High-frequency multilayer filter

Abstract

To provide a high-frequency multilayer filter having a high characteristic frequency.SOLUTION: A high-frequency multilayer filter 300 includes: a plurality of dielectric layers; a signal path 316 having an input 318 and an output 320; and an inductor 346 comprising a conductive layer over a first dielectric layer. The inductor may be electrically connected at a first location 349 with the signal path, and electrically connected at a second location 351 with at least one of the signal path and a ground plane 312. The high-frequency multilayer filter comprises a capacitor; and the capacitor is formed to include a conductive layer 352 as a first electrode, and a portion 354 of the signal path 316 as a second electrode that is separated from the first electrode by a second dielectric layer. The multilayer filter has a characteristic frequency greater than about 6 GHz.SELECTED DRAWING: Figure 3A

Description

[Technical field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS This application claims the benefit of the filing date of U.S. Provisional Patent Application No. 62 / 782,464, having a filing date of December 20, 2018, which is incorporated by reference herein in its entirety. [Background technology]

[0002] Electrical filters perform many functions and are used in a wide variety of electrical devices. Filtering high frequency signals, such as high frequency radio signal communications, has become increasingly common in recent years. For example, the demand for increased data transmission rates for wireless connectivity has driven the demand for high frequency components, including those configured to operate at high frequencies, including 5G spectrum frequencies. Current high frequency filters use waveguide or cavity designs. However, the performance characteristics of such designs are difficult to tune or customize. Thus, there is a need in the art for high frequency multi-layer filters. Summary of the Invention [Problem to be solved by the invention]

[0003] [Means for solving the problem]

[0004] According to one embodiment of the present disclosure, a high frequency multi-layer filter can include a plurality of dielectric layers and a signal path having an input and an output. The multi-layer filter can include an inductor including a conductive layer formed on a first dielectric layer. The inductor can be electrically connected to the signal path at a first location and can be electrically connected to at least one of the signal path or ground at a second location. The multi-layer filter can include a capacitor including a first electrode and a second electrode spaced from the first electrode by a second dielectric layer. The multi-layer filter has a characteristic frequency greater than about 8 GHz.

[0005] According to another embodiment of the present disclosure, a method of forming a high frequency multi-layer filter can include forming an inductor comprising a conductive layer on a first dielectric layer, and a capacitor comprising a first electrode and a second electrode spaced from the first electrode by a second dielectric layer. The method can include forming a first via at a first location to electrically connect the inductor to a signal path, and forming a second via at a second location to electrically connect the inductor to at least one of the signal path or ground. The method can include stacking the first and second dielectric layers. The multi-layer filter can have a characteristic frequency greater than about 8 GHz.

[0006] A full and enabling disclosure of the present disclosure, including the best mode thereof, to one of ordinary skill in the art is set forth more particularly in the remainder of the specification, which includes reference to the accompanying drawings. [Brief description of the drawings]

[0007] [Figure 1] FIG. 1 is a simplified schematic diagram of a bandpass filter according to an aspect of the present disclosure. [Diagram 2] FIG. 2 is a simplified schematic diagram of another bandpass filter according to an aspect of the present disclosure. [Figure 3A] FIG. 1 is a perspective view of an exemplary bandpass filter according to an aspect of the present disclosure. [Figure 3B] FIG. 1 is a perspective view of an exemplary bandpass filter according to an aspect of the present disclosure. [Figure 3C] FIG. 3C is a side view of the filter of FIGS. 3A and 3B. [Figure 4A] 1 is a series of successive plan views of the filter, with additional layers shown in each successive view. [Figure 4B] 1 is a series of successive plan views of the filter, with additional layers shown in each successive view. [Figure 4C] 1 is a series of successive plan views of the filter, with additional layers shown in each successive view. [Figure 4D] 1 is a series of successive plan views of the filter, with additional layers shown in each successive view. [Figure 4E] 1 is a series of successive plan views of the filter, with additional layers shown in each successive view. [Figure 5A] FIG. 5 is an enlarged perspective view of a first inductor of the filter of FIGS. 3A to 3C. [Figure 5B] FIG. 5 is an enlarged perspective view of a second inductor of the filter of FIGS. 3A to 3C. [Figure 5C] FIG. 5 is an enlarged perspective view of a third inductor of the filter of FIGS. 3A to 3C. [Figure 5D] FIG. 5 is an enlarged perspective view of a fourth inductor of the filter of FIGS. 3A to 3C. [Figure 6A] FIG. 13 is a perspective view of another embodiment of a multi-layer filter according to aspects of the present disclosure. [Figure 6B] FIG. 13 is a perspective view of another embodiment of a multi-layer filter according to aspects of the present disclosure. [Figure 6C] FIG. 6C is a side view of the filter of FIGS. 6A and 6B. [Figure 7A] 6C is a series of successive plan views of the filter of FIGS. 6A and 6B, with additional layers shown in each successive view. [Figure 7B] 6C is a series of successive plan views of the filter of FIGS. 6A and 6B, with additional layers shown in each successive view. [Figure 7C]6C is a series of successive plan views of the filter of FIGS. 6A and 6B, with additional layers shown in each successive view. [Figure 7D] 6C is a series of successive plan views of the filter of FIGS. 6A and 6B, with additional layers shown in each successive view. [Figure 8A] FIG. 13 is a perspective view of another embodiment of a multi-layer filter according to aspects of the present disclosure. [Figure 8B] FIG. 8B is a side view of the filter of FIG. 8A. [Figure 9A] 8C is a series of successive plan views of the filter of FIGS. 8A and 8B, with additional layers shown in each successive view. [Figure 9B] 8C is a series of successive plan views of the filter of FIGS. 8A and 8B, with additional layers shown in each successive view. [Figure 9C] 8C is a series of successive plan views of the filter of FIGS. 8A and 8B, with additional layers shown in each successive view. [Figure 9D] 8C is a series of successive plan views of the filter of FIGS. 8A and 8B, with additional layers shown in each successive view. [Figure 10A] FIG. 13 is a perspective view of another embodiment of a multi-layer filter according to aspects of the present disclosure. [Figure 10B] FIG. 10B is a side view of the filter of FIG. 10A. [Figure 11A] 10C is a series of successive plan views of the filter of FIGS. 10A and 10B, with additional layers shown in each successive view. [Figure 11B] 10C is a series of successive plan views of the filter of FIGS. 10A and 10B, with additional layers shown in each successive view. [Figure 11C] 10C is a series of successive plan views of the filter of FIGS. 10A and 10B, with additional layers shown in each successive view. [Figure 11D] 10C is a series of successive plan views of the filter of FIGS. 10A and 10B, with additional layers shown in each successive view. [Figure 12] 1 is a plot of test data including measured insertion loss and return loss values ​​for a constructed filter, according to an aspect of the present disclosure. [Figure 13]1 is a plot of test data including measured insertion loss and return loss values ​​for a constructed filter, according to an aspect of the present disclosure. [Figure 14] 1 is a plot of test data including measured insertion loss and return loss values ​​for a constructed filter, according to an aspect of the present disclosure. [Figure 15] 1 is a plot of simulation data including insertion loss and return loss values ​​from a computer analysis of a filter, according to an aspect of the present disclosure. [Figure 16] 1 is a plot of simulation data including insertion loss and return loss values ​​from a computer analysis of a filter, according to an aspect of the present disclosure. [Figure 17] 1 is a plot of simulation data including insertion loss and return loss values ​​from a computer analysis of a filter, according to an aspect of the present disclosure. [Figure 18] FIG. 1 is a perspective view of a test assembly including a filter according to an aspect of the present disclosure. [Figure 19] 1 is a flow diagram of a method for forming a high frequency multi-layer filter according to an aspect of the present disclosure. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] Repeat use of reference characters in the present specification and drawings is intended to represent same or analogous features or elements of the present disclosure. Those skilled in the art should appreciate that this discussion is merely a description of exemplary embodiments and is not intended to limit the broader aspects of the present disclosure, which are embodied in the exemplary structures.

