Planar drive system and use of the planar drive system

Abstract

Planar drive system (10) comprising a stator (100) and at least one movable element (200), in particular a transport body (200), wherein the planar drive system (10) is configured to drive the at least one movable element (200) in a controlled manner relative to the stator (100), wherein: - the stator has several movable actuating magnets (26), each of which is connected to the stator (100) via an actuating element (114), the actuating element (114) being configured to change a position and / or an orientation of the actuating magnets (26) connected thereto relative to the stator (100) in a controlled manner; - comprising at least one movable element (200) comprising at least two stationary magnets (22) which are connected to the movable element (200) in such a way that the at least two stationary magnets (22) are immovable relative to the movable element (200); - the stator (100) and the at least one movable element (200) are magnetically coupled by means of the at least two stationary magnets (22) and the several actuating magnets (26); and - the planar drive system (10) is configured to drive at least one movable element (200) by means of the actuating elements (114) relative to the stator (100) by means of a controlled positioning and / or orientation of the several actuating magnets (26) of the stator (100), or - the at least one movable element (200) having several movable positioning magnets (26), each of which is connected to the movable element (200) via a positioning element (114), wherein the positioning element (114) is configured to change a position and / or an orientation of the positioning magnet (26) connected thereto relative to the movable element (200) in a controlled manner; - the stator (100) has at least two stationary magnets (22) which are connected to the stator (100) in such a way that the at least two stationary magnets (22) are immobile relative to the stator (100); - that the at least one movable element (200) and the stator (100) are magnetically coupled by means of the at least two stationary magnets (22) and the several actuating magnets (26); and - the planar drive system (10) is configured to drive at least one movable element (200) by means of the actuating element (114) relative to the stator (100) by means of a controlled positioning and / or orientation of the multiple actuating magnets (26) of the movable element (200).

Description

[0001] The present invention relates to a planar drive system. A planar drive system enables the precise and controlled movement and positioning of transported objects in a workspace that extends predominantly along a plane (planar). The movement and positioning preferably takes place in six degrees of freedom (three translational, three rotational).

[0002] The invention also relates to applications of the planar drive system. Its partly unique technical features open up a wide range of applications and enable advantageous machine concepts and solutions. State of the art

[0003] The applicant's patent application DE 10 2016 224 951 A1 describes a conveying device for the controlled, levitating movement of a transport body (e.g., a workpiece carrier) relative to a stator. In contrast to existing systems, which often exhibit limited freedom of movement and susceptibility to power failures, the conveying device enables complete magnetic levitation with six degrees of freedom (three translational degrees of freedom and three rotational degrees of freedom) according to a target specification. The conveying device comprises a stator with movably arranged actuating magnets and a transport body with fixed stationary magnets. The stator forms the basis of the system and is a stationary, predominantly flat platform on whose surface the working area extends. The position of the actuating magnets in the stator is precisely controlled by actuators with drive, sensor, and control elements.

[0004] To maximize the magnetic coupling between the magnet arrangements in the stator and the transport body, Halbach arrays are often used. A Halbach array is a special planar arrangement of permanent magnets whose field is reinforced on one side of the array and almost cancels out on the other.

[0005] By controlling the position and / or orientation of the positioning magnets, the transport body is moved and positioned without physical contact. The magnetic coupling between the positioning and stationary magnets enables the contactless transmission of forces and torques, allowing both levitation and the movement and positioning of the transport body.

[0006] A position detection unit records the current position and orientation of the transport body relative to the stator and sends this information to an electronic control unit. This unit executes an algorithm for position control. It receives a target position from a higher-level system and moves the transport body to this target position by controlling the position of the actuators, thereby exerting a target force and torque on the transport body.

[0007] The algorithm is executed cyclically and comprises several steps. Among other things, the target force and torque to be applied to the transport body are determined to minimize positional deviation. Furthermore, the actual force and torque acting on the transport body are determined using a physical model of the magnet arrangement. Finally, the target position of the actuators is calculated to minimize the difference between the actual and target forces, as well as between the actual and target torques.

[0008] An algorithm referred to as an "observer" can use the position, force and moment information available as a time series to determine the loading state of the transport body, in particular with the help of a physical model, for example the determination of the mass or the determination of the center of gravity of the transport body, including the transported goods.

[0009] The stator of the planar drive system has a modular design. A single module of the stator is called a tile. By arranging several tiles in a planar grid, a continuous planar working space for the transport elements is created above the effective surface of the tiles.

[0010] The stator can be operated in any direction relative to gravity, for example horizontally in table-mounted operation (the transport unit hovers above the stator's effective surface), vertically in wall-mounted operation (the transport unit hovers next to the stator's effective surface), or in ceiling-mounted operation (the transport unit hovers below the stator's effective surface). The planar drive system can also be operated in an accelerated frame of reference or under weightless conditions.

[0011] Another patent application, DE 10 2018 209 401 A1, filed by the applicant, describes a method for transporting goods using at least one transport body on a stator, wherein the system is brought into a safe state in the event of a power failure. The transport body and stator are equipped with permanent magnets. The permanent magnets in the stator are rotatably mounted on the axis of an actuating element. In the de-energized state, the frictional and detent forces of the actuating element are so low that the permanent magnets in the stator align themselves under the influence of the magnetic field of the transport body, thereby maximizing the attractive force between the transport body and the stator. This results in a strong attraction of the transport body to the stator, causing it to briefly land on the stator and be decelerated there by the frictional forces until it comes to a standstill.The transport object then adheres to the surface, thus preventing it from falling uncontrollably.

[0012] German patent application DE 10 2020 212 641 A1 discloses a transport device with transport bodies that are magnetically levitated and movable in six degrees of freedom above the surface of a stator, wherein an optical device for position detection is provided. The position detection device comprises at least one camera module, which is preferably integrated into the transport body, and a flat code arrangement, which is preferably mounted on the surface of the stator. The camera module captures a section of the code arrangement and determines the absolute position of the transport body relative to the stator in six degrees of freedom (X, Y, Z, rot_X, rot_Y, rot_Z). The determined position data is transmitted to the controller of the planar drive system. The controller uses this information to execute the position control algorithm and guide the transport body to the target position.

[0013] The applicant's patent application DE 10 2018 006 259 A1 discloses the use of the transport device in semiconductor manufacturing. According to the prior art, the transport device is used to transport a wafer by means of a transport body. The transport body carries or holds the wafer and is moved across a transport surface. The application enables flexible and precise wafer handling in semiconductor manufacturing through the contactless, magnetically levitated movement of the transport body.

