Flange component

Abstract

The invention relates to a flange component for ultra-high vacuum applications which is compatible with an ISO 3669 flange, the flange component having a flange outside diameter, a plurality of bores which have a bore diameter, and a hole circle on which the bores are arranged and which has a hole circle diameter, characterized in that the bore diameters of the bores of the flange component are smaller than the bore diameters of the bores of the compatible ISO 3669 flange. The invention also relates to a method for mounting a flange component on a compatible ISO 3669 flange, comprising the method steps of feeding a screw through a bore of the flange component and a bore of an ISO 3669 flange and screwing the screw to a threaded mating part, wherein the bore of the flange component has a smaller bore diameter than the bore of the ISO 3669 flange.

Description

[0001] FLANGE COMPONENT

[0002] The invention describes a flange component for ultra-high vacuum applications suitable for an ISO 3669 flange, having a flange outer diameter, a plurality of bores with a bore diameter, and a bolt circle on which the bores are arranged, with a bolt circle diameter. Furthermore, the invention describes a method for mounting a flange component to a suitable ISO 3669 flange, comprising the method steps of passing a screw through a bore of the flange component and a bore of an ISO 3669 flange and screwing the screw to a threaded counterpart, wherein the bore of the flange component has a smaller bore diameter than the bore of the ISO 3669 flange.

[0003] State of the art

[0004] For ultra-high vacuum (UHV) applications at pressures up to 10 -13Pa, suitable flange systems are known. For gas-tight connections (leakage rates < 10 -9mbar*l / s He), metal seals are required at detachable connection points. Since the components must be heated to achieve these pressures, the connections must be bakeable. Typical flange systems are Conflat flanges (CF flanges) according to IS03669:2020-02. These flanges are designed for vacuum applications at temperatures up to 450 °C. The name originates from the registered trademark "ConFlat" of Varian, Inc. (Agilent Technologies, Inc.). However, this type of flange is now sold by almost all manufacturers worldwide under the designation "CF". The flanges are typically made of stainless steel, titanium or aluminum, and the sealing material is usually oxygen-free, high-purity copper. The flanges are provided with cutting edges that are pressed slightly into the sealing material when the connection is tightened, thus creating a seal. Metallic sealing rings can only be used once due to the permanent deformation.However, elastomer seals can also be used for temporary structures. The advantages of CF seals are their high bakeability up to 450 °C and their extremely low leak rate of T 10. -11 mbar l / s He. The CF flanges have dimensions according to 1803669:2020-02 "Vacuum technology - Dimensions of cutting edge flanges." This standard specifies the dimensions of fixed or rotating flanges used in vacuum systems for pressures from atmospheric pressure up to 10 -13 Pa can be used. However, for certain applications, flanges manufactured according to ISO 3669:2020-02 are oversized, resulting in high weight and large volume. In particular, the high temperature resistance of such flanges up to 450 °C is not necessary, as vacuum systems that use this flange system are generally baked to a maximum of 250 °C.

[0005] It is therefore an object of the present invention to provide a flange component that is lighter and has lower manufacturing costs than a flange component manufactured according to ISO3669, but can still be connected to a flange according to ISO3669 to ensure compatibility of the flange components. It is also an object of the invention to provide a method for assembling a flange component to a matching ISO3669 flange, which ensures compatibility of the different flange components.

[0006] The stated object is achieved by means of the flange component for ultra-high vacuum applications suitable for an ISO3669 flange according to claim 1. Further advantageous embodiments of the invention are set forth in the subclaims.

[0007] The flange component according to the invention for ultra-high vacuum applications suitable for an ISO3669 flange has a flange outer diameter, a plurality of bores with a bore diameter, and a bolt circle on which the bores are arranged. The bolt circle has a bolt circle diameter. Within the scope of this invention, a flange component suitable for an ISO3669 flange is a flange component that can be connected to an ISO3669 flange in such a way that a leakage rate corresponding to the ISO3669 flange system is achieved. For this purpose, the diameters of the cutting edges of the ISO3669 flange and the flange component according to the invention are the same, and the same seals can be used. Bores within the meaning of this invention can have smooth inner walls or an internal thread.

