Gas monitoring system

Abstract

Gas monitoring system, with a main body (10); several sampling assemblies (20) which are detachably mounted on the main body (10), each sampling assembly (20) comprising a base (21), several inlet valves (22), a valve manifold (23), a first sample inlet distributor (24), a sample inlet valve (25) and a pre-sample inlet valve (26), wherein the gas (S1, S2) to be measured is supplied via the inlet valves (22), the first sample inlet distributor (24) comprising several first inlet nozzles (241) and two first outlet nozzles (242) which are connected to the first inlet nozzles (241), each first inlet nozzle (241) being connected to an inlet valve (22), the two first outlet nozzles (242) being connected to the sample inlet valve (25) and the pre-sample inlet valve (26), and wherein the valve manifold (23) is connected to the inlet valves (22), is connected to the sample inlet valve (25) and the pre-sample inlet valve (26) and controls their operation; and a detection device (30) which is arranged on the main body (10) and can be connected to an outlet of the sample inlet valve (25) of each sampling assembly (20) for the detection of the gas (S1, S2) to be measured.

Description

Technical field

[0001] The invention relates to a gas monitoring system, in particular a gas monitoring system for the detection of gases in various environments. State of the art

[0002] In semiconductor manufacturing, cleanroom air quality has a significant impact on semiconductor yield. Since factory halls are very large, inspecting different areas with multiple machines or mobile devices is extremely time-consuming and labor-intensive. Conventional stationary gas monitoring systems have a permanently installed detection module. If this module fails and requires repair, ambient gas detection is interrupted until the repair is completed, severely impacting detection efficiency.

[0003] Therefore, it is necessary to provide a novel and advanced gas monitoring system to solve the problems mentioned above. Object of the invention

[0004] The object of the invention is to provide a gas monitoring system that facilitates the maintenance and replacement of the sampling assemblies and enables multi-point ambient monitoring.

[0005] This task is achieved by the gas monitoring system, which comprises: a main body; several sampling assemblies detachably mounted on the main body, each sampling assembly comprising a base, several inlet valves, a valve manifold, a first sample inlet manifold, a sample inlet valve, and a pre-sample inlet valve, the gas to be measured being supplied via the inlet valves, the first sample inlet manifold having several first inlet nozzles and two first outlet nozzles connected to the first inlet nozzles, each first inlet nozzle being connected to an inlet valve, the two first outlet nozzles being connected to the sample inlet valve and the pre-sample inlet valve, and the valve manifold being connected to the inlet valves, the sample inlet valve, and the pre-sample inlet valve and controlling their operation;and a detection device arranged on the main body which can be connected to an outlet of the sample inlet valve of each sampling assembly for the purpose of detecting the gas to be measured. Brief description of the drawings Fig. 1 a perspective view of the preferred embodiment of the invention, Fig. 2 a perspective representation partially without the main body of the preferred embodiment of the invention, Fig. 3 an enlarged representation of zone A in Fig. 2, Fig. 4 an enlarged representation of zone B in Fig. 2, Fig. 5 a perspective representation in the other viewing direction according to Fig. 2, Fig. 6 a representation of a second limiting unit in the locked position of the preferred embodiment of the invention, Fig. 7 a representation of the second limiting unit in the unlocked position of the preferred embodiment of the invention, Fig. 8 a representation of a sampling assembly after separation from the main body of the preferred embodiment of the invention, Fig. 9 an exploded view of the sampling assembly and the slide rail assembly of the preferred embodiment of the invention, Fig. 10 a representation of the gas lines of the preferred embodiment of the invention. Ways to implement the invention

[0006] The following embodiments serve only to illustrate the possible implementation of this invention and are not intended to limit its scope. The term "one" or "at least one" before the nouns mentioned in the article does not restrict the quantity. A "plural" is also possible, as needed. Changes to this number are also within the scope of protection of the invention.

[0007] Fig. Figures 1 to 10 show a preferred embodiment of the present invention. The gas monitoring system 1 of the present invention comprises a main body 10, several sampling assemblies 20, and a detection device 30.