[0014] One advantage lies in the flexible, multidimensional movement of the at least one transport body, which, unlike conventional handling systems, allows for the simultaneous transport of multiple wafers, as well as wafer overtaking and frictionless movement without particle ingress. This is achieved through magnetic levitation, which is enabled by the interaction of positioning magnets in the stator and stationary magnets on the transport body. The patent application describes various embodiments of the transport device, including different arrangements of stationary magnets on the transport body (e.g., linear, square, hexagonal, circular arrangements, Halbach arrays) and positioning magnets in the stator (e.g., regular and irregular grids, different dipole moments). Various designs of the transport body with different options for wafer fixation and retention are also presented.A detailed control procedure for the precise control of the transport bodies, based on an iterative optimization method using a force / torque model, is also presented. Overall, the paper presents a wafer transport device that enables improved handling in semiconductor manufacturing through flexible, multidimensional movement based on magnetic levitation.

[0015] Another patent application by the applicant, DE 10 2021 202 915, also discloses the use of the transport device according to the prior art for transporting wafers. The core component is a transport body that can be positioned suspended above the transport surface of a stator and has a manipulator. This manipulator, which has at least one degree of freedom, extends the functionality of the transport body by enabling the handling, positioning, fixing, processing, and / or inspection of the wafer. The system is designed for use under various environmental conditions (e.g., vacuum, cleanroom). The transport device enables complex motion sequences with high efficiency and cost-effectiveness. The combination of transport and manipulation eliminates the need for additional stationary handling equipment.The use of permanent magnets enables energy-efficient operation and reduces maintenance. The manipulator allows the payload to be processed during transport. This document discloses various embodiments of the manipulator (linear kinematics, articulated arm kinematics, kinematics with multiple degrees of freedom), different arrangements of magnets in the stator and in the transport body, and various integration options into manufacturing systems for the semiconductor industry.

[0016] Another patent application by the applicant, DE 10 2020 212 223 A1, describes a contactless transport device for the simultaneous transport of multiple payloads, in particular wafers, in a special environment (e.g., vacuum, cleanroom). The advantage lies in the combination of contactless magnetic levitation and the ability to handle and process the payloads using an integrated manipulator on the transport body. This manipulator can move the transport body over a greater distance to the process stations (e.g., by bridging airlocks) and offers additional degrees of freedom for complex motion sequences (e.g., tilting, rotating, positioning the payload). The application describes various embodiments of the system, including different arrangements of permanent magnets in the stator and the transport bodies for generating the levitation forces, as well as various methods for precise position determination (e.g.,Camera system with code arrangement). The transport units feature an encapsulated, sealed housing to ensure functionality even in demanding environments. Safety mechanisms are integrated into the system to enable safe shutdown in the event of a power failure.

[0017] The applicant's patent application DE 10 2022 209 590 A1 describes a transport body for a contactless conveying device according to the prior art. The transport body is fully levitation-capable. It comprises a mechanically rigid chassis and a housing consisting of a housing cover and a housing base, which encloses the chassis and thus protects it from external influences. All components and functions for executing movements are integrated on the chassis, for example, the permanent magnet array, at least one camera for determining the position of the transport body in all six degrees of freedom, an inertial sensor for detecting acceleration and rotation rate in three dimensions each, a coil for wireless communication, a control unit, and an energy storage device for powering the electronics.The housing and chassis are preferably circular in design, so that the outer contour of the transport body remains unchanged during rotation around its vertical axis, enabling the maneuvering of multiple transport bodies in a small area and ensuring that the maximum tilting angle is independent of the tilting direction. The transport surface on the top of the housing cover provides an application interface for the mechanical, electrical, and data connection of an application. Blind threaded holes serve for the mechanical fixing of the application, while an electrical connection provides power and a communication interface for operating the application. The application draws its power from the energy storage device on the chassis. The energy storage device can be charged via contactless inductive energy transfer.

[0018] The object of the present invention is to open up and protect further applications for the conveying device both with actuating magnets in the stator and permanent magnets in the transport body, and with actuating magnets in the transport body and permanent magnets in the stator, and to ensure its exclusive use by the applicant.

[0019] The transport device is referred to as a planar drive system in the remainder of this application. The transport body carries a payload, which is referred to as the transport object in the remainder of this application. A transport body, with or without a transport object, is referred to as a movable element in the remainder of this application. Disclosure of the invention

[0020] The planar drive system according to the invention comprises a stator and at least one movable element, in particular a transport body. The planar drive system is also configured to drive the at least one movable element in a controlled manner relative to the stator.

[0021] In a first preferred embodiment, the stator has several movably arranged actuating magnets, each of which is connected to the stator via an actuating element. The actuating element is configured to change the position and / or orientation of the associated actuating magnets relative to the stator in a controlled manner. The at least one movable element has at least two stationary magnets, which are connected to the movable element such that the at least two stationary magnets are immobile relative to the movable element. The stator and the at least one movable element are magnetically coupled by means of the at least two stationary magnets and the several actuating magnets, and the planar drive system is configured to drive the at least one movable element by means of the actuating elements relative to the stator through controlled positioning and / or orientation of the several actuating magnets of the stator.In a second preferred embodiment, the at least one movable element has several movably arranged actuating magnets, each of which is connected to the movable element via an actuating element. The actuating element is configured to change the position and / or orientation of the actuating magnet connected to it relative to the movable element in a controlled manner. The stator has at least two stationary magnets which are connected to the stator such that the at least two stationary magnets are immovable relative to the stator.In this system, at least one movable element and the stator are magnetically coupled by means of at least two stationary magnets and several actuating magnets, and the planar drive system is designed to drive the at least one movable element by means of the actuating element relative to the stator through controlled positioning and / or orientation of the several actuating magnets of the movable element.

[0022] According to the invention, the planar drive system is used in an application to transport, position, handle, or process objects. Examples include industrial applications in various sectors of the manufacturing industry, such as production engineering, automation technology, laboratory automation, process engineering, packaging technology, intralogistics, the semiconductor industry, the food industry, the pharmaceutical industry, and the chemical industry. Other applications are also conceivable, such as in research, science and education, as well as in crafts, art, and entertainment.

[0023] Depending on the application, the transport object can have different designs and functions and comprise several components. Examples of components of the transport object are: • Goods (product, assembly, component, workpiece, material, liquid, film, textile, bulk material, granules, powder, biological object); • Container (box, box, can, bottle, tray, pallet, nest, bag, pouch, bundle); • Tools and fixtures (clamping device, manipulator, end effector, machining device, dosing device, cleaning device); • Sensors and detectors (pushbuttons, distance sensors, load cells, probes, cameras); • Structural components (beam, bracket, receptacle, cover); • Electronic devices (circuit boards, controllers, cables, IT equipment); • Control elements (handle, switch, actuator, indicator element, display).

[0024] With regard to their mechanical, electrical, optical, or information technology properties and capabilities, the components can • be active or passive, • be connected to or detached from the transport platform, • be connected or separate from each other.

[0025] In a particularly preferred embodiment, the planar drive system and / or the system in which the drive system is used comprises at least one safety function. The purpose of the safety function is to protect persons, components, systems, or the environment from hazards resulting from a malfunction in the drive system or the system.

[0026] It is conceivable that the security function includes the following elements: • Elements for detecting malfunctions (e.g., sensors, diagnostic functions, condition monitoring, process control functions), • a safety controller, • Transmission paths for reporting the fault condition to the safety controller, • a shutdown device which immediately puts the system and / or drive system into a safe state upon detection of a fault.