[0008] A flange according to ISO 3669 and, accordingly, a flange component according to the invention are circular in shape, whereby the flange component according to the invention and the matching ISO 3669 flange have the same central axis. Holes are arranged at equal distances between the circumference of the outer side and the likewise circular cutting edge. The centers of the holes are arranged on a circle—referred to in this document as the bolt circle—that runs concentrically to the outer edge and the cutting edge of the flange component. The bolt circle therefore has a diameter that is smaller than the outer diameter of the flange and simultaneously larger than the diameter of the cutting edge.

[0009] According to the invention, the bore diameter of the holes in the flange component is smaller than the bore diameter of the holes in the matching ISO 3669 flange. In a further development, the flange component according to the invention has an outer diameter that is smaller than the outer diameter of the matching ISO 3669 flange. The holes in the matching ISO 3669 flange form an inner bolt circle of the matching ISO 3669 flange, wherein the bolt circle diameter of the flange component according to the invention is larger than the diameter of the inner bolt circle of the matching ISO 3669 flange.

[0010] The flange component according to the invention therefore requires smaller diameter bolts for connection to a matching ISO 3669 flange using a screw connection. These bolts are lighter and more cost-effective, and the holes can be drilled more quickly. The flange component according to the invention also uses less material, is lighter, and can be manufactured more cost-effectively than a matching ISO 3669 flange.

[0011] In a further development according to the invention, the bores of the matching ISO3669 flange form an outer bolt circle, wherein the bolt circle diameter of the flange component is smaller than the diameter of the outer bolt circle of the bores of the matching ISO3669 flange.

[0012] In a further development of the invention, the holes of the flange component are arranged adjacent to the bolt circle of the matching ISO 3669 flange. In a further development of the invention, the bolt circle of the matching ISO 3669 flange is larger than the bolt circle of the flange component according to the invention. Both bolt circles are arranged concentrically around the central axis, whereby, due to the larger diameter of the bolt circle of the ISO 3669 flange, the bolt circle of the flange component according to the invention is arranged adjacent to the bolt circle of the matching ISO 3669 flange.

[0013] In a further embodiment of the invention, the holes of the flange component form an inner bolt circle, and the holes of the matching ISO3669 flange form an inner bolt circle, whereby the inner bolt circle of the flange component is larger than or equal to the inner bolt circle of the matching ISO3669 flange. An inner bolt circle within the meaning of the invention is analogous to a bolt circle, a circle that is arranged concentrically to the outer edge and the cutting edge of a flange. In contrast to a bolt circle, in which the centers of the holes are arranged on the bolt circle, on the inner bolt circle those points on the circumferences of the holes are arranged with a minimal distance from the center axis. An inner bolt circle therefore has a smaller diameter than a bolt circle of one and the same flange.

[0014] Due to the smaller diameter of the holes in the flange component according to the invention compared to the diameter of the holes in the matching ISO 3669 flange, the inner bolt circle of the flange component according to the invention has a larger diameter than the inner bolt circle of the matching ISO 3669 flange when the respective holes are arranged concentrically. The inner bolt circles of the flange component according to the invention and the matching ISO 3669 flange have the same diameter when the respective points on the circumferences of the holes are congruent with a minimal distance from the center axis, i.e., the holes in the flange component according to the invention and the matching ISO 3669 flange are arranged eccentrically to one another.In a further embodiment of the invention, the bores of the flange component form an outer bolt circle and the bores of the matching ISO3669 flange form an outer bolt circle, wherein the outer bolt circle of the flange component is smaller than or equal to the outer bolt circle of the matching ISO3669 flange.

[0015] An outer bolt circle, as defined by the invention, is a circle, like the bolt circle, that is arranged concentrically to the outer edge and the cutting edge of a flange. In contrast to the bolt circle, where the centers of the holes are located on the bolt circle, the outer bolt circle has those points on the circumferences of the holes that are at the maximum distance from the center line. An outer bolt circle therefore has a larger diameter than a bolt circle of the same flange.

[0016] Due to the smaller diameter of the holes in the flange component according to the invention compared to the diameter of the holes in the matching ISO 3669 flange, the outer bolt circle of the flange component according to the invention has a smaller diameter than the outer bolt circle of the matching ISO 3669 flange when the respective holes are arranged concentrically. The outer bolt circles of the flange component according to the invention and the matching ISO 3669 flange have the same diameter if the respective points on the circumferences of the holes with the maximum distance from the center axis are not congruent, i.e., the holes in the flange component according to the invention and the matching ISO 3669 flange are arranged eccentrically to one another.