[0009] Generally speaking, the present disclosure is directed to a high frequency multi-layer filter. The multi-layer filter can include a signal path having an input and an output. The multi-layer filter can be configured to filter a signal from the input and generate a filtered output signal at the output. A plurality of dielectric layers can be formed with conductive layers that are selectively shaped or patterned to form capacitors and / or inductors.

[0010] The multi-layer filter can include an inductor comprising a conductive layer formed on a first dielectric layer, The inductor can be electrically connected to the signal path at a first location and can be electrically connected to at least one of the signal path or ground at a second location.

[0011] The multi-layer filter can include a capacitor comprising a first electrode and a second electrode spaced from the first electrode by a second dielectric layer separate from the first dielectric layer. In other words, the capacitor is spaced apart (e.g., by one or more dielectric layers) in the vertical Z direction by, for example, at least 10 micrometers (10 microns), in some embodiments at least about 20 micrometers (20 microns), in some embodiments at least about 30 micrometers (30 microns), in some embodiments at least about 40 micrometers (40 microns), in some embodiments at least about 50 micrometers (50 microns), in some embodiments at least about 60 micrometers (60 microns), in some embodiments at least about 80 micrometers (80 microns), and in some embodiments at least about 150 micrometers (150 microns).

[0012] The inventors have discovered that such spacing between the inductor and the conductor electrodes reduces interference and produces superior performance characteristics at high frequencies. In some embodiments, the multi-layer filter can have a characteristic frequency greater than about 6 GHz. Exemplary characteristic frequencies can include a low-pass frequency, a high-pass frequency, an upper band-pass frequency, or a lower band-pass frequency. The characteristic frequency is typically defined at the -3 dB cutoff.

[0013] The multi-layer filter may include one or more dielectric materials. In some embodiments, the dielectric material or materials may have a low dielectric constant. The dielectric constant may be less than about 100, in some embodiments less than about 75, in some embodiments less than about 50, in some embodiments less than about 25, in some embodiments less than about 15, and in some embodiments less than about 5. For example, in some embodiments, the dielectric constant may range from about 1.5 to 100, in some embodiments from about 1.5 to about 75, and in some embodiments, from about 2 to about 8. The dielectric constant may be determined according to IPC TM-650 2.5.5.3 at an operating temperature of 25° C. and a frequency of 1 MHz. The dissipation factor may range from about 0.001 to about 0.04, and in some embodiments, from about 0.0015 to about 0.0025.

[0014] In some embodiments, the one or more dielectric materials can include organic dielectric materials. Exemplary organic dielectrics include polyphenyl ether (PPE) based materials such as LD621 from Polyclad and N6000 series from Park / Nelco Corporation, LCPs such as liquid crystal polymers (LCPs) from Rogers Corporation or WL Gore & Associates, Inc., hydrocarbon composites such as the 400 series from Rogers Corporation, and epoxy-based laminates such as N4000 series from Park / Nelco Corp. For example, examples include epoxy-based N4000-13, bromine-free materials laminated to LCPs, organic layers with high-K materials, unfilled high-K organic layers, Rogers 4350, Rogers 4003 materials, and other thermoplastic materials such as polyphenylene sulfide resins, polyethylene terephthalate resins, polybutylene terephthalate resins, polyethylene sulfide resins, polyether ketone resins, polytetrafluoroethylene resins, and graft resins, or similar low dielectric constant, low loss organic materials.

[0015] In some embodiments, the dielectric material can be a ceramic-filled epoxy. For example, the dielectric material can include an organic compound, such as a polymer (e.g., an epoxy), and can contain particles of a ceramic dielectric material, such as barium titanate, calcium titanate, zinc oxide, alumina with low-fire glass, or other suitable ceramic or glass-bonding material.

[0016] However, other materials may be utilized including N6000, epoxy based N4000-13, bromine free materials laminated to LCP, organic layers with high K materials, unfilled high K organic layers, Rogers 4350 (from Rogers Corporation), Rogers 4003 materials, as well as other thermoplastic materials such as hydrocarbons, Teflon, FR4, epoxies, polyamides, polyimides, and other thermoplastic materials such as acrylates, polyphenylene sulfide resins, polyethylene terephthalate resins, polybutylene terephthalate resins, polyethylene sulfide resins, polyether ketone resins, polytetrafluoroethylene resins, BT resin compounds (e.g., Speedboard C), thermosetting resins (e.g., Hitachi MCL-LX-67F), and graft resins, or similar low dielectric constant, low loss organic materials.

[0017] Additionally, in some embodiments, non-organic dielectric materials may be used, including, but not limited to, ceramic, semiconducting or insulating materials such as barium titanate, calcium titanate, zinc oxide, alumina with low-fire glass, or other suitable ceramic or glass bonding materials. Alternatively, the dielectric material may be an organic compound such as epoxy (with or without ceramic blends, with or without fiberglass) which is a common circuit board material, or other plastics commonly used as dielectrics. In these cases, the conductor is typically copper foil that is chemically etched to provide a pattern. In yet further embodiments, the dielectric material has a relatively high dielectric constant (K), such as one of NPO (COG), X7R, X5R X7S, Z5U, Y5V, and strontium titanate. In such examples, the dielectric material can have a dielectric constant of greater than 100, such as in the range of about 100 to about 4000, and in some embodiments, in the range of about 1000 to about 3000.

[0018] In some embodiments, the high frequency multi-layer filter may comprise a signal path having an input and an output. The signal path may comprise one or more conductive layers formed on one or more of the dielectric layers. As used herein, a conductive layer "formed on" a dielectric layer may refer to a conductive layer formed directly on the dielectric layer. However, one or more thin intermediate layers or coatings may be located between the conductive layers and / or the dielectric layers.

[0019] The conductive layer can include a wide variety of conductive materials, for example, the conductive layer can include copper, nickel, gold, silver, or other metals or alloys. The conductive layer can be formed using a wide variety of suitable techniques. Subtractive, semi-additive, or fully additive processes can be used with panel or pattern electroplating of conductive material followed by printing and etching steps to define the patterned conductive layer. Photolithography, plating (e.g., electrolytic plating), sputtering, vacuum deposition, printing, or other techniques can be used to form the conductive layer. For example, a thin layer of conductive material (e.g., foil) can be adhered (e.g., laminated) to the surface of the dielectric layer. The thin layer of conductive material can be selectively etched using a mask and photolithography to generate the desired pattern of conductive material on the surface of the dielectric material.

[0020] In some embodiments, the high frequency multi-layer filter may include one or more vias formed in one or more of the dielectric layers. For example, the vias may electrically connect a conductive layer on one dielectric layer to a conductive layer on another dielectric layer. The vias may include a wide variety of conductive materials, such as copper, nickel, gold, silver, or other metals or alloys. The vias may be formed by drilling (e.g., mechanically drilling, laser drilling) a through hole and plating the through hole with a conductive material, for example, using electroless plating or a copper seed. The vias may be filled with a conductive material such that a solid column of conductive material is formed. Alternatively, the inner surface of the through hole may be plated such that the via is hollow.

[0021] Regardless of the particular configuration used, the inventors have discovered that through selective control over element placement and material selection, multilayer filters having characteristic frequencies greater than about 8 GHz can be achieved. High frequency multilayer filters can be configured to provide very low capacitance for capacitors and / or very low inductance for inductors such that the multilayer filters provide superior performance characteristics at high frequencies (e.g., greater than about 8 GHz). Without being bound by theory, the magnitude of capacitance and / or inductance suitable for elements in a filter typically decreases with increasing frequency. The inventors have discovered that such low inductance and capacitive elements can be achieved through selective placement of components, selection of dimensions (e.g., thickness of dielectric layers), and / or selection of materials (e.g., dielectric materials). In addition, parasitic inductance can be reduced to satisfactory levels using thin dielectric layers resulting in thin vertical structures (e.g., vias).

