Infrared detection device, temperature measurement device, and infrared detection method
Patent Information
- Application Number
- JP2022207879
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 2022-12-26
- Publication Date
- 2025-07-10
- Estimated Expiration
- 2042-12-26
AI Technical Summary
Conventional infrared detection devices have a detection field of view in the second direction that is excessively long due to a small first intersection angle, leading to inaccuracies in infrared ray detection.
The infrared detection device employs a configuration where the optical axes of the first and second detection units obliquely intersect the target surface, with a first optical system converting the first incident visual field angle to a smaller first output visual field angle, and includes heat transfer parts to maintain temperature stability between sensors and optical systems.
This configuration suppresses the length of the detection field of view in the second direction, enhances accuracy in infrared ray detection, and reduces temperature differences between sensors and optical systems, thereby improving measurement precision.
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Abstract
Description
[Technical field]
[0001] The present application relates to an infrared detection device, a temperature measurement device and an infrared detection method. [Background technology]
[0002] Conventionally, for example, an infrared detection device includes a first sensor and a second sensor that detect the amount of infrared light incident from a target surface along a first direction and a second direction that are perpendicular to each other (for example, Patent Document 1). When viewed in the first direction, a first intersection angle between the optical axis of the first sensor and the target surface is smaller than a second intersection angle between the optical axis of the second sensor and the target surface.
[0003] However, since the first intersection angle is small when viewed in the first direction, the length in the second direction of the area (detection field of view) of the target surface where infrared rays are detected by the first sensor is long. Thus, the smaller the first intersection angle when viewed in the first direction, the longer the length in the second direction required on the target surface. [Prior art documents] [Patent documents]
[0004] [Patent Document 1] International Publication No. 2021 / 08002 Summary of the Invention [Problem to be solved by the invention]
[0005] Therefore, an object of the present invention is to provide an infrared detection device, a temperature measurement device, and an infrared detection method that can prevent the length of the detection field of view in the second direction from increasing. [Means for solving the problem]
[0006] The infrared detection device detects infrared rays from a target surface along a first direction and a second direction that are perpendicular to each other, and has a first detection optical path that expands toward the target surface. The device includes a first detection unit that detects an amount of infrared rays incident from the first detection optical path, an optical axis of the first detection unit intersects the target surface at an angle when viewed in the first direction, the first detection unit includes a first sensor that detects the amount of infrared rays incident from the first detection optical path, and a first optical system that emits infrared rays incident from the target surface toward the first sensor, the first optical system converts a first incident field of view angle in the first direction in the first detection optical path on the incident side to a first exit field of view angle of the first detection optical path on the exit side, and the first incident field of view angle is smaller than the first exit field of view angle.
[0007] The temperature measuring device includes the infrared detection device and a processing unit that calculates the temperature of the target surface based on the amount of infrared radiation detected by the first detection unit and the second detection unit.
[0008] The infrared detection method uses the infrared detection device to detect infrared rays from the target surface. [Brief description of the drawings]
[0009] [Figure 1] 1 is a schematic diagram of a temperature measuring device according to an embodiment; [Diagram 2] FIG. 1 is a schematic diagram of an infrared detection device according to the embodiment when viewed in a first direction; [Diagram 3] 1A and 1B are schematic diagrams of the infrared detection device according to the embodiment as viewed in a second direction ((a): overall view, (b): view of only the first detection unit, (c): view of only the second detection unit). [Figure 4] Schematic diagram of a sensor according to the embodiment. [Diagram 5] FIG. 3 is a perspective view of a reflector according to the embodiment; [Figure 6] FIG. 2 is a view of the reflector according to the embodiment viewed from a first direction. [Figure 7] Cross-sectional view of line VII-VII in Figure 6 [Figure 8] FIG. 1 is a view seen in a first direction illustrating a detection optical path and a detection field of a first detection unit; [Figure 9] FIG. 1 is a view seen in a first direction illustrating the detection optical paths and the detection fields of the first and second detection units; [Figure 10] 8A and 8B are diagrams for explaining a detection light path of the first detection unit ((a): view from the fourth direction in FIG. 8, (b): view from the second direction); [Figure 11] FIG. 3 is a view showing the detection optical path and the detection field of the first detection unit when viewed from a third direction. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0010] In each drawing, the dimensions of the components may be enlarged or reduced relative to the actual dimensions in order to facilitate understanding, and the dimensional ratios between the drawings may not be consistent. Note that in each drawing, some of the components may be omitted in order to facilitate understanding.
[0011] Terms including ordinal numbers such as first, second, etc. are used to describe various components, but these terms are used only for the purpose of distinguishing one component from another, and the components are not particularly limited by these terms. The number of components including ordinal numbers is not particularly limited, and may be, for example, one. In addition, the ordinal numbers used in the following specification and drawings may differ from the ordinal numbers described in the claims.
[0012] Hereinafter, an embodiment of a temperature measuring device and an infrared detection device will be described with reference to Figures 1 to 11. Note that the following embodiment is provided as an example to aid in understanding the configuration of the temperature measuring device and the infrared detection device, and is not intended to limit the configuration of the temperature measuring device and the infrared detection device.
[0013] 1, for example, a temperature measuring device 1 may include an infrared detection device (hereinafter also simply referred to as a "detection device") 2 that detects infrared rays from a target surface X2 of an object X1 that is the target of measurement, an apparatus main body 3 that can communicate with the detection device 2, and a communication means 4 that can communicate between the detection device 2 and the apparatus main body 3. The apparatus main body 3 may include, for example, as in this embodiment, an input unit 3a to which information is input, a processing unit 3b that processes the information, and an output unit 3c that outputs the information.
[0014] The communication means 4 may be, for example, a wireless communication means such as Wi-Fi, Bluetooth, etc., or may be, for example, a wired communication means such as a communication cable, etc. Note that, for example, the detection device 2 and the device body 3 may be integrally configured by arranging them inside a common housing.
