Sample stage

Abstract

This product is a sample stand for holding samples such as semiconductor wafers. The part for which design registration is sought consists of three air intake ports on the periphery that adsorb and hold the sample, and a central part that supports the sample. The air intake ports on the periphery and the central part work together to hold the sample, and since they function as a single unit, the whole thing constitutes a unified design. The central part is configured to sink slightly when a sample is placed on it, according to the shape of the sample.

Images