Swivel joint assembly and positioning device with the swivel joint assembly and a linear guide device

Description

Technisches Gebiet

[0001] The invention relates to a rotary joint arrangement with a first part, a second part and a coupling device with at least one solid joint for connecting the first part and the second part, and to a positioning device comprising the rotary joint arrangement with a linear guide device. Stand der Technik

[0002] Swivel joint arrangements of the aforementioned type are generally designed such that the coupling device is configured to connect the first part and the second part via the at least one solid joint in such a way that the second part is rotatable relative to the first part about an axis of rotation extending in one direction, wherein the first part and the second part each have an extension perpendicular to the axis of rotation. A rotation of the first part relative to the second part about the axis of rotation is accompanied by an elastic deformation of the solid joint that connects the first part and the second part.

[0003] A variety of different solid-body joints of the aforementioned type are known, each consisting of a fixed end and a flexible end, wherein the fixed end and the flexible end are connected by a thin, resilient bridge, and the fixed end of the solid-body joint is, for example, intended to be connected to the first part of a revolving-joint arrangement of the aforementioned type, while the flexible end of the solid-body joint is intended to be connected to the second part of the revolving-joint arrangement.

[0004] Rotary joint arrangements of the aforementioned type are used, for example, in positioning devices for positioning a movable element, which are suitable for moving a movable element along two different directions arranged at right angles to each other with respect to a flat surface formed on a base. Such positioning devices often have two different axes arranged at right angles to each other and extending parallel to the flat surface of the base, wherein one axis is also guided on the other axis by means of guide means such that one axis is movable relative to the other axis in the longitudinal direction of the other axis.A solid-state joint in a rotary joint arrangement of the type described above is used, for example, to connect the guide elements to one axis in such a way that the guide elements are rotatable relative to that axis about a rotational axis, which, for example, extends essentially perpendicular to the flat surface of the base. In this case, the guide elements are coupled to one axis by means of the solid-state joint in such a way that the guide elements can pivot about the rotational axis at least within a certain angular range with respect to that axis, and the spatial position of the guide elements relative to that axis can thus be changed. This allows the guide elements to always be held in a predetermined spatial position with respect to the other axis, even if the spatial position of one axis relative to the other axis should change within certain tolerances.The respective tolerances regarding the spatial position of one axis relative to the other axis can be compensated for by a deformation of the rigid joint.

[0005] Such positioning devices are used, for example, in the semiconductor industry to, among other things, move semiconductor wafers into different positions during process steps for the production of microstructures on a surface of a semiconductor wafer, or to position semiconductor wafers relative to measuring devices for metrological purposes.

[0006] For example, with regard to industrial applications for carrying out process steps for the production of microstructures or for the inspection and / or metrological characterization of microstructures, there is a need for positioning devices that are suitable for moving a movable element (e.g., a platform or a table for holding an object to be positioned) in a first direction and in a second direction (i.e., two-dimensionally relative to a given plane) at the highest possible speed and, if necessary, with the highest possible acceleration (e.g., in the range of 2g or more), and for repeatedly and reproducibly positioning it in predetermined positions with high precision (i.e., with an accuracy in the sub-micrometer range).

[0007] To enable fast and precise positioning of a movable element in a first and a second direction, positioning devices of the aforementioned type often comprise a base (e.g., a block of granite) with a flat guide surface arranged parallel to a first direction and parallel to a second direction, and a movement device for moving the movable element with respect to the flat guide surface of the base. A movement device of the aforementioned type may, for example, u.a. The first motion device comprises a gantry-type assembly, which includes a gantry beam arranged above the flat guide surface and extending in the second direction at a distance from the flat guide surface, and a gantry drive for moving the gantry beam relative to the base in the first direction. The gantry beam has a first end and a second end opposite the first end. The gantry drive comprises two first linear axes extending in the first direction, each with a linear drive. The two first linear axes extending in the first direction are designed such that the linear drive of one of the two first linear axes is connected to the first end of the gantry beam, and the linear drive of the other of the two first linear axes is connected to the second end of the gantry beam.

[0008] In order to enable movement of the movable element in the first direction and in the second direction, the movable element is mounted on the gantry beam in such a way that the movable element on the gantry beam is linearly movable in the second direction, wherein the gantry beam has a second linear axis extending in the second direction with a linear drive connected to the movable element for moving the movable element in the second direction.

[0009] To enable the movable element to be repeatedly and reproducibly positioned in predetermined positions with high precision (i.e., with an accuracy in the nanometer range) relative to the guide surface of the base, it can be advantageous for many applications to mount the gantry beam of the first motion device on the base by means of air bearings when moving along the planar guide surface of the base. This ensures that, when the gantry beam moves relative to the base, opposing and relative surface areas of the gantry beam and the guide surface of the base are separated by air cushions in the area of ​​the air bearings and can therefore be moved relative to each other without contact.

[0010] With regard to many applications of positioning devices of the aforementioned type, there is a need to design such positioning devices to be "highly dynamic" so that they are suitable for moving a movable element with a high acceleration (e.g. in the range of 2g or more).In a highly dynamic positioning device of the type mentioned above, a key requirement is that the positioning device, and in particular the gantry beam of the first motion device, is deformed as little as possible due to inertia both during a large acceleration of the gantry beam by means of the linear drives of the two first linear axes in the first direction and during a large acceleration of the moving element by means of the linear drive of the second linear axis in the second direction, and therefore should exhibit the greatest possible stiffness with respect to deformation in the form of bending and / or torsion about the first direction and / or the second direction.

[0011] With regard to positioning devices of the aforementioned type, in which the gantry beam is guided at its base by means of air bearings and which are highly dynamic, designs are particularly known that have a "flat" construction, such that the two linear drives of the first linear axes are arranged as close as possible to the level of the center of mass of all parts of the positioning device moved by these two linear drives, in order to maximize the dynamic torsional stiffness (corresponding to a natural frequency) of the gantry beam. The latter is related to the fact that the greater the vertical distance (i.e.,The greater the distance (perpendicular to the flat guide surface of the base) between the force vector of the linear drives of the first two linear axes acting on the gantry beam and the center of mass of all parts of the positioning device moved by means of the linear drives of the first two linear axes, the more the gantry beam will twist during an accelerated movement in the first direction due to the inertia of the parts of the positioning device moved by means of the linear drives of the first two linear axes, which adversely increases the settling time that the gantry beam needs to return to a stable position after an acceleration of the gantry beam in the first direction.

[0012] A highly dynamic positioning device of the type mentioned above, in which the gantry beam is guided on a flat guide surface of a base by means of air bearings, is known, for example, from publication CN 113977294 A. This positioning device is designed for the precise positioning of a movable element in the form of a movable table for holding a workpiece (for example, for micro-machining the workpiece). The gantry beam of this positioning device is guided on a flat guide surface on the top of the base by means of two horizontal air bearings, one of which is located at the first end of the gantry beam to support the first end of the gantry beam on the flat guide surface of the base during movement in the first direction.The second end of the gantry beam is guided by a linear drive, and the other of the two horizontal air bearings is located at the second end of the gantry beam to support and guide the second end of the gantry beam on the flat guide surface on the top of the base during movement in the first direction. The movable table to be positioned is movable in the second direction (longitudinal direction of the gantry beam) by means of the linear drive of the second linear axis located on the gantry beam and is also supported and guided by horizontal air bearings on the flat guide surface on the top of the base. To guide the gantry beam laterally during movement in the first direction, a lateral guide surface is provided, which extends parallel to the first direction and perpendicular to the flat guide surface of the base.The lateral guide surface is positioned at approximately the same height as the gantry beam with respect to the flat guide surface on the top of the base, such that the lateral guide surface is located laterally next to the gantry beam near one of its ends, at a distance from that end. The gantry beam is guided along the lateral guide surface by means of a lateral air bearing, which is attached to a side face of the gantry beam at the end of the gantry beam located near the lateral guide surface. The arrangement of the lateral guide surface (i.e.,Positioning the air bearing laterally next to the gantry beam, near one of its ends and at a distance from that end, maximizes the dynamic bending stiffness of the gantry beam when the movable table accelerates in the second direction (corresponding to the longitudinal direction of the gantry beam). This is related to the fact that the greater the distance between the point where the gantry beam is guided on one lateral guide surface by the air bearing and the center of mass of the movable table mounted on the gantry beam, the greater the dynamic bending stiffness of the gantry beam when the movable table accelerates in the second direction.The bending moment acting on the lateral air bearing reduces the bending stiffness of the gantry beam and adversely increases the settling time required for the gantry beam to return to a stable position after the movable table has accelerated in the second direction. To compensate for tolerances and different speeds of the two linear drives of the first two linear axes during movement of the gantry beam in the first direction, the lateral air bearing is connected to one end of the gantry beam via a solid-state joint (located between the lateral air bearing and one end of the gantry beam) such that the lateral air bearing can pivot relative to the gantry beam.

[0013] The solid-state joint comprises, among other things, a relatively thin first web section, which extends essentially parallel to the second direction and parallel to a third direction that extends perpendicular to both the first and second directions. This first web section is flexible enough to exhibit low stiffness with respect to bending about an axis extending in the third direction, thus allowing the first web section of the solid-state joint to rotate the lateral air bearing relative to the gantry beam about an axis extending in the third direction. The solid-state joint also comprises a relatively thin second web section, which extends essentially parallel to both the first and second directions.This second web section is so flexible that it has low stiffness with respect to bending about an axis extending in the first direction, so that the second web section of the solid body joint allows the lateral air bearing to rotate relative to the gantry beam about an axis extending in the first direction.

[0014] The positioning device known from publication CN 113977294 A has the disadvantage that, compared to the distances over which the movable element to be positioned can be moved relative to the flat guide surface of the base by means of the respective positioning devices, it requires a relatively large amount of space (with respect to a base area parallel to the first direction and the second direction over which the respective parts of the positioning device are spatially distributed), due among other things to the spatial arrangement of the two first linear axes and the second linear axis and the spatial arrangement of the lateral air bearing for guiding the gantry beam on one lateral guide surface, which is arranged laterally next to the gantry beam near one of the ends of the gantry beam at a distance from this one end of the gantry beam.

[0015] Furthermore, in the case of the positioning device known from publication CN 113977294 A, the aforementioned solid joint forms a connection between the lateral air bearing and the gantry beam, which has a relatively low stiffness with respect to a rotation of the lateral air bearing relative to the gantry beam about an axis extending in the first direction or about an axis extending in the second direction, and also has a low stiffness with respect to a translation of the lateral air bearing relative to the gantry beam in the first direction or in the second direction.The connection formed by the solid-state joint between the lateral air bearing and the gantry beam can therefore be subjected to relatively strong deformation under mechanical stresses on the gantry beam. These stresses induce a rotation of the gantry beam relative to the lateral air bearing about an axis extending in the first direction or about an axis extending in the second direction, or a translation of the gantry beam relative to the lateral air bearing in the first or second direction. The latter is limiting in highly dynamic applications where the gantry beam is subjected to mechanical stresses of the aforementioned type, particularly when the movable table is to be moved with the highest possible acceleration in the first and / or second direction.

[0016] Another rotary joint arrangement with solid joints is known from US2003098965A1. Zusammenfassung der Erfindung

[0017] The present invention is based on the objective of avoiding the aforementioned disadvantages and creating a rotary joint arrangement which comprises a first part, a second part and a coupling device with at least one solid joint for connecting the first part and the second part such that the second part is rotatable relative to the first part about an axis of rotation extending in a first direction, wherein the coupling device in particular enables a compact arrangement of the first part and the second part with a smaller space requirement and should also ensure a relatively high stiffness of the coupling device with respect to a rotation of the first part relative to the second part about at least one direction extending perpendicular to the axis of rotation.

[0018] Furthermore, a positioning device is to be created which includes the rotary joint arrangement in combination with a linear guide device.

[0019] This problem is solved by a rotary joint arrangement with the features of claim 1 and by a positioning device with the features of claim 13.

[0020] The swivel joint arrangement comprises a first part, a second part and a coupling device with at least one solid joint for connecting the first part and the second part such that the second part is rotatable relative to the first part about an axis of rotation extending in a first direction, wherein the first part and the second part each have an extension perpendicular to the axis of rotation, and wherein the second part is arranged axially offset relative to the first part by a distance.

[0021] According to the invention, the coupling device comprises a first solid-body joint and a second solid-body joint. The first solid-body joint consists of a first elongated solid body which extends along a first plane parallel to the first direction and perpendicular to the first direction and has a longitudinal axis arranged perpendicular to the first direction, wherein the first elongated solid body has the following longitudinal sections arranged one after the other in the direction of the longitudinal axis of the first elongated solid body: a first end section forming a first end of the first elongated solid; a second end section forming a second end of the first elongated solid opposite the first end of the first elongated solid in the direction of the longitudinal axis of the first elongated solid; a middle section arranged between the first end section and the second end section of the first elongated solid; a first web section arranged between the first end section and the middle section of the first elongated solid and connected to the first end section and the middle section; a second web section arranged between the second end section and the middle section of the first elongated solid and connected to the second end section and the middle section of the first elongated solid.

[0022] The second solid body joint consists of a second elongated solid body which extends along a second plane parallel to the first direction and perpendicular to the first direction and has a longitudinal axis arranged perpendicular to the first direction, wherein the second elongated solid body has the following longitudinal sections arranged one behind the other in the direction of the longitudinal axis of the second elongated solid body: a first end section forming a first end of the second elongated solid; a second end section forming a second end of the second elongated solid opposite the first end of the second elongated solid in the direction of the longitudinal axis of the second elongated solid; a central section arranged between the first end section and the second end section of the second elongated solid; a first web section arranged between the first end section and the central section of the second elongated solid and connected to the first end section and the central section; a second web section arranged between the second end section and the central section of the second elongated solid and connected to the second end section and the central section of the second elongated solid.

