Adhesive for peelable emulsion layers, peelable emulsion layer, peelable emulsion layer-mounted exposure original plate, method for manufacturing a semiconductor device, method for manufacturing a liquid crystal display board, method for regenerating an exposure original plate and method for reducing peelable residue
Patent Information
- Authority / Receiving Office
- DE · DE
- Patent Type
- Patents
- Current Assignee / Owner
- SHIN ETSU CHEMICAL CO LTD
- Filing Date
- 2020-04-15
- Publication Date
- 2026-06-03
AI Technical Summary
The challenge of reducing peeling residues of the agglutinant layer on exposure original plates, particularly during ArF lithography, which hinders efficient regeneration cleaning and damages delicate phase shift films, is not adequately addressed by existing technologies.
Employing an acrylic polymer with an SP value of 10.0 to 12.0 as the base material for the agglutinant, incorporating a (meth)acrylic acid ester with an ether bond in the side chain, and using a polyvinyl ether compound to enhance the pellicle's peeling characteristics, thereby reducing residues and maintaining adhesive strength.
The pellicle effectively minimizes peeling residues, allowing for smoother regeneration cleaning and reducing damage to the exposure original plate, enhancing production efficiency in semiconductor devices and liquid crystal display boards.