[0027] Preferably, the aforementioned elements are implemented redundantly, for example, by means of a dual-channel design. Preferably, both channels function independently of each other and are monitored. If at least one channel fails, the safety function is triggered. This ensures that a single fault never leads to a dangerous condition.

[0028] Preferably, the planar drive system is designed with a safety function for stopping the system. For this purpose, a dual-channel input is provided (usually referred to as "Safe Torque Off", or STO for short), the activation of which immediately puts the drive system into a safe state by • the energy supply to the drive system is physically switched off, • ongoing movements are brought to a standstill and • Parts at risk of falling must be secured.

[0029] A further advantage is the so-called safe control and monitoring of the motion (usually referred to as "Safe Motion"). This involves safely limiting and monitoring the motion with regard to, for example, speed, position, energy, or torque, in order to prevent collisions and ensure safety in the workspace. The definition of safe zones within the workspace of the planar drive system is particularly advantageous. For this purpose, areas within the workspace of the drive system are marked as safe, and the moving element, for example, a transbody, must not enter these zones. Due to its novel technical features, the planar drive system offers a wide range of innovative application possibilities and configurations in the following areas. a) Transport, b) Feeding technology, c) Handling technology, d) Process execution, e) Machinery and equipment.

[0030] The following is a list of possible advantageous applications of the planar transport system in the aforementioned areas. a) Transport

[0031] The use of the planar drive system is particularly advantageous when transporting objects.

[0032] This is achieved by one or more moving elements carrying at least one transported object. For example, workpieces can be transported precisely and quickly to one or more assembly locations in a flexible and dynamic production process. In a production environment with high product variety, the sequence of assembly locations can be flexibly controlled. This is particularly advantageous for the production of customized products or small batches.

[0033] In logistics, movable elements can transport containers to loading or unloading stations.

[0034] For quality control, movable elements that serve as workpiece carriers can automatically transport workpieces to testing stations and position them precisely there.

[0035] In semiconductor manufacturing, wafers can be transported and positioned precisely and without contact using so-called cluster tools. Operating multiple moving elements simultaneously within a single system increases throughput and thus improves the system's efficiency.

[0036] Laboratory automation allows samples and reagents to be transported automatically between different analytical instruments.

[0037] During the manufacturing of pharmaceuticals, sensitive medications or vaccines can be transported gently and precisely.

[0038] Small and delicate components can be transported in an automated assembly process.

[0039] In the food industry, food products can be transported in a hygienic and controlled environment.

[0040] It is advantageous to couple several movable elements, especially transport bodies, to transport a heavy payload or a large-volume object whose weight or size exceeds the capacity of a single movable element. A software-based temporary coupling of several movable elements is conceivable, allowing them to be controlled as a convoy in a synchronized manner and without relative movement to one another. The convoy behaves like a single rigid "virtual transport body" whose position encompasses six degrees of freedom. The software-based, temporary coupling can be established and removed at any time, enabling the movable elements to be used sequentially for different purposes.

[0041] Additional software functions for coordinating the movement of multiple moving elements are advantageous, such as a master / satellite control system or fleet management for moving elements. With a master / satellite control system, one moving element acts as the master and follows a path specified by the user, while one or more satellite elements follow the master according to predefined rules. For example, the satellite elements follow the master along its path at defined intervals or in a specific formation. This enables the transport of larger or flexible objects (such as hoses, wires, films, or textiles) that cannot be handled by a single moving element.

[0042] "Fleet management for moving elements" refers to a complex scenario in which multiple moving elements, for example, 2 to 10,000 units, operate simultaneously on the transport surface. These moving elements are assigned different tasks and constraints that must be considered during task execution. For example, multiple moving elements may need to reach individual target positions in a specific sequence. A software function handles motion planning (fleet management) by calculating the paths for the moving elements and outputting them to the transport units. These paths take the predefined constraints into account, avoid collisions, and optimize the system's throughput. Fleet management utilizes so-called "Multi-Agent Path Finding" (MAPF) algorithms, which are based on mathematical optimization methods.It coordinates the movements of the moving elements, thus ensuring a smooth and efficient transport process. Dynamic path planning captures the current status of the moving elements or their environment during movement. Unforeseen events, such as obstructing objects on the path, trigger a replanning of the movement routes, enabling an appropriate response and ensuring the intended goals are achieved.

[0043] In a comprehensive production or logistics process, it may be necessary to manage the entire material flow across different transport systems and methods. The required coupling of the material flow between the planar drive system and other transport systems can be achieved in various ways. For example, the transfer of a transport object from one moving unit to a second transport system can be accomplished by at least one of the following mechanisms: gripping and setting down, moving over, pulling, pushing, sliding, shaking, dropping, spinning, blowing, or flushing. The transport object can be transferred with or without the moving element. For instance, it may be advantageous to transfer a fragile transport object together with the moving element for gentle handling, with the moving element serving as a workpiece carrier in the second transport system.For example, a robot arm or similar handling device could grasp a movable element and place it onto a second transport system (e.g., a conveyor belt, a storage and retrieval machine, or an automated guided vehicle). In this second transport system, the movable element is mechanically fixed and no longer floats; the transport body merely serves as a passive carrier for the object. This concept allows the advantages of the planar drive system (six degrees of freedom, flexibility, accuracy, etc.) to be combined with those of the second transport system (long transport distances, storage capacity, etc.). It is also conceivable that the movable element is moved from the planar drive system to a defined transfer point and then transferred to a second system (e.g., a conveyor belt or roller track).The movable element hovers above the transfer point and is then lowered by the planar drive system until it rests, for example, against the second system in a force-fit and / or form-fit manner. The second system then conveys the movable element.

[0044] The transfer of a movable element from a planar drive system to a second transport system can also be achieved by moving the entire stator or at least one stator module of the planar drive system, a so-called tile. In this process, at least one tile, which transports the movable element, is moved by another drive system to the transfer point and then transferred to the second transport system. The transport of the at least one tile can include translational and rotational movements, ensuring that the movable element is in the intended orientation at the time of transfer.

[0045] If the second transport system is also a planar drive system, the transfer can be carried out entirely while suspended. This allows for a particularly gentle and clean transfer of sensitive goods.

[0046] For example, the at least one moving tile acts as a "lift" that transports the movable element vertically between a first and a second planar drive system, with the two drive systems located at different height levels. The moving tile either forms an independent third planar drive system or is alternately assigned to the first or the second planar drive system. b) Feeding technology

[0047] The planar drive system also finds numerous advantageous applications in feeding technology, e.g. for palletizing / depalletizing, order picking or for feeding bulk materials according to various principles (e.g. vibratory bowl feeder, centrifuge).

[0048] The use of the moving elements of the planar transport system as feeding units enables flexible and efficient feeding processes that can be quickly adapted to the respective applications by changing software, parameters or modular hardware.

