Flexible glass element and method for its production

EP4526268A1Pending Publication Date: 2025-03-26SCHOTT AG
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Patent Information

Application Number
EP2023723832
Authority / Receiving Office
EP · EP
Patent Type
Applications
Current Assignee / Owner
Priority Date
2022-05-17
Filing Date
2023-04-26
Publication Date
2025-03-26

AI Technical Summary

Technical Problem

Glass elements, being brittle and hard, are prone to damage from abrupt mechanical shocks, which can lead to cracks and leaks, especially in applications requiring gas-tightness and protection against dirt or moisture, such as electrical feedthroughs, where existing solutions only limit crack propagation rather than preventing damage entirely.

Method used

A glass element is structured with a connecting section that is flexible, bendable, and compressible, allowing the second section to move relative to the first section without opening hermetically sealed volumes, achieved by reducing thickness and creating surface offsets or channels, enabling deformation and maintaining gas-tightness.

Benefits of technology

The solution provides enhanced resistance to mechanical influences by allowing deflection perpendicular to the surface, reducing material stress, and preventing damage, while maintaining gas-tightness, thus making the glass element more resistant to repeated mechanical shocks.

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Abstract

The invention relates to a glass element (1) with a second portion (5) which can be deflected with respect to a first portion (3), wherein the first portion (3) and the second portion (5) are connected to one another by way of a connecting portion (7), wherein the first portion (3), the second portion (5) and the connecting portion are formed in one piece and wherein the connecting portion (7) is designed to be flexibly deformable in such a way that the connecting portion is bendable, and extendable or compressible, and so the second portion (5) is movable with respect to the first portion (3) by the connecting portion (7) being deformed.
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Description

[0001] Flexible glass element and method for its production

[0002] Description

[0003] The invention generally relates to the structuring of glass. In particular, the invention relates to structuring glass in such a way that the glass acquires locally increased flexibility.

[0004] The structuring of glass to insert openings or recesses of any shape is known from the prior art, for example from DE 10 2018 100 299 Al and DE 10 2018 110 211 Al.

[0005] EP 3 936 485 A1 describes a flexible element made of an inorganic, brittle material and its production. The element has at least three sections, wherein a first section is arranged between two second sections. The first section comprises an arrangement of openings that form passages from one side to the opposite side of the element, such that the first section has greater flexibility than the second sections. The first section thus acts like a hinge between the two second sections. In some cases, however, it can be undesirable or disadvantageous for a glass element to have through-openings. This can be the case, for example, if the glass element is intended to be gas-tight and / or to offer protection against dirt or moisture. The arrangement of the openings is furthermore designed in particular to enable bending.However, it may also be desirable to allow for simple stretching or compression of the flexible section. This is the case, among other things, when mechanical damping of an inner section of the glass element is required compared to surrounding sections separated from the inner section by the flexible section. Glass, as a brittle and hard material, is particularly susceptible to the problem that abrupt mechanical impacts can lead to damage. This problem occurs, among other things, in electrical feedthroughs, where an impact, for example on the feedthrough conductor, can lead to a crack and thus to a leak in the feedthrough. WO 2021 / 061481 A1 discloses a feedthrough in which the glass insulation has a trench surrounding the feedthrough conductor. This trench is intended to prevent a crack from propagating further due to mechanical impact.The disadvantage here is that although crack propagation and thus damage are limited, they are still present. It would be desirable, however, to prevent damage altogether in order to make the penetration more resistant to repeated mechanical impacts.

[0006] The invention is therefore based on the object of providing a glass element that has the additional properties mentioned above. The object of the invention is also to provide a workpiece that is originally inflexible or only minimally flexible with local flexibility through structuring, in which a specific area becomes deflectable relative to the rest of the element through a surrounding structuring. The structuring should be so pronounced that the deflection is enabled, in particular, perpendicular to the workpiece surface, or has at least one perpendicular component.

[0007] For this purpose, a glass element is provided with a second section which can be deflected relative to a first section, wherein the first section and the second section are connected to one another via a connecting section, wherein the first section, the second section and the connecting section are formed in one piece and wherein the connecting section is designed to be flexibly deformable in such a way that the connecting section is bendable and expandable or compressible, so that the second section can be moved relative to the first section while deforming the connecting section.