[0023] The first part is connected to the second part via the first solid-body joint and the second solid-body joint such that the first end section of the first elongated solid and the second end section of the first elongated solid are rigidly connected to the second part and the middle section of the first elongated solid is rigidly connected to the first part, and that the first end section of the second elongated solid and the second end section of the second elongated solid are rigidly connected to the second part and the middle section of the second elongated solid is rigidly connected to the first part, wherein the first plane and the second plane are inclined relative to each other such that the first plane and the second plane form a common line of intersection extending parallel to the first direction.

[0024] The first web section and the second web section of the first elongated solid body of the first solid body joint each have an extension perpendicular to the first plane which is less than an extension of the first end section of the first elongated solid body perpendicular to the first plane, an extension of the second end section of the first elongated solid body perpendicular to the first plane, and an extension of the middle section of the first elongated solid body perpendicular to the first plane, such that the first web section and the second web section of the first elongated solid body are elastically deformable and the middle section of the first solid body joint is movable relative to the first end section of the first solid body joint and to the second end section of the first solid body joint.

[0025] The first web section and the second web section of the second elongated solid body of the second solid body joint each have an extension perpendicular to the second plane which is less than an extension of the first end section of the second elongated solid body perpendicular to the second plane, an extension of the second end section of the second elongated solid body perpendicular to the second plane, and an extension of the middle section of the second elongated solid body perpendicular to the second plane, such that the first web section and the second web section of the second elongated solid body are elastically deformable and the middle section of the second solid body joint is movable relative to the first end section of the second solid body joint and to the second end section of the second solid body joint.

[0026] The first part and the second part are connected by means of the first solid body joint and the second solid body joint in such a way that the second part is rotatably mounted on the first part about the common intersection line of the first plane and the second plane by means of the first solid body joint and the second solid body joint.

[0027] The use of solid joints enables frictionless and backlash-free relative movement between the first part and the second part of the rotary joint arrangement and offers a simple way to precisely controllably and reproducibly change the arrangement of the first part relative to the second part.

[0028] For the sake of simplicity, the first solid body joint and the second solid body joint can be identical, especially with regard to the shape of the solid body joints and with regard to the material from which the solid body joints are made (e.g. steel).

[0029] The coupling device, consisting of the first solid-state joint and the second solid-state hinge, ensures a connection between the first and second parts such that the common line of intersection of the first and second planes forms a virtual axis of rotation about which the first part can rotate relative to the second part. The spatial position of the axis of rotation relative to the first and second parts is therefore primarily determined by the spatial position of the first and second planes.

[0030] The pivot joint arrangement therefore offers the possibility of selecting the spatial position of the axis of rotation relative to the first part and the second part as needed: Depending on which spatial position of the axis of rotation relative to the first part and the second part is desired with regard to a specific application of the pivot joint arrangement, the spatial positions of the first solid joint and the second solid joint relative to each other and relative to the first part and the second part can be selected in order to realize the desired spatial position of the axis of rotation.

[0031] By positioning the second part axially offset from the first part by a certain distance relative to the axis of rotation, the first and second parts are arranged in a row, one behind the other, with respect to the axis of rotation. In this way, the pivot joint arrangement ensures a space-saving arrangement of the first and second parts with regard to the spatial extent of the pivot joint arrangement radially to the axis of rotation.

[0032] The first solid joint and the second solid joint of the coupling device are connected to the first part and the second part in such a way that both the two end sections (or the first end section and the second end section) of the first solid joint and the two end sections (or the first end section and the second end section) of the second solid joint are rigidly connected to the second part of the revolving joint arrangement, while both the middle section of the first solid joint and the middle section of the second solid joint are rigidly connected to the first part of the revolving joint arrangement.This design of the coupling device has the effect that when the first part moves relative to the second part, both the central section of the first solid-body joint must necessarily move relative to the two end sections of the first solid-body joint rigidly connected to the second part, and the central section of the second solid-body joint must also move relative to the two end sections of the second solid-body joint rigidly connected to the second part. The aforementioned movement of the central section of the first solid-body joint relative to the two end sections of the first solid-body joint rigidly connected to the second part requires that, during the movement of the central section of the first solid-body joint, both the first and second web sections of the first solid-body joint are elastically deformed.Accordingly, the aforementioned movement of the central section of the second solid body joint relative to the two end sections of the second solid body joint rigidly connected to the first part presupposes that during the movement of the central section of the second solid body joint, both the first web part and the second web part of the second solid body joint are elastically deformed.

[0033] The first solid joint of the coupling device is connected to the first part and the second part of the rotary joint arrangement in such a way that the first solid joint forms a connection between the first part and the second part which has a relatively low stiffness with respect to a rotation of the first part relative to the second part about the first direction and with respect to a translation of the first part relative to the second part perpendicular to the first plane (compared with a stiffness of this connection between the first part and the second part with respect to a translation of the first part relative to the second part in a direction parallel to the first plane).

[0034] Accordingly, the second solid joint of the coupling device is connected to the first part and the second part of the rotary joint arrangement in such a way that the second solid joint forms a connection between the first part and the second part which has a relatively low stiffness with respect to a rotation of the first part relative to the second part about the first direction and with respect to a translation of the first part relative to the second part perpendicular to the second plane (compared with a stiffness of this connection between the first part and the second part with respect to a translation of the first part relative to the second part in a direction parallel to the second plane).

[0035] The arrangement of the first solid body joint and the second solid body joint, in combination with each other, is intended to ensure that the first part is rotatably arranged on the second part in such a way that the arrangement of the first solid body joint and the second solid body joint, in combination with each other, has the lowest possible rotational stiffness with respect to a rotation of the first part relative to the second part about the common line of intersection of the first plane and the second plane (extending in the first direction).

[0036] The respective stiffnesses of the coupled system formed from the first part, the second part, the first solid-state joint, and the second solid-state joint, with respect to a rotation of the first part relative to the second part about the first direction, and with respect to a translation of the first part relative to the second part along an axis extending perpendicular to the first direction, or with respect to a rotation of the first part relative to the second part about an axis extending perpendicular to the first direction, depend on the arrangement of the first and second solid-state joints relative to each other and, in particular, on the magnitude of the inclination of the first plane with respect to the second plane. The magnitude of the inclination of the first plane with respect to the second plane can therefore be selected appropriately to achieve the desired stiffnesses.

[0037] The first and second solid-body joints can be designed such that their spatial extent is relatively small compared to the spatial extent of the first and second parts of the revolving-joint arrangement. Therefore, the first and second solid-body joints can be configured in such a way that their arrangement requires relatively little space and thus forms a compact connection between the first and second parts of the revolving-joint arrangement.

[0038] A minimal rotational stiffness of the arrangement of the first solid-body joint and the second solid-body joint in combination with each other with respect to a rotation of the first part relative to the second part about the first direction also has the advantage that the first part and the second part together form a system coupled by means of the first solid-body joint and the second solid-body joint, which has a low natural frequency (e.g. in the range of less than 30 Hz) with respect to a rotation of the first part relative to the second part about the first direction.The low natural frequency is advantageous in this case with regard to the dynamic behavior of the revolving joint assembly during accelerated movement of the assembly in a second and / or third direction perpendicular to the first direction, for example, with regard to the control of drives that serve to move the revolving joint assembly in a second and / or third direction perpendicular to the first direction. This advantage is relevant, for example, with regard to applications in which part of the revolving joint assembly (i.e., the first part or, alternatively, the second part of the revolving joint assembly) is guided by a linear guide such that this part is linearly movable in a second direction perpendicular to the first direction, and the respective other part (i.e.,The second part (or alternatively the first part of the rotary joint arrangement) is connected by means of several drives for moving the respective other part in the second direction. In this case, the lowest possible rotational stiffness of the arrangement of the first and second solid joints is advantageous because the multiple drives do not need to drive the respective other part perfectly synchronously, but can instead be controlled independently of each other within certain tolerances.

[0039] With regard to the dynamic behavior of the revolving joint arrangement during an accelerated movement of the revolving joint arrangement in a second and / or third direction perpendicular to the first direction, it would be advantageous, on the other hand, for the first part and the second part to jointly form a system coupled by means of the first solid joint and the second solid joint, which, during an accelerated movement of the first part and the second part in a second and / or third direction perpendicular to the first direction, each exhibits a high stiffness with respect to a translation of the first part relative to the second part in the first direction and / or in the second direction and / or in the third direction and with respect to a rotation of the first part relative to the second part about a second and / or third direction perpendicular to the first direction.A high stiffness of the coupled system formed from the first part, the second part, the first solid-state joint and the second solid-state joint with respect to a translation of the first part relative to the second part in the first direction and / or in the second direction and / or in the third direction and with respect to a rotation of the first part relative to the second part about a second and / or third direction perpendicular to the first direction enables faster control of drives for moving the rotary joint arrangement about a second and / or third direction perpendicular to the first direction, and improves the vibration behavior of the first part or the second part.of the second part during an accelerated movement of the first part and / or the second part in the first direction and during an accelerated movement of the moving element in a second and / or third direction perpendicular to the first direction, and enables a higher accuracy of positioning of the rotary joint arrangement by means of drives.

[0040] In one embodiment of the rotary joint arrangement, the first solid joint or the second solid joint is designed such that the first solid joint is symmetrical to the first plane in an undeformed state of the first solid joint, and / or the second solid joint is symmetrical to the second plane in an undeformed state of the second solid joint.

[0041] A symmetrical design of the first solid body joint or the second solid body joint allows for relatively simple manufacturing and a compact arrangement of the respective solid body joint with a small space requirement.

[0042] The arrangement of the first and second solid-body joints has the technical effect that the second part is held in a rest position relative to the first part by means of the first and second solid-body joints, such that the second part can be moved out of this rest position by a rotation relative to the first part about the common line of intersection of the first and second planes. The second part is in its rest position when the first and second solid-body joints are each in an undeformed state, so that each of the central sections of these solid-body joints is held in a stable position relative to the first and second end sections of the first and second solid-body joints, respectively.If the second part is moved from its rest position by means of a rotation relative to the first part, the web parts of the first solid body joint and the second solid body joint are elastically deformed, so that the first solid body joint and the second solid body joint together generate a restoring force acting on the second part, which counteracts the movement of the second part from its rest position.

[0043] Another embodiment of the pivot joint arrangement is designed such that: the first end section of the first elongated solid body of the first solid body joint has an extent in the first direction that is greater than the extent of the first end section of the first elongated solid body perpendicular to the first plane; and / or the second end section of the first elongated solid body of the first solid body joint has an extent in the first direction that is greater than the extent of the second end section of the first elongated solid body perpendicular to the first plane; and / or the middle section of the first elongated solid body of the first solid body joint has an extent in the first direction that is greater than the extent of the middle section of the first elongated solid body perpendicular to the first plane;and / or the first web portion of the first elongated solid body of the first solid body joint has an extent in the first direction that is greater than the extent of the first web portion of the first elongated solid body perpendicular to the first plane; and / or the second web portion of the first elongated solid body of the first solid body joint has an extent in the first direction that is greater than the extent of the second web portion of the first elongated solid body perpendicular to the first plane; and / or the first end section of the second elongated solid body of the second solid body joint has an extent in the first direction that is greater than the extent of the first end section of the second elongated solid body perpendicular to the second plane;and / or the second end section of the second elongated solid body of the second solid body joint has an extent in the first direction that is greater than the extent of the second end section of the second elongated solid body perpendicular to the second plane; and / or the middle section of the second elongated solid body of the second solid body joint has an extent in the first direction that is greater than the extent of the middle section of the second elongated solid body perpendicular to the second plane; and / or the first web portion of the second elongated solid body of the second solid body joint has an extent in the first direction that is greater than the extent of the first web portion of the second elongated solid body perpendicular to the second plane;and / or the second web part of the second elongated solid body of the second solid body joint has an extension in the first direction which is greater than the extension of the second web part of the second elongated solid body perpendicular to the second plane.;

[0044] Because of the aforementioned design of the first solid body joint or the second solid body joint, the coupling device forms a connection between the first part and the second part of the revolving joint arrangement, which has a relatively high stiffness with respect to a translation of the first part relative to the second part in the first direction (corresponding to the axis of rotation of the revolving joint arrangement) and with respect to a rotation of the first part relative to the second part about an axis which is perpendicular to the first direction.

[0045] Another embodiment of the rotary joint arrangement is characterized in that the first solid joint in an undeformed state of the first solid joint and the second solid joint in an undeformed state of the second solid joint are arranged relative to each other such that the first solid joint and the second solid joint are arranged symmetrically with respect to a third plane which extends parallel to the first direction, wherein the common line of intersection of the first plane and the second plane extends in the third plane.

[0046] In this arrangement of the first solid body joint and the second solid body joint, the first part and the second part form a system coupled by means of the coupling device, which has a particularly high stiffness with respect to a translation of the first part relative to the second part along an axis which extends parallel to the third plane and perpendicular to the first direction.

[0047] Furthermore, it is ensured that when the first part is translated relative to the second part along an axis extending parallel to the third plane and perpendicular to the first direction, the first and second solid-body joints are mechanically stressed and deformed in the same way. This prevents the coupling device from allowing the first part to rotate relative to the second part about the first direction under a mechanical load that induces a translation of the first part relative to the second part parallel to the third plane and perpendicular to the first direction. This, in turn, enables, for example, the stabilization of the spatial position of the first part relative to the second part under a dynamic load on the revolute joint arrangement that induces a translation of the first part relative to the second part of the type described above.

[0048] One embodiment of the pivot joint arrangement is designed such that the first solid joint is arranged relative to the second solid joint such that the first solid joint has a distance perpendicular to the first direction from the second solid joint. This distance can be suitably chosen to allow, for example, the first and second solid joints to be easily connected to the first and second parts of the pivot joint arrangement (for example, depending on the respective shape of the first and second parts) and, furthermore, to define the spatial position of the axis of rotation of the pivot joint arrangement as required with respect to the first and second parts.

