Lens mount, laser device, method for producing a monolithic lens mount, and method for producing a lens mount

Abstract

A lens mount (100) comprises an outer ring (105), an inner ring (110) and at least one connecting piece (115). The inner ring (110) is designed to accommodate a lens. The outer ring (105) and the inner ring (110) are connected to one another via the at least one connecting piece (115). The connecting piece (115) forms a first portion having a first length, a second portion having a second length and an intermediate portion having an intermediate length. The intermediate portion is arranged between the first portion and the second portion. The first portion is connected to the inner ring (110). The second portion is connected to the outer ring (105). In this case, a shape of a cross section of the intermediate portion in an intermediate sectional plane differs from a shape of a first cross section of the first portion in a first sectional plane and from a shape of a second cross section of the second portion in a second sectional plane.

Description

[0001] Lens mount, laser device, method for producing a monolithic

[0002] Lens mount, method for manufacturing a lens mount

[0003] State of the art

[0004] The invention is based on a lens mount, a laser device, a method for producing a monolithic lens mount and a method for producing a lens mount according to the preamble of the independent claims.

[0005] DE 10 2015 115 929 B3 describes a monolithic lens mount.

[0006] Against this background, the approach presented here provides an improved lens mount, an improved laser device, an improved method for producing a monolithic lens mount, and an improved method for producing a lens mount according to the main claims. The measures listed in the dependent claims enable advantageous refinements and improvements of the device specified in the independent claim.

[0007] Advantageously, the lens mount can enable a lens to be reliably held, wherein the lens can be held in a stress-decoupled manner from the lens mount.

[0008] A lens mount is presented which has an outer ring, an inner ring and at least one connecting web. The inner ring is designed to receive a lens. The outer ring and the inner ring are connected to one another via the at least one connecting web. The connecting web forms a first section having a first length, a second section having a second length and an intermediate section having an intermediate length. The intermediate section is arranged between the first section and the second section. The first section is connected to the inner ring. The second section is connected to the outer ring. A shape of a cross section of the intermediate section in an intermediate section plane differs from a shape of a first cross section of the first section in a first section plane and from a shape of a second cross section of the second section in a second section plane.The lens mount can be used, for example, for a device for semiconductor inspection and be designed to accommodate a lens. A lens can be understood as an optical element that is transmissive in at least one region. The lens can have a refractive power or be designed as a wedge or a flat plate. The lens can, but does not have to, have reflective regions. The lens can, but does not have to, have absorbing regions. The lens can, for example, be provided as an imaging lens or as part of an imaging objective. The lens can also be a projection lens or part of a projection objective. The lens can represent an optical element for directing or shaping a beam, for example a laser beam. An objective or a telescope can also be used for directing and shaping, and thus multiple lenses can be used.When using multiple lenses, a separate lens mount can be provided for each lens. In principle, other light sources are also possible instead of a laser. The inner ring of the lens mount can have elastic elements to accommodate the lens so that the lens can be reliably held in the inner ring. The connecting bridge can be arranged between the inner and outer rings of the lens mount. The lens mount can be attached to a lens housing, for example, via the outer ring. The connecting bridge enables mechanical decoupling of the inner ring from the outer ring so that the lens can be held by the inner ring in an environmentally stable manner. The connecting bridge can be shaped as a curved bar. The section planes can be selected to be perpendicular to a bar's longitudinal direction. In the case of a curved bar, the bar's longitudinal direction can be understood as the tangential line to a bar's center line.The beam centerline, which can also be referred to as the beam axis, can represent the neutral fiber when the beam is bent in the sense of the bending beam theory. The beam centerline can advantageously lie on a circular line around an axis of the lens mount, for example a centrally running longitudinal axis. The section plane can then be spanned by the radial direction and the longitudinal axis. The longitudinal axis can correspond to the optical axis of the lens to be accommodated. The cross-sections of the first section and the second section can be rectangular. The cross-section of the intermediate section can also be rectangular, but have different edge lengths and / or dimensions than the cross-sections of the first section and the second section, or can be trough-shaped, for example.