[0017] In a further aspect of the invention, the outer diameter of the flange component is less than or equal to the outer diameter of the matching ISO 3669 flange. The flange component according to the invention therefore has less material, is lighter, and can be manufactured more cost-effectively than a matching ISO 3669 flange.

[0018] In a further embodiment of the invention, the flange component has a cutting edge, the diameter of which is equal to the diameter of the cutting edge of the matching ISO 3669 flange. This ensures that the flange component according to the invention and the ISO 3669 flange fit together, and the leakage rate corresponds to a standard ISO 3999 flange connection.

[0019] In a further embodiment of the invention, the flange component has a seal outlet, the diameter of which is equal to the diameter of the seal outlet of the matching ISO 3669 flange. This ensures that the flange component according to the invention and the ISO 3669 flange fit together, ensures gas flow during evacuation, and keeps the leak rate low.

[0020] In a further embodiment of the invention, the flange component has a thickness that is smaller than the thickness of the corresponding ISO 3669 flange. The flange component according to the invention therefore has less material, is lighter, and can be manufactured more cost-effectively than a corresponding ISO 3669 flange.

[0021] The object is further achieved by means of the inventive method for mounting a flange component to a matching ISO 3669 flange. Further advantageous embodiments of the invention are also set forth in the subclaims.

[0022] The method according to the invention for mounting a flange component to a matching ISO3669 flange comprises two method steps: In the first method step, a screw is passed through a bore in the flange component and a bore in an ISO3669 flange. The flange component according to the invention and the matching ISO3669 flange are arranged in such a way that the bores of the respective flanges are aligned. In the second method step, the screw is screwed to a threaded counterpart. Instead of a bore (bores within the meaning of this invention can have smooth inner walls or an internal thread), in the flange component according to the invention the bore can have an internal thread. For this purpose, the screw is preferably screwed with a suitable nut or screwed into the existing internal thread.A preferably metallic seal is arranged between the flange component according to the invention and the matching ISO3669 flange, into which the cutting edges engage.

[0023] According to the invention, the bore of the flange component has a smaller bore diameter than the bore of the ISO3669 flange. In a further development, the flange component according to the invention has an outer diameter that is smaller than the outer diameter of the matching ISO3669 flange. Furthermore, the bores of the matching ISO3669 flange form an inner bolt circle, with the bolt circle diameter of the flange component being larger than the diameter of the inner bolt circle of the bores of the matching ISO3669 flange.

[0024] The flange component according to the invention therefore requires smaller diameter bolts for connection to a matching ISO 3669 flange using a screw connection, which are lighter and more cost-effective, and the holes can be drilled more quickly. The flange component according to the invention also uses less material, is lighter, and can be manufactured more cost-effectively than a matching ISO 3669 flange.

[0025] In a further development according to the invention, the bores of the matching ISO3669 flange form an outer bolt circle, wherein the bolt circle diameter of the flange component is smaller than the diameter of the outer bolt circle of the bores of the matching ISO3669 flange.

[0026] In a further development of the invention, the screw is guided eccentrically through the bore of the ISO3669 flange. In a further embodiment of the invention, the position of the screw and / or the bore of the flange component is shifted radially toward the center of the ISO3669 flange relative to the bore of the ISO3669 flange.The screw is guided eccentrically in a position of the screw and / or the drill hole of the flange component in relation to the bore of the ISO3669 flange, radially shifted towards the center of the ISO3669 flange, when the outer bolt circles of the flange component according to the invention and the matching ISO3669 flange have the same diameter. Due to the smaller diameter of the bores of the flange component according to the invention compared to the diameter of the bores of the matching ISO3669 flange, the outer bolt circle of the flange component according to the invention has a smaller diameter than the outer bolt circle of the matching ISO3669 flange when the respective bores are arranged concentrically. when the respective points on the circumferences of the bores with maximum distance to the center axis are not congruent with one another and the bores of the flange component according to the invention and the matching ISO3669 flange are arranged eccentrically to one another.