[0015] The input unit 3a is not particularly limited, and may be, for example, a button, a touch panel, etc. Then, for example, information instructing to start measuring the temperature of the target surface X2, etc. may be input to the input unit 3a.
[0016] The processing unit 3b may include, for example, a processor such as a CPU and an MPU, memories such as a ROM and a RAM, various interfaces, etc. Specifically, the processing unit 3b may include, for example, an acquisition unit that acquires information from the detection device 2 and the input unit 3a, etc., a storage unit that stores the information, a calculation unit that calculates the information (for example, the temperature of the target surface X2), and a control unit that controls each unit of the temperature measuring device 1 (for example, the output unit 3c).
[0017] The output unit 3c is not particularly limited, and may be, for example, a display device, etc. The output unit 3c may be, for example, a transmitting means for outputting (transmitting) a signal to the outside of the temperature measuring device 1. The output unit 3c may output the measurement result (for example, the temperature of the target surface X2), etc.
[0018] 2 and 3, the object X1 may be, for example, a metal material, more specifically, a metal sheet material, conveyed along a first direction D1 (including not only a configuration in which the object is conveyed in a direction parallel to the first direction D1, but also a configuration in which the object is conveyed in a direction intersecting the first direction D1 at an angle of 10° or less), and the object surface X2 may be a surface of the metal material, for example, a surface along each of the first direction D1 and the second direction D2. Note that the object X1 is not particularly limited, and may be, for example, a stationary metal material.
[0019] Also, although not particularly limited, for example, in this embodiment, the first direction D1 is the first horizontal direction D1, the second direction D2 is the second horizontal direction D2 perpendicular to the first direction D1, and the third direction D3 is the up-down direction D3 perpendicular to the first direction D1 and the second direction D2.
[0020] The detection device 2 may, for example, as in this embodiment, include a first detection unit 5 and a second detection unit 6 that detect the amount of infrared rays from the target surface X2, and a fixing means 7 that fixes the first detection unit 5 and the second detection unit 6. Note that the infrared rays from the target surface X2 include, for example, infrared rays radiated (emitted) from the target surface X2 and infrared rays radiated (emitted) from objects around the target X1 and reflected by the target surface X2.
[0021] The first detection unit 5 may include, for example, as in this embodiment, a first sensor 8 that detects the amount of incident infrared rays, and a first optical system 9 that emits infrared rays incident from the target surface X2 toward the first sensor 8. As a result, the infrared rays from the target surface X2 are incident on the first sensor 8 via the first optical system 9.
[0022] The second detection unit 6 may include, for example, as in this embodiment, a second sensor 10 that detects the amount of incident infrared rays, and a second optical system 11 that emits infrared rays incident from the target surface X2 toward the second sensor 10. As a result, the infrared rays from the target surface X2 are incident on the second sensor 10 via the second optical system 11.
[0023] The fixing means 7 may, for example, as in this embodiment, include a base portion 7a, a first fixing portion 7b that fixes the first sensor 8 to the base portion 7a, a second fixing portion 7c that fixes the first optical system 9 to the base portion 7a, a third fixing portion 7d that fixes the second sensor 10 to the base portion 7a, and a fourth fixing portion 7e that fixes the second optical system 11 to the base portion 7a.
[0024] As a result, the base portion 7a and the first and second fixed portions 7b, 7c constitute a first heat transfer portion 7f connected to the first sensor 8 and the first optical system 9, respectively, and the first heat transfer portion 7f conducts heat between the first sensor 8 and the first optical system 9. In addition, the base portion 7a and the third and fourth fixed portions 7d, 7e constitute a second heat transfer portion 7g connected to the second sensor 10 and the second optical system 11, respectively, and the second heat transfer portion 7g conducts heat between the second sensor 10 and the second optical system 11.
[0025] This makes it possible to prevent a temperature difference from occurring between the sensors 8, 10 and the optical systems 9, 11. As a result, it is possible to prevent the transfer of infrared rays between the sensors 8, 10 and the optical systems 9, 11, so that the amount of infrared rays from the target surface X2 can be accurately detected by the sensors 8, 10.
[0026] In addition, since the base portion 7a constitutes the first heat transfer portion 7f and the second heat transfer portion 7g, the first heat transfer portion 7f and the second heat transfer portion 7g are connected to each other. As a result, heat is conducted between the first sensor 8, the second sensor 10, the first optical system 9, and the second optical system 11, so that it is possible to suppress the occurrence of a temperature difference between the first sensor 8, the second sensor 10, the first optical system 9, and the second optical system 11.
[0027] This makes it possible to prevent infrared rays from being exchanged between the first sensor 8, the second sensor 10, the first optical system 9, and the second optical system 11. As a result, even if the first sensor 8, the second sensor 10, the first optical system 9, and the second optical system 11 are arranged close to each other, the amount of infrared rays from the target surface X2 can be accurately detected by the first and second sensors 8 and 10.
[0028] For example, it is preferable that the thermal conductivity of each of the heat transfer portions 7f, 7g (specifically, the base portion 7a and each of the fixing portions 7b to 7e) is greater than the thermal conductivity of the housing 2a that houses the detection portions 5, 6 and the fixing means 7. Although not particularly limited, the heat transfer portions 7f, 7g may be made of, for example, aluminum, and the housing 2a may be made of, for example, a hard resin.
[0029] Although not particularly limited, the thermal conductivity of each of the heat transfer parts 7f, 7g may be, for example, 100 (W / m·K) or more, and is preferably, for example, 200 (W / m·K) or more. The detection device 2 may include a device for introducing a heat medium (for example, a gas at a constant temperature) into the inside of the housing 2a. This can further suppress the occurrence of a temperature difference between the sensors 8, 10 and the optical systems 9, 11.