[0049] One embodiment of the pivot joint arrangement is designed such that the second part has a first elongated cavity extending in the first direction along the first plane, and the first solid joint is arranged in the first elongated cavity such that the first solid joint extends through the first elongated cavity in the first direction at least over a portion of its extent in the first direction. Similarly, the second part can have a second elongated cavity extending in the first direction along the second plane, wherein the second solid joint is arranged in the second elongated cavity such that the second solid joint extends through the second elongated cavity in the first direction at least over a portion of its extent in the first direction.

[0050] This design of the second part allows the first and / or second solid-body joints to be integrated into the second part, so that the first and / or second solid-body joints do not protrude from the respective cavity, or at most only by a relatively small distance in the first direction. In this way, the first and second parts can be connected to each other via the first and / or second solid-body joints in such a way that the entire pivot joint assembly has a relatively low profile in the direction of the axis of rotation.

[0051] In a further development of the aforementioned embodiment, it can be provided that the first elongated cavity extends along the first plane such that a longitudinal axis of the first elongated cavity is arranged parallel to the first plane and perpendicular to the first direction, and that the first elongated cavity is laterally bounded with reference to the first plane by two opposing side walls of the second part, which each extend in the first direction parallel to the first plane and have a distance relative to each other in a direction perpendicular to the first plane.Accordingly, the second elongated cavity can be designed to extend along the second plane such that a longitudinal axis of the second elongated cavity is parallel to the second plane and perpendicular to the first direction, and the second elongated cavity is laterally bounded with respect to the second plane by two opposing side walls of the second part, each extending parallel to the second plane in the first direction and spaced apart from the other in a direction perpendicular to the second plane. The first cavity and the second cavity can each be manufactured easily and allow for simple, space-saving integration of the first solid-body joint and the second solid-body joint, respectively, into the second part.

[0052] In a further development of the aforementioned embodiment, it can be provided that the two opposing side walls of the second part, which laterally delimit the first elongated cavity with reference to the first plane, are shaped in such a way that they enclose the first end section and the second end section of the first solid body joint, so that the first end section and the second end section of the first solid body joint are positively connected to the second part.

[0053] The aforementioned shape of the side walls of the first elongated cavity makes it possible to easily create a rigid connection between the first end section of the first solid-body joint and the second part, and a rigid connection between the second end section of the first solid-body joint and the second part. For example, the side walls of the first elongated cavity can be shaped such that the first end section and the second end section of the first solid-body joint are positively locked between the side walls of the first elongated cavity along their entire lengths, respectively, in the direction of the axis of rotation of the hinge assembly.In this way, the first end section and the second end section of the first solid body joint can be connected so firmly to the second part that the first end section and the second end section of the first solid body joint cannot be deformed when the first part moves relative to the second part.

[0054] The two opposing side walls of the second part, which laterally delimit the second elongated cavity with reference to the second plane, can be shaped in such a way that they enclose the first end section and the second end section of the second solid body joint, so that the first end section and the second end section of the second solid body joint are positively connected to the second part.

[0055] The aforementioned shape of the side walls of the second elongated cavity makes it possible to easily create a rigid connection between the first end section of the second solid-body joint and the second part, and a rigid connection between the second end section of the second solid-body joint and the second part. For example, the side walls of the second elongated cavity can be shaped such that the first end section and the second end section of the second solid-body joint are each positively locked between the side walls of the second elongated cavity along their entire lengths, respectively, in the direction of the axis of rotation of the hinge assembly.In this way, the first end section and the second end section of the second solid body joint can be connected so firmly to the second part that the first end section and the second end section of the second solid body joint cannot be deformed when the first part moves relative to the second part.

[0056] The pivot joint arrangement can include one or more stop elements, which serve as mechanical stops to limit the rotation of the second part relative to the first part about the axis of rotation. For this purpose, the second part can, for example, have at least one stop element arranged such that, when the second part is in its rest position relative to the first part, the stop element is spaced away from the central section of the first solid joint. This stop element can be brought into contact with the central section of the first solid joint by rotating the second part through a predetermined maximum angle of rotation about the common intersection of the first and second planes, so that the central section of the first solid joint forms a mechanical stop for the second part, limiting its rotation.Alternatively or additionally, the second part can have at least one stop element arranged such that, when the second part is in its rest position relative to the first part, the stop element is spaced away from the central section of the second solid-body joint. This stop element can be brought into contact with the central section of the second solid-body joint by rotating the second part through a predetermined maximum angle about the common intersection of the first and second planes, so that the central section of the second solid-body joint forms a mechanical stop for the second part, limiting its rotation. In this way, mechanical overload of the first and second solid-body joints can be avoided.

[0057] In a further development of the aforementioned embodiment, it can be provided that the two opposing side walls of the second part, which laterally delimit the first elongated cavity with reference to the first plane, are shaped in such a way that they enclose the central section of the first solid-body joint, wherein the two opposing side walls of the second part, which laterally delimit the first elongated cavity with reference to the first plane, have a distance perpendicular to the first plane which is greater than an extension of the central section of the first solid-body joint perpendicular to the first plane, so that the central section of the first solid-body joint is movable relative to the second part.

[0058] The aforementioned shape of the side walls of the first elongated cavity allows the first and second parts of the hinge assembly to be rotated relative to each other about the axis of rotation, provided that the central section of the first solid joint does not abut either of the two opposing side walls of the second part that laterally delimit the first elongated cavity with respect to the first plane during the rotation of the first part relative to the second part. Each of the two opposing side walls of the second part thus forms a mechanical stop for the central section of the first solid joint and therefore limits the angle of rotation by which the first part can be rotated relative to the second part about the axis of rotation of the hinge assembly.Additionally or alternatively, it may be provided that the two opposing side walls of the second part, which laterally delimit the second elongated cavity with reference to the second plane, are shaped such that they enclose the central section of the second solid-body joint, wherein the two opposing side walls of the second part, which laterally delimit the second elongated cavity with reference to the second plane, have a distance perpendicular to the second plane which is greater than an extension of the central section of the second solid-body joint perpendicular to the second plane, so that the central section of the second solid-body joint is movable relative to the second part.

[0059] The aforementioned shape of the side walls of the first and second elongated cavities allows the first and second parts of the hinge assembly to be rotated relative to each other about the axis of rotation, provided that the central section of the second hinge does not abut either of the two opposing side walls of the second part that laterally delimit the second elongated cavity with respect to the second plane during the rotation of the first part relative to the second part. Each of the two opposing side walls of the second part that laterally delimit the second elongated cavity with respect to the second plane thus forms a mechanical stop for the central section of the second hinge and therefore limits the angle of rotation through which the first part can be rotated relative to the second part about the axis of rotation of the hinge assembly.

[0060] One embodiment of the pivot joint arrangement is designed such that the central section of the first solid joint is movable relative to the second part in a translational movement perpendicular to the first plane, and / or the central section of the first solid joint is movable relative to the second part by means of a rotation about an axis of rotation extending in the first direction. Similarly, it can be provided that the central section of the second solid joint is movable relative to the second part in a translational movement perpendicular to the second plane, and / or the central section of the second solid joint is movable relative to the second part by means of a rotation about an axis of rotation extending in the first direction.Because the central section of the first solid joint and the central section of the second solid joint are movable in the manner described above, it is ensured that the first part is rotatable relative to the second part of the revolving joint arrangement about the axis of rotation of the revolving joint arrangement extending in the first direction.

[0061] One embodiment of the swivel joint arrangement is designed such that the first plane and the second plane are inclined relative to each other in such a way that the first plane and the second plane intersect in the common line of intersection at an angle which is greater than or equal to 10° and less than or equal to 120°.

[0062] In this embodiment, it is ensured that the coupled system formed from the first part, the second part, the first solid-body joint and the second solid-body joint has a relatively low stiffness with respect to a rotation of the first part relative to the second part about the first direction and also has a relatively high stiffness with respect to a translation of the first part relative to the second part along an axis extending perpendicular to the first direction or with respect to a rotation of the first part relative to the second part about an axis extending perpendicular to the first direction, which is sufficiently high for a multitude of applications.

[0063] Accordingly, the coupled system formed from the first part, the second part, the first solid-state joint, and the second solid-state joint has a relatively low natural frequency with respect to vibrations of the coupled system that are based on a rotation of the first part relative to the second part about the first direction, and relatively high natural frequencies with respect to vibrations of the coupled system that are based on a translation of the first part relative to the second part along an axis extending perpendicular to the first direction, or on a rotation of the first part relative to the second part about an axis extending perpendicular to the first direction. This is advantageous with regard to the transient response of the reciprocating joint arrangement in dynamic applications where the reciprocating joint arrangement as a whole must be moved with high acceleration.

[0064] One embodiment can be designed such that the first plane and the second plane are inclined relative to each other in such a way that the first plane and the second plane intersect in the common line of intersection at an angle which is greater than or equal to 30° and less than or equal to 90°.

[0065] In this embodiment, it is ensured that the coupled system formed from the first part, the second part, the first solid body joint and the second solid body joint has a particularly high stiffness with respect to a translation of the first part relative to the second part along an axis extending perpendicular to the first direction or with respect to a rotation of the first part relative to the second part about an axis extending perpendicular to the first direction.

[0066] The rotary joint arrangement according to the invention can advantageously be used as an integral part of a positioning device for positioning a movable element, for example in such a way that the rotary joint arrangement serves as a support structure for the movable element to be positioned.

[0067] A corresponding positioning device can, for example, comprise a rotary joint arrangement according to the invention and a linear guide device for guiding the second part of the rotary joint arrangement, wherein the second part of the rotary joint arrangement is guided by the linear guide device such that the second part is linearly movable in a second direction, which extends perpendicular to the first direction. Because the second part of the rotary joint arrangement is guided by the linear guide device, the rotary joint arrangement as a whole can be moved in the second direction, the design of the rotary joint arrangement enabling the first part to rotate relative to the second part about the axis of rotation extending in the first direction.

[0068] Alternatively, the positioning device can have a rotary joint arrangement according to the invention and a linear guide device for guiding the first part of the rotary joint arrangement, wherein the first part of the rotary joint arrangement is guided by means of the linear guide device in such a way that the first part is linearly movable in a second direction which extends perpendicular to the first direction.

[0069] The linear guide device can be implemented using known technologies. For example, the second part can be guided on a guide surface or guide rail by means of rolling elements; alternatively, the second part can be guided on a guide surface by means of a plain bearing or air bearing.

[0070] One embodiment of the positioning device is designed such that it is equipped with at least one linear drive connected to the first part of the rotary joint assembly for moving the first part in the second direction. Multiple linear drives connected to the first part of the rotary joint assembly for moving the first part are also possible; these drives can be spatially distributed and can be controlled independently of one another. Linear motors, for example, are suitable as linear drives for the positioning device. The positioning device can, for example, be designed such that each linear drive is a linear motor. Linear drives of other designs are also suitable in principle, for example, linear drives with a lead screw or ball or roller screw drive.

[0071] A further development of the aforementioned embodiment of the positioning device comprises a base with at least one flat guide surface and / or a guide beam with at least one flat guide surface, wherein the second part is guided on the flat guide surface of the base and / or on the flat guide surface of the guide beam by means of at least one air bearing. The pivot joint arrangement ensures that the second part, together with the at least one air bearing, is rotatable relative to the first part about the axis of rotation extending in the first direction. In this way, the spatial position of the air bearing relative to the first part can be changed, for example, to compensate for tolerances regarding the arrangement of the first part relative to the flat guide surface or the guide beam. This prevents the air bearing from coming into contact with the flat guide surface or the guide beam during movement of the pivot joint arrangement in the second direction.comes into contact with the guide bar and could be damaged in the process.

[0072] Alternatively, an embodiment of the positioning device can be designed such that the first part is guided by means of the linear guide device and at least one linear drive connected to the second part of the rotary joint arrangement is provided for moving the second part in the second direction.

[0073] In a further development of this embodiment of the positioning device, the linear guide device can comprise a base with at least one flat guide surface and / or a guide beam with at least one flat guide surface, and the first part can be guided by means of at least one air bearing on the flat guide surface of the base and / or on the flat guide surface of the guide beam. Kurze Beschreibung der Zeichnungen

[0074] Further details of the invention, and in particular exemplary embodiments of the rotary joint arrangement and the positioning device according to the invention, are explained below with reference to the accompanying drawings. These show: Fig. 1 a perspective view of a rotary joint arrangement according to the invention, comprising a first part, a second part and a coupling device for connecting the first part and the second part such that the second part is rotatable relative to the first part about an axis of rotation DZ, wherein the coupling device comprises an arrangement of two solid joints, in an exploded view in which the individual parts of the rotary joint arrangement are separated from each other in the direction of the axis of rotation DZ; Fig. 2 the rotary joint arrangement according to Fig. 1 , in a side view in a direction extending perpendicular to the axis of rotation DZ; Fig. 3 the pivot joint arrangement according to Fig. 1 , in a top view in a direction extending along the axis of rotation DZ; Fig. 4A a perspective view of one of the two solid body joints according to Fig. 1 ; Fig. 4B the solid body joint according to Fig. 4A , in a top view in the direction of the axis of rotation DZ; Fig. 4C the solid body joint according to Fig. 4B , in a side view in a direction perpendicular to the in Fig. 4B The depicted symmetry plane ME1 or ME2; Fig. 5A the solid body joint according to Fig. 4A , in a top view in the direction of the axis of rotation DZ, wherein the solid joint is in an undeformed state, showing two degrees of freedom of movement of a central section of the solid joint relative to a first end section and to a second end section of the solid joint; Fig. 5B the solid joint according to Fig. 5A , in a top view in the direction of the axis of rotation DZ, wherein the solid joint is in a deformed state after a movement of the central section of the solid joint relative to the first end section and to the second end section of the solid joint according to a first degree of freedom; Fig. 5C the solid joint according to Fig. 5A , in a top view in the direction of the axis of rotation DZ, wherein the solid joint is in a deformed state after a movement of the central section of the solid joint relative to the first end section and to the second end section of the solid joint according to a second degree of freedom; Fig. 6A a perspective view of a conventional solid joint according to the prior art; Fig. 6B the conventional solid joint according to Fig. 6A , in a top view along an axis Z, in an undeformed state; Fig. 6C the conventional solid-state joint according to Fig. 6A , in a top view along an axis Z, in a deformed state; Fig. 7 the second part of the pivot joint arrangement according to Fig. 1 , in a top view in a direction Z extending along the axis of rotation DZ,; Fig. 8 the second part of the pivot joint arrangement according to Fig. 1 in a top view in a direction Z extending along the axis of rotation DZ, in an enlarged view; Fig. 9 a positioning device with a rotary joint arrangement according to Fig. 1 and a linear guide device for guiding the second part of the rotary joint assembly; Fig. 10 a perspective view of parts of the positioning device according to Fig. 9 , in an exploded view. Beschreibung von Ausführungsformen

[0075] Unless otherwise stated, the same reference symbols are used for the same elements in the figures.