[0027] In a further embodiment of the invention, the screw is guided centrally through the bore of the flange component. The screw is guided centrally when the bolt circles of the flange component according to the invention and the matching ISO 3669 flange have the same diameter, i.e., the bores of the flange component according to the invention and the matching ISO 3669 flange are arranged concentrically to each other.

[0028] In a further embodiment of the invention, the cutting edge of the flange component and the cutting edge of the ISO 3669 flange have the same radius. Therefore, a seal can be used to connect and seal the flange component according to the invention and the matching ISO 3669 flange, as is already used for known connections between two ISO 3669 flanges. These preferably metallic seals are available as standard; custom-made seals are not necessary.

[0029] In a further embodiment of the invention, the bore of the flange component is located midway between the outer edge and the cutting edge. This ensures sufficient stability of the bolted connection between the flange component and the ISO 3669 flange.

[0030] In an advantageous development of the invention, before screwing the flange component to the ISO3669 flange, a seal is positioned in the seal outlets of the flange component and the ISO3669 flange, whereby the diameter of the seal outlet of the flange component is equal to the diameter of the seal outlet of the ISO3669 flange. Thus, the usable space of the flange component is identical to that of flanges according to ISO3669.

[0031] In a further embodiment of the invention, the outer diameter of the flange component is smaller than the outer diameter of the ISO 3669 flange. In a further configuration of the invention, the flange component has a thickness, wherein the thickness of the flange is smaller than the thickness of the corresponding ISO 3669 flange. The flange component according to the invention comprises less material, is lighter, and can be manufactured more cost-effectively than a corresponding ISO 3669 flange.

[0032] Embodiments of the flange component according to the invention for ultra-high vacuum applications suitable for an ISO3669 flange and of the method according to the invention for mounting a flange component to a suitable ISO3669 flange are shown in a simplified schematic form in the drawings and are explained in more detail in the following description.

[0033] They show:

[0034] Fig. 1 : Arrangement and designations of the dimensions of an ISO3669 flange and a flange component according to the invention

[0035] Fig. 2 a: Top view of a flange component according to the invention and ISO3669 flange, holes concentric

[0036] Fig. 2 b: Side view of a flange component according to the invention and ISO3669 flange, holes concentric

[0037] Fig. 2 c: Side view of a flange component according to the invention and ISO3669 flange, holes concentric, thickness different

[0038] Fig. 3 a: Top view of a flange component according to the invention and ISO3669 flange, bores eccentric

[0039] Fig. 3 b: Side view of a flange component according to the invention and ISO3669 flange, holes eccentric Fig. 3 c: Side view of a flange component according to the invention and ISO3669 flange, holes eccentric, thickness different

[0040] Fig. 1 shows a view of an ISO3669 flange CF and a matching flange component CFS according to the invention to clarify the arrangement of the different areas and their designations. The flange CF, CFS has a circular cross-section around the central axis Z with the outer diameter OD, ODS. The centers of the holes B, BS with diameters M, MS are arranged on a bolt circle with diameters CD, CDS. The points on the circumferences of the holes B, BS with the minimum distance to the central axis Z lie on an inner bolt circle with diameters ICD, ICDS, while the points on the circumferences of the holes B, BS with the maximum distance to the central axis Z lie on an outer bolt circle with diameters OCD, OCDS. The ISO3669 flange CF and the flange component CFS according to the invention each have a thickness T, TS.

[0041] The seal outlet SR, SRS has the diameter SRD, SRSD, wherein in all illustrated embodiments, the diameter SRSD of the seal outlet SRS of the flange component CFS according to the invention is equal to the diameter SRD of the seal outlet of the ISO3669 flange CF in order to ensure the precise fit of the flanges CF, CFS to one another and the gas flow during evacuation, and thus a sufficient vacuum with a low leakage rate. The diameter KED of the cutting edge KE of an ISO3669 flange CF and the diameter KESD of the cutting edge KES of a flange component CFS according to the invention are also equal to one another. The inner diameters ID, IDS of both the ISO3669 flange CF and the flange component CFS according to the invention are equally equal to one another.

