Gas treatment device and gas treatment method

Abstract

To provide a gas treatment device capable of treating gas more effectively, and a gas treatment method capable of treating gas more effectively.SOLUTION: A gas treatment device includes: a cylindrical housing having a first opening and a second opening opposite the first opening; a plasma actuator arranged inside the housing; and an ozone decomposing device. The plasma actuator generates dielectric barrier discharge by applying a voltage and blows out an induced flow. The plasma actuator is arranged such that the blowing direction of the induced flow points the second opening, and generates an air flow that travels from the first opening toward the second opening inside the housing by the induced flow. The ozone decomposing device decomposes ozone contained in the air flow so as to generate active oxygen in the air flow. The air flow becomes an active oxygen-containing air flow, and gas flowing from the first opening is treated by the active oxygen.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] This disclosure relates to a gas processing apparatus and a gas processing method that utilizes reactive oxygen species. [Background technology]

[0002] Patent Document 1 discloses a nascent oxygen generator comprising: a device body installed in a place where air flows, formed in a cylindrical shape through which a portion of the air passes, and whose inner surface is made of a metal with high ultraviolet reflectivity; an ultraviolet lamp disposed on an axis inside the device body that irradiates ultraviolet light to decompose ozone; and an ozone generator provided upstream of the airflow inside the device body that converts oxygen in the air introduced into the body into ozone by discharge. Paragraph

[0016] of Patent Document 1 states that such a nascent oxygen generator improves the ozone generation capacity and decomposition capacity, generates a large amount of nascent oxygen from ozone, and that this generated nascent oxygen diffuses into the freezer chamber, oxidizing and decomposing malodorous substances in the freezer chamber, thereby deodorizing the freezer chamber. [Prior art documents] [Patent Documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 6-335518 [Non-patent literature]

[0004] [Non-Patent Document 1] "Effect of magnetic field on photocatalytic reactions by semiconductor titanium oxide thin films," Journal of the Photographic Society of Japan, 2006, 69, 4, 271-275. [Overview of the project] [Problems that the invention aims to solve]

[0005] In the nascent oxygen generator described in Patent Document 1, air introduced into the device from outside comes into contact with active oxygen, so it was thought that it could be used for treatments such as deodorizing and sterilizing the air outside the device. Therefore, the present inventors considered applying the nascent oxygen generator described in Patent Document 1 to the treatment of gases. However, the ability of this nascent oxygen generator to deodorize and sterilize gases was limited. At least one aspect of this disclosure is toward providing a gas processing apparatus that can process gases more effectively. Furthermore, at least one aspect of this disclosure is aimed at providing a gas treatment method that can treat gases more effectively. [Means for solving the problem]

[0006] According to at least one aspect of this disclosure, A gas treatment device, A cylindrical housing having a first opening and a second opening on the opposite side of the first opening, A plasma actuator is located inside the housing, Ozone decomposition device, Equipped with, The plasma actuator has a first electrode, a dielectric, and a second electrode. A dielectric material is interposed between the first electrode and the second electrode, and the first electrode and the second electrode are electrically insulated from each other. The first electrode is an exposed electrode provided on the first surface, which is one of the surfaces of the dielectric. The plasma actuator applies a voltage between the first electrode and the second electrode. This generates a dielectric barrier discharge from the first electrode toward the second electrode, and blows out an induced flow containing ozone from the first electrode in a first direction, which is one direction along the surface of the dielectric. The plasma actuator is positioned such that the first direction, which is the direction in which the induced flow is blown out, faces the second opening, and the induced flow generates an airflow inside the housing that flows from the first opening to the second opening, containing the gas that has flowed in from the first opening. The ozone decomposition device is provided, characterized in that it generates active oxygen in the airflow by decomposing the ozone contained in the airflow, the airflow becomes an airflow containing the active oxygen, and the gas flowing in from the first opening is treated by the active oxygen.

[0007] Furthermore, according to at least one aspect of this disclosure, A gas treatment device, A cylindrical housing having a first opening and a second opening on the opposite side of the first opening, Equipped with an ozone decomposition device, The cylindrical housing contains a dielectric, In a cross-section of the cylindrical housing in the direction along the axial direction, A first electrode, which is an exposed electrode, is provided on the inner surface of the cylindrical housing, covering a portion of the inner surface. A second electrode is arranged outside the inner surface of the housing, electrically insulated from the first electrode via the dielectric. The gas processing apparatus generates a dielectric barrier discharge from the first electrode to the second electrode by applying a voltage between the first electrode and the second electrode, and blows out an induced flow containing ozone from the first electrode in one direction along the inner surface of the housing, towards the second opening. The induced flow generates an airflow inside the cylindrical housing that includes the gas flowing in from the first opening and flows from the first opening toward the second opening. The ozone decomposition apparatus provides a gas treatment device characterized in that it generates active oxygen in the airflow by decomposing the ozone contained in the airflow, the airflow becomes an airflow containing the active oxygen, and the gas flowing in from the first opening is treated by the active oxygen.

[0008] Furthermore, according to at least one aspect of this disclosure, A processing method for treating a gas with reactive oxygen species, The process includes a step of preparing a gas treatment device. The gas treatment device is A cylindrical housing having a first opening and a second opening on the opposite side of the first opening, A plasma actuator disposed inside the housing, an ozone decomposition device, and is provided with The plasma actuator has a first electrode, a dielectric, and a second electrode. The dielectric is interposed between the first electrode and the second electrode, and the first electrode and the second electrode are electrically insulated from each other. The first electrode is an exposed electrode provided on a first surface which is one surface of the dielectric. The plasma actuator generates a dielectric barrier discharge from the first electrode toward the second electrode by applying a voltage between the first electrode and the second electrode, and blows out an induced flow containing ozone in a first direction which is a one-way direction along the surface of the dielectric from the first electrode. The plasma actuator is arranged such that the first direction which is the blowing direction of the induced flow faces the second opening, and the induced flow generates an air flow from the first opening toward the second opening inside the housing, which includes the gas flowing in from the first opening. The ozone decomposition device decomposes the ozone contained in the air flow to generate active oxygen in the air flow, and the air flow becomes an air flow containing the active oxygen, and the gas flowing in from the first opening is treated by the active oxygen. Thus, a gas treatment method using active oxygen is provided.

Advantages of the Invention

[0009] At least one aspect of the present disclosure can obtain a gas treatment device capable of more effectively treating a gas. Also, according to at least one aspect of the present disclosure, a gas treatment method capable of more effectively treating a gas can be obtained.

Brief Description of the Drawings

[0010] [Figure 1] A schematic perspective view showing the appearance of a gas treatment device according to one aspect of the present disclosure [Figure 2] An explanatory diagram of a gas treatment device according to one aspect of the present disclosure [Figure 3]Diagram illustrating the arrangement of a plasma actuator according to one aspect of this disclosure. [Figure 4] Diagram illustrating a gas treatment apparatus relating to other aspects of this disclosure [Figure 5] Schematic cross-sectional view of the evaluation apparatus for the gas treatment apparatus of this disclosure. [Figure 6] Schematic diagram of the configuration when evaluating the sterilization rate of the gas treatment device of this disclosure. [Figure 7] Schematic cross-sectional view of the gas treatment apparatus according to Example 3 [Figure 8] Schematic cross-sectional view of the gas treatment apparatus according to Example 4 [Figure 9] Schematic cross-sectional view of the gas treatment apparatus according to Example 5 [Figure 10] Schematic cross-sectional view of the gas treatment apparatus according to Example 7 [Modes for carrying out the invention]

[0011] In this disclosure, descriptions of numerical ranges such as "XX or greater and YY or less" or "XX to YY" mean a numerical range that includes the lower and upper limits, unless otherwise specified. When numerical ranges are described in steps, the upper and lower limits of each numerical range can be any combination. In addition, in this disclosure, a description such as "at least one selected from the group consisting of XX, YY, and ZZ" means any of the following: XX, YY, ZZ, a combination of XX and YY, a combination of XX and ZZ, a combination of YY and ZZ, or a combination of XX, YY, and ZZ. Furthermore, in this disclosure, "treatment" of an object to be treated with reactive oxygen species includes all treatments that can be achieved by reactive oxygen species, such as surface modification (hydrophilization), sterilization, deodorization, and bleaching of the treated surface of the object to be treated with reactive oxygen species.

[0012] Furthermore, the term "bacteria" as the target of "disinfection" in this disclosure refers to microorganisms, which include fungi, bacteria, single-celled algae, viruses, protozoa, etc., as well as animal or plant cells (including stem cells, dedifferentiated cells, and differentiated cells), tissue cultures, fusion cells obtained by genetic engineering (including hybridomas), dedifferentiated cells, and transformants (microorganisms). Examples of viruses include norovirus, rotavirus, influenza virus, adenovirus, coronavirus, measles virus, rubella virus, hepatitis virus, herpesvirus, and HIV virus. Examples of bacteria include staphylococcus, Escherichia coli, Salmonella, Pseudomonas aeruginosa, Vibrio cholerae, Shigella, Anthrax bacilli, Mycobacterium tuberculosis, Clostridium botulinum, Clostridium tetani, and Streptococcus. Examples of fungi include dermatophytes, Aspergillus, and Candida. Therefore, "disinfection" in this disclosure also includes, for example, the inactivation of viruses. Furthermore, in this disclosure, reactive oxygen species refer to, for example, superoxide (·O2) produced by the decomposition of ozone (O3). - ), including free radicals such as hydroxyl radicals (·OH).

[0013] Hereinafter, with reference to the drawings, some embodiments of the gas processing apparatus according to this disclosure will be specifically illustrated. However, the dimensions, materials, shapes and other characteristics of the components described in this embodiment will not be considered. The relative arrangement of these components should be appropriately modified depending on the configuration of the components to which the disclosure applies and various conditions. In other words, the gas treatment apparatus relating to this disclosure is not limited to the configuration embodied in each embodiment. Furthermore, in the following explanation, components with the same function may be given the same number in the drawings, and their explanations may be omitted.

