Circuit board transport holder

Abstract

This device is a substrate transport holder for transporting substrates such as glass substrates and semiconductor substrates while holding them from below. The device is composed of two long plates fastened to a plate at their bases. The substrate to be transported is placed on the two plates. As shown in the reference perspective view showing an example of use, heads of bolt members are attached to the distal edge, proximal edge, and intermediate edge of the top surface of each of the two plates to serve as supports for supporting the substrate to be transported. If necessary, a hook-shaped locking member for locking the substrate is attached by the bolt member. By using this device, a substrate can be held and removed from a substrate storage container or substrate processing apparatus and transported to another substrate storage container or another substrate processing apparatus.

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