Images for Wafer Surface Inspection System

Abstract

This image is for displaying data from a system that inspects and analyzes particles (fine particles) adhering to the wafer surface, and displays information such as the location of detected particles and the cause of particle generation. As shown in the reference diagram showing the usage state, a map showing the location of particles adhering to the wafer surface is placed on the left, and a list of maps of inspected wafers is placed on the right. When any map is selected from the list, the selected map is displayed on the left.

Images