Display substrate and manufacturing process therefor, as well as display device

Description

TECHNICAL FIELD

[0001] The present disclosure relates to the field of display technologies, and more particularly, relates to a display substrate and a method for manufacturing the same, and a display device.BACKGROUND

[0002] An active matrix organic light emitting diode (AMOLED) display substrate is widely applied in the current field of display due to advantages of small thickness, self-light emission, high contrast, wide color gamut, bendability and manufacturability on a flexible base substrate.

[0003] US 2019 / 058021 A1 describes an organic light-emitting display device.

[0004] CN 108 010 921 A describes a flexible display panel and display device.

[0005] CN 107 068 715 A describes an organic light-emitting display panel, organic light-emitting display device, and method for preparing organic light-emitting display panel.SUMMARY

[0006] The invention is set out in the appended set of claims.BRIEF DESCRIPTION OF THE DRAWINGS

[0007] In order to describe the technical solutions in the embodiments of the present more clearly, the following briefly introduces the accompanying drawings required for describing the embodiments. Apparently, the accompanying drawings in the following description show merely some embodiments of the present disclosure, and a person of ordinary skill in the art may also derive other drawings from these accompanying drawings without creative efforts. FIG. 1 is a top view of a display substrate according to an embodiment of the present disclosure; FIG. 2 is a sectional view of a display substrate according to an embodiment of the present disclosure; FIG. 3 is a sectional view of another display substrate not according to an embodiment of the present disclosure; FIG. 4 is a sectional view of another display substrate according to an embodiment of the present disclosure; FIG. 5 is a top view of another display substrate according to an embodiment of the present disclosure; FIG. 6 is a top view of another display substrate according to an embodiment of the present disclosure; FIG. 7 is a top view of another display substrate according to an embodiment of the present disclosure; FIG. 8 is a top view of another display substrate according to an embodiment of the present disclosure; FIG. 9 is a top view of a first annular structure according to an embodiment of the present disclosure; and FIG. 10 is a flow chart of a manufacturing method for a display substrate according to an embodiment of the present disclosure. DETAILED DESCRIPTION

[0008] The present disclosure is described hereinafter in further detail with reference to the accompanying drawings, to present the objects, technical solutions, and advantages of the present disclosure more clearly.

[0009] FIG. 1 is a top view of a display substrate according to an embodiment of the present disclosure. FIG. 2 is a sectional view of a display substrate shown in FIG. 1 in an MM' direction and is of schematic nature only as it does not show all details as claimed. As shown in FIG. 1 and FIG. 2, the display substrate includes: a base substrate 01, a plurality of inorganic film layers 02, a plurality of first grooves C1, and an organic layer 03. The inorganic film layer 02 is made of an inorganic material, and the organic layer 03 is made of an organic material.

[0010] Referring to FIG. 1 and FIG. 2, the base substrate 01 includes an encapsulation region A1 and an edge region A2 disposed on a periphery of the encapsulation region A1. The edge region A2 includes a bonding region A21 disposed on the side, where at least one side of the base substrate 01 is disposed, for example, FIG. 1 only shows the bonding region A21 on the side where one side is disposed.

[0011] The plurality of inorganic film layers 0.2 are disposed on a side of the base substrate 01 and are arranged in a stacking fashion, for example, FIG. 2 only shows four inorganic film layers disposed on a side of the base substrate 01 and arranged in a stacking fashion.

[0012] The plurality of first grooves C1 are disposed in the edge region A2 and sequentially spaced apart from each other in a direction distal from the encapsulation region A1, and extend along a periphery of the base substrate 01. For example, FIG. 2 shows four first grooves C1 extending along the periphery of the base substrate 01, and FIG. 1 shows a top view of two first grooves C1.

[0013] Each first groove C1 runs through at least one inorganic film layer 02 of the plurality of inorganic film layers 02, and orthographic projections of the plurality of first grooves C1 do not overlap the bonding region A21. The organic layer 03 covers the plurality of first grooves C1.

[0014] The plurality of first grooves C1 are disposed in the edge region A2 and a gap exists between the first grooves C1 and the encapsulation region A1. Therefore, the plurality of first grooves C1 block the crack on the edge of the display substrate to prevent the crack from extending to the encapsulation region A1. The plurality of first grooves C1 block extension of the crack. Therefore, the inorganic film layer between the two adjacent first grooves C1 forms a barrier portion, which is also referred to as a crack dam.

[0015] Referring to FIG. 1 and FIG. 2, the base substrate 01 further includes a display region A11, and the encapsulation region includes the display region A11 and a peripheral region A12 surrounding the display region A11. That is, referring to FIG. 2, the display region A22 further covers the plurality of inorganic film layers 02. The edge region A2 is an annular region surrounding the encapsulation region A1. Moreover, the bonding region A21 is disposed on a side, proximal to a flexible printed circuit board (FPC) or a chip on film (COF), of the edge region A2.

[0016] Referring to FIG. 4, in the embodiment of the present disclosure, the plurality of inorganic film layers 02 further includes: a buffer layer 022 disposed between the base substrate 01 and the at least one inorganic film layer 02. The buffer layer 022 includes a first buffer pattern 0221 and a second buffer pattern 0222 which are integrally formed.

[0017] Referring to FIG. 4, it can be seen that an orthographic projection of the first buffer pattern 0221 on the substrate base 01 covers the encapsulation region A1 and a part of the edge region A2, and the second buffer pattern 0222 is disposed in the edge region A2, that is, the second buffer pattern 0222 is closed to the edge of the base substrate 01 relative to the first buffer pattern 0221, and a thickness d1 of the first buffer pattern 0221 is greater than a thickness d2 of the second buffer patter 0222. A direction of the thickness of the first buffer pattern 0221 and a direction of the thickness of the second buffer pattern 0222 are both vertical to a bearing surface of the base substrate 01. The bearing surface of the base substrate 01 refers to a surface, which is provided with a film structure (for example, inorganic film layer) of a plurality of surfaces of the base substrate 01.