[0076] The Fig. 1-3 The figures show a rotary joint arrangement DGA according to the invention in various views from different perspectives. Fig. 1 This shows the DGA pivot joint arrangement in a perspective view with reference to a [unclear] in the Fig. 1 The coordinate system shown has three (relatively orthogonal) axes X, Y, Z (X-axis, Y-axis, Z-axis), which Fig. 2 und 3 The same rotary joint arrangement DGA is shown in views from other perspectives, in particular in a (side) view perpendicular to the Z-axis (in the present example along the X-axis) and in a top view along the Z-axis.

[0077] The rotary joint arrangement DGA comprises: a first part 15, a second part 70, and a coupling device KE for connecting the first part 15 and the second part 70 such that the second part 70 is rotatable relative to the first part about a rotation axis DZ extending in a first direction Z. The design and function of the coupling device are explained in more detail below.

[0078] In the present example, the first part 15 and the second part 70 each have the shape of a cuboid. Alternatively, the first part 15 and the second part 70 could each be components of any shape.

[0079] The first part 15 and the second part 70 each have an extension perpendicular to the axis of rotation DZ, with the second part 70 being arranged axially offset to the axis of rotation DZ by a distance relative to the first part 15.

[0080] In the present example, the coupling device KE has a first solid body joint 80A and a second solid body joint 80B.

[0081] The Fig. 1 Figure 1 shows the rotary joint assembly DGA in an exploded view, in which all individual parts of the rotary joint assembly DGA – in this case the first part 15, the second part 70, and the two solid joints 80A and 80B of the coupling device KE – are separated from each other in the direction of the Z-axis. In contrast, Figure 2 shows... Fig. 2 the rotary joint arrangement DGA in a composite state in which the first part 15 and the second part 70 are connected to each other via the two solid joints 80A and 80B of the coupling device KE, which is explained in more detail below.

[0082] How Fig. 1 and 3As indicated, in the second part 70, on a side facing the first part 15, a first elongated cavity 71A and a second elongated cavity 71B are formed, which serve to accommodate the first solid body joint 80A and the second solid body joint 80B, so that (in a composite state of the rotary joint arrangement DGA) at least a section of the first solid body joint 80A extends in the first elongated cavity 71A and at least a section of the second solid body joint 80B extends in the second elongated cavity 71B.

[0083] As from Fig. 1-3 and 4AAs can be seen, the first solid body joint 80A consists of a first elongated solid body which extends along a first plane ME1 parallel to the first direction Z perpendicular to the first direction Z and has a longitudinal axis arranged perpendicular to the first direction Z, wherein the first elongated solid body has the following longitudinal sections arranged one after the other in the direction of the longitudinal axis of the first elongated solid body: a first end section E1, which forms a first end of the first elongated solid; a second end section E2, which forms a second end of the first elongated solid opposite the first end of the first elongated solid in the direction of the longitudinal axis of the first elongated solid; a central section F arranged between the first end section and the second end section of the first elongated solid; a first web section S1 arranged between the first end section E1 and the central section F of the first elongated solid and connected to the first end section E1 and the central section F; a second web section S2 arranged between the second end section E2 and the central section F and connected to the second end section E2 and the central section F of the first elongated solid.

[0084] Accordingly, the second solid body joint 80B consists of a second elongated solid body which extends along a second plane ME2 parallel to the first direction Z perpendicular to the first direction Z and has a longitudinal axis arranged perpendicular to the first direction Z, wherein the second elongated solid body has the following longitudinal sections arranged one after the other in the direction of the longitudinal axis of the second elongated solid body ( Fig. 1-3 and 4A ): a first end section E1, which forms a first end of the second elongated solid; a second end section E2, which forms a second end of the second elongated solid opposite the first end of the second elongated solid in the direction of the longitudinal axis of the second elongated solid; a central section F arranged between the first end section and the second end section of the second elongated solid; a first web section S1 arranged between the first end section E1 and the central section F of the second elongated solid and connected to the first end section E1 and the central section; a second web section S2 arranged between the second end section E2 and the central section F of the second elongated solid and connected to the second end section E2 and the central section F of the second elongated solid.

[0085] The second part 70 is connected to the first part 15 via the first solid joint 80A and the second solid joint 80B such that the first end section E1 of the first elongated solid and the second end section E2 of the first elongated solid are rigidly connected to the second part 70 and the middle section F of the first elongated solid is rigidly connected to the first part 15 and that the first end section E1 of the second elongated solid and the second end section E2 of the second elongated solid are rigidly connected to the second part 70 and the middle section F of the second elongated solid is rigidly connected to the first part 15.

[0086] The first plane ME1 and the second plane ME2 are inclined relative to each other such that the first plane ME1 and the second plane ME2 form a common line of intersection DZ extending parallel to the first direction (Z) ( Fig. 1 , 3 ).

[0087] The first web section S1 and the second web section S2 of the first elongated solid body of the first solid body joint 80A each have an extension perpendicular to the first plane ME1 which is less than an extension of the first end section E1 of the first elongated solid body perpendicular to the first plane ME1, an extension of the second end section E2 of the first elongated solid body perpendicular to the first plane ME1 and an extension of the middle section F of the first elongated solid body perpendicular to the first plane ME1, such that the first web section S1 and the second web section S2 of the first elongated solid body are elastically deformable and the middle section F of the first solid body joint 80A is movable relative to the first end section E1 of the first solid body joint 80A and to the second end section E2 of the first solid body joint 80A.

[0088] Accordingly, the first web section S1 and the second web section S2 of the second elongated solid body of the second solid body joint 80B each have an extension perpendicular to the second plane ME2 which is less than an extension of the first end section E1 of the second elongated solid body perpendicular to the second plane ME2, an extension of the second end section E2 of the second elongated solid body perpendicular to the second plane ME2 and an extension of the middle section F of the second elongated solid body perpendicular to the second plane ME2, such that the first web section S1 and the second web section S2 of the second elongated solid body are elastically deformable and the middle section F of the second solid body joint 80B is movable relative to the first end section E1 of the second solid body joint 80B and to the second end section E2 of the second solid body joint 80B.

[0089] The arrangement of the first solid body joint 80A and the second solid body joint 80B has the effect that the second part 70 is rotatably mounted on the first part 15 about the common intersection line DZ of the first plane ME1 and the second plane ME2 by means of the first solid body joint 80A and the second solid body joint 80B.

[0090] In the present example, the rotary joint arrangement DGA is designed such that the first solid joint 80A is symmetrical to the first plane ME1 in an undeformed state of the first solid joint 80A, and the second solid joint 80B is symmetrical to the second plane ME2 in an undeformed state of the second solid joint 80B. Fig. 1 , 3 and 4B ).

[0091] In the present example, the first solid body joint 80A and the second solid body joint 80B are identically designed.

[0092] In the present example, the rotary joint arrangement (DGA) is also designed such that ( Fig. 1 , 4A, 4B, 4C ): the first end section E1 of the first elongated solid body of the first solid body joint 80A has an extent h in the first direction Z which is greater than the extent t_3 of the first end section E1 of the first elongated solid body perpendicular to the first plane ME1; the second end section E2 of the first elongated solid body of the first solid body joint 80A has an extent h in the first direction Z which is greater than the extent t_3 of the second end section E2 of the first elongated solid body perpendicular to the first plane ME1; the middle section F of the first elongated solid body of the first solid body joint 80A has an extent hF in the first direction Z which is greater than the extent t_4 of the middle section F of the first elongated solid body perpendicular to the first plane ME1;the first web section S1 of the first elongated solid body of the first solid body hinge 80A has an extent h in the first direction Z which is greater than the extent t_2 of the first web section S1 of the first elongated solid body perpendicular to the first plane ME1; the second web section S2 of the first elongated solid body of the first solid body hinge 80A has an extent h in the first direction Z which is greater than the extent of the second web section S2 of the first elongated solid body perpendicular to the first plane ME1; the first end section E1 of the second elongated solid body of the second solid body hinge 80B has an extent h in the first direction Z which is greater than the extent t_3 of the first end section E1 of the second elongated solid body perpendicular to the second plane ME2;the second end section E2 of the second elongated solid body of the second solid body hinge 80B has an extent h in the first direction Z which is greater than the extent t_3 of the second end section E2 of the second elongated solid body perpendicular to the second plane ME2; the middle section F of the second elongated solid body of the second solid body hinge 80B has an extent hF in the first direction Z which is greater than the extent t_4 of the middle section F of the second elongated solid body perpendicular to the second plane ME2; the first web part S1 of the second elongated solid body of the second solid body hinge 80B has an extent h in the first direction Z which is greater than the extent t_2 of the first web part S1 of the second elongated solid body perpendicular to the second plane ME2;the second web part S2 of the second elongated solid body of the second solid body hinge 80B has an extent h in the first direction Z which is greater than the extent t_2 of the second web part S2 of the second elongated solid body perpendicular to the second plane ME2. ;

[0093] How Fig. 1 , 4A und 4B As indicated, the first web part S1 of the first solid body joint 80A and the first web part S1 of the second solid body joint 80B do not have to be designed in such a way that the extension of the first web part S1 of the first solid body joint 80A perpendicular to the first plane ME1 and the extension of the first web part S1 of the second solid body joint 80B perpendicular to the second plane ME2 are each constant over the entire extension l_2 of the first web part S1 between the first end section E1 and the middle section F along the longitudinal axis of the first solid body joint 80A and along the longitudinal axis of the second solid body joint 80B, respectively.

[0094] Accordingly, the second web part S2 of the first solid body joint 80A and the second web part S2 of the second solid body joint 80B do not have to be designed such that the extension of the second web part S2 of the first solid body joint 80A perpendicular to the first plane ME1 and the extension of the second web part S2 of the second solid body joint 80B perpendicular to the second plane ME2 are each constant over the entire extension l_2 of the second web part S2 between the second end section E2 and the middle section F along the longitudinal axis of the first solid body joint 80A and along the longitudinal axis of the second solid body joint 80B, respectively.

[0095] How Fig. 4A und 4B As indicated, in the present example, the first web part S1 of the first solid body joint 80A has a variable extension perpendicular to the first plane ME1 and the first web part S1 of the second solid body joint 80B has a variable extension perpendicular to the second plane ME2.

[0096] In the present example, the first web part S1 of the first solid body joint 80A or the first web part S1 of the second solid body joint 80B has in particular three longitudinal sections arranged one behind the other in the longitudinal direction of the solid body joint: a first thin longitudinal section G1 adjacent to the first end section E1, a second thin longitudinal section G2 adjacent to the middle section F and a middle longitudinal section connecting the first thin longitudinal section G1 and the second thin longitudinal section G2.

[0097] The first thin longitudinal section G1 and the second thin longitudinal section G2 have an extent l_1 along the longitudinal axis of the first solid body joint 80A and along the longitudinal axis of the second solid body joint 80B, respectively.

[0098] In the present example, the first thin longitudinal section G1 and the second thin longitudinal section G2 of the first solid joint 80A and the second solid joint 80B, respectively, have an extent t_1 perpendicular to the first plane ME1 and perpendicular to the second plane ME2, respectively, which is less than the extent t_2 of the middle longitudinal section connecting the first thin longitudinal section G1 and the second thin longitudinal section G2 perpendicular to the first plane ME1 and perpendicular to the second plane ME2, respectively.

[0099] Accordingly, in the present example, the second web part S2 of the first solid body joint 80A or the second web part S2 of the second solid body joint 80B has in particular three longitudinal sections arranged one behind the other in the longitudinal direction of the solid body joint: a fourth thin longitudinal section G4 bordering the second end section E2, a third thin longitudinal section G3 bordering the middle section F and a middle longitudinal section connecting the third thin longitudinal section G3 and the fourth thin longitudinal section G4.

[0100] The third thin longitudinal section G3 and the fourth thin longitudinal section G4 have an extent l_1 along the longitudinal axis of the first solid body joint 80A and along the longitudinal axis of the second solid body joint 80B, respectively.

[0101] In the present example, the third thin longitudinal section G3 and the fourth thin longitudinal section G4 of the first solid joint 80A and the second solid joint 80B, respectively, have an extent t_1 perpendicular to the first plane ME1 and perpendicular to the second plane ME2, respectively, which is less than the extent t_2 of the middle longitudinal section connecting the third thin longitudinal section G3 and the fourth thin longitudinal section G4 perpendicular to the first plane ME1 and perpendicular to the second plane ME2, respectively.