[0009] The lens mount can represent a stress-decoupled, monolithic mount for optical components. The lens mount can be used, for example, for telescopes, lenses, or optical systems. More specifically, the main application of the lens mount can be the mounting of optical components with high stress birefringence specifications. In this case, the use of at least three connecting webs for mechanically decoupling an optical lens mounted in the inner ring from a deformation of the outer ring due to a radial and / or axial force distribution acting on the outer ring, in particular a non-uniform radial and / or axial force distribution, is particularly preferred. This minimizes unwanted stress birefringence of the light in the lens.

[0010] The approach presented here allows for a smaller installation space for the connecting bridge in the radial direction, allowing a larger lens to be mounted with the same outer diameter. A further advantage is that the manufacturing effort and thus the costs for the lens mount can be kept low.

[0011] The lens mount can be monolithically formed. The lens mount can comprise an annular body that can be divided by material recesses into the outer ring, the inner ring, and the at least one connecting web. Advantageously, the lens mount can thus be manufactured cost-effectively and easily.

[0012] The lens mount can have at least three, in particular exactly three, connecting webs, each offset by an offset angle, via which the inner ring can be connected to the outer ring. The connecting webs can be shaped similarly and enable a stable connection between the inner ring and outer ring. The use of at least three connecting webs can enable mechanical decoupling of an optical lens mounted in the inner ring from a deformation of the outer ring due to a radial and / or axial force distribution acting on the outer ring.

[0013] A design with a rigid inner ring is particularly preferred. The outer ring can also be rigid, while the connecting webs can be elastically deformable and act as flexural joints.

[0014] The cross-section of the intermediate section can have the same extent in the radial direction relative to an axis of the lens mount as the first cross-section of the first section. Additionally or alternatively, the cross-section of the intermediate section can have a taper in the axial direction relative to the axis of the lens mount compared to the first cross-section of the first section. This advantageously allows for good decoupling properties.

[0015] The first cross-section of the first section can have a larger axial than radial extent with respect to the axis of the lens mount, and additionally or alternatively, the cross-section of the intermediate section can have a smaller axial than radial extent with respect to the axis of the lens mount. The cross-section of the intermediate section can be less axially extended than the first or second section. The radial extent can be very thin, so that a very thin radial and / or axial extent can be realized. This advantageously minimizes the required installation space.

[0016] The cross-section of the intermediate section can have a smaller cross-sectional area than the first cross-section of the first section and, additionally or alternatively, than the second cross-section of the second section. This advantageously allows for space savings.

[0017] The first cross-section and the second cross-section can be shaped identically. Additionally or alternatively, the first length and the second length can be the same. This facilitates manufacturing.

[0018] The intermediate section can be shorter than the first section and shorter than the second section. This advantageously allows for good damping properties against the transmission of stresses or deformations via the connecting web.

[0019] The first section and, additionally or alternatively, the intermediate section and, additionally or alternatively, the second section can be tangentially formed without a radial component. This facilitates manufacturing.

[0020] The intermediate section can have a recess, at least in the area of ​​the intermediate cutting plane. The recess can be oriented in the axial or radial direction. The recess can have any shape, for example, a round cross-section. The recess can be implemented as a through hole or a blind hole. The recess reduces the transmission of deformations and stresses across the connecting web.

[0021] The recess can be formed, for example, as a drilled hole, milled hole, or eroded hole. The recess can thus be formed quickly and reliably.

[0022] The connecting bar may have a narrow section in the area of ​​the intermediate cut plane, which can influence the flexural rigidity of the connecting bar. The connecting bar can thus advantageously decouple lens deformations.

[0023] A first side of the intermediate section can have at least one first recess, and additionally or alternatively, a second side of the intermediate section can have at least one second recess. The first recess and the second recess can be arranged opposite one another or offset from one another. The recesses can also be of the same size or, alternatively, of different sizes. Depending on the shape and arrangement of the recesses, different decoupling properties can be achieved.

[0024] Advantageously, exactly two recesses per connecting web can be designed as opposing blind holes, or exactly one recess can be designed as a blind hole per connecting web, whereby these can advantageously be arranged in the axial direction. If two blind holes are provided per connecting web, they can advantageously be coaxial with each other.