[0022] Examples of characteristic frequencies include a low pass frequency, a high pass frequency, an upper band pass frequency, or a lower band pass frequency. In some embodiments, the filter has a characteristic frequency greater than about 6 GHz, in some embodiments greater than about 8 GHz, in some embodiments greater than about 10 GHz, in some embodiments greater than about 15 ... In some embodiments, the configuration may have a characteristic frequency greater than about 20 GHz, in some embodiments greater than about 25 GHz, in some embodiments greater than about 30 GHz, in some embodiments greater than about 35 GHz, in some embodiments greater than about 40 GHz, in some embodiments greater than about 45 GHz, in some embodiments greater than about 50 GHz, in some embodiments greater than about 60 GHz, in some embodiments greater than about 70 GHz, and in some embodiments greater than about 80 GHz.

[0023] The high frequency multi-layer filter can include an inductor. The inductor can include a conductive layer formed on one of the dielectric layers. The inductor can be electrically connected to the signal path at a first location and can be electrically connected to at least one of the signal path or ground at a second location. For example, the inductor can form a portion of the signal path or can be connected between the signal path and ground.

[0024] In some embodiments, the inductor can include at least one corner. The corner can have an angle of greater than about 15°, in some embodiments greater than about 30°, in some embodiments greater than about 45°, and in some embodiments greater than about 60° (e.g., about 90°). The inductor can have one to nine or more corners, in some embodiments, the inductor can have fewer than six corners, in some embodiments, fewer than four corners, in some embodiments, fewer than three corners, and in some embodiments, fewer than two corners. In some embodiments, the inductor can have no corners. In some embodiments, the inductor can define a "loop" of a full circle or a partial circle. For example, the inductor can define a "loop" of less than a semicircle.

[0025] The inductor may comprise a first elongated section elongated in a first direction and having a first width, and a second elongated section elongated in a second direction and having a second width. The first width may be approximately equal to the second width. The first direction may be greater than about 15°, in some embodiments greater than about 30°, in some embodiments greater than about 45°, and in some embodiments greater than about 60° (e.g., about 90°) from the second direction. In other words, a "corner" may be defined as a change between the first and second elongated sections that is greater than 15°.

[0026] In some embodiments, the inductor can have an effective length between a first location and a second location. The effective length can be defined as the length along the conductive layer between the first location and the second location. For example, the effective length can be equal to the sum of the lengths of the various straight portions of the inductor (e.g., in the XY plane) connected between the first location and the second location. The effective length of the inductor can be less than about 5 mm, in some embodiments less than about 3 mm, in some embodiments less than about 2 mm, in some embodiments less than about 1 mm, in some embodiments less than about 800 micrometers (800 microns), in some embodiments less than about 500 micrometers (500 microns), in some embodiments less than about 300 micrometers (300 microns), in some embodiments less than about 200 micrometers (200 microns), and in some embodiments less than about 100 micrometers (100 microns).

[0027] In some embodiments, the conductive layer of the inductor is approximately 1000 micrometers (10 00 microns), in some embodiments less than about 500 micrometers (500 microns), in some embodiments less than about 300 micrometers (300 microns), in some embodiments less than about 200 micrometers (200 microns), and in some embodiments less than about 100 micrometers (100 microns).

[0028] In some embodiments, the length-to-width ratio of the conductive layers of the inductor can range from about 0.5 to about 60, in some embodiments, from about 0.8 to about 50, and in some embodiments, from about 1 to about 30.

[0029] In some embodiments, at least some of the dielectric layers may have a thickness of less than about 180 micrometers (180 microns), in some embodiments less than about 120 micrometers (120 microns), in some embodiments less than about 100 micrometers (100 microns), in some embodiments less than about 80 micrometers (80 microns), in some embodiments less than about 60 micrometers (60 microns), in some embodiments less than about 50 micrometers (50 microns), in some embodiments less than about 40 micrometers (40 microns), in some embodiments less than about 30 micrometers (30 microns), and in some embodiments less than about 20 micrometers (20 microns). For example, a conductive layer of an inductor having a thickness of less than about 180 micrometers (180 microns), in some embodiments less than about 100 micrometers (100 microns), and in some embodiments less than about 80 micrometers (80 microns) may be formed on the dielectric layers.

[0030] One or more vias may be formed in the dielectric layer. The vias may electrically connect different conductive layers. For example, a via may be formed in a dielectric layer on which a conductive layer of an inductor is formed. Such a via may connect the inductor with another portion of the filter, such as a portion of a signal path or a ground (e.g., a ground plane). In some embodiments, the length of such a via in the Z direction may be equal to the thickness of the dielectric layer in which such a via is formed. For example, such a via may have a length less than about 180 micrometers (180 microns), in some embodiments less than about 100 micrometers (100 microns), and in some embodiments less than about 80 micrometers (80 microns).

[0031] In some embodiments, the series of vias and intermediate layers can be arranged vertically to connect the inductor with another conductive layer, such as a ground plane or a portion of a signal path. The total vertical length in the Z direction of the series of vias and intermediate layers can range from about 10 microns to about 500 microns (500 microns), in some embodiments from about 30 microns (30 microns) to about 300 microns (300 microns), in some embodiments from about 40 microns (40 microns) to about 200 microns (200 microns), and in some embodiments from about 60 microns (60 microns) to about 150 microns (50 microns).

[0032] The vias can have a wide variety of suitable widths. For example, in some embodiments, the width of the vias can range from about 20 micrometers (20 microns) to about 200 micrometers (200 microns), in some embodiments, from about 40 micrometers (40 microns) to about 180 micrometers (180 microns), in some embodiments, from about 60 micrometers (60 microns) to about 140 micrometers (40 microns), and in some embodiments, from about 80 micrometers (80 microns) to about 120 micrometers (120 microns).

[0033] In some embodiments, the filter may include a capacitor having a small capacitive area (e.g., the overlap area between the electrodes). For example, in some embodiments, the capacitive area of ​​the capacitor may be less than about 0.05 square millimeters (mm 2 ), in some embodiments less than about 0.04 mm 2 In some embodiments, less than about 0.03 mm 2 In some embodiments, less than about 0.02 mm 2 and in some embodiments, less than about 0.015 mm 2 It can be less than.

[0034] The filter may include a first layer of a first dielectric material between the electrodes of the capacitor. The first dielectric material may be a ceramic-filled epoxy. The first dielectric material may be separate from a second dielectric material of another layer of the filter. For example, the first dielectric material between the electrodes may include a ceramic-filled epoxy. The first dielectric material may have a dielectric constant ranging from about 5 to about 9, and in some embodiments, from about 6 to about 8. The second dielectric material may include, for example, an organic dielectric material as described above. The second dielectric material may have a dielectric constant ranging from about 1 to about 5, and in some embodiments, from about 2 to about 4.

[0035] The filters can exhibit superior performance characteristics, such as low insertion loss for frequencies within the passband frequency range of the filter. For example, the average insertion loss for frequencies within the passband frequency range can be greater than -15 dB, in some embodiments greater than -10 dB, in some embodiments greater than -5 dB, and in some embodiments greater than -2.5 dB or greater.

[0036] In addition, the filter may exhibit excellent rejection of frequencies outside the passband frequency range, in some embodiments, the insertion loss for frequencies outside the passband frequency range may be less than about -15 dB, in some embodiments, less than about -25 dB, in some embodiments, less than about -35 dB, and in some embodiments, less than about -40 dB.

[0037] In addition, the filter may exhibit a steep roll-off from the passband frequency range to frequencies outside the passband. For example, for frequencies just outside the passband frequency range, the insertion loss may decrease at a rate of about 0.1 dB / MHz, in some embodiments greater than about 0.2 dB / MHz, in some embodiments as much as about 0.3 dB / MHz, and in some embodiments greater than about 0.4 dB / MHz.