[0102] As from Fig. 3 As can be seen, in the present example the rotary joint arrangement DGA is designed such that the first solid joint 80A in an undeformed state of the first solid joint 80A and the second solid joint 80B in an undeformed state of the second solid joint 80B are arranged relative to each other such that the first solid joint 80A and the second solid joint 80B are arranged symmetrically with respect to a third plane E3, which extends parallel to the first direction Z, wherein the common line of intersection DZ of the first plane ME1 and the second plane ME2 extends in the third plane E3.This ensures that when the first part 15 is translated relative to the second part 70 along an axis which extends parallel to the third plane E3 and perpendicular to the first direction Z, the first solid body joint 80A and the second solid body joint 80B are each mechanically stressed and deformed in the same way.

[0103] In the present example, the rotary joint arrangement DGA is designed such that the first solid joint 80A is arranged relative to the second solid joint 80B such that the first solid joint 80A has a distance to the second solid joint 80B perpendicular to the first direction Z ( Fig. 3 ). As from Fig. 3 As can be seen, the first solid-body joint 80A and the second solid-body joint 80B are arranged symmetrically with respect to the third plane E3 and offset relative to each other by a distance perpendicular to the third plane E3 in the direction of the X-axis. This arrangement of the first solid-body joint 80A and the second solid-body joint 80B has the effect that the revolute joint arrangement DGA exhibits a relatively high stiffness with respect to a rotation of the second part 70 relative to the first part 15 about the Y-axis, whereby this stiffness is greater the greater the distance between the first solid-body joint 80A and the second solid-body joint 80B in the direction of the X-axis.

[0104] As from Fig. 1 and Fig. 3 As can be seen, the rotary joint arrangement DGA can be designed such that the second part 70 has a first elongated cavity 71A which extends in the first direction Z along the first plane ME1, wherein the first solid joint 80A is arranged in the first elongated cavity 71A such that the first solid joint 80A extends in the first direction Z at least over part of its extent in the first direction Z through the first elongated cavity 71A.

[0105] Accordingly, the second part 70 can have a second elongated cavity 71B which extends in the first direction Z along the second plane ME2, wherein the second solid hinge 80B is arranged in the second elongated cavity 71B such that the second solid hinge 80B extends in the first direction Z at least over part of its extent in the first direction Z through the second elongated cavity 71B.

[0106] In the present example, the first elongated cavity 71A is dimensioned such that at least the first end section E1 and the second end section E2 of the first solid-body joint 80A extend through the first elongated cavity 71A over their entire length h in the first direction Z. Similarly, the second elongated cavity 71B is dimensioned such that the first end section E1 and the second end section E2 of the second solid-body joint 80B extend through the second elongated cavity 71B over their entire length h in the first direction Z. In this case, the first solid-body joint 80A is substantially completely embedded in the first elongated cavity 71A, and the second solid-body joint 80B is completely embedded in the second elongated cavity 71B, making this embodiment of the rotary joint arrangement DGA particularly compact.

[0107] How Fig. 2 , 4A und 4C As indicated, in the present example, the extent hF of the respective central section F of the first solid body joint 80A and second solid body joint 80B in the first direction is greater than the extent h of the first end section E1 and the second end section E2.

[0108] In this case, the central section F of the first solid-body joint 80A and the central section F of the second solid-body joint 80B can project out of the first elongated cavity 71A and the second elongated cavity 71B, respectively, by a certain distance in the first direction Z on the side facing the first part 15. This is advantageous in order to be able to fasten the central section F of the first solid-body joint 80A and the central section F of the second solid-body joint 80B to a side of the first part 15 facing the second part 70 with fastening means, so that the respective central sections F of the first solid-body joint 80A and the second solid-body joint 80B are rigidly connected to the first part 15.

[0109] As from Fig. 3 , 7 und 8 As can be seen, in the present example the rotary joint arrangement DGA is designed such that the first elongated cavity 71A extends along the first plane ME1 such that a longitudinal axis of the first elongated cavity 71A is arranged parallel to the first plane ME1 and perpendicular to the first direction Z and the elongated cavity 71A is laterally bounded with reference to the first plane ME1 by two opposing side walls HSA1 and HSA2 of the second part 70, which each extend in the first direction Z parallel to the first plane ME1 and have a distance relative to each other in a direction perpendicular to the first plane ME1.

[0110] Accordingly, the pivot joint arrangement DGA is designed such that the second elongated cavity 71B extends along the second plane ME2 such that a longitudinal axis of the second elongated cavity 71B is arranged parallel to the second plane ME2 and perpendicular to the first direction Z, and the second elongated cavity 71B is laterally bounded with reference to the second plane ME2 by two opposing side walls HSB1 and HSB2 of the second part 70, which each extend in the first direction Z parallel to the second plane ME2 and have a distance relative to each other in a direction perpendicular to the second plane ME2.

[0111] As from Fig. 3 , 7 und 8 As can be seen in the present example, the two opposing side walls HSA1, HSA2 of the second part 70, which laterally delimit the first elongated cavity 71A with respect to the first plane ME1, are shaped such that they enclose the first end section E1 and the second end section E2 of the first solid-body joint 80A, so that the first end section E1 and the second end section E2 of the first solid-body joint 80A are positively connected to the second part 70. In this way, it is ensured that the first end section E1 and the second end section E2 of the first solid-body joint 80A are rigidly held to the second part 70.

[0112] Accordingly, the two opposing side walls HSB1, HSB2 of the second part 70, which laterally delimit the second elongated cavity 71B with respect to the second plane ME2, can be shaped such that they enclose the first end section E1 and the second end section E2 of the second solid-body joint 80B, so that the first end section E1 and the second end section E2 of the second solid-body joint 80B are positively connected to the second part 70. In this way, it is ensured that the first end section E1 and the second end section E2 of the second solid-body joint 80B are rigidly held to the second part 70.

[0113] The first end section E1 and the second end section E2 of the first solid joint 80A and the second solid joint 80B can be attached to the second part 70 (using conventional fasteners suitable for such a connection, e.g., screws and / or adhesives).

[0114] As from Fig. 3 , 7 und 8 As can be seen in the present example, the two opposing side walls HSA1, HSA2 of the second part 70, which laterally bound the first elongated cavity 71A with respect to the first plane ME1, are shaped such that they enclose the central section F of the first solid-body joint 80A, wherein the two side walls HSA1, HSA2 of the second part 70 have a distance perpendicular to the first plane ME1 that is greater than the extent t_4 of the central section F of the first solid-body joint 80A perpendicular to the first plane ME1. In this way, it is ensured that the central section F of the first solid-body joint 80A is movable relative to the second part 70 when the first part 15 is to be moved relative to the second part 70.

[0115] Accordingly, the two opposing side walls HSB1, HSB2 of the second part 70, which laterally delimit the second elongated cavity 71B with respect to the second plane ME2, are shaped such that they enclose the central section F of the second solid-body joint 80B, wherein the two side walls HSB1, HSB2 of the second part 70 have a distance perpendicular to the second plane ME2 which is greater than the extent t_4 of the central section F of the second solid-body joint 80B perpendicular to the second plane ME2. In this way, it is ensured that the central section F of the second solid-body joint 80B is movable relative to the second part 70 when the first part 15 is to be moved relative to the second part 70.

[0116] How Fig. 3 , 5A-5C , 7 und 8 As indicated, in the present example, the first solid-body joint 80A and the second solid-body joint 80B of the rotary joint arrangement DGA are arranged such that: the central section F of the first solid body joint 80A is movable relative to the second part 70 in a translational movement perpendicular to the first plane ME1 ( Fig. 5B ); the central section F of the first solid body joint 80A is movable relative to the second part 70 by means of a rotation about an axis of rotation extending in the first direction Z ( Fig. 5C ); the central section F of the second solid body joint 80B is movable relative to the second part 70 in a translational movement perpendicular to the second plane ME2 ( Fig. 5B ); the central section F of the second solid body joint 80A is movable relative to the second part 70 by means of a rotation about an axis of rotation extending in the first direction Z ( Fig. 5C ).

[0117] The revolute arrangement DGA can be configured such that the first plane ME1 and the second plane ME2 are inclined relative to each other such that they intersect at an angle α (hereinafter referred to as "arrangement angle α") in their common line of intersection DZ, which is greater than or equal to 10° and less than or equal to 120°. In particular, the revolute arrangement DGA can be configured such that the first plane ME1 and the second plane ME2 are inclined relative to each other such that they intersect at an angle greater than or equal to 30° and less than or equal to 90° in their common line of intersection DZ.

[0118] The respective size of the arrangement angle α is relevant for the size of the stiffnesses and the size of natural frequencies of the coupled system formed from the first part 15, the second part 70, the first solid body joint 80A and the second solid body joint 80B.

[0119] One aspect of the invention relates to the design of the solid-body joint 80A or 80B, which is rigidly connected to the second part 70 at both end sections E1 and E2, with the central section F, which is movable relative to both end sections E1 and E2 and rigidly connected to the first part 15, for coupling the second part 70 of the rotary joint assembly DGA with the first part 15 of the rotary joint assembly DGA, which is arranged axially offset relative to the second part with respect to the axis of rotation DZ (stacked construction). The desired system natural frequencies and static stiffnesses can be set by means of the design of the individual solid-body joints 80A, 80B and the arrangement angle α. The arrangement of two compact solid-body joints 80A, 80B into a functioning unit in the form of the coupling device KE is space-saving and can therefore be better integrated into the rotary joint assembly DGA.

[0120] In the case of the coupling device KE of the rotary joint arrangement DGA, the elastically deformable web sections S1 and S2 are responsible for the translational and rotational degrees of freedom. The two main degrees of freedom of the central section F of the in the Fig. 4A-4C and 5A-5C The solid body joints 80A and 80B, as depicted, represent the translation in the X-direction and the rotation about the Z-axis with respect to the point shown in the Fig. 4A-4C and 5A-5C The coordinate system shown has three (relatively orthogonal) axes X, Y, Z (X-axis, Y-axis, Z-axis). The X-axis is perpendicular to the first plane ME1 (with respect to the first solid body joint 80A) and perpendicular to the second plane ME2 (with respect to the second solid body joint 80B).

[0121] These two primary degrees of freedom are characterized by correspondingly low natural frequencies and static stiffnesses. The tertiary degree of freedom of the central section F is rotation about the Y-axis (torsion), which is significantly influenced by the length and thickness of the web sections S1 and S2. Because the two end sections E1 and E2 of the respective solid joint 80A and 80B are rigidly connected to the second part 70 on both sides, deflections of the central section F occur in conjunction with deformations of the web sections S1 and S2. These deformations each result from a combination of tensile stress and bending (for a translation of the central section F in the direction of the X-axis and a rotation of the central section F about an axis extending parallel to the Z-direction, as shown in [reference]). Fig. 5A, 5B und 5C (as shown). This results in significantly higher stiffness in all six degrees of freedom, compared to a conventional joint, which in Fig. 6A-6C is shown.

[0122] Fig. 6A-6C Figure 1 shows a conventional solid-state joint comprising a fixed end F1 connected to a first component A and a flexible end F2 connected to a second component B, which is connected to the fixed end F1 via an elastically deformable web section S1. When the flexible end F2 is mechanically loaded by a force K, it typically moves relative to the fixed end F1 such that the web section S1 is deformed by bending, but is not subjected to tensile stress. This results in a lower stiffness of the conventional solid-state joint compared to the coupling device KE of the inventive rotary joint arrangement DGA.

[0123] The rigid connection described above between the two end sections E1 and E2 of the two solid-body joints 80A and 80B with the second part 70, and the arrangement of the two solid-body joints 80A and 80B relative to each other with the arrangement angle α described above, enables a rigid connection between the end sections E1 and E2 of the two solid-body joints 80A and 80B, thereby forming a combined solid-body joint with a virtual axis of rotation DZ. The rotational degree of freedom about the virtual axis of rotation DZ arises from a combination of the two degrees of freedom of a translation of the central section F in the X-direction according to Fig. 5B and a rotation of the central section F about an axis extending parallel to the Z-direction according to Fig. 5C for each of the two solid body joints 80A and 80B.

[0124] In order to achieve the highest possible stiffness of the rotary joint arrangement DGA with respect to a rotation of the first part 15 relative to the second part 70 about the Y-axis according to Fig. 1-3 Given that it exhibits [this], it is advisable to position the two solid body joints 80A and 80B at the greatest possible distance (in the X-direction according to Fig. 1-3 The stiffness with respect to a rotation of the first part 15 relative to the second part 70 about the X-axis can be influenced by the design of the two solid joints 80A, 80B and by the arrangement angle α. The combination of two solid joints 80A and 80B arranged at an angle α, each rigidly connected at both ends to the second part 70, allows only relatively small rotations about the Z-axis due to the high stiffness of the two solid joints 80A, 80B. To protect the solid joints 80A & 80B from overload or to limit the movement of the center piece F, corresponding stops (corresponding to the side walls HSA1, HSA2, HSB1, HSB2) can be integrated into the second part 70.

[0125] In this example, the rotational stiffness about the first direction (Z-axis) between the second part 70 and the first part 15 should be kept as low as possible, while the stiffness in the Y-direction should be as high as possible. An arrangement angle α of approximately 60° offers a good compromise for this application. A parallel alignment (α = 0°) of the two solid hinges 80A, 80B leads to a significant increase in rotational stiffness about the Z-axis between the second part 70 and the first part 15, while the stiffness in the X-direction is reduced to a minimum. Conversely, an arrangement with an arrangement angle α = 180° leads to a stiffening of the system in the X-direction and a significant reduction in stiffness in the Y-direction and in the stiffness with respect to the rotations of the first part 15 relative to the second part 70 about the X- and Z-axes.