[0014] Based on our own investigations, we speculate that the reason why the gas treatment effect of the nascent oxygen generator described in Patent Document 1 is limited is as follows. In other words, reactive oxygen species are very unstable, ·O2 - The half-life is 10 -6 The half-life of OH is 10 seconds.-9 It is believed that this process takes an extremely short time, in seconds, and is rapidly converted into stable oxygen and water. In particular, the nascent oxygen generator described in Patent Document 1 is placed where airflow is generated, and a portion of that air passes through the inside of the cylindrical device body. Specifically, Figure 2 of Patent Document 1 discloses that airflow is generated by a refrigerator fan 4 placed in the freezer chamber. In such a situation, even if reactive oxygen species are generated inside the device body, the air flowing in from the outside forms turbulence inside the device body, and it is thought that the reactive oxygen species are converted into oxygen and water in a very short time by colliding with the internal walls of the device body due to this turbulence. Therefore, it is thought that the opportunities for contact between the reactive oxygen species inside the device body and the substances to be treated (odor substances, bacteria, etc.) are extremely limited. Based on these considerations, the inventors conducted further studies with the aim of obtaining a gas treatment apparatus that can more reliably use active oxygen in gas treatment and treat gases more effectively. As a result, they found that the gas treatment apparatus and gas treatment method described above (hereinafter sometimes referred to as "gas treatment apparatus, etc.") contribute to achieving this objective. The specific embodiments of the gas treatment apparatus, etc. related to this disclosure will be described below. However, the gas treatment apparatus, etc. related to this disclosure is not limited to the specific embodiments shown below.

[0015] <First aspect> A gas processing apparatus according to the first embodiment comprises a cylindrical housing having a first opening and a second opening opposite to the first opening, a plasma actuator disposed inside the housing, and an ozone decomposition device. It is equipped with.

[0016] In a plasma actuator, the first electrode, the dielectric, and the second electrode are stacked in that order. A dielectric material is interposed between the first electrode and the second electrode, thereby electrically insulating the two electrodes. Furthermore, the first electrode is an exposed electrode provided on the first surface, which is one surface of the dielectric. By applying a voltage between the first electrode and the second electrode, a dielectric barrier discharge occurs from the first electrode toward the second electrode, and an induced flow containing ozone is blown out from the first electrode in a first direction, which is one direction along the surface of the dielectric. The plasma actuator is then positioned so that the direction of the induced flow, which is the first direction, is directed toward the second opening, and the induced flow generates an airflow inside the housing toward the second opening from the first opening.

[0017] Furthermore, the ozone decomposition device generates reactive oxygen species in the airflow by decomposing the ozone contained in the airflow generated inside the enclosure. As a result, the airflow inside the enclosure contains reactive oxygen species.

[0018] The gas processing apparatus according to this embodiment will be described in more detail with reference to the drawings. Figure 1 is a perspective view showing the external appearance of the gas treatment apparatus 100 according to this embodiment, and the cylindrical housing 101 has a first opening (not shown) at one end and a second opening 103 at the opposite end. Figure 2(a) is a cross-sectional view of the gas processing apparatus 100 along the direction from the first opening (not shown) toward the second opening 103 (hereinafter also referred to as the "longitudinal direction"). A plasma actuator 200 is arranged on the inner surface of the cylindrical housing 101. The plasma actuator 200 has a first electrode 205 which is an exposed electrode provided on one surface of the dielectric 203, and a second electrode 201 which is electrically insulated from the first electrode 205 with the dielectric 203 in between. Furthermore, it is preferable that the plasma actuator 200 is arranged around the entire circumference of the inner surface of the cylindrical housing 101, as shown in Figure 2(b) as viewed from the second opening side of the gas processing device 100 and in Figure 3, which is a perspective view of the gas processing device 100.

[0019] Then, by applying a voltage between the first electrode 205 and the second electrode 201, a dielectric barrier discharge is generated from the first electrode toward the second electrode, and an induced flow 207 containing ozone is blown out from the first electrode in a first direction, which is one direction along the surface of the dielectric. Furthermore, the plasma actuator 200 is positioned such that the first direction, which is the direction in which the induced flow 207 containing ozone is blown out, faces the second opening 103. The induced flow 207 containing ozone generates an airflow 209 inside the cylindrical housing 101 in the direction indicated by the arrow, and air from outside the gas processing device is drawn into the cylindrical housing 101 through the first opening. In other words, the induced flow 207 containing ozone generates an airflow inside the housing that flows from the first opening towards the second opening 103, containing the gas that has flowed in through the first opening.

[0020] Furthermore, an ultraviolet light source 206, which serves as an ozone decomposition device, is positioned in the center of the cylindrical housing 101 along the longitudinal direction of the housing. The ultraviolet light source 206 irradiates the induced flow with ultraviolet light, decomposing the ozone in the induced flow and generating reactive oxygen species in the airflow 209. As a result, the airflow 209 inside the housing becomes an airflow containing reactive oxygen species, and the gas flowing in from the first opening is treated by the reactive oxygen species. In addition, the airflow containing reactive oxygen species can also treat gases that are present in the direction of the outflow of the airflow containing reactive oxygen species, which are to be treated. The above also applies when the ozone decomposition device 206 is, for example, a heating device or a humidifying device, in which case the ozone in the airflow 209 can be decomposed by heat or moisture, and an airflow 213 containing active oxygen can be supplied.

[0021] According to the inventors' studies, the reactive oxygen species contained in the airflow 209 generated inside the housing due to the induced flow from the plasma actuator have a lifespan that is generally considered to be that of reactive oxygen species (·O2 - Half-life: 10 -6 Half-life of OH: 10 seconds -9It is believed that the active state can be maintained for a longer period than seconds. The reason why the reactive oxygen species generated in the airflow can maintain their activity over a long period is that the airflow 209 generated inside the enclosure due to the induced flow, which is a unidirectional jet, is an extremely well-ordered flow. Therefore, the reactive oxygen species are protected within the airflow 209, and deactivation due to contact with the inner wall of the enclosure, etc., is suppressed. Thus, according to the gas treatment apparatus of this disclosure, the generated reactive oxygen species can be effectively utilized for gas treatment. On the other hand, air forcibly introduced into the enclosure by a fan or the like located outside the device forms turbulence inside the enclosure, increasing the chances of contact with the inner walls of the enclosure, etc., and is therefore thought to be more easily deactivated by the active oxygen generated inside the enclosure. Accordingly, it is preferable that the gas treatment apparatus according to this disclosure does not include other airflow generating means (for example, a blower fan, etc.) that create a gas flow other than the airflow 209 caused by the induced flow inside the enclosure.

[0022] Furthermore, it is preferable that the plasma actuator 200 is shaped to conform to the inner surface of the cylindrical housing 101. When the cylindrical housing 101 is viewed from the second opening, the plasma actuator 200 may be provided on a part of the circumferential surface of the inner surface of the cylindrical housing 101, or multiple actuators may be provided on a part of the circumferential surface of the inner surface of the cylindrical housing 101. For example, the cylindrical housing 1 When 01 is viewed from the second opening, the ratio of the length of the plasma actuator 200 to the total circumferential length of the inner surface of the cylindrical housing 101 is preferably 30% or more, 50% or more, 70% or more, 80% or more, 90% or more, or 95% or more. The upper limit is 100% or less.

[0023] When multiple plasma actuators 200 are provided in a part of the circumferential direction, it is preferable to provide them at approximately the same position in the longitudinal direction. "Approximately the same" means that they should be at the same position to the extent that the induced flows 207 converge. When the cylindrical housing 101 is viewed from the second opening, it is preferable that the multiple plasma actuators 200 are arranged in a rotationally symmetric manner. For example, it is preferable that they are arranged in a 2-fold to 6-fold symmetric manner.

[0024] Furthermore, it is preferable that the plasma actuator 200 is arranged around the entire circumference of the cylindrical housing 101. This arrangement allows induced flows 207 containing ozone to be ejected simultaneously in the same direction. As a result, the induced flows 207 inside the cylindrical housing 101 merge to generate a more powerful airflow 209. Because airflow 209 has high thrust, the thrust of airflow 213, which contains reactive oxygen species generated by ultraviolet irradiation, also increases. As a result, the amount of gas processed per unit time increases, and the gas processing efficiency can be improved.

[0025] The plasma actuator 200 is described in detail below. <First electrode, second electrode> The materials constituting the first and second electrodes are not particularly limited as long as they are highly conductive materials. For example, metals such as copper, aluminum, stainless steel, gold, silver, and platinum, as well as materials plated or vapor-deposited thereon, conductive carbon materials such as carbon black, graphite, and carbon nanotubes, and composite materials obtained by mixing these with resins can be used. The materials constituting the first electrode and the materials constituting the second electrode may be the same or different.

[0026] Among these, aluminum, stainless steel, or silver are preferred because they are resistant to corrosion and exhibit excellent uniformity of electrical discharge. Furthermore, the shapes of the first electrode and the second electrode can be flat, wire-shaped, needle-shaped, etc., without any particular limitations. Preferably, the shape of the first electrode is flat. Also preferably, the shape of the second electrode is flat. When at least one of the first electrode and the second electrode is flat, it is preferable that the aspect ratio (length of the long side / length of the short side) of the flat plate is 2 or more.

[0027] To prevent plasma generation from the second electrode 201, it is preferable that the second electrode 201 be an embedded electrode. For example, as shown in Figure 2(a), it is preferable that the second electrode is embedded in the dielectric 203 without exposing its edges. Here, embedding means that the electrode is embedded as long as no induced flow is generated from the edges of the second electrode 201, and this does not prevent the surface of the second electrode from being exposed on the surface of the plasma actuator 200. If an induced flow is generated from the edges of the second electrode 201, its direction will be opposite to the direction of the induced flow from the first electrode 205, which may disrupt the airflow in the housing and negatively affect the longevity of the reactive oxygen species.