[0008] In particular, the structuring of the connecting section can be such that the structuring does not open the volumes hermetically separated from each other by the workpiece, thus remaining gas-tight. Accordingly, in a preferred embodiment of the invention, the connecting section can form a gas-tight connection between the first section and the second section.

[0009] According to a preferred embodiment, the glass element is plate-shaped, with the first section surrounding the second section. In this case, the second section can, for example, form a button that can be actuated, in particular pressed, relative to the surrounding glass pane or the surrounding first section.

[0010] In order to facilitate the deformability of the connecting section, it is further preferred if the connecting section has a thickness that is at least partially reduced compared to the first and / or second section.

[0011] The deformability, in particular also the expansion or compression, can be achieved particularly effectively in that the connecting section has at least one surface offset, such that the connecting section has at least two regions whose surfaces are at different heights in the direction perpendicular to the surface of the first or second section. As a result of this shaping, expansion or compression can be translated into a bending of the material between these two regions. As a result of the bending, the two regions can move away from one another or towards one another. In particular, the connecting section can have at least one loop or meander. The connecting section thus takes on a cross-sectional shape similar to a bellows, in particular a folded or corrugated bellows.

[0012] The invention is explained in more detail below with reference to the accompanying figures. In the figures, like reference numerals refer to like or corresponding elements.

[0013] Short description of the characters

[0014] Fig. 1 shows a plan view of a plate-shaped glass element.

[0015] Fig. 2 is a cross-sectional view of the plate-shaped glass element.

[0016] Fig. 3 shows a tubular glass element.

[0017] Fig. 4 shows a plate-shaped glass element in cross section.

[0018] Fig. 5 shows a variant of the example in Fig. 4.

[0019] Fig. 6 shows four examples of glass elements with differently shaped connecting sections.

[0020] Fig. 7 shows a diagram showing the stresses occurring at the connecting element and the deflections of a section of the glass element under various forces. Fig. 8 shows a glass element with a second section deflected under the application of force.

[0021] Fig. 9 shows a diagram with the stresses and forces occurring for a given deflection for different designs of glass elements.

[0022] Fig. 10 to Fig. 12 show process steps for producing a glass element.

[0023] Fig. 13 shows a variant of the glass element with obliquely running dislocation stripes.

[0024] Fig. 14 shows a switch button with a glass element.

[0025] Fig. 15 shows a variant of the switch button.

[0026] Fig. 16 shows a control panel of a smartphone or tablet PC.

[0027] Fig. 17 shows a sensor with a glass element.

[0028] Fig. 18 shows an electrical feedthrough.

[0029] Detailed description of the characters

[0030] Fig. 1 shows a schematic plan view of a glass element 1. According to one embodiment, which also forms the basis for the example shown in Fig. 1, the glass element 1 is plate- or disc-shaped. The glass element 1 is divided into a first section 3, a second section 5 and a connecting section 7 connecting the two sections 3, 5. The three sections 3, 5, 7 are formed in one piece or monolithically. This means in particular that the three sections 3, 5, 7 are formed from the same glass. In general, without being limited to the example shown, it is preferred that the first region 3 surrounds the second region 5 in the case of a plate- or disc-shaped glass element 1, so that the second section 5 is preferably completely surrounded by the first section 3.The connecting section 7 here accordingly has the shape of a closed or circumferential ring which encloses the second section 5 and surrounds it in a ring-like manner. In the purely schematic example shown, the connecting section 7 has sharp corners. In practice, contrary to what is shown, it can generally be advantageous to facilitate deformation if the connecting section 7 has rounded corners. The connecting section 7 is flexible and can, in particular, be stretched or compressed. In the example shown, the extensibility is of particular importance. Because the connecting section 7 can be stretched, it is possible to deflect the second region 5 relative to the first region 3 in a direction perpendicular to the surface.In general, without being limited to specific embodiments, a further development of the invention therefore provides that the connecting section 7 enables a movement of the second section 5 relative to the first section 3 in a direction with a component perpendicular to the surface of the second section 5. In particular, this movement can also be exactly perpendicular to the surface, or along the surface normal of the second section 5. If necessary, movements that are essentially perpendicular can also be desired. For the purposes of this disclosure, this is understood to mean a movement whose movement component perpendicular to the surface of the second section 5 is greater in magnitude than the movement component along, i.e. parallel to, the surface of the second section 5.