[0025] The connecting web can be designed as a bending beam. Such a bending beam is both stable enough to ensure a secure connection between the inner and outer rings, while also being flexible enough to allow for mechanical decoupling between the inner and outer rings.

[0026] According to one embodiment, the connecting web can have, apart from at least one recess in the intermediate section, a flat surface extending over the intermediate section as well as the first section and the second section.

[0027] A laser device for emitting a laser beam can comprise an embodiment of a lens mount mentioned herein and a lens received by the lens mount for guiding the laser beam. The laser device can be used, for example, for semiconductor inspection. The advantages of the approach described here can also be realized very efficiently by such an embodiment. A method for producing a monolithic lens mount comprises a step of providing, a step of producing, a step of tangentially slitting, and a step of further tangentially slitting. In the step of providing, a blank with an internal receiving portion for an optical element, in particular for a lens, and an external mount portion are provided, wherein the blank has an axis.In the manufacturing step, a plurality of at least three recesses are produced, arranged symmetrically with respect to the axis and converging on one or both sides. In the tangential slotting step, the blank is slotted with a groove divided into several sectors on an outer radius. In the further tangential slotting step, the blank is slotted with a groove divided into the multi-part sectors on an inner radius. The recesses are arranged between the inner and outer radii within the sectors. The advantages of the approach described here can also be realized very efficiently with such an embodiment.

[0028] Preferably, elastic elements designed as solid bodies can be attached to the inner ring, in particular leaf spring-shaped contours equipped with an additional bending beam function. In particular, these additional bending beams can be spread out with a beam length in the axial direction, a beam width in the tangential direction, and a beam height in the radial direction that is small compared to the beam width. Thus, these additional bending beams can rebound in the radial direction at the free end. The lens can rest against the free ends of the additional bending beams. In this way, diameter tolerances of the lens can be compensated without the lens experiencing excessive mechanical stress. A fixed end can each be opposite the free ends of the additional bending beams and can be arranged on the inner ring.

[0029] A method for producing an embodiment of a lens mount mentioned herein comprises a step of providing a monolithic blank, a step of forming at least one recess on a surface of the blank, and a step of slitting the blank to form the outer ring, the inner ring, and the at least one connecting web. The recess is arranged in the region of the intermediate section of the connecting web. Such an embodiment also allows the advantages of the approach described here to be very efficiently realized. If the recess is formed before the blank is slitted, the high stability of the blank can be utilized to form the recess with high precision. In the slitting step, several grooves can be formed, for example, by a punching process or laser cutting.

[0030] According to one embodiment, production using 3D printing or a sintering process can also be enabled, with the accuracy of these processes being increasingly improved. At least a combination of 3D printing or a sintering process with subsequent mechanical processing, for example, by means of EDM or laser machining, can offer a manufacturing option.

[0031] Examples of the approach presented here are shown in the drawings and explained in more detail in the following description. It shows:

[0032] Fig. 1 is a plan view of an embodiment of a lens mount;

[0033] Fig. 2a is a sectional side view of an embodiment of a lens mount;

[0034] Fig. 2b is a plan view of an embodiment of a lens mount;

[0035] Fig. 3 is a plan view of a connecting web for an embodiment of a section of a lens frame;

[0036] Fig. 4 is a schematic sectional view of a side view of a

[0037] Intermediate section for an embodiment of a lens mount;

[0038] Fig. 5 is a schematic sectional view of a side view of a

[0039] Intermediate section for an embodiment of a lens mount;

[0040] Fig. 6 is a schematic sectional view of a side view of a

[0041] Intermediate section for an embodiment of a lens mount;

[0042] Fig. 7 is a schematic sectional view of a side view of a

[0043] Intermediate section for an embodiment of a lens mount; Fig. 8 is a schematic sectional view of a plan view of an intermediate section for an embodiment of a lens mount;

[0044] Fig. 9 is a schematic representation of a side view of an embodiment of a laser device;

[0045] Fig. 10 is a flowchart of an embodiment of a method for manufacturing a monolithic lens frame; and

[0046] Fig. 11 is a flowchart of an embodiment of a method for manufacturing a lens frame.