[0018] An orthographic projection of the organic layer 03 on the buffer layer 022 partially overlaps the second buffer pattern 0222. Furthermore, an orthographic projection of a side, away from the encapsulation region A1, of the first groove C1a (namely the first groove C1a on the outermost side), most distal from the encapsulation region A1, of the plurality of first grooves C1 on the buffer layer 022 overlaps a border line of the first buffer pattern 0221 and the second buffer pattern 0222.

[0019] In conclusion, the embodiment of the present disclosure provides a display substrate. An edge region of the base substrate not only includes a plurality of first grooves running through at least one inorganic film layer, but also includes an organic layer covering the plurality of first grooves, wherein a hardness of an organic material for forming the organic layer is greater than a hardness of an inorganic material for forming the inorganic film layer. Therefore, the impact resistance of the display substrate is effectively improved by soft and hard matching, an external force on the display substrate is buffered, the problem of encapsulation failure caused by extension of the crack to the encapsulation region is effectively addressed, and the quality of the display substrate is enhanced. Furthermore, by making the orthographic projections of the plurality of first grooves on the base substrate not overlap the bonding region, a metal wire disposed in the bonding region is prevented from being exposed and corroded when the first grooves are formed by an etching process, thereby ensuring the yield of the display substrate.

[0020] Optionally, in the embodiment of the present disclosure, an orthographic projection of the organic layer 03 on the base substrate 01 also may not overlap the bonding region A21. Accordingly, the problem that the metal wire disposed in the bonding region may not be bonded normally because the organic layer covers the bonding pad disposed in the bonding region may be addressed.

[0021] In the embodiment of the present disclosure, the plurality of stacked inorganic film layers may cover the encapsulation region A1 and the edge region A2. Exemplarily, a plurality of stacked inorganic film layers covering the encapsulation region A1 and the edge region A2 may be formed on the base substrate 01 before a plurality of first grooves C1 are formed. Then, a part, disposed in the edge region A2, of at least one inorganic film layer may be etched to obtain the plurality of first grooves C1.

[0022] FIG. 3 is a sectional view of another display substrate not according to an embodiment of the present disclosure as it fails to disclose the buffer layer 022 as claimed. As shown in FIG. 3, the display substrate includes: four inorganic film layers 02 disposed on a side of the base substrate 01, wherein the four inorganic film layers may include a barrier layer 021, a buffer layer 022, a gate insulator (GI) layer 023, and an interlevel dielectric (ILD) layer 024 which are sequentially stacked along a direction distal from the base substrate 01. The barrier layer 021 made of an inorganic material is formed on a side distal from the base substrate 01 firstly and may effectively prevent moisture or oxygen from entering the base substrate 01, such that the moisture blocking, oxygen blocking and the scraping resistance of the base substrate 01 are improved.

[0023] As an optional non-inventive implementation, referring to FIG. 3, in the plurality of inorganic film layers 02, at least one inorganic film layer which each first groove C1 runs through may include a gate insulator layer 023 and an interlevel dielectric layer 024 which are sequentially stacked in a direction distal from the base substrate 01. That is, each first groove C1 may only penetrate through the gate insulator layer 023 and the interlevel dielectric layer 024.

[0024] Accordingly, referring to FIG. 3, a barrier portion formed between the two adjacent first grooves C1 may be formed by the gate insulator layer and the interlevel dielectric layer which are sequentially stacked. A gate insulator layer pattern is disposed in the gate insulator layer 023 and an interlevel dielectric layer pattern is disposed in the interlevel dielectric layer 024.

[0025] The inorganic film layer between each two of adjacent first grooves C1 may form a barrier portion. Therefore, as shown in FIG. 4, an orthographic projection of a side, distal from the encapsulation region A1, of the barrier portion B1 (namely the barrier portion B1 on the outermost side) most distal from the encapsulation region A1 on the buffer layer 022 overlaps a border line of the first buffer pattern 0221 and the second buffer pattern 0222.

[0026] The base substrate 01 needs to be cut in the edge region A2 of the base substrate 01 after each functional film layer is formed on the base substrate 01, such that the display substrate is obtained. Therefore, the probability of edge breakage of the display substrate caused by cutting can be effectively reduced by forming the second buffer pattern 0222 with small thickness on a side, distal from the encapsulation region A1, of the edge region A2, and the problem of encapsulation failure caused by that breakage extends to the encapsulation region may be addressed. Accordingly, the problem that black spots are caused on the display substrate caused by that moisture or oxygen enters the display region can be addressed, and the yield of the display substrate is further increased.

[0027] Furthermore, a side, proximal to the encapsulation region A1, of the first groove C1 (namely the first groove C1 on the outermost side), most distal from the encapsulation region A1, of the plurality of first grooves C1 overlaps the border line of the first buffer pattern 0221 and the second buffer pattern 0222, that is, the orthographic projections of the plurality of first grooves C1 on the buffer layer 022 only overlap the first buffer pattern 0221. Therefore, by making the orthographic projection of the organic layer 03 on the buffer layer 022 overlap the second buffer pattern 0222, it may be ensured that the organic layer 03 completely covers the barrier portions formed among the plurality of first grooves C1 and further ensure the impact resistance of the display substrate.

[0028] Optionally, in the embodiment of the present disclosure, the thickness d2 of the second buffer pattern 0222 may be 20% of the thickness d1 of the first buffer pattern 0221.

[0029] Exemplarily, one buffer layer may be formed on the base substrate 01 firstly, and then a part, distal from the encapsulation region A1, of the buffer layer is etched. Or, a part, distal from the encapsulation region A1, of the buffer layer may be etched after a plurality of stacked inorganic film layers are formed on the base substrate 01, and the buffer layer and the plurality of first grooves C1 can be etched synchronously. The etching thickness of the buffer layer 022 may be 80% of the thickness of the buffer layer, such that the first buffer pattern 0221 and the second buffer pattern 0222 which are integrally formed may be obtained.