[0126] Regarding the stiffnesses and natural frequencies of the individual solid joints 80A and 80B, the following apply with reference to Fig. 4A-4C and 5A-5C the following findings: The single solid body joint 80A and 80B is essentially symmetrical with respect to the two intermediate planes XZ and YZ ( Fig. 4B The end sections E1 and E2, as well as the central section F, can vary in shape. The individual solid-state joints 80A and 80B should exhibit low static stiffness and natural frequency with respect to translation in the X-direction and rotation about an axis extending parallel to the Z-direction, while the stiffnesses and natural frequencies for translations in the Y-direction and Z-direction, and rotations about the X-direction and Y-direction, should remain as high as possible. The stiffness and natural frequency with respect to translation in the X-direction and rotation about an axis extending parallel to the Z-direction are significantly influenced by the web section thickness t_1 and the distance l_2 between one of the two end sections E1 and E2 and the central section F.The larger the distance l_2, the lower the stiffness and natural frequency with respect to translation in the X-direction and rotation about an axis parallel to the Z-direction. l_2 is generally smaller than the height h. The smaller the web thickness t_1, the lower the stiffness and natural frequency in all axial directions. The stiffness and natural frequency with respect to rotation about the Y-axis can be influenced by the web thicknesses t_1 and t_2 as well as the distance l_2. The following applies: The larger the web thicknesses t_1 and t_2, the greater the stiffness and natural frequency with respect to rotation about the Y-axis. The smaller the distance l_2, the greater the stiffness and natural frequency with respect to rotation about the Y-axis.Local thickening of the web sections S1 and S2 at t_2 significantly increases the torsional stiffness and natural frequency with respect to rotation about the Y-axis (> factor 3) and reduces the risk of instability in the Y-direction due to buckling or flexure. Stiffness (~ +50%) and natural frequency (~ +15%) also increase in the other axial directions. Stiffness and natural frequency with respect to translation in the Z-direction and rotation about an axis parallel to the X-direction are influenced by the web thickness t_1 and the height h. The greater the height h, the higher the stiffness and natural frequency with respect to translation in the Z-direction and rotation about an axis parallel to the X-direction.Preferably, the web thickness t_1, web thickness t_2, thickness t_3, the height h, and the lengths l_1 and l_2 can be selected as follows: The ratio of web thickness t_1 to height h can preferably be in the range of 1:10 to 1:30; the ratio of web thickness t_1 to web thickness t_2 can preferably be in the range of 1:2 to 1:5; the ratio of web thickness t_1 to thickness t_3 can preferably be in the range of 1:5 to 1:30; the ratio of web thickness t_1 to web length l_1 can preferably be in the range of 1:2 to 1:5; the ratio of web length l_1 to web length l_2 can preferably be less than 1.

[0127] With reference to Fig. 9 and 10 In the following, a positioning device in combination with a rotary joint arrangement DGA according to the invention is described.

[0128] The Fig. 9 and 10Figure 1 shows a positioning device 1 (or parts of this positioning device 1) for positioning a movable element 5. In the present example, the movable element 5 is designed as a movable platform or a movable table with a support surface on which, for example, an object can be placed, which is to be positioned together with the movable element 5 by means of the positioning device 1.

[0129] Fig. 9 and 10 show the positioning device 1 in a perspective view with reference to a in Fig. 9 and 10 The coordinate system shown has the three axes X, Y, Z (X-axis, Y-axis, Z-axis)

[0130] As from Fig. 10 As can be seen, the positioning device 1 comprises a base B, which can be realized, for example, as a granite plate and which, in the present example, has a flat guide surface FF on one upper side, which is parallel to a second direction (corresponding to the direction of the X-axis according to Fig. 10 , hereinafter referred to as "second direction X") and parallel to a third direction (corresponding to the direction of the Y-axis according to Fig. 1 , hereinafter referred to as "third direction Y").

[0131] The positioning device 1 is designed to move the movable element 5 parallel to the flat guide surface FF of the base B in the second direction X and / or in the third direction Y, positioning it in predetermined positions with sub-micrometer accuracy (i.e., less than 1 µm). To enable rapid positioning, the movable element 5 is designed to be moved with a relatively high acceleration (2g and more) in the second direction X and / or in the third direction Y.

[0132] For this purpose, the positioning device 1 has a first motion device 10 in gantry design, which first motion device 10 comprises a gantry beam 15 arranged above the planar guide surface FF and extending in the third direction Y at a distance from the planar guide surface FF, and a gantry drive GA for moving the gantry beam 15 relative to the base B in the second direction X. The gantry beam 15 has a longitudinal axis extending in the third direction Y and has, with respect to this longitudinal axis, a first end 15.1 and a second end 15.2 opposite the first end 15.1, wherein the gantry drive GA comprises two first linear axes X1 and X2 extending in the second direction X, each with a linear drive LMX1 and LMX2, respectively. Here, the linear drive LMX1 of the first linear axis X1 is connected to the first end 15.1 of the gantry beam 15, so that the first end 15.The second end 15.2 of the gantry beam 15 is movable in the second direction X by means of the linear drive LMX1. Similarly, the linear drive LMX2 of the other first linear axis X2 is connected to the second end 15.2 of the gantry beam 15, so that the second end 15.2 of the gantry beam 15 is also movable in the second direction X by means of the linear drive LMX2.

[0133] In the present example, the linear drives LMX1 and LMX2 are each designed as conventional linear motors. Accordingly, the linear drive LMX1 (designed as a linear motor) comprises a stator 20A extending linearly in the second direction X, which is attached to the base B, and a rotor 20B movable relative to the stator 20A in the second direction X, which is attached to the first end 15.1 of the gantry beam 15 via an adapter plate 15a. Similarly, the linear drive LMX2 (designed as a linear motor) comprises a stator 21A extending linearly in the second direction X, which is attached to the base B, and a rotor 21B movable relative to the stator 21A in the second direction X, which is attached to the second end 15.2 of the gantry beam 15 via an adapter plate 15b.

[0134] Both the stator 20A of the linear drive LMX1 and the stator 21A of the linear drive LMX2 have a substantially U-shaped profile in a cross-section perpendicular to the second direction X, with two adjacent legs that each define a gap extending in the second direction X over the entire length of the respective stator 20A or 20B, i.e., a gap SX1 in the case of stator 20A and a gap SX2 in the case of stator 21A. As is typical for conventional linear motors, stator 20A includes means for providing a static magnetic field in gap SX1 of stator 20A, and stator 21A includes means for providing a static magnetic field in gap SX2 of stator 21A.Accordingly, the rotor 20B of the linear drive LMX1 comprises a coil (not shown in the figures) that can be supplied with an alternating electric current for generating an alternating magnetic field and extends spatially such that a section 20B-1 of the rotor 20B comprising the coil of the rotor 20B projects into the gap SX1 of the stator 20A and the rotor 20B is movable in the second direction X in this gap SX1 over a distance which corresponds to the extension of the stator 20A in the second direction X.Accordingly, the rotor 21B of the linear drive LMX2 comprises a coil (not shown in the figures) that can be supplied with an alternating electrical current to generate an alternating magnetic field and extends spatially such that a section 21B-1 of the rotor 21B, encompassing the coil of the rotor 21B, projects into the gap SX2 of the stator 21A, and the rotor 21B is movable in the second direction X in this gap SX2 over a distance corresponding to the extension of the stator 21A in the second direction X. To control movement of the gantry beam 15 in the second direction X, the linear drives LMX1 and LMX2 of the two first linear axes X1 and X2, respectively, can be controlled independently of each other by means of a control device (not shown in the figures).

[0135] In order to achieve a space-saving arrangement of the two first linear axes X1 and X2, the stators of the linear drives LMX1 and LMX2 of the present embodiment of the positioning device 1 are arranged according to Fig. 1 such that both the gap SX1 of stator 20A and the gap SX2 of stator 21A, as well as both rotor 20B and rotor 21B, extend substantially parallel to a plane which is parallel to the second direction X and perpendicular to the planar guide surface FF of base B, such that both the gap SX1 of stator 20A and the gap SX2 of stator 21A, as well as both rotor 20B and rotor 21B, each have a significantly smaller extent in the third direction Y than in the direction perpendicular to the planar guide surface FF. This arrangement of the two first linear axes X1 and X2, respectively,X2 is advantageous with regard to minimizing the footprint in a plane extending parallel to the second direction X and parallel to the third direction Y, especially since each of the two linear drives LMX1 and LMX2, due to the respective designs of the stators 20A and 21A and the designs of the rotors 20B and 21B in the aforementioned arrangement, has an extent perpendicular to the planar guide surface FF that is many times (typically by more than a factor of 2) greater than the extent of the respective linear drive LMX1 or LMX2 in the third direction Y. The latter is particularly evident from the illustration of the positioning device 1 in the figure. Fig. 10 This is clearly recognizable. The aforementioned arrangement of the two first linear axes X1 and X2 therefore enables a design of the positioning device 1 which has a particularly small spatial extent in the direction of the third direction Y (corresponding to the longitudinal direction of the gantry beam 15) and is minimized in particular with regard to the arrangement of the two first linear axes X1 and X2.

[0136] As in Fig. 9 As indicated, the movable element 5 is mounted on the gantry beam 15 in such a way that the movable element 5 on the gantry beam 15 is linearly movable in the third direction Y, wherein the gantry beam 15 has a second linear axis Y1 extending in the third direction Y with a linear drive LMY connected to the movable element 5 for moving the movable element 5 in the third direction Y.

[0137] In the present example, the linear drive LMY of the second linear axis Y1 is also designed as a conventional linear motor and comprises (analogous to the design of the linear drives LMX1 and LMX2) a stator 100A extending linearly in the third direction Y, which is attached to the upper side of the gantry beam 15 and extends in the third direction Y between the first end 15.1 and the second end 15.2 over the entire length of the gantry beam 15, and a rotor 100B movable relative to the stator 100A in the third direction Y, which is attached to the movable element 5.

[0138] The stator 100A of the linear actuator LMY has a substantially U-shaped profile in a cross-section perpendicular to the third direction Y, with two adjacent legs, each of which defines a gap SY extending along the entire length of the stator 100A in the third direction Y. The stator 100A includes means for providing a static magnetic field in the gap SY of the stator 100A. Accordingly, the rotor 100B of the linear drive LMY comprises a coil (not shown in the figures) that can be supplied with an alternating electric current for generating an alternating magnetic field and extends spatially such that a section 100B-1 of the rotor 100B comprising the coil of the rotor 100B projects into the gap SY of the stator 100A and the rotor 100B is movable in the third direction Y in this gap SY over a distance which corresponds to the extension of the stator 100A in the third direction Y.To control a movement of the movable element 5 in the third direction Y, the linear drive LMY can be controlled by means of a control device (not shown in the figures).

[0139] As in Fig. 9 As indicated, the positioning device 1 comprises a first air bearing assembly LL1 with several air bearings connected to the gantry beam 15 for guiding the gantry beam on the flat guide surface FF of the base B. As shown from Fig. 9 As can be seen, the first air bearing assembly LL1 comprises a first air bearing arrangement 30, which includes at least one first horizontal air bearing arranged at the first end 15.1 of the gantry beam 15 for guiding the first end 15.1 of the gantry beam 15 on a first section FF1 of the planar guide surface FF extending in the second direction X. Additionally, the first air bearing assembly LL1 comprises a second air bearing arrangement 35, which includes at least one second horizontal air bearing arranged at the second end 15.2 of the gantry beam 15 for guiding the second end 15.2 of the gantry beam 15 on a second section FF2 of the planar guide surface FF extending in the second direction X. The respective air bearings of the first air bearing arrangement 30 and the second air bearing arrangement 35 have the task of supporting the gantry beam 15 at a section at the first end 15.1 of the gantry beam 15 and at a section at the second end 15.2 of the gantry beam 15 to support or guide on the flat guide surface FF.

[0140] As in Fig. 9 Furthermore, as indicated, the first air bearing arrangement LL1 additionally has a third air bearing arrangement 50, which comprises at least one third horizontal air bearing and at least one fourth horizontal air bearing, wherein the at least one third horizontal air bearing and the at least one fourth horizontal air bearing are arranged on a "middle section" of the gantry beam 15 between the first end 15.1 of the gantry beam 15 and the second end 15.2 of the gantry beam 15, such that the "middle section" of the gantry beam 15 is guided by means of the third horizontal air bearing and the fourth horizontal air bearing on a third section FF3 of the planar guide surface FF extending in the second direction X, which is arranged with reference to the third direction Y between the first section FF1 of the planar guide surface FF and the second section FF2 of the planar guide surface.Details of the third air bearing arrangement 50 with reference to the aforementioned at least one third horizontal air bearing and the aforementioned at least one fourth horizontal air bearing are below in connection with . Fig. 10 further explained.

[0141] In this context, the "middle section" of the gantry beam 15 shall be understood to be a longitudinal section of the gantry beam 15 extending in the third direction Y, which extends in the third direction Y over a length that is at most 50% of the extent of the gantry beam 15 in the third direction Y, and which has a distance in the third direction Y from the first end 15.1 of the gantry beam 15 and the second end 15.2 of the gantry beam 15 that is at least 25% of the extent of the gantry beam 15 in the third direction Y.

[0142] As in Fig. 9 Furthermore, as shown, a guide beam FB extending in the second direction X is arranged at the base B next to the third section FF3 of the planar guide surface FF, which has a planar side surface SF that is parallel to the second direction X and parallel to a first direction directed essentially perpendicular to the planar guide surface FF (corresponding to the direction of the Z-axis according to Fig. 9 , hereinafter referred to as "first direction Z"). Furthermore, the third air bearing arrangement 50 comprises at least one lateral air bearing arranged on the central section of the gantry beam 15 for guiding the gantry beam on one flat side surface SF of the guide beam FB. Details of the third air bearing arrangement 50 with regard to the aforementioned at least one lateral air bearing are described below in connection with Fig. 10 further explained.