[0030] The first optical system 9 may be configured with a single first reflecting material (e.g., a mirror) 9a having a first reflecting surface 9b, as in this embodiment. In this way, infrared rays traveling from the target surface X2 toward the first reflecting material 9a are incident on the first reflecting surface 9b, and are then reflected by the first reflecting surface 9b and travel toward the first sensor 8.
[0031] The second optical system 11 may be configured, for example, as in this embodiment, by one second reflecting material (for example, a mirror) 11a having a second reflecting surface 11b. With this, infrared rays traveling from the target surface X2 toward the second reflecting material 11a are incident on the second reflecting surface 11b, and are then reflected by the second reflecting surface 11b and travel toward the second sensor 10.
[0032] Although not particularly limited, the ratio of the reflecting surfaces 9b, 11b of the reflectors 9a, 11a that reflect the incident infrared rays (the infrared reflectance of the reflecting surfaces 9b, 11b) may be, for example, 90%, and is preferably, for example, 95% or more, and more preferably, for example, 98% or more. This makes it possible to suppress absorption of the infrared rays by the reflectors 9a, 11a, and therefore allows the sensors 8, 10 to accurately detect the infrared rays from the target surface X2.
[0033] Although not particularly limited, for example, as in this embodiment, the first sensor 8 and the first optical system 9 may be disposed away from the object X1 (object surface X2) when viewed in the up-down direction D3. Also, although not particularly limited, for example, as in this embodiment, the second sensor 10 and the second optical system 11 may be disposed away from the object X1 (object surface X2) when viewed in the up-down direction D3.
[0034] The detection units 5 and 6 have optical axes 5a and 6a, respectively. The optical axes 5a and 6a of the detection units 5 and 6 are also the optical axes of infrared rays incident on the sensors 8 and 10. The optical axes 5a and 6a of the detection units 5 and 6 may, for example, as in this embodiment, intersect at an angle with the target surface X2 when viewed in the first horizontal direction D1.
[0035] As a result, when viewed in the first horizontal direction D1, the first intersection angle θ1 between the optical axis 5a of the first detection unit 5 and the target surface X2 is less than 90° (e.g., 45° or less), and the second intersection angle θ2 between the optical axis 6a of the second detection unit 6 and the target surface X2 is less than 90° (e.g., 45° or less). Note that the first intersection angle θ1 may be smaller than the second intersection angle θ2, for example, as in this embodiment.
[0036] For example, without being particularly limited, when the object X1 is an aluminum material, the first intersection angle θ1 may be set to 2° to 6°, and the second intersection angle θ2 may be set to 8° to 15°. In addition, without being particularly limited, for example, the difference between the first intersection angle θ1 and the second intersection angle θ2 may be set to 4° to 10°.
[0037] In addition, the optical axes 5a, 6a of the detectors 5, 6 may perpendicularly intersect with the target surface X2 when viewed in the second horizontal direction D2, as in this embodiment, so that when viewed in the second horizontal direction D2, the third intersection angle θ3 between the optical axis 5a of the first detector 5 and the target surface X2 is 90°, and the fourth intersection angle θ4 between the optical axis 6a of the second detector 6 and the target surface X2 is 90°.
[0038] The optical axes 5a, 6a intersecting with the target surface X2 at the first to fourth intersection angles θ1 to θ4 are optical axes of infrared rays incident on the detection units 5, 6 from the target surface X2, and are also called incident optical axes or incident-side optical axes. Specifically, the incident optical axis is the optical axis between the target surface X2 and the optical system 9, 11 (specifically, the reflecting surfaces 9b, 11b of the reflectors 9a, 11a) among the optical axes 5a, 6a of the detection units 5, 6.
[0039] Also, although not particularly limited, for example, as in this embodiment, the length of the optical axis 5a of the first detection unit 5 may be the same as the length of the optical axis 6a of the second detection unit 6. Specifically, for example, the distance between the first sensor 8 and the first reflecting material 9a of the optical axis 5a of the first detection unit 5 may be the same as the distance between the second sensor 10 and the second reflecting material 11a of the optical axis 6a of the second detection unit 6, and the distance between the target surface X2 and the first reflecting material 9a of the optical axis 5a of the first detection unit 5 may be the same as the distance between the target surface X2 and the second reflecting material 11a of the optical axis 6a of the second detection unit 6.
[0040] Incidentally, since the reflectance and emissivity of the object X1 differ depending on the angle with respect to the object surface X2, when the intersection angles θ1, θ2 between the optical axes 5a, 6a of the detection units 5, 6 and the object surface X2 differ, the amount of infrared light detected by the detection units 5, 6 also differs. As a result, since the first intersection angle θ1 and the second intersection angle θ2 differ, the processing unit 3b (see FIG. 1) calculates the temperature of the object surface X2 based on the amount of infrared light detected by the first detection unit 5 and the second detection unit 6.
[0041] The calculation method of the processing unit 3b is not particularly limited. For example, the processing unit 3b may calculate the temperature of the target surface X2 by simultaneous equations, bisection, or the like, from the amount of infrared rays detected by the first detection unit 5 and the second detection unit 6 and at least one of the known reflectance and emissivity at each intersection angle θ1, θ2. This makes it possible to measure the temperature of the target surface X2. In this way, the temperature measuring device 1 may be, for example, a non-contact radiation thermometer as in this embodiment.
[0042] 4, the first sensor 8 may include, for example, a light receiving element 8a that detects infrared rays, a lens 8b through which the infrared rays pass, an aperture 8c through which the infrared rays that have passed through the lens 8b pass, and a sensor body 8d that houses the light receiving element 8a and the lens 8b. As a result, the infrared rays are received by the light receiving element 8a by passing through the lens 8b and the aperture 8c.
[0043] The light receiving element 8a may detect, for example, a temperature change caused by absorbing infrared rays as a change in electromotive force. Although not particularly limited, the light receiving element 8a may be, for example, a thermal type such as a thermopile in which a large number of thermocouples are arranged in series and turned into a thin film, or may be, for example, a quantum type.