[0047] In the following description of advantageous embodiments of the present invention, the same or similar reference numerals are used for the elements shown in the various figures and having a similar effect, whereby a repeated description of these elements is omitted.

[0048] If an embodiment includes an "and / or" link between a first feature and a second feature, this should be read as meaning that the embodiment according to one embodiment has both the first feature and the second feature and according to another embodiment has either only the first feature or only the second feature.

[0049] Fig. 1 shows a top view of an embodiment of a lens mount 100. The lens mount 100 is configured to accommodate a lens. The lens mount 100 can be used, for example, in an objective lens or a telescope. For example, the lens mount 100 can be used for a device for semiconductor inspection.

[0050] Essentially, the lens mount 100 serves to mechanically mount at least one optical single lens or cemented lens group. For lens systems with high imaging quality requirements, it is also important that the lenses are environmentally stable and, at the same time, mounted as deformation- and stress-free as possible. For this purpose, at least one decoupling structure is used, which is arranged between an inner and an outer mount part.

[0051] The lens mount 100 shown here accordingly has an outer ring 105, an inner ring 110, and at least one connecting web 115 as a decoupling structure. The connecting web 115 is arranged between the inner ring 110 and the outer ring 105, so that the outer ring 105 and the inner ring 110 are connected to each other via the connecting web 115. The inner ring 110 is designed to accommodate a lens. For this purpose, the inner ring 110 forms, for example, a plurality of elastic elements 120 to reliably accommodate the lens.

[0052] According to one embodiment, elastic elements 120 designed as solid bodies are attached to the inner ring 110, in particular leaf spring-shaped contours equipped with an additional bending beam function. In particular, the elastic elements 120 are designed as bending beams and can accordingly also be referred to as bending beams. The elastic elements 120 are spread out with a beam length in the axial direction, a beam width in the tangential direction, and a beam height in the radial direction that is small compared to the beam width. Thus, the elastic elements 120 can rebound in the radial direction at the free end. The lens can rest against the free ends of the elastic elements 120. Thus, diameter tolerances of the lens and expansion differences during temperature fluctuations can be compensated for without the lens experiencing excessive mechanical stress.The free ends of the elastic elements 120 can each have a fixed end opposite them and be arranged on the inner ring 110.

[0053] According to the exemplary embodiment shown here, the lens mount 100 has a plurality of connecting webs 115, 125, 135, which are arranged offset from one another, for example, three in total. The connecting webs 115, 125, 135, for example, all have the same shape.

[0054] According to one embodiment, the lens mount 100 is monolithically formed. In other words, the lens mount 100 represents a monolithic connection from the outer ring 105, which can also be referred to as the outer mount part, to the inner ring 110, which can also be referred to as the inner mount part, via at least one connecting web 115, which can also be referred to as a radial bending beam. According to one embodiment, this connecting web 115 is characterized in that the connecting web 115 has at least one recess 130 to decouple additional deformations. Optionally, the connecting web 115 has a corresponding recess 130 symmetrically on both sides.

[0055] The advantage of this solution is that the radial installation space is small, allowing a larger lens to be mounted with the same outer diameter, unlike alternative solutions that require more space. Another advantage is that the manufacturing effort and thus the costs for this solution are lower.

[0056] Fig. 2a shows a sectional view of an embodiment of a side view of a lens mount 100. The lens mount 100 is similar to or corresponds to the lens mount of Fig. 1.

[0057] The outer ring 105, the inner ring 110, and the connecting web 115 are shown in section as an example. An axis 200 is shown as an example. The axis 200 runs centrally through the lens mount 100 and thus represents a longitudinal axis. The axis 200 runs through a center point of the inner ring and the outer ring of the lens mount 100.

[0058] Fig. 2b shows a plan view of an embodiment of a lens mount 100. The lens mount 100 is similar to or corresponds to the lens mount of Fig. 1.