[0030] Optionally, referring to FIG. 4, a distance d3 between a side, proximal to the encapsulation region A1, of the first groove C1 (the first groove on the innermost side), proximal to the encapsulation region A1, of the plurality of first grooves C1 and a side, proximal to the encapsulation region A1, of the first groove C1 (namely the first groove on the outermost side), distal from the encapsulation region A1, of the plurality of first grooves C1 may be 60 microns. That is, when a part, disposed in the edge region A2, of the at least one inorganic film layer, etching may be started at a position of 60 microns distal from the edge of the at least one inorganic film.

[0031] FIG. 5 to FIG. 8 are top views of a plurality of display substrates according to embodiments of the present disclosure. As shown in FIG. 5 to FIG. 8, an orthographic projection of each first groove C1 on the base substrate 01 may be an annular shape with an opening. For example, referring to FIG. 5, which shows a first groove C1, including two annular shapes with openings. For another example, referring to FIG. 6 to FIG. 8, they carry out illustrate by taking one first groove C1 closest to the encapsulation region A1 as an example. In the embodiment of the present disclosure, the inorganic film layer may include a plurality of first grooves C1.

[0032] Referring to FIG. 5 to FIG. 8, it can be seen that each annular shape (namely each first groove C1) may surround the encapsulation region A1, an orthographic projection of each opening on the base substrate 01 may overlap the bonding region A21, that is, a width of each opening may be greater than a width of the bonding region A21. The first groove C1 of an annular shape surrounds the encapsulation region A1, such that the periphery of the encapsulation region A1 may be effectively protected and the quality of the display substrate is further ensured.

[0033] Optionally, referring to FIG. 1 and FIG. 5 to FIG. 8, the base substrate 01 further includes a display region A11. A shape of a side, distal from the bonding region A21, of the annular shape matches a shape of a side, distal from the bonding region A21, of the display region A11. For example, referring to FIG. 8, a side, distal from the bonding region A21, of the display region A11 includes a notch, that is, a middle part of a side, distal from the bonding region A21, of the display region A11 is sunken towards a side proximal to the bonding region A21. Accordingly, a side, distal from the bonding region A21, of the annular shape is provided with a notch, that is, referring to FIG. 8, a middle part of a side, distal from the bonding region A21, of the annular shape, namely the first groove C1 is sunken towards a side proximal to the bonding region A21. Moreover, the notch of a side, distal from the bonding region A21, of the first groove C1 and the notch of a side, distal from the bonding region A21, of the display region A11 have the same position, shape and size.

[0034] Optionally, in the embodiment of the present disclosure, referring to FIG. 6, the encapsulation region A1 may include a display region A11 and a peripheral region A12 surrounding the display region A11. The annular shape formed by the orthographic projection of the first groove C1 on the base substrate 01 may include: a first side edge C11, a second side edge C12, a third side edge C13, and a fourth side edge C14 which are sequentially connected to each other; wherein the first side edge C11 and the third side edge C13 may be oppositely arranged, the second side edge C12 and the fourth side edge C14 may be oppositely arranged, the fourth side edge C14 may be disposed on a side where the bonding region A21 is, and the fourth side edge C14 may be provided with the opening, that is, referring to FIG. 6, the fourth side edge C14 is divided into two sections by the opening. Optionally, the first side edge C11 and the third side edge C13 may further be arranged in parallel, and the second side edge C12 and the fourth side edge C14 may further be arranged in parallel.

[0035] As shown in FIG. 6, a distance d4 between the first side edge C11 and a side, distal from the display region A11, of the peripheral region A12 is equal to a distance d5 between the third side edge C13 and a side, distal from the display region A11, of the peripheral region A12.

[0036] A distance d6 between an intersection P1 of the first side edge C11 and the second side edge C12 and a side, distal from the display region A11, of the peripheral region A12 is equal to a distance d8 between an intersection P2 of the first side edge C11 and the fourth side edge C14 and a side, distal from the display region A11, of the peripheral region A12. A distance d7 between an intersection P3 of the third side edge C13 and the second side edge C12 and a side, distal from the display region A11, of the peripheral region A12 is equal to a distance d9 between an intersection P4 of the third side edge C13 and the fourth side edge C14 and a side, distal from the display region A11, of the peripheral region A12.

[0037] Furthermore, the distance d6 between the intersection P1 of the first side edge C11 and the second side edge C12 and a side, distal from the display region A11, of the peripheral region A12 may be equal to the distance d7 between the intersection P3 of the third side edge C13 and the second side edge C12 and a side, distal from the display region A11, of the peripheral region A12; and the distance d8 between the intersection P2 of the first side edge C11 and the fourth side edge C14 and a side, distal from the display region A11, of the peripheral region A12 may be equal to the distance d9 between the intersection of the third side edge C13 and the fourth side edge C14 and a side, distal from the display region A11, of the peripheral region A12. The distance d4 between the first side edge C11 and a side, distal from the display region A11, of the peripheral region A12, and the distance d5 between the third side edge C13 and a side, distal from the display region A11, of the peripheral region A12 may be less than the distance d6 between the intersection P1 of the first side edge C11 and the second side edge C12 and a side, distal from the display region A11, of the peripheral region A12, and less than the distance d7 between the intersection P3 of the third side edge C13 and the second side edge C12 and a side, distal from the display region A11, of the peripheral region A12.

[0038] That is, the distance between the left side and the right of the annular shape and a side, distal from the display region A11, of the peripheral region A12 may be equal. The distance between two angles of a side, distal from the bonding region A21, of the annular shape and a side, distal from the display region A11, of the peripheral region A12 may be equal. The distance between two angles of a side, proximal to the bonding region A21, of the annular shape and a side, distal from the display region A11, of the peripheral region A12 may be equal. The distance between the two angles of a side, distal from the bonding region A21, of the annular shape and a side, distal from the display region A11, of the peripheral region A12 is less than the distance between the two angles of a side, proximal to the bonding region A21, of the annular shape and a side, distal from the display region A11, of the peripheral region A12 The distance between the left side and the right of the annular shape and a side, distal from the display region A11, of the peripheral region A12 is less than the distance between the two angles of a side, distal from the bonding region A21, of the annular shape and a side, distal from the display region A11, of the peripheral region A12.