[0028] <Dielectric> The dielectric material is not particularly limited as long as it has high electrical insulation properties. Examples include resins such as polyimide, polyester, fluororesin, silicone resin, acrylic resin, and phenolic resin, as well as glass, ceramics, and composite materials made by mixing these with resins, etc. These can be used. Furthermore, as shown in Figures 2 and 3, when a plasma actuator is arranged around the entire circumference of the inner surface of a cylindrical housing, a dielectric material made of a flexible resin such as polyimide or silicone resin is preferred. In particular, silicone resin is especially preferred because, in addition to its flexibility, it can be positioned with high conformability even to housings with complex shapes.

[0029] <Plasma Actuator> The plasma actuator is not particularly limited as long as it has a dielectric material between a first electrode and a second electrode, and can generate an induced flow, which is a unidirectional jet containing ozone, by applying a voltage between the two electrodes. In a plasma actuator, plasma is more easily generated when the shortest distance between the first and second electrodes is short. Therefore, the dielectric film thickness is preferably as thin as possible, as long as it does not cause electrical breakdown, and can be 10 μm to 1000 μm, preferably 10 μm to 200 μm. Furthermore, the shortest distance between the first and second electrodes is preferably 200 μm or less, more preferably 50 μm to 200 μm.

[0030] Figure 2(c) also shows a cross-sectional structure of one embodiment of the plasma actuator 200. This plasma actuator is a so-called dielectric barrier discharge (DBD) plasma actuator (hereinafter sometimes simply referred to as "DBD-PA") in which an exposed electrode (hereinafter also referred to as "first electrode") 205 with its end face exposed is provided on one surface of the dielectric 203 (hereinafter also referred to as "first surface"), and a second electrode 201 is provided on the surface opposite to the first surface (hereinafter also referred to as "second surface"). In Figure 2(c), reference numeral 210 denotes a dielectric substrate for embedding the second electrode 201 within the thickness direction of the plasma actuator so as not to generate induced flow from the end face of the second electrode. Furthermore, voltage can be applied to the first electrode and the second electrode by a power supply 211.

[0031] In the plasma actuator 200, the first electrode 205 and the second electrode 201, which are positioned with the dielectric 203 in between, are, for example, positioned diagonally opposite each other. By applying a voltage from the power supply 211 between these electrodes (between both electrodes), a dielectric barrier discharge is generated from the first electrode 205 toward the second electrode 201. Then, plasma 208 is generated from the edge 204 of the first electrode 205 toward the direction in which the second electrode extends, along the exposed portion (the portion not covered by the first electrode) 203-1 of the first surface of the dielectric 203. At the same time, an air intake flow is generated from the internal space of the housing toward the electrodes. Electrons in the surface plasma 208 collide with oxygen molecules in the air, dissociating them and producing oxygen atoms. The resulting oxygen atoms collide with undissociated oxygen molecules, generating ozone. Therefore, due to the interaction between the jet-like flow from the surface plasma 208 and the air intake flow, an induced flow 207 containing a high concentration of ozone is generated along the surface of the dielectric 203 from the edge 204 of the first electrode 205.

[0032] In other words, the plasma actuator is constructed by stacking a first electrode 205, a dielectric 203, and a second electrode 201 in this order, with the first electrode 205 being an exposed electrode provided on the first surface of the dielectric 203. The plasma actuator generates a dielectric barrier discharge from the first electrode 205 toward the second electrode 201 by applying a voltage between the first electrode 205 and the second electrode 201, thereby blowing out an induced flow from the first electrode 205 in a first direction, which is one direction along the first surface of the dielectric 203. More specifically, a dielectric barrier discharge is generated from one edge 204 of the first electrode 205 toward the second electrode 201, and an induced flow, which is a unidirectional jet, is ejected from one edge 204 of the first electrode 205 toward the first direction along the first surface of the dielectric 203. Furthermore, in one cross-section in the thickness direction of the plasma actuator, the second electrode 201 extends in the direction of the induced flow's outflow (first direction).

[0033] More specifically, for example, the plasma actuator has a dielectric 203, and when viewed in cross-section in the thickness direction of the plasma actuator, a first electrode 205 and a second electrode 201 are arranged diagonally opposite each other in the thickness direction of the plasma actuator via the dielectric 203. The first electrode 205 is provided so as to cover a portion of the first surface of the dielectric 203, and the first surface of the dielectric has an exposed portion 203-1 that is not covered by the first electrode 205. At least a portion of the exposed portion 203-1 overlaps with the second electrode 201. Then, by applying a voltage between the first electrode and the second electrode, an induced flow containing ozone is generated from the first-direction edge 204 of the first electrode 205 in the cross-section in the thickness direction (Figure 2(c)) along the exposed portion of the dielectric that overlaps with the second electrode 201.

[0034] The induced flow becomes, for example, a wall jet along the exposed portion 203-1, making it easy to supply high-concentration ozone in a specific direction. The length of the exposed portion 203-1 in the direction of the induced flow (i.e., the length from the edge 204 on the first direction side of the first electrode to the edge of the first surface of the dielectric) is not particularly limited, but is preferably 0.1 to 50 mm, more preferably 0.5 to 20 mm, and even more preferably 1 to 10 mm.

[0035] Figure 2(c) illustrates the overlap between the first electrode 205 and the second electrode 201 of the plasma actuator, which is an ozone generator. Figure 2(c) is a cross-sectional view of the plasma actuator. The first electrode 205 and the second electrode 201, which are positioned diagonally opposite each other, may have the edge 204 of the first electrode located on the portion of the second electrode 201 that is formed across the dielectric when viewed from above in the cross-sectional view. That is, the first electrode and the second electrode may be provided so as to overlap across the dielectric. In this case, it is preferable to prevent dielectric breakdown when a voltage is applied in the portion where the first electrode and the second electrode overlap across the dielectric.

[0036] Figure 2(c) shows an configuration in which the first electrode and the second electrode overlap with a dielectric material in between. In a cross-section in the thickness direction of the plasma actuator, the edge 204 of the first electrode on the first direction side is defined as edge A, and the edge of the second electrode on the second direction side, which is opposite to the first direction, is defined as edge B. Preferably, edge B is located on the second direction side of edge A. In this way, the first electrode and the second electrode overlap with a dielectric material in between, enabling the generation of a stable plasma and induced flow.

[0037] Furthermore, since the first electrode and the second electrode are positioned diagonally opposite each other via the dielectric 203, edge B is located in the first direction more than the edge of the first electrode opposite to edge A. This makes it possible to suppress the generation of induced flow from the edge of the first electrode opposite to edge A.

[0038] Next, we will show an embodiment in which the first electrode and the second electrode do not overlap with respect to the dielectric. In a cross-section in the thickness direction of the plasma actuator, when the edge 204 of the first electrode on the first direction side is called edge A, and the edge of the second electrode on the second direction side, which is opposite to the first direction, is called edge B, for example, edge B is located on the first direction side than edge A. Thus, when the first electrode and the second electrode do not overlap with the dielectric in between, it is preferable to relatively increase the voltage applied between the two electrodes in order to compensate for the weakening of the electric field due to the relatively larger shortest distance between the electrodes.

[0039] Furthermore, in the cross-section in the thickness direction of the plasma actuator, edge A and edge B are dielectric Another preferred embodiment is that the edges coincide in the thickness direction. This embodiment, for example, shows that edge A and edge B face each other at the shortest distance across the dielectric, and the first electrode and the second electrode neither overlap nor are separated across the dielectric. This allows the energy applied between the two electrodes to be used more efficiently to generate the induced flow.

[0040] The overlap between the edge of the first electrode and the edge of the second electrode is preferably -100 μm to +1000 μm, more preferably -0 μm to +200 μm, and even more preferably 0 μm, when viewed from the top of the cross-sectional view, with the overlap length being positive.

[0041] There are no particular limitations on the thickness of the electrodes for both the first and second electrodes, but they can be between 10 μm and 1000 μm. If the thickness is 10 μm or more, the resistance decreases and plasma generation becomes easier. If the thickness is 1000 μm or less, electric field concentration becomes more likely, which also makes plasma generation easier. The width of the electrodes is not particularly limited for both the first and second electrodes, but it can be 1000 μm or more.

[0042] In a plasma actuator, it is preferable that no induced flow is generated from edges other than edge A of the first electrode as defined above. To this end, the edges other than edge A may be covered with a dielectric material. This allows a unidirectional jet to be generated even if the first and second electrodes overlap in the Y-axis direction. Alternatively, the shape of the electrodes may be controlled to prevent the generation of induced flow from edges other than edge A in relation to the second electrode. For example, if the electrodes are rectangular, the length of the electrodes in the Z-axis direction (perpendicular to the direction of the induced flow ejection from edge A) may be the same for the first and second electrodes, or the first electrode may be longer. Such configurations make it easier to control the direction of the induced flow.

[0043] The first electrode of the plasma actuator may be partially embedded in the dielectric 203, as long as it is exposed on the surface of the dielectric 203, as shown in Figure 2(d). The second electrode of the plasma actuator may be embedded inside the cylindrical housing 101, as shown in Figure 2(e). Alternatively, it may be placed outside the cylindrical housing 101, as shown in Figure 2(f).

[0044] As shown in Figure 2(c), the induced flow 207 containing ozone flows in a jet-like flow direction due to surface plasma from the edge 204 of the first electrode 205 along the exposed portion 203-1 of the first surface of the dielectric 203, that is, in the direction from the edge 204 of the first electrode 205 along the exposed portion 203-1 of the first surface of the dielectric. This induced flow is a flow of gas containing high-concentration ozone with a velocity of several m / s to several tens of m / s. The voltage applied between the first electrode 205 and the second electrode 201 of the plasma actuator is not particularly limited as long as it can generate plasma in the plasma actuator. It may be a DC voltage or an AC voltage, but an AC voltage is preferred. Furthermore, it is also preferred that the voltage be a pulse voltage.