[0038] The filter may also exhibit consistent performance characteristics (e.g., insertion loss, return loss, etc.) over a wide range of temperatures. In some embodiments, the insertion loss of the filter may vary by less than 5 dB over a large temperature range. For example, the filter may exhibit a first insertion loss at a first frequency at about 25° C. The filter may exhibit a second insertion loss at about the first frequency at a second temperature. The temperature difference between the first and second temperatures may be about 70° C. or more, in some embodiments about 60° C. or more, in some embodiments about 50° C. or more, in some embodiments about 30° C. or more, and in some embodiments about 20° C. or more. By way of example, the first temperature may be 25° C. and the second temperature may be 85° C. As another example, the first temperature may be 25° C. and the second temperature may be −55° C. The difference between the second insertion loss and the first insertion loss can be about 5 dB or less, in some embodiments about 2 dB or less, in some embodiments about 1 dB or less, in some embodiments about 0.75 dB or less, in some embodiments about 0.5 dB or less, and in some embodiments about 0.2 dB or less.

[0039] In some embodiments, the filter is about 0.5 mm to about 30 mm. In some embodiments, the length of the endoscopic catheter may range from about 1 mm to about 15 mm, and in some embodiments, from about 2 mm to about 8 mm.

[0040] In some embodiments, the filter can have an overall width ranging from about 0.2 mm to about 20 mm, in some embodiments, from about 0.5 mm to about 15 mm, in some embodiments, from about 1 mm to about 10 mm, and in some embodiments, from about 2 mm to about 8 mm.

[0041] The filters can generally be low profile or thin. For example, in some embodiments, the filters can have an overall thickness ranging from about 100 micrometers (100 microns) to about 2 mm, in some embodiments, from about 150 micrometers (150 microns) to about 1 mm, and in some embodiments, from about 200 micrometers (200 microns) to about 300 micrometers (300 microns). I. High Frequency Multilayer Filters 1 is a simplified schematic diagram of a high frequency multi-layer filter 100 according to an embodiment of the present disclosure. The filter 100 may include one or more inductors 102, 104, 106 and one or more capacitors 108, 110, 112. An input voltage (V i ) can be input to the filter 100, and the output voltage (represented by V in FIG. 1 o (represented by ) may be output by filter 100. Bandpass filter 100 may significantly reduce low and high frequencies while allowing frequencies within the passband frequency range to pass through filter 100 substantially unaffected. It should be understood that the simple filter 100 described above is merely a simple example of a bandpass filter and that aspects of the present disclosure may be applied to more complex bandpass filters. Additionally, aspects of the present disclosure may be applied to other types of filters including, for example, lowpass or highpass filters.

[0042] 2 is a schematic diagram of an exemplary embodiment of a bandpass filter 200 in accordance with an aspect of the present disclosure. A signal path 201 may be defined between an input 202 and an output 204 of the filter 200. An input voltage (V in FIG. 1 ) is applied between the input 202 and ground 206 of the filter 200. i 1) can be input to the filter 200. An output voltage (represented by V o ) may be output by the filter 200.

[0043] The filter 200 may include a first inductor 208 and a first capacitor 210 electrically connected in parallel with each other. The first inductor 208 and the first capacitor 210 may be electrically connected between the signal path 201 and ground 206. The filter 200 may include a second inductor 212 and a second capacitor 214 electrically connected in parallel with each other. The second inductor 212 and the second capacitor 214 may be connected in series with the signal path 201 (e.g., may form a portion of the signal path 201). The filter 200 may include a third inductor 210 and a third capacitor 214 electrically connected in parallel with each other. The third inductor 210 and the third capacitor 214 may be electrically connected between the signal path 201 and ground 206. The third inductor 210 and the third capacitor 214 may be connected in series with the signal path 201 (e.g., may form a portion of the signal path 201). The filter 200 may include a fourth inductor 220 and a fourth capacitor 222 electrically connected in parallel with each other. The fourth inductor 220 and the fourth capacitor 222 may be electrically connected between the signal path 201 and ground 206.

[0044] The inductance values ​​of the inductors 208, 212, 216, and 220 and the capacitor The capacitance values ​​of 10, 214, 218, and 222 can be selected to produce a desired bandpass frequency range for bandpass filter 200. Bandpass filter 200 can significantly reduce frequencies outside the passband frequency range while allowing frequencies within the passband frequency range to pass through filter 200 substantially unaffected.

[0045] 3A and 3B are perspective views of an exemplary bandpass filter 300 according to an embodiment of the present disclosure. FIG. 3C is a side view of the filter 300 of FIGS. 3A and 3B. With reference to FIGS. 3A-3C, the bandpass filter 300 can comprise multiple dielectric layers (transparent for clarity). With reference to FIG. 3C, a first dielectric layer 304, a second dielectric layer 306, and a third dielectric layer 308 can be stacked to form a unitary structure. The filter 300 can be mounted to a mounting surface 302, such as a printed circuit board. Conductive layers 303, 305, 307, 309 can be formed on the dielectric layers 304, 306, 308. The conductive layer 303 can be formed on a bottom surface of the first dielectric layer 304. The conductive layers 305, 307 can be formed on the top and bottom surfaces, respectively, of the second dielectric layer 306. The ground may include a ground plane 312 exposed and / or terminated along a bottom side (bottom side of conductive layer 303) of filter 300. The mounting surface may include one or more terminals 310 for connecting with ground plane 312.

[0046] 4A-4E are a series of successive plan views of filter 300 with additional layers shown in each successive view. In more detail, FIG. 4A shows mounting surface 302 and first conductive layer 303. FIG. 4B shows ground plane 312 formed on the bottom surface of first dielectric layer 304. FIG. 4C further shows conductive layer 305 formed on the top surface of first dielectric layer 304. FIG. 4D further shows conductive layer 307 formed on second dielectric layer 306. FIG. 4E shows conductive layer 309 formed on third layer 308. Dielectric layers 304, 306, 308 are transparent to show the relative rearrangement of the various patterned conductive layers 303, 305, 307, 309.

[0047] The bandpass filter 300 may comprise a signal path 316 having an input 318 and an output 320. The signal path 316 may electrically connect the input 318 and the output 320. More specifically, the signal path 316 may comprise multiple dielectric layers and / or vias formed in and on the multiple dielectric layers 304, 306, 308 and electrically connected between the input 318 and the output 320. The signal path 316 may comprise one or more vias 322 electrically connecting the input 318 to an intermediate conductive layer 324 disposed between the first layer 304 and the second layer 306. The signal path 316 may comprise one or more vias 326 electrically connecting the intermediate layer 324 to a conductive layer 328 formed on the second dielectric layer 306.

[0048] A first capacitor may be formed between a portion 336 of the signal path 316 formed on an upper surface of the second layer 360 and a conductive layer 330 formed on a lower surface of the second layer 306 of dielectric material. The second layer 306 may have a different dielectric constant than one or more of the other layers 304, 408. For example, the dielectric material of the second layer 306 may have a dielectric constant ranging from about 5 to about 8 in accordance with IPC TM-650 2.5.5.3 at an operating temperature of 25° C. and a frequency of 1 MHz. One or more of the other layers 304, 308 may have a dielectric constant ranging from about 1 to about 4 in accordance with IPC TM-650 2.5.5.3 at an operating temperature of 25° C. and a frequency of 1 MHz.

[0049] The conductive layer 330 may be electrically connected to the ground plane 312. The first capacitor of the filter 300 may correspond to the first capacitor 210 of the circuit diagram 200 of FIG. 2. The conductive layer 330 may be capacitively coupled to a portion 336 of the signal path 316. The conductive layer 330 may be spaced apart from a portion 336 of the signal path 316 in the Z direction. The conductive layer 330 may be electrically connected to the ground plane 312 by one or more vias 334.