[0044] Although not shown, the second sensor 10 may also include, for example, a light receiving element, a lens, an aperture, and a sensor body, similar to the first sensor 8. Although not particularly limited, the first sensor 8 and the second sensor 10 may be, for example, the same detection optical path, that is, the same sensor.
[0045] 5 to 7, the first reflecting surface 9b of the first reflecting material 9a may be formed in a concave shape when viewed in the first horizontal direction D1. Also, the first reflecting surface 9b of the first reflecting material 9a may be formed in a convex shape in a cross section taken along a plane including the first horizontal direction D1 and the second horizontal direction D2, i.e., when viewed in the up-down direction D3, as in this embodiment.
[0046] The second reflecting surface 11b of the second reflecting material 11a may be formed to be concave when viewed in the first horizontal direction D1 as in this embodiment (see Figs. 2 and 9). The second reflecting surface 11b of the second reflecting material 11a may be formed to be convex in a cross section taken along a plane including the first horizontal direction D1 and the second horizontal direction D2, that is, when viewed in the up-down direction D3 as in this embodiment (see Fig. 3).
[0047] Here, the detection optical paths 5b, 5d, 6b, and 6d and the detection visual fields 5c and 6c of the detection units 5 and 6 will be described with reference to FIGS.
[0048] 8, the first detection unit 5 has first detection optical paths 5b, 5d that spread toward the target surface X2, and the first sensor 8 detects the amount of infrared light incident from the first detection optical paths 5b, 5d. The first detection optical path 5b between the target surface X2 and the first optical system 9 is referred to as the first detection optical path 5b on the incident side, and the first detection optical path 5d between the first optical system 9 and the first sensor 8 is referred to as the first detection optical path 5d on the exit side. In other words, the first detection optical path 5d on the exit side is the same as the detection optical path that the first sensor 8 has.
[0049] The first optical system 9 converts an angle θ6 in the first detection optical path 5b on the incident side as viewed in the first horizontal direction D1 (hereinafter referred to as "first incident field angle") into a first exit field angle θ5 in the first detection optical path 5d on the exit side. In this embodiment, the first optical system 9 is one first reflector 9a, and not only the optical axis 5a on the incident side of the first detector 5 but also the optical axis 5a on the exit side perpendicularly intersects with the target surface X2 as viewed in the second horizontal direction D2, so that the first exit field angle θ5 is an angle in the first detection optical path 5d on the exit side as viewed in the first horizontal direction D1.
[0050] The first reflecting surface 9b of the first reflecting material 9a is formed in a concave shape when viewed in the first horizontal direction D1. This makes the first incident field of view angle θ6 smaller than the first exit field of view angle θ5. This makes it possible to prevent the length of the detection field of view 5c of the first detection unit 5 (the area of the target surface X2 where infrared rays are detected by the first detection unit 5) in the second horizontal direction D2 from becoming long.
[0051] 8, the dashed line indicates the first detection optical path Y5b on the incident side when the first entrance field angle θY6 is equal to the first exit field angle θ5. The length of the second horizontal direction D2 of the detection field 5c in the configuration in which the first entrance field angle θY6 is smaller than the first exit field angle θ5 (θ6<θ5) is shorter than the length of the second horizontal direction D2 of the detection field Y5c in the configuration in which the first entrance field angle θY6 is equal to the first exit field angle θ5 (θY6=θ5) (see also FIG. 11).
[0052] Moreover, while the reflectance and emissivity of the object X1 vary depending on the angle relative to the object surface X2, the angle range of the infrared ray in the first detection optical path 5b relative to the object surface X2 is narrowed. This narrows the angle range of the infrared ray in the first detection optical path 5b relative to the optical axis 5a of the first detection unit 5. Therefore, since the difference between the reflectance and emissivity of the infrared ray in the first detection optical path 5b is narrowed, it is possible to improve, for example, the accuracy of detection of the amount of infrared ray.
[0053] 9, the second detection unit 6 has second detection optical paths 6b, 6d that expand toward the target surface X2, and the second sensor 10 detects the amount of infrared light incident from the second detection optical paths 6b, 6d. The second detection optical path 6b between the target surface X2 and the second optical system 11 is referred to as the second detection optical path 6b on the incident side, and the second detection optical path 6d between the second optical system 11 and the second sensor 10 is referred to as the second detection optical path 6d on the exit side. In other words, the second detection optical path 6d on the exit side is the same as the detection optical path of the second sensor 10.
[0054] The second optical system 11 converts an angle θ8 in the second detection optical path 6b on the incident side as viewed in the first horizontal direction D1 (hereinafter referred to as the "second incident field angle") into a second exit field angle θ7 in the second detection optical path 6d on the exit side. In this embodiment, the second optical system 11 is one second reflector 11a, and not only the optical axis 6a on the incident side of the second detection unit 6 but also the optical axis 6a on the exit side perpendicularly intersects with the target surface X2 as viewed in the second horizontal direction D2, so that the second exit field angle θ7 is an angle in the second detection optical path 6d on the exit side as viewed in the first horizontal direction D1.
[0055] The second reflecting surface 11b of the second reflecting material 11a is formed in a concave shape when viewed in the first horizontal direction D1. This makes the second incident field of view angle θ8 smaller than the second exit field of view angle θ7. This makes it possible to prevent the length of the detection field of view 6c of the second detection unit 6 (the area of the target surface X2 where infrared rays are detected by the second detection unit 6) in the second horizontal direction D2 from becoming long.
[0056] Incidentally, while the first intersection angle θ1 is smaller than the second intersection angle θ2, for example, as in this embodiment, the concave radius of curvature of the first reflecting surface 9b may be smaller than the concave radius of curvature of the second reflecting surface 11b when viewed in the first horizontal direction D1, so that the first incident field angle θ6 becomes smaller than the second incident field angle θ8.