[0039] In the embodiment of the present disclosure, for each side edge of the annular shape, a distance between each side edge and a side, distal from the display region A11, of the peripheral region A12 may refer to the shortest distance between the side edge and a side, distal from the display region A11, of the peripheral region A12.

[0040] Optionally, a distance of each position of the annular groove (namely the first groove C1) and the edge of the base substrate 01 may be equal. The distance may refer to the shortest distance between any one position of the first groove C1 and the edge of the base substrate 01.

[0041] Optionally, referring to FIG. 6, the fourth side edge C14 may include a first portion C141 and a second portion C142 which are divided by the opening. In angles formed by each two of adjacent side edges of the side edges of the annular shape, at least one angle may be a round angle, wherein in two side edges forming the round angle, one section, proximal to the other side edge, of each side edge may be arc-shaped.

[0042] For example, referring to FIG. 5 and FIG. 6 an angle α formed by the first side edge C11 and the second side edge C12, and an angle α formed by the third side edge C13 and the second side edge C12 may be round angles. an angle α formed by the first side edge C11 and the first portion C141 of the fourth side edge C14, and an angle α formed by the third side edge C13 and the second portion C142 of the fourth side edge C14 may be square angles. That is, one section, proximal to the other side edge, of each side edge of the first side edge C11 and the first portion C141 of the fourth side edge C14 may be linear. One section, proximal to the other side edge, of each side edge of the third side edge C13 and the second portion C142 of the fourth side edge C14 may be linear.

[0043] For another example, referring to FIG. 7 and FIG. 9, the annular shape may be a rectangular shape of which a side is open, and an angle α formed by each two of adjacent side edges may be a round angle.

[0044] Optionally, in the embodiment of the present disclosure, an angle formed by the first side edge C11 and the first portion C141, and an angle formed by the third side edge C13 and the second portion C142 may be greater than or equal to 90 degrees.

[0045] For example, referring to FIG. 5, an angle α formed by the first side edge C11 and the first portion C141, and an angle α formed by the third side edge C13 and the second portion C142 may be equal to 90 degrees, namely right angles. For another example, referring to FIG. 7 to FIG. 8, an angle α formed by the first side edge C11 and the first portion C141, and an angle α formed by the third side edge C13 and the second portion C142 may be greater than 90 degrees, namely obtuse angles.

[0046] In the embodiment of the present disclosure, referring to FIG. 5 and FIG. 6, the bonding region A21 may include a bonding pad A211 and a wiring fanout region A212. The bonding pad A211 overlap an orthographic projection of an opening K1 on the bonding region A21. For example, referring to FIG. 6, two ends of the first groove C1 are disposed on two sides of the bonding pad A211.

[0047] Furthermore, the two ends of the first groove C1 are disposed on the edge of the side of a side, proximal to the bonding region A21, of the base substrate 01, that is, referring to FIG. 5, the two ends of the first groove C1 are disposed on a lower edge M1 of the base substrate 01. Moreover, a distance d0 between each of the two ends of the first groove C1 and the bonding pad A211 is 5 to 10 microns.

[0048] Optionally, in the embodiment of the present disclosure, the base substrate 01 may be a flexible substrate. That is, the base substrate 01 may be made of a flexible material. Accordingly, referring to FIG. 7 and FIG. 8, the bonding region A21 may include: a first sub-region A3, a bending region A4, and a second sub-region A5, and a part, disposed in the bending region A4, of the base substrate 01 may be bending-shaped. The first sub-region A3 is disposed on a front surface e of the display substrate, that is, the first sub-region A3 and the display region A11 are disposed on the same surface; and the second sub-region A5 is bended in a region on a back surface of the display substrate, that is, the second sub-region A5 and the display region A11 are disposed on different surfaces. The bonding pad A211 in the bonding region A21 may be disposed in the second sub-region A5, and the wiring fanout region A212 in the bonding region A21 may be disposed in the first sub-region A3 and the bending region A4.

[0049] Furthermore, referring to FIG. 7 and FIG. 8, orthographic projections of the two ends of the first groove C1 on the base substrate 01 do not overlap the bending region A4, and are disposed on a side, proximal to the bending area A4, of the first sub-region A3.

[0050] An inorganic material has low hardness, and the bending region A4 is implemented by bending the base substrate by a special process after the plurality of first grooves C1 are formed. Therefore, enabling the orthographic projections of the plurality of first grooves C1 on the base substrate 01 to be disposed on a side, proximal to the bending region A4, of the first sub-region A3 may prevent the barrier portion formed between the two adjacent first grooves from being broken when the bending region A4 is formed, and the quality of the display substrate is further ensured.

[0051] Optionally, the plurality of inorganic film layers which the display substrate include may further include a second groove, wherein an orthographic projection of the second groove on the base substrate may cover the bending region A4, and the second groove may run through the interlevel dielectric layer 024, the gate insulator layer 023, the buffer layer 022, and a part of the barrier layer 021. That is, the second groove may penetrate through the interlevel dielectric layer 024, the gate insulator layer 023, and the buffer layer 022, and may only pass through a part of the buffer layer 021.

[0052] For example, parts, disposed in the bending region A4, of the interlevel dielectric layers 024, the gate insulator layers 023, the buffer layers 022, and a part of the barrier layers 021 in the plurality of inorganic film layers may be etched to obtain the second groove. A bending process on the base substrate 01 is performed after the plurality of inorganic film layers are formed. Therefore, the bending process may be facilitated by forming the second groove in the bending region A4 firstly, namely, etching the inorganic film layer in the bending region A4 firstly to enable the film layer on the base substrate 01 in the bending region A4 to be thinner.

[0053] Optionally, the inorganic film layer in the second sub-region A5 may include an interlevel dielectric layer 024 and a gate insulator layer 023. That is, the inorganic film layer disposed in the second sub-region A5 may not be etched, and the inorganic film layer disposed in the first sub-region A3 may not be etched. Furthermore, a pin position in the bonding pad A211 may further include a source metal layer and a drain metal layer which are disposed on a side, distal from the base substrate 01, of the plurality of inorganic film layers 02, wherein the source metal layer and the source metal layer in the display region A11, and the drain metal layer and the drain metal layer in the display region A11 may be formed by a patterning process.