[0042] Fig. 2 shows a comparison of an embodiment of an ISO 3669 flange CF and a matching flange component CFS according to the invention. The flange component CFS according to the invention has an outer diameter ODS that is smaller than the outer diameter OD of the matching ISO 3669 flange. The bores BS of the flange component CFS according to the invention have a smaller diameter MS than the bores B of the matching ISO 3669 flange CF. The bores BS of the flange component CFS according to the invention are arranged midway between the outer edge and the cutting edge KES (Fig. 2a).

[0043] In this embodiment, the centers of the holes B, BS with diameters M, MS are arranged on one and the same bolt circle, the bolt circle of the ISO3669 flange has the same diameter CD as the diameter CDS of the bolt circle of the flange component CFS according to the invention.

[0044] The flange component CFS according to the invention has a thickness TS equal to the thickness T of the matching flange component CF (Fig. 2 b). To save material and weight, the flange component CFS according to the invention can also have a thickness TS that is less than the thickness T of the matching flange component CF (Fig. 2 c).

[0045] To assemble the flange component CFS according to the invention to the matching ISO3669 flange CF, the flange component CFS according to the invention and the matching ISO3669 flange are arranged such that the bores B, BS of the two flanges CF, CFS are aligned with each other. A screw is then guided centrally through a bore BS of the flange component CFS according to the invention and the bore B of the matching ISO3669 flange CF, which is aligned with the bore BS of the flange component CFS according to the invention. The screw is screwed to a matching threaded counterpart, preferably a nut, such that the flange component CFS according to the invention and the matching ISO3669 flange CF are connected to one another in a gas-tight manner. For this purpose, a metallic seal, into which the cutting edges KE, KES engage, is arranged between the flange component CFS according to the invention and the matching ISO3669 flange CF.

[0046] A further embodiment of an ISO3669 flange CF and a matching flange component CFS according to the invention in comparison is shown in Fig. 3. The flange component CFS according to the invention has an outer diameter ODS which is also smaller than the outer diameter OD of the matching ISO3669 flange.

[0047] The bores BS of the flange component CFS according to the invention are also arranged in the middle between the outer edge and the cutting edge KES. In this exemplary embodiment, the centers of the bores BS of the flange component CFS according to the invention are arranged on a bolt circle that has a smaller diameter CDS than the bolt circle of the matching ISO3669 flange CF with a diameter CD. The bolt circles on which the centers of the bores BS of the flange component CFS according to the invention, on the one hand, and the bolt circles on which the centers of the bores B of the matching ISO3669 flange CF are arranged, on the other hand, are thus arranged next to one another concentrically around the central axis Z. In addition, the bores BS of the flange component CFS according to the invention have a smaller diameter MS than the bores B of the matching ISO3669 flange CF (Fig. 3 a).

[0048] The points on the circumferences of both the bores BS of the flange component CFS according to the invention and the bores B of the ISO3669 flange CF, which have the minimum distance from the central axis Z, lie on the same inner bolt circle with the diameters ICD, ICDS, whereby the diameters ICD and ICDS are equal to one another. In contrast, the points on the circumferences of the individual bores BS of the flange component CFS according to the invention with the maximum distance from the central axis Z lie on an outer bolt circle that has a different, smaller diameter OCDS than the outer bolt circle with diameter OCD, on which the points on the circumferences of the individual bores B of the ISO3669 flange CF with the maximum distance from the central axis Z are arranged.The bore diameters MS of the bores BS of the flange component CFS according to the invention as well as the diameters ICD, ICDS of the inner bolt circles on the one hand and the diameters OCD, OCDS of the outer bolt circles on the other hand are dimensioned such that the circumferences of the bores BS of the flange component CFS according to the invention are arranged completely within the circumferences of the bores B of the ISO3669 flange CF, i.e. a screw can be passed through a bore BS of the flange component CFS according to the invention and a bore B of the ISO3669 flange CF at the same time.

[0049] The flange component CFS according to the invention has a thickness TS which, as in the above embodiment (see Fig. 2), is also equal to the thickness T of the matching flange component CF (Fig. 3 b). The flange component CFS according to the invention can also have a thickness TS which is less than the thickness T of the matching flange component CF (Fig. 3 c).

