Wafer Holding Unit

JP1816793SActive Publication Date: 2026-01-15SCREEN HOLDINGS CO LTD
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Patent Information

Application Number
JP2025014215D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Filing Date
2025-07-16
Publication Date
2026-01-15
Estimated Expiration
2050-07-16

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Abstract

This article is attached to a wafer transport device and functions as a wafer holder in the wafer transport device.
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