[0054] It should be noted that, referring to FIG. 5 to FIG. 8, the edge region A2 of the base substrate 01 may be further provided with a cutting line L1 surrounding the first groove C1. After the inorganic film layer with a plurality of first grooves C1 is formed on a side of the base substrate 01, cutting may be performed along the cutting line L1 to obtain the display substrate. Accordingly, the annular shape matches a shape of the cutting line L1. That is, the annular first groove C1 may be designed along the shape of the cutting line L1.

[0055] During cutting operation, the edge of the display substrate is easily subject to cracks. Therefore, the first groove designed along the shape of the cutting line L1 may effectively block the crack generated by the cutting operation and may effectively prevent extension of the crack which is caused during the cutting.

[0056] Optionally, in the embodiment of the present disclosure, as shown in FIG. 3 to FIG. 4, the plurality of first grooves C1 included in the display substrate may be arranged equidistantly, that is, a distance between each two of adjacent first grooves C1 may be a fixed value. By the plurality of first grooves C1 spaced apart from each other, extension of the crack may be further prevented effectively and the quality of the display substrate may be ensured.

[0057] For example, referring to FIG. 3 to FIG. 4, a first groove C1, including five annular shapes with openings, is shown. For another example, referring to FIG. 5, a first groove including two annular shapes with openings is shown.

[0058] Optionally, in the embodiment of the present disclosure, the annular shape may be surrounded by at least one of a strip shape and an arc shape. For example, referring to FIG. 5 to FIG. 8, the annular shape is surrounded by a plurality of strip-shaped structures and a plurality of arc-shaped structures.

[0059] FIG. 9 is a top view of a first groove C1, in an annular shape with an opening, according to an embodiment of the present disclosure. As shown in FIG. 9, the annular shape may be surrounded by a plurality of arc-shaped structures. For example, an orthographic projection of each side of the annular shape on the base substrate 01 may be in a waves shape.

[0060] Referring to FIG. 9, assuming that an external force acts on the annular first groove C1, an impact force in a first direction generated at a point P on the first groove C1 is F, then the impact force F may be resolved into an impact force in a second direction by the arc-shaped first groove C1, and the impact force F1 in the second direction meets: F1=F*sin (β), the second direction is vertical to a tangential direction of the point P, and β is an included angle between the tangential direction and the first direction.

[0061] According to the above analysis, the sin (β) is less than or equal to 1, and thus for the annular shape surrounded by the arc shape, the impact force F1 in the second direction may be less than or equal to F. Relative to the strip shape, the annular shape surrounded by the arc shape is subjected to a lower impact force. Accordingly, the ability of blocking extension of the crack by the first groove C1 may be further improved and the risk of crack extension may be effectively reduced.

[0062] Optionally, referring to FIG. 5 to FIG. 8, the encapsulation region A1 includes a display region A11 and a peripheral region A12 surrounding the display region A11, and the display substrate may further include: a barrier dam 04 disposed in the peripheral region A12. The barrier dam 04 may further be made of an organic material. An orthographic projection of the organic layer 03 on the base substrate 01 may not overlap an orthographic projection of the barrier dam 04 on the base substrate 01.

[0063] The barrier damp 04 is disposed in the peripheral region A12 and a gap may exist between the barrier dam 04 and the display region A11. Therefore, the organic material may be effectively prevented from flowing out of the encapsulation region A1 when an organic encapsulation film layer in an encapsulation film is formed by the organic material, the problem that the quality of the display region is affected by that moisture in the air enters the display region due to the hydrophilic characteristic of the organic material may be effectively avoided, and the quality of the display substrate may be further enhanced.

[0064] Optionally, referring to FIG. 5 to FIG. 8, the barrier dam may include at least one closed annular structure 041, wherein each annular structure may surround the display region A11 of the base substrate 01. The annular structure 041 surrounds the display region A11, such that the periphery of the display region A11 may be effectively protected.

[0065] Optionally, the barrier dam 04 may include a plurality of annular structures 041 which are spaced apart from each other. For example, FIG. 5 to FIG. 8 show the barrier dam 04, including two annular structures 041. Furthermore, the plurality of annular structures 041 may be spaced apart from each other, that is, a distance between each two of adjacent annular structures 041 may be a fixed value. The plurality of annular structures 041 are spaced apart from each other, such that effective protection on the display region A11 may be further improved. Exemplarily, the barrier dam 04 may be formed by a deposition mode.

[0066] It should be noted that, in the embodiment of the present disclosure, the base substrate 01 may be made of a flexible material. The flexible material may be a polyimide (PI) material and has good high-temperature resistance, low-temperature resistance, oxidation resistance and the like.

[0067] In conclusion, the embodiment of the present disclosure provides a display substrate. An edge region of a base substrate not only includes a plurality of first grooves running through at least one inorganic film layer, but also includes an organic layer covering the plurality of first grooves, wherein a hardness of an organic material for forming the organic layer is greater than to a hardness of an inorganic material for forming the inorganic film layer. Therefore, the impact resistance of the display substrate is effectively improved by soft and hard matching, an external force on the display substrate is buffered, the problem of encapsulation failure caused by extension of the crack to the encapsulation region is effectively addressed, and the quality of the display substrate is enhanced. Furthermore, by making the orthographic projections of the plurality of first grooves on the base substrate not overlap the bonding region, a metal wire disposed in the bonding region is prevented from being exposed and corroded when the first grooves are formed by an etching process, thereby ensuring the yield of the display substrate.

[0068] FIG. 10 is a flow chart of a manufacturing method for a display substrate according to an embodiment of the present disclosure. The method is used for manufacturing the display substrate as shown in any one of FIG. 1 to FIG. 8. As shown in FIG. 10, the method includes the following steps: In step 101, a base substrate is provided.