[0045] Furthermore, the amplitude and frequency of the voltage can be appropriately set to adjust the flow velocity of the induced flow and the ozone concentration in the induced flow. In this case, it is preferable to appropriately select the settings from the viewpoint of generating an ozone concentration in the induced flow that is necessary to produce an effective reactive oxygen concentration or amount of effective reactive oxygen according to the purpose of treatment, and supplying the generated reactive oxygen to the airflow while maintaining an effective reactive oxygen concentration or amount of effective reactive oxygen according to the purpose of treatment. For example, when the applied voltage is alternating current, the maximum and minimum voltage difference of the alternating current can be set to 0.1kVpp to 100kVpp. Furthermore, the frequency of the voltage can preferably be 1kHz or higher, and more preferably 10kHz to 100kHz.

[0046] When the voltage is an AC voltage, the waveform of the AC voltage is not particularly limited, and a sine wave, square wave, triangular wave, etc., can be used, but a square wave is preferable from the viewpoint of the speed of the voltage rise. The duty cycle of the voltage can also be appropriately selected, but a fast voltage rise is preferred. Preferably, the voltage is applied such that the voltage rise from the bottom to the peak of the wavelength amplitude is 10,000,000 V / sec or more. Furthermore, it is preferable that the value obtained by dividing the amplitude of the voltage applied between the first electrode 205 and the second electrode 201 by the thickness of the dielectric 203 (voltage / thickness) be 10kV / mm or more.

[0047] <Ozone decomposition device> The gas treatment device includes an ozone decomposition device 206. The ozone decomposition device decomposes the ozone contained in the airflow 209, generating reactive oxygen species in the airflow 209. An ozone decomposition device is one that can act on the ozone contained in the airflow and decompose it. Preferably, the ozone decomposition device is one that can decompose ozone without disturbing the airflow. The arrangement of the ozone decomposition apparatus is not particularly limited as long as the effects of the present invention can be realized, but it is preferably installed at the center of the cylindrical housing so as not to disturb the progress of the induced flow. Furthermore, when the device is mounted on the inner wall of a cylindrical housing, there are no limitations as long as the effects of this disclosure can be achieved. However, it is preferable that the device is embedded inside the housing so as not to obstruct the induced flow, and that it does not protrude from the inner surface of the housing.

[0048] The ozone decomposition device is preferably at least one device selected from the group consisting of an ultraviolet light source that irradiates an airflow with ultraviolet light to generate active oxygen in the airflow, a heating device that heats the airflow to generate active oxygen in the airflow, and a humidifying device that humidifies the airflow to generate active oxygen in the airflow. The ozone decomposition device may also be a combination of these. For example, it may be a device that heats the airflow while irradiating it with ultraviolet light, or a device that humidifies the inside of the housing while irradiating the airflow with ultraviolet light and heating the airflow. The ozone decomposition device is more preferably an ultraviolet light source. That is, the gas processing apparatus according to one aspect of the present disclosure preferably comprises at least an ultraviolet light source that irradiates the airflow with ultraviolet light to generate the active oxygen in the airflow as an ozone decomposition device. The following describes each device.

[0049] <Ultraviolet light source and ultraviolet light> The ultraviolet light source is not particularly limited as long as it can irradiate ultraviolet light capable of exciting ozone and generating reactive oxygen species. Furthermore, the ultraviolet light source is not particularly limited as long as it has the wavelength and intensity of ultraviolet light necessary to excite ozone and obtain the effective reactive oxygen species concentration or amount of effective reactive oxygen species according to the purpose of the treatment. For example, since the peak value of the light absorption spectrum of ozone is 260 nm, the peak wavelength of the ultraviolet light is preferably 220 nm to 310 nm, more preferably 253 nm to 285 nm, and even more preferably 253 nm to 266 nm. Specific ultraviolet light sources that can be used include low-pressure mercury lamps, which consist of mercury sealed in quartz glass along with an inert gas such as argon or neon, cold cathode ultraviolet lamps (UV-CCL), and ultraviolet LEDs. For low-pressure mercury lamps and cold cathode ultraviolet lamps, the wavelength should be selected from around 254 nm. On the other hand, for ultraviolet LEDs, the wavelength should be selected from around 265 nm, 275 nm, or 280 nm from the standpoint of output performance.

[0050] <Heating device> The heating device 206 is not particularly limited as long as it can provide thermal energy capable of exciting the ozone in the airflow 209 and generating reactive oxygen species. Since the thermal decomposition of ozone begins at around 100°C, a device capable of heating the airflow 209 to around 120°C is preferred. On the other hand, if the temperature exceeds 120°C, depending on the material of the housing, the housing may undergo thermal degradation such as melting or decomposition. Therefore, a temperature of 200°C or lower is preferable. Preferably, it is 100 to 140°C, and more preferably 110 to 130°C.

[0051] The heating device is not particularly limited; for example, it may be a device equipped with a heat source (heat supply means) that supplies heat, or it may be a device without a heat source (heat supply means). Specifically, heating devices equipped with a heat supply means include, for example, ceramic heaters, cartridge heaters, sheathed heaters, electric heaters, oil heaters, etc. In the case of a device that includes a metal heating element, the heating element is preferably made of a material with excellent oxidation resistance, such as a nichrome alloy or tungsten. Heating devices without a heat supply means include, for example, a device that heats the airflow 209 by dielectric heating (microwave heating, electronic heating, high-frequency heating, radio frequency heating, etc.). A cartridge heater is preferred.

[0052] <humidifier> The humidifier 206 is not particularly limited as long as it humidifies the inside of the enclosure, contains water in the airflow 209, and generates active oxygen in the airflow by decomposing ozone in the airflow with water. Here, humidification means providing moisture to the object, and the form of the moisture is not particularly limited and may be at least one selected from the group consisting of gas, liquid, and solid. Furthermore, the water used to provide moisture can be any known water, and may also contain substances other than water.

[0053] There are no particular limitations on the type of humidifier; for example, evaporative humidifiers and mist humidifiers can be used. To avoid increasing humidity near the plasma actuator, it is preferable that the humidifier has directionality (hereinafter also simply referred to as directionality) with respect to the direction in which moisture is supplied. By having directionality, the humidifier can efficiently humidify the area near the airflow 209 and the surface of the workpiece without increasing humidity near the plasma actuator. To give the humidifier directionality, known methods can be suitably used. For example, one method is to generate airflow by installing a fan so as not to disturb the induced flow and airflow 209, and to transport moisture in the direction of the airflow, or to apply appropriate pressure to the moisture with an air pump or the like and eject the moisture in the desired direction. It is preferable to direct the humidifier in the same direction as the induced flow and airflow 209 (first direction) so as not to disturb the flow of the induced flow and airflow 209.

[0054] <Placement of plasma actuator and ozone decomposition device> In the gas treatment device 100, the position of the plasma actuator that generates an induced flow containing ozone is not particularly limited, as long as it is positioned so that the reactive oxygen species in the airflow 209, generated by ultraviolet light irradiated from the ultraviolet light source 206 which is an ozone decomposition device, maintain an effective reactive oxygen species concentration or amount according to the purpose of treatment. The same applies when the ozone decomposition device is a heating device or a humidifying device.

[0055] Furthermore, it is preferable that the plasma actuator and the ozone decomposition device are arranged such that the gaseous flow containing the active oxygen flows out of the gas processing device through the second opening. With this arrangement, the gaseous flow containing the active oxygen that flows out of the gas processing device through the second opening can process the gas to be processed that is present in the direction of the flow out of the active oxygen-containing gaseous flow.

[0056] Furthermore, the distance between the ozone decomposition device and the plasma actuator varies depending on the purpose of the treatment and cannot be specified in general terms. For example, the distance between the dielectric of the plasma actuator and the surface facing the ozone decomposition device is preferably 15 mm or less, more preferably 10 mm or less, and even more preferably 4 mm or less. However, ozone It is not necessary to place the plasma actuator within approximately 15 mm of the decomposition device. As long as the amount of reactive oxygen in the airflow can be adjusted to an effective concentration according to the treatment purpose in relation to elements that can decompose ozone, such as the intensity and wavelength of ultraviolet light, the distance between the ozone decomposition device and the plasma actuator is not particularly limited.

[0057] Furthermore, the amount of ozone generated per unit time in the plasma actuator, when the ozone in the airflow 209 is not decomposed by the ozone decomposition device, is preferably, for example, 15 μg / min or more. More preferably, it is 30 μg / min or more. There is no particular upper limit to the amount of ozone generated, but for example, it is 1000 μg / min or less.

[0058] The velocity of the induced flow or airflow 209 may be, for example, a speed at which the airflow 209 is processed by the gas treatment device 100 as it propels itself through the inside of the enclosure, and a speed at which the airflow 209 can process the gas to be processed at the destination outside the enclosure where the airflow is propelled. For example, as mentioned above, it is approximately 0.01 m / s to 100 m / s. As described above, the ozone concentration in the induced flow generated by the plasma actuator, as well as the flow velocity of the induced flow, can be controlled by the thickness and material of the electrodes and dielectric, the type of voltage applied, its amplitude, and frequency.

[0059] <Enclosure and opening> The gas processing apparatus of this disclosure comprises a cylindrical housing 101 having a first opening and a second opening opposite the first opening, a plasma actuator 200 disposed inside the housing, and an ozone decomposition device 206. A preferred embodiment of this design is described below, but the arrangement of the first electrode and the second electrode in the housing can be appropriately selected, for example, so that the reactive oxygen species generated in the airflow 209 maintain an effective reactive oxygen species concentration or amount according to the purpose of the treatment.

[0060] The cylindrical housing 101 can accommodate a plasma actuator inside, and has an opening other than the first opening. It is sufficient if the configuration prevents air from flowing in from the opening. Therefore, there are no particular restrictions on the shape of the cross-section, the inner diameter, the outer diameter, the ratio of the inner diameter to the outer diameter, the inner diameter, the outer diameter and the ratio of the inner diameter to the outer diameter from the first opening to the second opening, the amount of change in the cross-sectional shape, the coaxiality of the first opening and the second opening, the angle of refraction of the cylindrical housing 101, and the material of the housing. It is preferable that the configuration does not disturb the laminar flow of the induced flow and airflow 209 containing ozone, or the induced flow and airflow 209 containing reactive oxygen species. For example, it is preferable that there are no obstacles between the second opening and the extension line in the direction along the exposed portion 203-1 of the first surface of the dielectric from the edge of the first electrode of the plasma actuator. The length of the cylindrical housing 101 can be selected as appropriate, but the airflow of the air flowing in from the first opening is easily regulated according to the induced flow generated by the plasma actuator, so the length of the first opening and It is preferable that the distance to the plasma actuator be set to a length that is longer than the distance between the second aperture and the plasma actuator.