[0050] The first capacitor can be made less sensitive to relative misalignment of the electrodes of the first capacitor. This can be described as "self-aligned." As best seen in FIG. 4D, the portion 336 of the signal path 316 can generally have smaller dimensions (e.g., in the X and Y directions) than the conductive layer 330 of the first capacitor. In addition, the portion 336 of the signal path 316 can define connections in the XY plane with other elements and portions of the signal path 316. Such connections can be sized such that slight misalignments in the X or Y directions do not change the capacitive area of ​​the first capacitor. More specifically, the size of the effective overlap area (e.g., in the XY plane) between the conductive layer 330 and the portion 336 of the signal path 316 can be made less sensitive to slight misalignments in the X or Y directions of the second and third layers 304, 306.

[0051] For example, a portion 336 of the signal path 316 may include a tab 337 (e.g., extending in the X direction) having a width (e.g., in the Y direction) equal to a width (e.g., in the Y direction) of a connector portion 338 opposite the portion 336. Similarly, a connection portion 340, which may have an equal width, may extend from an opposite side of the portion 336 (e.g., in the Y direction). As a result, the overlap area between the conductive layer 330 and the portion 336 of the signal path 316 may not change due to a relative offset in the Y direction.

[0052] The filter 300 may include a first inductor 342 electrically connected to the signal path 316 and the ground plane 312. The first inductor 342 of the filter 300 may correspond to the first inductor 208 of the circuit diagram 200 of Figure 2. The first inductor 342 may be connected to a portion 336 of the signal path 316 forming a first capacitor by a connector portion 338. The first inductor 342 may be electrically connected to the ground plane 312 by one or more vias 344 (best seen in Figure 3B).

[0053] The signal path 316 of the filter 300 may include a second inductor 346, which may correspond to the second inductor 212 of the circuit diagram 200 of FIG. 2. The second inductor 346 may be formed on the third layer 308 (best seen in FIG. 3C ). The second inductor 346 may be electrically connected to the signal path 316 at each of a first location 349 and a second location 351. In other words, the second inductor 346 may form a portion of the signal path 316 between the input 318 and the output 320.

[0054] One or more vias 348 can connect the second inductor 346 at a first location 349 with a portion 354 of the signal path 316 of the second layer 306 (best seen in FIGS. 3B, 4D, and 4E). One or more vias 348 can connect the first inductive element 346 at a second location 351 with each of the portions 369 of the signal path 316 on the top surface of the second layer 306 and with a conductive layer 352 on the bottom surface of the second layer 306 (forming a second capacitor with the portion 354 of the signal path 316, described below). As best seen in FIGS. 3A and 4E, the inductor 346 can have four corners. Thus, the first inductor 346 can form a "loop" that is more than a semicircle.

[0055] A second capacitor is formed between the conductive layer 352 and a portion 354 of the signal path 316. 2. The second capacitor may correspond to the second capacitor 214 of the circuit diagram 200 of FIG. 2. The second capacitor may be a self-aligned capacitor. As best shown in FIG. 4D, the portion 354 of the signal path 316 may be shaped such that the size of the capacitive area (e.g., overlap area in the XY plane) between the conductive layer 352 and a portion of the signal path 316 is less sensitive to small misalignments between the second layer 304 and the third layer 306.

[0056] The third inductor 356 of the filter 300 may correspond to the third inductor 216 of the circuit diagram 200 of FIG. 2. The third inductor 356 may be connected to a portion 369 of the signal path 316 connected to the second inductor 346 by one or more vias 360 at a first location 357. The third inductor 356 may be connected to a portion 361 of the signal path 316 connected to the output 320 by one or more vias 360 at a second location 359. The portion 361 of the signal path 316 may be electrically connected to the output 320 by one or more vias 366 and / or intermediate layers 368. In other words, the third inductor 356 may form a portion of the signal path 316 between the second inductor 346 and the output 320.

[0057] The third inductor 356 can include an increased line width portion 364. The increased line width portion 364 can include a portion of the conductive material forming the third inductor 356, for example, as described below with reference to Figure 5C. The increased line width portion 364 can extend across at least a portion of the third inductor 356 such that the third inductor 356 has a greater width at the increased line width portion 364 than other portions of the third inductor 356.

[0058] A third capacitor may be formed in parallel with the third inductor 356. The third capacitor may correspond to the third capacitor 214 of the circuit diagram 200 of FIG. 2. The third capacitor of the filter 300 may include a conductive layer 367 capacitively coupled to a portion 369 of the signal path 316 (best shown in FIG. 4D). The third capacitor may be a self-aligned capacitor such that the size of the capacitive area is insensitive to relative misalignment between the second and third dielectric layers 304, 306.

[0059] The fourth inductor 370 may be electrically connected to the signal path 316 at a first location 371 and to the ground plane 312 at a second location 373 by vias 374. The vias 374 may be connected by an intermediate layer 376. The fourth inductor 370 of the filter 300 may correspond to the fourth inductor 220 of the circuit diagram 200 of FIG. 2. The fourth inductor 370 of the filter 300 may be connected to the signal path 316 at a portion 361 of the signal path 316 that is electrically connected to the output 320. The fourth inductor 370 may have three corners 372 and may form a generally quadrantal loop.

[0060] The fourth capacitor may include a conductive layer 380 capacitively coupled to a portion 361 of the signal path 316 connected to the output 320. The conductive layer 380 of the fourth capacitor may be electrically connected to the ground plane 312 by a via 382. The fourth capacitor may correspond to the fourth capacitor 222 of the circuit diagram 200 of Figure 2. The fourth capacitor may be self-matched, for example, as described above with reference to the first capacitor.

[0061] 5A-5D are enlarged perspective views of a first inductor 342, a second inductor 346, a third inductor 356, and a fourth inductor 370, respectively. Referring to FIG. 5A, the first inductor 342 can connect with or include a connector portion 338, whereby the first inductor 342 can be connected to one or more A number of vias 344 and vertical connections of the intermediate conductive layer 324 connect the first inductor 342 to the portion 336 of the signal path 316 at a first location 500 and to the ground plane 312 at a second location 502. An effective length 504 of the first inductor 342 can be defined between the first location 500 and the second location 502. The effective length 504 can be selected to produce a desired inductance value for the first inductor 342.

[0062] The one or more vias 322, 326 and the intermediate conductive layer 324 form a vertical connection between the first inductor 342 and the ground plane 312. The total vertical length 506 may be equal to the sum of the thicknesses of the second dielectric layer 304, the conductive layer 305 formed on the second dielectric layer 304, and the third dielectric layer 306 (FIG. 3C).

[0063] The connector portion 338 can have a width 508 in the Y direction. The first inductor 342 can have a width 510 in the Y direction. The inductance of the first inductor 342 can depend on the width 508 of the connector portion 338, the width 510 of the first inductor 342, and / or the effective length 504 of the first inductor 342.

[0064] 5B, the second inductor 346 can have an effective length along the conductive layer of the second inductor 346 between a first location 349 and a second location 351. The second inductor 346 can include multiple elongated sections having respective lengths. The effective length can be defined as the sum of the lengths along the second inductor 346 in the XY plane. For example, a first length 520 can be defined in the X direction between a first location 349 and a first one of the corners 347, a second length 524 can be defined in the Y direction between the first corner 522 and a second corner 526, a third length 528 can be defined in the X direction between the second corner 526 and a third corner 530, a fourth length 532 can be defined in the Y direction between the third corner 530 and a fourth corner 534, and a fifth length 536 can be defined in the X direction between the fourth corner 534 and the second location 351. An effective length can be defined as the sum of the first length 520, the second length 524, the third length 528, the fourth length 532, and the fifth length 536. The second inductor 346 can have a width 538 along the effective length of the second inductor 346. In other words, the inductor can have a generally uniform width 538 along each elongated section (e.g., first length 520, second length 524, third length 528, and / or fourth length 532). Each corner 522, 526, 530, 534 can be defined as a change in the orientation of the conductive layers of the second inductor 346 in the XY plane that is greater than about 15° (e.g., about 90°).