[0049] Moving elements with integrated kinematics and a gripper, for example, pick up parts from a pallet and place them at the assembly point. Several moving elements can work simultaneously on one pallet to achieve a high throughput of parts (high-speed palletizing / depalletizing).

[0050] A pallet is transported on a moving element. This allows for quick pallet changes. If both the pallet and the gripper are transported on separate moving elements, the entire palletizing function can be moved as a unit and, for example, positioned near the assembly point to minimize transport distances and assembly times.

[0051] In another application, one or more moving elements, equipped with kinematics and a gripper, load a picking pallet with the required parts. This enables flexible and automated picking of individual parts.

[0052] Another method utilizes the moving element for singulating and feeding bulk material parts. A moving element hurls small parts upwards with a sudden lifting motion. A camera checks the orientation of the parts after they land on the moving element. Correctly oriented parts are automatically removed. The process is repeated until all parts have been fed.

[0053] The planar drive system, for example, takes on the function of a vibratory bowl conveyor. A moving element carries a vibrator bowl containing bulk material. It generates periodic, jerky movements. The direction and amplitude of these movements are selected so that the bulk material particles are separated and conveyed along a vibrator track to the discharge point.

[0054] A movable element carries a centrifuge pot containing bulk material. The planar drive system generates a rotational movement of the centrifuge pot. The rotation of the pot separates the particles and transports them to the edge, from where they are removed.

[0055] Granules or powders are transported in a trough with a V-shaped outlet opening on a movable element. A vibrating motion of the element conveys the material through the outlet opening.

[0056] Another advantageous design utilizes a movable element as a rotating magazine (revolving magazine) for holding workpieces. The workpieces are arranged in receiving positions (e.g., nests, clamping devices) around the circumference of the movable element. By incrementally rotating the movable element in front of a feeding device, the revolving magazine is loaded with workpieces quickly and efficiently. The movable element then transports the workpieces and unloads them at a destination (e.g., into packaging). The use of a movable element as a revolving magazine represents an innovative and efficient solution for the transport and handling of small, lightweight workpieces in high-throughput systems, particularly in industries with stringent quality and hygiene requirements, such as the pharmaceutical industry. For example, this method can be used for the transport and handling of cylindrical glass containers (vials) in the pharmaceutical packaging industry. c) Handling technology

[0057] The planar drive system also enables a wide range of new solutions in handling technology.

[0058] In the semiconductor industry, a moving element is equipped with an end effector, a support arm typically 300-600 mm long, used to transport wafers. The wafer rests on the end effector and is transported and positioned by the moving element. This allows the wafer to be placed in or removed from the processing cavity of a process chamber, which is located to the side of the stator. The end effector bridges the distance between the stator and the processing cavity. Its flat design also enables it to remove wafers from or place them into a storage container (FOUP) where multiple wafers are stacked only a few millimeters apart.

[0059] The advantage lies in the ability to position the wafer in the process chamber without the moving element having to enter the process chamber.

[0060] The use of a gripper-mounted kinematic system on the moving element is particularly advantageous, allowing it to be used like a mobile robot arm. This expands the transport function of the moving element to include a handling function. Objects in the vicinity of the planar drive system can be grasped and manipulated.

[0061] Several movable elements can be connected via a rod kinematic system. This rod kinematic system has a Tool Center Point (TCP). The TCP has a larger working area than the individual movable elements. This allows, for example, the construction of a lifting scissor table consisting of two movable elements that operate a lifting scissor mechanism. By changing the distance between the two movable elements, the lifting scissor mechanism is actuated, thus changing the height of the TCP. The working area of ​​the scissor mechanism can exceed the working area of ​​the individual movable elements.

[0062] The planar drive system can also be used as a teleoperated system. In this case, an observer connected to the drive system via a communication line controls the movements of the moving elements.

[0063] Moving elements can share the workspace with a person. The person can collaborate with the planar drive system, with both working together to solve a task, each taking on sub-tasks. Ideally, each takes on the sub-tasks they are best at. For example, in an assembly task, the planar drive system transports the assembly parts to the workstation, while the person performs a complex joining task. This is ideal for implementing semi-automated production processes with a high degree of product variety: part mix-ups are reduced, the assembly process is standardized and secured, and efficiency is increased. d) Process execution

[0064] The use of the planar drive system is particularly advantageous in the execution of manufacturing processes.

[0065] In this process, the moving element moves the tool and / or workpiece relative to each other.

[0066] In many manufacturing processes, the relative movement of tools and workpieces is crucial. A planar drive system offers significant advantages here, as at least one tool or workpiece is positioned on a moving element. Precise control of this moving element in six degrees of freedom enables complex motion sequences.

[0067] Examples of possible applications include laser processing, dispensing of liquids or adhesives, joining of components, testing, and assembly. In laser processing, the moving element carries the workpiece, while the laser optics remain stationary or perform their own movement. This enables processes such as laser cutting, welding, drilling, structuring, and marking with high precision.

[0068] In a material application system, the moving element precisely positions the workpiece under a dispensing needle to ensure controlled application of adhesive, sealant, reagents, or liquids. A dispensing needle is a fine, hollow needle used for the precise metering and application of small quantities of liquid. It is often combined with a dispenser that delivers the liquid in a controlled manner.

[0069] When joining components, at least one component is placed on a movable element and moved relative to at least one other joining partner to enable complex joining processes with demanding paths.

[0070] During testing, the movable element positions a workpiece to be inspected within a testing process. For example, in an automated visual inspection system, a test piece is positioned in front of a camera, which captures images of the test piece and uses industrial image processing to check for defects. Application in an in-circuit test system is also conceivable, where the test piece, such as a circuit board, is automatically contacted at measuring points with electrical probes to perform electrical measurements. Precise positioning is a prerequisite for conducting the test.

[0071] Assembly is supported by the movement of the movable element in three translational and three rotational degrees of freedom. Complex positioning, joining movements, and handling steps can be automated.

[0072] The synchronous movement of a first moving element, which carries a process tool, and a second moving element, which carries the workpiece, enables process execution during transport ("on the fly"). Parallelizing transport and process times increases throughput.

[0073] A particularly advantageous implementation of the process consists of a reversal of principle: Instead of moving a complex process tool over a stationary workpiece, the workpiece is attached to a movable element and the process tool remains stationary.

[0074] All the relative movements required for the process are generated by the highly dynamic and precise movement of the moving element in all six degrees of freedom. This simplifies the design of the process stations and enables novel manufacturing methods.

[0075] This principle reversal is applied, for example, in additive manufacturing processes such as 3D printing or laser cladding (e.g., using a coaxial wire feed system). The movable element moves the component being built under the stationary print or weld head. The tilting and rotating capability of the movable element ensures that the material deposition is always aligned so that gravity does not negatively affect the melting process. This enables the production of complex geometries with large overhangs without the use of support structures.