[0069] The base substrate is a glass substrate. Referring to FIG. 1, the base substrate 01 includes an encapsulation region A 1 and an edge region A2 disposed on a periphery of the encapsulation region A1, wherein the edge region A2 includes a bonding region disposed on a side where at least one side of the base substrate 01 is disposed.

[0070] Optionally, the base substrate 01 includes two flexible material layers and a barrier layer disposed between the two flexible material layers, wherein a flexible material forming the flexible material layer is a PI material.

[0071] In step 102, a plurality of stacked inorganic film layers are formed on a side of the base substrate from an inorganic material.

[0072] In the embodiment of the present disclosure, the plurality of inorganic film layers are formed on a side of the base substrate by a patterning process and by the inorganic material, wherein the patterning process includes: gluing, exposing, developing, and etching, and the inorganic material includes at least one of silicon oxide, silicon nitride and silicon oxynitride.

[0073] Optionally, the plurality of inorganic film layers includes: a barrier layer, a buffer layer, a gate insulator layer, and an interlevel dielectric layer which are sequentially stacked, wherein the barrier layer effectively prevents moisture or oxygen from entering the base substrate, such that moisture blocking, oxygen blocking and scraping resistance of the base substrate are improved. The inorganic material includes at least one of silicon oxide, silicon nitride and silicon oxynitride. Furthermore, the inorganic materials forming different inorganic film layers are the same or different.

[0074] In step 103, a plurality of first grooves, which are sequentially spaced apart from each other and extend along a periphery of the base substrate, are formed in the edge region and in a direction distal from the encapsulation region.

[0075] In the embodiment of the present disclosure, a part, disposed in the edge region A2, of at least one inorganic film layer of the plurality of inorganic film layers is etched to obtain the plurality of first grooves.

[0076] Each first groove runs through at least one inorganic film layer of the plurality of inorganic film layers, and orthographic projections of the plurality of first grooves on the base substrate do not overlap the bonding region. The first groove disposed in the edge region is formed, such that a crack in the edge region can be blocked.

[0077] Before the step 103, the method for manufacturing the display substrate further includes: forming a buffer layer on a side of the base substrate.

[0078] In the embodiment of the present disclosure, the buffer layer is formed from an inorganic material. Referring to FIG. 4, the buffer layer 022 includes a first butter pattern 0221 and a second buffer pattern 0222 which are formed integrally. An orthographic projection of the first buffer pattern 0221 on the base substrate 01 covers the encapsulation region A1 and a part of the edge region A2, and the second buffer pattern 0222 is disposed in the edge region A2. A thickness of the first buffer pattern is greater than a thickness of the second buffer pattern 0222. Furthermore, an orthographic projection of the organic layer 02 on the buffer layer 022 partially overlaps the second buffer pattern 0222, and an orthographic projection of a side, away from the encapsulation region A1, of the first groove C1 (namely the first groove C1 on the outermost side), most distal from the encapsulation region A1, of the plurality of first grooves C1 on the buffer layer 022 overlaps a border line of the first buffer pattern 0221 and the second buffer pattern 0222.

[0079] In step 104, an organic layer covering the plurality of first grooves is formed from organic material.

[0080] In the embodiment of the present disclosure, the organic layer covering the first groove is formed on a side, distal from the base substrate, of the plurality of first grooves. The organic layer covering the first groove is formed, such that buffer action is achieved when a collision occurs in a direction vertical to the base substrate. The hardness of the organic material is greater than the hardness of the inorganic material, and thus the impact resistance of the display substrate is further improved by soft and hard matching, and extension of the crack is further prevented effectively.

[0081] In conclusion, the embodiment of the present disclosure provides a method for manufacturing the display substrate. The plurality of first grooves running through the at least one inorganic film layer is formed in the edge region by the inorganic material, and the organic layer covering the plurality of first grooves is formed by the organic material with the hardness greater than that of the inorganic material, such that the impact resistance of the display substrate is effectively improved by soft and hard matching, an external force on the display substrate is buffered, and the problem of encapsulation failure caused by extension of the crack to the encapsulation region is effectively addressed. Thus, the problem that black spots are caused on the display substrate caused by that moisture or oxygen enters the display region through the crack when the crack extends to the display region is effectively prevented, and the quality of the display substrate is enhanced. Furthermore, by making the orthographic projections of the plurality of first grooves on the base substrate not overlap the bonding region, a metal wire disposed in the bonding region is prevented from being exposed and corroded when the first grooves are formed by an etching process, thereby ensuring the yield of the display substrate.

[0082] Optionally, forming the plurality of first grooves (namely the step 103) may include: etching a part, disposed in the edge region, of at least one inorganic film layer of the plurality of inorganic film layers to obtain the plurality of first grooves.

[0083] Before the at least one inorganic film layer is etched, the at least one to-be-etched inorganic film layer may be processed by gluing, exposing, and developing.

[0084] As shown in FIG. 3 and FIG. 4, in the plurality of inorganic film layers, at least one inorganic film layer which the first groove C1 runs through may include: a gate insulator layer 023 and an interlevel dielectric layer 024 which are sequentially stacked along a direction distal from the base substrate. Accordingly, the step 103 may be: etching parts, disposed in the edge region, of the gate insulator layers and the interlevel dielectric layers of the plurality of inorganic film layers.

[0085] The base substrate 01 needs to be cut in the edge region A2 of the base substrate 01 after a plurality of functional film layers are formed on the base substrate 01, such that the display substrate is obtained. Therefore, the probability of edge breakage of the display substrate caused by large cutting force may be effectively reduced by forming the second buffer pattern 0222 with small thickness on a side, distal from the encapsulation region A1, of the edge region A2, and the yield of the display substrate is further increased.