[0061] The cross-sectional shape of the cylindrical housing 101 of the gas processing device in the direction perpendicular to the direction from the first opening to the second opening can be appropriately selected from a polygon such as a square, a circle, an ellipse, or a shape that is a combination of a circle and a polygon. For example, a circular or square shape is preferable. That is, it is preferable that the cylindrical housing be cylindrical or square-tube. Because this can be a factor that disturbs the laminar flow of the induced flow containing ozone, the airflow 209 is propelled from the first opening to the second opening. A shape in which the cross-sectional shape and the phase of the cross-sectional shape do not change during the process is preferable. In order to suppress opportunities for the airflow 209 to come into contact with the inner wall of the housing, it is preferable that the inner diameter of the cylindrical housing 101 does not change from the first opening to the second opening 103.

[0062] The material of the cylindrical housing 101 can be metal, ceramics, resin, etc., as long as it is a material and thickness that does not deform under its own weight so as not to obstruct the progression of the induced flow and airflow 209 from the first opening to the second opening. Preferably, it is a material and thickness with high insulating properties so as not to leak to the outside from the electrodes of the plasma actuator. The manufacturing method for the cylindrical housing 101 is preferably such that no points other than the first opening allow air from the outside to enter. Specifically, the cylindrical housing 101 may be a hollow housing formed by injection molding or extrusion molding, a solid housing made by a similar manufacturing method and then hollowed out by means of cutting, or a housing made by rolling up a sheet and then bonding the joints together without gaps. The length from the first opening to the second opening of the cylindrical housing can be appropriately changed depending on the purpose of the processing and is not particularly limited, but for example, it is preferably 3 to 1000 mm, preferably 5 to 100 mm, and more preferably 10 to 50 mm.

[0063] The size of the first opening, the relative position of the opening and the center of the cylindrical housing, and the shape of the opening are not restricted, as long as air can flow in from outside the first opening as a result of the gas inside the housing becoming an airflow and moving toward the second opening due to the induced flow generated by the plasma actuator 200. Furthermore, a cover may be provided to control the shape and size of the first opening, as long as it does not hinder the effects of this embodiment. Among these, it is preferable that the cover has the same shape as the cross-sectional shape of the inner circumference of the cylindrical housing in order to suppress turbulence of the air. The inner diameter of the first opening can be changed as appropriate depending on the purpose of the processing and is not particularly limited. In order to stabilize the induced flow generated by the plasma actuator 200, from the first opening It is preferable to increase the flow rate of the incoming air that contributes to the air suction flow to the plasma actuator 200. Therefore, the maximum diameter of the opening of the first opening is preferably 5 to 100 mm, more preferably 10 to 50 mm.

[0064] The size of the second opening, the relative position of the opening to the center of the cylindrical housing 101, the shape of the opening, and the relative position of the opening to the workpiece are not limited, as long as the airflow 209 generated from the plasma actuator 200 flows out of the second opening of the cylindrical housing 101. Furthermore, a cover may be provided to control the shape and size of the second opening, to the extent that it does not hinder the effects of this embodiment. Among these, it is preferable that the cover has the same shape as the cross-sectional shape of the inner circumference of the cylindrical housing in order to suppress air turbulence. Also, for example, the inner diameter of the second opening may be changed as appropriate depending on the purpose of the processing and is not particularly limited, but the maximum diameter can be preferably 5 to 100 mm, more preferably 10 to 50 mm.

[0065] The irradiance of ultraviolet light at the second aperture is not particularly limited, but it is preferable to set the irradiance of ultraviolet light at the second aperture to such an extent that it can decompose ozone contained in the induced flow, generate reactive oxygen species in the airflow, and produce an effective reactive oxygen species concentration or amount appropriate to the purpose of the treatment. Specifically, for example, a concrete example of the irradiance of ultraviolet light at the second aperture is 40 μW / cm². 2 Preferably, it is 100 μW / cm² or higher.2 It is more preferable that it be as described above, 400 μW / cm 2 More preferably, it is 1000 μW / cm or more, 2 Particularly preferably, it is 10000 μW / cm or less. Although the upper limit of the illuminance is not particularly limited, it can be, for example, 10000 μW / cm 2 or less.

[0066] The configuration of the plasma actuator 200 may be a continuous configuration with respect to the circumferential direction or the longitudinal direction of the cylindrical housing, or may be cut at a plurality of locations, as long as it is a mode capable of generating an air flow 209 containing ozone toward the second opening. For example, from the viewpoint of generating a smooth air flow, it is also a preferable mode to provide the plasma actuators evenly in the circumferential direction in a cross section perpendicular to the longitudinal direction of the housing.

[0067] Among them, as a structure in which the air flow does not contact the inner wall as much as possible within the cylindrical housing 101 and the propulsive force of the air flow 2 09 can be increased, as shown in FIG. 3, it is preferable that the plasma actuator is configured continuously on the inner peripheral surface over the entire circumference in the circumferential direction. Further, in order to enhance the effect of gas treatment, the plasma actuator is arranged at a plurality of locations (for example, 2 to 4 locations) in the direction from the first opening to the second opening (longitudinal direction) between the first opening and the second opening of the cylindrical housing, which is also suitable for increasing the propulsive force and increasing the concentration of active oxygen inside the cylindrical housing. Also, a plurality of the cylindrical gas treatment apparatuses according to the present invention may be bundled and used.

[0068] In the present disclosure, the "effective active oxygen concentration or effective active oxygen amount" refers to the active oxygen concentration or active oxygen amount for achieving the treatment of the gas inside the housing, or the active oxygen concentration or active oxygen amount for achieving the treatment of the gas outside the housing, and can be appropriately adjusted according to the purpose by using electrodes constituting the plasma actuator, the thickness and material of the dielectric, the type, amplitude and frequency of the applied voltage, the illuminance and irradiation time of ultraviolet rays, etc.

[0069] The gas treatment apparatus of this disclosure can be used in a wide range of applications that involve supplying active oxygen to a gas to be treated. For example, the gas treatment apparatus of this disclosure can be used for gas sterilization and deodorization applications.

[0070] <Second aspect> Figures 4(a) to 4(c) show a second embodiment of the gas processing apparatus according to the present disclosure. In this embodiment, the gas treatment apparatus has a cylindrical housing 101 that itself contains a dielectric. Furthermore, in a cross-section along the axial direction of the cylindrical housing, a first electrode 205, which is an exposed electrode, is arranged on the inner surface of the housing, covering a portion of the inner surface. In addition, a second electrode 201 is arranged outside the inner surface of the cylindrical housing 101, electrically insulated from the first electrode 205 via a dielectric. In other words, the use of the cylindrical housing as the dielectric portion of the plasma actuator is what distinguishes this from the gas processing apparatus according to the first embodiment.

[0071] The cylindrical housing does not need to be entirely dielectric; it is sufficient that the portion that electrically insulates the first electrode 205 and the second electrode 201 and generates an induced flow, which is a unidirectional jet, from the first electrode 205 is made of dielectric material. In other words, the portion that does not affect the generation of the induced flow may be made of a material other than dielectric. Preferably, the cylindrical housing 101 is made of dielectric material. One example of the arrangement of the first electrode 205 is shown in Figure 4(b) as viewed from the second opening side of the gas processing apparatus 100, where the first electrode 205 is arranged around the entire circumference of the inner surface of the cylindrical housing 101, and the second electrode 201 is arranged around the entire circumference of the outer surface of the cylindrical housing 101. However, it is not limited to this, and the electrodes may be arranged at one or more locations in the circumferential direction.

[0072] Furthermore, regarding the arrangement of the second electrode 201, if the first electrode 205 is provided over the entire circumference in the circumferential direction as described above, it is preferable from the viewpoint of the efficiency of induced flow generation to also provide the second electrode over the entire circumference in the circumferential direction. However, it is not limited to this, and as long as induced flow is generated from at least a part of the first electrode, it may be provided at one or more locations in the circumferential direction. Moreover, if the first electrode 205 is provided at one or more locations, the second electrode 201 may also be provided at one or more locations corresponding to the placement positions of the first electrode.

[0073] In this embodiment, the cylindrical housing 101 is configured as the dielectric of the plasma actuator, and therefore the material of the cylindrical housing 101 is a material with high electrical insulation properties. As the dielectric, for example, resins such as polyimide, polyester, fluororesin, silicone resin, acrylic resin, and phenolic resin, glass, ceramics, and mixtures thereof with resins, etc. Composite materials can be used. Among these, a resin material that is flexible and less prone to fire spread even in the event of a current leak is preferred. More preferably, the dielectric is a silicone resin. This makes it possible to achieve a high level of both insulation and flexibility. The first electrode according to this embodiment may be formed on the inner surface of the cylindrical housing 101 to the extent that it can generate an induced flow and airflow 209 containing ozone when it is formed on the inner surface of the cylindrical housing 101, or a portion of it may be embedded in the cylindrical housing 101.

[0074] As shown in Figures 4(a) and 4(c), the second electrode 201 is formed outside the inner surface of the cylindrical housing 101, but its position is not particularly limited as long as it is within a range that can generate an induced flow and airflow 209 containing ozone. Specifically, the second electrode 201 may be formed on the outer surface of the cylindrical housing, for example, as shown in Figure 4(a), or it may be partially or completely embedded in the outer surface of the cylindrical housing, as shown in Figure 4(c). Furthermore, if the second electrode is formed on the outer surface, the second electrode on the outer surface can be covered with a substrate such as a dielectric to prevent the generation of an induced flow from the edge of the second electrode.

[0075] Furthermore, when forming the first and second electrodes on the cylindrical housing 101, operations (cutting, polishing) may be performed to change the thickness of the cylindrical housing 101 at the electrode formation position, within a range that suitably generates an induced flow containing ozone.