[0143] As will be explained in more detail below, in the present example all air bearings of the third air bearing arrangement 50 are part of a unit-forming "assembly" attached to the gantry beam 15, which is arranged below the gantry beam 15 in a space between the gantry beam 15 and the flat guide surface FF and has the task of supporting or guiding the gantry beam 15 in the area of ​​the middle section of the gantry beam 15 by means of the horizontal air bearings of the third air bearing arrangement 50 in the area of ​​the third section FF3 of the flat guide surface FF and, in the case of movement in the second direction X, of guiding laterally by means of the at least one lateral air bearing of the third air bearing arrangement 50 on the flat side surface SF of the guide beam FB.The aforementioned assembly accordingly forms a "sliding element" GE attached to the gantry beam 15, which is designed to slide without contact on the third section FF3 of the planar guide surface FF and on the planar side surface SF of the guide beam FB in the second direction X during operation of the positioning device 1, namely on air cushions which can be generated by means of the respective horizontal air bearings of the third air bearing arrangement 50 between the sliding element GE and the third section FF3 of the planar guide surface FF, and on air cushions which can be generated by means of the respective lateral air bearings of the third air bearing arrangement 50 between the sliding element GE and the planar side surface SF of the guide beam FB.

[0144] It should be noted that each horizontal air bearing of the first air bearing assembly LL1 is preloaded with respect to the flat guide surface FF of the base B, and each lateral air bearing of the first air bearing assembly LL1 is preloaded with respect to the flat side surface SF of the guide beam FB. Similarly, each air bearing of the second air bearing assembly LL2 is preloaded with respect to one of the flat guide surfaces FFG1 or FFG2 of the gantry beam 15, or with respect to the flat side surface SFG2 of the gantry beam 15. In this example, magnetic means are used to preload the respective air bearings; these are not relevant to the present invention and will therefore not be explained in detail.

[0145] With reference to Fig. 9 and 10 Details of the GE sliding element in connection with the air bearings of the third air bearing arrangement 50 are explained below. As can be seen in particular from Fig. 10 As can be seen, the sliding element GE comprises as an essential component a support 70, which is designed to accommodate the air bearings of the third air bearing arrangement 50 and to be attached to the gantry beam 15 in order to hold the air bearings of the third air bearing arrangement 50 in predetermined positions with respect to the gantry beam 15. In the present example, the support 70 is designed as a housing which has several cavities.

[0146] In this example, support 70 has the form of a flat plate. As shown from Fig. 9 and 10 As can be seen, the support 70 is mounted on the gantry beam 15 in such a way that the support 70 extends below the gantry beam 15 in a space between the gantry beam 15 and the third section FF3 of the planar guide surface FF parallel to the planar guide surface FF of the base B and parallel to the planar side surface SF of the guide beam FB.

[0147] As from Fig. 10 As can be seen, the third air bearing arrangement 50 in the present example comprises a total of two horizontal air bearings L3 and L4, which are arranged on one of the undersides of the support 70 facing the flat guide surface FF of the base B.

[0148] As from Fig. 10 As can be seen, the two horizontal air bearings L3 and L4 are arranged relative to each other in such a way that they have a distance relative to each other in the second direction X.

[0149] As from Fig. 10 As can be seen, the third air bearing arrangement 50 in the present example comprises two lateral air bearings L1 and L2 for guiding the gantry beam 15 on the flat side surface SF of the guide beam FB, wherein the two lateral air bearings L1 and L2 are arranged relative to each other such that they have a distance relative to each other in the second direction X.

[0150] As from Fig. 10 As can be seen, two elongated, essentially cuboid-shaped cavities 71A and 71B are formed in the support 70 on a top surface of the support 70 facing the gantry beam 15. Each of these cavities has a longitudinal axis extending perpendicular to the first direction Z and parallel to the planar guide surface FF of the base B, respectively. With respect to the second direction X, the elongated cavities 71A and 71B are arranged such that they are spaced apart from each other in the second direction X. As shown in Fig. 10 As indicated, the elongated cavities 71A and 71B serve to receive a first solid-body joint 80A and a second solid-body joint 80B, respectively, wherein the first solid-body joint 80A is intended to be inserted into the cavity 71A, and the second solid-body joint 80B is intended to be inserted into the cavity 71B, and the two solid-body joints 80A and 80B are designed to establish a connection between the support 70 and the gantry beam 15 such that the sliding element GE is held in a stable position relative to the gantry beam 15 via the two solid-body joints 80A and 80B, respectively, and is also mounted on the gantry beam 15 via the two solid-body joints 80A and 80B such that the sliding element GE is rotated about an axis of rotation extending in the first direction Z relative to the Gantry beam 15 is rotatable, so that the arrangement of the two rigid joints 80A and 80A respectively80B accordingly represents a "rotary joint" which serves to connect the sliding element GE to the gantry beam 15 and to hold it movable (rotatable) on the gantry beam 15.

[0151] In the present example, the positioning device 1 is designed such that the gantry beam 15, the support 70, the first solid joint 80A and the second solid joint 80B form an embodiment of the rotary joint arrangement according to the invention.

[0152] The gantry beam 15, the support 70, the first solid-state joint 80A and the second solid-state joint 80B of the positioning device 1 correspond in particular structurally and functionally to those described in the Fig. 1-3 In the depicted rotary joint arrangement DGA: the gantry beam 15 of the positioning device 1 corresponds to the first part 15 of the rotary joint arrangement DGA, the support 70 of the positioning device 1 corresponds to the second part 70 of the rotary joint arrangement DGA, the first solid joint 80A of the positioning device 1 is identical to the first solid joint 80A of the rotary joint arrangement DGA, and the second solid joint 80B of the positioning device 1 is identical to the second solid joint 80B of the rotary joint arrangement DGA.

[0153] The elongated cavities 71A and 71B formed in the carrier 70 of the positioning device 1 for receiving the first solid joint 80A and the second solid joint 80B respectively correspond analogously to the elongated cavities 71A and 71B formed in the second part 70 of the rotary joint arrangement DGA.

[0154] The above-described construction of the support 70 enables the integration of the two rigid joints 80A and 80B into the support 70. For this purpose, the first rigid joint 80A can be inserted as a whole into the first elongated cavity 71A, so that the two end sections E1 and E2 of the first rigid joint 80A are rigidly connected to the support 70 (with conventional fasteners suitable for such a connection, e.g., with screws and / or by adhesive bonding), while the central section F of the first rigid joint 80A is rigidly connected to the gantry beam 15.

[0155] For this purpose, the second solid body joint 80B can be inserted as a whole into the second elongated cavity 71B, so that the two end sections E1 and E2 of the second solid body joint 80B are rigidly connected to the support 70 (with conventional fasteners suitable for such a connection, e.g. with screws and / or by gluing), while the middle section F of the second solid body joint 80B is rigidly connected to the gantry beam 15.

[0156] How Fig. 10 As indicated, both the first solid body joint 80A and the second solid body joint 80B each consist of an elongated solid body (e.g. made of steel) which extends along a plane parallel to the first direction Z perpendicular to the first direction Z and has a longitudinal axis arranged perpendicular to the first direction Z.

[0157] As in Fig. 1 and 10As indicated, in this context it is assumed that a first elongated solid body forming the first solid body joint 80A extends along a first plane ME1 parallel to the first direction Z and that a second elongated solid body forming the second solid body joint 80B extends along a second plane ME2 parallel to the first direction Z.

[0158] The first solid-body joint 80A and the second solid-body joint 80B are configured to hold the support 70 and the sliding element GE, respectively, in a stable rest position with respect to the gantry beam 15 when both solid-body joints 80A and 80B are in their undeformed ground state (as shown in Fig. 9 (shown). Because the first web section S1 and the second web section S2 of the first solid-body joint 80A and the first web section S1 and the second web section S2 of the second solid-body joint 80B are each designed to be elastically deformable, and because the central section F of the first solid-body joint 80A (in the undeformed basic state of the first solid-body joint 80A) has a distance in a direction perpendicular to the first plane ME1 to both wall section HSA1 and wall section HSA2, and also because the central section F of the second solid-body joint 80B (in the undeformed basic state of the second solid-body joint 80B) has a distance in a direction perpendicular to the second plane ME2 to both wall section HSB1 and wall section HSB2, the beam 70 or the sliding element GE is held on the gantry beam 15 by means of the first solid-body joint 80A and the second solid-body joint 80B in such a way that the beam 70 or the sliding element GE is held on the gantry beam 15 by means of the first solid-body joint 80A and the second solid-body joint 80B.the sliding element GE is movable relative to the gantry beam 15, provided that the central section F of the first solid joint 80A does not abut one of the wall sections HSA1 or HSA2 and that neither of the wall sections HSA1 or HSA2 blocks a corresponding movement of the support 70 or the sliding element GE relative to the gantry beam 15 and / or provided that the central section F of the second solid joint 80B does not abut one of the wall sections HSB1 or HSB2 and that neither of the wall sections HSB1 or HSB2 blocks a corresponding movement of the support 70 or the sliding element GE relative to the gantry beam 15.

[0159] In the case of the positioning device 1, it is of interest that the arrangement of the first solid body joint 80A and the second solid body joint 80B represents a connection between the support 70 or the sliding element GE and the gantry beam 15, which on the one hand ensures the highest possible stiffness with respect to a translation of the support 70 or the sliding element GE relative to the gantry beam 15 in the second direction X and in the third direction Y and in the first direction Z, but on the other hand has the lowest possible stiffness with respect to a rotation of the support 70 or the sliding element GE relative to the gantry beam 15 about an axis of rotation extending in the first direction Z.

[0160] To meet the aforementioned requirements, the first solid-body hinge 80A and the second solid-body hinge 80B are arranged relative to each other on the support 70 such that the first plane ME1 and the second plane ME2 are not parallel to each other, but are inclined relative to each other such that the first plane ME1 and the second plane ME2 form a common line of intersection DZ extending parallel to the first direction Z (as shown in Fig. 1 (as shown). In this case, the first plane ME1 and the second plane ME2 form an angle α with respect to the common line of intersection DZ, which must be greater than 0° and less than 180°. To ensure sufficiently high stiffness of the arrangement of the first solid hinge 80A and the second solid hinge 80B with respect to a translation of the support 70 or the sliding element GE relative to the gantry beam 15 in the second direction X and in the third direction Y, the angle α should preferably satisfy the condition 30° ≤ α ≤ 90°. In the case of the in Fig. 9 and 10 In the example shown, the angle α is approximately 60°.

[0161] An arrangement of the first solid-body joint 80A and the second solid-body joint 80B such that the first plane ME1 and the second plane ME2 form an angle α of approximately 60° with respect to the common line of intersection DZ represents a good compromise in the present case, such that the stiffness of the arrangement of the first solid-body joint 80A and the second solid-body joint 80B with respect to a rotation of the support 70 or the sliding element GE relative to the gantry beam 15 about the common line of intersection DZ of the first plane ME1 and the second plane ME2 is sufficiently low, and the stiffness of the arrangement of the first solid-body joint 80A and the second solid-body joint 80B with respect to a translation of the support 70 or the sliding element GE relative to the gantry beam 15 in the second direction X and in the third direction Y is sufficiently high.

[0162] In this context, the common intersection line DZ of the first plane ME1 and the second plane ME2 forms a (extending in the first direction Z) "virtual" axis of rotation about which the support 70 or the sliding element GE is rotatably mounted relative to the gantry beam 15 by means of the arrangement of the first solid joint 80A and the second solid joint 80B.

[0163] By appropriately selecting the arrangement of the wall sections HSA1 and / or HSA2 and / or HSB1 and / or HSB2, a maximum rotation angle can be specified by which the beam 70 can be rotated from its rest position about the "virtual" axis of rotation DZ. In this way, the first solid joint 80A and the second solid joint 80B can be protected from mechanical overload. In the case of the positioning device 1, for example, it may be advantageous for the beam 70 to be rotatable relative to the gantry beam 15 about a "virtual" axis of rotation DZ by at least an angle of ±0.1°.