[0059] According to one embodiment, the lens mount 100 has a lens 205, which is accommodated by the inner ring 110. Three force components 210, 220, 230 are arranged on an outer surface of the outer ring 105, for example, each distributed at an angle of 120 degrees on the outer ring 105. The first force component represents a first force F1, the second force component 220 represents a second force F2, and the third force component represents a third force F3. The force components 210, 220, 230 are arranged on the outer ring 105 in such a way that, for example, the first force component 210 is arranged between the third connecting web 135 and the second connecting web 125, the second force component 220 is arranged between the connecting web 115 and the third connecting web 135, and the third force component 230 is arranged between the second connecting web 125 and the first connecting web 115.The forces F1, F2, F3 are designed, for example, to act on the outer ring 105 and thus cause a deformation of the outer ring 105 (the deformation was indicated in Figure 2b by the out-of-roundness of the outer contour of the outer ring 105).

[0060] As an example, Fig. 2b shows a clamping situation of the lens mount 100 in a drill chuck of a lathe with a force introduction of the three forces F1, F2 and F3 with the respective force components Fx, Fy, Fz.

[0061] Thus, Fig. 2b schematically indicates an asymmetrical force application via the outer ring 105. Here, F1, F2, and F3 are forces which, as shown here, are introduced via a clamping device, drill chuck, or lathe. The forces are composed of the respective x, y, and z-direction components Fx, Fy, and Fz. An xyz axis 240 is shown as an example. The force is introduced at a wide variety of angles, depending on the preload situation in the drill chuck. The forces F1, F2, and F3 lead to at least an elastic change in shape in the area of ​​the force introduction zones. To ensure that the resulting stresses do not affect the entire lens mount 100 and stresses are not transferred to the lens 205, the invention provides for stress decoupling from the inner ring 110 by the connecting webs 115, 125, 135 and the elastic elements 120.

[0062] Thus, forces, here for example the forces F1, F2, F3, whose overall effect does not result in acceleration, no torque, but in a deformation of the outer ring, can be absorbed.

[0063] Fig. 3 shows a top view of a connecting bar 115 for an exemplary embodiment of a section of a lens mount. The connecting bar 115 is similar to or corresponds to the connecting bar in one of the preceding figures.

[0064] The connecting web 115 is shaped, for example, as a bending beam. Furthermore, the connecting web 115 forms a first section 300, a second section 305, and an intermediate section 310. The intermediate section 310 is arranged between the first section 300 and the second section 305. The first section 300 and the second section 305 have, for example, the same shape and length. The first section 300 is connected to the inner ring, and the second section 305 is connected to the outer ring 105. According to one exemplary embodiment, the intermediate section 310 has a different shape than the sections 300, 305, at least in the region of an intermediate cutting plane 320.For example, a shape of a cross section of the intermediate section 310 in the intermediate cutting plane 320 differs from a shape of a first cross section of the first section 300 in a first cutting plane 330 and from a shape of a second cross section of the second section 305 in a second cutting plane 325.

[0065] According to one embodiment, the intermediate section 310 has a recess 130 at least at the level of the intermediate cutting plane 320, which creates the shape of the intermediate section 310 that differs from the sections 300, 305. The recess 130 is designed, for example, as a blind hole and is formed, for example, as a drilled hole, milled hole, or eroded hole.

[0066] The connecting bridge 115 has a curvature along its longitudinal direction that follows a circular arc around the longitudinal axis of the lens mount. For example, the connecting bridge 115 extends over a central angle relative to the longitudinal axis of more than 10° and less than 60°.

[0067] For example, the connecting web 115 has a length that corresponds to at least 5 times the width of the connecting web 115 and / or a length that corresponds to less than 20 times the width of the connecting web 115.

[0068] According to one embodiment, the connecting web 115 is formed by two slots 315, 335. A first slot 335 runs along an inner edge of the connecting web 115 and separates the connecting web 115 from the inner ring 115, except for an inner connection region to the inner ring 105. A second slot 315 runs along an outer edge of the connecting web 115 and separates the connecting web 115 from the outer ring 105, except for an outer connection region to the outer ring 105. The inner connection region runs radially with respect to the longitudinal axis, and the outer connection region runs along an arc of a circle around the longitudinal axis. Along the edges of the connecting web 115, the slots 315, 335 run along circular lines around the longitudinal axis of the lens mount.