[0076] In this embodiment, the shape and arrangement of the cylindrical housing, first opening, second opening, first electrode, second electrode of the plasma actuator, ozone decomposition device such as an ultraviolet light source, and other constituent elements related to this disclosure may be configured in the same way as described in the first embodiment, and the dielectric in the first embodiment may be interpreted as the cylindrical housing in this embodiment. For example, the generated active oxygen can be appropriately selected to be actively supplied to the surface region of the object to be treated while maintaining an effective active oxygen concentration or amount of active oxygen according to the purpose of the treatment.

[0077] Furthermore, this disclosure relates to a method for treating a gas with active oxygen, The process includes a step of preparing a gas treatment device. The gas treatment device is A cylindrical housing having a first opening and a second opening on the opposite side of the first opening, A plasma actuator is located inside the housing, Ozone decomposition device, Equipped with, The plasma actuator has a first electrode, a dielectric, and a second electrode. A dielectric material is interposed between the first electrode and the second electrode, and the first electrode and the second electrode are electrically insulated from each other. The first electrode is an exposed electrode provided on the first surface, which is one of the surfaces of the dielectric. The plasma actuator generates a dielectric barrier discharge from the first electrode to the second electrode by applying a voltage between the first electrode and the second electrode, and blows out an induced flow containing ozone from the first electrode in a first direction, which is one direction along the surface of the dielectric. The plasma actuator is positioned such that the first direction, which is the direction in which the induced flow is blown out, faces the second opening, and the induced flow generates an airflow inside the housing from the first opening toward the second opening. The ozone decomposition device generates reactive oxygen species in the airflow by decomposing the ozone contained in the airflow, and the airflow becomes an airflow containing the reactive oxygen species. As the airflow becomes an airflow containing the reactive oxygen species, the gas in the airflow containing the reactive oxygen species is treated by the reactive oxygen species, or the airflow containing the reactive oxygen species becomes a flow of the airflow containing the reactive oxygen species. The present invention provides a gas treatment method using active oxygen, characterized by treating a gas present in the outward direction with active oxygen. [Examples]

[0078] The present disclosure will be described in further detail below using examples and comparative examples, but the embodiments of the present disclosure are not limited thereto.

[0079] <Example 1> 1. Fabrication of a gas treatment device A first electrode was formed by attaching an aluminum foil measuring 2.5 mm in length, 62.8 mm in width, and 100 μm in thickness to the first surface of a polyimide sheet (5 mm in length, 62.8 mm in width, and 100 μm in thickness) using adhesive tape. A second electrode was formed by attaching an aluminum foil measuring 3 mm in length, 62.8 mm in width, and 100 μm in thickness to the second surface of the polyimide sheet, opposite to the first surface, using adhesive tape so as to be diagonally opposite to the aluminum foil attached to the first surface. Furthermore, to prevent induced flow from the second electrode, the second surface including the second electrode was covered with polyimide tape. In this way, a plasma actuator was fabricated in which the first and second electrodes overlap over a width of 500 μm with the dielectric (polyimide sheet) in between.

[0080] Next, an ABS resin sheet (30 mm long, 62.8 mm wide, 1 mm thick) was prepared as the material for the housing 101 of the gas processing apparatus 100. Then, the plasma actuator that had been previously fabricated was attached to one surface of the ABS resin sheet. Specifically, the polyimide sheet side that covers the second electrode 201 of the plasma actuator 200 was bonded and fixed to the surface of the ABS resin sheet. Next, the ABS resin sheet was rolled into a cylindrical shape so that the side with the plasma actuator attached was facing inward, and a cylindrical housing was fabricated, as shown in Figures 2(a) and 2(b), with the plasma actuator fixed around its entire circumference on the inner surface. The cylindrical housing 101 had a first opening (not shown) and a second opening 103. The length from the first opening to the second opening 103 was 30 mm. The length from the first opening to the edge of the plasma actuator on the first opening side was 15.0 mm. Furthermore, the plasma actuator was fixed so that the induced flow 207 containing ozone, generated near the first electrode 205, was ejected in a direction toward the second opening 103.

[0081] Next, an ultraviolet lamp 206 (ultraviolet lamp 206: cold cathode ultraviolet lamp, product name: UW / 9F89 / 9, manufactured by Stanley Electric Co., Ltd., cylindrical shape with a length of 150 mm and a diameter of 9 mm, peak wavelength = 254 nm) was fixed to the central part of the housing 101 using a support member not shown.

[0082] The gas treatment device 100 according to this embodiment, prepared as described above, was installed in the evaluation device 501 shown in Figure 5. In Figure 5, the frame of the evaluation device 501 is made of acrylic resin. The gas treatment device 100 and the evaluation device 501 can be connected without any gaps, and the configuration prevents air from entering from the outside.

[0083] A spectroradiometer (product name: USR-45D, manufactured by Ushio Inc.) was placed at the position of the second aperture 103, which serves as the supply port for reactive oxygen species in the gas treatment device 100, and the ultraviolet irradiance was measured. From the integral value of the spectrum, the value was 1370 μW / cm². 2 At this time, the plasma actuator was not powered on to avoid being affected by the shielding effect of ultraviolet rays by ozone generated from the plasma actuator.

[0084] Next, in order to calculate the amount of ozone generated from the plasma actuator 200, the gas treatment device 100 was placed in a sealed container (not shown) with a volume of 1 liter. A hole that can be sealed with a stopper is provided, allowing the gas inside to be aspirated with a syringe through this hole. Without turning on the ultraviolet lamp, a voltage with a sine wave of 2.4 kVpp and a frequency of 80 kHz was applied to the plasma actuator 200, and after 1 minute, 100 ml of gas was collected from the sealed container. The collected gas was drawn into an ozone detection tube (product name: 182SB, manufactured by Komei Rikagaku Kogyo Co., Ltd.), and the measured ozone concentration (PPM) contained in the induced flow from the plasma actuator 200 was measured. Using the measured ozone concentration value, the amount of ozone generated per unit time was calculated using the following formula.

[0085]

number

[0086] As a result, the ozone generation rate per unit time was 130 μg / min. At this time, the UV light source was not powered on to avoid the decomposition of ozone by ultraviolet radiation. Finally, the amount of ozone generated was measured when both the plasma actuator 200 and the ultraviolet lamp 206 were operating. The operating conditions for the plasma actuator 200 were such that it generates 130 μg / min of ozone when only the plasma actuator 200 is operating. The operating conditions for the ultraviolet lamp 206 were such that it generates 1370 μW / cm² when only the ultraviolet lamp 206 is operating. 2 These are the conditions for achieving the specified illuminance. As a result, the amount of ozone generated when both the plasma actuator 200 and the ultraviolet lamp 206 were operating was 10 μg / min. The decrease of 120 μg / min from 130 μg / min is thought to be the amount of ozone converted into reactive oxygen species.

[0087] 2. Construction of a mechanism for measuring the sterilization rate In this example, the evaluation device 501 was used to configure a test apparatus 601 as shown in Figure 6, and the sterilization performance of the gas treatment device 100 was evaluated. The test apparatus 601 consists of a gas treatment device 100, a bacteria-containing gas preparation unit 507, and a bacteria recovery unit 508. The bacteria-containing gas preparation unit 507, the gas treatment device 100, and the bacteria recovery unit 508 are installed in this order in a continuous sequence. Acrylic resin was used for the frames of the bacteria-containing gas preparation unit 507 and the bacteria recovery unit 508. 5 mm diameter holes 603 are provided on the four adjacent walls of the bottom surfaces of the bacteria-containing gas preparation section 507 and the bacteria recovery section 508, so as not to obstruct the gas flow caused by the induced flow generated by the gas treatment device 100. The holes 603 in the bacteria-containing gas preparation section 507 act as intake ports, and the holes 603 in the bacteria recovery section 508 act as exhaust ports.

[0088] 2-1. Confirmation test for reactive oxygen species To confirm that reactive oxygen species are generated inside the enclosure by operating the gas treatment device prepared in 1 above, the following test was performed. Specifically, the presence or absence of reactive oxygen species in the airflow out of the second opening 103 was confirmed using the decolorization reaction of an aqueous solution of methylene blue.

[0089] Specifically, methylene blue (manufactured by Kanto Chemical, special grade) and distilled water were mixed to prepare a 0.01% methylene blue aqueous solution. 15 mL of this methylene blue aqueous solution was placed in a petri dish (Eiken Kagaku). It was placed in a cylindrical container (AB4000, 88 mm in diameter). Then, a petri dish A containing a methylene blue aqueous solution was prepared. The center of the surface of petri dish A and the center of the second opening of the gas treatment device 100 were positioned opposite each other, with a distance of 1 mm. In this test, in order to confirm the presence of reactive oxygen species, only the cylindrical housing 101 and the ultraviolet light source 206 were removed from the sterilization rate evaluation device shown in Figure 5, and the test was conducted by positioning them in relation to petri dish A as described above. Next, an AC voltage with a sine wave waveform of 2.4 kVpp and a frequency of 80 kHz was applied between both electrodes of the plasma actuator, and an ultraviolet lamp was turned on. The induced flow flowing out from the opening was then supplied to the liquid surface for 60 minutes. The illuminance measured on the exposed surface of the dielectric of the plasma actuator facing the ultraviolet lamp was 1370 μW / cm² without power being supplied to the plasma actuator. 2 I adjusted it so that it would be as follows.

[0090] After induced flow irradiation, the methylene blue aqueous solution was transferred from a petri dish to a cell, and the change in the amount of light absorbed by the methylene blue was measured using a spectrophotometer (Jasco V-570). Since lu has a strong absorption at a wavelength of 664 nm, the degree of decolorization of methylene blue can be calculated from the change in absorbance at this wavelength. In this test, first, distilled water alone was placed in the reference cell, and a 0.01% methylene blue aqueous solution before induced flow irradiation was placed in the sample cell and measured. The absorbance was 2.32 Abs. On the other hand, the absorbance of the methylene blue aqueous solution after induced flow irradiation was 0.27 Abs. Therefore, the rate of decrease in absorbance was 88% (((2.3 The calculation was 2 - 0.27) / 2.32) × 100).