[0031] This is illustrated in more detail by the schematic cross-sectional view of a plate-shaped glass element 1 according to Fig. 2. The glass element 1 has two opposite sides 10, 11. By applying a force, for example by pressure using a finger, the second section 5 can be deflected in a direction perpendicular to the sides 10, 11. In Fig. 2, the second section 5 is shown in a deflected position; the direction of the deflection is symbolized by an arrow. As can be seen from Fig. 2, the deflection of the second section 5 requires, on the one hand, a bend and, on the other hand, an extension of the connecting section 7.

[0032] Another embodiment is shown in Fig. 3. In this embodiment, the glass element 1 is designed as a tube. Sections 3, 5, 7 are longitudinal sections of the tube, with the two sections 3, 5 being connected to each other by the connecting section 7. Because the connecting section 7 is not only bendable but also expandable or compressible, this arrangement allows the two sections 3, 5 to be angled relative to each other.

[0033] How the connecting section 7, shown only schematically in Figs. 1 to 3, is shaped to enable such deformation is explained in more detail below using various embodiments. Fig. 4 shows a section of a glass element 1 in cross section. The glass element 1 has a first section 3 and a second section 5, which are connected to one another via a connecting section 7, wherein the connecting section 7 has a certain flexibility that allows stretching or compression, as well as bending, so that the two sections 3, 5 can be tilted relative to one another and offset transversely to their sides 10, 11.

[0034] To enable this flexibility, the connecting section 7, as in the example shown, has a thickness that is at least partially reduced compared to the first or second section 3, 5. This already enables easier bending of the glass element 1 at the connecting section 7. The glass element 1 is preferably structured such that the thickness, at least partially reduced compared to the first or second section 3, 5, has a value in the range of 10 pm to 200 pm, preferably in the range of 20 pm to 100 pm.

[0035] In order to enable stretching or compressing of the connecting section 7, according to a preferred embodiment, it is generally provided, without limitation to the example shown, that the connecting section 7 has at least one step or surface offset 8, such that the connecting section 7 has at least two strips 70, 71, the surfaces of which are at different heights in the direction perpendicular to the surface of the first or second section 3, 5. These offset strips 70, 71 can in particular be connected to one another by a further strip of the connecting section 7. Such a strip is referred to below as an offset web. Preferably, the offset web 9 is tilted in its orientation by 90° relative to the orientation of the sides of the sections 3, 5, as in the exemplary embodiment shown in Fig. 4.If sides 10, 11 of sections 3, 5 are horizontal, the offset web 9 is oriented vertically. The tilt does not have to be exactly 90°; in general, the offset web 9 can be oriented relative to one of the sides 10, 11 of one of the sections 3, 5 such that an angle in the range of 60° to 120°, preferably 80° to 100°, exists between the side 10, 11 and the surface of the offset web 9.

[0036] In general, the expandability and compressibility of the connecting section 7 is achieved by the connecting section 7 having regions with mutually inclined surfaces, or surfaces with varying surface normals. This allows expansion or compression to be easily translated into a slight change in the angle between the surfaces. As can be seen from Fig. 4, the surface of the connecting section 7 is shaped to form at least one groove or channel 13. This feature is not limited to the specific example. The connecting section 7 is then expandable or compressible in a direction perpendicular to the longitudinal direction of the channel 13. Particularly preferably, a plurality of channels 13 are formed such that adjacent channels are open toward different sides 10, 11 of the glass element 1. If the connecting section 7 is annular, this also applies to the one or more channels 13.Without being limited to the example shown, a further development of this embodiment provides for the connecting section to have at least 3, or according to a further development, at least 5, grooves 13. With the number of grooves, the total width of the connecting section also increases for a given width of the grooves. Therefore, on the other hand, it is advantageous if the connecting section 7 has a maximum of 200, preferably a maximum of 100, grooves. However, the number of grooves 13 is preferably limited to a maximum of 50, in particular a maximum of 20, in order to reduce manufacturing costs. The grooves 13 generally and preferably typically run concentrically.

