 cases (of 1) 7 Wavefront modulator (of 1) 8 Microscope interface (of 1) 9 electrical interfaces (of 1) 10 Pupillary plane (of 4) 11 Object (is observed using 2 / 4) 12 lens revolvers (for replacing 4) 13 Tube lens (of 2) 14 Camera port or other optical port (of 1) 15 Control element (for adjusting the position of 7) 16 On / Off switches 17 Insertion opening (e.g. in the form of a drawer compartment) 18 Modulator holder (holds 7 in position; can be removed together with 7 from 1 / 6) 19 adjustable or tunable aperture 20 Image sensor / camera 21 Wavefront sensor 22 membranes (of 7) 23 optical fluid 24 additional optics module (especially in the form of an additional “camera port attachment”) 25 Fourier plane 26 lens 27 4F lens system 28 Camera interface 29 conjugate pupil plane 30 tunable lens 31 Signal line 32 feedback loop 33 Control system 34 deflecting mirrors 35 (intermediate) image plane / image sensor plane (of 20) 36 insertion positions (of 7) 37 electrical plug contact 38 Power supply 39 Voltage source (can be realized within 1) 40 beam splitters (can also be wavelength-selective) 41 wavelength-selective beam splitter 42 deformable phase plate (DPP) 43 cascaded pair of two wavefront modulators (in particular 2 DPPs in woofer / tweeter configuration) 44 Control signal 45 optical axis (of 7; and of 30) 46 (effectively usable) optical aperture (out of 7) 47 Microscope setup 48 Handle (for pulling out 7 / 18) QUOTES CONTAINED IN THE DESCRIPTION

[0000] This list of documents submitted by the applicant was generated automatically and is included solely for the convenience of the reader. This list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions. Cited patent literature

[0000] EP 3 911 978 B1

[0017] EP 3929648B1

[0026]

Claims

[1] Optical module (1), - which is designed for connection to a camera port (3) of a microscope (2) and - which comprises a housing (6) and a transmissive and electro-optical wavefront modulator (7) arranged within the housing (6), - preferably wherein the wavefront modulator (7) is configured to modulate aberrations of orders of at least the third degree and / or non-spherical aberrations and / or non-radially symmetric aberrations. [2] Optical module (1) according to claim 1, wherein the wavefront modulator (7) is designed as a separate unit which is removably arranged in an insertion position (36) within the housing (6), in particular so that the wavefront modulator (7) can be easily replaced by a different second wavefront modulator (7), - preferably wherein the wavefront modulator (7) is reversibly electrically connectable to the module (1) via an electrical plug-in contact (7) formed in the insertion position (36), - in particular so that electrical control signals (44) can be conducted to the wavefront modulator (7) via the plug contact (7) as soon as the wavefront modulator (7) is fully inserted into the insertion position (36). [3] Optical module (1) according to one of the preceding claims, wherein the wavefront modulator (7) is - Liquid Crystal Spatial Light Modulator (LC-SLM), in particular based on an electro-optical effect, or - as a refractive, preferably optofluidic, wavefront modulator (7) and / or - is designed as a deformable phase plate (DPP). [4] Optical module (1) according to one of the preceding claims, wherein the optical module (1) has a microscope interface (8) which allows a connection of the module (1) to a standardized camera port (3), in particular a C-mount camera port (3), of a microscope (2). [5] Optical module (1) according to one of the preceding claims, wherein the module (1) comprises two lenses (26a, 26b) forming a 4f system (27) which images a first image plane (35a) into a Fourier plane (25) and from there into a second image plane (35b), and - wherein the wavefront modulator (7) is arranged in the region of the Fourier plane (25), in particular in the Fourier plane (25). [6] Optical module (1) according to one of the preceding claims, wherein the module (1) comprises a lens (30) which is tunable, preferably by means of an electrical control signal (44c), and which is arranged on an optical axis (45) of the wavefront modulator (7), - in particular so that the tunable lens (30) enables a motionless z-scan of a focal plane. [7] Optical module (1) according to one of the preceding claims, wherein the module (1) comprises an adjustable aperture (19) with which a beam path (5) leading to the wavefront modulator (7) can be limited, - preferably wherein the aperture (19) is designed as an aperture (19) adjustable by means of an electrical control signal (44c). [8] Optical module (1) according to one of the preceding claims, wherein the module (1) comprises adjustment means, in particular in the form of manual operating elements (15), with which an x-position and a y-position of the wavefront modulator (7) can be finely adjusted, - preferably wherein the adjustment means are adjustable by means of electrical control signals. [9] Optical module (1) according to one of the preceding claims, wherein the module (1) has a mains connection and internal electronics which generates an operating voltage for operating the wavefront modulator (7) from a mains voltage provided by the mains connection. [10] Optical module (1) according to one of the preceding claims, wherein the module (1) comprises a first wavefront modulator (7a) and a second wavefront modulator (7b) which are arranged in cascade in a common beam path (5), - in particular wherein the two wavefront modulators (7a, 7b) are designed in a woofer / tweeter configuration in which the first wavefront modulator (7a) corrects low-order aberrations, while the second wavefront modulator (7b) corrects higher-order aberrations. [11] Optical module set, comprising - an optical module (1) according to one of the preceding claims including a first wavefront modulator (7) removable from the module (1) and - a second wavefront modulator (7) which differs from the first wavefront modulator (7) in at least one optical parameter, - wherein both wavefront modulators (7) can be inserted into one and the same insertion position (36) within the housing (6) of the optical module (1) and can be contacted there by means of an electrical plug-in contact (7), - so that the optical module (1) can be operated optionally with the first wavefront modulator (7) and / or with the second wavefront modulator (7). [12] Microscope setup (47), comprising: - a microscope (2) with - a lens (4) which generates an imaging beam path (5), and with - a camera port (3) provided for connecting an image sensor (20); and - an optical module (1) according to one of the preceding claims, which is connected to the camera port (3) of the microscope (2), so that the imaging beam path (5), in particular by means of a lens (26a) of the module (1), is guided to the wavefront modulator (7) of the optical module (1), - preferably wherein the wavefront modulator (7) is arranged in a plane (25, 29) which is conjugated to a pupil plane (10) of the objective (4) of the microscope (2). [13] Microscope assembly (47) according to the preceding claim, - wherein the optical module (1) forwards the imaging beam path (5) by means of a lens (26b) to an image sensor (20) which is connected to a camera port (14a) of the module (1), - preferably wherein the optical module (1) directs the imaging beam path (5) onto a wavefront sensor (21) connected to an optical port (14b) of the module (1) by means of a beam splitter (40), - particularly preferably wherein the wavefront sensor (21) is arranged in a plane (29b) which is conjugated to a pupil plane (10) of the objective (4) of the microscope (2). [14] Microscope assembly (47) according to one of the preceding claims, wherein the wavefront modulator (7) is arranged in a plane (29) within the module (1) which is conjugated to a pupil plane (10) of the objective (4) of the microscope (2) and / or - wherein an adjustable aperture (19) of the module (1) is arranged in an intermediate image plane (35a) of the imaging beam path (5). [15] Microscope assembly (47) according to one of the preceding claims, wherein the microscope assembly (47) comprises a control system (33) which is arranged to - to evaluate an image sensor (20) and, on the basis of an image analysis, to control the wavefront modulator (7) of the optical module (1) within a feedback loop (32) by means of a control signal (44a) and / or - on the basis of a direct wavefront measurement, in particular carried out with a wavefront sensor (21) connected to the module (1), to control the wavefront modulator (7a / 7b) of the optical module (1) within the framework of a feedback loop (32b) by means of a control signal (44a / 44b).

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