[0086] Furthermore, an orthographic projection of a side, proximal to the encapsulation region A1, of the first groove C1, most distal from the encapsulation region A1, of the plurality of first grooves C1 on the buffer layer 022 overlaps the border line of the first buffer pattern 0221 and the second buffer pattern 0222, that is, the orthographic projections of the plurality of first grooves C1 on the buffer layer 022 only overlap the first buffer pattern 0221. Therefore, by making the orthographic projection of the organic layer 03 on the buffer layer 022 partially overlap the second buffer pattern 0222, it may be ensured that that the organic layer 03 completely covers the barrier portions formed among the plurality of first grooves C1 and further ensure the impact resistance of the display substrate.

[0087] Before steps 102 to 104, or after steps 102 to 104, the method may further include: forming a barrier dam in the peripheral region, which the encapsulation region includes, from an organic material.

[0088] Optionally, the barrier dam may be formed on a side, distal from the base substrate, of the plurality of inorganic film layers by the organic material and by a deposition mode, wherein gap exists between the barrier dam and the display region. Furthermore, an orthographic projection of the organic layer on the base substrate does not overlap an orthographic projection of the barrier dam on the base substrate. The barrier damp is disposed in the peripheral region which the encapsulation region includes, and a gap exists between the barrier dam and the display region which the encapsulation region includes. Therefore, the barrier dam may effectively prevent the organic material from flowing out of the encapsulation region A1 when an organic encapsulation film layer in an encapsulation film is formed by the organic material, the problem that the quality of the display region is affected by that moisture in the air enters the display region due to the hydrophilic characteristic of the organic material may be effectively avoided, and the quality of the display substrate may be further enhanced.

[0089] In conclusion, the embodiment of the present disclosure provides a method for manufacturing the display substrate. The plurality of first grooves running through the at least one inorganic film layer is formed in the edge region by the inorganic material, and the organic layer covering the plurality of first grooves is formed by the organic material with the hardness greater than that of the inorganic material, such that the impact resistance of the display substrate may be effectively improved by soft and hard matching, an external force on the display substrate is buffered, and the problem of encapsulation failure caused by extension of the crack to the encapsulation region may be effectively addressed. Thus the problem that black spots are caused on the display substrate caused by that moisture or oxygen enters the display region through the crack when the crack extends to the display region may be effectively avoided, and the quality of the display substrate may be enhanced. Furthermore, by making the orthographic projections of the plurality of first grooves on the base substrate not overlap the bonding region, a metal wire disposed in the bonding region may be prevented from being exposed and corroded when the first grooves are formed by an etching process, thereby ensuring the yield of the display substrate.

[0090] The embodiment of the present disclosure provides a display device. The display device may include a display substrate as shown in any one of FIG. 1 to FIG. 8. The display may be: any products or parts with a display function, such as a liquid crystal panel, electronic paper, an OLED panel, an AMOLED panel, a mobile phone, a tablet personal computer, a television, a display, a notebook computer, a digital photo frame, a navigator, or the like, wherein the AMOLED panel may be a flexible display panel.

Claims

1. A display substrate, comprising: a base substrate (01) with a display region (A11), an encapsulation region (A1) and an edge region (A2) on a periphery of the encapsulation region (A1), wherein the edge region (A2) comprises a bonding region (A21) on at least one side of the base substrate (01); a plurality of stacked inorganic film layers (02) on a side of the base substrate (01); a plurality of first grooves (C1), at the edge region (A2), spaced apart from each other in a direction distal from the encapsulation region (A1), and extending along a periphery of the base substrate (01), wherein each first groove (C1) runs through at least one inorganic film layer (02) of the plurality of inorganic film layers (02), and orthographic projections of the plurality of first grooves (C1) on the base substrate (01) do not overlap the bonding region (A21); and an organic layer (03), covering the plurality of first grooves (C1); wherein the plurality of inorganic film layers (02) further comprise: a buffer layer (022) between the base substrate (01) and the at least one inorganic film layer (02), the buffer layer (022) comprising a first buffer pattern (0221) and a second buffer pattern (0222) which are integrally formed; an orthographic projection of the first buffer pattern (0221) on the base substrate (01) covers the encapsulation region (A1) and a part of the edge region (A2), the second buffer pattern (0222) is in the edge region (A2), a thickness of the first buffer pattern (0221) is greater than a thickness of the second buffer pattern (0222), and a direction of the thickness of the first buffer pattern (0221) and a direction of the thickness of the second buffer pattern (0222) are both vertical to a bearing surface of the base substrate (01); and an orthographic projection of the organic layer (03) on the buffer layer (022) partially overlaps the second buffer pattern (0222), and an orthographic projection of a side, away from the encapsulation region (A1), of the first groove (C1), most distal from the encapsulation region (A1), of the plurality of first grooves (C1) on the buffer layer (022) overlaps a border line of the first buffer pattern (0221) and the second buffer pattern (0222).

2. The display substrate according to claim 1, wherein the at least one inorganic film layer (02) comprises: a gate insulator layer (023) and an interlevel dielectric layer (024) which are sequentially stacked along a direction distal from the base substrate (01).

3. The display substrate according to claim 1, wherein the plurality of inorganic film layer (02) comprise: a barrier layer (021), the buffer layer (022), a gate insulator layer (023), and an interlevel dielectric layer (024) which are sequentially stacked along a direction distal from the base substrate (01); wherein the at least one inorganic film layer (02) comprises: the interlevel dielectric layer (024), the gate insulator layer (023), and a part of the buffer layer (022), or wherein the at least one inorganic layer film (02) comprises: the interlevel dielectric layer (024), the gate insulator layer (023), the buffer layer (022), and a part of the barrier layer (021).

4. The display substrate according to any one of claims 1 to 3, wherein an orthographic projection of each first groove (C1) on the base substrate (01) is of an annular shape with an opening; wherein the annular shape surrounds the encapsulation region (A1), and an orthographic projection of the opening on the base substrate (01) overlaps the bonding region (A21); and wherein a shape of a side, distal from the bonding region (A21), of the annular shape matches a shape of a side, distal from the bonding region (A21), of the display region (A11).

