Vacuum pump with optimised flow technology and temperature

Abstract

The present invention relates to a vacuum pump with at least one Holweck pumping stage, comprising a Holweck rotor and a Holweck stator. The Holweck rotor comprises a rotor shaft with a hub provided thereon and at least two Holweck rotor sleeves provided on the hub, which concentrically surround the rotor shaft, wherein a radially inner Holweck rotor sleeve has a first diameter and a radially outer Holweck rotor sleeve has a second diameter. Between the two Holweck rotor sleeves, the Holweck stator comprises a Holweck stator sleeve concentric with them, which has a fixed end attached to a stationary housing section of the vacuum pump, a free end axially opposite the fixed end, and an inner surface with an internal thread formed thereon and an outer surface with an external thread formed thereon.The second diameter of the radially outer Holweck rotor sleeve is at least 30% larger than the first diameter of the radially inner Holweck rotor sleeve.

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