[0065] 5C, the third inductor 356 can have an effective length along the conductive layer of the third inductor 356 between a first location 357 of the third inductor 356 and a second location 359 of the third inductor 356. The effective length can be defined as the sum of lengths along the third inductor 356 in the XY plane. For example, a first length 550 can be defined in the Y direction between the first location 357 and a first corner 552, a second length 554 can be defined in the X direction between the first corner 552 and a second corner 556, and a third length 556 can be defined in the Y direction between the second corner 556 and the second location 359. The effective length can be defined as the sum of the first length 550, the second length 552, and the third length 556.

[0066] The third inductor 356 may have a first width 530 at the line width increasing portion 364. The third inductor 356 may have a second width 530 along other portions of the third inductor 356. The width 532 may be .about.10 mm.

[0067] 5D, the fourth inductor 370 may similarly have an effective length in the XY plane that is equal to the sum of the lengths of the fourth inductor 370. For example, the fourth inductor 370 may have an effective length along the conductive layer of the fourth inductor 370 between a first location 371 and a second location 373. The effective length may be defined as the sum of the lengths along the fourth inductor 370 in the XY plane. For example, a first length 580 may be defined in the X direction between the first location 371 and a first corner 582, a second length 584 may be defined in the Y direction between the first corner 582 and a second corner 586, a third length 588 may be defined in the X direction between the second corner 586 and a third corner 590, and a fourth length 592 may be defined in the Y direction between the third corner 590 and the second location 351. The effective length may be defined as the sum of the first length 580, the second length 584, the third length 588, and the fourth length 592. The fourth inductor 370 may have a width 594 along the effective length of the fourth inductor 370. II. Further Exemplary Embodiments FIG 6A illustrates a perspective view of another embodiment of a multi-layer filter 600 according to aspects of the disclosure. FIG 6B illustrates another perspective view of the multi-layer filter 600 of FIG 6A. Filter 600 may be generally configured in a manner similar to filter 300 described above with reference to FIGS. 3-5D. Filter 600 may include an input 602, an output 604, and a signal path 606 connecting input 602 and output 604. Filter 600 may also include a ground plane 608 electrically connected to one or more ground electrodes 610.

[0068] The filter 600 may include a first inductor 612 electrically connected to the ground plane 608. The first inductor 612 may correspond to the first inductor 208 of the circuit diagram 200 described above with reference to FIG. 2. The filter 600 may include a first capacitor 614 electrically coupled to the ground plane 608. The first capacitor 614 may correspond to the first capacitor 210 of the circuit diagram 200 described above with reference to FIG. 2. The filter 600 may include a second inductor 616 and a second capacitor 618 connected in parallel with each other. The second inductor 616 and the second capacitor 618 may correspond to the second inductor 212 and the second capacitor 214, respectively, of the circuit diagram 200 described above with reference to FIG. 2. The second inductor 616 and the second capacitor 618 may form a portion of the signal path 606 between the input 602 and the output 604. The filter 600 may include a third inductor 620 and a third capacitor 622 that may be connected in parallel with each other and form a portion of the signal path 606 between the input 602 and the output 604. The third inductor 620 and the third capacitor 622 may correspond to the third inductor 216 and the third capacitor 218, respectively, of the circuit diagram 200 described above with reference to FIG. 2. Finally, the filter 600 may include a fourth inductor 624 and a fourth capacitor 626 that are connected in parallel with each other and connected between the signal path 606 and the ground plane 608. The fourth inductor 624 and the fourth capacitor 626 may correspond to the fourth inductor 220 and the fourth capacitor 222, respectively, of the circuit diagram 200 described above with reference to FIG. 2.

[0069] The inductors 612, 616, 620, 624 and capacitors 614, 618, 622, 626 may be connected by vias 627 in a manner similar to that described above with reference to Figures 3-5D. Each of the inductors 612, 616, 620, 624 may connect to the signal path 606 at a respective first location and connect to the signal path 606 or the ground plane 608 at a respective second location. Each of the inductors 612, 616, 620, 624 can have a respective effective length (e.g., in the XY plane) between a first location and a second location. In addition, each of the inductors 612, 616, 620, 624 can have a respective width along the respective effective length.

[0070] FIG. 6C is a side view of the filter 600 of FIG. 6A and FIG. 6B. The bandpass filter 600 may comprise multiple dielectric layers (which are transparent in FIG. 6A and FIG. 6B for clarity). Referring to FIG. 6C, a first layer 632, a second layer 636, and a third layer 640 may be stacked to form a monolithic structure. Conductive layers 630, 634, 638, 642 may be formed on the dielectric layers 632, 636, 640. The conductive layer 630 may be formed on a bottom surface of the first dielectric layer 632. The conductive layers 634, 638 may be formed on the top and bottom surfaces, respectively, of the second dielectric layer 636. The conductive layer 642 may be formed on a top surface of the third dielectric layer 640.

[0071] 7A-7D are a series of successive plan views of the filter 600 of FIGS. 6A-6C, with additional layers shown in each successive view. More specifically, FIG. 7A shows a mounting surface 628, such as a printed circuit board. The first conductive layer 630 can include a ground plane 608 that can be formed on a bottom and top surface of the first layer 632. FIG. 7B further shows a second conductive layer 634 formed on the first dielectric layer 632. The second conductive layer 634 can include the first capacitor 614, the second capacitor 618, the third capacitor 622, and the fourth capacitor 626. FIG. 7C further shows a third conductive layer 638 formed on the second dielectric layer 636. The third conductive layer 638 can include a portion of the signal path 606 and the first inductor 612. FIG. 7D shows a fourth conductive layer 642 formed on the fourth dielectric layer 640. The fourth conductive layer 642 can comprise the second inductor 616, the third inductor 622, and the fourth inductor 624. The dielectric layers 632, 636, 640 are transparent to show the relative rearrangement of the various patterned conductive layers 630, 634, 638, 642.

[0072] 8A illustrates a perspective view of another embodiment of a multi-layer filter 800 according to aspects of the present disclosure. Filter 800 may be generally configured in a manner similar to filter 300 described above with reference to FIGS. 3-5D. Filter 800 may include an input 802, an output 804, and a signal path 806 connecting input 802 and output 804. Filter 800 may also include a ground plane 808 electrically connected to one or more ground electrodes 810.

[0073] The filter 800 may include a first inductor 812 electrically connected to the ground plane 808. The first inductor 812 may correspond to the first inductor 208 of the circuit diagram 200 described above with reference to FIG. 2. The filter 800 may include a first capacitor 814 electrically connected to the ground plane 808. The first capacitor 814 may correspond to the first inductor capacitor 210 of the circuit diagram 200 described above with reference to FIG. 2. The filter 800 may include a second inductor 816 and a second capacitor 818 connected in parallel with each other. The second inductor 816 and the second capacitor 818 may correspond to the second inductor 212 and the second capacitor 214, respectively, of the circuit diagram 200 described above with reference to FIG. 2. The second inductor 816 and the second capacitor 818 may form a portion of the signal path 806 between the input 802 and the output 804. The filter 800 may include a third inductor 820 and a third capacitor 822 that may be connected in parallel with each other and form a portion of the signal path 806 between the input 802 and the output 804. The third inductor 820 and the third capacitor 822 may respectively correspond to the third inductor 216 and the third capacitor 216 of the circuit diagram 200 described above with reference to FIG. 2. Finally, the filter 800 may include a fourth inductor 824 and a fourth capacitor 826 connected in parallel with each other and between the signal path 806 and the ground plane 808. The fourth inductor 824 and the fourth capacitor 826 may correspond to the fourth inductor 220 and the fourth capacitor 222, respectively, of the circuit diagram 200 described above with reference to FIG.

[0074] The inductors 812, 816, 820, 824 and the capacitors 814, 818, 822, 826 may be connected by vias 827 in a manner similar to that described above with reference to Figures 3-5D. Each of the inductors 812, 818, 820, 824 may connect to the signal path 806 at a respective first location and connect to the signal path 806 or the ground plane 808 at a respective second location. Each of the inductors 812, 818, 820, 824 may have a respective effective length (e.g., in the XY plane) between the first location and the second location. Additionally, each of the inductors 812, 818, 820, 824 may have a respective width along its respective effective length.