[0069] According to one exemplary embodiment, the connecting web 115 has a flat surface on the upper side shown in Fig. 3, apart from the at least one recess 130, over its entire length. Optionally, the connecting web 115 also has a flat surface on a lower side opposite the upper side shown in Fig. 3, apart from at least one optional further recess, over its entire length. According to one exemplary embodiment, the surfaces of the connecting web 115 on the upper side and the lower side in the connecting regions merge seamlessly and linearly into corresponding surfaces of the outer ring 105 and the inner ring 115.

[0070] Fig. 4 shows a schematic sectional side view of an intermediate section 310 along a longitudinal extension of a connecting web for an embodiment of a lens mount. The intermediate section 310 is similar to or corresponds to the intermediate section shown in Fig. 4.

[0071] The intermediate section 310 has a first side 400 and a second side 405. The recess 130 is formed in the essentially flat surface of the first side 400, and a second recess 410 is formed in the essentially flat surface of the second side 405. According to the exemplary embodiment shown here, the recesses 130, 410 are arranged directly opposite one another and, for example, have the same diameter. Due to the recesses 130, 410, the connecting web has a tapered portion.

[0072] A section 415 of the intermediate section 310 is shown enlarged in Fig. 5.

[0073] Fig. 5 shows a schematic sectional view of a side view of an intermediate section 310 for an embodiment of a lens mount. More specifically, Fig. 5 shows the section 415 of the intermediate section 310 shown in Fig. 4. For example only, the recesses 130, 410 represent bores. Here, t represents B1 a depth of the bore of the recess 130 and f a depth of the bore of the second recess 410. According to the embodiment shown here, t B1 less than t B2 Alternatively, t B1 and fesame size or t B1 is greater than fe or t B1 is equal to zero or is equal to zero. The latter cases correspond to a one-sided blind hole, which is not shown here.

[0074] Fig. 6 shows a schematic sectional side view of an intermediate section 310 along a longitudinal extension of a connecting web for an embodiment of a lens mount. The intermediate section 310 is similar to or corresponds to the intermediate section of Fig. 4, except that the recesses 130, 410 are arranged offset from one another along the longitudinal axis.

[0075] d1 represents an offset between the recesses 130, 410 along the longitudinal extent of the connecting web. <V- wird eine im Bereich der zweiten Aussparung 410 verbleibende Dicke des Verbindungssteges repräsentiert. Dabei entspricht die Dicke d1der Dicke d2oder d1ist größer als d2oder d1ist kleiner als d2. Die Anzahl der Aussparungen 130, 410 kann geeignet gewählt werden, wobei die Anzahl der Aussparungen N B is greater than or equal to 1.

[0076] Fig. 7 shows a schematic sectional view along a longitudinal extension of a connecting web of an intermediate section 310 for an embodiment of a lens mount. According to the embodiment shown here, the recesses 130, 410 are arranged directly opposite one another and have different sizes. More precisely, the recesses 130, 410 have different diameters. O2 represents a diameter of the first recess 130, and O1 represents a further diameter of the second recess 410. According to the embodiment shown here, O1 is smaller than O2. Alternatively, O1 is larger than O2, or O- corresponds to O2.

[0077] Furthermore, the second recess 410 is, for example, formed deeper than the recess 130.

[0078] Fig. 8 shows a schematic plan view of an intermediate section 310 for one embodiment of a lens mount. According to the embodiment shown here, the intermediate section 310 has a plurality of recesses.

[0079] For example, the top view shows the first side 400 of the connecting web. The recess 130 corresponds, for example, to the recess shown in Fig. 3. The other recesses 800, 805, 810 are shaped differently than the recess 130. More precisely, the recesses 130, 800, 805, 810 have different positions and diameters. The recess 800 has a larger diameter than the recess 130 and the recess 805. The recess 805 has, for example, a smaller diameter than the other recesses 130, 800. The recess 810 is semicircular, while the recesses 130, 800, 805 are circular.