[0076] Another example is laser processing with non-rotationally symmetric beam profiles (beam shaping). To maintain the orientation of the beam profile along a complex machining contour, the moving element not only executes the translational path movement of the workpiece under the laser optics, but also rotates simultaneously around its vertical axis to correctly track the beam profile. This replaces expensive and slow mechanical rotary axes in the scanner optics.

[0077] The system is equally advantageous for dispensing adhesives, sealants, or other liquids. The movable element positions the workpiece under the stationary dispensing needle so that the needle, due to the element's tilting motion, is always at an optimal angle to the component surface, for example, perpendicular. This ensures a uniform and reliable application of material, even on complex 3D surfaces.

[0078] Furthermore, the planar drive system enables the implementation of highly flexible process chains. Multiple moving elements can simultaneously transport different workpieces between various stationary process stations located at the edge of the stator. A workpiece can thus sequentially visit stations for material application, material removal, inspection, or assembly. The sequence is freely programmable. This flexibility also allows individual moving elements to be removed from the process flow and "parked" for process breaks, such as cooling or curing times, without interrupting the overall process for other workpieces. A fleet management system ensures collision-free and efficient control of all movements.

[0079] The movements of the moving elements can be synchronized with the movement of machines, devices, or processes that are not part of the planar drive system. For example, a cutting machine can be synchronized with a moving element so that the moving element takes over the material being cut from the cutting process in a defined manner. In another example, a moving element transports a workpiece or product to a machine and performs a time-critical operation together with the machine. The movement of the moving element is precisely synchronized with the machine's operation. For this purpose, an additional low-latency communication interface can be installed between the machine and the planar drive system.

[0080] It is conceivable that a planar drive system could perform tasks or processes in multiple work steps or variations, requiring numerous different tools in varying sequences. The tools are provided in a so-called tool station, which enables automatic tool changes and has an interface for transferring tools to a moving element. This moving element, at least one of its own, performs the various process tasks sequentially. Before each work step, it can change its tool by placing the current tool in the tool station and retrieving a new tool required for the next work step. The changeover occurs automatically, for example, through a defined positioning and movement sequence (such as a lifting-rotating motion or a bayonet fitting). This allows for the flexible automation of highly variable processes with changing tools.

[0081] The integration of additional sensors on moving parts enables comprehensive process monitoring and control. Real-time data acquisition allows for adaptive control and optimization of the production process and quality assurance. The choice of sensors depends on the specific application.

[0082] The sensors require a power supply and a communication link to the planar transport system. Both are achieved by connecting the sensor to an integrated interface on the moving element. This interface enables data exchange between the sensors and the control system, as well as a continuous power supply to the sensors.

[0083] Various sensors and detectors can be attached to the moving element to detect different parameters, for example a load cell, a temperature sensor, a push button, a light barrier, a camera, etc.

[0084] A load cell on the moving element measures the weight of a transported object. This may be necessary for process control and quality assurance, but can also be used to check that a pallet is completely loaded with goods (principle: completeness check by weighing).

[0085] A temperature sensor on the moving element measures, for example, the temperature of the transported object or the moving element itself. This can be used for process control or monitoring, particularly in heat treatment processes or when processing heat-sensitive materials.

[0086] A camera mounted on the moving element, possibly with an image processing system, enables the automatic visual inspection of objects or the transport system. This can be used for quality control, defect detection, or navigation.

[0087] Other process examples include the sorting of objects and automated sample preparation in the chemical industry.

[0088] In object sorting, objects of different sizes, shapes, or materials are transported by moving units. The objects are first detected by sensors and then classified or identified by a computer system according to their characteristics. Sorting then takes place as the moving units transport the objects to transfer points assigned to specific object classes. The objects are then released from the moving unit at the transfer point through appropriate movements.

[0089] Automated sample preparation in laboratories involves preparing numerous samples in sample containers for analysis and experiments, for example, by mixing, diluting, or adding reagents. The planar drive system automatically performs the necessary steps with the sample containers. It handles both transport and process movements. Its six degrees of freedom enable precise manipulations, such as opening and closing containers, dispensing liquids, and mixing samples. Applications can be found, for example, in biological and chemical laboratories, pharmaceutical research, and food and environmental analysis. e) Machinery and equipment

[0090] The planar drive system enables innovative machine and plant concepts that offer numerous advantages, such as the reduction of plant area and costs, the increase in adaptability, simplified setup by adapting the software or configuration parameters, increased throughput, improved economic efficiency and improved cleanliness by reducing particle pollution.

[0091] The use of a planar drive system is particularly advantageous when integrated into a process chamber.

[0092] The moving elements of the planar drive system float within a process chamber, while the tiles of the transport system remain outside. The levitation field penetrates the floor, wall, or top panel of the process chamber. This enables processes that take place under controlled environmental conditions, such as a vacuum chamber for processes under vacuum, an aseptic chamber for a sterile environment in the pharmaceutical and food industries, a low-particle chamber for the assembly of sensitive components, a liquid-filled process chamber for processes in liquids (e.g., coating, EDM, ultrasonic treatment), or a chamber for ABC applications for handling atomic, biological, or chemical substances in a closed, contamination-free environment. For applications with changing pressure conditions (e.g.,During the transition from vacuum to atmosphere, the housing of the moving element can be designed either to be gas- and liquid-tight, maintaining a nearly constant internal pressure, or to ensure pressure equalization between the interior and exterior of the housing. A pressure sensor can be integrated inside the housing for continuous monitoring of its tightness. A control unit monitors the pressure value and reports any critical deviation to the higher-level application control system, which then initiates the necessary actions.

[0093] A combination of process stations with the planar drive system is particularly advantageous in order to increase the functionality, level of automation or availability of the plant.

[0094] One possibility is a cooling station for the moving elements of a planar drive system. This station serves to cool the moving elements of the planar drive system, particularly in applications where passive cooling by convection is difficult or impossible, for example, under vacuum. Various cooling methods are conceivable, such as flowing a cooling medium around or onto the transport body, thermal contact of the transport body with a cooled surface, or replacing a heat storage element on the moving element.

[0095] A cleaning station for the outer surfaces of moving parts is also conceivable to prevent contamination of the system by contaminated moving parts. For example, mechanical, chemical, or thermal cleaning methods can be used, with dry, liquid, adhesive, or gaseous cleaning agents, or without any cleaning agent at all. Cleaning can cover the entire outer surface of the moving part or only specific areas. The moving part's own movements can facilitate the cleaning process (e.g., spin-drying, wiping, ejection) or advantageously support it. Active cleaning tools can be used, such as rotating brushes, spray mist dispensers, a vacuum cleaner for removing loose dirt, or an air shower for removing dust.

[0096] A charging station for electrically charging the moving elements is also conceivable. This station transfers the charging current to the moving elements, for example, through galvanic contact of electrical contacts on the moving element, through contactless energy transfer using induction coils, or by changing the energy storage device on the moving element.

[0097] In general, a maintenance and service station can be integrated into a system and is intended for the maintenance, repair, inspection, or removal of the moving elements of the planar drive system or its components. Examples include the inspection of a gripper, the cleaning and calibration of camera systems in the moving element, the calibration of position sensors or other sensors, and the changing, cleaning, or maintenance of tools.