[0091] 2-2. Treatment (disinfection) test A sterilization test for E. coli was conducted using a test apparatus 601 equipped with a gas treatment device 100, following the procedure below. All instruments used in this sterilization test were sterilized using autoclave-assisted steam sterilization. The sterilization test was also conducted in a clean bench. First, E. coli (product name "KWIK-STIK (Escherichia coli ATCC8739)", Microbiologics) was placed in an Erlenmeyer flask containing LB medium (a mixture of 2g tryptone (product name "Bacto Tryptone", Life Technologies Japan), 1g yeast extract (product name "Yeast Extract", Life Technologies Japan), and 1g sodium chloride (product name "Special Grade Sodium Chloride", Kishida Chemical Co., Ltd.) with 200mL of distilled water). Next, the Erlenmeyer flask was cultured at 37°C for 48 hours at 80rpm using a shaking incubator (Takasaki Scientific Instruments Co., Ltd. TA-25R-3F) to obtain an E. coli solution. The number of viable cells in the obtained E. coli solution was 9.2 × 10⁶. 9 The concentration was (CFU / mL).

[0092] 20 mL of the prepared E. coli solution was placed in a petri dish, and this petri dish was placed at the bottom of the bacterial gas preparation unit 507 to create a petri dish 604 containing the E. coli solution. As a method for generating gas containing E. coli, a method of forming a bacterial solution mist in the bacterial gas preparation unit 507 was adopted. That is, a method of forming a bacterial solution mist using an ultrasonic atomizer (manufactured by REN HE) was used. The ultrasonic atomizer consists of a control circuit board (not shown) and a transducer 605 connected to the circuit board by wiring. The transducer is made of ABS resin, silicone resin, and ceramic material, and the ceramic material is in the form of a circular sheet with a diameter of 16 mm and countless micropores of 5 μm are provided from the top surface to the bottom surface. Because this ceramic material has piezoelectric properties, ultrasonic vibrations are generated when voltage is applied. When the bottom surface of the transducer is placed on the surface of the bacterial solution and ultrasonic waves are generated, the bacterial solution passes through micropores as if being sucked up, forming fine droplets, and a mist is ejected from the top surface of the transducer.

[0093] A stamp culture medium 606 (Petan Check 25 PT1025, manufactured by Eiken Kasei Co., Ltd.) was placed at the bottom of the bacterial collection section. Next, the ultrasonic atomizer and the gas treatment device were operated simultaneously, and this point was set to time 0 seconds. A DC voltage of 5V was applied to the ultrasonic atomizer. The gas treatment device 100 and the ultraviolet light source 206 were directly connected. By applying a voltage of 7V and irradiating with ultraviolet light, an induced flow was generated within the gas treatment device 100. This was used to treat air containing E. coli entering the gas treatment device 100 from the bacteria-containing gas preparation unit 507. The test was conducted for 20 seconds, and then terminated by simultaneously stopping the gas treatment device and the ultrasonic atomizer. After the test was completed, the stamp culture medium from bacterial recovery unit 508 was placed in a constant temperature bath (product name: IS600; manufactured by Yamato Scientific Co., Ltd.) and incubated at 37°C for 24 hours to obtain sample No. 1. The number of colonies that grew was counted to obtain the number of viable bacteria remaining after sterilization treatment. As a result, the number of viable bacteria in sample No. 1 was 4 (CFU).

[0094] Next, a culture test was performed in the same manner as for sample No. 1, except that no gas treatment was performed, to obtain sample No. C1. The number of colonies was then counted to calculate the number of viable cells. As a result, the number of viable cells in sample No. C1 was 196 (CFU). Therefore, the rate of E. coli removal by the gas treatment device used in this test was 98.0% (=(196-4) / 196).

[0095] <Example 2> A gas treatment apparatus was fabricated and evaluated in the same manner as in Example 1, except that the dielectric material of the plasma actuator was made of silicone resin. The evaluation results are shown in Table 1.

[0096] <Example 3> As shown in Figures 7(a) (longitudinal cross-sectional view) and 7(b) (view from the second opening), a gas treatment apparatus was manufactured and evaluated in the same manner as in Example 2, except that the cross-sectional shape of the cylindrical housing 101 was changed to a rectangular (square) housing. The evaluation results are shown in Table 1. Note that the inner diameter in Table 2 is the length of the diagonal of the cross-sectional shape.

[0097] <Example 4> As shown in Figures 8(a) (longitudinal cross-sectional view), 8(b) (view from the second opening), and 8(c) (perspective view), a gas treatment apparatus was fabricated and evaluated in the same manner as in Example 2, except that two rows of plasma actuators were formed on the inner surface of the cylindrical housing 101. The evaluation results are shown in Table 1.

[0098] <Example 5> As shown in Figures 9(a) (longitudinal cross-sectional view), 9(b) (view from the second opening), and 9(c) (perspective view), a gas treatment apparatus was fabricated and evaluated in the same manner as in Example 2, except that the plasma actuator was not installed around the entire circumference of the inner surface of the cylindrical housing 101, but rather arranged in a discontinuous configuration. The evaluation results are shown in Table 1.

[0099] <Example 6> In this embodiment, as shown in Figure 4(a), a gas processing apparatus was fabricated and evaluated in the same manner as in Embodiment 2, except that a cylindrical housing 101 was used as the dielectric for the plasma actuator. The evaluation results are shown in Table 1.

[0100] <Example 7> As shown in Figures 10(a) (longitudinal cross-sectional view), 10(b) (view from the second opening), and 10(c) (perspective view), a gas treatment apparatus was fabricated and evaluated in the same manner as in Example 5, except that the first and second electrodes were formed in two rows. The evaluation results are shown in Table 1.

[0101] <Comparative Example 1> The ozone generator is configured in the same way as in Example 1, except that an ozone generator is used instead of a plasma actuator, and air is supplied from the first opening using a fan. The processing device was fabricated and evaluated. The evaluation results are shown in Table 1. In this comparative example, air is blown in through the first opening with a fan, into the cylindrical housing. Turbulence occurred, immediately deactivating reactive oxygen species, rendering the methylene blue decolorizing effect ineffective, and consequently significantly reducing the sterilization effect.

[0102] <Comparative Example 2> The gas treatment apparatus prepared in Example 1 was set up. Then, the "2-1. Confirmation Test of Reactive Oxygen Species" and "2-2. Treatment (Disinfection) Test" described above were carried out in the same manner as in Example 1, except that the ultraviolet lamp was not operated. The results are shown in Table 1.

[0103] [Table 1] In the table, Embodiment 1 refers to a cylindrical housing equipped with a plasma actuator inside. The first aspect is shown, and aspect 2 is shown as a second aspect in which the cylindrical housing itself contains a dielectric and the cylindrical housing is used as the dielectric part of the plasma actuator.