[0080] According to one embodiment, the recess 810 extends continuously across an edge of the connecting web extending between the first side 400 and the opposite second side. In this case, the recess 810 represents a groove extending across the edge.

[0081] Fig. 9 shows a schematic representation of a side view of an embodiment of a laser device 900. The laser device 900 has a laser 915 and a lens mount 100, wherein the lens mount 100 is similar to or corresponds to the lens mount from one of the figures described above. The laser device 900 also has a lens 205. The lens 205 is received by the inner ring of the lens mount 100 and is designed to guide, for example, to focus, a laser beam 910. The lens mount 100 including the lens 205 is part of an objective 920. For example, the lens mount 100 is connected to a housing of the objective 920 via the outer ring.

[0082] The laser device 900 can be used, for example, for semiconductor inspection. The lens mount 100 is used, for example, when an optical component has high requirements regarding fit or stress birefringence and external deformations must be kept away from the optical component.

[0083] Fig. 10 shows a flow diagram of an embodiment of a method 1000 for producing a monolithic lens mount. The method 1000 comprises a provision step 1005, a production step 1010, a tangential slitting step 1015, and a further tangential slitting step 1020. In provision step 1005, a blank with an inner receiving portion for an optical element, in particular for a lens, and an outer mount portion are provided, wherein the blank has an axis. In production step 1010, a plurality of at least three recesses are produced, arranged symmetrically with respect to the axis and converging on one side or both sides. In tangential slitting step 1015, the blank is slitted on an outer radius with a groove divided into several sectors.In step 1020 of further tangential slotting, the blank is slotted with a groove divided into multi-part sectors along an inner radius. The recesses are arranged between the inner and outer radius within the sectors.

[0084] Fig. 11 shows a flowchart of an embodiment of another method 1100 for manufacturing a lens mount. The lens mount is similar to or corresponds to the lens mount from one of the figures described herein.

[0085] The method 1100 comprises a step 1105 of providing a monolithic blank, a step 1110 of forming at least one recess on a surface of the blank, and a step 1115 of slitting the blank. In step 1110 of forming, one or more recesses are formed in one surface or, for example, in two opposing surfaces of the blank, specifically at positions that lie in a region provided for an intermediate section of a connecting web. Slitting step 1115 creates slots that completely penetrate the blank, through which the at least one connecting web is exposed, as shown, for example, in Fig. 2. The step of producing 1010 the recesses takes place, for example, before the step of tangential slitting 1015 and before the step of further tangential slitting 1020.

Claims

Patent claims 1 . A lens mount (100), the lens mount (100) comprising: an outer ring (105); an inner ring (110) configured to receive a lens (205);and at least one connecting web (115) via which the outer ring (105) and the inner ring (110) are connected to one another, wherein the connecting web (115) forms a first section (300) having a first length, a second section (305) having a second length, and an intermediate section (310) having an intermediate length, wherein the intermediate section (310) is arranged between the first section (300) and the second section (305), wherein the first section (300) is connected to the inner ring (110) and wherein the second section (305) is connected to the outer ring (105), wherein a shape of a cross section of the intermediate section (310) in an intermediate section plane (320) differs from a shape of a first cross section of the first section (300) in a first section plane (330) and from a shape of a second cross section of the second section (305) in a second section plane (325); 2. Lens mount (100) according to claim 1, wherein the lens mount (100) is monolithically formed and wherein the lens mount (100) has an annular body which is divided by material recesses into the outer ring (105), the inner ring (110) and the at least one connecting web (115).

3. Lens mount (100) according to one of the preceding claims, wherein the lens mount (100) has at least three, in particular exactly three, connecting webs (115, 125, 135) arranged offset from one another by an offset angle, via which the inner ring (110) is connected to the outer ring (105).

4. Lens mount (100) according to one of the preceding claims, wherein the cross section of the intermediate portion (310) in the radial direction with respect to an axis (200) of the lens mount (100) has the same extent as the first cross section of the first portion (300) and / or wherein the cross section of the intermediate portion (310) in the axial direction with respect to the axis (200) of the Lens mount (100) has a taper compared to the first cross section of the first section (300).