[0098] The described process stations can be semi-automated or fully automated. Integrating these stations increases the functionality or level of automation of the plant, improves availability, and simplifies maintenance. This is particularly advantageous for complex and demanding industrial applications.

[0099] Further advantageous machine concepts result from the combination of several planar drive systems in different orientations (e.g., horizontal, vertical, overhead). For example, in a production plant, a first horizontally oriented stator can serve as a transport path for workpieces on horizontally moving elements, while a second vertically oriented stator serves as a transport path for process tools on vertically moving elements. Both stators are arranged in the plant so that the process tools can machine the workpieces.

[0100] Another machine concept utilizes a movable element as a rotary indexing table. Nests are arranged around the circumference of the movable element, preferably at equidistant angular intervals, each capable of holding a workpiece. Rotating the movable element by one angular increment simultaneously advances all nests to the next machining position on the rotary indexing table. Process devices are positioned at the machining stations, each performing a machining or inspection step. Simultaneous machining of multiple workpieces at different machining positions results in short cycle times and high throughput.

[0101] Another machine concept envisions the use of a planar drive system, which can feature variably adjustable gaps between the rows and columns of the tile arrangement. Machine components or process equipment can be integrated into a gap. The moving element can travel across the gap, enabling a flexible design and simplifying the integration of additional processes.

[0102] It is also conceivable to use the planar drive system in multiple layers, with each layer containing a stator with moving elements. This reduces the system footprint and increases throughput. For example, one layer could be used for transporting the moving elements to the desired position, while the return transport takes place on another layer. A tile with a "liff" function can enable the floating transfer of the moving elements between the layers.

[0103] Another machine concept incorporates an automatic cleaning function in a system with a planar drive system, utilizing at least one moving element of the planar drive system to perform the cleaning. For example, the stator surface is cleaned to reduce particle contamination and increase system availability.

[0104] A movable element carries a cleaning device designed to perform the necessary cleaning tasks. Examples of cleaning methods were mentioned in connection with the cleaning station for the movable elements.

[0105] Cleaning can be performed cyclically, on operator request, or only when contamination is detected. To determine the state and location of contamination, a stationary camera system or a camera system mounted on a moving unit that regularly scans the stator surface can be used. The tasks of contamination detection and localization, as well as the cleaning process itself, can be performed by one or more different moving elements, with a higher-level control system, such as the application control system, coordinating and monitoring the cleaning process according to a cleaning algorithm.

[0106] The stator, which is composed of several tiles, has gaps between the tiles. According to the invention, the ingress of dust and liquids into these gaps is to be prevented. An advantageous approach is to completely cover the tile surface of the planar drive system with a plate or film. This prevents the ingress of dust and liquids into the gaps between the tiles. The covering material should be non-conductive so that the energy and data transmission between the stator and the moving element is not disrupted. Examples include glass, plastic, and ceramic. The covering plate can be optically transparent to allow the reading of a dot code beneath the cover. Alternatively, the covering plate can be optically opaque and covered with a dot code to allow the reading of the dot code above the cover.In any case, the information from the dot code is used to locate the moving elements.

[0107] Adaptable manufacturing requires flexible and modular production cells that can be quickly adapted to changing product needs, quantities, and requirements. The planar drive system ideally supports the realization of flexible production cells.

[0108] In a flexible manufacturing cell, the stator serves as a universally usable transport and process surface. Docking positions for process modules and additional manufacturing cells are integrated into the stator, allowing a new production line to be quickly assembled from a stock of manufacturing cells and process modules. The system's operating software is also modular: the transport and process functions are available as applications (apps) in a library. By setting up and configuring the apps, the required functionality of the production line can be provided quickly.

[0109] By arranging multiple manufacturing cells in series, a continuous transport surface is created for the moving elements. Workpieces are moved on the system and precisely positioned in six degrees of freedom. This high degree of freedom of movement enables both complex processing steps, such as component assembly, laser processing, and automated inspection, as well as the execution of flexible process chains, allowing each product variant to undergo individual processing. Numerous variants of a product can be manufactured in a mix on a single production line. This enables the production of customized samples at the cost of mass production. The simultaneous operation of multiple moving elements parallelizes the processing of workpieces, thereby increasing throughput and improving efficiency.

[0110] The modularity of the hardware and software supports the entire lifecycle of the production line (setup, commissioning, ramp-up, operation, retooling and expansion, dismantling) and reduces investment costs, as the production cells can be reconfigured and reused after the end of the product lifecycle. Applications can be found in small-batch production and prototype construction as well as in flexible, automated production with high volumes and short cycle times.

[0111] Many other innovative applications for the planar drive system are conceivable.

[0112] A planar drive system can be advantageously used in 3D printing processes, for example, for printing plastics, metals, food products, and biomaterials (artificial organs, implants, etc.). A movable element serves as the printing platform, while the extruder is stationary. Movement in six degrees of freedom can be used to unlock new possibilities for printing complex geometries. Planar drive systems are ideally suited for automating laboratory processes and for high-throughput experimentation in the chemical industry. Moving elements transport samples, reagents, and other materials precisely and quickly between different analytical instruments and process stations. This increases efficiency and throughput.

[0113] This opens up numerous applications in science and research. For example, the precise and variable positioning of optical components on an optical bench can be simplified. Applications for vibration decoupling of an experimental platform are also conceivable, where the experimental platform is supported by at least one moving element and the control system is parameterized so that hardly any vibrations are transmitted from the stator to the experimental platform.

[0114] The planar drive system enables complete magnetic levitation with six degrees of freedom. A transport body carrying a transported object can be moved and precisely positioned according to a target specification. The novel permanent magnet operating principle results in unique features such as the simultaneous use of all six degrees of freedom, a large levitation distance, large tilt angles, safe operation in all orientations (horizontal, vertical, overhead), safe handling of the transport body, low energy consumption due to the use of permanent magnets, and the provision of a power supply and data interface on the transport body. These features open up a wide range of applications in various industries. The planar drive system performs tasks in the areas of transport, material flow, component handling and feeding, as well as process execution.Novel machine and plant concepts with technical and economic advantages become possible, and innovative manufacturing and process facilities can be realized. For example, systems that are modular and flexibly reconfigurable, systems with low energy and space requirements, high operator safety, and with transport bodies that float vertically or overhead, float in a closed process chamber, move large or heavy objects as a swarm, perform processes during transport, handle individual process chains in a highly varied production environment, and can be quickly adapted to changing requirements via software. Character description Fig. Figure 1 shows a state-of-the-art planar transport system.