[0057] Therefore, for example, it is possible to prevent an increase in the difference in length in the second horizontal direction D2 between the detection field of view 5c of the first detection unit 5 and the detection field of view 6c of the second detection unit 6. Note that, although not particularly limited, for example, the length in the second horizontal direction D2 in the detection field of view 5c of the first detection unit 5 and the length in the second horizontal direction D2 in the detection field of view 6c of the second detection unit 6 can be made the same.
[0058] 10, the first optical system 9 converts an angle θ10 in the first detection optical path 5b on the incident side as viewed in the second horizontal direction D2 (hereinafter referred to as "third incident field angle") into a third exit field angle θ9 of the first detection optical path 5d on the exit side. In this embodiment, the third exit field angle θ9 is the angle of the first detection optical path 5d on the exit side as viewed in the fourth direction D4 in FIG.
[0059] In this embodiment, the first optical system 9 is a single first reflector 9a, and not only the optical axis 5a on the incident side of the first detection unit 5 but also the optical axis 5a on the exit side intersects perpendicularly with the target surface X2 when viewed in the second horizontal direction D2. Therefore, when viewed in the first direction D1, the intersection angle between the fourth direction D4 and the optical axis 5a on the exit side is the same as the intersection angle between the second horizontal direction D2 and the optical axis 5a on the incident side.
[0060] The first reflecting surface 9b of the first reflecting material 9a is formed in a convex shape in a cross section taken along a plane including the first horizontal direction D1 and the second horizontal direction D2. This makes the third incident field of view angle θ10 larger than the third exit field of view angle θ9, so that the length of the first horizontal direction D1 in the detection field of view 5c of the first detection unit 5 can be made longer when the target surface X2 is the surface of a metal material transported along the first horizontal direction D1.
[0061] Therefore, since the length of the first horizontal direction D1 in the detection field of view 5c is long, for example, when the target surface X2 partially vibrates while the target X1 is transported along the first horizontal direction D1, it is possible to suppress the occurrence of an error in the amount of infrared light detected by the first sensor 8. As a result, for example, it is possible to reduce a detection error occurring in the first sensor 8 due to the vibration.
[0062] 10(b) and 11, the dashed lines indicate the first detection optical path Y5b and the first detection field Y5c when the third entrance field angle θY10 is equal to the third exit field angle θ9. The length in the first horizontal direction D1 of the detection field 5c in the configuration in which the third entrance field angle θY10 is larger than the third exit field angle θ9 (θ10>θ9) is longer than the length in the second horizontal direction D2 of the detection field Y5c in the configuration in which the third entrance field angle θY10 is equal to the third exit field angle θ9 (θY10=θ9).
[0063] Although not shown, the second optical system 11 converts the angle in the second horizontal direction D2 in the second detection optical path 6b on the incident side (hereinafter referred to as the "fourth incident field angle") into a fourth exit field angle in the second detection optical path 6d on the exit side. Since the second reflecting surface 11b of the second reflecting material 11a is formed in a convex shape in a cross section taken along a plane including the first horizontal direction D1 and the second horizontal direction D2 (see FIG. 3), the fourth incident field angle is larger than the fourth exit field angle.
[0064] Therefore, since the target surface X2 is the surface of a metal material transported along the first horizontal direction D1, the length of the first horizontal direction D1 in the detection field of view 6c of the second detection unit 6 can be made longer. Although not particularly limited, for example, the length of the first horizontal direction D1 in the detection field of view 5c of the first detection unit 5 and the length of the first horizontal direction D1 in the detection field of view 6c of the second detection unit 6 may be made the same.
[0065] In this way, the detection field of view 5c of the first detection unit 5 can be set to a desired area by the first optical system 9, and the detection field of view 6c of the second detection unit 6 can be set to a desired area by the second optical system 11. Therefore, for example, the detection field of view 5c of the first detection unit 5 and the detection field of view 6c of the second detection unit 6 can be set to the same area, although this is not particularly limited.
[0066] Although not particularly limited, for example, the first exit field angle θ5 and the third exit field angle θ9 may be the same. Specifically, the spread angle of the first detection optical path 5b on the exit side, that is, the detection optical path of the first sensor 8 (for example, the first exit field angle θ5, the third exit field angle θ9) may be the same not only in the first horizontal direction D1 and the second horizontal direction D2 but also in any horizontal direction.
[0067] In addition, although not particularly limited, for example, the second exit field angle θ7 and the fourth exit field angle may be the same. Specifically, the spread angle of the second detection optical path 6d on the exit side, that is, the detection optical path of the second sensor 10 (for example, the third exit field angle θ9, the fourth exit field angle) may be the same not only in the first horizontal direction D1 and the second horizontal direction D2 but also in any horizontal direction.
[0068] As described above, the infrared detection device 2 is, for example, as in this embodiment, an infrared detection device 2 that detects infrared rays from a target surface X2 along a first direction D1 and a second direction D2 that are perpendicular to each other, and includes a first detection unit 5 that has first detection optical paths 5b and 5d that spread toward the target surface X2 and detects the amount of infrared rays incident from the first detection optical paths 5b and 5d, an optical axis 5a of the first detection unit 5 intersects with the target surface X2 at an angle when viewed in the first direction D1, and the first detection unit 5 is a first sensor 8 that detects the amount of infrared light incident from the first detection optical paths 5b, 5d, and a first optical system 9 that emits the infrared light incident from the target surface X2 toward the first sensor 8, wherein the first optical system 9 converts a first incident field of view angle θ6 as viewed in the first direction D1 in the first detection optical path 5b on the incident side into a first exit field of view angle θ5 of the first detection optical path 5d on the exit side, and the first incident field of view angle θ6 is smaller than the first exit field of view angle θ5.