[0104] This disclosure includes the following configuration and method. [Configuration 1] A gas treatment device, A cylindrical housing having a first opening and a second opening on the opposite side of the first opening, A plasma actuator is located inside the housing, Ozone decomposition device, Equipped with, The plasma actuator has a first electrode, a dielectric, and a second electrode. A dielectric material is interposed between the first electrode and the second electrode, and the first electrode and the second electrode are electrically insulated from each other. The first electrode is an exposed electrode provided on the first surface, which is one of the surfaces of the dielectric. The plasma actuator generates a dielectric barrier discharge from the first electrode to the second electrode by applying a voltage between the first electrode and the second electrode, and blows out an induced flow containing ozone from the first electrode in a first direction, which is one direction along the surface of the dielectric. The plasma actuator is positioned such that the first direction, which is the direction in which the induced flow is blown out, faces the second opening, and the induced flow generates an airflow inside the housing that flows from the first opening to the second opening, containing the gas that has flowed in from the first opening. The ozone decomposition device generates reactive oxygen species in the airflow by decomposing the ozone contained in the airflow, and the airflow becomes an airflow containing the reactive oxygen species, and the gas flowing in from the first opening is treated by the reactive oxygen species. A gas treatment apparatus characterized by the following: [Configuration 2] The plasma actuator and the ozone decomposition device are arranged such that the airflow containing the active oxygen flows out of the gas processing device through the second opening. The gas apparatus according to configuration 1, wherein the gas containing the active oxygen flows out of the gas apparatus from the second opening, and the gas to be treated in the direction of the outflow of the active oxygen-containing gas is used to treat the gas. [Configuration 3] The gas apparatus according to configuration 2, wherein the plasma actuator is arranged around the entire circumference in the circumferential direction inside the housing. [Structure 4] The gas processing apparatus according to any one of configurations 1 to 3, wherein the plasma actuator is arranged at multiple locations between the first opening and the second opening of the housing. [Composition 5] A gas treatment device, A cylindrical housing having a first opening and a second opening on the opposite side of the first opening, Equipped with an ozone decomposition device, The cylindrical housing contains a dielectric, In a cross-section of the cylindrical housing in the direction along the axial direction, A first electrode, which is an exposed electrode, is provided on the inner surface of the cylindrical housing, covering a portion of the inner surface. A second electrode is arranged outside the inner surface of the housing, electrically insulated from the first electrode via the dielectric. The gas processing apparatus generates a dielectric barrier discharge from the first electrode to the second electrode by applying a voltage between the first electrode and the second electrode, and blows out an induced flow containing ozone from the first electrode in one direction along the inner surface of the housing, towards the second opening. The induced flow generates an airflow inside the cylindrical housing that includes the gas flowing in from the first opening and flows from the first opening toward the second opening. The ozone decomposition apparatus is characterized in that it generates active oxygen in the airflow by decomposing the ozone contained in the airflow, the airflow becomes an airflow containing the active oxygen, and the gas flowing in from the first opening is treated by the active oxygen. [Composition 6] The first electrode, the second electrode, and the ozone decomposition apparatus are arranged such that the airflow containing the active oxygen flows out of the gas processing apparatus from the second opening. The gas apparatus according to configuration 5, wherein the gas containing the active oxygen flows out of the gas apparatus from the second opening, and the gas to be treated in the direction of the outflow of the active oxygen-containing gas is used to treat the gas. [Composition 7] A gas apparatus according to any one of configurations 1 to 6, wherein the dielectric is a silicone resin. [Structure 8] The gas processing apparatus according to any one of configurations 1 to 7, wherein the cylindrical housing is cylindrical or rectangular. [Composition 9] The ozone decomposition apparatus is, An ultraviolet light source that irradiates the airflow with ultraviolet light to generate the reactive oxygen species in the airflow, A heating device that heats the airflow and generates the active oxygen in the airflow, and A humidifier that humidifies the airflow and generates the active oxygen in the airflow. A gas processing apparatus according to any one of configurations 1 to 8, which is at least one apparatus selected from the group consisting of the above. [Configuration 10] The gas processing apparatus according to any one of configurations 1 to 8, wherein the ozone decomposition apparatus comprises at least an ultraviolet light source that irradiates the airflow with ultraviolet light to generate the active oxygen in the airflow. [Method 11] A processing method for treating a gas with reactive oxygen species, The process includes a step of preparing a gas treatment device. The gas treatment device is A cylindrical housing having a first opening and a second opening on the opposite side of the first opening, A plasma actuator is located inside the housing, Ozone decomposition device, Equipped with, The plasma actuator has a first electrode, a dielectric, and a second electrode. A dielectric material is interposed between the first electrode and the second electrode, and the first electrode and the second electrode are electrically insulated from each other. The first electrode is an exposed electrode provided on the first surface, which is one of the surfaces of the dielectric. The plasma actuator generates a dielectric barrier discharge from the first electrode to the second electrode by applying a voltage between the first electrode and the second electrode, and blows out an induced flow containing ozone from the first electrode in a first direction, which is one direction along the surface of the dielectric. The plasma actuator is positioned such that the first direction, which is the direction in which the induced flow is blown out, faces the second opening, and the induced flow generates an airflow inside the housing that flows from the first opening to the second opening, containing the gas that has flowed in from the first opening. The ozone decomposition device generates reactive oxygen species in the airflow by decomposing the ozone contained in the airflow, and the airflow becomes an airflow containing the reactive oxygen species, and the gas flowing in from the first opening is treated by the reactive oxygen species. A method for treating gases using reactive oxygen species, characterized by the features described herein. [Method 12] The plasma actuator and the ozone decomposition device are arranged such that the airflow containing the active oxygen flows out of the gas processing device through the second opening. A gas treatment method using active oxygen according to method 11, wherein the gas to be treated, which is present in the direction of the outflow of the active oxygen-containing gas, is treated by the gas flow containing the active oxygen that flows out of the gas treatment device from the second opening. [Method 13] The ozone decomposition apparatus, An ultraviolet light source that irradiates the airflow with ultraviolet light to generate the reactive oxygen species in the airflow, A heating device that heats the airflow and generates the active oxygen in the airflow, and A humidifier that humidifies the airflow and generates the active oxygen in the airflow. A gas treatment method according to method 11 or 12, which is at least one selected from the group consisting of the following. [Method 14] The gas treatment method according to method 11 or 12, wherein the ozone decomposition apparatus comprises at least an ultraviolet light source that irradiates the airflow with ultraviolet light to generate the active oxygen in the airflow. [Explanation of Symbols]

[0105] 100: Gas processing device, 101: Housing, 103: Second opening, 200: Plasma actuator, 201: Second electrode, 203: Dielectric, 203-1: Exposed part, 204: Edge, 205: First electrode, 206: Ozone decomposition device, 207: Induced flow, 208: Surface plasma, 209: Airflow, 211: Power supply, 213: Airflow containing active oxygen, 501: Evaluation device, 507: Bacteria-containing gas preparation unit, 508: Bacteria recovery unit, 601: Test device, 603: Hole, 604: Petri dish containing E. coli solution, 605: Vibrator part, 606: Stamp culture medium

Claims

1. 1. A gas treatment device comprising: a cylindrical housing having a first opening and a second opening opposite the first opening; a plasma actuator disposed inside the housing; an ozone decomposition device; Equipped with The plasma actuator has a first electrode, a dielectric, and a second electrode; the dielectric is interposed between the first electrode and the second electrode, and the first electrode and the second electrode are electrically insulated from each other; the first electrode is an exposed electrode provided on a first surface that is one surface of the dielectric; The plasma actuator generates a dielectric barrier discharge from the first electrode toward the second electrode by applying a voltage between the first electrode and the second electrode, and blows out an induced flow containing ozone from the first electrode in a first direction that is one direction along the surface of the dielectric, the plasma actuator is disposed such that the first direction, which is the blowing direction of the induced flow, faces the second opening, and the induced flow generates an airflow inside the housing from the first opening toward the second opening, the airflow including the gas that has flowed in from the first opening; the ozone decomposition device generates active oxygen in the airflow by decomposing the ozone contained in the airflow, so that the airflow becomes an airflow containing the active oxygen, and the gas flowing in from the first opening is treated by the active oxygen. A gas treatment device characterized by:

2. the plasma actuator and the ozone decomposition device are arranged so that the airflow containing the active oxygen flows out of the gas treatment device through the second opening, 2. The gas treatment device according to claim 1, wherein the gas containing active oxygen, which flows out of the gas treatment device from the second opening, treats gas as the treatment object present in the flow direction of the gas containing active oxygen.

3. The gas treatment device according to claim 2 , wherein the plasma actuators are arranged along the entire circumferential direction inside the housing.

4. The gas treatment device according to claim 1 , wherein the plasma actuators are arranged at a plurality of locations between the first opening and the second opening of the housing.

5. 2. The gas treatment device according to claim 1, wherein the dielectric material is a silicone resin.

6. The gas treatment device according to claim 1 , wherein the tubular housing has a cylindrical or rectangular tubular shape.

7. 1. A gas treatment device comprising: a cylindrical housing having a first opening and a second opening opposite the first opening; an ozone decomposition device, the cylindrical housing includes a dielectric; In a cross section along the axial direction of the cylindrical housing, a first electrode that is an exposed electrode provided on an inner surface of the cylindrical housing so as to cover a part of the inner surface; a second electrode is disposed outside the inner surface of the housing and is electrically insulated from the first electrode via the dielectric; The gas treatment device applies a voltage between the first electrode and the second electrode, a dielectric barrier discharge is generated from the first electrode toward the second electrode, and an induced flow containing ozone is blown out from the first electrode toward the second opening, which is one direction along the inner surface of the housing; an airflow including the gas flowing in from the first opening and directed from the first opening to the second opening is generated inside the cylindrical housing by the induced flow; The ozone decomposition device generates active oxygen in the airflow by decomposing the ozone contained in the airflow, causing the airflow to become an airflow containing the active oxygen, and the gas flowing in from the first opening is treated by the active oxygen.

8. the first electrode, the second electrode, and the ozone decomposition device are arranged so that the gas flow containing the active oxygen flows out of the gas treatment device through the second opening, 8. The gas treatment device according to claim 7, wherein the gas containing active oxygen, which flows out of the gas treatment device from the second opening, treats gas as the treatment object present in the flow direction of the gas containing active oxygen.

9. 8. The gas treatment device according to claim 7, wherein the dielectric material is a silicone resin.

10. The gas treatment device according to claim 7 , wherein the tubular housing has a cylindrical or rectangular tubular shape.

11. The ozone decomposition device an ultraviolet light source that irradiates the airflow with ultraviolet light to generate the active oxygen in the airflow; a heating device that heats the airflow to generate the active oxygen in the airflow; and a humidifier for humidifying the airflow and generating the active oxygen in the airflow; The gas treatment device according to any one of claims 1 to 10, which is at least one device selected from the group consisting of:

12. 11. The gas treatment device according to claim 1, wherein the ozone decomposition device comprises at least an ultraviolet light source that irradiates the airflow with ultraviolet light to generate the active oxygen in the airflow.

13. A method for treating a gas with active oxygen, comprising: providing a gas treatment device; The gas treatment device comprises: a cylindrical housing having a first opening and a second opening opposite the first opening; a plasma actuator disposed inside the housing; an ozone decomposition device; Equipped with The plasma actuator has a first electrode, a dielectric, and a second electrode; the dielectric is interposed between the first electrode and the second electrode, and the first electrode and the second electrode are electrically insulated from each other; the first electrode is an exposed electrode provided on a first surface that is one surface of the dielectric; The plasma actuator generates a dielectric barrier discharge from the first electrode toward the second electrode by applying a voltage between the first electrode and the second electrode, and blows out an induced flow containing ozone from the first electrode in a first direction that is one direction along the surface of the dielectric, the plasma actuator is disposed such that the first direction, which is the blowing direction of the induced flow, faces the second opening, and the induced flow generates an airflow inside the housing from the first opening toward the second opening, the airflow including the gas that has flowed in from the first opening; The ozone decomposition device decomposes the ozone contained in the airflow to generate active oxygen in the airflow, so that the airflow becomes an airflow containing the active oxygen, and the gas flowing in from the first opening is treated with the active oxygen. A gas treatment method using active oxygen.

14. the plasma actuator and the ozone decomposition device are arranged so that the airflow containing the active oxygen flows out of the gas treatment device through the second opening, 14. A gas treatment method using active oxygen according to claim 13, wherein the gas flow containing active oxygen that flows out of the gas treatment device from the second opening treats gas as the object to be treated that is located in the flow direction of the gas flow containing active oxygen.

15. The ozone decomposition device an ultraviolet light source that irradiates the airflow with ultraviolet light to generate the active oxygen in the airflow; a heating device that heats the airflow to generate the active oxygen in the airflow; and a humidifier for humidifying the airflow and generating the active oxygen in the airflow; The gas treatment method according to claim 13 or 14, wherein the gas treatment method is at least one selected from the group consisting of:

16. 15. The gas treatment method according to claim 13, wherein the ozone decomposition device comprises at least an ultraviolet light source that irradiates the gas flow with ultraviolet light to generate the active oxygen in the gas flow.

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