[0037] In the example of Fig. 4, only a single offset web 9 is present, which forms the side wall of two adjacent grooves 13. A higher extensibility or compressibility is achieved if several such offset webs 9 are present. Fig. 5 shows an example of a general embodiment in which the connecting section 7 has a groove 13 which runs at a distance from the transitions from the connecting section 7 to the adjacent first and second sections 3, 5. This groove 13 can, as shown, be delimited by two such offset webs 9. The shape of the connecting section 7 can also be described in such a way that the connecting section 7 has at least one loop or meander. Part of this loop or meander is the groove 13, or the sequence of grooves 13 open to opposite sides 10, 11 of the glass element 1. As can be seen from the embodiments of Fig. 5 and Fig.6, the connecting section 7 is designed as a continuous connection without openings. In general, without limitation to the specific examples, a particularly preferred embodiment therefore provides for the connecting section 7 to form a fluid-tight, in particular also gas-tight, connection between the first section 3 and the second section 5. This enables the glass element 1 to be used in a simple manner for applications in which the glass element 1 is also intended to provide a barrier against the effects of gases or liquids. For example, this is advantageous for use as a cover for displays. The glass element 1 according to this disclosure thus also enables displays to be designed to be flexible, in particular hinged or foldable.

[0038] A groove 13, as shown in Fig. 5, can now be varied in terms of its shape in various ways. Fig. 6 shows four different designs of a groove 13 of the connecting section 7. In example a), the middle groove 13 is narrow and flat. In example b), the groove 13 is also flat, but shaped wider. In example c), a narrow but deep groove 13 is provided. Finally, example d) has both a wide and a deep groove. The following examines how the different groove shapes affect the deformability of the connecting section 7. Glass elements 1 with a thickness of 1 mm were used for this purpose. The glass thickness in the connecting section 7 is reduced by a factor of 20 to 0.05 mm. The transitions between the strips 70, 71 and the offset webs 9 are, unlike what is shown in the figures, slightly rounded with edge radii of 0.025 mm on all edges.For wide strips 70, 71 and wide offset webs, their width was 0.9 mm each. For short strips 70, 71 and offset webs 9, such as in example a) of Fig. 6, the width was a quarter of this value, i.e., approximately 0.225 mm. It is clear that the representation in Fig. 6 is not to scale in this regard, since the narrow strips and webs of the calculated examples are significantly narrower in relation to the wide strips and webs than shown in the schematic representation.

[0039] Fig. 7 shows a diagram with the stresses that occur on differently shaped connecting elements and the resulting deflections under different forces. The connecting sections 7 are shown schematically below the diagram and labeled with the letters a) - d). These letters identify the embodiments shown in Fig. 6. The deflection of the second section 5 relative to the first section 3 under the action of a force perpendicular to one of the sides 10 or 11 and the resulting deflection perpendicular to side 10 or 11 were calculated. The four embodiments are arranged in Fig. 7 from left to right in descending order with regard to the maximum stress that occurs during deflection. The maximum stress occurs at an inner edge that is under tensile stress. As can be seen from the diagram, the various embodiments behave very differently with regard to maximum stress and deflection.The embodiments with narrow grooves (embodiments a) and c)) are characterized by smaller deflections and, at the same time, lower maximum principal stresses. The embodiments with wide grooves 13, in contrast, have comparatively large deflections and also large maximum stresses for a given force. As explained, the maximum tensile stresses that occur depend on the shape and dimensions of the connecting section. In general, the connecting section 7 can be designed such that a maximum stress arises at the connecting section 7 under load that is less than 400 MPa, preferably less than 200 MPa, in particular less than 100 MPa and very particularly preferably less than 80 MPa.

[0040] Maximum voltage refers specifically to the maximum deflection specified by the respective application. For example, a switch may be provided with a stop that limits the deflection. The maximum voltages mentioned above then refer to the maximum deflection determined by the stop.

[0041] For clarity, Fig. 8 also shows the embodiment according to Fig. 6 b) under the action of a force F. The force F deflects the second section 5 perpendicular to the surface, or rather to the sides 10, 11. The area of ​​maximum tensile stress 15, which occurs at the inner edge at the transition from the connecting section 7 to the first section 3, is marked in Fig. 8.