[0069] According to this configuration, the first optical system 9 emits infrared light incident from the target surface X2 toward the first sensor 8, and the first incident field of view angle θ6 is smaller than the first exit field of view angle θ5. This makes it possible to prevent the length of the detection field of view 5c of the first detection unit 5 in the second direction D2 from becoming long.
[0070] Furthermore, as in the present embodiment, for example, the infrared detection device 2 has second detection optical paths 6b, 6d expanding toward the target surface X2, and further includes a second detection unit 6 that detects the amount of infrared rays incident from the second detection optical paths 6b, 6d, an optical axis 6a of the second detection unit 6 intersects the target surface X2 at an angle when viewed in the first direction D1, the second detection unit 6 includes a second sensor 10 that detects the amount of infrared rays incident from the second detection optical paths 6b, 6d, and a second optical system 11 that emits the infrared rays incident from the target surface X2 toward the second sensor 10, the second optical system 11 converts a second incident field of view angle θ8 in the first direction D1 view in the second detection optical path 6b on the incident side into a second exit field of view angle θ7 of the second detection optical path 6d on the exit side, and the second incident field of view angle θ8 is preferably smaller than the second exit field of view angle θ7.
[0071] According to this configuration, the second optical system 11 emits the infrared light incident from the target surface X2 toward the second sensor 10, and the second incident field of view angle θ8 is smaller than the second exit field of view angle θ7. This makes it possible to prevent the length of the detection field of view 6c of the second detection unit 6 in the second direction D2 from becoming long.
[0072] Furthermore, in the infrared detection device 2, for example, as in the present embodiment, when viewed in the first direction D1, it is preferable that the intersection angle θ1 between the optical axis 5a of the first detection unit 5 and the target surface X2 (in this embodiment, the first intersection angle) θ1 is smaller than the intersection angle θ2 between the optical axis 6a of the second detection unit 6 and the target surface X2 (in this embodiment, the second intersection angle) and the first incident field of view angle θ6 is smaller than the second incident field of view angle θ8.
[0073] According to this configuration, when viewed in the first direction D1, the intersection angle θ1 between the optical axis 5a of the first detection unit 5 and the target surface X2 is smaller than the intersection angle θ2 between the optical axis 6a of the second detection unit 6 and the target surface X2, while the first incident field angle θ6 is smaller than the second incident angle θ8. This makes it possible to prevent, for example, an increase in the difference in length in the second direction D2 between the detection field of view 5c of the first detection unit 5 and the detection field of view 6c of the second detection unit 6.
[0074] Furthermore, in the infrared detection device 2, for example, as in this embodiment, it is preferable that the target surface X2 is the surface of the target X1 transported along the first direction D1, and the first optical system 9 converts a third entrance field of view angle θ10 as viewed in the second direction D2 in the first detection optical path 5b on the entrance side into a third exit field of view angle θ9 of the first detection optical path 5d on the exit side, and that the third entrance field of view angle θ10 is larger than the third exit field of view angle θ9.
[0075] According to this configuration, the third entrance field of view angle θ10 is larger than the third exit field of view angle θ9, so that the length of the first direction D1 in the detection field of view 5c of the first detection unit 5 can be made longer, since the target surface X2 is the surface of the target object X1 transported along the first direction D1.
[0076] Furthermore, in the infrared detection device 2, for example, as in the present embodiment, the first optical system 9 is a single reflector (in this embodiment, the first reflector) 9a having a reflecting surface (in this embodiment, the first reflecting surface) 9b that reflects the infrared rays incident from the target surface X2 toward the first sensor 8, and the reflecting surface 9b is preferably formed concavely when viewed in the first direction D1.
[0077] According to this configuration, the reflecting surface 9b is formed in a concave shape when viewed in the first direction D1. As a result, the reflecting surface 9b emits the infrared rays incident from the target surface X2 toward the first sensor 8, so that the first incident field angle θ6 becomes smaller than the first exit field angle θ5.
[0078] Furthermore, in the infrared detection device 2, for example, as in the present embodiment, the first optical system 9 is a single reflector (in this embodiment, the first reflector) 9a having a reflecting surface (in this embodiment, the first reflecting surface) 9b that reflects the infrared rays incident from the target surface X2 toward the first sensor 8, and it is preferable that the reflecting surface 9b is formed concavely when viewed in the first direction D1 and is formed convexly in a cross section taken along a plane including the first direction D1 and the second direction D2.
[0079] According to this configuration, the reflecting surface 9b is formed in a concave shape when viewed in the first direction D1. As a result, the reflecting surface 9b emits the infrared rays incident from the target surface X2 toward the first sensor 8, so that the first incident field angle θ6 becomes smaller than the first exit field angle θ5.
[0080] Moreover, the reflective surface 9b is formed in a convex shape in a cross section taken along a plane including the first direction D1 and the second direction D2. As a result, the reflective surface 9b emits the infrared rays incident from the target surface X2 toward the first sensor 8, so that the third incident field angle θ10 becomes larger than the third exit field angle θ9.
[0081] Furthermore, it is preferable that the infrared detection device 2 further includes a first heat transfer section 7f connected to the first sensor 8 and the first optical system 9, respectively, for heat conduction between the first sensor 8 and the first optical system 9, as in the present embodiment.
[0082] According to this configuration, since the first heat transfer section 7f is connected to the first sensor 8 and the first optical system 9, heat is conducted between the first sensor 8 and the first optical system 9. This makes it possible to suppress the occurrence of a temperature difference between the first sensor 8 and the first optical system 9.
[0083] Furthermore, as in this embodiment, the infrared detection device 2 further includes a first heat transfer section 7f connected to the first sensor 8 and the first optical system 9, respectively, for heat conduction between the first sensor 8 and the first optical system 9, and a second heat transfer section 7g connected to the second sensor 10 and the second optical system 11, respectively, for heat conduction between the second sensor 10 and the second optical system 11, and it is preferable that the first heat transfer section 7f and the second heat transfer section 7g are connected to each other for heat conduction between the first heat transfer section 7f and the second heat transfer section 7g.
