Wafer Holding Unit

JP1816855SActive Publication Date: 2026-01-15SCREEN HOLDINGS CO LTD
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
JP2025014216D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Filing Date
2025-07-16
Publication Date
2026-01-15
Estimated Expiration
2050-07-16

Smart Images

  • Figure 0001816855000001
    Figure 0001816855000001
  • Figure 0001816855000002
    Figure 0001816855000002
  • Figure 0001816855000003
    Figure 0001816855000003
Patent Text Reader

Abstract

This article is attached to a wafer transport device and functions as a wafer holder in the wafer transport device.
Need to check novelty before this filing date? Find Prior Art