[0042] Fig. 9 shows a diagram with the stresses and forces occurring for a given deflection for the same embodiments of glass elements 1 as the diagram in Fig. 7. The values ​​obtained by simulation calculation refer to a deflection of 0.03 mm. The values ​​associated with the solid line indicate the maximum stresses occurring for a deflection of 0.03 mm. The values ​​associated with the dashed line are the forces required for the specified deflection.

[0043] The required force (dashed curve) for the same deflection is 10 times smaller for the embodiment shown in Fig. 6 b) (left in the diagram) than for the embodiment shown in Fig. 6 c). In contrast, the stresses vary only by a factor of about 4, with the maximum value for the "narrow and short" variant shown in Fig. 6 a).

[0044] All of the embodiments shown here have advantages and disadvantages depending on the application. For example, stiffer or more flexible connections may be desired. However, in some applications, large deflections with the lowest possible stresses are particularly advantageous. These properties are achieved in particular with wide horizontal webs or wide strips 70, 71. In contrast, long vertical webs, i.e. long offset webs 9, result in stiffer connecting elements. In order to obtain a connecting section 7 that is easier to deform, it is therefore advantageous if the sum of the widths of the at least two strips 70, 71 located at different heights is greater than the width of the offset web 9 connecting the two strips 70, 71. The width of the offset web 9, like the width of the strips 70, 71, is measured along their surfaces.For the widths of the strips 70, 71 and the offset web 9, the widths on the opposite sides can be averaged for precise determination. For the strip 70 of the example shown in Fig. 5, the averaged width measurement thus ends at the center line of the offset strip 9. The averaged width measurement B is shown in Fig. 5 for illustrative purposes. Preferably, the sum of the widths of two strips 70, 71 is at least a factor of 3 greater than the width of the offset web 9. This is the case, for example, in the example shown in Fig. 6 b).

[0045] Regardless of the specific shape, it is provided in a further development of the glass element that the section 7 is structured in such a way that the stresses in the material of the element, i.e. in the glass, caused by a movement of the second section 5 relative to the first section 3 are reduced by at least 50%, preferably at least 90%, particularly preferably at least 99%, compared to the movement, such as a bending of an unstructured section, in particular an unstructured section without thickness reduction.

[0046] In general, the relative deflectability of the two sections 3, 5 also depends on the width of the connecting section 7. In general, the wider the connecting section 7, the easier it is to deform. To this end, it is advantageous if the connecting region 7 has a width that is at least 10% of the thickness of the glass element 7. If the thickness of the glass differs in the regions 3, 5, the aforementioned condition applies with respect to the larger of the thicknesses. More preferred is a width of the connecting section 7 that is at least 20% of the thickness of the glass element 1. Particularly preferred is a width of the connecting section 7 of at least 50% of the glass thickness. If the width is too large, however, the stability of the glass element 1 can also be reduced. It is therefore also generally preferred if the width of the connecting section is at most 150% of the thickness of the glass element 1.

[0047] A glass element 1 as described here can be produced by first providing a preform of a glass element and subsequently selectively removing material from the preform, such that the removal of the material creates a connecting section 7 which connects adjacent sections, namely a first section 3 and a second section 5, and which is bendable, stretchable, or compressible, so that the first and second sections 3, 5 are movable relative to one another. Several methods can be used and, if necessary, combined to remove the material. These methods can include structuring laser ablation, selective laser etching, ablation with etching, etching with masking, in particular a lithography method, sandblasting, and ultrasonic oscillating lapping. Another method that can be used for the structuring described here is described in DE 10 2018 110 211.9, the content of which with regard to the creation of depressions in glass is also made the subject of the present disclosure in its entirety. The method described therein is based on the insertion of a cavity in a substrate made of brittle material, preferably glass, by directing the laser beam of an ultrashort pulse laser onto one of the side surfaces of the substrate, in this case onto the preform of the glass element 1 to be produced, and concentrating it with focusing optics to an elongated focus in the substrate. The radiated energy of the laser beam creates filament-shaped damage in the volume of the substrate, which extends into the volume to a predetermined depth and does not pass through the substrate.After introducing at least two filamentary defects, the substrate is exposed to an etching medium, which removes material from the substrate and expands the at least two filamentary defects into filaments, whereby at least two filaments are connected to form a cavity. Such a cavity can then form a groove 13 of the connecting section 7.