[0084] According to this configuration, the first heat transfer section 7f and the second heat transfer section 7g are connected to each other, so that heat is conducted between the first sensor 8, the second sensor 10, the first optical system 9, and the second optical system 11. This makes it possible to suppress the occurrence of a temperature difference between the first sensor 8, the second sensor 10, the first optical system 9, and the second optical system 11.
[0085] Furthermore, it is preferable that the temperature measuring device 1 is configured to include, for example, the infrared detection device 2 and a processing unit 3b that calculates the temperature of the target surface X2 based on the amount of infrared light detected by the first detection unit 5 and the second detection unit 6, as in this embodiment.
[0086] According to this configuration, when viewed in the first direction D1, the intersection angle θ1 between the optical axis 5a of the first detection unit 5 and the target surface X2 is different from the intersection angle θ2 between the optical axis 6a of the second detection unit 6 and the target surface X2, so the processing unit 3b calculates the temperature of the target surface X2 based on the amount of infrared rays detected by the first detection unit 5 and the second detection unit 6. This makes it possible to measure the temperature of the target surface X2.
[0087] Moreover, the infrared detection method is preferably a method in which the infrared detection device 2 is used to detect infrared rays from the target surface X2, as in this embodiment.
[0088] According to this method, it is possible to prevent the length of the detection field of view 5c of the first detection unit 5 in the second direction D2 from becoming long.
[0089] The temperature measuring device 1, the infrared detecting device 2, and the infrared detecting method are not limited to the configurations of the above-mentioned embodiments, and are not limited to the above-mentioned effects. Of course, the temperature measuring device 1, the infrared detecting device 2, and the infrared detecting method can be modified in various ways without departing from the gist of the present invention. For example, it is of course possible to arbitrarily select one or more of the configurations and methods according to the various modified examples described below and adopt them in the configurations and methods according to the above-mentioned embodiments.
[0090] (1) The infrared detection device 2 according to the above embodiment is configured to include a first detection unit 5 and a second detection unit 6. However, the infrared detection device 2 is not limited to this configuration. For example, the infrared detection device 2 may be configured to include only the first detection unit 5 and not include the second detection unit 6.
[0091] (2) In addition, in the infrared detection device 2 according to the above embodiment, the second detection unit 6 is configured to include the second sensor 10 and the second optical system 11. However, the infrared detection device 2 is not limited to such a configuration. For example, the second detection unit 6 may be configured to include only the second sensor 10, and not include the second optical system 11.
[0092] (3) In addition, in the infrared detection device 2 according to the above embodiment, the optical axis 5a of the first detection unit 5 perpendicularly intersects with the target surface X2 when viewed in the second direction D2. However, the infrared detection device 2 is not limited to such a configuration. For example, the optical axis 5a of the first detection unit 5 may be configured to intersect with the target surface X2 at an incline when viewed in the second direction D2. That is, for example, the optical axis 5a of the first detection unit 5 may be configured to intersect with the target surface X2 at an incline when viewed in the first direction D1 and the second direction D2.
[0093] (4) In addition, in the infrared detection device 2 according to the above embodiment, the optical axis 6a of the second detection unit 6 intersects with the target surface X2 at an angle when viewed in the first direction D1, and intersects with the target surface X2 perpendicularly when viewed in the second direction D2. That is, the second intersection angle θ2 is less than 90°, and the fourth intersection angle θ4 is 90°. However, the infrared detection device 2 is not limited to such a configuration.
[0094] For example, the optical axis 6a of the second detection unit 6 may be configured to intersect with the target surface X2 at an angle when viewed in the first direction D1 and when viewed in the second direction D2. That is, the second intersection angle θ2 and the fourth intersection angle θ4 may each be less than 90°.
[0095] Also, for example, the optical axis 6a of the second detection unit 6 may be configured to perpendicularly intersect with the target surface X2 when viewed in the first direction D1 and the second direction D2. That is, the second intersection angle θ2 and the fourth intersection angle θ4 may each be 90°.
[0096] Also, for example, the optical axis 6a of the second detection unit 6 may be configured to intersect the target surface X2 perpendicularly when viewed in the first direction D1, and to intersect the target surface X2 at an angle when viewed in the second direction D2. That is, the second intersection angle θ2 may be 90°, and the fourth intersection angle θ4 may be less than 90°.
[0097] (5) In addition, in the infrared detection device 2 according to the above embodiment, the second entrance field angle θ8 is smaller than the second exit field angle θ7. However, the infrared detection device 2 is not limited to such a configuration. For example, the second entrance field angle θ8 may be larger than the second exit field angle θ7. Also, for example, the second entrance field angle θ8 may be the same as the second exit field angle θ7.
[0098] (6) In addition, in the infrared detection device 2 according to the above embodiment, the third entrance field angle θ10 is larger than the third exit field angle θ9. However, the infrared detection device 2 is not limited to such a configuration. For example, the third entrance field angle θ10 may be smaller than the third exit field angle θ9. Also, for example, the third entrance field angle θ10 may be the same as the third exit field angle θ9.
[0099] (7) In addition, in the infrared detection device 2 according to the above embodiment, the optical systems 9 and 11 are configured to be one optical member, and the optical member is the reflector 9a or 11a. However, the infrared detection device 2 is not limited to such a configuration. For example, the optical systems 9 and 11 may be configured to be a plurality of optical members. Also, for example, the optical member may be at least one lens, or may be at least one reflector and at least one lens.
[0100] When the optical system 9, 11 is composed of a plurality of optical members, the incident-side detection optical paths 5b, 6b refer to the detection optical paths between the target surface X2 and the optical member arranged on the most incident side, and the exit-side detection optical paths 5d, 6d refer to the detection optical paths between the sensors 8, 10 and the optical member arranged on the most exit side. The detection optical paths between the optical member arranged on the most incident side and the optical member arranged on the most exit side are called detection optical paths within the optical system.