[0050] To assemble the flange component CFS according to the invention to the matching ISO3669 flange CF, the flange component CFS according to the invention and the matching ISO3669 flange are arranged such that the bores B, BS of the two flanges CF, CFS are aligned with each other. A screw is then guided eccentrically through a bore BS of the flange component CFS according to the invention and the bore B of the matching ISO3669 flange CF, which is aligned with the bore BS of the flange component CFS according to the invention. The screw is screwed to a matching threaded counterpart such that the flange component CFS according to the invention and the matching ISO3669 flange CF are connected to each other in a gas-tight manner. For this purpose, a metallic seal, into which the cutting edges KE, KES engage, is arranged between the flange component CFS according to the invention and the matching ISO3669 flange CF.

[0051] B EZ UG S CHARACTERS LIST

[0052] CF ISO3669 flange

[0053] CFS Inventive flange component

[0054] B Holes of the ISO3669 flange

[0055] BS holes of the flange component according to the invention

[0056] CD bolt circle diameter of the ISO3669 flange

[0057] CDS bolt circle diameter of the inventive

[0058] Flange component

[0059] ICD Diameter of the inner bolt circle of the ISO3669 flange

[0060] ICDS Diameter of the inner bolt circle of the flange component according to the invention

[0061] OCD Diameter of the outer bolt circle of the ISO3669 flange

[0062] OCDS Diameter of the outer bolt circle of the flange component according to the invention

[0063] ID Inside diameter of the ISO3669 flange

[0064] IDS inner diameter of the flange component according to the invention

[0065] KE cutting edge of the ISO3669 flange

[0066] KES cutting edge of the flange component according to the invention

[0067] M Bore diameter of the ISO3669 flange

[0068] MS bore diameter of the flange component according to the invention

[0069] OD Outside diameter of the ISO3669 flange

[0070] ODS outer diameter of the flange component according to the invention

[0071] SR seal outlet of the ISO3669 flange

[0072] SRS seal outlet of the flange component according to the invention

[0073] SRD Diameter of the seal outlet of the ISO3669 flange

[0074] SRSD Diameter of the seal outlet of the flange component according to the invention

[0075] T Thickness of the ISO3669 flange

[0076] TS Thickness of the flange component according to the invention

Claims

PATENT CLAIMS 1. Flange component (CFS) for ultra-high vacuum applications suitable for an ISO3669 flange (CF) with • a flange outer diameter (ODS) • several holes (BS) with a hole diameter (MS) and • with a bolt circle on which the holes (BS) are arranged, with a bolt circle diameter (CDS), characterized in that the bore diameter (MS) of the holes (BS) of the flange component (CFS) is smaller than the bore diameter (M) of the holes (B) of the matching ISO3669 flange (CF), wherein the holes (B) of the matching ISO3669 flange (CF) form an inner bolt circle (ICD), and wherein the bolt circle diameter (CDS) of the flange component (CF) is larger than the diameter of the inner bolt circle (ICD) of the holes (B) of the matching ISO3669 flange (CF).

2. Flange component (CFS) for ultra-high vacuum applications matching an ISO3669 flange (CF) according to claim 1, characterized in that the bores (BS) of the flange component (CFS) are arranged next to the bolt circle of the matching ISO3669 flange (CF).

3. Flange component (CFS) for ultra-high vacuum applications suitable for a ISO3669 flange (CF) according to claim 2, characterized in that the bolt circle of the matching ISO3669 flange (CF) is larger than the bolt circle of the flange component (CFS).

4. Flange component (CFS) for ultra-high vacuum applications matching an ISO3669 flange (CF) according to one or more of the preceding claims, characterized in that the bores (BS) of the flange component (CFS) form an inner bolt circle (ICDS) and the bores (B) of the matching ISO3669 flange (CF) form an inner bolt circle (ICD), wherein the inner bolt circle (ICDS) of the flange component (CFS) is greater than or equal to the inner bolt circle (ICD) of the matching ISO3669 flange (CF).

5. Flange component (CFS) for ultra-high vacuum applications matching an ISO3669 flange (CF) according to one or more of the preceding claims, characterized in that the bores (BS) of the flange component (CFS) form an outer bolt circle (OCDS) and the bores (B) of the matching ISO3669 flange (CF) form an outer bolt circle (OCD), wherein the outer bolt circle (OCDS) of the flange component (CFS) is smaller than or equal to the outer bolt circle (OCD) of the matching ISO3669 flange (CF).