[0048] In general, the material can be removed by etching, in particular by prior creation of filament-shaped damage, or, as described above, by ablation or by abrasive removal.

[0049] 10 to 12 show, for illustration, method steps for producing a glass element 1 according to a further embodiment. The method is based on selective material removal brought about by means of a mask. First, a mask 17 in the form of a structured coating is applied to a glass element preform 2, as shown in Fig. 10. This can also be done by applying the layer in an unstructured manner and then structuring it, for example lithographically. The mask 17 is structured such that it has openings 19. Subsequently, as shown in Fig. 11, glass is removed in the region of the openings 19, so that the glass thickness is locally reduced and depressions are created. Finally, the mask 17 can be removed and, as shown in Fig.12, a glass element 1 is obtained in which the recesses form grooves 13 of a flexible connecting section 7 that are open toward opposite sides. The glass can be removed abrasively, for example by sandblasting, or by etching.

[0050] The glass element 1 can also be further processed after structuring and the resulting production of the connecting section 7. This includes, among other things, processing the surface of the glass element 1 on one or both sides. Such processing can include coating on one or both sides. However, prestressing is also particularly conceivable. Chemical prestressing is particularly preferred here. According to a further development, the glass element 1 is accordingly chemically prestressed. It is also advisable for the prestressing to be carried out after structuring, i.e. after the production of the connecting section 7. In this case, the glass element including the connecting section 7 is accordingly prestressed, in particular chemically prestressed. As a result of the prestressing, a compressive stress zone is present on both sides of the glass element, including the opposite surfaces of the connecting section 7.The compressive stress is caused by an exchange layer created by tempering. In the exchange layer, ions in the glass are at least partially replaced by larger ions. The exchange of sodium ions by potassium ions is common. In this case, the exchange layer on both sides has a higher potassium concentration than the glass inside the glass element.

[0051] Fig. 13 shows a variant of the glass element 1 with at least one displacement strip 9 running obliquely to the surface of the glass element 1, i.e. obliquely to at least one of the sides 10, 11. Preferably, a plurality of displacement strips 9 are arranged obliquely, as in the example shown. In other words, the angle of the surfaces of at least one of the displacement strips 9 deviates from a 90° angle to the sides 10, 11. As a result of this arrangement, the grooves 13 are also arranged obliquely when viewed in cross-section. The central plane 14 of the grooves 13 is accordingly also obliquely to the sides 10, 11. With such an arrangement, it can be achieved that the force required for a deflection becomes dependent on the direction of the deflection, so that, for example, the force for a deflection in one direction from side 10 to side 11 differs from a deflection in the opposite direction.Without being limited to specific embodiments, according to a further development, it is generally provided that the connecting section 7 is shaped such that the forces for deflections of the sections 3, 5 differ relative to one another when these deflections occur in opposite directions. Such an asymmetry of the deflection forces can also be achieved with shapes other than the obliquely running grooves 13 described above. A glass element 1 as described herein has diverse applications. Fig. 14 shows an operating element, specifically a manually operable switch button 21. The operating surface of the switch button 21 is formed by a glass element 1 according to this disclosure. For example, an electrical switch covered by the glass element 1 can be actuated with the glass element 1. In the example in Fig.14, the second section 5 represents a control element with which a switch button 21 located underneath can be actuated.

[0052] Fig. 15 illustrates a variant in which the glass element 1 itself is part of an electrical switch. For this purpose, a switching contact 24, for example in the form of a conductive coating, is arranged on the glass element 1. By pressing on the second section 5, this can be moved toward another switching contact 22, so that the two switching contacts 22, 24 touch and establish electrical contact, or close an electrical circuit. Without being limited to the examples shown, one embodiment thus provides for the glass element 1, or more specifically the second section 5, to be used as part of an electrical switch.

[0053] The deflectability of the second section 5 relative to the first section 3 can serve, among other things, to provide the operator with haptic feedback. One possible application here is the cover panel of a display, for example a display of a smartphone or tablet PC. The cover panel can thus be provided with an integrated operating switch thanks to the movable second section 5. One such example is the mobile electronic device 20 shown in Fig. 16. The mobile electronic device 20 can, as mentioned, be a smartphone or a tablet PC and has a display 27 that is protected by a transparent cover panel 20. The cover panel 20 is formed by a glass element 1 according to this disclosure. The display 27 is covered by the first section 3 of the glass element 1. The second section 5 is a button, as shown, for example, in Fig. 14 or Fig. 15.This control element can serve as a so-called “home button”.