[0115] Fig. Figure 1 shows a schematic representation of a prior art planar transport system 10 with associated coordinate systems 900 and 920. The depicted planar drive system 10 is arranged on a machine table 12 and comprises a stator 100 and one or more movable elements 200, in particular transport bodies. A levitation field 14, which in this case is an actively controlled magnetic field, is schematically shown between the stator 100 and the movable element 200. The levitation field 14 is generated by actuating magnets and stationary magnets (not shown) on the effective surface 102 of the stator 100, which are formed in the stator 100 and in the movable element 200, respectively. The levitation field 14 is located between the stator 100 and the movable element 200, with the movable element 200 levitating within the levitation field 14.The dashed line schematically shows an optionally attachable hermetic seal 16, which makes it possible to drive the movable element 200 inside the hermetic seal 16 with the stator 100 outside the seal. Connections 18 are also shown schematically, by means of which the planar drive system 10 can be supplied with electrical energy and through which communication data can be transmitted and / or sent.

[0116] While Fig. Figure 1A shows a planar drive system 10 according to the state of the art in table operation, i.e. arranged in a plane or resting on a surface, so that the movable element 200 is accelerated by the gravitational force 940 in the direction of the stator 100. Fig.Figure 1B describes a planar drive system 10 for wall operation according to the prior art, in which gravity accelerates the moving element essentially parallel to the conveying surface. The magnetic coupling between the stator 100 and the moving element 200 is adjusted such that the forces for compensating gravity also act parallel to the conveying surface. The levitation field 14 prevents the moving element 200 from slipping and / or falling. If the actuating magnets and stationary magnets (not shown) have permanent magnets, a safe landing of the moving element 200 can be achieved even if the supply of electrical power is interrupted.

[0117] The position and orientation of the moving element relative to the stator can be represented in a stator coordinate system 900, which is defined by an x-direction 902, a y-direction 904, and a z-direction 906. The moving element has its own coordinate system 920, which is defined by an x1-direction 922, a y1-direction 924, and a z1-direction 926, and has a roll angle 932, a pitch angle 934, and a yaw angle 936.

[0118] The planar drive system 10 is preferably controlled in such a way that the movable element 200 stably levitates and is guided on a predetermined target curve with respect to translation and rotation. QUOTES INCLUDED IN THE DESCRIPTION

[0000] This list of documents cited by the applicant was automatically generated and is included solely for the reader's convenience. The list is not part of the German patent or utility model application. The DPMA accepts no liability for any errors or omissions. Cited patent literature

[0000] DE 10 2016 224 951 A1

[0003] DE 10 2018 209 401 A1

[0011] DE 10 2020 212 641 A1

[0012] DE 10 2018 006 259 A1

[0013] DE 10 2021 202 915

[0015] DE 10 2020 212 223 A1

[0016] DE 10 2022 209 590 A1

[0017]