[0008] The sampling assemblies 20 are detachably mounted on the main body 10. Each sampling assembly 20 includes a base 21, several inlet valves 22, a valve manifold 23, a first sample inlet distributor 24, a sample inlet valve 25, and a pre-sample inlet valve 26. The gas S1, S2 to be measured is supplied via the inlet valves 22. The first sample inlet distributor 24 has several first inlet nozzles 241 and two first outlet nozzles 242, which are connected to the first inlet nozzles 241. Each first inlet nozzle 241 is connected to an inlet valve 22. The two first outlet nozzles 242 are connected to the sample inlet valve 25 and the pre-sample inlet valve 26. The valve manifold 23 is connected to the inlet valves 22, the sample inlet valve 25 and the pre-sample inlet valve 26 and controls their operation.The detection device 30 is arranged on the main body 10 and can be connected to an outlet of the sample inlet valve 25 of each sampling assembly 20 for the detection of the gas S1, S2 to be measured. This allows the multiple inlet valves 22 to communicate with multiple gas sources to be measured, for example, ambient gases from different working areas, enabling multi-range and multi-point environmental measurement with high detection efficiency. Furthermore, the multiple sampling assemblies 20 can be serviced and replaced independently, which improves the serviceability of the overall system.

[0009] The gas monitoring system 1 further comprises several slide rail assemblies 40. Each slide rail assembly 40 includes a first slide rail 41, which is arranged on the main body 10, and a second slide rail 42, which is arranged on the base 21. The first slide rail 41 is provided with a first limiting unit 411. The second slide rail 42 is slidably connected to the first slide rail 41 and is provided with a second limiting unit 421. As shown in the Fig. As shown in Figures 6 to 8, the second limiting unit 421 can move between a locked and unlocked position. When the second limiting unit 421 is in the locked position, the first limiting unit 411 and the second limiting unit 421 can mutually block each other in one sliding direction of the second slide rail 42. When the second limiting unit 421 is in the unlocked position, the first limiting unit 411 and the second limiting unit 421 do not block each other in the sliding direction, and the base 21 can be removed from the main body 10. This allows the multiple sampling assemblies 20 to be easily disassembled and assembled for replacement, repair, and maintenance. Preferably, a ball bearing structure is provided between the first slide rail 41 and the second slide rail 42 to ensure smooth relative sliding.In this embodiment, the second limiting unit 421 is an elastic element. When the sampling assembly 20 is pulled out relative to the main body 10, it is initially limited by the first limiting unit 411 and the second limiting unit 421 to prevent it from coming loose. When the second limiting unit 421 is moved into the unlocked position, the sampling assembly 20 can be removed. This allows for quick assembly and disassembly as well as providing protection against accidental release.

[0010] In a sampling assembly 20, the first sample inlet manifold 24 is arranged transversely to the slide rail assembly 40 on the base 21. The multiple inlet valves 22 are arranged parallel to the first sample inlet manifold 24 on one side of the base 21. The valve manifold 23 is located between the first sample inlet manifold 24 and the inlet valves 22. The sample inlet valve 25 and the pre-sample inlet valve 26 are located on the side of the first sample inlet manifold 24 opposite the inlet valves 22, which facilitates the distribution and connection of pipelines. The inlet valves 22, the sample inlet valve 25, and the pre-sample inlet valve 26 are all pneumatic valves and communicate with the valve manifold 23 (e.g., via multiple gas lines). The valve manifold 23 serves to connect to a gas source G1 in order to activate the multiple inlet valves 22, the sample inlet valve 25 and the pre-sample inlet valve 26.The gas monitoring system 1 further comprises a shunt tube 50, which is arranged on the main body 10. The shunt tube 50 is connected between the gas source G1 and the valve manifold 23 of each sampling assembly 20 in order to selectively actuate the inlet valves 22, the sample inlet valve 25 and the pre-sample inlet valve 26 by supplying gas.

[0011] The gas monitoring system 1 further comprises a sample inlet pump 60 and a second sample inlet distributor 70, which is arranged on the main body 10. The second sample inlet distributor 70 has several second inlet nozzles 71 and at least one second outlet nozzle 72. The sample inlet valve 25 of each sampling assembly 20 is connected to one of the second inlet nozzles 71. The sample inlet pump 60 is connected between the at least one second outlet nozzle 72 and the detection device 30. The gas monitoring system 1 further comprises a pre-sample inlet pump 80 and a pre-sample inlet distributor 90, which is arranged on the main body 10. The pre-sample inlet distributor 90 has several third inlet nozzles 91 and at least one third outlet nozzle 92. The pre-sample inlet valve 26 of each sampling assembly 20 is connected to one of the third inlet nozzles 91. The pre-test inlet pump 80 is connected to at least one third outlet nozzle 92.