[0054] Fig. 17 shows a further application. The glass element 1 can be used as a component of a sensor 29. The sensor 29 can in particular be designed to detect the deflection of the second section 5, for example in order to measure forces or pressures. For pressure measurement, it is particularly advantageous that the connecting section 7 is flexible and at the same time can be fluid-tight. One possibility, which is also implemented in the example shown in Fig. 17, is optical detection of the deflection of the second section 5. In this example, a laser diode 31 is provided, the laser beam 32 of which is directed onto the second section 5. The laser beam 5 reflected from the surface of the glass element 1, or from the second section 5, is detected by a detector 33. A deflection of the second section 5 results in a change in the position of the point of impact of the laser beam 32 on the detector.Another possibility is capacitive detection. In this case, the second section can be provided with an electrode, for example, with an electrically conductive coating. A change in the position of the second section 5 can then be detected based on the change in distance to a second electrode and the associated change in capacitance.

[0055] Conversely, the glass element 1 can also be part of an actuator 30. In the example shown, the second section 5 could be actively moved to deflect a laser beam 32.

[0056] Another particularly advantageous application is the use of the glass element 1 as insulation for an electrical feedthrough. The example of such an electrical feedthrough 35 is shown in Fig. 18. In general, and without limitation to the example shown, an electrical feedthrough 35 with a glass element 1 according to this disclosure is provided, in which a feedthrough conductor 41 is passed through the second section 5 of the glass element and is sealingly connected to the glass of the glass element 1, and wherein the glass element 1 is connected at the first section 3 to a flange or a socket 37 such that the feedthrough conductor 41 is held at a distance from the socket and the glass element 1 provides electrical insulation of the feedthrough conductor 41 from the socket, and wherein the connecting section 7 extends between the socket 37 and the feedthrough conductor 41 and in a ring shape around the feedthrough conductor 41.

[0057] This arrangement ensures that the feedthrough conductor 41 is movable relative to the socket. The special design of the connecting area 7, which is expandable and compressible, and thus also tiltable, allows both lateral and axial impacts acting on the feedthrough conductor to be absorbed without damaging the feedthrough 35.

[0058] According to one embodiment, which is also implemented in the example of Fig. 18, the glass element 1 is connected to the socket 37 by means of a glass solder 39. Likewise, the feedthrough conductor 41 can also be fastened with glass solder in a suitable opening in the second section 5 of the glass element 1. This embodiment makes it possible to prefabricate the glass element 1 with the structuring of the connecting section 7 and then to complete the feedthrough 35 by assembling the feedthrough conductor 41 and socket 37 and preferably hermetically connecting these components with glass solder 39.

[0059] According to another embodiment, the feedthrough can also be manufactured first by glazing the feedthrough conductor 41 into the socket 37, and then subsequently structuring the glazing by removing glass to produce the connecting section 7. During the glazing process, the feedthrough conductor 41 and the socket 37 are held in a mold, and the space between them is filled with glass material. The assembly is then heated until the glass material melts and forms a glass element, or rather, a glass preform.

[0060] It will be apparent to those skilled in the art that the various embodiments described herein can also be varied and combined in numerous ways. Thus, the disclosure is not limited, among other things, to glass elements with a single second section 5. Rather, a glass element 1 can have several such second sections 5 that are movable relative to the first section 3 by means of a connecting section 7. These second sections 5 can also be shaped differently depending on the application. List of reference symbols

Claims

AMENDED CLAIMS received by the International Bureau on 29 August 2023 (29.08.2023) 1. Glass element (1) with a second section (5) that is deflectable relative to a first section (3), wherein the first section (3) and the second section (5) are connected to each other via a connecting section (7), wherein the first section (3), the second section (5) and the connecting section are formed in one piece and wherein the connecting section (7) is designed to be flexibly deformable, such that the connecting section is bendable, as well as stretchable or compressible, so that the second section (5) is movable relative to the first section (3) by deformation of the connecting section (7), characterized in that the connecting section (7) has at least one loop or meander (70).