[0075] FIG. 8B is a side view of the filter 800 of FIG. 8A. The bandpass filter 800 can include multiple dielectric layers (which are transparent in FIG. 8A for clarity). With reference to FIG. 8B, a first layer 832, a second layer 836, and a third layer 840 can be stacked to form a unitary structure. Conductive layers 830, 834, 838, 842 can be formed on the dielectric layers 832, 836, 840. The conductive layer 830 can be formed on a bottom surface of the first dielectric layer 832. The conductive layers 834, 838 can be formed on the top and bottom surfaces of the second dielectric layer 836, respectively. The conductive layer 842 can be formed on the top surface of the third dielectric layer 840.

[0076] 9A-9D are a series of successive plan views of the filter 600 of FIGS. 8A and 8B, with additional dielectric layers shown in each successive view. More specifically, FIG. 9A shows a mounting surface 828, such as a printed circuit board. The first conductive layer 830 can include a ground plane 808 that can be formed on a bottom and top surface of the first layer 832. FIG. 9B further shows a second conductive layer 834 formed on the first dielectric layer 832. The second conductive layer 834 can include a first capacitor 814, a second capacitor 818, a third capacitor 822, and a fourth capacitor 826. FIG. 9C further shows a third conductive layer 838 formed on the second dielectric layer 836. The third conductive layer 838 can include a portion of the signal path 806 and the first inductor 812. FIG. 9D shows a fourth conductive layer 842 formed on a fourth dielectric layer 840. The fourth conductive layer 842 can include the second inductor 816, the third inductor 822, and the fourth inductor 824. The dielectric layers 832, 836, 840 are transparent to show the relative rearrangement of the various patterned conductive layers 830, 834, 838, 842.

[0077] FIG 10A illustrates a perspective view of another embodiment of a multi-layer filter 1000 according to aspects of the disclosure. FIG 10B illustrates another perspective view of the multi-layer filter 1000 of FIG 10A. The filter 1000 may be generally configured in a manner similar to the filter 300 described above with reference to FIGS. 3-5D. The filter 1000 may include an input 1002, an output 1004, and a signal path 1006 connecting the input 1002 and the output 1004. The filter 1000 may also include a ground plane 1008 electrically connected to one or more ground electrodes 1010.

[0078] The filter 1000 may include a first inductor 1012 electrically connected to the ground plane 1008. The first inductor 1012 may correspond to the first inductor 208 of the circuit diagram 200 described above with reference to FIG. The filter 1000 may include a first capacitor 1014 electrically coupled to the ground plane 1008. The first capacitor 1014 may correspond to the first inductor capacitor 210 of the circuit diagram 200 described above with reference to FIG. 2. The filter 1000 may include a second inductor 1016 and a second capacitor 1018 connected in parallel to each other. The second inductor 1016 and the second capacitor 1018 may correspond to the second inductor 212 and the second capacitor 214 of the circuit diagram 200 described above with reference to FIG. 2. The second inductor 1016 and the second capacitor 1018 may form a portion of the signal path 1006 between the input 1002 and the output 1004. The filter 1000 may include a third inductor 1020 and a third capacitor 1022 connected in parallel to each other and may form a portion of the signal path 1006 between the input 1002 and the output 1004. The third inductor 1020 and the third capacitor 1022 may correspond, respectively, to the third inductor 216 and the third capacitor 218 of the circuit diagram 200 described above with reference to Figure 2. Finally, the filter 1000 may include a fourth inductor 1024 and a fourth capacitor 1026 connected in parallel with each other and between the signal path 1006 and the ground plane 1008. The fourth inductor 1024 and the fourth capacitor 1026 may correspond, respectively, to the fourth inductor 220 and the fourth capacitor 222 of the circuit diagram 200 described above with reference to Figure 2.

[0079] The inductors 1012, 1016, 1020, 1024 and the capacitors 1014, 1018, 1022, 1026 may be connected by vias 1027 in a manner similar to that described above with reference to Figures 3-5D. Each of the inductors 1012, 10110, 1020, 1024 may connect to the signal path 1006 at a respective first location and connect to the signal path 1006 or the ground plane 1008 at a respective second location. Each of the inductors 1012, 10110, 1020, 1024 may have a respective effective length (e.g., in the XY plane) between the first location and the second location. Additionally, each of the inductors 1012, 10110, 1020, 1024 may have a respective width along the respective effective length.

[0080] FIG. 10B is a side view of the filter 1000 of FIG. 10A and FIG. 10B. The bandpass filter 1000 can include multiple dielectric layers (transparent in FIG. 10A for clarity). Referring to FIG. 10B, a first layer 1032, a second layer 1036, and a third layer 1040 can be stacked to form a unitary structure. Conductive layers 1030, 1034, 1038, 1042 can be formed on the dielectric layers 1032, 1036, 1040. The conductive layer 1030 can be formed on a bottom surface of the first dielectric layer 1032. The conductive layers 1034, 1038 can be formed on the top and bottom surfaces, respectively, of the second dielectric layer 1036. The conductive layer 1042 can be formed on a top surface of the third dielectric layer 1040.

[0081] 11A-11D are a series of successive plan views of the filter 600 of FIGS. 10A and 10B, with additional dielectric layers shown in each successive view. More specifically, FIG. 11A shows a mounting surface 1028, such as a printed circuit board. The first conductive layer 1030 can include a ground plane 1008 that can be formed on a bottom and top surface of the first layer 1030. FIG. 11B further shows a second conductive layer 1034 formed on the first dielectric layer 1032. The second conductive layer 1034 can include the first capacitor 1014, the second capacitor 1018, the third capacitor 1022, and the fourth capacitor 1026. FIG. 11C further shows a third conductive layer 1038 formed on the second dielectric layer 1036. The third conductive layer 1038 can include a portion of the signal path 1006 and the first inductor 1012. FIG. 11D shows a fourth conductive layer 10 formed on a fourth dielectric layer 1040. 42 is shown. The fourth conductive layer 1042 can comprise the second inductor 1016, the third inductor 1022, and the fourth inductor 1024. The dielectric layers 1032, 1036, 1040 are transparent to show the relative rearrangement of the various patterned conductive layers 1030, 1034, 1038, 1042. III. Method of forming a high frequency filter 19, according to some aspects of the disclosure, a method 1900 of forming a high frequency multi-layer filter, such as that described above, may include providing a plurality of dielectric layers at 1902. For example, the dielectric layers may correspond to the first, second and third dielectric layers described above with reference to FIGS.

[0082] At (1904), the method 1900 can include forming a plurality of conductive layers on at least some of the plurality of dielectric layers to form a signal path having an input and an output. For example, the method 1900 can include forming an inductor comprising a conductive layer on a first dielectric layer and a capacitor comprising a first electrode and a second electrode spaced from the first electrode by a second dielectric layer different from the first dielectric layer.

[0083] At (1906), the method 1900 can include forming a first via at a first location, electrically connecting the inductor to the signal path, and forming a second via at a second location, electrically connecting the inductor to at least one of the signal path or a ground plane. The multi-layer filter can have a characteristic frequency greater than about 8 GHz.

[0084] The first or second dielectric layer may include one or more thin layers of conductive material (e.g., metal film) laminated or otherwise attached to the second dielectric layer (e.g., on the top and / or bottom surface). The second dielectric layer may be obtained with a thin layer of conductive material already attached, or alternatively with multiple conductive layers formed. In some embodiments, the method 1900 may include depositing a thin layer of conductive material on a surface of the second dielectric layer. The thin layer of conductive material may be selectively etched using a mask and photolithography to generate a desired pattern of conductive material on the surface of the dielectric material. Alternatively, a conductive layer may be formed on one or more of the dielectric layers using a suitable deposition technique.