[0012] As in Fig.Figure 10 shows that when the sample inlet pump 60 is activated and the valve manifold 23 of one of the sampling assemblies 20 opens an inlet valve 22 and the sample inlet valve 25, the gas S1 to be measured flows successively through the inlet valve 22, the first sample inlet distributor 24, the sample inlet valve 25, the second sample inlet distributor 70, and the sample inlet pump 60 to be introduced into the detection device 30 for detection. Simultaneously, the pre-sample inlet pump 80 can be activated. The valve manifold 23 of another sampling assembly 20 opens an inlet valve 22 and the pre-sample inlet valve 26. This causes the gas S2 to be measured to flow successively through the inlet valve 22, the first sample inlet distributor 24, the pre-sample inlet valve 26, the pre-sample inlet distributor 90, and the pre-sample inlet pump 80, and is discharged into an external chamber. This draws the gas S2 to be measured into the first sample inlet distributor 24.Once the detection device 30 has completed the previous measurement and is ready to perform the next one, the valve manifold 23 of the sampling assembly 20, which has completed gas aspiration, can close the pre-sample inlet valve 26 and open the sample inlet valve 25, allowing the aspirated gas S2 to enter the detection device 30 for detection. The gases S1 and S2 to be measured can be quickly and alternately supplied to different working areas, effectively increasing detection efficiency.

[0013] In this embodiment, the detection device 30 includes a time-of-flight mass spectrometer (TOF-MS) for analyzing the composition and concentration of the gases S1 and S2 to be measured. The gas monitoring system 1 further comprises a calibration unit 100, which is connected to the detection device 30. The calibration unit 100 includes a first calibration line 110 with a gas calibrator 111. The gas calibrator 111 is supplied with a standard gas G2 and a diluent gas G3 for concentration calibration of the detection device 30. More precisely, the first calibration line 110 includes a manual adjustment valve 112, a flow limiting valve 113, a pressure switch 114, a solenoid valve 115, and a filter 116, which are arranged sequentially and interconnected in the direction of flow of the diluent gas G3.These components are interconnected, for example, via gas lines, thus enabling precise adjustment of the flow rate of the diluent gas G3. The calibration unit 100 also includes a second calibration line 120, which supplies a calibration gas for zero-point calibration to ensure accurate detection. In this embodiment, both the diluent gas G3 and the calibration gas are extremely clean, dry air (XCDA).

[0014] The gas monitoring system 1 further comprises a cleaning line 130, which is connected to the detection device 30. The cleaning line 130 serves to supply a cleaning gas G4 (purge gas), for example nitrogen or an inert gas, in order to remove other gases from the gas stream within the detection device 30 and thus avoid inaccurate measurement results due to residues of the various gases S1 and S2 to be measured. In this embodiment, the manual adjustment valve 112, the flow limiting valve 113, the pressure switch 114, the solenoid valve 115, and the filter 116 are connected between the cleaning line 130, the second calibration line 120, the gas source G1, and the shunt tube 50 to ensure precise control of the airflow.

[0015] Preferably, the gas monitoring system 1 further comprises a processing unit connected to the detection device 30 and a warning unit 140 connected to it. The processing unit analyzes the detection data from the detection device 30 and determines whether it is abnormal. If the detection data is abnormal, the warning unit 140 generates a warning. The warning unit 140 can be, for example, but not exclusively, an optical or acoustic device. This allows for the rapid detection of abnormal levels of the gases S1 and S2 to be measured in different work areas, thus ensuring workplace safety and product yield. In this embodiment, the processing unit is an integral part of the detection device 30, but it can also be connected to the detection device 30 separately. Reference symbol list 1 Gas monitoring system 10 main bodies 20 Sampling assembly 21 Base 22 Inlet valve 23 Valve island 24 First Sample Entry Distributor 241 First inlet nozzle 242 First exhaust nozzle 25 Sample inlet valve 26 Pre-test inlet valve 30 Detection device 40 Slide rail assembly 41 First guide rail 411 First limiting unit 42 Second slide rail 421 Second limiting unit 50 Shunt tube 60 Sample inlet pump 70 Second Sample Entry Distributor 71 Second inlet nozzle 72 Second exhaust nozzle 80 Pre-test inlet pump 90 pre-test inlet distributors 91 Third inlet nozzle 92 Third exhaust nozzle 100 calibration units 110 First calibration line 111 Gas calibrator 112 Manual adjustment valve 113 Flow limiting valve 114 pressure switches 115 Solenoid valve 116 filters 120 Second calibration line 130 Cleaning line 140 warning unit G1 Gas source G2 Standard Gas G3 Dilution gas G4 cleaning gas S1, S2 Gas to be measured