Claims

1. A rotary joint arrangement (DGA), comprising a first part (15), a second part (70) and a coupling means (KE) comprising at least one solid body joint (80A, 80B) for connecting the first part (15) and the second part (70) in such a way that the second part is enabled be rotated relative to the first part about an axis of rotation (DZ) extending in a first direction (Z), wherein the first part (15) and the second part (70) each have an extension perpendicular to the axis of rotation (DZ), wherein the second part is arranged relative to the first part so as to be offset by a distance axially to the axis of rotation (DZ), characterized in that the coupling means (KE) has a first solid body joint (80A) and a second solid body joint (80B), wherein the first solid body joint (80A) consists of a first elongate solid body, which extends perpendicular to the first direction (Z) along a first plane (ME1) parallel to the first direction (Z), and which has a longitudinal axis arranged perpendicular to the first direction (Z), wherein the first elongate solid body has the following longitudinal sections, which are arranged one behind another in the direction of the longitudinal axis of the first elongate solid body: - a first end section (E1), which forms a first end of the first elongate solid body; - a second end section (E2), which forms a second end of the first elongate solid body located opposite the first end of the first elongate solid body in the direction of the longitudinal axis of the first elongate solid body; - a central section (F) arranged between the first end section and the second end section of the first elongate solid body; - a first web part (S1) arranged between the first end section (E1) and the central section (F) of the first elongate solid body, connected to the first end section (E1) and the central section (F); - a second web part (S2) arranged between the second end section (E2) and the central section (F) of the first elongate solid body, connected to the second end section (E2) and the central section (F) of the first elongate solid body; wherein the second solid body joint (80B) consists of a second elongate solid body, which extends perpendicular to the first direction (Z) along a second plane (ME2) parallel to the first direction (Z), and which has a longitudinal axis arranged perpendicular to the first direction (Z), wherein the second elongate solid body has the following longitudinal sections, which are arranged one behind another, in the direction of the longitudinal axis of the second elongate solid body: - a first end section (E1), which forms a first end of the second elongate solid body; - a second end section (E2), which forms a second end of the second elongate solid body located opposite the first end of the second elongate solid body in the direction of the longitudinal axis of the second elongate solid body; - a central section (F) arranged between the first end section and the second end section of the second elongate solid body; - a first web part (S1) arranged between the first end section (E1) and the central section (F) of the second elongate solid body, connected to the first end section and the central section; - a second web part (S2) arranged between the second end section (E2) and the central section (F) of the second elongate solid body, connected to the second end section (E2) and the central section (F) of the second elongate solid body; wherein the first part (15) is connected to the second part (70) via the first solid body joint (80A) and the second solid body joint (80B) in such a way that the first end section (E1) of the first elongate solid body and the second end section (E2) of the first elongate solid body are rigidly connected to the second part (70), and the central section (F) of the first elongate solid body is rigidly connected to the first part (15) and that the first end section (E1) of the second elongate solid body and the second end section (E2) of the second elongate solid body are rigidly connected to the second part (70), and the central section (F) of the second elongate solid body is rigidly connected to the first part (15), wherein the first plane (ME1) and the second plane (ME2) are inclined relative to one another in such a way that the first plane (ME1) and the second plane (ME2) form a common intersection line (DZ), which extends parallel to the first direction (Z), wherein the first web part (S1) and the second web part (S2) of the first elongate solid body of the first solid body joint (80A) each have an extension (t_1, t_2) perpendicular to the first plane (ME1), which is smaller than an extension (t_3) of the first end section (E1) of the first elongate solid body perpendicular to the first plane (ME1), an extension (t_3) of the second end section (E2) of the first elongate solid body perpendicular to the first plane (ME1) and an extension (t_4) of the central section (F) of the first elongate solid body perpendicular to the first plane (ME1), so that the first web part (S1) and the second web part (S2) of the first elongate solid body are elastically deformable, and the central section (F) of the first solid body joint (80A) is enabled be moved relative to the first end section (E1) of the first solid body joint (80A) and to the second end section (E2) of the first solid body joint (80A); wherein the first web part (S1) and the second web part (S2) of the second elongate solid body of the second solid body joint (80B) each have an extension (t_1, t_2) perpendicular to the second plane (ME2), which is smaller than an extension (t_3) of the first end section (E1) of the second elongate solid body perpendicular to the second plane (ME2), an extension (t_3) of the second end section (E2) of the second elongate solid body perpendicular to the second plane (ME2) and an extension (t_4) of the central section (F) of the second elongate solid body perpendicular to the second plane (ME2), so that the first web part (S1) and the second web part (S2) of the second elongate solid body are elastically deformable, and the central section (F) of the second solid body joint (80B) is enabled be moved relative to the first end section (E1) of the second solid body joint (80B) and to the second end section (E2) of the second solid body joint (80B); wherein the second part (70) is rotatably mounted on the first part (15) about the common intersection line (DZ) of the first plane (ME1) and of the second plane (ME2) by means of the first solid body joint (80A) and the second solid body joint (80B).

2. The rotary joint arrangement (DGA) according to claim 1, wherein in an undeformed state of the first solid body joint (80A), the first solid body joint (80A) is formed symmetrically to the first plane (ME1), and / or in an undeformed state of the second solid body joint (80B), the second solid body joint (80B) is formed symmetrically to the second plane (ME2).

3. The rotary joint arrangement (DGA) according to claim 1 or 2, wherein in the first direction (Z), the first end section (E1) of the first elongate solid body of the first solid body joint (80A) has an extension (h), which is larger than the extension (t_3) of the first end section (E1) of the first elongate solid body perpendicular to the first plane (ME1); and / or in the first direction (Z), the second end section (E2) of the first elongate solid body of the first solid body joint (80A) has an extension (h), which is larger than the extension (t_3) of the second end section (E2) of the first elongate solid body perpendicular to the first plane (ME1); and / or in the first direction (Z), the central section (F) of the first elongate solid body of the first solid body joint (80A) has an extension (hF), which is larger than the extension (t_4) of the central section (F) of the first elongate solid body perpendicular to the first plane (ME1); and / or in the first direction (Z), the first web part (S1) of the first elongate solid body of the first solid body joint (80A) has an extension (h), which is larger than the extension (t_2) of the first web part (S1) of the first elongate solid body perpendicular to the first plane (ME1); and / or in the first direction (Z), the second web part (S2) of the first elongate solid body of the first solid body joint (80A) has an extension (h), which is larger than the extension (t_2) of the second web part (S2) of the first elongate solid body perpendicular to the first plane (ME1); and / or in the first direction (Z), the first end section (E1) of the second elongate solid body of the second solid body joint (80B) has an extension (h), which is larger than the extension (t_3) of the first end section (E1) of the second elongate solid body perpendicular to the second plane (ME2); and / or in the first direction (Z), the second end section (E2) of the second elongate solid body of the second solid body joint (80B) has an extension (h), which is larger than the extension (t_3) of the second end section (E2) of the second elongate solid body perpendicular to the second plane (ME2); and / or in the first direction (Z), the central section (F) of the second elongate solid body of the second solid body joint (80B) has an extension (hF), which is larger than the extension (t_4) of the central section (F) of the second elongate solid body perpendicular to the second plane (ME2); and / or in the first direction (Z), the first web part (S1) of the second elongate solid body of the second solid body joint (80B) has an extension (h), which is larger than the extension (t_2) of the first web part (S1) of the second elongate solid body perpendicular to the second plane (ME2); and / or in the first direction (Z), the second web part (S2) of the second elongate solid body of the second solid body joint (80B) has an extension (h), which is larger than the extension (t_2) of the second web part (S2) of the second elongate solid body perpendicular to the second plane (ME2).

4. The rotary joint arrangement (DGA) according to one of claims 1-3, wherein in an undeformed state of the first solid body joint (80A), the first solid body joint (80A), and, in an undeformed state of the second solid body joint (80B), the second solid body joint (80B) are arranged relative to one another in such a way that the first solid body joint (80A) and the second solid body joint (80B) are arranged symmetrically with respect to a third plane (E3), which extends parallel to the first direction (Z), wherein the common intersection line (DZ) of the first plane (ME1) and of the second plane (ME2) extends in the third plane (E3).

5. The rotary joint arrangement (DGA) according to one of claims 1-3, wherein the first solid body joint (80A) is arranged relative to the second solid body joint (80B) in such a way that the first solid body joint (80A) has a distance from the second solid body joint (80B) perpendicular to the first direction (Z).

6. The rotary joint arrangement (DGA) according to one of claims 1-5, wherein the second part (70) has a first elongate hollow space (71A), which, in the first direction (Z), extends along the first plane (ME1), and the first solid body joint (80A) is arranged in the first elongate hollow space (71A) in such a way that, in the first direction (Z), the first solid body joint (80A) extends through the first elongate hollow space (71A) in the first direction (Z) at least over a portion of its extension; wherein the second part (70) has a second elongate hollow space (71B), which, in the first direction (Z), extends along the second plane (ME2), and the second solid body joint (80B) is arranged in the second elongate hollow space (71B) in such a way that, in the first direction (Z), the second solid body joint (80B) extends through the second elongate hollow space (71B) in the first direction (Z) at least over a portion of its extension.

7. The rotary joint arrangement (DGA) according to claim 6, wherein the first elongate hollow space (71A) extends along the first plane (ME1) in such a way that a longitudinal axis of the first elongate hollow space (71A) is arranged parallel to the first plane (ME1) and perpendicular to the first direction (Z), and the first elongate hollow space (71A) is limited laterally with respect to the first plane (ME1) by means of two side walls (HSA1, HSA2) of the second part (70), which are located opposite one another and which each extend in the first direction (Z) parallel to the first plane (ME1) and have a distance relative to one another in a direction perpendicular to the first plane (ME1); wherein the second elongate hollow space (71B) extends along the second plane (ME2) in such a way that a longitudinal axis of the second elongate hollow space (71B) is arranged parallel to the second plane (ME2) and perpendicular to the first direction (Z), and the second elongate hollow space (71B) is limited laterally with respect to the second plane (ME2) by two side walls (HSB1, HSB2) of the second part (70), which are located opposite one another and which each extend in the first direction (Z) parallel to the second plane (ME2) and which have a distance relative to one another in a direction perpendicular to the second plane (ME2).

8. The rotary joint arrangement (DGA) according to claim 6 or 7, wherein the two side walls (HSA1, HSA2) of the second part (70), which are located opposite one another and which laterally limit the first elongate hollow space (71A) with respect to the first plane (ME1), are formed in such a way that they enclose the first end section (E1) and the second end section (E2) of the first solid body joint (80A), so that the first end section (E1) and the second end section (E2) of the first solid body joint (80A) are connected in a positive manner to the second part (70); wherein the two side walls (HSB1, HSB2) of the second part (70), which are located opposite one another and which laterally limit the second elongate hollow space (71B) with respect to the second plane (ME2), are formed in such a way that they enclose the first end section (E1) and the second end section (E2) of the second solid body joint (80B), so that the first end section (E1) and the second end section (E2) of the second solid body joint (80B) are connected in a positive manner to the second part (70).

9. The rotary joint arrangement (DGA) according to one of claims 6 - 8, wherein the two side walls (HSA1, HSA2) of the second part (70), which are located opposite one another and which laterally limit the first elongate hollow space (71A) with respect to the first plane (ME1), are formed in such a way that they enclose the central section (F) of the first solid body joint (80A), wherein, perpendicular to the first plane (ME1), the two side walls (HSA1, HSA2) of the second part (70), which are located opposite one another and which laterally limit the first elongate hollow space (71A) with respect to the first plane (ME1), have a distance perpendicular to the first plane (ME1), which is larger than an extension (t_4) of the central section (F) of the first solid body joint (80A) perpendicular to the first plane (ME1), so that the central section (F) of the first solid body joint (80A) is enabled be moved relative to the second part (70); wherein the two side walls (HSB1, HSB2) of the second part (70), which are located opposite one another and which laterally limit the second elongate hollow space (71B) with respect to the second plane (ME2), are formed in such a way that they enclose the central section (F) of the second solid body joint (80B), wherein, perpendicular to the second plane (ME2), the two side walls (HSB1, HSB2) of the second part (70), which are located opposite one another and which laterally limit the second elongate hollow space (71B) with respect to the second plane (ME2), have a distance, which is larger than an extension (t_4) of the central section (F) of the second solid body joint (80B) perpendicular to the second plane (ME2), so that the central section (F) of the second solid body joint (80B) is enabled to be moved relative to the second part (70).

10. The rotary joint arrangement (DGA) according to one of claims 6 - 8, wherein the central section (F) of the first solid body joint (80A) is enabled to be moved relative to the second part (70) in a translatory movement perpendicular to the first plane (ME1); and / or wherein the central section (F) of the first solid body joint (80A) is enabled to be moved relative to the second part (70) by means of a rotation about an axis of rotation extending in the first direction (Z); and / or wherein the central section (F) of the second solid body joint (80B) is enabled to be moved relative to the second part (70) in a translatory movement perpendicular to the second plane (ME2); and / or wherein the central section (F) of the second solid body joint (80B) can be moved relative to the second part (70) by means of a rotation about an axis of rotation extending in the first direction (Z).

11. The rotary joint arrangement (DGA) according to one of claims 1 - 10, wherein the first plane (ME1) and the second plane (ME2) are inclined relative to one another in such a way that the first plane (ME1) and the second plane (ME2) intersect in the common intersection line (DZ) at an angle, which is larger than or equal to 10° and smaller than or equal to 120°.

12. The rotary joint arrangement (DGA) according to one of claims 1-11, wherein the first plane (ME1) and the second plane (ME2) are inclined relative to one another in such a way that the first plane (ME1) and the second plane (ME2) intersect in the common intersection line (DZ) at an angle, which is larger than or equal to 30° and smaller than or equal to 90°.

13. A positioning device (1), comprising a rotary joint arrangement (DGA) according to one of claims 1 - 12 and a linear guide device (B, FB) for guiding the first part (15) or the second part (70) of the rotary joint arrangement (DGA), wherein the first part of the rotary joint arrangement (DGA) is guided by means of the linear guide device in such a way that the first part is enabled to be moved linearly in a second direction (X), which extends perpendicular to the first direction (Z), or the second part (70) of the rotary joint arrangement (DGA) is guided by means of the linear guide device (B, FB) in such a way that the second part (70) is enabled to be moved linearly in a second direction (X), which extends perpendicular to the first direction (Z).

14. The positioning device (1) according to claim 13, wherein, if the second part (70) is guided by means of the linear guide device (B, FB), at least one linear drive (LMX1, LMX2), which is connected to the first part (15) of the rotary joint arrangement (DGA), is present for moving the first part (15) in the second direction (X).

15. The positioning device according to claim 13 or 14, wherein the linear guide device comprises a base (B) comprising at least one flat guide surface (FF) and / or a guide beam (FB) comprising at least one flat guide surface (SF), and the second part (70) is guided by means of at least one air bearing (L1, L2, L3, L4) on the flat guide surface of the base (B) and / or on the flat guide surface (SF) of the guide beam (FB).

16. The positioning device (1) according to claim 13, wherein, if the first part is guided by means of the linear guide device, at least one linear drive, which is connected to the second part of the rotary joint arrangement, is present for moving the second part in the second direction (X).

17. The positioning device according to claim 13 or 16, wherein the linear guide device comprises a base (B) comprising at least one flat guide surface (FF) and / or a guide beam (FB) comprising at least one flat guide surface (SF) and the first part is guided by means of at least one air bearing on the flat guide surface of the base (B) and / or on the flat guide surface (SF) of the guide beam (FB).