Claims

[1] Planar drive system (10) comprising a stator (100) and at least one movable element (200), in particular a transport body (200), wherein the planar drive system (10) is configured to drive the at least one movable element (200) in a controlled manner relative to the stator (100), wherein: - the stator has several movable actuating magnets (26), each of which is connected to the stator (100) via an actuating element (114), the actuating element (114) being configured to change a position and / or an orientation of the actuating magnets (26) connected thereto relative to the stator (100) in a controlled manner; - comprising at least one movable element (200) comprising at least two stationary magnets (22) which are connected to the movable element (200) in such a way that the at least two stationary magnets (22) are immovable relative to the movable element (200); - the stator (100) and the at least one movable element (200) are magnetically coupled by means of the at least two stationary magnets (22) and the several actuating magnets (26); and - the planar drive system (10) is configured to drive at least one movable element (200) by means of the actuating elements (114) relative to the stator (100) by means of a controlled positioning and / or orientation of the several actuating magnets (26) of the stator (100), or - the at least one movable element (200) having several movable positioning magnets (26), each of which is connected to the movable element (200) via a positioning element (114), wherein the positioning element (114) is configured to change a position and / or an orientation of the positioning magnet (26) connected thereto relative to the movable element (200) in a controlled manner; - the stator (100) has at least two stationary magnets (22) which are connected to the stator (100) in such a way that the at least two stationary magnets (22) are immobile relative to the stator (100); - that the at least one movable element (200) and the stator (100) are magnetically coupled by means of the at least two stationary magnets (22) and the several actuating magnets (26); and - the planar drive system (10) is configured to drive at least one movable element (200) by means of the actuating element (114) relative to the stator (100) by means of a controlled positioning and / or orientation of the multiple actuating magnets (26) of the movable element (200). [2] Planar drive system according to claim 1, wherein the drive system comprises safety functions that include at least one of the following features such as • Elements for detecting malfunctions, such as sensors, diagnostic functions, or condition monitoring functions, • Secure transmission paths for reporting the fault condition to a safety controller, such as dual-channel or redundant transmission paths, • a safety controller, • a shutdown device which immediately puts the drive system into a safe state upon detection of a fault, • Have safety features such as "Safe Torque Off", "Safe Motion" or safe area monitoring. [3] Planar drive system according to claim 1 or claim 2, wherein the movable element (200) has at least one of the interfaces • Mechanical interface for attaching a device to the moving element (200), • electrical interface for supplying the device with energy, • Features a communication interface for connecting the device to the planar drive system to accommodate an application. [4] Planar drive system according to any one of claims 1 to 3, wherein the at least one movable element (200) is at least one of the components: • Goods (product, assembly, component, workpiece, material, liquid, film, textile, bulk material, granules, powder, biological object) • Container (box, box, can, bottle, tray, pallet, nest, bag, pouch, bundle) • Tools and fixtures (clamping device, manipulator, end effector, machining device, dosing device, cleaning device) • Sensors and detectors (pushbuttons, distance sensors, load cells, probes, cameras) • Structural components (beam, bracket, mount, cover) • Electronic devices (circuit boards, controllers, cables, IT equipment) • Operating elements (handle, switch, actuating device, indicator element, display) are included, and wherein these components are transported and / or positioned and / or actuated by a drive of the at least one movable element (200). [5] Planar drive system according to one of claims 1 to 4, wherein several of the movable elements (200) perform tasks in a work space and a fleet management system coordinates the operations of the movable elements (200) in time and space, so that efficient and collision-free operation is ensured and wherein several of the movable elements (200) can be temporarily coupled to transport and / or position heavy payloads or large-volume objects. [6] Planar drive system according to one of claims 1 to 5, wherein the transfer of the movable element (200) or the movable elements (200) or its components from the planar drive system to another transport system can be realized by at least one of the following mechanisms: Grasping and setting down, passing over, pulling, pushing, sliding, shaking, dropping, spinning, blowing or rinsing and wherein the transferred movable element (200) or movable elements (200) is conveyed by the second conveying system in a form-fitting or force-fitting or suspended manner. [7] Planar drive system according to claim 6, wherein the planar drive system is a first planar drive system and the further transport system is a second planar drive system, wherein the at least one movable element (200) is transferred from the first planar drive system to the second planar drive system, wherein the transfer is carried out by at least one of the auxiliary devices • Handling device, • Lifting / swivel device, • Sliding device, • Device for moving the modules of the drive system (tiles) is realized and the orientation (horizontal, vertical, overhead) of the planar drive systems can vary. [8] Use of the planar drive system according to any one of claims 1 to 7 for feeding components, wherein the feeding of the components with the movable element (200) by • Transport of a component, a supply of parts or a container for components such as a pallet, container, magazine, • Picking up a component at a transfer position or from a parts supply, • Placing a component at a transfer position or in a parts supply, • Testing and selection of a component, • Picking of components, • Singling, conveying or reorienting of at least one component by shaking, sliding, tipping, spinning or similar mechanisms. [9] Use of the planar drive system according to one of claims 1 to 7 for storing components, wherein the movable element (200) is configured to receive components into a storage container (container, pallet, magazine, nest, clamping device) and / or to release components from the storage container, wherein the storage locations are preferably arranged linearly or in a circular shape as a revolver magazine on the movable element (200). [10] Use of the planar drive system according to any one of claims 1 to 7 for handling objects, wherein the at least one movable element (200) is connected to at least one of the handling devices • End effector for transporting a substrate, wherein the end effector can project laterally beyond the moving element (200) to handle substrates located next to the planar drive system, • Grippers with different operating mechanisms such as jaw grippers, suction grippers, magnetic grippers, adhesion grippers, adaptive grippers, • Kinematics with at least one degree of freedom, • Equipped with an additional device to assist handling. [11] Use of the planar drive system according to any one of claims 1 to 7 for handling objects, wherein several of the movable elements (200) jointly perform a handling function by means of synchronized movements. [12] Use of the planar drive system according to claims 1 to 7 in a semi-automatic application, wherein a person controls the movement of at least one movable element (200) from a distance using control elements or a person shares the workspace with the at least one movable element (200) and performs collaborative work with the movable element (200). [13] Use of the planar drive system according to any one of claims 1 to 7 for carrying out a manufacturing process such as assembly, joining, measuring, testing, adjusting, primary forming, shaping, separating, coating, working, dispensing, laser processing, wherein the at least one movable element (200) engages at least one of the process partners • workpiece, • Tool, • Process device, • Feeding device, • Sensor encompasses and moves relative to a second process partner. [14] Use of the planar drive system according to claim 13 for carrying out a manufacturing process, wherein all process partners are guided synchronously by the moving elements (200) in order to jointly carry out a manufacturing process and simultaneously perform a transport movement, in particular as “processing on the fly”. [15] Use of the planar drive system according to claim 13 or claim 14 for carrying out a manufacturing process, wherein at least one process partner is a sensor that monitors and / or controls the execution of the process, for example a load cell, a temperature sensor, a push button, a light barrier or a camera. [16] Use of the planar drive system according to any one of claims 1 to 7 for handling tools, wherein the at least one movable element (200) moves into a so-called tool station to automatically remove, change or deposit tools. [17] Use of the planar drive system according to claim 16, wherein the tool station comprises a mechanism for automated tool transfer based on a clamping function or a lifting-rotating movement, in particular a bayonet lock. [18] Use of the planar drive system according to claims 1 to 7 for handling and processing liquid or powdered substances such as reagents by mixing, dispensing, shaking, vibrating, stirring, for example in the food, pharmaceutical, packaging or laboratory automation industries. [19] Use of the planar drive system according to any one of claims 1 to 7 for integration into a process chamber such as a vacuum chamber, an aseptic chamber, a liquid or gas-filled chamber, a low particle load chamber or a chamber for ABC applications, wherein the at least one movable element (200) moves levitating within the process chamber and the tiles are attached to the outside of the transport system so that the levitation field penetrates the chamber wall. [20] Use of the planar drive system according to any one of claims 1 to 7 in a system, wherein the at least one movable element (200) can enter a station of the system which performs at least one of the following functions: cooling, cleaning, maintenance, electrical charging, inspection, repair, calibration, storage or insertion and removal of movable elements (200). [21] Use of several planar drive systems according to one of claims 1 to 7 in a plant, wherein these jointly perform tasks in the area of ​​transport, handling, feeding or process execution and wherein the planar drive systems can have different orientations (horizontal, vertical, overhead). [22] Use of several planar drive systems according to one of claims 1 to 7 in a system, wherein the planar drive systems are arranged in several planes one above the other. [23] Use of the planar drive system according to one of claims 1 to 7, wherein the at least one movable element (200) is used as a rotary indexing table which has nests which are preferably arranged on a circular circumference in equidistant angular steps and the nests can each hold a workpiece, so that a rotation of the movable element (200) by an angular step size simultaneously transports the nests to the next position of the rotary indexing table and while simultaneously work steps can be carried out on the workpieces stored in the rotary indexing table. [24] Use of the planar drive system according to any one of claims 1 to 7, wherein existing gaps between the modules of the planar drive system or at the edge of the planar drive system are used for the integration of machine parts or process equipment. [25] Use of the planar drive system according to any one of claims 1 to 7 with an automatic cleaning function, wherein the at least one movable element (200) carries a cleaning device such as • Brush, • Vacuum cleaner, • Wiper, • Adhesive film, • Dispenser for chemical agents for cleaning or disinfection and wherein a sensor for checking the state of contamination before and after cleaning may be provided, preferably a camera, and wherein the cleaning function may trigger cyclical cleaning or on-demand cleaning to clean selected areas of the system, in particular the stator (100). [26] Use of the planar drive system according to any one of claims 1 to 7 with protection against contamination of the stator, wherein the surface of the stator (100) is covered with a film or a plate which reduces or prevents the contamination of the stator modules by dust, liquids or foreign matter. [27] Use of the planar drive system according to any one of claims 1 to 7 in a flexible manufacturing plant in which process modules and supply modules are installed on the stator (100), modular devices are installed on the moving elements (200) and modular software functions are available for setting up and operating the plant, so that the plant can be set up, put into operation or retooled quickly and a wide range of products and variants can be produced. [28] Use of the planar drive system according to any one of claims 1 to 7 for carrying out a manufacturing process according to claim 13, wherein the workpiece is arranged on the movable element (200) and the process tool is stationary, wherein the relative motion required for the process is generated completely or predominantly by the movement of the movable element (200) in its six degrees of freedom. [29] Use of the planar drive system according to claim 28, wherein the manufacturing process is an additive manufacturing process, in particular 3D printing or laser cladding, and the movable element (200) tilts or rotates the workpiece during material deposition to optimize the orientation of the workpiece relative to gravity. [30] Use of the planar drive system according to claim 28, wherein the manufacturing process is laser processing with a non-rotationally symmetric beam profile and the movable element (200) rotates to keep the orientation of the beam profile relative to the processing path constant. [31] Use of the planar drive system according to any one of claims 1 to 7, wherein several stationary process stations are arranged at the edge of the stator (100) and at least one movable element (200) transports a workpiece successively to different process stations in order to carry out a flexible, non-linear process chain, wherein the movable element (200) can position the workpiece at a parking position outside the direct process flow between the process steps for defined waiting times, in particular cooling or curing times.

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