6. Flange component (CFS) for ultra-high vacuum applications matching an ISO3669 flange (CF) according to one or more of the preceding claims, characterized in that the outer diameter (ODS) of the flange component (CFS) is less than or equal to the outer diameter (OD) of the matching ISO3669 flange (CF).

7. Flange component (CFS) for ultra-high vacuum applications suitable for an ISO3669 flange (CF) according to one or more of the preceding claims, characterized in that the flange component (CFS) has a cutting edge (KES), wherein the diameter (KESD) of the cutting edge (KES) is equal to the diameter (KED) of the cutting edge (KE) of the matching ISO3669 flange (CF).

8. Flange component (CFS) for ultra-high vacuum applications matching an ISO3669 flange (CF) according to one or more of the preceding claims, characterized in that the flange component (CFS) has a seal outlet (SRS), wherein the diameter (SRSD) of the seal outlet (SRS) is equal to the diameter (SRD) of the seal outlet (SR) of the matching ISO3669 flange (CF).

9. Flange component (CFS) for ultra-high vacuum applications matching an ISO3669 flange (CF) according to one or more of the preceding claims, characterized in that the flange component (CFS) has a thickness (TS), wherein the thickness (TS) of the flange (CFS) is smaller than the thickness (T) of the matching ISO3669 flange (CF).

10. Procedure for assembling a flange component (CFS) to a matching ISO3669 flange (CF) with the following steps: • Passing a screw through a hole (BS) of the flange component (CFS) and a hole (B) of an ISO3669 flange (CF), • Screwing the screw to a threaded counterpart, whereby the bore (BS) of the flange component (CFS) has a smaller bore diameter than the bore (B) of the ISO3669 flange (CF), whereby the bores (B) of the matching ISO3669 flange (CF) form an inner bolt circle (ICD), and where the bolt circle diameter (CDS) of the flange component (CF) is larger than the diameter of the inner bolt circle (ICD) of the holes (B) of the mating ISO3669 flange (CF).

11. Method for assembling a flange component (CFS) to a matching ISO3669 flange (CF) according to claim 10, characterized in that the screw is guided eccentrically through the bore (B) of the ISO3669 flange (CF).

12. Method for assembling a flange component (CFS) to a mating ISO3669 flange (CF) according to claim 11, characterized in that the position of the screw and / or the bore (BS) of the flange component (CFS) with respect to the bore (B) of the ISO3669 flange (CF) is shifted radially to the center line (Z) of the ISO3669 flange (CF).

13. Method for assembling a flange component (CFS) to a matching ISO3669 flange (CF) according to claim 11 or 12, characterized in that the screw is guided centrally through the bore (BS) of the flange component (CFS).

14. Method for assembling a flange component (CFS) to a matching ISO3669 flange (CF) according to one or more of claims 10 to 13, characterized in that the cutting edge (KES) of the flange component (CFS) and the cutting edge (KE) of the ISO3669 flange have the same diameter.

15. Method for assembling a flange component (CFS) to a matching ISO3669 flange (CF) according to one or more of claims 10 to 14, characterized in that the bore (BS) of the flange component (CFS) is arranged in the middle between the outer edge and the cutting edge (KES).

16. Method for assembling a flange component (CFS) to a matching ISO3669 flange (CF) according to one or more of claims 10 to 15, characterized in that before screwing the flange component (CFS) to the ISO3669 flange (CF), a seal is positioned in the seal outlets of the flange component (CFS) and the ISO3669 flange (CF), wherein the diameter (SRSD) of the seal outlet (SRS) of the flange component (CFS) is equal to the diameter (SRD) of the seal outlet (SR) of the ISO3669 flange (CF).

17. A method for assembling a flange component (CFS) to a matching ISO3669 flange (CF) according to one or more of claims 10 to 16, characterized in that the outer diameter (ODS) of the flange component (CFS) is smaller than the outer diameter (OD) of the ISO3669 flange (CF).

18. Method for assembling a flange component (CFS) to a matching ISO3669 flange (CF) according to one or more of claims 10 to 17, characterized in that the flange component (CFS) has a thickness (TS), wherein the thickness (TS) of the flange (CFS) is smaller than the thickness (T) of the matching ISO3669 flange (CF). REVISED SHEET (RULE 91) ISA / EP

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