Circuit board transport holder

Abstract

This article is a substrate transport holder for transporting substrates such as glass substrates and semiconductor substrates while holding them from below. As shown in the reference oblique view and reference plan view showing an example of use, this article is used in a state where it is arranged with other holders having the same shape or a similar, symmetrical shape. The multiple holders arranged in this manner (four in the reference oblique view and reference plan view) are fixed to a plate (not shown) at the base of their rear sections and connected to each other. The substrate to be transported is placed on the multiple holders. This article is one of the multiple holders located at one end. Note that the number of holders can be changed depending on the size of the substrate. On the top surface of this article, the distal and proximal edges are each attached with a bolt member whose head serves as a support for the substrate to be transported, and a hook-shaped locking portion for locking the substrate is attached by the bolt member. A bolt member is also attached between the two locking portions. Furthermore, at the other end of the plurality of holders, a holder having a structure symmetrical to that of the present article is disposed, and the holder located between them is disposed without the two hook-shaped locking portions, i.e., with only a bolt member attached. By using the present article, a substrate can be held and removed from a substrate storage container or substrate processing apparatus, and the substrate can be transported to another substrate storage container or another substrate processing apparatus.

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