5. The display substrate according to claim 4, wherein the encapsulation region (A1) comprises the display region (A11) and a peripheral region (A12) surrounding the display region (A11), and the annular shape comprises: a first side edge (C11), a second side edge (C12), a third side edge (C13), and a fourth side edge (C14) which are sequentially connected to each other; wherein a distance between the first side edge (C11) and a side, distal from the display region (A11), of the peripheral region (A12) is equal to a distance between the third side edge (C13) and a side, distal from the display region (A11), of the peripheral region (A12); a distance between an intersection of the first side edge (C11) and the second side edge (C12), and a side, distal from the display region (A11), of the peripheral region (A12) is less than a distance between an intersection of the first side edge (C11) and the fourth side edge (C14), and a side, distal from the display region (A11), of the peripheral region (A12); a distance between an intersection of the third side edge (C13) and the second side edge (C12), and a side, distal from the display region (A11), of the peripheral region (A12) is less than a distance between an intersection of the third side edge (C13) and the fourth side edge (C14), and a side, distal from the display region (A11), of the peripheral region (A12); and the first side edge (C11) and the third side edge (C13) are oppositely arranged, the second side edge (C12) and the fourth side edge (C14) are oppositely arranged, the fourth side edge (C14) is disposed on a side where the bonding region (A21) is disposed, and the fourth side edge (C14) is provided with the opening.

6. The display substrate according to claim 5, wherein the fourth side edge (C14) comprises a first portion (C141) and a second portion (C142) which are separated by the opening; wherein an angle formed by the first side edge (C11) and the first portion (C141), and an angle formed by the third side edge (C13) and the second portion (C142) are greater than or equal to 90 degrees.

7. The display substrate according to any one of claims 4 to 6, wherein the bonding region (A21) comprises a wiring fanout region (A212) and a bonding pad (A211), and the bonding pad (A211) overlapping the opening; wherein two ends of the first groove (C1) are on the edge of a side, near a side of the bonding region (A21), of the base substrate (01), and a distance between each of two ends of the first grooves (C1) and the bonding pad (A211) is 5 to 10 microns.

8. The display substrate according to any one of claims 1 to 7, wherein the base substrate (01) is a flexible substrate, the bonding region (A21) comprises: a first sub-region (A3), a bending region (A4), and a second sub-region (A5) which are sequentially distal from the encapsulation region (A1), and the bonding pad (A211) in the bonding region (A21) is in the second sub-region (A5); wherein orthographic projections of the two ends of the first groove (C1) on the base substrate (01) do not overlap the bending region (A4), and are on a side, proximal to the bending region (A4), of the first sub-region (A3).

9. The display substrate according to claim 8, wherein the plurality of inorganic film layers (02) further comprises a second groove, an orthographic projection of the second groove on the base substrate (01) covering the bending region (A4); and the plurality of inorganic layers comprise: a barrier layer (021), the buffer layer (022), a gate insulator layer (023), and an interlevel dielectric layer (024) stacked along a direction distal from the base substrate (01), wherein the second groove runs through the interlevel dielectric layer (024), the gate insulator layer (023), the buffer layer (022), and a part of the barrier layer (021).

10. The display substrate according to any one of claims 1 to 9, wherein a distance between a side, proximal to the encapsulation region (A1), of the first groove (C1), proximal to the encapsulation region (A1), of the plurality of first grooves (C1) and a side, proximal to the encapsulation region (A1), of the first groove (C1), distal from the encapsulation region (A1), of the plurality of first grooves (C1) is 60 microns.

11. The display substrate according to any one of claims 1 to 10, wherein the encapsulation region (A1) comprises the display region (A11) and a peripheral region (A12) surrounding the display region (A11), and the display substrate further comprises a barrier dam (04); wherein an orthographic projection of the organic layer (03) on the base substrate (01) do not overlap an orthographic projection of the barrier dam (04) on the base substrate (01).

12. The display substrate according to claim 1, wherein the inorganic film layer (02) between each two of adjacent first grooves (C1) forms a barrier portion (B1).

13. A display device, comprising the display substrate as defined in any one of claims 1 to 11.

14. A method for manufacturing a display substrate, comprising: providing a base substrate (01), wherein the base substrate (01) is provided with a display region (A11), an encapsulation region (A1) and an edge region (A2) on a periphery of the encapsulation region (A1), the edge region (A2) comprising a bonding region (A21) on at least one side of the base substrate (01); forming a plurality of stacked inorganic film layers (02) on a side of the base substrate (01) from an inorganic material; forming a plurality of first grooves (C1) which are sequentially spaced apart from each other and extend along a periphery of the base substrate (01) on the edge region (A2) in a direction distal from the encapsulation region (A1), wherein each first groove (C1) runs through at least one inorganic film layer (02) of the plurality of inorganic film layers (02), and orthographic projections of the plurality of first grooves (C1) on the base substrate (01) do not overlap the bonding region (A21); and forming an organic layer (03) covering the plurality of first grooves (C1) from an organic material; wherein, the plurality of inorganic film layers (02) further comprise: a buffer layer (022) between the base substrate (01) and the at least one inorganic film layer (02), the buffer layer (022) comprising a first buffer pattern (0221) and a second buffer pattern (0222) which are integrally formed; an orthographic projection of the first buffer pattern (0221) on the base substrate (01) covers the encapsulation region (A1) and a part of the edge region (A2), the second buffer pattern (0222) is in the edge region (A2), a thickness of the first buffer pattern (0221) is greater than a thickness of the second buffer pattern (0222), and a direction of the thickness of the first buffer pattern (0221) and a direction of the thickness of the second buffer pattern (0222) are both vertical to a bearing surface of the base substrate (01); and an orthographic projection of the organic layer (03) on the buffer layer (022) partially overlaps the second buffer pattern (0222), and an orthographic projection of a side, away from the encapsulation region (A1), of the first groove (C1), most distal from the encapsulation region (A1), of the plurality of first grooves (C1) on the buffer layer (022) overlaps a border line of the first buffer pattern (0221) and the second buffer pattern (0222).

15. The method for manufacturing the display substrate according to claim 14, wherein the inorganic film layer (02) between each two of adjacent first grooves (C1) forms a barrier portion (B1).