[0085] In some embodiments, the various dielectric layers can be stacked and deposited or laminated sequentially on one another. For example, a third dielectric layer can be deposited on the top surface of a second dielectric layer after a conductive layer is formed on the top surface of the second dielectric layer. A first dielectric layer can then be deposited on the second dielectric layer after a conductive layer is formed on the bottom surface of the second dielectric. If desired, vias can be formed in the various dielectric layers during this process.

[0086] IV.Applications Various embodiments of the filters described herein may find application in any suitable type of electrical component. The filters may find particular application in devices that receive, transmit, or otherwise use high frequency radio signals. Exemplary applications include smartphones, signal repeaters (e.g., small cells), relay stations, and radar. Working Example In accordance with aspects of the present disclosure, computer modeling was used to simulate a multi-layer high frequency filter. Additionally, a filter was constructed and tested. It should be understood that the following dimensions are provided by way of example only and do not limit the scope of the present disclosure.

[0087] Various multi-layer filters (such as multi-layer filters 300, 600, 800, 1000 described above) ) can be configured to have the following passband frequency ranges and the following respective effective inductor lengths ("L") and widths ("W") in microns:

[0088] [Table 1]

[0089] The third inductor 356 of the filter 300 may include a line width edition 364 as described above with reference to Figure 5C. At the line width edition 364, the width 530 of the third inductor 356 may be approximately 152 microns.

[0090] The various multilayer filters (including the multilayer filters 300, 600, 800, and 1000 discussed above) have the following passband frequency ranges and the following millimeter squared dimensions (mm 2 ) units of respective capacitive areas.

[0091] [Table 2]

[0092] The thickness of the dielectric layers can typically be less than about 180 micrometers ("microns"). For example, in some embodiments, the second layer 304, 632, 832, 1032 can be about sixty micrometers (60 microns) thick. The third layer 304, 636, 836, 1036 can be about twenty micrometers (20 microns) thick. The fourth layer 308, 640, 840, 1040 can be about sixty micrometers (60 microns) thick.

[0093] In some embodiments, the overall length of the filter can be 4.3 mm, the overall width can be about 4 mm, and the overall thickness can be about 230 microns.

[0094] 12-17 show test results and simulation data for various filters. With reference to FIG. 12, a multi-layer filter according to an embodiment of the present disclosure was constructed and tested. The measured insertion loss (S 21 ) value and the measured return loss (S 11 ) value is 0GHz~ Plotted at 45 GHz. Simulated insertion loss (S 21 ) values ​​and simulated return loss (S 11 ) values ​​are plotted from 0 GHz to 35 GHz. The measured passband is from about 13.2 GHz to about 15.8 GHz.

[0095] Referring to FIG. 13, a multi-layer filter according to an embodiment of the present disclosure was constructed and tested. The measured insertion loss (S 21 ) value and the measured return loss (S 11 ) values ​​are plotted from 0 GHz to 45 GHz. The simulated insertion loss (S 21 ) values ​​and simulated return loss (S 11 ) values ​​are plotted from 0 GHz to 35 GHz. The passband is from about 16.1 GHz to about 18.2 GHz.

[0096] 14, the multi-layer filter 300 described above with reference to FIGS. 3A-4E was both simulated and constructed and physically tested. The measured insertion loss (S 21 ) value and the measured return loss (S 11 ) values ​​are plotted from 0 GHz to 45 GHz. The simulated insertion loss (S 21 ) values ​​and simulated return loss (S 11 ) values ​​are plotted from 0 GHz to 35 GHz. The passband is from about 17.0 GHz to about 21.2 GHz.

[0097] Referring to FIG. 15, the multi-layer filter 600 described above with reference to FIGS. 6A-7D was simulated. The simulated insertion loss (S 21 ) values ​​and simulated return loss (S 11 ) values ​​are plotted from 0 GHz to 50 GHz. The passband is from about 24.6 GHz to about 27.8 GHz.

[0098] Referring to FIG. 16, the multi-layer filter 800 described above with reference to FIGS. 8A-9D was simulated. The simulated insertion loss (S 21 ) values ​​and simulated return loss (S 11 ) values ​​are plotted from 0 GHz to 55 GHz. The passband is from about 34.6 GHz to about 37.4 GHz.

[0099] Referring to FIG. 17, the multi-layer filter 1000 described above with reference to FIGS. 10A-11D was simulated. The simulated insertion loss (S 21 ) values ​​and simulated return loss (S 11 ) values ​​are plotted from 0 GHz to 70 GHz. The passband is from about 42.9 GHz to about 46.6 GHz. Test Method 18, according to an embodiment of the disclosure, a test assembly 1800 can be used to test performance characteristics such as insertion loss and return loss of a high frequency multi-layer filter 1802. The filter 1802 can be mounted on a test board 1804. An input line 1806 and an output line 1808 are each connected to the test board 1804. The test board 1804 can include a microstrip line 1810 that electrically connects the input line 1806 with the input of the filter 1802 and the output line 1808 with the output of the filter 1802. An input signal was applied to the input line using a source signal generator (e.g., a 1806 Keithley 2400 series source measurement unit (SMU), e.g., a Keithley 2410-C SMU), and the resulting output of the filter 1802 was measured at the output line 18108 (e.g., using the source signal generator). This was repeated for various configurations of the filter.

[0100] Those skilled in the art may make these and other modifications and variations of the present disclosure without departing from the spirit and scope of the present disclosure. In addition, it should be understood that aspects of the various embodiments may be interchanged both in whole and in part. Furthermore, those skilled in the art will appreciate that the above description is for illustrative purposes only and is not intended to limit the present disclosure, which is further described in the appended claims.

Claims

1. A high frequency multilayer filter A plurality of dielectric layers; a signal path having an input and an output; an inductor comprising a conductive layer formed on a first dielectric layer, the inductor electrically connected to the signal path at a first location and electrically connected to at least one of the signal path or ground at a second location; a first capacitor comprising a first electrode and a second electrode spaced from the first electrode by a second dielectric layer; wherein a conductive layer of the inductor is parallel to an XY plane and spaced apart from each of the first and second electrodes of the first capacitor by at least ten micrometers (10 microns) in a Z direction perpendicular to the XY plane.

2. 2. The high frequency multilayer filter of claim 1, further comprising a second capacitor comprising a first electrode and a second electrode spaced from the first electrode by the second dielectric layer, the first electrode of the second capacitor being a second portion of the signal path, and the second capacitor being a self-aligned capacitor that is less sensitive to relative misalignment of the electrodes of the second capacitor.

3. 3. The high frequency multi-layer filter of claim 2, wherein the ground comprises a ground plane, and the second capacitor is electrically connected to the ground plane and capacitively coupled to the signal path.

4. 3. The high frequency multi-layer filter of claim 2, wherein the first capacitor is a self-aligned capacitor that is insensitive to relative misalignment of the electrodes of the first capacitor.

5. 2. The high frequency multi-layer filter of claim 1, wherein the inductor comprises a first elongated section elongated in a first direction and having a first width, and a second elongated section elongated in a second direction and having a second width, the first direction being greater than about 15 degrees from the second direction.

6. The high frequency multi-layer filter of claim 1 , wherein the inductor includes at least two corners.

7. a further conductive layer formed on another of the plurality of dielectric layers; and a via formed in the dielectric layer on which the conductive layer of the inductor is formed, the via being electrically connected to the inductor and the further conductive layer; The high frequency multi-layer filter of claim 1 further comprising:

8. Capacitive area is approximately 0.05 mm ２ 10. The high frequency multi-layer filter of claim 1, further comprising a second capacitor having a capacitance less than 100 Ω.

9. The high frequency multi-layer filter of claim 1 , wherein the multi-layer filter has a characteristic frequency greater than about 8 GHz.

10. 2. The high frequency multi-layer filter of claim 1, wherein the first capacitor is a self-aligned capacitor that is insensitive to relative misalignment of the electrodes of the first capacitor.

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