5. Lens mount (100) according to one of the preceding claims, wherein the first cross section of the first section (300) has a greater axial than radial extent with respect to the axis (200) of the lens mount (100) and / or wherein the cross section of the intermediate section (310) has a smaller axial than radial extent with respect to the axis (200) of the lens mount (100) and / or wherein the cross section of the intermediate section (310) has a smaller cross-sectional area than the first cross section of the first section (300) and / or than the second cross section of the second section (305).

6. Lens frame (100) according to one of the preceding claims, wherein the first cross section and the second cross section are shaped identically and / or wherein the first length and the second length are the same and / or wherein the intermediate section (310) is shorter than the first section (300) and / or shorter than the second section (305).

7. Lens frame (100) according to one of the preceding claims, wherein the first section (300) and / or the intermediate section (310) and / or the second section (305) are formed tangentially, free of a radial component.

8. Lens mount (100) according to one of the preceding claims, wherein the intermediate section (310) has at least one, in particular exactly one or exactly two, recess(es) (130) at least in the region of the intermediate cutting plane (320), in particular wherein the recess (130) is formed as a drilled hole, milled hole or eroded hole, in particular as a blind hole.

9. Lens mount (100) according to one of the preceding claims, wherein the connecting web (115) has a constriction in the region of the intermediate cutting plane (320) which influences a flexural rigidity of the connecting web (115).

10. Lens frame (100) according to one of the preceding claims, wherein a first side (400) of the intermediate section (310) has at least one first recess (130) and / or a second side (405) of the intermediate section (310) has at least one second recess (410), wherein the first recess (130) and the second Recess (410) are arranged opposite or offset from one another and / or have a different size. A lens mount (100) according to one of the preceding claims, wherein the connecting web (115) is formed as a bending beam having a flat surface except for at least one recess (130; 410). A laser device (900) for emitting a laser beam (910), wherein the laser device (900) comprises a lens mount (100) according to one of the preceding claims and a lens (205) received by the lens mount (100) for guiding the laser beam (910). A method (1000) for producing a monolithic lens mount, comprising: Providing (1005) a blank with an inner receiving portion for an optical element, in particular for a lens (205), and an outer mounting portion, wherein the blank has an axis (200); Producing (1010) a plurality of at least three recesses arranged symmetrically with respect to the axis (200) and converging on one or both sides; tangentially slotting (1015) the blank with a groove divided into several sectors on an outer radius; and tangentially slotting (1020) the blank with a groove divided into the several sectors on an inner radius, wherein the recesses are arranged between the inner and outer radius within the sectors, in particular wherein the step of producing (1010) the recesses takes place before the step of tangentially slotting (1015) and before the step of further tangentially slotting (1020). A method (1100) for producing a lens mount (100) according to one of claims 1 to 13, wherein the method (1100) comprises the following steps: Providing (1105) a monolithic blank; Forming (1110) at least one recess (130) on a surface of the blank; and Slitting (1115) the blank to form the outer ring (105), the inner ring (110) and the at least one connecting web (115), wherein the recess (130) is arranged in the region of the intermediate section (310) of the connecting web (115). Use of at least three connecting webs (115, 125, 135) for mechanically decoupling an optical lens (205) mounted in an inner ring (110) from a deformation of an outer ring (105) due to a radial and / or axial force distribution (F1, F2, F3) acting on the outer ring (105), in particular an uneven radial and / or axial force distribution, wherein the outer ring (105) and the inner ring (110) are connected to one another via the connecting webs (115, 125, 135), wherein the connecting webs (115, 125, 135) each form a first section (300) having a first length, a second section (305) having a second length, and an intermediate section (310) having an intermediate length,wherein the intermediate section (310) is arranged between the first section (300) and the second section (305), wherein the first section (300) is connected to the inner ring (110) and wherein the second section (305) is connected to the outer ring (105), wherein a shape of a cross section of the intermediate section (310) in an intermediate section plane (320) differs from a shape of a first cross section of the first section (300) in a first section plane (330) and from a shape of a second cross section of the second section (305) in a second section plane (325).

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