[0101] (8) In addition, in the infrared detection device 2 according to the above embodiment, the first sensor 8 and the first optical system 9 are connected to the first heat transfer section 7f, the second sensor 10 and the second optical system 11 are connected to the second heat transfer section 7g, and the first heat transfer section 7f and the second heat transfer section 7g are connected to each other. However, the infrared detection device 2 is not limited to such a configuration.
[0102] For example, the first heat transfer section 7f and the second heat transfer section 7g may be configured to be separated from each other so as not to conduct heat therebetween. Also, for example, the first sensor 8 and the first optical system 9 may be configured to be separated from each other so as not to conduct heat therebetween. Also, for example, the second sensor 10 and the second optical system 11 may be configured to be separated from each other so as not to conduct heat therebetween. [Explanation of symbols]
[0103] 1...temperature measuring device, 2...infrared detecting device, 2a...housing, 3...device main body, 3a...input section, 3b...processing section, 3c...output section, 4...communication means, 5...first detecting section, 5a...optical axis, 5b...(entrance side) first detection optical path, 5c...detection field of view, 5d...(exit side) first detection optical path, 6...second detecting section, 6a...optical axis, 6b...(entrance side) second detection optical path, 6c...detection field of view, 6d...(exit side) second detection optical path, 7...fixing means, 7a...base section, 7b...first fixing section, 7c...second fixing section, 7d...third fixing section, 7e...fourth fixing section, 7f...first heat transfer section, 7g...second heat transfer section, 8...first sensor, 8a...light receiving element, 8b...lens, 8c...diaphragm, 8d... Sensor body, 9...first optical system, 9a...first reflecting material, 9b...first reflecting surface, 10...second sensor, 11...second optical system, 11a...second reflecting material, 11b...second reflecting surface, D1...first horizontal direction (first direction), D2...second horizontal direction (second direction), D3...up-down direction (third direction), D4...fourth direction, X1...object, X2...object surface, θ1...first intersection angle, θ2...second intersection angle, θ3...third intersection angle, θ4...fourth intersection angle, θ5...first exit field of view angle, θ6...first entrance field of view angle (first angle), θ7...second exit field of view angle, θ8...second entrance field of view angle (second angle), θ9...third exit field of view angle, θ10...third entrance field of view angle (third angle)
Claims
1. An infrared detection device that detects infrared rays from a target surface respectively along a first direction and a second direction orthogonal to each other, having a first detection optical path that spreads toward the target surface, and including a first detection unit that detects the amount of infrared rays incident from the first detection optical path, wherein the optical axis of the first detection unit intersects the target surface obliquely in the view in the first direction, the first detection unit includes a first sensor that detects the amount of infrared rays incident from the first detection optical path, and a first optical system that emits the infrared rays incident from the target surface toward the first sensor, wherein the first optical system converts a first incident field of view angle in the view in the first direction in the incident-side first detection optical path to a first exit field of view angle of the first detection optical path on the exit side, and the first incident field of view angle is smaller than the first exit field of view angle. The infrared detection device.
2. further having a second detection optical path that spreads toward the target surface, and further including a second detection unit that detects the amount of infrared rays incident from the second detection optical path, wherein the optical axis of the second detection unit intersects the target surface obliquely in the view in the first direction, the second detection unit includes a second sensor that detects the amount of infrared rays incident from the second detection optical path, and a second optical system that emits the infrared rays incident from the target surface toward the second sensor, wherein the second optical system converts a second incident field of view angle in the view in the first direction in the incident-side second detection optical path to a second exit field of view angle of the second detection optical path on the exit side, and the second incident field of view angle is smaller than the second exit field of view angle. The infrared detection device according to claim 1.
3. In the view in the first direction, the intersection angle between the optical axis of the first detection unit and the target surface is smaller than the intersection angle between the optical axis of the second detection unit and the target surface, and the first incident field of view angle is smaller than the second incident field of view angle. The infrared detection device according to claim 2.
4. the target surface is the surface of an object conveyed along the first direction, wherein the first optical system converts a third incident field of view angle in the view in the second direction in the incident-side first detection optical path to a third exit field of view angle of the first detection optical path on the exit side, and the third incident field of view angle is larger than the third exit field of view angle. The infrared detection device according to any one of claims 1 to 3.
5. The first optical system is a single reflecting material including a reflecting surface that reflects the infrared rays incident from the target surface toward the first sensor. The infrared detection device according to any one of claims 1 to 3, wherein the reflecting surface is formed in a concave shape in the view in the first direction.
6. The first optical system is a single reflecting material including a reflecting surface that reflects infrared rays incident from the target surface toward the first sensor, The infrared detection device according to claim 4, wherein the reflecting surface is formed in a concave shape in the view in the first direction and is formed in a convex shape in a cross section by a plane including the first direction and the second direction.
7. The infrared detection device according to any one of claims 1 to 3, further comprising a first heat transfer part respectively connected to the first sensor and the first optical system in order to conduct heat between the first sensor and the first optical system.
8. A first heat transfer part respectively connected to the first sensor and the first optical system in order to conduct heat between the first sensor and the first optical system; A second heat transfer part respectively connected to the second sensor and the second optical system in order to conduct heat between the second sensor and the second optical system, and further comprising: The infrared detection device according to claim 2 or 3, wherein the first heat transfer part and the second heat transfer part are connected to each other in order to conduct heat between the first heat transfer part and the second heat transfer part.
9. An infrared detection device according to any one of claims 1 to 3; A temperature measurement device, comprising a processing unit that calculates the temperature of the target surface based on the amount of infrared rays detected by the first detection unit and the second detection unit.
10. An infrared detection method for detecting infrared rays from the target surface by using the infrared detection device according to any one of claims 1 to 3.