Claims

[1] Gas monitoring system, with a main body (10); several sampling assemblies (20) which are detachably mounted on the main body (10), each sampling assembly (20) comprising a base (21), several inlet valves (22), a valve manifold (23), a first sample inlet distributor (24), a sample inlet valve (25) and a pre-sample inlet valve (26), wherein the gas (S1, S2) to be measured is supplied via the inlet valves (22), the first sample inlet distributor (24) comprising several first inlet nozzles (241) and two first outlet nozzles (242) which are connected to the first inlet nozzles (241), each first inlet nozzle (241) being connected to an inlet valve (22), the two first outlet nozzles (242) being connected to the sample inlet valve (25) and the pre-sample inlet valve (26), and wherein the valve manifold (23) is connected to the inlet valves (22), is connected to the sample inlet valve (25) and the pre-sample inlet valve (26) and controls their operation; and a detection device (30) which is arranged on the main body (10) and can be connected to an outlet of the sample inlet valve (25) of each sampling assembly (20) for the detection of the gas (S1, S2) to be measured. [2] Gas monitoring system according to claim 1, characterized by , that the inlet valves (22), the sample inlet valve (25) and the pre-sample inlet valve (26) are all pneumatic valves and communicate with the valve manifold (23), the valve manifold (23) being used to connect to a gas source (G1) to activate the multiple inlet valves (22), the sample inlet valve (25) and the pre-sample inlet valve (26). [3] Gas monitoring system according to claim 2, characterized by a shunt tube (50) arranged on the main body (10), wherein the shunt tube (50) is connected between the gas source (G1) and the valve manifolds (23) of the sampling assemblies (20). [4] Gas monitoring system according to claim 1, characterized bya sample inlet pump (60) and a second sample inlet distributor (70) arranged on the main body (10), wherein the second sample inlet distributor (70) has several second inlet nozzles (71) and at least one second outlet nozzle (72), wherein the sample inlet valve (25) of each sampling assembly (20) is connected to one of the second inlet nozzles (71), and wherein the sample inlet pump (60) is connected between the at least one second outlet nozzle (72) and the detection device (30). [5] Gas monitoring system according to claim 1, characterized bya pre-sample inlet pump (80) and a pre-sample inlet distributor (90) arranged on the main body (10), wherein the pre-sample inlet distributor (90) has several third inlet nozzles (91) and at least one third outlet nozzle (92), wherein the pre-sample inlet valve (26) of each sampling assembly (20) is connected to one of the third inlet nozzles (91), and wherein the pre-sample inlet pump (80) is connected to the at least one third outlet nozzle (92). [6] Gas monitoring system according to claim 1, characterized by a calibration unit (100) connected to the detection device (30), wherein the calibration unit (100) includes a first calibration line (110) with a gas calibrator (111), and wherein the gas calibrator (111) is supplied with a standard gas (G2) and a dilution gas (G3) for concentration calibration of the detection device (30). [7] Gas monitoring system according to claim 6, characterized by, that the calibration unit (100) further includes a second calibration line (120) which supplies a calibration gas for zero-point calibration. [8] Gas monitoring system according to claim 6, characterized by , that the first calibration line (110) has a manual adjustment valve (112), a flow limiting valve (113), a pressure switch (114), a solenoid valve (115) and a filter (116) which are arranged sequentially and connected to each other in the direction of flow of the dilution gas (G3). [9] Gas monitoring system according to claim 1, characterized byseveral slide rail assemblies (40), each slide rail assembly (40) comprising a first slide rail (41) arranged on the main body (10) and a second slide rail (42) arranged on the base (21), the first slide rail (41) being provided with a first limiting unit (411), the second slide rail (42) being slidably connected to the first slide rail (41) and being provided with a second limiting unit (421), wherein, when the second limiting unit (421) is in the locked position, the first limiting unit (411) and the second limiting unit (421) can mutually block each other in one sliding direction of the second slide rail (42), and when the second limiting unit (421) is in the unlocked position, the first limiting unit (411) and the second limiting unit (421) do not mutually block each other in the sliding direction.the base (21) can be removed from the main body (10). [10] Gas monitoring system according to claim 9, characterized by, that in a sampling assembly (20) the first sampling distributor (24) is arranged transversely to the slide rail assembly (40) on the base (21), wherein the multiple inlet valves (22) are arranged parallel to the first sample inlet distributor (24) on one side of the base (21), wherein the valve manifold (23) is located between the first sample inlet distributor (24) and the inlet valves (22), wherein the sample inlet valve (25) and the pre-sample inlet valve (26) are located on the side of the first sample inlet distributor (24) opposite the inlet valves (22); that the inlet valves (22), the sample inlet valve (25) and the pre-sample inlet valve (26) are all pneumatic valves and communicate with the valve manifold (23), the valve manifold (23) being used to connect to a gas source (G1) to activate the multiple inlet valves (22), the sample inlet valve (25) and the pre-sample inlet valve (26);that the gas monitoring system further comprises a shunt tube (50) arranged on the main body (10), the shunt tube (50) being connected between the gas source (G1) and the valve manifolds (23) of the sampling assemblies (20); that the gas monitoring system (1) further comprises a sample inlet pump (60) and a second sample inlet manifold (70) arranged on the main body (10), the second sample inlet manifold (70) having several second inlet nozzles (71) and at least one second outlet nozzle (72), the sample inlet valve (25) of each sampling assembly (20) being connected to one of the second inlet nozzles (71), and the sample inlet pump (60) being connected between the at least one second outlet nozzle (72) and the detection device (30);that the gas monitoring system (1) further comprises a pre-sample inlet pump (80) and a pre-sample inlet distributor (90) arranged on the main body (10), the pre-sample inlet distributor (90) having several third inlet nozzles (91) and at least one third outlet nozzle (92), the pre-sample inlet valve (26) of each sampling assembly (20) being connected to one of the third inlet nozzles (91), and the pre-sample inlet pump (80) being connected to the at least one third outlet nozzle (92);that when the sample inlet pump (60) is activated and the valve manifold (23) of one of the sampling assemblies (20) opens an inlet valve (22) and the sample inlet valve (25), the gas to be measured (S1) flows successively through the inlet valve (22), the first sample inlet distributor (24), the sample inlet valve (25), the second sample inlet distributor (70), and the sample inlet pump (60) to be introduced into the detection device (30) for detection, whereby the pre-sample inlet pump (80) can be activated simultaneously, wherein the valve manifold (23) of another sampling assembly (20) opens an inlet valve (22) and the pre-sample inlet valve (26), causing the gas to be measured (S2) to flow successively through the inlet valve (22), the first sample inlet distributor (24), the pre-sample inlet valve (26), and the pre-sample inlet distributor (25). (90) and the pre-test inlet pump (80) flows and is discharged into an outside space;that the gas monitoring system (1) further comprises a calibration unit (100) connected to the detection device (30), the calibration unit (100) comprising a first calibration line (110) with a gas calibrator (111), and the gas calibrator (111) being supplied with a standard gas (G2) and a dilution gas (G3) for concentration calibration of the detection device (30); that the calibration unit (100) further comprises a second calibration line (120) which supplies a calibration gas for zero-point calibration; that the first calibration line (110) comprises a manual adjustment valve (112), a flow limiting valve (113), a pressure switch (114), an electromagnetic valve (115) and a filter (116) arranged sequentially and connected to one another in the direction of flow of the dilution gas (G3);and that the gas monitoring system (1) further comprises a cleaning line (130) connected to the detection device (30), the cleaning line (130) serving to supply a cleaning gas (G4); and that the gas monitoring system (1) further comprises a processing unit connected to the detection device (30) and a warning unit (140) connected thereto, the processing unit analyzing the detection data of the detection device (30) and determining whether it is abnormal, wherein, if the detection data is abnormal, the warning unit (140) generates a warning.

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