Images for Wafer Surface Inspection System

Abstract

This image is for displaying data from a system that inspects and analyzes particles (fine particles) adhering to the wafer surface, and displays information such as the position of the detected particles and the cause of particle generation. As shown in the reference diagram showing the usage state, a map showing the positions of particles adhering to the wafer surface is placed on the left side, and information on the cause of particle generation is placed on the right side. When any particle is selected from the particles on the map, information on the cause of the selected particle generation is displayed on the right side.

Images