2. Glass element (1) according to the preceding claim, characterized in that the connecting section (7) enables a movement of the second section (5) relative to the first section (3) in a direction with a component perpendicular to the surface of the second section (5).

3. Glass element (1) according to the preceding claim, characterized in that the connecting section (7) has a reduced thickness at least in certain areas compared to the first or second section (3, 5).

4. Glass element (1) according to the preceding claim, characterized in that the thickness reduced at least in certain areas compared to the first or second section (3, 5) has a value in the range of 10 pm to 200 pm, preferably in the range of 20 pm to 100 pm. AMENDED SHEET (ARTICLE 19) 5. Glass element (1) according to one of the preceding claims, wherein the glass element (1) is plate-shaped and the first section (3) surrounds the second section (5).

6. Glass element (1) according to one of the preceding claims, characterized in that the connecting section (7) has the form of a closed or circumferential ring, in particular that it surrounds the second section (5) in a ring-like manner, in particular that the connecting section (7) surrounds the second section (5) in a ring-like manner.

7. Glass element (1) according to one of the preceding claims, characterized by at least one of the following features: - the connecting section (7) has at least one surface dislocation (8) such that the connecting section (7) has at least two strips (70, 71) whose surfaces lie at different heights in the direction perpendicular to the surface of the first or second section (3, 5), - the surface of the connecting section (7) is shaped such that at least one groove (13) is formed, - the connecting section (7) is structured in such a way that the stresses in the glass caused by a movement of the second section (5) relative to the first section (3) are reduced by at least 50%, preferably at least 90%, particularly preferably at least 99%, compared to the movement of an unstructured section, in particular an unstructured section without thickness reduction. - the glass element (1) including the connecting section (7) is chemically prestressed - the connecting section (7) is designed such that the maximum stress at the connecting section (7) under load is less than 400 MPa, preferably less than 200 MPa. AMENDED SHEET (ARTICLE 19) Glass element (1) according to the preceding claim, characterized by at least one of the following features: - the connecting section (7) has several channels (13) such that adjacent channels (13) are open to different sides (10, 11) of the glass element 1, - The sum of the widths of the at least two strips (70, 71) lying at different heights is greater than the width of the dislocation web (9) connecting the two strips 70, 71. Glass element (1) according to one of the two preceding claims, characterized by at least one dislocation strip (9) extending obliquely to at least one of the sides (10, 11) of the glass element (1). Glass element (1) according to one of the preceding claims, characterized in that the connecting section (7) forms a gas-tight connection between the first section (3) and the second section (5). Glass element (1) according to one of the preceding claims, characterized in that the connecting section (7) has a width that is at least 10%, preferably at least 20%, of the thickness of the glass element (7).Method for producing a glass element (1) according to one of the preceding claims, in which a preform of a glass element (1) is provided and material is selectively removed from the preform, such that by removing the material a connecting section (7) is produced which connects a first section (3) and a second section (5) and which is bendable, as well as stretchable or compressible, so that the first and the second section (3, 5) are movable relative to each other. AMENDED SHEET (ARTICLE 19) A method according to the preceding claim, characterized in that the removal of the material is carried out by at least one of the methods of etching, in particular after prior generation of filament-shaped damage, ablation, or abrasive removal. An electrical feedthrough (35) with a glass element (1) according to one of claims 1 to 10, with a feedthrough conductor (41) which is guided through the second section (5) of the glass element (1) and is sealingly connected to the glass of the glass element (1), wherein the glass element (1) is connected at the first section (3) to a socket (37) such that the feedthrough conductor (41) is held at a distance from the socket (37) and the glass element (1) provides electrical insulation of the feedthrough conductor (41) from the socket, and wherein the connecting section (7) between the socket (37) and the feedthrough conductor (41) extends in an annular manner around the feedthrough conductor (41).Use of a glass element (1) according to any one of claims 1 to 10 as. - Part of an electrical switch, - Cover plate (20) of a display (27), especially for a smartphone, as - component of a sensor (29), as - Component of an actuator, - Insulation of an electrical feedthrough (35). AMENDED SHEET (ARTICLE 19)